TWI797232B - 於反應腔室內藉由循環沉積製程於基板上沉積材料膜之方法及相關裝置結構 - Google Patents
於反應腔室內藉由循環沉積製程於基板上沉積材料膜之方法及相關裝置結構 Download PDFInfo
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Abstract
揭示一種於反應腔室內藉由循環沉積製程於基板上沉積材料膜之方法。該方法可包括:使基板與第一氣相反應物接觸及利用第一主沖洗來沖洗反應腔室。該方法亦包括:藉由兩個或更多個微脈衝製程使基板與第二氣相反應物接觸,其中各微脈衝製程包括:使基板與第二氣相反應物之微脈衝接觸;及利用微沖洗來沖洗反應腔室,其中第二氣相反應物之各個微脈衝向反應腔室中提供實質上恆定濃度的第二氣相反應物。該方法亦可包括;利用第二主沖洗來沖洗反應腔室。亦揭示包括藉由本揭示之方法沉積之材料膜的裝置結構。
Description
本揭示大致係關於於反應腔室內藉由循環沉積製程於基板上沉積材料膜之方法,及特定言之係藉由循環沉積製程沉積碳化過渡金屬鋁膜之方法。本揭示亦大致關於包括藉由循環沉積製程沉積之材料膜的裝置結構。
習知互補金屬氧化物半導體(CMOS)技術係利用n-型及p-型多晶矽作為閘極電極材料。然而,經摻雜的多晶矽可能不是用於先進技術節點應用的理想閘極電極材料。舉例來說,儘管經摻雜的多晶矽係傳導性,其仍可能有在偏壓下會耗乏載流子之表面區域。此耗乏區域可呈現為額外的閘極絕緣體厚度,一般稱為閘極耗乏,且可增加等效氧化物厚度。雖然閘極耗乏區域可能係薄的,在數埃左右,但當閘極氧化物厚度在先進技術節點應用中減小時,其可能變得顯著。作為再一實例,對於NMOS及PMOS裝置兩者,多晶矽不呈現理想的有效功函數(eWF)。為克服經摻雜多晶矽的非理想有效功函數,可利用臨限電壓調整植入。然而,隨著裝置幾何形體於先進技術節點應用中減小,臨限電壓調整植入過程會變得愈來愈複雜。
為克服經摻雜多晶矽閘極電極的相關問題,可用替代材料來取代非理想的經摻雜多晶矽閘極材料,其諸如,比方說,金屬、金屬氮化物及金屬碳化物。舉例來說,可利用金屬碳化物之性質來提供用於NMOS及PMOS裝置兩者之更理想的有效功函數,其中電晶體閘極結構之有效功函數,即擷取電子所需之能量,可與半導體材料之能障高度相容。因此,需要形成具有較佳有效功函數之閘極電極的方法。
此外,由於半導體裝置晶粒面積隨著各種技術世代而減小,一些電路設計係使用更多具高縱橫比特徵之結構以便更佳地利用有效晶片面積。舉例來說,某些動態隨機存取記憶體(DRAM)電容器可能使用深溝渠。該等溝渠可能相當狹窄且深,具有40:1或更大之縱橫比。包括高縱橫比特徵之裝置的其他實例可包括微機電系統(MEMS)裝置,其中待塗布之表面通常需要經由孔洞到達具有凹角輪廓的空腔。
當將材料膜沉積於高縱橫比裝置特徵之表面上時,通常希望材料膜係等形地沉積至高縱橫比特徵之底層表面形態上。如文中所用,等形性可指目標表面的實質上完全均勻覆蓋。然而,直接將材料均勻地沉積於高縱橫比裝置結構上以產生滿足用於期望應用之特定規格的材料膜並不容易。舉例來說,當利用原子層沉積製程來在包括高縱橫比特徵之裝置結構上方沉積等形材料膜時,利用足夠的蒸氣濃度,一個脈衝接著一個脈衝地一致供應氣相反應物,以確保於高縱橫比特徵上方,尤其係於深溝渠特徵之底部中之等形、均勻的沉積可為具挑戰性的。因此,需要於半導體裝置結構上方實現等形、均勻的沉積及尤其係用於在高縱橫比裝置特徵上方沉積的方法。
本發明內容以簡化形式來介紹一系列概念。這些概念會在下文揭示的示例具體例之詳細描述中做進一步詳述。本發明內容非意圖確定所請求保護主題的關鍵特徵或必要特徵,也非意圖用來限制所請求保護主題的範圍。
在一些具體例中,提供於反應腔室內藉由循環沉積製程於基板上沉積材料膜之方法。該方法可包括:使基板與第一氣相反應物接觸;及利用第一主沖洗來沖洗反應腔室。該方法亦可包括:藉由兩個或更多個微脈衝製程使基板與第二氣相反應物接觸,其中各微脈衝製程包括:使基板與第二氣相反應物之微脈衝接觸;及利用微沖洗來沖洗反應腔室,其中第二氣相反應物之各個微脈衝向反應腔室提供實質上恆定濃度的第二氣相反應物。該方法亦可包括;利用第二主沖洗來沖洗反應腔室。
為概述本發明之目的及相較於先前技術所達成之優點,本發明之某些目的及優點已於此描述於上文中。當然,應明瞭無須所有該等目的或優點皆可根據本發明之任何特定具體例來達成。因此,舉例而言,熟悉本技藝者當認知本發明可依達成或最佳化本文所教示或提出之一個優點或一組優點而無須達成本文中可能教示或提出之其他目的或優點的方式來具體化或實施。
此等具體例全部意欲在本文所揭示之本發明範疇內。此等及其他具體例將自以下參考附圖的某些具體例之詳細描述而對熟悉本技藝者變得顯而易見,但本發明並不受限於所揭示之任何特定具體例。
儘管在下文中揭示特定具體例及實例,但彼等熟悉本技藝者應理解,本發明延伸超出本發明所具體揭示之具體例及/或用途及其明顯修改及等效物。因此,期望所揭示之本發明範疇不應受限於下文所描述之特定揭露的具體例。
本文呈現的圖示並非意為任何特定材料、結構或裝置的實際視圖,而僅係用於描述本揭示之具體例的理想表現。
如本文所使用,術語「循環沉積」可指將前驅體(反應物)連續引入至反應腔室中以在基板上方沉積一膜且包括諸如原子層沉積及循環化學氣相沉積之沉積技術。
如本文所使用,術語「循環化學氣相沉積」可指當中基板依序暴露於兩種或更多種揮發性前驅體之任何製程,該等前驅體在基板上反應及/或分解以產生所需沉積物。
如本文所使用,術語「基板」可指可使用或在其上可形成裝置、電路或膜之任何底層材料。
如本文所使用,術語「原子層沉積(ALD)」可指在反應腔室中實施沉積循環(較佳地複數個連續沉積循環)的氣相沉積製程。通常地,在各循環期間,前驅體化學吸附至沉積表面(例如基板表面或先前所沉積之底層表面,諸如來自先前ALD循環之材料),從而形成不容易與其他前驅體反應(亦即自我限制反應)的單層或亞單層。之後,必要時可接著將反應物(例如另一前驅體或反應氣體)引入至處理腔室中以用於將經化學吸附之前驅體轉化為沉積表面上的所需材料。通常地,此反應物能夠進一步與前驅體反應。此外,亦可在各循環期間利用沖洗步驟自處理腔室移除過量前驅體及/或在轉化經化學吸附之前驅體之後自處理腔室移除過量反應物及/或反應副產物。此外,如本文中所使用之術語「原子層沉積」在用前驅體組合物、反應氣體及沖洗(例如惰性載劑)氣體之交替脈衝執行時還意欲包括由相關術語指示之製程,諸如「化學氣相原子層沉積」、「原子層磊晶法(ALE)」、分子束磊晶法(MBE)、氣體源MBE或有機金屬MBE及化學束磊晶法。
如本文中所使用,術語「膜」及「薄膜」可指藉由本文中所揭示方法而沉積之任何連續或不連續結構及材料。舉例而言,「膜」及「薄膜」可包括2D材料、奈米棒、奈米管或奈米粒子,或甚至部分或完全分子層或部分或完全原子層或原子及/或分子之群集。「膜」及「薄膜」可包含具有針孔,但仍為至少部分連續之材料或層。
如本文中所使用,術語「功函數金屬」可指當形成於半導體裝置之閘極介電質之中、之上或上方時產生適當有效功函數的任何傳導性含金屬材料。
如本文中所使用,術語「金屬有機」或「有機金屬」係可互換地使用且可指含有金屬物種的有機化合物。有機金屬化合物可被視為具有直接金屬-碳鍵之金屬有機化合物的亞類。
在整個當前揭示之具體例中給出多個實例材料,應注意針對各實例材料給出之化學式不應被認作限制性且所給出之非限制性實例材料不應受給定實例化學計量所限制。
本揭示包括可用來形成包含一或多種功函數金屬之電晶體閘極結構的方法及裝置結構,其中該等功函數金屬可利用諸如,比方說,原子層沉積製程的循環沉積製程來形成。可利用於閘極電極之ALD形成之現有的功函數金屬可能因其等不適當的有效功函數值而存在限制。舉例來說,已知材料的有效功函數可隨其厚度而改變。因此,隨著在先進技術節點應用中裝置幾何形體的減小,對應裝置膜(諸如閘極電極的功函數金屬)之厚度亦可減小並伴隨有效功函數值的改變。此一閘極電極之有效功函數的改變可導致針對NMOS及PMOS裝置結構兩者之非理想的有效功函數。因此需要提供更理想之閘極電極的方法及結構。該等方法及結構的實例更詳細地揭示於本文中。
此外,本揭示亦包括於基板上方,及特定言之於包括高縱橫比特徵之裝置結構上方沉積等形、均勻材料膜之方法。舉例而言,在循環沉積製程中,可能需要增加參與沉積製程之一或多種氣相反應物的劑量,以確保有足夠的反應物接觸基板的整個表面。於循環沉積製程中增加氣相反應物之劑量的嘗試可能涉及增加脈衝時間或簡單地重複脈衝多次。然而,於氣相沉積設備(諸如ALD或CVD反應器)中增加脈衝時間的一個問題係僅增加脈衝時間並無法補償基板增加的表面積,因前驅體濃度通常隨增加或較長的脈衝時間快速地下降。僅增加脈衝時間通常會導致氣相反應物的濃度減小。同樣地,簡單地使相同源化學物質連續脈衝多次亦會導致各後續脈衝中的前驅體濃度減小。因此,本揭示之具體例可包括利用包括兩個或更多個氣相反應物之依序微脈衝及基板之微沖洗之微脈衝製程的方法。在微脈衝製程中,經提供至反應腔室中並與基板接觸之氣相反應物的濃度可在各脈衝間實質上地恆定,藉此向基板供應均勻濃度的氣相反應物並容許材料膜的等形、均勻沉積。因此,當前揭示的微脈衝製程可向反應腔室、及其內部之基板提供均勻、高劑量的氣相反應物脈衝。
因此,本揭示之具體例可包括藉由循環沉積製程將材料膜沉積於反應腔室內之基板上的方法。在一些具體例中,該方法可包括:使基板與第一氣相反應物接觸及利用第一主沖洗來沖洗反應腔室。本揭示之方法亦可包括:藉由兩個或更多個微脈衝製程使基板與第二氣相反應物接觸,其中各微脈衝製程包括:使基板與第二氣相反應物之微脈衝接觸;及利用微沖洗來沖洗反應腔室,其中第二氣相反應物之各個微脈衝向反應腔室中提供實質上恆定濃度的第二氣相反應物。在一些具體例中,本揭示之方法亦可包括利用第二主沖洗來沖洗反應腔室。
循環沉積製程之一非限制性示例具體例可包括原子層沉積(ALD),其中ALD係基於典型地自我限制反應,由此使用反應物之連續且交替的脈衝以於每個沉積循環沉積約一個原子(或分子)單層材料。沉積條件及前驅體通常經選擇以提供自飽和反應,使得一種反應物之吸收層留下不與相同反應物之氣相反應物反應的表面終端。接著使基板與不同反應物接觸,該不同反應物與先前終端反應以實現持續沉積。因此,交替脈衝之各循環通常留下不超過約一個單層的所需材料。然而,如上文所提及,熟習此項技術者將認知到在一或多個ALD循環中可沉積超過一個單層的材料,例如在不管製程之交替性質如何發生一些氣相反應時。
在用來沉積材料膜(諸如,比方說,碳化過渡金屬鋁膜)的ALD型製程中,一個沉積循環可包括使基板暴露至第一反應物,自反應腔室移除任何未反應的第一反應物及反應副產物,及經由兩個或更多個微脈衝製程使基板暴露至第二反應物,隨後接著第二移除步驟。在本揭示之一些具體例中,第一反應物可包括金屬氣相反應物(「金屬前驅體」)及第二反應物可包括碳氣相反應物(「碳前驅體」)。
前驅體可藉由惰性氣體(諸如氬氣(Ar)或氮氣(N2
))分離以避免在反應物之間的氣相反應並可實現自飽和表面反應。然而,在一些具體例中,基板可移動以分別接觸第一氣相反應物及第二氣相反應物。由於反應自飽和,所以可能不需要基板之嚴格的溫度控制及前驅體之精確的劑量控制。然而,基板溫度較佳使得入射氣體物種不冷凝至單層中亦不會在表面上分解。在基板與下一種反應性化學物質接觸之前,過剩的化學物質及反應副產物(若存在)諸如藉由沖洗反應空間或藉由移動基板自基板表面移除。非所需氣態分子可藉助於惰性沖洗氣體有效地自反應空間排出。真空泵可用於輔助沖洗。
可將可用來沉積材料膜(諸如,比方說,碳化過渡金屬鋁)的反應器用於文中所述的沉積製程。該等反應器包括經組構用來提供前驅體的ALD反應器、以及CVD反應器。根據一些具體例,可使用噴淋頭反應器。根據一些具體例,可使用交叉流、批次、小批次(minibatch)、或空間ALD反應器。
本文中所描述之沉積製程可視情況在連接至群集工具的反應器或反應腔室中進行。在群集工具中,由於各反應腔室係專用於一種類型之製程,因此各模組中之反應腔室的溫度可維持恆定,其相較於在各次運轉前將基板加熱至製程溫度的反應器可改良生產量。另外,在群集工具中,可減少在基板之間將反應腔室泵至期望製程壓力水準之時間。在本揭示之一些具體例中,沉積製程可於包括多個反應腔室的群集工具中進行,其中可利用各個別的反應腔室來使基板暴露至個別的前驅體氣體且可使基板於不同反應腔室之間轉移以暴露至多種前驅體氣體,基板的轉移係在受控環境下進行以防止基板的氧化/污染。在本揭示之一些具體例中,沉積製程可於包括多個反應腔室的群集工具中進行,其中各個別的反應腔室可經組構來將基板加熱至不同沉積溫度。
獨立式反應器可配備有負載鎖定。在該情況下,在各次運轉之間不需冷卻反應腔室。在一些具體例中,用來沉積材料膜(諸如含金屬膜)的沉積製程可包括複數個沉積循環,例如ALD循環或循環CVD循環。
在一些具體例中,可使用循環沉積製程來在基板上形成材料膜且循環沉積製程可為ALD型製程。在一些具體例中,該循環沉積製程可為混合ALD/CVD或循環CVD製程。舉例而言,在一些具體例中,ALD製程之生長速率與CVD製程相比可較低。一種增加生長速率之途徑可為在比ALD製程中通常採用之溫度更高的基板溫度下操作,從而導致化學氣相沉積過程,但仍利用前驅體之連續引入,該製程可被稱為循環CVD。
根據本揭示之一些具體例,可使用ALD製程來在基板(諸如積體電路工件)上形成材料膜(諸如,比方說,碳化過渡金屬鋁)。在本揭示之一些具體例中,各ALD循環可包含兩種不同的沉積步驟或階段。在沉積循環之第一階段(「金屬階段」)中,可使需要沉積之基板表面與包含金屬前驅體之第一氣相反應物接觸,其化學吸附在該基板表面上,從而在基板表面上形成不超過約一個單層之反應物物種。在沉積之第二階段(「碳階段」)中,可使需要沉積之基板表面與兩個或更多個至少包含含碳氣相反應物(即碳前驅體)之第二氣相反應物的微脈衝接觸,其中材料膜可因金屬氣相反應物與碳氣相反應物之間的反應而沉積。
在揭示之一些具體例中,可利用循環沉積製程來沉積材料膜(諸如,比方說,碳化過渡金屬鋁膜),且此一循環沉積製程之一非限制性實例可參照圖1A及1B來理解,其中圖1A說明整體的例示性循環沉積製程及圖1B說明整體製程的子製程,該子製程包括用來向基板提供第二氣相反應物的微脈衝製程。
更詳細言之,圖1A說明例示性的整體循環沉積製程100,其包括製程方塊110,該製程方塊110包括將基板提供至反應室中及將基板加熱至期望沉積溫度。用於沉積的反應腔室可為原子層沉積反應腔室、或化學氣相沉積反應腔室、或如先前說明於文中的任何反應腔室。在本揭示之一些具體例中,基板可於循環沉積製程期間加熱至期望沉積溫度。舉例而言,基板可經加熱至低於大約750 °C、或低於大約650 °C、或低於大約550 °C、或低於大約450 °C、或低於大約350 °C、或低於大約250 °C、或甚至低於大約150 °C之基板溫度。在本揭示之一些具體例中,循環沉積製程期間之基板溫度可在介於300 °C與750 °C之間、或介於400 °C與600 °C之間、或介於400 °C與450 °C之間。
在將基板加熱至期望沉積溫度時,例示性的循環沉積製程100可繼續進行製程方塊120,其包括使基板與第一氣相反應物接觸,及特定言之,在一些具體例中,使基板與包含一或多種金屬氣相反應物(即金屬前驅體)的第一氣相反應物接觸。在本揭示之一些具體例中,一或多種金屬氣相反應物可包含過渡金屬組分。舉例而言,過渡金屬前驅體可包含選自由鈦(Ti)、鋯(Zr)、鉿(Hf)、釩(V)、鈮(Nb)、鉭(Ta)、鉻(Cr)、鉬(Mo)、及鎢(W)組成之群之過渡金屬中的至少一者。
在本揭示之一些具體例中,金屬氣相反應物可包含金屬鹵化物,諸如,比方說,金屬氯化物、金屬碘化物、金屬氟化物、或金屬溴化物中之一或多者。在一些具體例中,金屬氣相反應物可包含過渡金屬鹵化物,諸如,比方說,過渡金屬氯化物、過渡金屬碘化物、過渡金屬氟化物、或過渡金屬溴化物中之一或多者。作為一非限制性示例具體例,第一金屬氣相反應物可包含鹵化鈦,諸如,比方說,四氯化鈦(TiCl4
)。
在本揭示之一些具體例中,使基板與包含金屬前驅體之第一氣相反應物接觸可包括使基板暴露於金屬前驅體持續介於約0.01秒與約60秒之間,介於約0.05秒與約10秒之間,或介於約0.1秒與約5.0秒之間的時間段。此外,於含金屬前驅體的脈衝期間,金屬前驅體的流動速率可為低於2000 sccm,或低於500 sccm,或甚至低於100 sccm。此外,於金屬前驅體在基板上方的脈衝期間,金屬前驅體的流動速率可在約1至2000 sccm,約5至1000 sccm,或約10至約500 sccm之範圍內。
圖1A之例示性循環沉積製程100可繼續進行製程方塊130,其包括利用第一主沖洗來沖洗反應腔室。舉例來說,過量的第一氣相反應物及反應副產物(若存在)可例如藉由用惰性氣體泵送而自基板表面移除。在本揭示之一些具體例中,第一主沖洗製程可包括一沖洗循環,其中將基板表面沖洗低於大約5.0秒、或低於大約3.0秒、或甚至低於大約2.0秒的時間段。過量的第一氣相反應物(諸如,比方說,過量的金屬前驅體)及任何可能的反應副產物可藉助由與反應腔室流體連通之泵送系統產生的真空來移除。
在利用第一主沖洗來沖洗反應腔室時(即圖1A之製程方塊130),例示性的循環沉積製程100可繼續進行製程方塊140,其包括使基板與第二氣相反應物接觸,及特定言之,在本揭示之一些具體例中,藉由兩個或更多個微脈衝製程使基板與碳前驅體接觸。
更詳言之,圖1B說明製程方塊140的子製程140`並詳述用來使基板與第二氣相反應物(即碳前驅體)之兩個或更多個微脈衝接觸之微脈衝製程的特定具體例。子製程140`可繼續進行製程方塊142,其包括使基板與第二氣相反應物之微脈衝接觸,及特定言之,在本揭示之特定具體例中,使基板與碳前驅體之微脈衝接觸。
在本揭示之一些具體例中,第二氣相反應物可包括一或多種碳氣相反應物,即碳前驅體。在一些具體例中,一或多種碳氣相反應物可包括一或多種金屬有機前驅體,且金屬有機前驅體之金屬組分亦可在其沉積時納入至材料膜中。在本揭示之一些具體例中,一或多種碳前驅體可包括至少一種金屬有機前驅體,其中該金屬有機前驅體包含鋁(Al)組分,即鋁金屬有機前驅體。舉例而言,鋁金屬有機前驅體可包含三甲基鋁(TMA)、三乙基鋁(TEA)、氫化二甲基鋁(DMAH)、或三-第三丁基鋁(TTBA)中之至少一者。作為一非限制性實例,第一氣相反應物可包括四氯化鈦(TiCl4)及第二氣相反應物可包括三乙基鋁(TEA),及藉由例示性循環沉積製程沉積之材料膜可包括碳化鈦鋁(TiAlC),其中TiCl4
向材料膜提供鈦(Ti)及TEA向材料膜提供鋁(Al)及碳(C)兩者。
在本揭示之一些具體例中,第二氣相反應物可自源容器(即含有第二反應物之源容器)供應至反應腔室。在一些具體例中,源容器可包含呈固體來源、液體來源、或氣體來源的第二反應物。在一些具體例中,第二反應物可包含溶解於適宜溶劑中之固體以提供第二反應物之液體來源。在本揭示之一些具體例中,可將源容器及源容器與反應腔室之間的任何中間氣體傳遞管線加熱至期望溫度以提高反應物之蒸氣壓並防止前驅體之吸附及凝結,因此實現氣相反應物自源容器至反應腔室之令人滿意的流動。在本揭示之一些具體例中,第二氣相反應物(例如,碳前驅體)可包含低蒸氣壓反應物。舉例而言,第二反應物可包含低蒸氣壓反應物,其具有在室溫下低於1托(Torr)、或在室溫下低於0.1托、或甚至在室溫下低於0.01托之蒸氣壓。
在本揭示之一些具體例中,使基板與第二氣相反應物(例如,碳前驅體)之微脈衝接觸可包括使基板微脈衝(即接觸)至碳前驅體持續介於約0.01秒與約60秒之間、介於約0.05秒與約10秒之間、或介於約0.1秒與約5.0秒之間的時間段。在本揭示之一些具體例中,使基板與第二氣相反應物(例如,碳前驅體)之微脈衝接觸可包括使基板微脈衝(即接觸)至碳前驅體持續低於大約2秒、或低於大約1秒、或低於大約0.5秒、或甚至低於大約0.1秒的時間段。
在使基板與第二氣相反應物之微脈衝接觸時,圖1B之子製程140`可繼續進行製程方塊144,其包括利用微沖洗來沖洗反應腔室。舉例而言,過量的第二氣相反應物及反應副產物(若存在)可例如藉由用惰性氣體泵送而自基板表面移除。在本揭示之一些具體例中,沖洗製程可包括一微沖洗,其中沖洗基板表面持續介於大約0.1秒與大約10秒之間、或介於大約0.5秒與大約3秒之間、或甚至介於大約1秒與2秒之間的時間段。在本揭示之一些具體例中,微沖洗製程可沖洗基板表面持續低於1秒、或低於0.5秒、或低於0.2秒、或甚至低於0.1秒的時間段。過量的第二氣相反應物(諸如,比方說,過量的碳前驅體)及任何可能的反應副產物可藉助由與反應腔室流體連通之泵送系統產生的真空來移除。
在微沖洗製程期間,即與進行製程方塊144之微沖洗製程同時地,子製程140`亦可包括於源容器補充第二蒸氣源之濃度。詳言之,當子製程140`以第二氣相前驅體之微脈衝接觸基板時,特定濃度的第二氣相前驅體可自源容器及/或設置於源容器與反應腔室之間的氣體傳遞管線耗乏。若第二氣相前驅體之重複微脈衝在沒有中間微沖洗製程下供應至反應腔室,則進入反應腔室(並隨後與反應腔室內之基板接觸)之前驅體濃度會隨時間減小,且於各微脈衝中前驅體濃度之減小會導致不令人滿意的沉積特性,諸如,比方說,沉積材料膜的不均勻厚度。
