TW202113141A - 成膜材料混合氣體形成裝置及成膜裝置 - Google Patents

成膜材料混合氣體形成裝置及成膜裝置 Download PDF

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TW202113141A
TW202113141A TW109128208A TW109128208A TW202113141A TW 202113141 A TW202113141 A TW 202113141A TW 109128208 A TW109128208 A TW 109128208A TW 109128208 A TW109128208 A TW 109128208A TW 202113141 A TW202113141 A TW 202113141A
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汪華鋒
池戸洋三
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Abstract

本發明提供一種成膜材料混合氣體形成裝置，其包括：成膜材料供應單元，為在預定流動速率下供應呈液態之成膜材料；載體氣體供應單元，為在預定流動速率下供應載體氣體；主汽化單元，為藉由加熱自成膜材料供應單元所供應之成膜材料及自載體氣體供應單元所供應之載體氣體來汽化成膜材料；及具有多孔汽化元件的輔助汽化單元，為捕捉在自主汽化單元流出之氣體中之成膜材料之繼續存在的液滴並汽化經捕捉的成膜材料之液滴。

Description

成膜材料混合氣體形成裝置及成膜裝置
本發明係關於一種成膜材料混合氣體形成裝置及一種成膜裝置。
當製造半導體裝置或其類似物時廣泛地使用於基底基材上形成期望材料層的成膜技術。舉例來說，可使用一種成膜材料，其在室溫及大氣壓下呈液相，且包含之原子形成至少部分之材料為層壓於半導體基材上。此種呈液態之成膜材料的實例包括用來形成SiO2 絕緣膜的三乙氧矽烷(TEOS)。如使用呈液態的成膜材料，則需要一種裝置來汽化成膜材料，以藉此將經汽化之成膜材料和載體氣體供應至反應室。
舉例來說，US 6,210,485揭示一種裝置，其定量地供應呈液態之成膜材料(液體前驅物物質)及載體氣體，汽化所供應之成膜材料，將經汽化之成膜材料與載體氣體混合，及將經汽化成膜材料和載體氣體之混合氣體供應至反應室。
在形成厚膜之情況中，希望供應大量的成膜材料來改良生產效率。然而，在使用於室溫及大氣壓下呈液態之成膜材料的情況中，此一大量的成膜材料可能會導致成膜材料的不充分汽化。如成膜材料不充分地汽化，則成膜材料之液滴繼續存在於反應室並附著至基材表面。此可能會導致形成膜的品質降解。因此，希望使用能夠可靠地汽化成膜材料的成膜材料混合氣體形成裝置及成膜裝置。
根據本揭示之一態樣，提供一種成膜材料混合氣體形成裝置，其包括：成膜材料供應單元，為在預定流動速率下供應呈液態之成膜材料；載體氣體供應單元，為在預定流動速率下供應載體氣體；主汽化單元，為藉由加熱自成膜材料供應單元所供應之成膜材料及自載體氣體供應單元所供應之載體氣體來汽化成膜材料；及具有多孔汽化元件的輔助汽化單元，為捕捉在自主汽化單元流出之氣體中之成膜材料之繼續存在的液滴並汽化經捕捉的成膜材料之液滴。
在根據本揭示之態樣的成膜材料混合氣體形成裝置中，多孔汽化元件可由燒結金屬體形成。
在根據本揭示之態樣的成膜材料混合氣體形成裝置中，燒結金屬體可由纖維性燒結金屬體形成。
根據本揭示之態樣的成膜材料混合氣體形成裝置可進一步包括加熱輔助汽化單元的輔助加熱器。
