JP2020167380A - 基板処理装置 - Google Patents
基板処理装置 Download PDFInfo
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- 239000000758 substrate Substances 0.000 title claims abstract description 41
- 239000012212 insulator Substances 0.000 claims abstract description 25
- 239000002184 metal Substances 0.000 claims description 15
- 229910052751 metal Inorganic materials 0.000 claims description 15
- 239000010453 quartz Substances 0.000 claims description 10
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 10
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 claims description 8
- YCKRFDGAMUMZLT-UHFFFAOYSA-N Fluorine atom Chemical compound [F] YCKRFDGAMUMZLT-UHFFFAOYSA-N 0.000 claims description 7
- 229910052731 fluorine Inorganic materials 0.000 claims description 7
- 239000011737 fluorine Substances 0.000 claims description 7
- 239000011347 resin Substances 0.000 claims description 7
- 229920005989 resin Polymers 0.000 claims description 7
- 230000005284 excitation Effects 0.000 claims description 4
- 239000000126 substance Substances 0.000 claims description 4
- 238000009832 plasma treatment Methods 0.000 abstract description 4
- 239000007789 gas Substances 0.000 description 13
- 230000005684 electric field Effects 0.000 description 10
- 239000000463 material Substances 0.000 description 10
- 238000010586 diagram Methods 0.000 description 8
- 238000004088 simulation Methods 0.000 description 5
- 230000002159 abnormal effect Effects 0.000 description 4
- 230000005672 electromagnetic field Effects 0.000 description 4
- 239000003990 capacitor Substances 0.000 description 2
- 230000008878 coupling Effects 0.000 description 2
- 238000010168 coupling process Methods 0.000 description 2
- 238000005859 coupling reaction Methods 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 239000012495 reaction gas Substances 0.000 description 2
- 230000001629 suppression Effects 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 239000011261 inert gas Substances 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000003071 parasitic effect Effects 0.000 description 1
- 230000002040 relaxant effect Effects 0.000 description 1
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- H—ELECTRICITY
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- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32431—Constructional details of the reactor
- H01J37/3244—Gas supply means
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- H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
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- H01J37/32431—Constructional details of the reactor
- H01J37/32798—Further details of plasma apparatus not provided for in groups H01J37/3244 - H01J37/32788; special provisions for cleaning or maintenance of the apparatus
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- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
- H01L21/306—Chemical or electrical treatment, e.g. electrolytic etching
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- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67017—Apparatus for fluid treatment
- H01L21/67063—Apparatus for fluid treatment for etching
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- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
- H01L21/68714—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support