在利用微沖洗來沖洗反應腔室時(即製程方塊144),可將微脈衝製程重複至少一次,或可重複多次。舉例來說,子製程140`可包括一子循環,其包括使基板與第二氣相反應物之微脈衝接觸(製程方塊142),及利用微沖洗來沖洗反應腔室(製程方塊144),其中可將該子循環重複至少一次,或可重複多次。在已將微脈衝製程重複至少一次之本揭示之特定具體例中,子製程140`可繼續進行決定閘口146,其確定是否使子製程140`繼續進行再一個子循環,或是否使子製程140`於製程方塊148處離開並回到圖1A之循環沉積製程100。決定閘口146可基於待提供至反應腔室及尤其提供至反應腔室內之基板之第二氣相反應物的期望劑量作決定。在本揭示之一些具體例中,可使子製程140`之子循環重複二(2)或更多次、三(3)或更多次、五(5)或更多次、或甚至十(10)或更多次。隨子製程140`之子循環的數目增加,提供至反應腔室之第二氣相反應物之劑量可相應地增加,直至將期望劑量的第二氣相反應物提供至反應腔室中為止。
在本揭示之一些具體例中,子製程140`之各子循環包括使基板與第二氣相反應物之微脈衝接觸,其中第二氣相反應物之各個微脈衝將實質上恆定濃度的第二氣相反應物提供至反應腔室中。因此,相對於已知之循環沉積方法,當前揭示之方法可將氣相反應物之多個微脈衝提供至反應腔室而於各個別的微脈衝之間不會減少氣相反應物的濃度。各微脈衝將實質上恆定濃度的氣相反應物提供至反應腔室,且隨著微脈衝之數目增加,可增加接觸基板之反應物的期望劑量直至達到期望劑量為止,且離開子製程140`回到圖1A之循環沉積製程100中。
於完成子製程140`後,例示性的循環沉積循環100可繼續進行製程方塊150(圖1A),其包括利用第二主沖洗來沖洗反應腔室。舉例來說,過量的第二氣相反應物及反應副產物(若存在)可例如藉由用惰性氣體泵送而自基板表面移除。在本揭示之一些具體例中,第二主沖洗製程可包括一沖洗循環,其中將基板表面沖洗低於大約5.0秒、或低於大約3.0秒、或甚至低於大約2.0秒的時間段。過量的第二氣相反應物(諸如,比方說,過量的碳前驅體)及任何可能的反應副產物可藉助由與反應腔室流體連通之泵送系統產生的真空來移除。
於完成第二主沖洗製程(即製程方塊150)時,例示性的循環沉積製程100可繼續進行決定閘口160,其中決定閘口160係取決於沉積材料膜之厚度。舉例而言,若材料膜針對期望的裝置應用係以不足夠的厚度沉積,則可藉由回到製程方塊120並繼續通過再一沉積循環來重複循環沉積製程,其中一個沉積循環包括使基板與金屬前驅體接觸(製程方塊120),利用第一主沖洗來沖洗反應腔室(製程方塊130),藉由兩個或更多個微脈衝製程使基板與碳前驅體接觸(製程方塊140),及利用第二主沖洗來沖洗反應腔室(製程方塊150)。可將循環沉積製程100之沉積循環重複一或多次,直至將期望厚度之材料膜沉積於基板上方為止,此時可使循環沉積製程100於製程方塊170離開且可使基板接受進一步的製造過程以完成裝置結構。
應明瞭在本揭示之一些具體例中,基板與第一氣相反應物及第二氣相反應物接觸之順序可為使基板先與第二氣相反應物接觸及接著與第一氣相反應物接觸。此外,在一些具體例中,循環沉積製程可包括使基板與第一氣相反應物接觸一或多次,隨後再使基板與第二氣相反應物接觸兩次或更多次。此外,在本揭示之一些具體例中,在微脈衝第二氣相反應物之外或作為其替代,可利用微脈衝製程來使基板與第一氣相反應物接觸。
此外,本揭示之一些具體例可包括非電漿反應物,例如,第一及第二氣相反應物可實質上不含離子化反應性物種。在一些具體例中,第一及第二氣相反應物實質上不含離子化反應性物種、激發物種、或自由基物種。舉例來說,第一氣相反應物及第二氣相反應物皆可包含非電漿反應物以防止底層基板之離子化損壞及藉此產生的相關缺陷。
在本揭示之一些具體例中,材料膜(例如,碳化過渡金屬鋁)之生長速率可為約0.005 Å/循環至約5 Å/循環,約0.01 Å/循環至約2.0 Å/循環。在一些具體例中,材料膜之生長速率可為約0.1 Å/循環至約10 Å/循環。在一些具體例中,材料膜之生長速率大於約0.05 Å/循環、大於約0.1 Å/循環、大於約0.15 Å/循環、大於約0.20 Å/循環、大於約0.25 Å/循環或大於約0.3 Å/循環。在一些具體例中,材料膜之生長速率係小於約2.0 Å/循環、小於約1.0 Å/循環、小於約0.75 Å/循環、小於約0.5 Å/循環、或小於約0.2 Å/循環。在本揭示之一些具體例中,材料膜包含以大約5 Å/循環之生長速率沉積的碳化過渡金屬鋁。
藉由文中揭示之循環沉積製程沉積的材料膜(諸如,比方說,碳化過渡金屬鋁)可為連續膜。在一些具體例中,材料膜(例如,碳化過渡金屬鋁)可為連續的,其厚度小於大約100奈米,或小於大約60奈米,或小於大約50奈米,或小於大約40奈米,或小於大約30奈米,或小於大約20奈米,或小於大約10奈米,或甚至小於大約5奈米。文中提及的連續性可為實體連續性或電連續性。在本揭示之一些具體例中,材料膜可為實體連續性的厚度可能與膜為電連續性的厚度不同,及反之亦然。
在本揭示之一些具體例中,根據文中描述之循環沉積製程沉積的材料膜(例如,碳化過渡金屬鋁)可具有約20奈米至約100奈米、或約20奈米至約60奈米之厚度。在一些具體例中,根據文中描述之一些具體例沉積的材料膜可具有大於約20奈米、或大於約30奈米、或大於約40奈米、或大於約50奈米、或大於約60奈米、或大於約100奈米、或大於約250奈米、或大於約500奈米或更大之厚度。在一些具體例中,根據文中描述之一些具體例沉積之材料膜(例如,碳化過渡金屬鋁)可具有小於約50奈米、或小於約30奈米、或小於約20奈米、或小於約15奈米、或小於約10奈米、或小於約5奈米、或小於約3奈米、或小於約2奈米、或甚至小於約1奈米之厚度。
文中描述之循環沉積方法,即利用兩個或更多個微脈衝製程,可實現具有降低厚度不均勻性之材料膜(例如,碳化過渡金屬鋁膜)的沉積。舉例來說,材料可包含以具有小於2% 1-σ、或小於1.5% 1-σ、或小於1% 1-σ、或甚至小於0.5% 1-σ之標準差之厚度不均勻性沉積的碳化鈦鋁(TiAlC)膜。應注意文中描述之厚度不均勻性可排除邊緣的3毫米。
在本揭示之一些具體例中,材料膜可沉積於包括高縱橫比特徵之基板(例如,三維、非平面基板)上。在一些具體例中,材料膜(例如,碳化過渡金屬鋁)在具有大於2、或大於5、或大於10、或大於25、或大於50、或甚至大於100之縱橫比(高度/寬度)之結構上的階梯覆蓋率可等於或大於約50%,或大於約80%,或大於約90%,或大於約95%,或大於約98%,或約99%或更大。
在本揭示之一些具體例中,第一氣相反應物可包含過渡金屬反應物及第二氣相反應物可包含金屬有機反應物,諸如,比方說,含鋁金屬有機反應物。在該等具體例中,沉積之材料膜可包含碳化過渡金屬,及特定而言,沉積材料膜之具體例可包含碳化過渡金屬鋁。舉例而言,碳化過渡金屬鋁可由通式XAlC表示,其中X包含過渡金屬,Al為鋁,及C為碳。在一些具體例中,碳化過渡金屬鋁可包含選自由鈦(Ti)、鋯(Zr)、鉿(Hf)、釩(V)、鈮(Nb)、鉭(Ta)、鉻(Cr)、鉬(Mo)、及鎢(W)組成之群之過渡金屬。在本揭示之一些具體例中,過渡金屬可包含鈦及碳化過渡金屬鋁可包含碳化鈦鋁(TiAlC)。
在本揭示之一些具體例中,沉積之材料膜包含碳化過渡金屬鋁(XAlC),其中該碳化過渡金屬鋁(XAlC)包含大於10原子%、或大於20原子%、或大於30原子%、或大於40原子%、或甚至大於50原子%之鋁含量。在本揭示之一些具體例中,沉積之材料膜包含碳化鈦鋁(TiAlC)膜,其包含大於20原子%、或大於30原子%、或大於35原子%、或甚至大於40原子%之鋁含量。在其中材料膜包含碳化鈦鋁(TiAlC)膜之具體例中,TiAlC膜可包含低於40原子%、或低於20原子%、或甚至低於10原子%之鈦含量。此外,在其中材料膜包含碳化鈦鋁(TiAlC)膜之具體例中,TiAlC膜可包含大於20原子%、或大於30原子%、或甚至大於40原子%之碳含量。在本揭示之一些具體例中,材料膜可包含碳化鈦鋁(TiAlC)膜,其可包含低於0.3、或低於0.2、或低於0.15、或甚至低於0.10之平均鈦(Ti)比鋁含量(Ti:Al)。在本文中概述的具體例中,元素之原子濃度可利用拉塞福回向散射(RBS;Rutherford backscattering)來測定。
在其他具體例中,材料膜可包含碳化過渡金屬鋁,例如,碳化鈦鋁(TiAlC)膜,其可包含低於約20原子%氧、或低於約10原子%氧、或低於約5原子%氧、或甚至低於約2原子%氧。在其他具體例中,碳化過渡金屬鋁膜可包含少於約10原子%氫、或少於約5原子%氫、或少於約2原子%氫、或甚至少於約1原子%氫。
藉由文中揭示之循環沉積製程沉積的材料膜(例如,碳化過渡金屬鋁膜)可於各種應用中利用。作為一非限制性示例具體例,材料膜可包含在半導體電晶體應用(諸如平面電晶體結構或多個閘極電晶體(例如,FinFET))中利用作為功函數金屬的碳化過渡金屬鋁膜。詳言之,且參照圖2,半導體裝置結構200可包含半導體本體216及設置於半導體本體216上方之包含碳化過渡金屬鋁(例如,TiAlC)的閘極電極210。在一些具體例中,半導體裝置結構200可包含電晶體結構且亦可包括源極區域202、汲極區域204、及設置於其間之通道區域206。電晶體閘極結構208可包括電極,即閘極電極,其可藉由閘極介電質212與通道區域206隔離。根據本揭示,閘極電極210可包括藉由文中描述之循環沉積方法沉積的碳化過渡金屬鋁,諸如,比方說,碳化鈦鋁(TiAlC)。如圖2所示,在一些具體例中,電晶體閘極結構208可進一步包括一或多個形成於閘極電極210上之額外傳導性層214。該一或多個額外傳導性層214可包括多晶矽、耐火金屬、其他碳化過渡金屬、及氮化過渡金屬中之至少一者。
在本揭示之一些具體例中,閘極電極210可包含碳化鈦鋁(TiAlC)膜及電晶體閘極結構208可具有低於大約4.5 eV、或低於大約4.3 eV、或甚至低於大約4.1 eV之有效功函數。在一些具體例中,閘極電極210可包含碳化鈦鋁(TiAlC)膜及電晶體閘極結構208可具有低於大約4.3 eV之有效功函數,其中該碳化鈦鋁(TiAlC)膜具有小於6奈米、或小於3奈米、或甚至小於2奈米之厚度。
本揭示之具體例亦可包括經組構以形成本揭示之材料膜(例如,碳化過渡金屬鋁膜)的反應系統。更詳言之,圖3示意性地說明包括反應腔室302之反應系統300,該反應腔室302進一步包括用於在預定壓力、溫度及環境條件下固持基板(未示出)且用於將基板選擇性地暴露於各種氣體的機構。前驅體反應物源304可藉由管道或其他適當構件304A耦接至反應腔室302,且可進一步耦接至集管、閥門控制系統、質量流量控制系統或控制來源於前驅體反應物源304之氣態前驅體之機構。藉由前驅體反應物源304供應之前驅體(未示出)、反應物(未示出)在室溫及標準大氣壓條件下可為液體或固體。此前驅體可在反應物源真空容器內氣化,該容器可維持在前驅體源腔室內之氣化溫度或高於該氣化溫度下。在此等具體例中,氣化前驅體可用運載氣體(例如,非活性或惰性氣體)輸送且接著經由管道304A饋入至反應腔室302中。在其他具體例中,前驅體在標準條件下可為蒸氣。在此等具體例中,前驅體不需要蒸發且可不需要運載氣體。舉例而言,在一個具體例中,前驅體可儲存於貯氣瓶中。反應系統300亦可包括額外前驅體反應物源,諸如前驅體反應物源306,其亦可藉由如上文所描述之管道306A耦接至反應腔室。
沖洗氣體源308亦可經由管道308A耦接至反應腔室302,且將各種惰性或稀有氣體選擇性地供應至反應腔室302以輔助自反應腔室移除前驅體氣體或廢氣。可供應之各種惰性或稀有氣體可來源於固態、液態或儲存氣態形式。
圖3之反應系統300亦可包含提供電子電路及機械組件以選擇性地操作閥、集管、泵及反應系統300中所包括之其他設備的系統操作及控制機構310。此類電路及組件操作以自對應的前驅體源304、306及沖洗氣體源308引入前驅體、沖洗氣體。該系統操作及控制機構310亦控制氣體脈衝順序之時間安排、基板及反應腔室之溫度、及反應腔室之壓力及提供反應系統300之恰當操作所必需之各種其他操作。操作及控制機構310可包括控制軟體及電力式或氣動式控制閥以控制前驅體、反應物及沖洗氣體進入及離開反應腔室302之流動。控制系統可包括執行特定任務之模組,諸如軟體或硬體組件,例如FPGA或ASIC。模組可有利地經組構以駐留於控制系統之可尋址儲存媒體中,且經組構以執行一或多個程序。
熟悉相關技術者理解本反應系統之其他構形為可能的,包括不同數目及類別之前驅體反應物源及沖洗氣體源。此外,此類人員亦將理解存在可用於實現將氣體選擇性地饋入至反應腔室302中之目標的閥、管道、前驅體源、沖洗氣體源之多種配置。此外,作為反應系統之示意性圖示,為簡單說明起見已省去多種組件,且此類組件可包括例如各種閥、集管、純化器、加熱器、容器、通風口及/或支路。
上文所描述之本揭示之示例具體例並不限制本發明的範疇,此係由於此等具體例僅為本發明之具體例之實例,本發明係由所附申請專利範圍及其法定等效物所界定。任何等效具體例意欲處於本發明之範疇內。實際上,除本文中所示及所描述者之外,本揭示之各種修改(諸如所描述之元件的替代性適用組合)根據描述對熟習此項技術者而言將變得顯而易見。該等修改及具體例同樣意欲屬於所附申請專利範圍之範疇內。
100‧‧‧循環沉積製程
110‧‧‧製程方塊
120‧‧‧製程方塊
130‧‧‧製程方塊
140‧‧‧製程方塊
140’‧‧‧子製程
142‧‧‧製程方塊
144‧‧‧製程方塊
146‧‧‧決定閘口
148‧‧‧製程方塊
150‧‧‧製程方塊
160‧‧‧決定閘口
170‧‧‧製程方塊
200‧‧‧半導體裝置結構
202‧‧‧源極區域
204‧‧‧汲極區域
206‧‧‧通道區域
208‧‧‧電晶體閘極結構
210‧‧‧閘極電極
212‧‧‧閘極介電質
214‧‧‧傳導性層
216‧‧‧半導體本體
300‧‧‧反應系統
302‧‧‧反應腔室
304‧‧‧前驅體反應物源
304A‧‧‧管道
306‧‧‧前驅體反應物源
306A‧‧‧管道
308‧‧‧沖洗氣體源
308A‧‧‧管道
310‧‧‧系統操作及控制機構
儘管本說明書以具體指出且明確主張被視為本發明之具體例的申請專利範圍作結,但在結合隨附圖式閱讀時可更容易自本揭示之具體例之某些實例的描述來確定本揭示之具體例的優勢,在隨附圖式中:
圖1A說明非限制性的例示性整體製程流程,其展示根據本揭示之具體例的循環沉積製程;
圖1B說明循環沉積製程的非限制性例示性子製程,該例示性子製程包括用來根據本揭示之具體例向基板提供氣相反應物的微脈衝製程;
圖2說明包括根據本揭示之具體例沉積之材料膜之裝置結構的橫截面示意圖;
圖3說明經組構以執行本揭示之方法之反應系統的示意圖。
100‧‧‧循環沉積製程
110‧‧‧製程方塊
120‧‧‧製程方塊
130‧‧‧製程方塊
140‧‧‧製程方塊
140’‧‧‧子製程
142‧‧‧製程方塊
144‧‧‧製程方塊
146‧‧‧決定閘口
148‧‧‧製程方塊
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Claims (17)
- 一種於反應腔室內藉由循環沉積製程於基板上沉積材料膜之方法,該方法包括;使該基板與第一氣相反應物接觸;利用第一主沖洗來沖洗該反應腔室;藉由兩個或更多個微脈衝製程使該基板與第二氣相反應物接觸,其中各微脈衝製程包括:使該基板與第二氣相反應物之微脈衝接觸;及利用微沖洗來沖洗該反應腔室,其中該第二氣相反應物之各個微脈衝向該反應腔室中提供實質上恆定濃度的該第二氣相反應物;及利用第二主沖洗來沖洗該反應腔室;其中,沉積於該基板上之該材料膜包含碳化過渡金屬鋁;其中,該碳化過渡金屬鋁包含碳化鈦鋁(TiAlC);及其中,該碳化鈦鋁(TiAlC)具有低於0.15之平均鈦比鋁含量比(Ti:Al)。
- 如請求項1之方法,其中,該循環沉積製程包含原子層沉積製程。
- 如請求項1之方法,其中,該循環沉積製程包含循環化學氣相沉積製程。
- 如請求項1之方法,其中,該第一氣相反應物包含一或多種金屬氣相反應物。
- 如請求項4之方法,其中,該一或多種金屬氣相反應物包含至少一種選自由鈦(Ti)、鋯(Zr)、鉿(Hf)、釩(V)、鈮(Nb)、鉭(Ta)、鉻(Cr)、鉬(Mo)、及鎢(W)組成之群之過渡金屬。
- 如請求項4之方法,其中,該一或多種金屬氣相反應物包含過渡 金屬氯化物、過渡金屬溴化物、過渡金屬碘化物、或過渡金屬氟化物中之至少一者。
- 如請求項1之方法,其中,該第二氣相反應物包含金屬有機前驅體。
- 如請求項7之方法,其中,該金屬有機前驅體包含三甲基鋁(TMA)、三乙基鋁(TEA)、氫化二甲基鋁(DMAH)、或三-第三丁基鋁(TTBA)中之至少一者。
- 如請求項1之方法,其中,該第二氣相反應物之各微脈衝具有介於0.05秒及10秒之間的脈衝時間段。
- 如請求項1之方法,其中,各微沖洗具有介於0.1秒及10秒之間的沖洗時間段。
- 如請求項1之方法,其中,該碳化鈦鋁(TiAlC)具有大於20%之鋁原子%。
- 一種於反應腔室內藉由循環沉積製程於基板上沉積材料膜之方法,該方法包括;使該基板與第一氣相反應物接觸;利用第一主沖洗來沖洗該反應腔室;藉由兩個或更多個微脈衝製程使該基板與第二氣相反應物接觸,其中各微脈衝製程包括:使該基板與第二氣相反應物之微脈衝接觸;及利用微沖洗來沖洗該反應腔室,其中該第二氣相反應物之各個微脈衝向該反應腔室中提供實質上恆定濃度的該第二氣相反應物;及利用第二主沖洗來沖洗該反應腔室;其中,沉積於該基板上之該材料膜包含碳化過渡金屬鋁; 其中,該碳化過渡金屬鋁包含碳化鈦鋁(TiAlC);及其中,該碳化鈦鋁(TiAlC)係以小於2% 1-σ之厚度不均勻性標準差沉積。
- 一種於反應腔室內藉由循環沉積製程於基板上沉積材料膜之方法,該方法包括;使該基板與第一氣相反應物接觸;利用第一主沖洗來沖洗該反應腔室;藉由兩個或更多個微脈衝製程使該基板與第二氣相反應物接觸,其中各微脈衝製程包括:使該基板與第二氣相反應物之微脈衝接觸;及利用微沖洗來沖洗該反應腔室,其中該第二氣相反應物之各個微脈衝向該反應腔室中提供實質上恆定濃度的該第二氣相反應物;及利用第二主沖洗來沖洗該反應腔室;其中,沉積於該基板上之該材料膜包含碳化過渡金屬鋁;其中,該碳化過渡金屬鋁包含碳化鈦鋁(TiAlC);及其中,該碳化鈦鋁(TiAlC)係以大於90%之階梯覆蓋率沉積於非平面基板上方。
- 如請求項1之方法,其中,該碳化鈦鋁(TiAlC)包含電晶體閘極結構之閘極電極,該電晶體閘極結構具有小於4.3eV之有效功函數。
- 如請求項1之方法,其進一步包括於各微沖洗期間將於源容器處之該第二蒸氣源之濃度補充至實質上恆定濃度。
- 一種裝置結構,其包括藉由請求項1之方法沉積之材料膜。
- 一種反應系統,其經組構以執行請求項1之方法。
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Families Citing this family (275)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US9394608B2 (en) | 2009-04-06 | 2016-07-19 | Asm America, Inc. | Semiconductor processing reactor and components thereof |
US8802201B2 (en) | 2009-08-14 | 2014-08-12 | Asm America, Inc. | Systems and methods for thin-film deposition of metal oxides using excited nitrogen-oxygen species |
US9312155B2 (en) | 2011-06-06 | 2016-04-12 | Asm Japan K.K. | High-throughput semiconductor-processing apparatus equipped with multiple dual-chamber modules |
US10854498B2 (en) | 2011-07-15 | 2020-12-01 | Asm Ip Holding B.V. | Wafer-supporting device and method for producing same |
US20130023129A1 (en) | 2011-07-20 | 2013-01-24 | Asm America, Inc. | Pressure transmitter for a semiconductor processing environment |
US9017481B1 (en) | 2011-10-28 | 2015-04-28 | Asm America, Inc. | Process feed management for semiconductor substrate processing |
US10714315B2 (en) | 2012-10-12 | 2020-07-14 | Asm Ip Holdings B.V. | Semiconductor reaction chamber showerhead |
US20160376700A1 (en) | 2013-02-01 | 2016-12-29 | Asm Ip Holding B.V. | System for treatment of deposition reactor |
US10683571B2 (en) | 2014-02-25 | 2020-06-16 | Asm Ip Holding B.V. | Gas supply manifold and method of supplying gases to chamber using same |