在根據本揭示之態樣的成膜材料混合氣體形成裝置中，輔助汽化單元可鄰接於主汽化單元設置。
根據本揭示之態樣的成膜材料混合氣體形成裝置可進一步包括以預定流動速率將第二材料氣體供應至輔助汽化單元下游之位置的第二材料氣體供應單元。
根據本揭示之另一態樣，提供一種成膜裝置，其包括：根據一態樣之成膜材料混合氣體形成裝置；及成膜材料和載體氣體自成膜材料混合氣體形成裝置向其中供應的反應室。
根據本揭示之一態樣的成膜材料混合氣體形成裝置及成膜裝置能夠可靠地汽化成膜材料。
以下將參照圖式說明本揭示之一具體例。圖1係繪示成膜裝置100之組態的示意圖。
成膜裝置100包括根據本揭示之具體例之成膜材料混合氣體形成裝置1、成膜材料供應2、載體氣體供應3、第二材料氣體供應4、及反應室5。成膜材料供應2將成膜材料R1供應至成膜材料混合氣體形成裝置1。載體氣體供應3將載體氣體C供應至成膜材料混合氣體形成裝置1。第二材料氣體供應4將第二材料氣體R2供應至成膜材料混合氣體形成裝置1。成膜材料混合氣體Gm(其係經汽化之成膜材料R1、載體氣體C、及第二材料氣體R2之混合氣體)自成膜材料混合氣體形成裝置1供應至反應室5。
成膜材料混合氣體形成裝置1為包括成膜材料供應單元11、載體氣體供應單元12、主汽化單元13、輔助汽化單元14、輔助加熱器15、流出閥16、及第二材料氣體供應單元17。成膜材料供應單元11以預定流動速率供應呈液態之成膜材料R1。載體氣體供應單元12以預定流動速率供應載體氣體C。主汽化單元13藉由加熱自成膜材料供應單元11所供應之成膜材料R1及自載體氣體供應單元12所供應之載體氣體C來汽化成膜材料R1，並形成初步混合氣體Gp(其係經汽化之成膜材料R1及載體氣體C之混合氣體)。輔助汽化單元14捕捉自主汽化單元流出之初步混合氣體Gp中之成膜材料R1之繼續存在的液滴，及將成膜材料R1之經捕捉的液滴汽化。輔助加熱器15加熱輔助汽化單元14。流出閥16能夠終止初步混合氣體Gp的流出。第二材料氣體供應單元17係設置於輔助汽化單元14之下游，並以預定流動速率供應第二材料氣體R2。
成膜材料供應單元11預先以預定流動速率調節供應自成膜材料供應2之成膜材料R1的流動速率。成膜材料供應單元11可經組態以具有流動速率感測器及流動速率調節閥。成膜材料R1係視待形成的膜材料來選擇，及例如，使用三乙氧矽烷(TEOS)作為成膜材料R1。
載體氣體供應單元12預先以預定流動速率調節供應自載體氣體供應3之載體氣體C的流動速率。載體氣體供應單元12可經組態以具有流動速率感測器及流動速率調節閥。使用惰性氣體諸如氦、氬或氮作為載體氣體C。
主汽化單元13藉由加熱經供應的成膜材料R1及載體氣體C來汽化成膜材料R1。因此，主汽化單元13可經組態以具有熱源，例如，電加熱器。此外，主汽化單元13較佳具有能夠將足夠的熱量傳遞至供應自成膜材料供應單元11之成膜材料R1及供應自載體氣體供應單元12之載體氣體C的熱傳遞結構。主汽化單元13之經加熱溫度較佳高於或等於成膜材料R1之沸點，更佳較成膜材料R1之沸點高5 °C至20 °C之溫度。
此外，主汽化單元13可經組態以於載體氣體C之流動中產生氣體流動，例如，渦流氣體，其能夠經由剪切及分解呈液態之成膜氣體R1來促進成膜材料R1之汽化。
輔助汽化單元14具有多孔汽化元件141，其由具有防止成膜材料R1之液滴通過之孔隙的多孔體形成。多孔汽化元件141經由捕捉自主汽化單元13流出之初步混合氣體Gp中所含之成膜材料R1的液滴來防止將成膜材料R1之液滴引入至反應室5中。此外，由於經多孔汽化元件141捕捉之成膜材料R1之液滴穿透至多孔汽化元件141中，因而於多孔汽化元件141與通過之初步混合氣體Gp之間的接觸面積變大，於元件141中之滯留時間變得較長，及因此促進初步混合氣體Gp的汽化。