- H01L21/68735—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support characterised by edge profile or support profile
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- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
- H01L21/68714—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support
- H01L21/68757—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support characterised by a coating or a hardness or a material
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- H—ELECTRICITY
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- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
- H01L21/68714—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support
- H01L21/68792—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support characterised by the construction of the shaft
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
- H01J37/32366—Localised processing
Abstract
Description
図1は、基板処理装置10の構成例を示す図である。この基板処理装置10は基板のベベル処理装置として提供し得る。ベベル処理は、ベベルのエッチング、ベベルの成膜、ベベルの膜の改質を含む。この基板処理装置10は、接地電極として機能するチャンバ12を備えている。チャンバ12の材料は金属である。チャンバ12の中で、処理対象となる基板はサセプタ14にのせられる。サセプタ14は、基板よりも小さい形状を有することで、ベベルがサセプタ14から突出する。つまりベベルの全体が露出する。サセプタ14の材料は例えばAl又はTiである。
(1)プレートとサセプタ14をとおる経路のインピーダンスである第1インピーダンス
(2)プレートとFCR30をとおる経路のインピーダンスである第2インピーダンス
(3)排気ダクト32をとおる経路のインピーダンスである第3インピーダンス
一例によれば、第1〜第3インピーダンスのうち第2インピーダンスを最小にし得る。これにより、外側プレート40とFCR30の間に局所的なプラズマを生じさせて基板のベベルにプラズマ処理を施すことができる。
Claims (13)
- サセプタと、
前記サセプタを支持するシャフトと、
前記サセプタの側面との間に間隙を設けつつ前記サセプタを囲むフローコントロールリングと、
前記フローコントロールリングの直上にある排気ダクトと、
前記サセプタの上方にあるプレートと、
前記サセプタ、前記フローコントロールリング、前記排気ダクト及び前記プレートを囲むチャンバと、
前記シャフトを前記チャンバにつなぎ、少なくとも一部が絶縁体である接続部と、を備えたことを特徴とする基板処理装置。 - 前記接続部は、前記シャフトにつながり前記シャフトよりも幅が大きく前記チャンバの外に位置する幅広部と、前記チャンバのうち前記シャフトを囲む部分である包囲部と前記幅広部との間に設けられたベローズと、を有することを特徴とする請求項1に記載の基板処理装置。
- 前記絶縁体は、石英、アルミナ又はフッ素含有樹脂であることを特徴とする請求項1又は2に記載の基板処理装置。
- 前記プレートは、前記サセプタの直上にある内側プレートと、前記内側プレートを囲み前記フローコントロールリングの直上にある外側プレートと、を有し、
前記内側プレートは絶縁体であり、前記外側プレートは金属であることを特徴とする請求項1から3のいずれか1項に記載の基板処理装置。 - 前記プレートから、前記サセプタ、前記シャフト及び前記接続部を経由して、前記チャンバに至る経路の合成インピーダンスを500Ω以上としたことを特徴とする請求項1から4のいずれか1項に記載の基板処理装置。
- 前記絶縁体は、前記シャフトを囲み、前記チャンバと前記シャフトの間に位置することを特徴とする請求項1に記載の基板処理装置。
- サセプタと、
前記サセプタの側面との間に間隙を設けつつ前記サセプタを囲む、フローコントロールリングと、
前記フローコントロールリングの直上にある排気ダクトと、
前記サセプタの上方にあるプレートと、
前記サセプタ、前記フローコントロールリング、前記排気ダクト及び前記プレートを囲むチャンバと、を備え、
前記フローコントロールリングは、前記チャンバに接する金属部分と、前記排気ダクトの直下にある絶縁体部分と、を有することを特徴とする基板処理装置。 - 前記フローコントロールリングの上面には前記金属部分と前記絶縁体部分が露出し、前記フローコントロールリングの下面には前記金属部分だけが露出したこと特徴とする請求項7に記載の基板処理装置。
- 前記排気ダクトは絶縁体であることを特徴とする請求項7又は8に記載の基板処理装置。
- 前記絶縁体部分は石英、アルミナ又はフッ素含有樹脂であることを特徴とする請求項7から9のいずれか1項に記載の基板処理装置。
- サセプタと、
前記サセプタの側面との間に間隙を設けつつ前記サセプタを囲むフローコントロールリングと、
前記フローコントロールリングの直上にある排気ダクトと、
前記サセプタと前記フローコントロールリングの上方にあるプレートと、
前記サセプタ、前記フローコントロールリング、前記排気ダクト及び前記プレートを囲むチャンバと、を備え、
前記プレートと前記サセプタをとおる経路のインピーダンスである第1インピーダンス、前記プレートと前記フローコントロールリングをとおる経路のインピーダンスである第2インピーダンス、前記排気ダクトと前記フローコントロールリングをとおる経路のインピーダンスである第3インピーダンスのうち、前記第2インピーダンスを最小にしたことを特徴とする基板処理装置。 - 前記プレートと前記サセプタの間の距離をd1、前記プレートと前記サセプタが対向する面積をS1、前記プレートと前記サセプタの間にある物質の誘電率をε1、前記プレートに印加するプラズマ励起周波数をf1としたときのd1/2πf1ε1S1を50Ωより大きくし、
前記排気ダクトと前記フローコントロールリングの間の距離をd2、前記排気ダクトと前記フローコントロールリングが対向する面積をS2、前記排気ダクトと前記フローコントロールリングの間にある物質の誘電率をε2、前記プレートに印加するプラズマ励起周波数をf2としたときのd2/2πf2ε2S2を50Ωより大きくしたことを特徴とする請求項11に記載の基板処理装置。 - 前記d1/2πf1ε1S1は500Ωより大きくし、前記d2/2πf2ε2S2を500Ωより大きくしたことを特徴とする請求項12に記載の基板処理装置。
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