JP2006153706A - 測温体および気相成長装置 - Google Patents
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Abstract
【課題】熱電対が昇温により膨張しても、降温により収縮しても、常にその測温接合部が保護管の先端部内面に接触した状態を維持でき、正確な測温ができる測温体ならびにこの測温体を用いた気相成長装置を得る。
【解決手段】測温体21は、保護管22と、この保護管22内に収容された熱電対23と、この熱電対23を付勢するコイルバネ30を備え、保護管22は、その先端部が閉じられ、基端部が開かれており、コイルバネ30は、熱電対23の測温接合部28が保護管22の先端部の内面に常時接するように付勢するようにしたものである。また、気相成長装置は、サセプタの温度を測定する測温体として、上記測温体を用いたものである。
【選択図】図1
【解決手段】測温体21は、保護管22と、この保護管22内に収容された熱電対23と、この熱電対23を付勢するコイルバネ30を備え、保護管22は、その先端部が閉じられ、基端部が開かれており、コイルバネ30は、熱電対23の測温接合部28が保護管22の先端部の内面に常時接するように付勢するようにしたものである。また、気相成長装置は、サセプタの温度を測定する測温体として、上記測温体を用いたものである。
【選択図】図1
Description
この発明は、測温体およびこの測温体をサセプタの温度測定用に用いた気相成長装置に関する。
図3は、従来の気相成長装置の要部を示すものである。
図3において、符号1はサセプタを示す。このサセプタ1は、ほぼ円盤状のもので、その裏側の中心部においてサセプタ支持軸2によって支持され、図示しない回転駆動部によって回転可能となっている。サセプタ1の下方には、円盤状のヒータ3が設けられ、このヒータ3によってサセプタ1上に載置された基板4、4・・が加熱されるようになっている。
図3において、符号1はサセプタを示す。このサセプタ1は、ほぼ円盤状のもので、その裏側の中心部においてサセプタ支持軸2によって支持され、図示しない回転駆動部によって回転可能となっている。サセプタ1の下方には、円盤状のヒータ3が設けられ、このヒータ3によってサセプタ1上に載置された基板4、4・・が加熱されるようになっている。
また、ヒータ3の下方には、リフレクター5が設けられ、これによりサセプタ1が効率よく加熱されるようになっている。
さらに、サセプタ支持軸2の内部には、これの長手方向に延びる空洞が形成され、この空洞内に測温体6が収容されている。
この測温体6は、サセプタ1の温度を測定するもので、熱電対7と、この熱電対7を内部に収容して保護する円筒状の保護管8とから構成されている。
さらに、サセプタ支持軸2の内部には、これの長手方向に延びる空洞が形成され、この空洞内に測温体6が収容されている。
この測温体6は、サセプタ1の温度を測定するもので、熱電対7と、この熱電対7を内部に収容して保護する円筒状の保護管8とから構成されている。
保護管8は、サセプタ1側に位置する先端部が閉じられてドーム状になっており、基端部は開かれて、熱電対7のリード部分が導出されている。
また、熱電対7の測温接合部9は、保護管8のドーム状の先端部の内面の接するように配置されており、これによりサセプタ1の温度が測定されるようになっている。
なお、熱電対7は、図示しない碍子管内に収められて保護管8内に収容されている。
また、熱電対7の測温接合部9は、保護管8のドーム状の先端部の内面の接するように配置されており、これによりサセプタ1の温度が測定されるようになっている。
なお、熱電対7は、図示しない碍子管内に収められて保護管8内に収容されている。
また、サセプタ1の上方には、フローチャンネル10が配置されている。このフローチャンネル10は、外形がほぼ角筒状のもので、その内部に図示しない成膜用の原料ガス供給装置からの原料ガスが供給され、サセプタ1上に載置され、加熱状態の基板4、4・・上にCVD反応により生成した薄膜が形成されるようになつている。
ところで、CVD法による半導体薄膜などの薄膜の成膜にあたっては、基板の表面温度、換言すればサセプタの温度が非常に重要な役割を担っており、その温度誤差を、400〜1300℃の温度範囲において、1〜3℃以内に収めることが必要とされている。
したがって、上述の気相成長装置での測温体6による温度測定においても、誤差のない極めて正確で、再現性のある測定が行わねばならない。
上記測温体6にあっては、その製造組立時に、熱電対7の測温接合部9が保護管8の先端部に内面に接した状態で熱電対7が保護管8に取り付けられている。 このため、使用時などの際に、サセプタ1やサセプタ支持軸2が加熱されて高温になると、熱電対7が熱膨張して伸長し、測温接合部9が行き場を失って折れ曲がり、保護管8の先端部から位置ずれを起こしてしまい、測温誤差を生じる恐れがある。
上記測温体6にあっては、その製造組立時に、熱電対7の測温接合部9が保護管8の先端部に内面に接した状態で熱電対7が保護管8に取り付けられている。 このため、使用時などの際に、サセプタ1やサセプタ支持軸2が加熱されて高温になると、熱電対7が熱膨張して伸長し、測温接合部9が行き場を失って折れ曲がり、保護管8の先端部から位置ずれを起こしてしまい、測温誤差を生じる恐れがある。