由於自主汽化單元13流出之初步混合氣體Gp已於主汽化單元13中經加熱，因此據認為初步混合氣體Gp具有足以使其中包含之成膜材料R1之液滴汽化的熱能。因此，當成膜材料R1之液滴停留於輔助汽化單元14內部時，呈液相之成膜材料R1可藉由呈氣相之成膜材料R1及載體氣體兩者中所含的熱量汽化。
更詳言之，當經輔助汽化單元14捕捉之成膜材料R1之液體的飽和蒸氣壓大於通過輔助汽化單元14之初步混合氣體Gp中之成膜材料R1的蒸氣分壓時，經輔助汽化單元14捕捉之成膜材料R1的液體可經汽化。如於輔助汽化單元14中汽化之成膜材料R1的量大於新近自主汽化單元13流出之成膜材料R1的液體量，則可達成一平衡狀態，其中形成包含預定量之成膜材料R1的成膜材料混合氣體Gm，同時防止輔助汽化單元14阻塞。
較佳使用燒結金屬體作為形成輔助汽化單元14之多孔汽化元件141的多孔體。如多孔汽化元件141係由燒結金屬體形成，則由於可提高多孔汽化元件141的導熱性，所以成膜材料R1之經捕捉液滴可因向其傳遞之熱量而快速地汽化。較佳使用化學穩定性金屬諸如不銹鋼作為形成多孔汽化元件141之金屬。
此外，較佳使用纖維性燒結金屬體作為形成多孔汽化元件141之燒結金屬體。可提高纖維性燒結金屬體之孔隙度同時並降低纖維性燒結金屬體之孔徑。此使得可降低初步混合氣體Gp的通過阻力，同時並可靠地防止成膜材料R1之液滴通過多孔汽化元件141，藉此快速地汽化經捕捉的成膜材料R1。希望多孔汽化元件141之過濾準確度係，例如，低於或等於0.5μm。此外，可經由提高多孔汽化元件141之體積來改良多孔汽化元件141之汽化能力(每單位時間之成膜材料R1的汽化量)。如前所述，由於多孔汽化元件141之汽化能力係取決於各種條件，因此可藉由實驗或實際操作來確定多孔汽化元件141的規格。
輔助汽化單元14可經組態以具有用來將多孔汽化元件141固定於流動路徑中之凸緣142。多孔汽化元件141可經形成為具有一密封端及連接至凸緣142之另一端的管狀。如多孔汽化元件141及凸緣142係由金屬形成，則可經由將輔助加熱器15之熱量傳導至多孔汽化元件141來快速地汽化經捕捉的成膜材料R1之液滴。此外，如輔助汽化單元14係經組態使得凸緣142係設置於具有管狀之多孔汽化元件141之一端，則輔助汽化單元14可經組態使得多孔汽化元件141係設置於流出閥16之進入流動路徑或其類似者的內部中。因此，由於輔助汽化單元14不需要專用的外殼，因此可減小成膜材料混合氣體形成裝置1的尺寸。
輔助汽化單元14較佳係鄰接於主汽化單元13設置。在本具體例中，在主汽化單元13與輔助汽化單元14之間的通道中未設置分支或其他裝置。此使得輔助汽化單元14可能經由有效率地利用自主汽化單元13流出之初步混合氣體Gp的熱能來促進經多孔汽化元件141捕捉之成膜材料R1之液滴的汽化。
提供輔助加熱器15以直接加熱輔助汽化單元14，或藉由加熱在輔助汽化單元14附近的組態元件來間接加熱輔助汽化單元14。如前所述，自主汽化單元13流出至輔助汽化單元14之初步混合氣體Gp具有足夠熱量。因此，僅需設定輔助加熱器15之加熱溫度以致輔助加熱器15能夠防止輔助汽化單元14經由至環境大氣之熱輻射所導致的溫度下降。因此，加熱溫度可低於成膜材料的沸點。明確言之，可將輔助加熱器15之加熱溫度設為較成膜材料之沸點低大約20 °C至40 °C。