US10167557B2 (en) | 2014-03-18 | 2019-01-01 | Asm Ip Holding B.V. | Gas distribution system, reactor including the system, and methods of using the same |
US11015245B2 (en) | 2014-03-19 | 2021-05-25 | Asm Ip Holding B.V. | Gas-phase reactor and system having exhaust plenum and components thereof |
US10858737B2 (en) | 2014-07-28 | 2020-12-08 | Asm Ip Holding B.V. | Showerhead assembly and components thereof |
US9890456B2 (en) | 2014-08-21 | 2018-02-13 | Asm Ip Holding B.V. | Method and system for in situ formation of gas-phase compounds |
US10941490B2 (en) | 2014-10-07 | 2021-03-09 | Asm Ip Holding B.V. | Multiple temperature range susceptor, assembly, reactor and system including the susceptor, and methods of using the same |
US10276355B2 (en) | 2015-03-12 | 2019-04-30 | Asm Ip Holding B.V. | Multi-zone reactor, system including the reactor, and method of using the same |
US10458018B2 (en) | 2015-06-26 | 2019-10-29 | Asm Ip Holding B.V. | Structures including metal carbide material, devices including the structures, and methods of forming same |
US10600673B2 (en) | 2015-07-07 | 2020-03-24 | Asm Ip Holding B.V. | Magnetic susceptor to baseplate seal |
US10211308B2 (en) | 2015-10-21 | 2019-02-19 | Asm Ip Holding B.V. | NbMC layers |
US11139308B2 (en) | 2015-12-29 | 2021-10-05 | Asm Ip Holding B.V. | Atomic layer deposition of III-V compounds to form V-NAND devices |
US10529554B2 (en) | 2016-02-19 | 2020-01-07 | Asm Ip Holding B.V. | Method for forming silicon nitride film selectively on sidewalls or flat surfaces of trenches |
US10190213B2 (en) | 2016-04-21 | 2019-01-29 | Asm Ip Holding B.V. | Deposition of metal borides |
US10865475B2 (en) | 2016-04-21 | 2020-12-15 | Asm Ip Holding B.V. | Deposition of metal borides and silicides |
US10032628B2 (en) | 2016-05-02 | 2018-07-24 | Asm Ip Holding B.V. | Source/drain performance through conformal solid state doping |
US10367080B2 (en) | 2016-05-02 | 2019-07-30 | Asm Ip Holding B.V. | Method of forming a germanium oxynitride film |
US11453943B2 (en) | 2016-05-25 | 2022-09-27 | Asm Ip Holding B.V. | Method for forming carbon-containing silicon/metal oxide or nitride film by ALD using silicon precursor and hydrocarbon precursor |
US10612137B2 (en) | 2016-07-08 | 2020-04-07 | Asm Ip Holdings B.V. | Organic reactants for atomic layer deposition |
US9859151B1 (en) | 2016-07-08 | 2018-01-02 | Asm Ip Holding B.V. | Selective film deposition method to form air gaps |
US10714385B2 (en) | 2016-07-19 | 2020-07-14 | Asm Ip Holding B.V. | Selective deposition of tungsten |
US9812320B1 (en) | 2016-07-28 | 2017-11-07 | Asm Ip Holding B.V. | Method and apparatus for filling a gap |
US9887082B1 (en) | 2016-07-28 | 2018-02-06 | Asm Ip Holding B.V. | Method and apparatus for filling a gap |
KR102532607B1 (ko) | 2016-07-28 | 2023-05-15 | 에이에스엠 아이피 홀딩 비.브이. | 기판 가공 장치 및 그 동작 방법 |
US10643826B2 (en) | 2016-10-26 | 2020-05-05 | Asm Ip Holdings B.V. | Methods for thermally calibrating reaction chambers |
US11532757B2 (en) | 2016-10-27 | 2022-12-20 | Asm Ip Holding B.V. | Deposition of charge trapping layers |
US10229833B2 (en) | 2016-11-01 | 2019-03-12 | Asm Ip Holding B.V. | Methods for forming a transition metal nitride film on a substrate by atomic layer deposition and related semiconductor device structures |
US10714350B2 (en) | 2016-11-01 | 2020-07-14 | ASM IP Holdings, B.V. | Methods for forming a transition metal niobium nitride film on a substrate by atomic layer deposition and related semiconductor device structures |
US10643904B2 (en) | 2016-11-01 | 2020-05-05 | Asm Ip Holdings B.V. | Methods for forming a semiconductor device and related semiconductor device structures |
KR102546317B1 (ko) | 2016-11-15 | 2023-06-21 | 에이에스엠 아이피 홀딩 비.브이. | 기체 공급 유닛 및 이를 포함하는 기판 처리 장치 |
KR20180068582A (ko) | 2016-12-14 | 2018-06-22 | 에이에스엠 아이피 홀딩 비.브이. | 기판 처리 장치 |
US11581186B2 (en) | 2016-12-15 | 2023-02-14 | Asm Ip Holding B.V. | Sequential infiltration synthesis apparatus |
US11447861B2 (en) | 2016-12-15 | 2022-09-20 | Asm Ip Holding B.V. | Sequential infiltration synthesis apparatus and a method of forming a patterned structure |
KR20180070971A (ko) | 2016-12-19 | 2018-06-27 | 에이에스엠 아이피 홀딩 비.브이. | 기판 처리 장치 |
US10269558B2 (en) | 2016-12-22 | 2019-04-23 | Asm Ip Holding B.V. | Method of forming a structure on a substrate |
US10867788B2 (en) | 2016-12-28 | 2020-12-15 | Asm Ip Holding B.V. | Method of forming a structure on a substrate |
US11390950B2 (en) | 2017-01-10 | 2022-07-19 | Asm Ip Holding B.V. | Reactor system and method to reduce residue buildup during a film deposition process |
US10655221B2 (en) | 2017-02-09 | 2020-05-19 | Asm Ip Holding B.V. | Method for depositing oxide film by thermal ALD and PEALD |
US10468261B2 (en) | 2017-02-15 | 2019-11-05 | Asm Ip Holding B.V. | Methods for forming a metallic film on a substrate by cyclical deposition and related semiconductor device structures |
US10529563B2 (en) | 2017-03-29 | 2020-01-07 | Asm Ip Holdings B.V. | Method for forming doped metal oxide films on a substrate by cyclical deposition and related semiconductor device structures |
KR102457289B1 (ko) | 2017-04-25 | 2022-10-21 | 에이에스엠 아이피 홀딩 비.브이. | 박막 증착 방법 및 반도체 장치의 제조 방법 |
US10770286B2 (en) | 2017-05-08 | 2020-09-08 | Asm Ip Holdings B.V. | Methods for selectively forming a silicon nitride film on a substrate and related semiconductor device structures |
US10892156B2 (en) | 2017-05-08 | 2021-01-12 | Asm Ip Holding B.V. | Methods for forming a silicon nitride film on a substrate and related semiconductor device structures |
US10886123B2 (en) | 2017-06-02 | 2021-01-05 | Asm Ip Holding B.V. | Methods for forming low temperature semiconductor layers and related semiconductor device structures |
US12040200B2 (en) | 2017-06-20 | 2024-07-16 | Asm Ip Holding B.V. | Semiconductor processing apparatus and methods for calibrating a semiconductor processing apparatus |
US11306395B2 (en) | 2017-06-28 | 2022-04-19 | Asm Ip Holding B.V. | Methods for depositing a transition metal nitride film on a substrate by atomic layer deposition and related deposition apparatus |
US10685834B2 (en) | 2017-07-05 | 2020-06-16 | Asm Ip Holdings B.V. | Methods for forming a silicon germanium tin layer and related semiconductor device structures |
KR20190009245A (ko) | 2017-07-18 | 2019-01-28 | 에이에스엠 아이피 홀딩 비.브이. | 반도체 소자 구조물 형성 방법 및 관련된 반도체 소자 구조물 |
US11018002B2 (en) | 2017-07-19 | 2021-05-25 | Asm Ip Holding B.V. | Method for selectively depositing a Group IV semiconductor and related semiconductor device structures |
US11374112B2 (en) | 2017-07-19 | 2022-06-28 | Asm Ip Holding B.V. | Method for depositing a group IV semiconductor and related semiconductor device structures |
US10541333B2 (en) | 2017-07-19 | 2020-01-21 | Asm Ip Holding B.V. | Method for depositing a group IV semiconductor and related semiconductor device structures |
US10590535B2 (en) | 2017-07-26 | 2020-03-17 | Asm Ip Holdings B.V. | Chemical treatment, deposition and/or infiltration apparatus and method for using the same |
US10692741B2 (en) | 2017-08-08 | 2020-06-23 | Asm Ip Holdings B.V. | Radiation shield |
US10770336B2 (en) | 2017-08-08 | 2020-09-08 | Asm Ip Holding B.V. | Substrate lift mechanism and reactor including same |
US11769682B2 (en) | 2017-08-09 | 2023-09-26 | Asm Ip Holding B.V. | Storage apparatus for storing cassettes for substrates and processing apparatus equipped therewith |
US11139191B2 (en) | 2017-08-09 | 2021-10-05 | Asm Ip Holding B.V. | Storage apparatus for storing cassettes for substrates and processing apparatus equipped therewith |
US10249524B2 (en) | 2017-08-09 | 2019-04-02 | Asm Ip Holding B.V. | Cassette holder assembly for a substrate cassette and holding member for use in such assembly |
USD900036S1 (en) | 2017-08-24 | 2020-10-27 | Asm Ip Holding B.V. | Heater electrical connector and adapter |
US11830730B2 (en) | 2017-08-29 | 2023-11-28 | Asm Ip Holding B.V. | Layer forming method and apparatus |
US11295980B2 (en) | 2017-08-30 | 2022-04-05 | Asm Ip Holding B.V. | Methods for depositing a molybdenum metal film over a dielectric surface of a substrate by a cyclical deposition process and related semiconductor device structures |
US11056344B2 (en) | 2017-08-30 | 2021-07-06 | Asm Ip Holding B.V. | Layer forming method |
KR102491945B1 (ko) | 2017-08-30 | 2023-01-26 | 에이에스엠 아이피 홀딩 비.브이. | 기판 처리 장치 |
KR102401446B1 (ko) | 2017-08-31 | 2022-05-24 | 에이에스엠 아이피 홀딩 비.브이. | 기판 처리 장치 |
KR102630301B1 (ko) | 2017-09-21 | 2024-01-29 | 에이에스엠 아이피 홀딩 비.브이. | 침투성 재료의 순차 침투 합성 방법 처리 및 이를 이용하여 형성된 구조물 및 장치 |
US10844484B2 (en) | 2017-09-22 | 2020-11-24 | Asm Ip Holding B.V. | Apparatus for dispensing a vapor phase reactant to a reaction chamber and related methods |
US10658205B2 (en) | 2017-09-28 | 2020-05-19 | Asm Ip Holdings B.V. | Chemical dispensing apparatus and methods for dispensing a chemical to a reaction chamber |
US10403504B2 (en) | 2017-10-05 | 2019-09-03 | Asm Ip Holding B.V. | Method for selectively depositing a metallic film on a substrate |
US10319588B2 (en) | 2017-10-10 | 2019-06-11 | Asm Ip Holding B.V. | Method for depositing a metal chalcogenide on a substrate by cyclical deposition |
US10923344B2 (en) | 2017-10-30 | 2021-02-16 | Asm Ip Holding B.V. | Methods for forming a semiconductor structure and related semiconductor structures |
