JP2008066159A - プラズマ発生装置およびそれを用いるワーク処理装置 - Google Patents
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Abstract
【解決手段】導波管10を与圧する通風ファン80を設けるとともに、導波管10内のプラズマ発光を検知する光センサ981を設け、前記与圧によってプラズマ発生ノズル31側よりも導波管10内でのプラズマ点灯を生じ難くするとともに、点灯が生じても、制御手段がマイクロ波発生装置を停止させ、また処理ガス供給を停止させる。これによって、導波管内でのプラズマ点灯を防止し、プラズマ発生ノズル31における受信アンテナの損耗などの前記導波管10内でのプラズマ点灯による不具合の発生を抑えることができる。
【選択図】図1
Description
(1)上記実施形態では、複数のプラズマ発生ノズル31を一列に整列配置した例を示したが、ノズル配列はワークWの形状やマイクロ波電力のパワー等に応じて適宜決定すればよく、たとえばワークWの搬送方向に複数列プラズマ発生ノズル31をマトリクス整列したり、千鳥配列したりしてもよい。
(2)上記実施形態では、移動手段としてワークWを搬送する搬送手段Cが用いられ、その搬送手段Cとしては搬送ローラC1の上面にワークWを載置して搬送する形態を例示したが、この他に、たとえば上下の搬送ローラ間にワークWをニップさせて搬送させる形態、搬送ローラを用いず所定のバスケット等にワークを収納し前記バスケット等をラインコンベア等で搬送させる形態、或いはロボットハンド等でワークWを把持してプラズマ発生部30へ搬送させる形態であってもよい。或いは、移動手段としてはプラズマ発生ノズル31側を移動させる構成であってもよい。すなわち、ワークWとプラズマ発生ノズル31とは、プラズマ照射方向(Z方向)とは交差する面(X,Y面)上で相対的に移動すればよい。
(3)上記実施形態では、マイクロ波発生源として2.45GHzのマイクロ波を発生するマグネトロンを例示したが、マグネトロン以外の各種高周波電源も使用可能であり、また2.45GHzとは異なる波長のマイクロ波を用いるようにしてもよい。
(4)導波管10内におけるマイクロ波電力を測定するために、パワーメータを導波管10の適所に設置することが望ましい。たとえば、マイクロ波発生装置20のマイクロ波送信アンテナ22から放出されたマイクロ波電力に対する反射マイクロ波電力の比を知見するために、サーキュレータ50と第2導波管ピース12との間に、パワーメータを内蔵する導波管を介在させるようにすることができる。
20 マイクロ波発生装置
30 プラズマ発生部
31 プラズマ発生ノズル
32 中心導電体
33 ノズル本体
34 ノズルホルダ
344 ガス供給孔
40 スライディングショート
47,62 端板
48,63 開口
50 サーキュレータ
60 ダミーロード
70 スタブチューナ
80 通風ファン
90 全体制御部
901 CPU
902 メモリ
91 マイクロ波出力制御部
92 ガス流量制御部
921 処理ガス供給源
922 ガス供給管
923 流量制御弁
93 搬送制御部
931 駆動モータ
95 操作部
96,97,98 センサ入力部
981 光センサ
99 ファン駆動部
S ワーク処理装置
PU プラズマ発生ユニット
C 搬送手段
C1 搬送ローラ
W ワーク
Claims (5)
- マイクロ波を発生するマイクロ波発生手段と、前記マイクロ波を伝搬する導波管と、前記導波管に取付けられ、前記マイクロ波を受信してそのエネルギーに基づきプラズマ化したガスを生成して放出するプラズマ発生ノズルとを備えて構成されるプラズマ発生装置において、
前記導波管内を与圧する与圧手段を含むことを特徴とするプラズマ発生装置。 - 前記与圧手段は、通風ファンであることを特徴とする請求項1記載のプラズマ発生装置。
- 前記プラズマ発生ノズルは、前記導波管に複数個配列して取付けられることを特徴とする請求項1または2記載のプラズマ発生装置。
- 前記導波管内に設けられ、プラズマ点灯を検知する光センサと、
前記光センサによってプラズマ点灯が検知されると、前記マイクロ波発生手段を停止させ、またはガス供給源に処理ガスの供給を停止させる制御手段とをさらに備えることを特徴とする請求項1〜3のいずれか1項に記載のプラズマ発生装置。 - 前記請求項1〜4のいずれか1項に記載のプラズマ発生装置に、そのプラズマ照射方向とは交差する面上で前記ワークとプラズマ発生ノズルとを相対的に移動させる移動手段を備え、相対的な移動を行いつつ、前記ワークにプラズマを照射して所定の処理を施与することを特徴とするワーク処理装置。
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