根據反應室5之一操作模式，流出閥16選擇是否供應初步混合氣體Gp或停止供應初步混合氣體Gp。此外，可使用流出閥16經由向主汽化單元13施加適當的背壓來穩定成膜材料R1的汽化。
第二材料氣體供應單元17進一步將第二材料氣體R2添加至自流出閥16流出的初步混合氣體Gp。此容許形成成膜材料混合氣體Gm，其係初步混合氣體Gp及第二材料氣體R2之混合氣體。本具體例之成膜材料混合氣體形成裝置1將以此方式形成之成膜材料混合氣體Gm供應至反應室5。
第二材料氣體供應單元17可經組態以具有流動速率感測器及流動速率調節閥。於成膜材料R1經輔助汽化單元14完全汽化後，第二材料氣體供應單元17將初步混合氣體Gp與第二材料氣體R2混合。第二材料氣體R2之溫度可低於初步混合氣體Gp之溫度。此使得成膜材料混合氣體形成裝置1可能經由有效率地使用主汽化單元13之熱量來將呈液態之成膜材料R1汽化。應注意第二材料氣體R2之溫度係經設定以防止成膜材料之蒸氣於混合期間凝結。舉例來說，使用氧氣、氬氣、氦氣、或氮氣作為第二材料氣體R2。
成膜材料供應2係經組態以能夠在可對抗其內部壓力將成膜材料R1引入至成膜材料混合氣體形成裝置1中之壓力下供應呈液態之成膜材料R1。作為一特定實例，成膜材料供應2可經組態以包括：密封容器21，其儲存呈液相之成膜材料R1；及加壓機構22，其將用來加壓成膜材料R1的加壓氣體引入至密封容器21內部的頂部空間中。
密封容器21可經組態使得一管連接至密封容器21之下部，成膜材料R1可自該處流出。加壓機構22可經組態以具有：加壓氣體鋼瓶221，其儲存加壓氣體；及加壓氣體調節閥222，其調節自加壓氣體鋼瓶221供應至密封容器21之加壓氣體的壓力。較佳使用惰性氣體諸如氦氣作為加壓氣體。
載體氣體供應3可經組態以具有：載體氣體鋼瓶31，其儲存載體氣體C；及載體氣體調節閥32，其調節自載體氣體鋼瓶31供應至成膜材料混合氣體形成裝置1之載體氣體C的壓力。
第二材料氣體供應4可經組態以具有：第二材料氣體鋼瓶41，其儲存第二材料氣體R2；及第二材料氣體調節閥42，其調節自第二材料氣體鋼瓶41供應至成膜材料混合氣體形成裝置1之第二材料氣體R2的壓力。
反應室5係經組態使得將使用成膜材料混合氣體於其上形成膜的基底基材容納於反應室5內，且可將反應室5之內部空間抽真空。反應室5能夠具有熟知的組態，其具有用來形成膜的輔助裝置，例如，電漿產生器。
如前所述，成膜材料混合氣體形成裝置1及包括成膜材料混合氣體形成裝置1之成膜裝置100包括輔助汽化單元14，藉此捕捉及汽化自主汽化單元13流出之氣體中所含之成膜材料R1的液滴。此使得可能經由防止將成膜材料R1之液滴引入至反應室5中來改良成膜品質。
以上已描述本揭示之具體例；然而，本揭示並不受限於前述具體例。此外，僅描述前述具體例中之效用作為本揭示之最適當效用的實例，且本揭示之效用並不受限於前述具體例中者。
舉例來說，在根據本揭示之成膜材料混合氣體形成裝置中，輔助加熱器15、流出閥16、及第二材料氣體供應單元17係可選的組態元件，其可經省略。此外，在根據本揭示之成膜材料混合氣體形成裝置1中，可將輔助汽化單元14設置於流出閥16與第二材料氣體供應單元17間之合併點的下游。 實施例
使用具有圖1之組態的成膜裝置，將所有氣體供應至其中裝載晶圓的反應室。其後，於各範圍中測量附著至反應室內之晶圓表面的粒子數。為作比較，使用除了移除輔助汽化單元之多孔汽化元件外具有相同組態的成膜裝置來進行相同試驗。應注意使用輔助汽化單元之多孔汽化元件，其係由纖維性燒結不銹鋼體形成並經形成為具有一封閉端之管形狀。