KR102443047B1 (ko) | 2017-11-16 | 2022-09-14 | 에이에스엠 아이피 홀딩 비.브이. | 기판 처리 장치 방법 및 그에 의해 제조된 장치 |
US10910262B2 (en) | 2017-11-16 | 2021-02-02 | Asm Ip Holding B.V. | Method of selectively depositing a capping layer structure on a semiconductor device structure |
US11022879B2 (en) | 2017-11-24 | 2021-06-01 | Asm Ip Holding B.V. | Method of forming an enhanced unexposed photoresist layer |
WO2019103613A1 (en) | 2017-11-27 | 2019-05-31 | Asm Ip Holding B.V. | A storage device for storing wafer cassettes for use with a batch furnace |
KR102633318B1 (ko) | 2017-11-27 | 2024-02-05 | 에이에스엠 아이피 홀딩 비.브이. | 청정 소형 구역을 포함한 장치 |
US10872771B2 (en) * | 2018-01-16 | 2020-12-22 | Asm Ip Holding B. V. | Method for depositing a material film on a substrate within a reaction chamber by a cyclical deposition process and related device structures |
TWI799494B (zh) | 2018-01-19 | 2023-04-21 | 荷蘭商Asm 智慧財產控股公司 | 沈積方法 |
CN111630203A (zh) | 2018-01-19 | 2020-09-04 | Asm Ip私人控股有限公司 | 通过等离子体辅助沉积来沉积间隙填充层的方法 |
USD903477S1 (en) | 2018-01-24 | 2020-12-01 | Asm Ip Holdings B.V. | Metal clamp |
US11018047B2 (en) | 2018-01-25 | 2021-05-25 | Asm Ip Holding B.V. | Hybrid lift pin |
USD880437S1 (en) | 2018-02-01 | 2020-04-07 | Asm Ip Holding B.V. | Gas supply plate for semiconductor manufacturing apparatus |
US11081345B2 (en) | 2018-02-06 | 2021-08-03 | Asm Ip Holding B.V. | Method of post-deposition treatment for silicon oxide film |
US10896820B2 (en) | 2018-02-14 | 2021-01-19 | Asm Ip Holding B.V. | Method for depositing a ruthenium-containing film on a substrate by a cyclical deposition process |
WO2019158960A1 (en) | 2018-02-14 | 2019-08-22 | Asm Ip Holding B.V. | A method for depositing a ruthenium-containing film on a substrate by a cyclical deposition process |
US10731249B2 (en) | 2018-02-15 | 2020-08-04 | Asm Ip Holding B.V. | Method of forming a transition metal containing film on a substrate by a cyclical deposition process, a method for supplying a transition metal halide compound to a reaction chamber, and related vapor deposition apparatus |
KR102636427B1 (ko) | 2018-02-20 | 2024-02-13 | 에이에스엠 아이피 홀딩 비.브이. | 기판 처리 방법 및 장치 |
US10658181B2 (en) | 2018-02-20 | 2020-05-19 | Asm Ip Holding B.V. | Method of spacer-defined direct patterning in semiconductor fabrication |
US10975470B2 (en) | 2018-02-23 | 2021-04-13 | Asm Ip Holding B.V. | Apparatus for detecting or monitoring for a chemical precursor in a high temperature environment |
US11473195B2 (en) | 2018-03-01 | 2022-10-18 | Asm Ip Holding B.V. | Semiconductor processing apparatus and a method for processing a substrate |
US11629406B2 (en) | 2018-03-09 | 2023-04-18 | Asm Ip Holding B.V. | Semiconductor processing apparatus comprising one or more pyrometers for measuring a temperature of a substrate during transfer of the substrate |
US11114283B2 (en) | 2018-03-16 | 2021-09-07 | Asm Ip Holding B.V. | Reactor, system including the reactor, and methods of manufacturing and using same |
KR102646467B1 (ko) | 2018-03-27 | 2024-03-11 | 에이에스엠 아이피 홀딩 비.브이. | 기판 상에 전극을 형성하는 방법 및 전극을 포함하는 반도체 소자 구조 |
US11088002B2 (en) | 2018-03-29 | 2021-08-10 | Asm Ip Holding B.V. | Substrate rack and a substrate processing system and method |
US11230766B2 (en) | 2018-03-29 | 2022-01-25 | Asm Ip Holding B.V. | Substrate processing apparatus and method |
KR102501472B1 (ko) | 2018-03-30 | 2023-02-20 | 에이에스엠 아이피 홀딩 비.브이. | 기판 처리 방법 |
US12025484B2 (en) | 2018-05-08 | 2024-07-02 | Asm Ip Holding B.V. | Thin film forming method |
KR20190128558A (ko) | 2018-05-08 | 2019-11-18 | 에이에스엠 아이피 홀딩 비.브이. | 기판 상에 산화물 막을 주기적 증착 공정에 의해 증착하기 위한 방법 및 관련 소자 구조 |
TW202349473A (zh) | 2018-05-11 | 2023-12-16 | 荷蘭商Asm Ip私人控股有限公司 | 用於基板上形成摻雜金屬碳化物薄膜之方法及相關半導體元件結構 |
KR102596988B1 (ko) | 2018-05-28 | 2023-10-31 | 에이에스엠 아이피 홀딩 비.브이. | 기판 처리 방법 및 그에 의해 제조된 장치 |
US11718913B2 (en) | 2018-06-04 | 2023-08-08 | Asm Ip Holding B.V. | Gas distribution system and reactor system including same |
US11270899B2 (en) | 2018-06-04 | 2022-03-08 | Asm Ip Holding B.V. | Wafer handling chamber with moisture reduction |
US11286562B2 (en) | 2018-06-08 | 2022-03-29 | Asm Ip Holding B.V. | Gas-phase chemical reactor and method of using same |
US10797133B2 (en) | 2018-06-21 | 2020-10-06 | Asm Ip Holding B.V. | Method for depositing a phosphorus doped silicon arsenide film and related semiconductor device structures |
KR102568797B1 (ko) | 2018-06-21 | 2023-08-21 | 에이에스엠 아이피 홀딩 비.브이. | 기판 처리 시스템 |
TW202405221A (zh) | 2018-06-27 | 2024-02-01 | 荷蘭商Asm Ip私人控股有限公司 | 用於形成含金屬材料及包含含金屬材料的膜及結構之循環沉積方法 |
TW202409324A (zh) | 2018-06-27 | 2024-03-01 | 荷蘭商Asm Ip私人控股有限公司 | 用於形成含金屬材料之循環沉積製程 |
TWI751420B (zh) | 2018-06-29 | 2022-01-01 | 荷蘭商Asm知識產權私人控股有限公司 | 薄膜沉積方法 |
US10612136B2 (en) | 2018-06-29 | 2020-04-07 | ASM IP Holding, B.V. | Temperature-controlled flange and reactor system including same |
US10388513B1 (en) | 2018-07-03 | 2019-08-20 | Asm Ip Holding B.V. | Method for depositing silicon-free carbon-containing film as gap-fill layer by pulse plasma-assisted deposition |
US10755922B2 (en) | 2018-07-03 | 2020-08-25 | Asm Ip Holding B.V. | Method for depositing silicon-free carbon-containing film as gap-fill layer by pulse plasma-assisted deposition |
US10767789B2 (en) | 2018-07-16 | 2020-09-08 | Asm Ip Holding B.V. | Diaphragm valves, valve components, and methods for forming valve components |
US11053591B2 (en) | 2018-08-06 | 2021-07-06 | Asm Ip Holding B.V. | Multi-port gas injection system and reactor system including same |
US10883175B2 (en) | 2018-08-09 | 2021-01-05 | Asm Ip Holding B.V. | Vertical furnace for processing substrates and a liner for use therein |
US10829852B2 (en) | 2018-08-16 | 2020-11-10 | Asm Ip Holding B.V. | Gas distribution device for a wafer processing apparatus |
US11430674B2 (en) | 2018-08-22 | 2022-08-30 | Asm Ip Holding B.V. | Sensor array, apparatus for dispensing a vapor phase reactant to a reaction chamber and related methods |
KR20200030162A (ko) | 2018-09-11 | 2020-03-20 | 에이에스엠 아이피 홀딩 비.브이. | 박막 증착 방법 |
US11024523B2 (en) | 2018-09-11 | 2021-06-01 | Asm Ip Holding B.V. | Substrate processing apparatus and method |
US11049751B2 (en) | 2018-09-14 | 2021-06-29 | Asm Ip Holding B.V. | Cassette supply system to store and handle cassettes and processing apparatus equipped therewith |
CN110970344A (zh) | 2018-10-01 | 2020-04-07 | Asm Ip控股有限公司 | 衬底保持设备、包含所述设备的系统及其使用方法 |
US11232963B2 (en) | 2018-10-03 | 2022-01-25 | Asm Ip Holding B.V. | Substrate processing apparatus and method |
KR102592699B1 (ko) | 2018-10-08 | 2023-10-23 | 에이에스엠 아이피 홀딩 비.브이. | 기판 지지 유닛 및 이를 포함하는 박막 증착 장치와 기판 처리 장치 |
US10847365B2 (en) | 2018-10-11 | 2020-11-24 | Asm Ip Holding B.V. | Method of forming conformal silicon carbide film by cyclic CVD |
US10811256B2 (en) | 2018-10-16 | 2020-10-20 | Asm Ip Holding B.V. | Method for etching a carbon-containing feature |
KR102546322B1 (ko) | 2018-10-19 | 2023-06-21 | 에이에스엠 아이피 홀딩 비.브이. | 기판 처리 장치 및 기판 처리 방법 |
KR102605121B1 (ko) | 2018-10-19 | 2023-11-23 | 에이에스엠 아이피 홀딩 비.브이. | 기판 처리 장치 및 기판 처리 방법 |
USD948463S1 (en) | 2018-10-24 | 2022-04-12 | Asm Ip Holding B.V. | Susceptor for semiconductor substrate supporting apparatus |
US11087997B2 (en) | 2018-10-31 | 2021-08-10 | Asm Ip Holding B.V. | Substrate processing apparatus for processing substrates |
KR20200051105A (ko) | 2018-11-02 | 2020-05-13 | 에이에스엠 아이피 홀딩 비.브이. | 기판 지지 유닛 및 이를 포함하는 기판 처리 장치 |
US11572620B2 (en) | 2018-11-06 | 2023-02-07 | Asm Ip Holding B.V. | Methods for selectively depositing an amorphous silicon film on a substrate |
US11031242B2 (en) | 2018-11-07 | 2021-06-08 | Asm Ip Holding B.V. | Methods for depositing a boron doped silicon germanium film |
US10818758B2 (en) | 2018-11-16 | 2020-10-27 | Asm Ip Holding B.V. | Methods for forming a metal silicate film on a substrate in a reaction chamber and related semiconductor device structures |
US10847366B2 (en) | 2018-11-16 | 2020-11-24 | Asm Ip Holding B.V. | Methods for depositing a transition metal chalcogenide film on a substrate by a cyclical deposition process |
US12040199B2 (en) | 2018-11-28 | 2024-07-16 | Asm Ip Holding B.V. | Substrate processing apparatus for processing substrates |
US11217444B2 (en) | 2018-11-30 | 2022-01-04 | Asm Ip Holding B.V. | Method for forming an ultraviolet radiation responsive metal oxide-containing film |
KR102636428B1 (ko) | 2018-12-04 | 2024-02-13 | 에이에스엠 아이피 홀딩 비.브이. | 기판 처리 장치를 세정하는 방법 |
US11158513B2 (en) | 2018-12-13 | 2021-10-26 | Asm Ip Holding B.V. | Methods for forming a rhenium-containing film on a substrate by a cyclical deposition process and related semiconductor device structures |
JP7504584B2 (ja) | 2018-12-14 | 2024-06-24 | エーエスエム・アイピー・ホールディング・ベー・フェー | 窒化ガリウムの選択的堆積を用いてデバイス構造体を形成する方法及びそのためのシステム |
TWI819180B (zh) | 2019-01-17 | 2023-10-21 | 荷蘭商Asm 智慧財產控股公司 | 藉由循環沈積製程於基板上形成含過渡金屬膜之方法 |
KR20200091543A (ko) | 2019-01-22 | 2020-07-31 | 에이에스엠 아이피 홀딩 비.브이. | 기판 처리 장치 |
CN111524788B (zh) | 2019-02-01 | 2023-11-24 | Asm Ip私人控股有限公司 | 氧化硅的拓扑选择性膜形成的方法 |
SE543442C2 (en) * | 2019-02-01 | 2021-02-16 | Ionautics Ab | A method and apparatus for chemical vapor deposition and a Fin field-effect transistor |
KR102626263B1 (ko) | 2019-02-20 | 2024-01-16 | 에이에스엠 아이피 홀딩 비.브이. | 처리 단계를 포함하는 주기적 증착 방법 및 이를 위한 장치 |
