JP3972126B2 - 紫外線発生源、紫外線照射処理装置及び半導体製造装置 - Google Patents
紫外線発生源、紫外線照射処理装置及び半導体製造装置 Download PDFInfo
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- JP3972126B2 JP3972126B2 JP2004160113A JP2004160113A JP3972126B2 JP 3972126 B2 JP3972126 B2 JP 3972126B2 JP 2004160113 A JP2004160113 A JP 2004160113A JP 2004160113 A JP2004160113 A JP 2004160113A JP 3972126 B2 JP3972126 B2 JP 3972126B2
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- B65D85/00—Containers, packaging elements or packages, specially adapted for particular articles or materials
- B65D85/30—Containers, packaging elements or packages, specially adapted for particular articles or materials for articles particularly sensitive to damage by shock or pressure
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- B65D85/345—Containers, packaging elements or packages, specially adapted for particular articles or materials for articles particularly sensitive to damage by shock or pressure for fruit, e.g. apples, oranges or tomatoes having a meshed or apertured closure to allow contents to breathe
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- B—PERFORMING OPERATIONS; TRANSPORTING
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- B65D85/00—Containers, packaging elements or packages, specially adapted for particular articles or materials
- B65D85/50—Containers, packaging elements or packages, specially adapted for particular articles or materials for living organisms, articles or materials sensitive to changes of environment or atmospheric conditions, e.g. land animals, birds, fish, water plants, non-aquatic plants, flower bulbs, cut flowers or foliage
- B65D85/52—Containers, packaging elements or packages, specially adapted for particular articles or materials for living organisms, articles or materials sensitive to changes of environment or atmospheric conditions, e.g. land animals, birds, fish, water plants, non-aquatic plants, flower bulbs, cut flowers or foliage for living plants; for growing bulbs
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- C—CHEMISTRY; METALLURGY
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- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
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- C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