一方、このような熱電対7の熱膨張を見越して、予め測温接合部9を保護管8の先端部の内面から少し離した状態で組み立てることもある。しかし、このものでは、周囲の温度によっては先端部の内面にまで測温接合部9が届かない場合も生じ、測温誤差が生じる恐れがある。
このような問題を解決する方策として、例えば特開2002−372462号公報には、熱電対の測温接合部を保護管先端部の内面に、マグネシア、ジルコニアなどからなる固定材を用いて、固定した測温体が開示されている。
しかし、このものでは、保護管先端部にまで固定材をうまく入れることが難しく、また熱電対が劣化した際の交換も困難であるなどの問題がある。
しかし、このものでは、保護管先端部にまで固定材をうまく入れることが難しく、また熱電対が劣化した際の交換も困難であるなどの問題がある。
また、特開平7−209092号公報には、保護管の先端部に開口部を形成し、これによって熱電対の熱膨張を許容し、測温接合部が位置ずれを起こさないようにしたものが開示されている。
しかし、このものでは測温接合部が外部に露出することになるため、成膜時の原料ガスにより測温接合部が腐食される恐れがある。
特開2002−372462号公報
特開平7−209092号公報
しかし、このものでは測温接合部が外部に露出することになるため、成膜時の原料ガスにより測温接合部が腐食される恐れがある。
よって、本発明における課題は、熱電対が昇温により膨張しても、降温により収縮しても、常にその測温接合部が保護管の先端部内面に接触した状態を維持でき、正確な測温ができるようにすることにある。
かかる課題を解決するため、
請求項1にかかる発明は、保護管と、この保護管内に収容された熱電対と、この熱電対を付勢する付勢手段を備え、
上記保護管は、その先端部が閉じられ、基端部が開かれており、
上記付勢手段は、上記熱電対の測温接合部が保護管の先端部の内面に常時接するように付勢するものであることを特徴とする測温体である。
請求項1にかかる発明は、保護管と、この保護管内に収容された熱電対と、この熱電対を付勢する付勢手段を備え、
上記保護管は、その先端部が閉じられ、基端部が開かれており、
上記付勢手段は、上記熱電対の測温接合部が保護管の先端部の内面に常時接するように付勢するものであることを特徴とする測温体である。
請求項2にかかる発明は、上記熱電対が碍子管内に挿通され固定された状態で保護管内に収容され、付勢手段が碍子管を付勢することで間接的に熱電対を付勢するようにしたことを特徴とする請求項1記載の測温体である。
請求項3にかかる発明は、上記付勢手段がコイルバネであることを特徴とする請求項1または2記載の測温体である。
請求項3にかかる発明は、上記付勢手段がコイルバネであることを特徴とする請求項1または2記載の測温体である。
請求項4にかかる発明は、サセプタの温度を測定する測温体として、請求項1ないし3のいずれかに記載の測温体を用いたことを特徴とする気相成長装置である。
本発明の測温体によれば、熱電対が昇温により膨張しても、降温により収縮しても、常にその測温接合部が保護管の先端部内面に接触した状態を維持でき、正確な測温ができる。
したがって、この測温体を備えた気相成長装置によれば、基板表面の温度をいかなる温度範囲においても正しく測定でき、基板温度を高精度で所定の温度に維持することが可能になり、特性の優れた薄膜を得ることができる。
したがって、この測温体を備えた気相成長装置によれば、基板表面の温度をいかなる温度範囲においても正しく測定でき、基板温度を高精度で所定の温度に維持することが可能になり、特性の優れた薄膜を得ることができる。
図1は、本発明の測温体の一例を示すものである。
この例の測温体21は、保護管22と、この保護管22の内部に収容された熱電対23とから概略構成されている。
保護管22は、耐熱性、耐薬品性に優れた石英、サファイアなどからなり、細長い円筒部24と、この円筒部24の一端に連設された鍔部25とからなるものである。
この例の測温体21は、保護管22と、この保護管22の内部に収容された熱電対23とから概略構成されている。
保護管22は、耐熱性、耐薬品性に優れた石英、サファイアなどからなり、細長い円筒部24と、この円筒部24の一端に連設された鍔部25とからなるものである。
円筒部24は、その長手方向の一方の先端部が閉じられてドーム状となっており、他方の基端部は開かれて開口が形成され、ここに鍔部25が一体に設けられている。
また、この保護管22の基端部には、これの開口を閉じるような底板26がネジ止めされて、取り外し可能に取り付けられている。この底板26のほぼ中央には小径の貫通孔が形成されており、この貫通孔には、熱電対23のリード部分が通されている。
また、この保護管22の基端部には、これの開口を閉じるような底板26がネジ止めされて、取り外し可能に取り付けられている。この底板26のほぼ中央には小径の貫通孔が形成されており、この貫通孔には、熱電対23のリード部分が通されている。