JP2020136678A (ja) | 2019-02-20 | 2020-08-31 | エーエスエム・アイピー・ホールディング・ベー・フェー | 基材表面内に形成された凹部を充填するための方法および装置 |
JP7509548B2 (ja) | 2019-02-20 | 2024-07-02 | エーエスエム・アイピー・ホールディング・ベー・フェー | 基材表面内に形成された凹部を充填するための周期的堆積方法および装置 |
US11482533B2 (en) | 2019-02-20 | 2022-10-25 | Asm Ip Holding B.V. | Apparatus and methods for plug fill deposition in 3-D NAND applications |
JP2020133004A (ja) | 2019-02-22 | 2020-08-31 | エーエスエム・アイピー・ホールディング・ベー・フェー | 基材を処理するための基材処理装置および方法 |
KR20200108242A (ko) | 2019-03-08 | 2020-09-17 | 에이에스엠 아이피 홀딩 비.브이. | 실리콘 질화물 층을 선택적으로 증착하는 방법, 및 선택적으로 증착된 실리콘 질화물 층을 포함하는 구조체 |
KR20200108243A (ko) | 2019-03-08 | 2020-09-17 | 에이에스엠 아이피 홀딩 비.브이. | SiOC 층을 포함한 구조체 및 이의 형성 방법 |
KR20200108248A (ko) | 2019-03-08 | 2020-09-17 | 에이에스엠 아이피 홀딩 비.브이. | SiOCN 층을 포함한 구조체 및 이의 형성 방법 |
KR20200116033A (ko) | 2019-03-28 | 2020-10-08 | 에이에스엠 아이피 홀딩 비.브이. | 도어 개방기 및 이를 구비한 기판 처리 장치 |
KR20200116855A (ko) | 2019-04-01 | 2020-10-13 | 에이에스엠 아이피 홀딩 비.브이. | 반도체 소자를 제조하는 방법 |
KR20200123380A (ko) | 2019-04-19 | 2020-10-29 | 에이에스엠 아이피 홀딩 비.브이. | 층 형성 방법 및 장치 |
KR20200125453A (ko) | 2019-04-24 | 2020-11-04 | 에이에스엠 아이피 홀딩 비.브이. | 기상 반응기 시스템 및 이를 사용하는 방법 |
KR20200130121A (ko) | 2019-05-07 | 2020-11-18 | 에이에스엠 아이피 홀딩 비.브이. | 딥 튜브가 있는 화학물질 공급원 용기 |
KR20200130118A (ko) | 2019-05-07 | 2020-11-18 | 에이에스엠 아이피 홀딩 비.브이. | 비정질 탄소 중합체 막을 개질하는 방법 |
KR20200130652A (ko) | 2019-05-10 | 2020-11-19 | 에이에스엠 아이피 홀딩 비.브이. | 표면 상에 재료를 증착하는 방법 및 본 방법에 따라 형성된 구조 |
JP2020188254A (ja) | 2019-05-16 | 2020-11-19 | エーエスエム アイピー ホールディング ビー.ブイ. | ウェハボートハンドリング装置、縦型バッチ炉および方法 |
JP2020188255A (ja) | 2019-05-16 | 2020-11-19 | エーエスエム アイピー ホールディング ビー.ブイ. | ウェハボートハンドリング装置、縦型バッチ炉および方法 |
USD947913S1 (en) | 2019-05-17 | 2022-04-05 | Asm Ip Holding B.V. | Susceptor shaft |
USD975665S1 (en) | 2019-05-17 | 2023-01-17 | Asm Ip Holding B.V. | Susceptor shaft |
USD935572S1 (en) | 2019-05-24 | 2021-11-09 | Asm Ip Holding B.V. | Gas channel plate |
USD922229S1 (en) | 2019-06-05 | 2021-06-15 | Asm Ip Holding B.V. | Device for controlling a temperature of a gas supply unit |
KR20200141002A (ko) | 2019-06-06 | 2020-12-17 | 에이에스엠 아이피 홀딩 비.브이. | 배기 가스 분석을 포함한 기상 반응기 시스템을 사용하는 방법 |
KR20200143254A (ko) | 2019-06-11 | 2020-12-23 | 에이에스엠 아이피 홀딩 비.브이. | 개질 가스를 사용하여 전자 구조를 형성하는 방법, 상기 방법을 수행하기 위한 시스템, 및 상기 방법을 사용하여 형성되는 구조 |
USD944946S1 (en) | 2019-06-14 | 2022-03-01 | Asm Ip Holding B.V. | Shower plate |
USD931978S1 (en) | 2019-06-27 | 2021-09-28 | Asm Ip Holding B.V. | Showerhead vacuum transport |
KR20210005515A (ko) | 2019-07-03 | 2021-01-14 | 에이에스엠 아이피 홀딩 비.브이. | 기판 처리 장치용 온도 제어 조립체 및 이를 사용하는 방법 |
JP7499079B2 (ja) | 2019-07-09 | 2024-06-13 | エーエスエム・アイピー・ホールディング・ベー・フェー | 同軸導波管を用いたプラズマ装置、基板処理方法 |
CN112216646A (zh) | 2019-07-10 | 2021-01-12 | Asm Ip私人控股有限公司 | 基板支撑组件及包括其的基板处理装置 |
KR20210010307A (ko) | 2019-07-16 | 2021-01-27 | 에이에스엠 아이피 홀딩 비.브이. | 기판 처리 장치 |
KR20210010816A (ko) | 2019-07-17 | 2021-01-28 | 에이에스엠 아이피 홀딩 비.브이. | 라디칼 보조 점화 플라즈마 시스템 및 방법 |
KR20210010820A (ko) | 2019-07-17 | 2021-01-28 | 에이에스엠 아이피 홀딩 비.브이. | 실리콘 게르마늄 구조를 형성하는 방법 |
US11643724B2 (en) | 2019-07-18 | 2023-05-09 | Asm Ip Holding B.V. | Method of forming structures using a neutral beam |
TWI839544B (zh) | 2019-07-19 | 2024-04-21 | 荷蘭商Asm Ip私人控股有限公司 | 形成形貌受控的非晶碳聚合物膜之方法 |
TW202113936A (zh) | 2019-07-29 | 2021-04-01 | 荷蘭商Asm Ip私人控股有限公司 | 用於利用n型摻雜物及/或替代摻雜物選擇性沉積以達成高摻雜物併入之方法 |
CN112309899A (zh) | 2019-07-30 | 2021-02-02 | Asm Ip私人控股有限公司 | 基板处理设备 |
CN112309900A (zh) | 2019-07-30 | 2021-02-02 | Asm Ip私人控股有限公司 | 基板处理设备 |
US11587815B2 (en) | 2019-07-31 | 2023-02-21 | Asm Ip Holding B.V. | Vertical batch furnace assembly |
US11587814B2 (en) | 2019-07-31 | 2023-02-21 | Asm Ip Holding B.V. | Vertical batch furnace assembly |
US11227782B2 (en) | 2019-07-31 | 2022-01-18 | Asm Ip Holding B.V. | Vertical batch furnace assembly |
CN112323048B (zh) | 2019-08-05 | 2024-02-09 | Asm Ip私人控股有限公司 | 用于化学源容器的液位传感器 |
USD965524S1 (en) | 2019-08-19 | 2022-10-04 | Asm Ip Holding B.V. | Susceptor support |
USD965044S1 (en) | 2019-08-19 | 2022-09-27 | Asm Ip Holding B.V. | Susceptor shaft |
JP2021031769A (ja) | 2019-08-21 | 2021-03-01 | エーエスエム アイピー ホールディング ビー.ブイ. | 成膜原料混合ガス生成装置及び成膜装置 |
USD979506S1 (en) | 2019-08-22 | 2023-02-28 | Asm Ip Holding B.V. | Insulator |
KR20210024423A (ko) | 2019-08-22 | 2021-03-05 | 에이에스엠 아이피 홀딩 비.브이. | 홀을 구비한 구조체를 형성하기 위한 방법 |
USD949319S1 (en) | 2019-08-22 | 2022-04-19 | Asm Ip Holding B.V. | Exhaust duct |
USD940837S1 (en) | 2019-08-22 | 2022-01-11 | Asm Ip Holding B.V. | Electrode |
USD930782S1 (en) | 2019-08-22 | 2021-09-14 | Asm Ip Holding B.V. | Gas distributor |
US11286558B2 (en) | 2019-08-23 | 2022-03-29 | Asm Ip Holding B.V. | Methods for depositing a molybdenum nitride film on a surface of a substrate by a cyclical deposition process and related semiconductor device structures including a molybdenum nitride film |
KR20210024420A (ko) | 2019-08-23 | 2021-03-05 | 에이에스엠 아이피 홀딩 비.브이. | 비스(디에틸아미노)실란을 사용하여 peald에 의해 개선된 품질을 갖는 실리콘 산화물 막을 증착하기 위한 방법 |
KR20210029090A (ko) | 2019-09-04 | 2021-03-15 | 에이에스엠 아이피 홀딩 비.브이. | 희생 캡핑 층을 이용한 선택적 증착 방법 |
KR20210029663A (ko) | 2019-09-05 | 2021-03-16 | 에이에스엠 아이피 홀딩 비.브이. | 기판 처리 장치 |
US11562901B2 (en) | 2019-09-25 | 2023-01-24 | Asm Ip Holding B.V. | Substrate processing method |
CN112593212B (zh) | 2019-10-02 | 2023-12-22 | Asm Ip私人控股有限公司 | 通过循环等离子体增强沉积工艺形成拓扑选择性氧化硅膜的方法 |
CN112635282A (zh) | 2019-10-08 | 2021-04-09 | Asm Ip私人控股有限公司 | 具有连接板的基板处理装置、基板处理方法 |
KR20210042810A (ko) | 2019-10-08 | 2021-04-20 | 에이에스엠 아이피 홀딩 비.브이. | 활성 종을 이용하기 위한 가스 분배 어셈블리를 포함한 반응기 시스템 및 이를 사용하는 방법 |
KR20210043460A (ko) | 2019-10-10 | 2021-04-21 | 에이에스엠 아이피 홀딩 비.브이. | 포토레지스트 하부층을 형성하기 위한 방법 및 이를 포함한 구조체 |
US12009241B2 (en) | 2019-10-14 | 2024-06-11 | Asm Ip Holding B.V. | Vertical batch furnace assembly with detector to detect cassette |
TWI834919B (zh) | 2019-10-16 | 2024-03-11 | 荷蘭商Asm Ip私人控股有限公司 | 氧化矽之拓撲選擇性膜形成之方法 |
US11637014B2 (en) | 2019-10-17 | 2023-04-25 | Asm Ip Holding B.V. | Methods for selective deposition of doped semiconductor material |
KR20210047808A (ko) | 2019-10-21 | 2021-04-30 | 에이에스엠 아이피 홀딩 비.브이. | 막을 선택적으로 에칭하기 위한 장치 및 방법 |
KR20210050453A (ko) | 2019-10-25 | 2021-05-07 | 에이에스엠 아이피 홀딩 비.브이. | 기판 표면 상의 갭 피처를 충진하는 방법 및 이와 관련된 반도체 소자 구조 |
US11646205B2 (en) | 2019-10-29 | 2023-05-09 | Asm Ip Holding B.V. | Methods of selectively forming n-type doped material on a surface, systems for selectively forming n-type doped material, and structures formed using same |
KR20210054983A (ko) | 2019-11-05 | 2021-05-14 | 에이에스엠 아이피 홀딩 비.브이. | 도핑된 반도체 층을 갖는 구조체 및 이를 형성하기 위한 방법 및 시스템 |
US11501968B2 (en) | 2019-11-15 | 2022-11-15 | Asm Ip Holding B.V. | Method for providing a semiconductor device with silicon filled gaps |
KR20210062561A (ko) | 2019-11-20 | 2021-05-31 | 에이에스엠 아이피 홀딩 비.브이. | 기판의 표면 상에 탄소 함유 물질을 증착하는 방법, 상기 방법을 사용하여 형성된 구조물, 및 상기 구조물을 형성하기 위한 시스템 |
US11450529B2 (en) | 2019-11-26 | 2022-09-20 | Asm Ip Holding B.V. | Methods for selectively forming a target film on a substrate comprising a first dielectric surface and a second metallic surface |
CN112951697A (zh) | 2019-11-26 | 2021-06-11 | Asm Ip私人控股有限公司 | 基板处理设备 |
CN112885692A (zh) | 2019-11-29 | 2021-06-01 | Asm Ip私人控股有限公司 | 基板处理设备 |
CN112885693A (zh) | 2019-11-29 | 2021-06-01 | Asm Ip私人控股有限公司 | 基板处理设备 |
JP2021090042A (ja) | 2019-12-02 | 2021-06-10 | エーエスエム アイピー ホールディング ビー.ブイ. | 基板処理装置、基板処理方法 |
KR20210070898A (ko) | 2019-12-04 | 2021-06-15 | 에이에스엠 아이피 홀딩 비.브이. | 기판 처리 장치 |
KR20210078405A (ko) | 2019-12-17 | 2021-06-28 | 에이에스엠 아이피 홀딩 비.브이. | 바나듐 나이트라이드 층을 형성하는 방법 및 바나듐 나이트라이드 층을 포함하는 구조 |
US11527403B2 (en) | 2019-12-19 | 2022-12-13 | Asm Ip Holding B.V. | Methods for filling a gap feature on a substrate surface and related semiconductor structures |
US11410889B2 (en) * | 2019-12-31 | 2022-08-09 | Taiwan Semiconductor Manufacturing Co., Ltd. | Semiconductor device and manufacturing method thereof |
KR20210089079A (ko) | 2020-01-06 | 2021-07-15 | 에이에스엠 아이피 홀딩 비.브이. | 채널형 리프트 핀 |
TW202140135A (zh) | 2020-01-06 | 2021-11-01 | 荷蘭商Asm Ip私人控股有限公司 | 氣體供應總成以及閥板總成 |
US11993847B2 (en) | 2020-01-08 | 2024-05-28 | Asm Ip Holding B.V. | Injector |
KR102675856B1 (ko) | 2020-01-20 | 2024-06-17 | 에이에스엠 아이피 홀딩 비.브이. | 박막 형성 방법 및 박막 표면 개질 방법 |
TW202130846A (zh) | 2020-02-03 | 2021-08-16 | 荷蘭商Asm Ip私人控股有限公司 | 形成包括釩或銦層的結構之方法 |
KR20210100010A (ko) | 2020-02-04 | 2021-08-13 | 에이에스엠 아이피 홀딩 비.브이. | 대형 물품의 투과율 측정을 위한 방법 및 장치 |
US11776846B2 (en) | 2020-02-07 | 2023-10-03 | Asm Ip Holding B.V. | Methods for depositing gap filling fluids and related systems and devices |
US11781243B2 (en) | 2020-02-17 | 2023-10-10 | Asm Ip Holding B.V. | Method for depositing low temperature phosphorous-doped silicon |
TW202203344A (zh) | 2020-02-28 | 2022-01-16 | 荷蘭商Asm Ip控股公司 | 專用於零件清潔的系統 |
US11876356B2 (en) | 2020-03-11 | 2024-01-16 | Asm Ip Holding B.V. | Lockout tagout assembly and system and method of using same |
KR20210116240A (ko) | 2020-03-11 | 2021-09-27 | 에이에스엠 아이피 홀딩 비.브이. | 조절성 접합부를 갖는 기판 핸들링 장치 |
CN113394086A (zh) | 2020-03-12 | 2021-09-14 | Asm Ip私人控股有限公司 | 用于制造具有目标拓扑轮廓的层结构的方法 |
KR20210124042A (ko) | 2020-04-02 | 2021-10-14 | 에이에스엠 아이피 홀딩 비.브이. | 박막 형성 방법 |
TW202146689A (zh) | 2020-04-03 | 2021-12-16 | 荷蘭商Asm Ip控股公司 | 阻障層形成方法及半導體裝置的製造方法 |
TW202145344A (zh) | 2020-04-08 | 2021-12-01 | 荷蘭商Asm Ip私人控股有限公司 | 用於選擇性蝕刻氧化矽膜之設備及方法 |