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- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
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- A—HUMAN NECESSITIES
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- A01G—HORTICULTURE; CULTIVATION OF VEGETABLES, FLOWERS, RICE, FRUIT, VINES, HOPS OR SEAWEED; FORESTRY; WATERING
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
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Description
第2の発明は、第1の発明の紫外線発生源に係り、前記紫外線ランプと前記保護管との間の隙間が大気圧となっていることを特徴とし、
第3の発明は、第1の発明の紫外線発生源に係り、前記一つの紫外線ランプを封止した保護管が複数並行して並べられてなることを特徴とし、
第4の発明は、第1乃至第3の発明のいずれか一の紫外線発生源に係り、 前記紫外線ランプは放電により紫外線を発生するエキシマ紫外線ランプであることを特徴とし、
第5の発明は、第1乃至第4の発明のいずれか一の紫外線発生源に係り、前記紫外線発生源から発生する紫外線を反射により一定方向に向かうようにする紫外線反射板を設けたことを特徴とし、
第6の発明は、第1乃至第5の発明のいずれか一の紫外線発生源に係り、前記紫外線発生源から発生する紫外線から特定範囲の波長を選択して透過させるフィルタを備えていることを特徴とし、
第7の発明は、紫外線照射処理装置に係り、減圧可能な処理室と、前記処理室内に設けられた、紫外線照射処理を受ける基板を保持する基板保持具と、前記基板保持具に対向するように前記処理室内に設けられた第1乃至第6の発明のいずれか一の紫外線発生源とを備えたことを特徴とし、
第8の発明は、第1の発明の紫外線照射処理装置に係り、前記基板保持具は、上下運動、又は、前記紫外線発生源に対する回転運動或いは対向面内往復直線運動のうち少なくともいずれか一を行い得るようになっていることを特徴とし、
第9の発明は、第7又は第8の発明のいずれか一の紫外線照射処理装置に係り、前記処理室に、窒素ガス又は不活性ガスの供給源、酸素ガスの供給源、及びシロキサン化合物の供給源のうち少なくともいずれか一が接続されていることを特徴とし、
第10の発明は、第7乃至第9の発明のいずれか一の紫外線照射処理装置に係り、前記基板を加熱する手段を有することを特徴とし、
第11の発明は、半導体製造装置に係り、第7乃至第9の発明のいずれか一の紫外線照射処理装置と、加熱装置とが直列に接続され、又はトランスファチャンバを介して並列に接続され、前記基板を大気に曝さずに、紫外線照射処理と、加熱処理とを連続して行うことができるようにしたことを特徴とし、
第12の発明は、半導体製造装置に係り、成膜装置と、第7乃至第10の発明のいずれか一の紫外線照射処理装置とが直列に接続され、又はトランスファチャンバを介して並列に接続され、前記基板を大気に曝さずに、成膜と、紫外線照射処理と、加熱処理とを連続して行うことができるようにしたことを特徴とする半導体製造装置。
第13の発明は、半導体製造装置に係り、成膜装置と、第7乃至第9の発明のいずれか一の紫外線照射処理装置と、加熱装置とが直列に接続され、又はトランスファチャンバを介して並列に接続され、前記基板を大気に曝さずに、成膜と、紫外線照射処理と、加熱処理とを連続して行うことができるようにしたことを特徴とし、
第14の発明は、第12又は第13の発明のいずれか一の半導体製造装置に係り、前記成膜装置は、化学気相成長装置、又は塗布装置であることを特徴とし、
第15の発明は、第14の発明の半導体製造装置に係り、前記半導体製造装置は、低誘電率絶縁膜を形成する工程であって、Si-CH3結合を有する絶縁膜を形成した後、Si-CH3結合からCH3基を切り離す工程に用いることを特徴とし、
第16の発明は、第15の発明の半導体製造装置に係り、前記半導体製造装置は、絶縁膜中の空孔壁に残った未結合ボンドを再結合させて、前記絶縁膜の機械的強度を向上させる工程に用いることを特徴としている。
(本発明の第1の実施の形態である紫外線発生源の説明)
図1(a)は、本発明の第1の実施の形態に係る紫外線発生源の構成を示す側面図である。図1(b)は、図1(a)のI−I線に沿う断面図である。
(本発明の第2の実施の形態である紫外線照射処理装置の説明)
図3は、本発明の第2の実施の形態に係る紫外線照射処理装置102の構成を示す側面図である。
(本発明の第3の実施の形態である半導体製造装置の説明)
本発明の半導体製造装置においては、第2の実施の形態の紫外線照射処理装置で加熱手段を省略した紫外線照射処理装置と加熱装置との組み合わせ、または、成膜装置と第2の実施の形態の紫外線照射処理装置(加熱手段を備えている場合)との組み合わせ、または、成膜装置と第2の実施の形態の紫外線照射処理装置(加熱手段を備えていない場合)と加熱装置との組み合わせが可能であり、かつ各組み合わせにおいてその構成装置が順に直列に、又はトランスファチャンバを介して並列に接続されて装置を構成することが可能である。成膜装置として、化学気相成長装置(CVD装置)や塗布装置を用いることができる。