使用三乙氧矽烷作為成膜材料，且成膜材料的供應量為16.5 g/min。使用氬氣作為載體氣體，且載體氣體的供應量為10 slm。使用氧氣作為第二材料氣體，且第二材料氣體的供應量為40 slm。於將所得之混合氣體供應至反應室300秒後，計算附著至晶圓表面的粒子數。下列表1顯示粒子數的計數結果。 [表1]
細微性[μm] 粒子數[件] (未設置輔助汽化單元) 粒子數[件] (設置輔助汽化單元)
0.026-0.045 12533 35
0.045-0.06 1200 5
0.06-0.10 20 3
0.10-0.20 1 0
0.2-0.5 0 0
0.5-1.0 0 0
1.0＜ 1 2
總計 13755 45
如前所述，已證實經由使用具有輔助汽化單元之成膜材料混合氣體形成裝置來汽化成膜材料，可防止呈液相的成膜材料繼續存在於反應室中。此外，在長期操作後的維修中，已證實沒有液體儲存於多孔汽化元件中，亦即，所有呈液態之成膜材料皆可經汽化。
1:成膜材料混合氣體形成裝置 2:成膜材料供應 3:載體氣體供應 4:第二材料氣體供應 5:反應室 11:成膜材料供應單元 12:載體氣體供應單元 13:主汽化單元 14:輔助汽化單元 15:輔助加熱器 16:流出閥 17:第二材料氣體供應單元 21:密封容器 22:加壓機構 31:載體氣體鋼瓶 32:載體氣體調節閥 41:第二材料氣體鋼瓶 42:第二材料氣體調節閥 100:成膜裝置 141:多孔汽化元件 142:凸緣 221:加壓氣體鋼瓶 222:加壓氣體調節閥 R1:成膜材料 R2:第二材料氣體 C:載體氣體 Gp:初步混合氣體
圖1係繪示根據本揭示之一具體例之成膜裝置之組態的示意圖。
1:成膜材料混合氣體形成裝置
2:成膜材料供應
3:載體氣體供應
4:第二材料氣體供應
5:反應室
11:成膜材料供應單元
12:載體氣體供應單元
13:主汽化單元
14:輔助汽化單元
15:輔助加熱器
16:流出閥
17:第二材料氣體供應單元
21:密封容器
22:加壓機構
31:載體氣體鋼瓶
32:載體氣體調節閥
41:第二材料氣體鋼瓶
42:第二材料氣體調節閥
100:成膜裝置
141:多孔汽化元件
142:凸緣
221:加壓氣體鋼瓶
222:加壓氣體調節閥
R1:成膜材料
R2:第二材料氣體
C:載體氣體
Gp:初步混合氣體

Claims (7)

  1. 一種成膜材料混合氣體形成裝置，其包括： 成膜材料供應單元，為在預定流動速率下供應呈液態之成膜材料； 載體氣體供應單元，為在預定流動速率下供應載體氣體； 主汽化單元，為藉由加熱自成膜材料供應單元所供應之成膜材料及自載體氣體供應單元所供應之載體氣體來汽化成膜材料；及 具有多孔汽化元件的輔助汽化單元，為捕捉在自主汽化單元流出之氣體中之成膜材料之繼續存在的液滴並汽化經捕捉的成膜材料之液滴。
  2. 如請求項1之成膜材料混合氣體形成裝置， 其中該多孔汽化元件係由燒結金屬體形成。
  3. 如請求項2之成膜材料混合氣體形成裝置， 其中該燒結金屬體係由纖維性燒結金屬體形成。
  4. 如請求項1之成膜材料混合氣體形成裝置，其進一步包括加熱輔助汽化單元的輔助加熱器。
  5. 如請求項1之成膜材料混合氣體形成裝置， 其中該輔助汽化單元係鄰接於該主汽化單元設置。
  6. 如請求項1之成膜材料混合氣體形成裝置，其進一步包括第二材料氣體供應單元，以預定流動速率將第二材料氣體供應至輔助汽化單元下游之位置。
  7. 一種成膜裝置，其包括： 如請求項1之成膜材料混合氣體形成裝置；及 一反應室，為成膜材料和載體氣體自該成膜材料混合氣體形成裝置向其供應。
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