US11821078B2 (en) | 2020-04-15 | 2023-11-21 | Asm Ip Holding B.V. | Method for forming precoat film and method for forming silicon-containing film |
US11996289B2 (en) | 2020-04-16 | 2024-05-28 | Asm Ip Holding B.V. | Methods of forming structures including silicon germanium and silicon layers, devices formed using the methods, and systems for performing the methods |
CN113555279A (zh) | 2020-04-24 | 2021-10-26 | Asm Ip私人控股有限公司 | 形成含氮化钒的层的方法及包含其的结构 |
KR20210132600A (ko) | 2020-04-24 | 2021-11-04 | 에이에스엠 아이피 홀딩 비.브이. | 바나듐, 질소 및 추가 원소를 포함한 층을 증착하기 위한 방법 및 시스템 |
KR20210132605A (ko) | 2020-04-24 | 2021-11-04 | 에이에스엠 아이피 홀딩 비.브이. | 냉각 가스 공급부를 포함한 수직형 배치 퍼니스 어셈블리 |
KR20210134226A (ko) | 2020-04-29 | 2021-11-09 | 에이에스엠 아이피 홀딩 비.브이. | 고체 소스 전구체 용기 |
KR20210134869A (ko) | 2020-05-01 | 2021-11-11 | 에이에스엠 아이피 홀딩 비.브이. | Foup 핸들러를 이용한 foup의 빠른 교환 |
KR20210141379A (ko) | 2020-05-13 | 2021-11-23 | 에이에스엠 아이피 홀딩 비.브이. | 반응기 시스템용 레이저 정렬 고정구 |
KR20210143653A (ko) | 2020-05-19 | 2021-11-29 | 에이에스엠 아이피 홀딩 비.브이. | 기판 처리 장치 |
KR20210145078A (ko) | 2020-05-21 | 2021-12-01 | 에이에스엠 아이피 홀딩 비.브이. | 다수의 탄소 층을 포함한 구조체 및 이를 형성하고 사용하는 방법 |
KR20210145080A (ko) | 2020-05-22 | 2021-12-01 | 에이에스엠 아이피 홀딩 비.브이. | 과산화수소를 사용하여 박막을 증착하기 위한 장치 |
TW202201602A (zh) | 2020-05-29 | 2022-01-01 | 荷蘭商Asm Ip私人控股有限公司 | 基板處理方法 |
TW202218133A (zh) | 2020-06-24 | 2022-05-01 | 荷蘭商Asm Ip私人控股有限公司 | 形成含矽層之方法 |
TW202217953A (zh) | 2020-06-30 | 2022-05-01 | 荷蘭商Asm Ip私人控股有限公司 | 基板處理方法 |
TW202202649A (zh) | 2020-07-08 | 2022-01-16 | 荷蘭商Asm Ip私人控股有限公司 | 基板處理方法 |
US11508826B2 (en) | 2020-07-16 | 2022-11-22 | Taiwan Semiconductor Manufacturing Co., Ltd. | Composite work function layer formation using same work function material |
CN111876749A (zh) * | 2020-07-17 | 2020-11-03 | 上海华力集成电路制造有限公司 | 改善炉管工艺中硅片薄膜厚度差异的方法 |
KR20220010438A (ko) | 2020-07-17 | 2022-01-25 | 에이에스엠 아이피 홀딩 비.브이. | 포토리소그래피에 사용하기 위한 구조체 및 방법 |
TW202204662A (zh) | 2020-07-20 | 2022-02-01 | 荷蘭商Asm Ip私人控股有限公司 | 用於沉積鉬層之方法及系統 |
US12040177B2 (en) | 2020-08-18 | 2024-07-16 | Asm Ip Holding B.V. | Methods for forming a laminate film by cyclical plasma-enhanced deposition processes |
KR20220027026A (ko) | 2020-08-26 | 2022-03-07 | 에이에스엠 아이피 홀딩 비.브이. | 금속 실리콘 산화물 및 금속 실리콘 산질화물 층을 형성하기 위한 방법 및 시스템 |
US11600507B2 (en) * | 2020-09-09 | 2023-03-07 | Applied Materials, Inc. | Pedestal assembly for a substrate processing chamber |
USD990534S1 (en) | 2020-09-11 | 2023-06-27 | Asm Ip Holding B.V. | Weighted lift pin |
USD1012873S1 (en) | 2020-09-24 | 2024-01-30 | Asm Ip Holding B.V. | Electrode for semiconductor processing apparatus |
US12009224B2 (en) | 2020-09-29 | 2024-06-11 | Asm Ip Holding B.V. | Apparatus and method for etching metal nitrides |
TW202229613A (zh) | 2020-10-14 | 2022-08-01 | 荷蘭商Asm Ip私人控股有限公司 | 於階梯式結構上沉積材料的方法 |
KR20220053482A (ko) | 2020-10-22 | 2022-04-29 | 에이에스엠 아이피 홀딩 비.브이. | 바나듐 금속을 증착하는 방법, 구조체, 소자 및 증착 어셈블리 |
TW202223136A (zh) | 2020-10-28 | 2022-06-16 | 荷蘭商Asm Ip私人控股有限公司 | 用於在基板上形成層之方法、及半導體處理系統 |
TW202235649A (zh) | 2020-11-24 | 2022-09-16 | 荷蘭商Asm Ip私人控股有限公司 | 填充間隙之方法與相關之系統及裝置 |
KR20220076343A (ko) | 2020-11-30 | 2022-06-08 | 에이에스엠 아이피 홀딩 비.브이. | 기판 처리 장치의 반응 챔버 내에 배열되도록 구성된 인젝터 |
CN114639631A (zh) | 2020-12-16 | 2022-06-17 | Asm Ip私人控股有限公司 | 跳动和摆动测量固定装置 |
TW202231903A (zh) | 2020-12-22 | 2022-08-16 | 荷蘭商Asm Ip私人控股有限公司 | 過渡金屬沉積方法、過渡金屬層、用於沉積過渡金屬於基板上的沉積總成 |
USD981973S1 (en) | 2021-05-11 | 2023-03-28 | Asm Ip Holding B.V. | Reactor wall for substrate processing apparatus |
USD980814S1 (en) | 2021-05-11 | 2023-03-14 | Asm Ip Holding B.V. | Gas distributor for substrate processing apparatus |
USD1023959S1 (en) | 2021-05-11 | 2024-04-23 | Asm Ip Holding B.V. | Electrode for substrate processing apparatus |
USD980813S1 (en) | 2021-05-11 | 2023-03-14 | Asm Ip Holding B.V. | Gas flow control plate for substrate processing apparatus |
USD990441S1 (en) | 2021-09-07 | 2023-06-27 | Asm Ip Holding B.V. | Gas flow control plate |
CN114836729A (zh) * | 2022-05-17 | 2022-08-02 | 合肥安德科铭半导体科技有限公司 | 一种功函数可调的wcn薄膜沉积方法 |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TW201501186A (zh) * | 2013-03-14 | 2015-01-01 | Asm Ip Holding Bv | 金屬薄膜的矽烷或硼烷處理 |
TW201700764A (zh) * | 2015-06-16 | 2017-01-01 | Asm Ip控股公司 | 形成金屬-絕緣體-半導體結構之方法及積體電路製造方法 |
Family Cites Families (5031)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3089507A (en) | 1963-05-14 | Air eject system control valve | ||
FR686869A (fr) | 1930-12-31 | 1930-07-31 | Jacob Ets | Robinet mélangeur |
GB400010A (en) | 1931-10-05 | 1933-10-19 | Johann Puppe | Improvements in and connected with ingot moulds |
US2059480A (en) | 1933-09-20 | 1936-11-03 | John A Obermaier | Thermocouple |
US2161626A (en) | 1937-09-25 | 1939-06-06 | Walworth Patents Inc | Locking device |
US2240163A (en) | 1938-09-30 | 1941-04-29 | Permutit Co | Valve apparatus for controlling hydraulic or pneumatic machines |
US2266416A (en) | 1939-01-14 | 1941-12-16 | Western Electric Co | Control apparatus |
US2280778A (en) | 1939-09-29 | 1942-04-28 | John C Andersen | Garden tool |
US2410420A (en) | 1944-01-01 | 1946-11-05 | Robert B Bennett | Scraper |
US2441253A (en) | 1944-10-30 | 1948-05-11 | Rohim Mfg Company Inc | Valve |
US2563931A (en) | 1946-04-02 | 1951-08-14 | Honeywell Regulator Co | Rate responsive thermocouple |
US2480557A (en) | 1946-08-02 | 1949-08-30 | Harry S Cummins | Detachable thermocouple housing |
US2660061A (en) | 1949-03-05 | 1953-11-24 | Dominion Eng Works Ltd | Immersion type thermocouple temperature measuring device |
US2745640A (en) | 1953-09-24 | 1956-05-15 | American Viscose Corp | Heat exchanging apparatus |
GB752277A (en) | 1953-10-28 | 1956-07-11 | Canadian Ind 1954 Ltd | Improved thermocouple unit |
US2847320A (en) | 1956-05-08 | 1958-08-12 | Ohio Commw Eng Co | Method for gas plating with aluminum organo compounds |
US3094396A (en) | 1959-07-07 | 1963-06-18 | Continental Can Co | Method of and apparatus for curing internal coatings on can bodies |
US2990045A (en) | 1959-09-18 | 1961-06-27 | Lipe Rollway Corp | Thermally responsive transmission for automobile fan |
US6482262B1 (en) | 1959-10-10 | 2002-11-19 | Asm Microchemistry Oy | Deposition of transition metal carbides |
US3038951A (en) | 1961-01-19 | 1962-06-12 | Leeds & Northrup Co | Fast acting totally expendable immersion thermocouple |
US3197682A (en) | 1961-04-13 | 1965-07-27 | Pure Oil Co | Safet electro-responsive-fluid chuck |
US3232437A (en) | 1963-03-13 | 1966-02-01 | Champlon Lab Inc | Spin-on filter cartridge |
US3410349A (en) | 1964-01-02 | 1968-11-12 | Ted R. Troutman | Tubing scraper and method |
US3263502A (en) | 1964-01-21 | 1966-08-02 | Redwood L Springfield | Multiple thermocouple support |
FR1408266A (fr) | 1964-06-30 | 1965-08-13 | Realisations Electr Et Electro | Prise de raccordement pour thermocouples |
DE1255646B (de) | 1965-02-27 | 1967-12-07 | Hoechst Ag | Verfahren zur Gewinnung von Fluor in Form von Calciumsilicofluorid aus salpeter- oder salzsauren Rohphosphataufschluessen |
US3332286A (en) | 1965-09-02 | 1967-07-25 | Gen Electric | Thermocouple pressure gauge |
NL6706680A (zh) | 1966-06-02 | 1967-12-04 | ||
US3588192A (en) | 1969-06-02 | 1971-06-28 | Trw Inc | Hydraulic skid control system |
US3647387A (en) | 1970-03-19 | 1972-03-07 | Stanford Research Inst | Detection device |
US3647716A (en) | 1970-04-03 | 1972-03-07 | Westvaco Corp | Transport reactor with a venturi tube connection to a combustion chamber for producing activated carbon |
US3634740A (en) | 1970-04-20 | 1972-01-11 | Addressograph Multigraph | Electrostatic holddown |
US4393013A (en) | 1970-05-20 | 1983-07-12 | J. C. Schumacher Company | Vapor mass flow control system |
US3713899A (en) | 1970-11-12 | 1973-01-30 | Ford Motor Co | Thermocouple probe |
US3885504A (en) | 1971-01-09 | 1975-05-27 | Max Baermann | Magnetic stabilizing or suspension system |
US3718429A (en) | 1971-03-15 | 1973-02-27 | Du Pont | No-no2 analyzer |
GB1337173A (en) | 1971-05-17 | 1973-11-14 | Tecalemit Engineering | Fluid flow control |
CA1002299A (en) | 1971-06-24 | 1976-12-28 | William H. Trembley | Installation tool |
US3833492A (en) | 1971-09-22 | 1974-09-03 | Pollution Control Ind Inc | Method of producing ozone |
US3796182A (en) | 1971-12-16 | 1974-03-12 | Applied Materials Tech | Susceptor structure for chemical vapor deposition reactor |
US3862397A (en) | 1972-03-24 | 1975-01-21 | Applied Materials Tech | Cool wall radiantly heated reactor |
FR2181175A5 (zh) | 1972-04-20 | 1973-11-30 | Commissariat Energie Atomique | |
JPS5132766B2 (zh) | 1972-07-25 | 1976-09-14 | ||
JPS5539903B2 (zh) | 1972-10-19 | 1980-10-14 | ||
DE7242602U (zh) | 1972-11-20 | 1976-04-29 | Hoogovens Ijmuiden B.V., Ijmuiden (Niederlande) | |
DE2427992A1 (de) | 1973-06-13 | 1975-03-13 | Thermal Syndicate Ltd | Verfahren zum messen hoher temperaturen mit thermoelementen |
US3854443A (en) | 1973-12-19 | 1974-12-17 | Intel Corp | Gas reactor for depositing thin films |
DE2407133B2 (de) | 1974-02-15 | 1976-12-09 | Deutsche Forschungs- und Versuchsanstalt für Luft- und Raumfahrt e.V., 5300 Bonn | Verfahren und vorrichtung zur bestimmung von stickoxid |
US3904371A (en) | 1974-03-04 | 1975-09-09 | Beckman Instruments Inc | Chemiluminescent ammonia detection |
US3916270A (en) | 1974-05-02 | 1975-10-28 | Tektronix Inc | Electrostatic holddown apparatus |