(本発明の第4の実施の形態である低誘電率絶縁膜の形成方法の説明)
次に、この発明の第4の実施の形態である低誘電率絶縁膜の形成方法について説明する。この方法においては、上記第3の実施の形態で説明した図5又は図6に示す半導体製造装置105、106のうちいずれか一を用いることができる。
(b)スピンコートにより、Si-CH3結合を有するシロキサン系の有機SOGを基板上に塗布し、形成された塗布膜を加熱して溶剤を蒸発させ、Si-CHn結合を含む塗布絶縁膜を形成する。
以下に示すプラズマCVDの成膜条件によりシリコン基板上にシリコン酸化膜を形成し、下記の紫外線処理条件により紫外線照射処理を行なった。
(成膜条件I)
(i)成膜ガス条件
HMDSOガス流量:50 sccm
H2Oガス流量:1000 sccm
C4F8ガス流量:50 sccm
ガス圧力:1.75Torr
(ii)プラズマ化条件
高周波電力(13.56MHz)PHF:300W
低周波電力(380KHz)PLF:0W
(iii)基板加熱温度:375℃
(iv)成膜されたシリコン酸化膜
膜厚:650nm
(紫外線処理条件)
(i)紫外線源:重水素ランプ
紫外線波長:120〜400nm
電力:30W
(ii)基板加熱:400℃
(iii)処理時間:30分
この結果、平均空孔サイズは、紫外線処理前で1.22nmであったものが、紫外線処理後に1.36nmとなった。また、紫外線照射前にヤング率12.73GPa、硬度1.87GPaであったものが、紫外線照射後にヤング率23.98GPa、硬度3.01GPaになった。このように、紫外線照射により膜強度を維持/向上させ、かつ比誘電率を低減することができた。
第2実施例では、シリコン酸化膜は、プラズマCVD法により以下の成膜条件で形成された。
(i)成膜ガス条件
HMDSOガス流量:50 sccm
H2Oガス流量:1000 sccm
ガス圧力:1.75Torr
(ii)プラズマ化条件
高周波電力(13.56MHz)PHF:300W
低周波電力(380KHz)PLF:0W
(iii)基板加熱温度:375℃
(iv)成膜されたシリコン酸化膜
膜厚:650nm
(紫外線処理条件)
(i)紫外線源:重水素ランプ
紫外線波長:120〜400nm
電力:30W
(ii)基板加熱:200、400℃
(iii)処理時間:20分
その結果、空孔サイズに関し、紫外線照射前に0.96nmであったものが、紫外線照射後、基板加熱温度が200℃の場合、1.02nmとなり、400℃の場合、1.17nmになった。また、比誘電率に関しては、紫外線照射前に凡そ2.58であったものが、紫外線照射後に2.42まで低減した。
第3実施例では、シリコン酸化膜は、プラズマCVD法により以下の成膜条件で形成された。
(i)成膜ガス条件
HMDSOガス流量:50 sccm
H2Oガス流量:1000 sccm
C2H4ガス流量:50 sccm
ガス圧力:1.75Torr
(ii)プラズマ化条件
高周波電力(13.56MHz)PHF:300W
低周波電力(380KHz)PLF:0W
(iii)基板加熱温度:400℃
(iv)成膜されたシリコン酸化膜
膜厚:650nm
(紫外線処理条件)
(i)紫外線源:重水素ランプ
紫外線波長:120〜400nm
電力:30W
(ii)基板加熱:400℃
(iii)処理時間:30分
その結果、比誘電率に関し、紫外線照射前に凡そ2.66であったものが、紫外線照射後に2.45まで低減した。この実施例で、比誘電率の低減割合が大きいのは、原料ガスにC2H4ガスを含むので、形成膜中のメチル基の濃度が高く、そのため空孔の生成量が多くなったためだと考えられる。言い換えれば、外線照射処理前の状態で弱い結合基の含有量が多い絶縁膜ほど比誘電率の低減効果が大きいといえる。
第4実施例では、シリコン酸化膜は、塗布法により以下の成膜条件で形成された。
(i)塗布条件
塗布溶液:アルキルシルセスキオキサンポリマー(MSQ)
回転速度:2000〜3000rpm
(ii)塗布後熱処理条件
加熱温度:400℃
(iii)成膜されたシリコン酸化膜
膜厚:400nm
(紫外線処理条件)
(i)紫外線源:重水素ランプ
紫外線波長:120〜400nm
電力:30W
(ii)基板加熱:400℃
(iii)処理時間:30分
その結果、平均空孔サイズは紫外線照射前は0.81nmであったものが、紫外線照射後に1.11nmとなった。すなわち、MSQを用いた塗布法により形成した塗布シリコン酸化膜でも紫外線照射により空孔サイズが大きくなることを確認できた。その塗布シリコン酸化膜も、Si−O−Siのシリカネットワーク構造(骨格構造)の一部にメチル基が結合した構造を有し、紫外線照射により、骨格構造に影響を与えずにメチル基が脱離し、空孔サイズが大きくなったと考えられる。
2 保護管
3 隙間
4 紫外線反射板
5a、5b キャップ
6a ガス導入口
6b ガス排出口
7b 引出し電極
8、11、35、36 配管
27、37 排気配管
21、53 紫外線照射処理チャンバ(紫外線照射処理装置)
