JP6379550B2 - 成膜装置 - Google Patents
成膜装置 Download PDFInfo
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- JP6379550B2 JP6379550B2 JP2014055146A JP2014055146A JP6379550B2 JP 6379550 B2 JP6379550 B2 JP 6379550B2 JP 2014055146 A JP2014055146 A JP 2014055146A JP 2014055146 A JP2014055146 A JP 2014055146A JP 6379550 B2 JP6379550 B2 JP 6379550B2
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
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- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/4412—Details relating to the exhausts, e.g. pumps, filters, scrubbers, particle traps
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- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
- C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
- C23C16/34—Nitrides
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- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/455—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
- C23C16/45523—Pulsed gas flow or change of composition over time
- C23C16/45525—Atomic layer deposition [ALD]
- C23C16/45544—Atomic layer deposition [ALD] characterized by the apparatus
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- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/455—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
- C23C16/45563—Gas nozzles
- C23C16/45565—Shower nozzles
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- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/455—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
- C23C16/45563—Gas nozzles
- C23C16/45574—Nozzles for more than one gas
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/46—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for heating the substrate
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- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/458—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for supporting substrates in the reaction chamber
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Description
一方で、上下に積層された各ガス拡散空間から、互いに混ざらないように反応ガスを供給するためには、下段側のガス拡散空間を貫通して上段側のガス拡散空間へと連通するガス流路用の導管を多数設ける必要があり、シャワーヘッドの構造が非常に複雑になる。
前記処理室に設けられ、基板が載置される載置部と、
前記載置部に対向する平坦な面を備え、複数のガス供給口が形成されたシャワーヘッドと、
前記複数のガス供給口が形成された領域を囲んで下方側へ突出するように前記シャワーヘッドに設けられ、前記載置部における基板が載置される領域の外方側にて、当該載置部の上面との間に隙間を形成するように配置された環状突起部と、
前記シャワーヘッドの上方側に形成された天井部に設けられ、シャワーヘッドと天井部との間に囲まれた拡散空間に、各々横方向に前記複数種類の反応ガス、及び前記置換用のガスを広げるように周方向に沿ってガス吐出口が形成された複数のガス供給部と、
前記処理室内の真空排気を行う排気部と、を備え、
前記ガス供給部は、前記天井部側に形成されたガス供給路に対して、パッキング部材を介して連通するガス路が形成され、当該天井部に対してねじ止めによって固定される台座部と、前記ガス路から流れ込んだガスが拡散する空間を形成し、その側周面に前記ガス吐出口が形成されたヘッド部とを備え、
前記台座部は、前記パッキング部材と、前記ねじ止めのためのねじ穴の上端部に設けられ、前記天井部と接触する接触面が形成された突部とにおいて前記天井部に接触し、他の領域においては天井部との間に隙間が形成されていることを特徴とする。