SU494614A1 (ru) | 1974-05-05 | 1975-12-05 | Специальное Проектно-Конструкторское Бюро "Главнефтеснабсбыта" Усср | Устройство дистанционного измерени уровн жидкости |
US3997638A (en) | 1974-09-18 | 1976-12-14 | Celanese Corporation | Production of metal ion containing carbon fibers useful in electron shielding applications |
US3887790A (en) | 1974-10-07 | 1975-06-03 | Vernon H Ferguson | Wrap-around electric resistance heater |
SE393967B (sv) | 1974-11-29 | 1977-05-31 | Sateko Oy | Forfarande och for utforande av stroleggning mellan lagren i ett virkespaket |
US3962004A (en) | 1974-11-29 | 1976-06-08 | Rca Corporation | Pattern definition in an organic layer |
JPS589954B2 (ja) | 1975-02-28 | 1983-02-23 | 松下電器産業株式会社 | リズムハツセイソウチ |
US3983401A (en) | 1975-03-13 | 1976-09-28 | Electron Beam Microfabrication Corporation | Method and apparatus for target support in electron projection systems |
GB1514921A (en) | 1975-04-02 | 1978-06-21 | Kanji S | Record-playing apparatus |
US4054071A (en) | 1975-06-17 | 1977-10-18 | Aetna-Standard Engineering Company | Flying saw with movable work shifter |
US4079944A (en) | 1975-12-05 | 1978-03-21 | Durley Iii Benton A | Cueing device for phonographs |
DE2610556C2 (de) | 1976-03-12 | 1978-02-02 | Siemens AG, 1000 Berlin und 8000 München | Vorrichtung zum Verteilen strömender Medien über einen Strömungsquerschnitt |
US4048110A (en) | 1976-05-12 | 1977-09-13 | Celanese Corporation | Rhenium catalyst composition |
PL114843B1 (en) | 1976-08-13 | 1981-02-28 | Gewerk Eisenhuette Westfalia | Coupling member for segments of trough-shaped running track of a chain driven scraper coveyor |
USD249341S (en) | 1976-11-11 | 1978-09-12 | Umc Industries, Inc. | Electro-mechanical pulser |
US4194536A (en) | 1976-12-09 | 1980-03-25 | Eaton Corporation | Composite tubing product |
US4181330A (en) | 1977-03-22 | 1980-01-01 | Noriatsu Kojima | Horn shaped multi-inlet pipe fitting |
US4099041A (en) | 1977-04-11 | 1978-07-04 | Rca Corporation | Susceptor for heating semiconductor substrates |
US4164959A (en) | 1977-04-15 | 1979-08-21 | The Salk Institute For Biological Studies | Metering valve |
US4179530A (en) | 1977-05-20 | 1979-12-18 | Wacker-Chemitronic Gesellschaft Fur Elektronik-Grundstoffe Mbh | Process for the deposition of pure semiconductor material |
US4176630A (en) | 1977-06-01 | 1979-12-04 | Dynair Limited | Automatic control valves |
US4126027A (en) | 1977-06-03 | 1978-11-21 | Westinghouse Electric Corp. | Method and apparatus for eccentricity correction in a rolling mill |
US4149237A (en) | 1977-09-16 | 1979-04-10 | The Foxboro Company | Industrial process control system |
US4152760A (en) | 1977-09-16 | 1979-05-01 | The Foxboro Company | Industrial process control system |
US4145699A (en) | 1977-12-07 | 1979-03-20 | Bell Telephone Laboratories, Incorporated | Superconducting junctions utilizing a binary semiconductor barrier |
US4184188A (en) | 1978-01-16 | 1980-01-15 | Veeco Instruments Inc. | Substrate clamping technique in IC fabrication processes |
US4217463A (en) | 1978-03-13 | 1980-08-12 | National Distillers And Chemical Corporation | Fast responsive, high pressure thermocouple |
US4241000A (en) | 1978-08-24 | 1980-12-23 | The United States Of America As Represented By The Secretary Of The Army | Process for producing polycrystalline cubic aluminum oxynitride |
US4229064A (en) | 1978-10-25 | 1980-10-21 | Trw Inc. | Polarizing adapter sleeves for electrical connectors |
US4314763A (en) | 1979-01-04 | 1982-02-09 | Rca Corporation | Defect detection system |
FI57975C (fi) | 1979-02-28 | 1980-11-10 | Lohja Ab Oy | Foerfarande och anordning vid uppbyggande av tunna foereningshinnor |
GB2051875A (en) | 1979-05-29 | 1981-01-21 | Standard Telephones Cables Ltd | Preparing metal coatings |
US4234449A (en) | 1979-05-30 | 1980-11-18 | The United States Of America As Represented By The United States Department Of Energy | Method of handling radioactive alkali metal waste |
JPS5651045A (en) | 1979-09-29 | 1981-05-08 | Toshiba Corp | Detector for part between data of record player |
US4389973A (en) | 1980-03-18 | 1983-06-28 | Oy Lohja Ab | Apparatus for performing growth of compound thin films |
US4324611A (en) | 1980-06-26 | 1982-04-13 | Branson International Plasma Corporation | Process and gas mixture for etching silicon dioxide and silicon nitride |
DE3030697A1 (de) | 1980-08-14 | 1982-03-18 | Hochtemperatur-Reaktorbau GmbH, 5000 Köln | Gasgekuehlter kernreaktor |
US4322592A (en) | 1980-08-22 | 1982-03-30 | Rca Corporation | Susceptor for heating semiconductor substrates |
US4355912A (en) | 1980-09-12 | 1982-10-26 | Haak Raymond L | Spring loaded sensor fitting |
US4479831A (en) | 1980-09-15 | 1984-10-30 | Burroughs Corporation | Method of making low resistance polysilicon gate transistors and low resistance interconnections therefor via gas deposited in-situ doped amorphous layer and heat-treatment |
US4384918A (en) | 1980-09-30 | 1983-05-24 | Fujitsu Limited | Method and apparatus for dry etching and electrostatic chucking device used therein |
EP0058571A1 (en) | 1981-02-18 | 1982-08-25 | National Research Development Corporation | Method and apparatus for delivering a controlled flow rate of reactant to a vapour deposition process |
US4333735A (en) | 1981-03-16 | 1982-06-08 | Exxon Research & Engineering Co. | Process and apparatus for measuring gaseous fixed nitrogen species |
US4466766A (en) | 1981-05-20 | 1984-08-21 | Ruska Instrument Corporation | Transfer apparatus |
NO150532C (no) | 1981-05-22 | 1984-10-31 | Bjoern R Hope | Anordning ved nivaamaaler. |
US4488506A (en) | 1981-06-18 | 1984-12-18 | Itt Industries, Inc. | Metallization plant |
USD269850S (en) | 1981-07-22 | 1983-07-26 | Drag Specialties, Inc. | Handlebar grip |
JPS5819462A (ja) | 1981-07-24 | 1983-02-04 | Kawasaki Steel Corp | 電縫溶接鋼管 |
US4436674A (en) | 1981-07-30 | 1984-03-13 | J.C. Schumacher Co. | Vapor mass flow control system |
NL8103979A (nl) | 1981-08-26 | 1983-03-16 | Bok Edward | Methode en inrichting voor het aanbrengen van een film vloeibaar medium op een substraat. |
US4520116A (en) | 1981-08-31 | 1985-05-28 | Raytheon Company | Transparent aluminum oxynitride and method of manufacture |
US4720362A (en) | 1981-08-31 | 1988-01-19 | Raytheon Company | Transparent aluminum oxynitride and method of manufacture |
US4481300A (en) | 1981-08-31 | 1984-11-06 | Raytheon Company | Aluminum oxynitride having improved optical characteristics and method of manufacture |
GB2106325A (en) | 1981-09-14 | 1983-04-07 | Philips Electronic Associated | Electrostatic chuck |
FR2517790A1 (fr) | 1981-12-07 | 1983-06-10 | British Nuclear Fuels Ltd | Valve a levee equipee d'un soufflet entre l'obturateur et le corps, notamment pour fluides radioactifs ou toxiques |
JPS58107339A (ja) | 1981-12-19 | 1983-06-27 | Takanobu Yamamoto | レ−ザ−ビ−ムによる印判彫刻方法 |
US4412133A (en) | 1982-01-05 | 1983-10-25 | The Perkin-Elmer Corp. | Electrostatic cassette |
US4414492A (en) | 1982-02-02 | 1983-11-08 | Intent Patent A.G. | Electronic ballast system |
JPS6059104B2 (ja) | 1982-02-03 | 1985-12-23 | 株式会社東芝 | 静電チヤツク板 |
NL8200753A (nl) | 1982-02-24 | 1983-09-16 | Integrated Automation | Methode en inrichting voor het aanbrengen van een coating op een substraat of tape. |
US4484061A (en) | 1982-05-13 | 1984-11-20 | Sys-Tec, Inc. | Temperature control system for liquid chromatographic columns employing a thin film heater/sensor |
US4465716A (en) | 1982-06-02 | 1984-08-14 | Texas Instruments Incorporated | Selective deposition of composite materials |
FR2529714A1 (fr) | 1982-07-01 | 1984-01-06 | Commissariat Energie Atomique | Procede de realisation de l'oxyde de champ d'un circuit integre |
US4401507A (en) | 1982-07-14 | 1983-08-30 | Advanced Semiconductor Materials/Am. | Method and apparatus for achieving spatially uniform externally excited non-thermal chemical reactions |
JPS5929435A (ja) | 1982-08-11 | 1984-02-16 | Hitachi Ltd | 試料支持装置 |
NL8203318A (nl) | 1982-08-24 | 1984-03-16 | Integrated Automation | Inrichting voor processing van substraten. |
FR2532783A1 (fr) | 1982-09-07 | 1984-03-09 | Vu Duy Phach | Machine de traitement thermique pour semiconducteurs |
US4454370A (en) | 1982-09-07 | 1984-06-12 | Wahl Instruments, Inc. | Thermocouple surface probe |
US4444990A (en) | 1982-09-08 | 1984-04-24 | Servo Corporation Of America | Heat sensing device |
US5242501A (en) | 1982-09-10 | 1993-09-07 | Lam Research Corporation | Susceptor in chemical vapor deposition reactors |
JPS5945900U (ja) | 1982-09-17 | 1984-03-27 | 住友電気工業株式会社 | 高周波誘導プラズマ用ト−チ |
US4512113A (en) | 1982-09-23 | 1985-04-23 | Budinger William D | Workpiece holder for polishing operation |
US4499354A (en) | 1982-10-06 | 1985-02-12 | General Instrument Corp. | Susceptor for radiant absorption heater system |
JPS5979545A (ja) | 1982-10-29 | 1984-05-08 | Toshiba Corp | 静電チャック装置 |
JPS59127847A (ja) | 1983-01-13 | 1984-07-23 | Tokuda Seisakusho Ltd | スパツタリング装置の静電チヤツク装置 |
JPS60110133A (ja) | 1983-01-24 | 1985-06-15 | Toshiba Corp | 静電チャックにおける異状確認装置 |
US4622918A (en) | 1983-01-31 | 1986-11-18 | Integrated Automation Limited | Module for high vacuum processing |
US4570328A (en) | 1983-03-07 | 1986-02-18 | Motorola, Inc. | Method of producing titanium nitride MOS device gate electrode |