22 基板保持台
23 加熱手段
24 回転軸
32、51 ロードロックチャンバ
33、55 トランスファチャンバ
42 被処理基板
52 成膜チャンバ(成膜装置)
54 アニールチャンバ(加熱装置)
91、92 基板保持具
101 紫外線発生源
102、103 紫外線照射処理装置
104、105 半導体製造装置
G1 窒素ガスの供給源
G2 不活性ガスの供給源
G3 酸素ガスの供給源
G4 シロキサン結合を有する化合物の供給源
Claims (16)
- 処理室に設置して紫外線を発生する紫外線発生源であって、
円柱状の紫外線ランプと、
紫外線を透過する材料からなり、一つの前記紫外線ランプを封止し、かつ窒素ガス又は不活性ガスが封入された円筒状の保護管と
を有し、
前記紫外線ランプから発生し、前記保護管を通して該保護管の外部に出射する紫外線を処理に用いることを特徴とする紫外線発生源。 - 前記紫外線ランプと前記保護管との間の隙間が大気圧となっていることを特徴とする請求項1に記載の紫外線発生源。
- 前記一つの紫外線ランプを封止した保護管が複数並行して並べられてなることを特徴とする請求項1に記載の紫外線発生源。
- 前記紫外線ランプは放電により紫外線を発生するエキシマ紫外線ランプであることを特徴とする請求項1乃至3のいずれか一に記載の紫外線発生源。
- 前記紫外線発生源から発生する紫外線を反射により一定方向に向かうようにする紫外線反射板を設けたことを特徴とする請求項1乃至4のいずれか一に記載の紫外線発生源。
- 前記紫外線発生源から発生する紫外線から特定範囲の波長を選択して透過させるフィルタを備えていることを特徴とする請求項1乃至5のいずれか一に記載の紫外線発生源。
- 減圧可能な処理室と、
前記処理室内に設けられた、紫外線照射処理を受ける基板を保持する基板保持具と、
前記基板保持具に対向するように前記処理室内に設けられた請求項1乃至6のいずれか一に記載の紫外線発生源とを備えたことを特徴とする紫外線照射処理装置。 - 前記基板保持具は、上下運動、又は、前記紫外線発生源に対する回転運動或いは対向面内往復直線運動のうち少なくともいずれか一を行い得るようになっていることを特徴とする請求項7記載の紫外線照射処理装置。
- 前記処理室に、窒素ガス又は不活性ガスの供給源、酸素ガスの供給源、及びシロキサン化合物の供給源のうち少なくともいずれか一が接続されていることを特徴とする請求項7又は8のいずれか一に記載の紫外線照射処理装置。
- 前記基板を加熱する手段を有することを特徴とする請求項7乃至9のいずれか一に記載の紫外線照射処理装置。
- 請求項7乃至9のいずれか一に記載の紫外線照射処理装置と、加熱装置とが直列に接続され、又はトランスファチャンバを介して並列に接続され、前記基板を大気に曝さずに、紫外線照射処理と、加熱処理とを連続して行うことができるようにしたことを特徴とする半導体製造装置。
- 成膜装置と、請求項7乃至10のいずれか一に記載の紫外線照射処理装置とが直列に接続され、又はトランスファチャンバを介して並列に接続され、前記基板を大気に曝さずに、成膜と、紫外線照射処理と、加熱処理とを連続して行うことができるようにしたことを特徴とする半導体製造装置。
- 成膜装置と、請求項7乃至9のいずれか一に記載の紫外線照射処理装置と、加熱装置とが直列に接続され、又はトランスファチャンバを介して並列に接続され、前記基板を大気に曝さずに、成膜と、紫外線照射処理と、加熱処理とを連続して行うことができるようにしたことを特徴とする半導体製造装置。
- 前記成膜装置は、化学気相成長装置、又は塗布装置であることを特徴とする請求項12又は13のいずれか一に記載の半導体製造装置。
- 前記半導体製造装置は、低誘電率絶縁膜を形成する工程であって、Si-CH3結合を有する絶縁膜を形成した後、Si-CH3結合からCH3基を切り離す工程に用いることを特徴とする請求項14記載の半導体製造装置。
- 前記半導体製造装置は、絶縁膜中の空孔壁に残った未結合ボンドを再結合させて、前記絶縁膜の機械的強度を向上させる工程に用いることを特徴とする請求項15記載の半導体製造装置。
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2005
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- 2005-03-24 EP EP05006546A patent/EP1601003A3/en not_active Withdrawn
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EP1601003A2 (en) | 2005-11-30 |
KR20060045595A (ko) | 2006-05-17 |
TWI254971B (en) | 2006-05-11 |
US20050263719A1 (en) | 2005-12-01 |
JP2005340665A (ja) | 2005-12-08 |
EP1601003A3 (en) | 2006-09-06 |
KR100767771B1 (ko) | 2007-10-18 |
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