(a)前記拡散空間の外縁は、前記載置部に載置された基板の外縁よりも内側に位置していること。前記基板が円板であり、前記拡散空間を平面で見たときの形状が円形であって、前記円板の半径をR、前記拡散空間の円の半径をrとしたとき、r/Rの値が4/15以上、9/10以下の範囲内であること。
(b)前記ガス供給部に形成されたガス吐出口は、前記シャワーヘッドを平面でみたとき、当該シャワーヘッドの中央部側と周縁部側とに向けて広がるガスの流れを形成する位置に設けられていること。前記ガス供給部は、前記シャワーヘッドの中心を囲む環上の互いに離れた位置に3個以上設けられていること。
(c)前記シャワーヘッドと天井部とが互いに異なる部材により構成され、
前記天井部を介してシャワーヘッドの温度を調整するための温度調整部と、前記拡散空間内に設けられ、前記シャワーヘッドと天井部との間の伝熱を促進するためにこれらの部材間を繋ぐ伝熱部材と、を備えること。前記シャワーヘッドは、複数のガス供給口が形成された領域と、その外方側の領域とを含む前記載置台に対向する面が一体に構成されていること。
(d)前記ガス供給部は、その側周面に前記ガス吐出口が形成され、直径が8ミリメートル以上、20ミリメートル以下の範囲の円筒形状のヘッド部を備えること。
一方、天板部材31の下方位置には、当該天板部材31の下面全体を覆うようにシャワーヘッド5が設けられている。シャワーヘッド5は、載置台2と対向する平坦な面を備えた例えば金属製の円板部分と、この円板の周縁部に形成され、下方側に突出した環状突起部53とを備えると共に、その上面側には凹部が形成されている。シャワーヘッド5における当該凹部の外周側には上方側に突出した平坦な面が形成されている。
直径300mm(半径150mm)のウエハWに対して、拡散空間50の直径が255mm(半径127.5mm)のシャワーヘッド5を載置台2上のウエハWの中央部の上方位置に配置すると、拡散空間50の外縁は、ウエハWの外縁よりも内側に位置することになる。このように、下面側から見た拡散空間50の面積がウエハWの面積よりも小さなシャワーヘッド5を用いることにより、置換ガスによる反応ガスの置換を短時間で行うことができる。
ここで台座部43と天板部材31との間に反応ガスが侵入して膜が成膜され、これらの部材43、31が固着すると、ガス供給部4を取り外す際などにパーティクルが発生する原因となる。そこで、本例の台座部43は、このようなパーティクルの発生を抑制できる構成となっている。
ガス供給口511から供給された塩化チタンガスは、処理空間313内を降下して載置台2上のウエハWに到達し、その一部はウエハWに吸着する。残る塩化チタンガスは、一部がウエハWの表面に吸着しながらウエハWの表面に沿って径方向に放射状に広がる。
上述の流れにおいて、シャワーヘッド5の周縁部に環状突起部53が設けられ、載置台2(カバー部材22)との間の隙間の高さが適切に設定されていることにより、処理空間313から周囲の排気ダクト13側へ向けてガスが流れる際の圧力損失が調整される。この結果、ウエハWに吸着するのに十分な時間だけ各反応ガスを処理空間313に滞留させた後、当該隙間が形成されている周方向外側へ向けて反応ガスを均等に排出することができる。
異なる成膜装置を用いてウエハWに塩化チタンガスとアンモニアガスとを交互に供給し、ALD法により成膜したTiN膜の特性を調べた。
A.実験条件
(実施例1−1)
図1〜図6を用いて説明した構成を備える成膜装置により、反応ガス及び置換用のガスを、塩化チタンガス→窒素ガス→アンモニアガス→窒素ガスの順で供給するサイクルを182サイクル実行し、成膜されたTiN膜の比抵抗(シート抵抗)及び膜厚を測定した。ウエハWの加熱温度は440℃に設定した。
(参考例1−1)
図9に示す成膜装置を用い、実施例1−1と同様の条件でTiN膜を成膜した。図9の成膜装置について説明すると、中央側から外周側へ向けて末広がりの形状の傾斜面310が形成された天板部材31aの中央部に、直径が200mmのシャワーヘッド5aを設け、その内側に8個のガス吐出口42を備えたガス供給部4aを図6に示した例と同様に配置した。中央部のガス供給部4aの直径は15mm、円環状に配置されたガス供給部4aの直径は10mmである。また、8個のガス供給部4aからなる円環の直径は100mmであり、シャワーヘッド5aからは底面側に形成されたガス供給口511に加え、側面に形成されたガス供給口521を介して処理空間313内にガスが供給される。なお、図9において図1〜図6に示した成膜装置と共通の構成要素には、これらの図で用いたものと同じ符号を付してある。
図10にウエハW面内における正規化された比抵抗の分布を示し、図11に正規化された膜厚の分布を示す。各図の横軸はウエハWの径方向の位置を示し、縦軸は各位置における比抵抗または膜厚の測定結果を正規化した値を示している。各図において実線が実施例1−1の結果を示し、破線が参考例1−1の結果を示している。正規化データは、比抵抗及び膜厚の各値の測定結果から、ウエハW面内におけるこれらの値の平均値を差し引くことにより求めた。
参考例1−1に比べて実施例1−1はウエハWの中央部側の高比抵抗領域、及び周縁部側の低比抵抗領域がならされ、より面内均一性が向上していることが分かる。また、「(標準偏差σ)/(平均値Ave)×100」で表されるユニフォーミティの値で比較すると、参考例1−1は5.3[%]であるのに対し、実施例1−1は2.6[%]となり、有意に面内均一性が向上している。
(実験1)の実施例、参考例に係る成膜装置におけるシャワーヘッド5、5aの置換性を比較した。
A.実験条件
既述の実施例1−1において、塩化チタンガスとアンモニアガスとの間に供給される置換用の窒素ガスの供給時間は0.5秒である。また既述の参考例1−1においては、実施例1−1と同じ流量の窒素ガスが0.3秒供給されている。
(比較例2−1)窒素ガスの供給時間を0.3秒とした点以外は実施例1−1と同様の条件で成膜を行った。