熱電対23は、その大部分が複数の碍子管27、27・・の内部に挿通された状態で保護管22内に収容されており、その測温接合部28は、最上方の碍子管27から突出して露出した形態となっている。
この碍子管27は、セラミックス、磁器などからなるもので、その内部に長手方向に延びる2個の貫通孔が独立して形成されており、これら貫通孔に熱電対23のリード部分がそれぞれ通されている。
この碍子管27は、セラミックス、磁器などからなるもので、その内部に長手方向に延びる2個の貫通孔が独立して形成されており、これら貫通孔に熱電対23のリード部分がそれぞれ通されている。
また、碍子管27、27・・のうち、最下方の碍子管27の下端には、フランジ部29が一体に設けられており、このフランジ部29の開口部を熱電対23のリード部分が挿通している。
そして、最下方の碍子管27のフランジ部29と底板26との間の空間には、コイルバネ30が間挿されており、このコイルバネ30の内部の空間には熱電対23のリード部分が通されて、外部に導出されている。
このコイルバネ30は、最下方の碍子管27を常時上方に付勢するもので、その反発力が比較的小さなもので、弱い力で圧縮されうるものが用いられる。
このコイルバネ30は、最下方の碍子管27を常時上方に付勢するもので、その反発力が比較的小さなもので、弱い力で圧縮されうるものが用いられる。
そして、熱電対23をなす金属線はある程度の硬さを有しており、測温接合部28では、2本の金属線が曲げられて接点を形成しているため、金属線が最上方の碍子管27の貫通孔の開口端に軽く接触して係止した状態となっている。このため、最下方の碍子管27をコイルバネ30で上方に付勢すると、この力が測温接合部28を上方に押し上げるように働く。よって、コイルバネ30は、熱電対23自体を間接的に常時上方に付勢することになり、これにより熱電対23の測温接合部28は常時一定の比較的弱い力で保護管22の先端部の内面に接触することになる。
このような測温体21にあっては、これが加熱されて内部の熱電対23が熱膨張し、その測温接合部28が上方に移動しようとすると、その移動が保護管22の先端部に阻止されるため、その移動しようとする力が下向きに作用する。この力は、最下方の碍子管27に伝わり、これがコイルバネ30に伝達されて、コイルバネ30が圧縮し、これによって熱電対23全体が下方に移動する。このため、測温接合部28が折れ曲がることがなく、正しい位置に保持される。
また、冷却されて降温の際には、熱電対23が徐々に収縮して行き、コイルバネ30に加わっている力が減少し、これに対応してコイルバネ30が伸長し、熱電対23全体が上方に移動し、熱電対23の測温接合部28が保護管22の先端部内面から離れることがなく、先端部内面に測温接合部28が接した状態が維持される。
このように、測温体21が昇温あるいは降温する際に、常に熱電対23の測温接合部28が保護管22の先端部内面の所定の位置に位置することができ、測温接合部28の位置の変動に起因する測定温度の誤差が生じることがなくなる。
本発明の気相成長装置は、サセプタの温度を測定する測温体として、保護管と、この保護管内に収容された熱電対と、この熱電対を付勢する付勢手段を備えてなり、保護管の先端部が閉じられ、基端部が開かれ、上記付勢手段が、熱電対の測温接合部を保護管の先端部の内面に常時接するように付勢する構造のものを用いたもので、例えば図3に示した構造の気相成長装置の測温体6として、図1に示した構造の測温体21を用いたものである。
したがって、この気相成長装置にあっては、サセプタあるいはサセプタ支持軸がいかなる温度にあっても、測温体は、サセプタの正確な温度を測定できることになる。このため、サセプタ、すなわち基板の温度の変動が小さいものとなり、これに堆積される薄膜の組成、特性、厚さなどが均一となり、再現性の高い薄膜の製造が可能となる。
図2は、本発明の測温体を装着した気相成長装置と従来の測温体を装着した気相成長装置について、サセプタ表面温度の経時変化を比較して示すものである。 このグラフから明らかなように、従来の測温体を装着したものでは、時折数℃の変動が認められるが、本発明の測温体を装着したものでは、1℃以内の変動に収まっていることがわかる。
21・・・測温体、22・・・保護管、23・・・熱電対、28・・・測温接合部、30・・・コイルバネ
Claims (4)
- 保護管と、この保護管内に収容された熱電対と、この熱電対を付勢する付勢手段を備え、
上記保護管は、その先端部が閉じられ、基端部が開かれており、
上記付勢手段は、上記熱電対の測温接合部が保護管の先端部の内面に常時接するように付勢するものであることを特徴とする測温体。 - 上記熱電対が碍子管内に挿通され固定された状態で保護管内に収容され、付勢手段が碍子管を付勢することで間接的に熱電対を付勢するようにしたことを特徴とする請求項1記載の測温体。
- 上記付勢手段がコイルバネであることを特徴とする請求項1または2記載の測温体。
- サセプタの温度を測定する測温体として、請求項1ないし3のいずれかに記載の測温体を用いたことを特徴とする気相成長装置。
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