CN1292092C - 用于金属有机化学气相沉积设备的双层进气喷头 - Google Patents

用于金属有机化学气相沉积设备的双层进气喷头 Download PDF

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CN1292092C
CN1292092C CN 200410017471 CN200410017471A CN1292092C CN 1292092 C CN1292092 C CN 1292092C CN 200410017471 CN200410017471 CN 200410017471 CN 200410017471 A CN200410017471 A CN 200410017471A CN 1292092 C CN1292092 C CN 1292092C
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CN1563483A (zh
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江风益
蒲勇
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Nanchang Guiji Semiconductor Technology Co ltd
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Nanchang University
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Abstract

本发明公开了一种用于金属有机化学气相沉积设备的双层进气喷头，包括封闭形的外壳体，在外壳体内有上进气腔和下进气腔，在上中层板与底板之间安装有与上进气腔和反应室连通的上出气管，在下中层板与底板之间安装有与下进气腔和反应室连通的下出气管，特征是下出气管的直径大于上出气管的直径，且上出气管放置于下出气管中。本发明还设计有冷却腔。第一路反应气体和第二路反应气体分别由上出气管、下出气管进入反应室，到达衬底表面。因此本发明具有能够将不同反应气体分别送入反应室、使反应气体充分混合均匀、减小预反应、制造成品率高的优点。

Description

用于金属有机化学气相沉积设备的双层进气喷头
技术领域
本发明涉及喷头，尤其是涉及一种用于金属有机化学气相沉积设备(CVD)的双层进气喷头。
背景技术
在用金属有机化学气相沉积设备(MOCVD)制备半导体薄膜材料时，需要将不同反应气体分别送入反应室，然后将反应气体在衬底表面充分混合均匀，同时使得材料制备时的预反应减小，从而提高材料的有关性能。目前用于化学气相沉积设备的双层进气喷头内都设计有相互隔开的上进气腔和下进气腔，不同反应气体分别经上出气管和下出气管进入反应室，由于上出气管和下出气管间隔排列，因而存在以下缺点：由于上出气管和下出气管之间的管间距离较远，两管中气体不易混合充分和均匀，所以只适合低压生长。
发明内容
本发明所解决的技术问题在于提供一种能够将不同反应气体分别送入反应室、使反应气体充分混合均匀、减小预反应的用于金属有机化学气相沉积设备的双层进气喷头。
本发明解决其技术问题采用的技术方案为：本发明包括封闭形的外壳体，在外壳体内固定有上中层板和下中层板，在顶板与上中层板之间形成上进气腔，在上中层板与下中层板之间形成下进气腔，在外壳体的侧壁上安装有与上进气腔连通的上进气管、与下进气腔连通的下进气管，在上中层板与底板之间安装有与上进气腔和反应室连通的上出气管，在下中层板与底板之间安装有与下进气腔和反应室连通的下出气管，特征是下出气管的直径大于上出气管的直径，且上出气管放置于下出气管中。
在下中层板与底板之间为冷却腔，在外壳体的侧壁上安装有冷却水进水管和冷却水出水管。
本发明是在常规用于金属有机化学气相沉积设备的双层进气喷头基础上将上出气管放置于下出气管中，这样第一路反应气体就可从上进气管进入上进气腔，然后经上出气管进入反应室，到达衬底表面，第二路反应气体就可从下进气管进入下进气腔，然后经下出气管与上出气管之间的间隙进入反应室，到达衬底表面，从而达到了将不同反应气体分别送入反应室、使反应气体在衬底表面附近范围充分混合均匀和减小预反应的目的。本发明还设计有用于冷却底板温度的冷却腔。因此本发明具有如下优点：1、能够将不同反应气体分别送入反应室、使反应气体充分混合均匀、减小预反应；2、两路气流同时从一个较小区域喷出，在相同面积上容易将喷孔分布得更密集，从而提高均匀性；3、上出气管可以设计成与上中层板一起从上方取出的活动形式，这样就非常便于清洗；4、加工简便，成品率高，从而制作费用较低。5、该喷头适用于常压和低压生长技术。
附图说明
图1为本发明的剖视示意图；
图2为图1的A-A向俯视图。
具体实施方式
下面结合实施例并对照附图对本发明作进一步详细说明。
本发明包括封闭形的外壳体1，在外壳体1内固定有上中层板4和下中层板5，在顶板3与上中层板4之间形成密封的上进气腔2，在上中层板4与下中层板5之间形成密封的下进气腔9，在外壳体1的侧壁14上安装有与上进气腔2连通的上进气管17、与下进气腔9连通的下进气管16，在上中层板4与底板6之间安装有与上进气腔2和反应室13连通的上出气管7，在下中层板5与底板6之间安装有与下进气腔9和反应室13连通的下出气管8，下出气管8的直径大于上出气管7的直径，且上出气管7放置于下出气管8中。
在下中层板5与底板6之间为冷却腔12，在外壳体1的侧壁14上安装有冷却水进水管15和冷却水出水管11。
第一路反应气体可从上进气管17进入上进气腔2，然后经上出气管7进入反应室13，到达衬底10表面，第二路反应气体可从下进气管16进入下进气腔9，然后经下出气管8与上出气管7之间的间隙进入反应室13，到达衬底10表面。冷却水从冷却水进水管15进入冷却腔12，带走由衬底10及其基座传到底板6及上出气管7、下出气管8的热量，然后从冷却水出水管11流出。

Claims (2)

1、一种用于金属有机化学气相沉积设备的双层进气喷头，包括封闭形的外壳体(1)，在外壳体(1)内固定有上中层板(4)和下中层板(5)，在顶板(3)与上中层板(4)之间形成密封的上进气腔(2)，在上中层板(4)与下中层板(5)之间形成密封的下进气腔(9)，在外壳体(1)的侧壁(14)上安装有与上进气腔(2)连通的上进气管(17)、与下进气腔(9)连通的下进气管(16)，在上中层板(4)与底板(6)之间安装有与上进气腔(2)和反应室(13)连通的上出气管(7)，在下中层板(5)与底板(6)之间安装有与下进气腔(9)和反应室(13)连通的下出气管(8)，其特征在于：下出气管(8)的直径大于上出气管(7)的直径，且上出气管(7)放置于下出气管(8)中。
2、如权利要求1所述的用于金属有机化学气相沉积设备的双层进气喷头，其特征在于：在所述下中层板(5)与底板(6)之间为冷却腔(12)，在所述外壳体(1)的侧壁(13)上安装有冷却水进水管(15)和冷却水出水管(11)。
CN 200410017471 2004-04-01 2004-04-01 用于金属有机化学气相沉积设备的双层进气喷头 Expired - Lifetime CN1292092C (zh)

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