図12に実施例1−1、参考例1−1、及び比較例2−1にて成膜されたTiN膜の膜厚の分布を示す。横軸はウエハWの径方向の位置を示し、縦軸は各位置における膜厚を示している。図12において、実施例1−1は実線、参考例1−1は破線、比較例2−1は一点鎖線で示してある。
図1〜図6に示す成膜装置を用いて多数枚のウエハWを処理する際の熱履歴の影響を調べた。
A.実験条件
(予備実験3−1)ウエハWが載置される載置台2側のヒーター21の温度を変化させたときのシャワーヘッド5の下面の温度変化を調べた。天板部材31側のヒーター324の温度は175℃に固定した。
(実施例3−1)実施例1−1と同様の条件で1000枚のウエハWを処理したときの面間の比抵抗の変化を調べた。
図13に予備実験3−1の結果を示す。図13の横軸は時間、縦軸はシャワーヘッド5の下面の複数箇所の温度を測定した結果のうち、温度が最高となった箇所の温度を示している。また図13には、ヒーター21の設定温度をその設定期間と共に併記してある。
図13に示した結果によれば、載置台2側補ヒーター21の設定温度を550℃まで上昇させた場合であっても、シャワーヘッド5の下面の温度は、TiN膜の異常値が観察される200℃以下に抑えることができた。
ガス供給部4、4aの直径の違いがガスの拡散状態に与える影響をシミュレーションした。
A.シミュレーション条件
(実施例4−1)図1、図2に示すシャワーヘッド5において、拡散空間50内のガスの拡散状態をシミュレーションした。ガス供給部4の直径は19mmとした。
(参考例4−1)図9に示すシャワーヘッド5aにおいてシャワーヘッド5a内のガスの拡散状態をシミュレーションした。中心部のガス供給部4aを囲むガス供給部4aの直径は8mmとした。
図15(a)、(b)に示したシミュレーション結果によれば、直径の大きなガス供給部4の方がシャワーヘッド5内により均一にガスを分散させることができていることが分かる。また、ガス供給部4、4a付近のガスの流れをシミュレーションした他のシミュレーション結果によれば、直径の大きなガス供給部4の方が、ガス供給部4から供給されたガスが横方向に流れるベクトルが大きく、拡散空間50内のより広い領域に均一にガスを供給する能力を備えていることが分かっている。このように、シャワーヘッド5(拡散空間50)内に均一にガスを拡散させることができる結果、成膜対象のウエハWの表面にも均一に反応ガスを供給し、面内均一性の高い膜厚を有するTiN膜を成膜することができると考えられる。
1 処理容器
2 載置台
31 天板部材
313 処理空間
4、4a ガス供給部
41 ヘッド部
42 ガス吐出口
43 台座部
432 突部
433 Oリング
5、5a シャワーヘッド
50 拡散空間
511 ガス供給口
53 環状突起部
54 伝熱部材
7 制御部
Claims (8)
- 真空雰囲気である処理室内の基板に対して互いに反応する複数種類の反応ガスを順番に供給し、一の反応ガスの供給と次の反応ガスの供給との間に置換用のガスを供給して成膜処理を行う成膜装置において、
前記処理室に設けられ、基板が載置される載置部と、
前記載置部に対向する平坦な面を備え、複数のガス供給口が形成されたシャワーヘッドと、
前記複数のガス供給口が形成された領域を囲んで下方側へ突出するように前記シャワーヘッドに設けられ、前記載置部における基板が載置される領域の外方側にて、当該載置部の上面との間に隙間を形成するように配置された環状突起部と、
前記シャワーヘッドの上方側に形成された天井部に設けられ、シャワーヘッドと天井部との間に囲まれた拡散空間に、各々横方向に前記複数種類の反応ガス、及び前記置換用のガスを広げるように周方向に沿ってガス吐出口が形成された複数のガス供給部と、
前記処理室内の真空排気を行う排気部と、を備え、
前記ガス供給部は、前記天井部側に形成されたガス供給路に対して、パッキング部材を介して連通するガス路が形成され、当該天井部に対してねじ止めによって固定される台座部と、前記ガス路から流れ込んだガスが拡散する空間を形成し、その側周面に前記ガス吐出口が形成されたヘッド部とを備え、
前記台座部は、前記パッキング部材と、前記ねじ止めのためのねじ穴の上端部に設けられ、前記天井部と接触する接触面が形成された突部とにおいて前記天井部に接触し、他の領域においては天井部との間に隙間が形成されていることを特徴とする成膜装置。 - 前記拡散空間の外縁は、前記載置部に載置された基板の外縁よりも内側に位置していることを特徴とする請求項1に記載の成膜装置。
- 前記基板が円板であり、前記拡散空間を平面で見たときの形状が円形であって、前記円板の半径をR、前記拡散空間の円の半径をrとしたとき、r/Rの値が4/15以上、9/10以下の範囲内であることを特徴とする請求項2に記載の成膜装置。
- 前記ガス供給部に形成されたガス吐出口は、前記シャワーヘッドを平面でみたとき、当該シャワーヘッドの中央部側と周縁部側とに向けて広がるガスの流れを形成する位置に設けられていることを特徴とする請求項1ないし3のいずれか一つに記載の成膜装置。
- 前記ガス供給部は、前記シャワーヘッドの中心を囲む環上の互いに離れた位置に3個以上設けられていることを特徴とする請求項1ないし4のいずれか一つに記載の成膜装置。
- 前記シャワーヘッドと天井部とが互いに異なる部材により構成され、
前記天井部を介してシャワーヘッドの温度を調整するための温度調整部と、前記拡散空間内に設けられ、前記シャワーヘッドと天井部との間の伝熱を促進するためにこれらの部材間を繋ぐ伝熱部材と、を備えることを特徴とする請求項1ないし5のいずれか一つに記載の成膜装置。 - 前記シャワーヘッドは、複数のガス供給口が形成された領域と、その外方側の領域とを含む前記載置台に対向する面が一体に構成されていることを特徴とする請求項6に記載の成膜装置。
- 前記ガス供給部は、その側周面に前記ガス吐出口が形成され、直径が8ミリメートル以上、20ミリメートル以下の範囲の円筒形状のヘッド部を備えることを特徴とする請求項1ないし7のいずれか一つに記載の成膜装置。
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