JPS59211779A (ja) | 1983-05-14 | 1984-11-30 | Toshiba Corp | 圧縮機 |
US4537001A (en) | 1983-05-23 | 1985-08-27 | Uppstroem Leif R | Building elements |
US4548688A (en) | 1983-05-23 | 1985-10-22 | Fusion Semiconductor Systems | Hardening of photoresist |
USD274122S (en) | 1983-06-20 | 1984-06-05 | Drag Specialties, Inc. | Motorcycle handlebar grip |
US4551192A (en) | 1983-06-30 | 1985-11-05 | International Business Machines Corporation | Electrostatic or vacuum pinchuck formed with microcircuit lithography |
US4496828A (en) | 1983-07-08 | 1985-01-29 | Ultra Carbon Corporation | Susceptor assembly |
JPS6050923A (ja) | 1983-08-31 | 1985-03-22 | Hitachi Ltd | プラズマ表面処理方法 |
GB2154365A (en) | 1984-02-10 | 1985-09-04 | Philips Electronic Associated | Loading semiconductor wafers on an electrostatic chuck |
JPS6074626A (ja) | 1983-09-30 | 1985-04-26 | Fujitsu Ltd | ウエハー処理方法及び装置 |
US4579080A (en) | 1983-12-09 | 1986-04-01 | Applied Materials, Inc. | Induction heated reactor system for chemical vapor deposition |
US4655592A (en) | 1983-12-30 | 1987-04-07 | Hamamatsu Systems, Inc. | Particle detection method and apparatus |
US6784033B1 (en) | 1984-02-15 | 2004-08-31 | Semiconductor Energy Laboratory Co., Ltd. | Method for the manufacture of an insulated gate field effect semiconductor device |
US4735259A (en) | 1984-02-21 | 1988-04-05 | Hewlett-Packard Company | Heated transfer line for capillary tubing |
USD288556S (en) | 1984-02-21 | 1987-03-03 | Pace, Incorporated | Ornamental design for a frame of circuit elements utilized to replace damaged elements on printed circuit boards |
US5259881A (en) | 1991-05-17 | 1993-11-09 | Materials Research Corporation | Wafer processing cluster tool batch preheating and degassing apparatus |
US4527005A (en) | 1984-03-13 | 1985-07-02 | The United States Of America As Represented By The United States Department Of Energy | Spring loaded thermocouple module |
US4512841A (en) | 1984-04-02 | 1985-04-23 | International Business Machines Corporation | RF Coupling techniques |
US4724272A (en) | 1984-04-17 | 1988-02-09 | Rockwell International Corporation | Method of controlling pyrolysis temperature |
US4575636A (en) | 1984-04-30 | 1986-03-11 | Rca Corporation | Deep ultraviolet (DUV) flood exposure system |
US4611966A (en) | 1984-05-30 | 1986-09-16 | Johnson Lester R | Apparatus for transferring semiconductor wafers |
US4590326A (en) | 1984-06-14 | 1986-05-20 | Texaco Inc. | Multi-element thermocouple |
US4534816A (en) | 1984-06-22 | 1985-08-13 | International Business Machines Corporation | Single wafer plasma etch reactor |
US4858557A (en) | 1984-07-19 | 1989-08-22 | L.P.E. Spa | Epitaxial reactors |
JPS6138863A (ja) | 1984-07-30 | 1986-02-24 | Toshiba Corp | 研磨装置 |
NL8402410A (nl) | 1984-08-01 | 1986-03-03 | Bok Edward | Verbeterde proces installatie met double-floating transport en processing van wafers en tape. |
US4700089A (en) | 1984-08-23 | 1987-10-13 | Fujitsu Limited | Delay circuit for gate-array LSI |
US4579378A (en) | 1984-10-31 | 1986-04-01 | Snyders Robert V | Mortar joint pointing guide |
US6786997B1 (en) | 1984-11-26 | 2004-09-07 | Semiconductor Energy Laboratory Co., Ltd. | Plasma processing apparatus |
JPH0752718B2 (ja) | 1984-11-26 | 1995-06-05 | 株式会社半導体エネルギー研究所 | 薄膜形成方法 |
JPH0236276Y2 (zh) | 1985-01-10 | 1990-10-03 | ||
US4620998A (en) | 1985-02-05 | 1986-11-04 | Haresh Lalvani | Crescent-shaped polygonal tiles |
US4624728A (en) | 1985-06-11 | 1986-11-25 | Tegal Corporation | Pin lift plasma processing |
US4653541A (en) | 1985-06-26 | 1987-03-31 | Parker Hannifin Corporation | Dual wall safety tube |
DE3650127T2 (de) | 1985-08-28 | 1995-05-24 | Fsi Int Inc | Verfahren und vorrichtung zum entfernen von schichten von substraten. |
US4789294A (en) | 1985-08-30 | 1988-12-06 | Canon Kabushiki Kaisha | Wafer handling apparatus and method |
US4776744A (en) | 1985-09-09 | 1988-10-11 | Applied Materials, Inc. | Systems and methods for wafer handling in semiconductor process equipment |
US4721534A (en) | 1985-09-12 | 1988-01-26 | System Planning Corporation | Immersion pyrometer |
US5512102A (en) | 1985-10-14 | 1996-04-30 | Semiconductor Energy Laboratory Co., Ltd. | Microwave enhanced CVD system under magnetic field |
US6230650B1 (en) | 1985-10-14 | 2001-05-15 | Semiconductor Energy Laboratory Co., Ltd. | Microwave enhanced CVD system under magnetic field |
US4949671A (en) | 1985-10-24 | 1990-08-21 | Texas Instruments Incorporated | Processing apparatus and method |
US4664769A (en) | 1985-10-28 | 1987-05-12 | International Business Machines Corporation | Photoelectric enhanced plasma glow discharge system and method including radiation means |
DE3544812A1 (de) | 1985-12-18 | 1987-06-25 | Heraeus Schott Quarzschmelze | Doppelwand-quarzglasrohr fuer die durchfuehrung halbleitertechnologischer prozesse |
JPH0651909B2 (ja) | 1985-12-28 | 1994-07-06 | キヤノン株式会社 | 薄膜多層構造の形成方法 |
KR940000915B1 (ko) | 1986-01-31 | 1994-02-04 | 가부시기가이샤 히다찌세이사꾸쇼 | 표면 처리방법 |
NL8600255A (nl) | 1986-02-03 | 1987-09-01 | Bok Edward | Verbeterde inrichting voor wafer transport en processing. |
US4654226A (en) | 1986-03-03 | 1987-03-31 | The University Of Delaware | Apparatus and method for photochemical vapor deposition |
JPS62222625A (ja) | 1986-03-25 | 1987-09-30 | Shimizu Constr Co Ltd | 半導体製造装置 |
JPS62237236A (ja) | 1986-04-09 | 1987-10-17 | Hitachi Ltd | 恒温清浄作業室 |
US4764076A (en) | 1986-04-17 | 1988-08-16 | Varian Associates, Inc. | Valve incorporating wafer handling arm |
US4917556A (en) | 1986-04-28 | 1990-04-17 | Varian Associates, Inc. | Modular wafer transport and processing system |
US4670126A (en) | 1986-04-28 | 1987-06-02 | Varian Associates, Inc. | Sputter module for modular wafer processing system |
US4770590A (en) | 1986-05-16 | 1988-09-13 | Silicon Valley Group, Inc. | Method and apparatus for transferring wafers between cassettes and a boat |
US4722298A (en) | 1986-05-19 | 1988-02-02 | Machine Technology, Inc. | Modular processing apparatus for processing semiconductor wafers |
US4747367A (en) | 1986-06-12 | 1988-05-31 | Crystal Specialties, Inc. | Method and apparatus for producing a constant flow, constant pressure chemical vapor deposition |
USD309702S (en) | 1986-06-25 | 1990-08-07 | Don Hall | Safety clamp attachment for a hammer |
US4718637A (en) | 1986-07-02 | 1988-01-12 | Mdc Vacuum Products Corporation | High vacuum gate valve having improved metal vacuum joint |
US4681134A (en) | 1986-07-23 | 1987-07-21 | Paris Sr Raymond L | Valve lock |
US5183511A (en) | 1986-07-23 | 1993-02-02 | Semiconductor Energy Laboratory Co., Ltd. | Photo CVD apparatus with a glow discharge system |
US4812201A (en) | 1986-07-25 | 1989-03-14 | Tokyo Electron Limited | Method of ashing layers, and apparatus for ashing layers |
US4749416A (en) | 1986-08-01 | 1988-06-07 | System Planning Corporation | Immersion pyrometer with protective structure for sidewall use |
US4721533A (en) | 1986-08-01 | 1988-01-26 | System Planning Corporation | Protective structure for an immersion pyrometer |
DE3626724C2 (de) | 1986-08-07 | 1994-06-16 | Siemens Ag | Anordnung zur Oberflächenprüfung |
US4882199A (en) | 1986-08-15 | 1989-11-21 | Massachusetts Institute Of Technology | Method of forming a metal coating on a substrate |
KR910003742B1 (ko) | 1986-09-09 | 1991-06-10 | 세미콘덕터 에너지 라보라터리 캄파니 리미티드 | Cvd장치 |
US5427824A (en) | 1986-09-09 | 1995-06-27 | Semiconductor Energy Laboratory Co., Ltd. | CVD apparatus |
US4717461A (en) | 1986-09-15 | 1988-01-05 | Machine Technology, Inc. | System and method for processing workpieces |
US4938815A (en) | 1986-10-15 | 1990-07-03 | Advantage Production Technology, Inc. | Semiconductor substrate heater and reactor process and apparatus |
DE3635216A1 (de) | 1986-10-16 | 1988-04-21 | Draegerwerk Ag | Elektrisch ansteuerbares ventil |
US4725204A (en) | 1986-11-05 | 1988-02-16 | Pennwalt Corporation | Vacuum manifold pumping system |
GB2199022B (en) | 1986-11-20 | 1991-01-02 | Shimizu Construction Co Ltd | Dust tight storage cabinet apparatus for use in clean rooms |
JPS63136532A (ja) | 1986-11-27 | 1988-06-08 | Nec Kyushu Ltd | 半導体基板熱処理装置 |
US4775281A (en) | 1986-12-02 | 1988-10-04 | Teradyne, Inc. | Apparatus and method for loading and unloading wafers |
US5882165A (en) | 1986-12-19 | 1999-03-16 | Applied Materials, Inc. | Multiple chamber integrated process system |
DE3776118D1 (de) | 1986-12-22 | 1992-02-27 | Siemens Ag | Transportbehaelter mit austauschbarem, zweiteiligem innenbehaelter. |
USD311126S (en) | 1986-12-23 | 1990-10-09 | Joseph Crowley | Shelf extending mounting bracket for additional product display |
US4753856A (en) | 1987-01-02 | 1988-06-28 | Dow Corning Corporation | Multilayer ceramic coatings from silicate esters and metal oxides |
SU1408319A1 (ru) | 1987-01-06 | 1988-07-07 | Всесоюзный научно-исследовательский институт аналитического приборостроения | Хемилюминесцентный газоанализатор окислов азота |
US4753192A (en) | 1987-01-08 | 1988-06-28 | Btu Engineering Corporation | Movable core fast cool-down furnace |
US4802441A (en) | 1987-01-08 | 1989-02-07 | Btu Engineering Corporation | Double wall fast cool-down furnace |
FR2610007B1 (fr) | 1987-01-22 | 1990-08-24 | Bmi Fours Ind | Four industriel vertical a ventilation peripherique |
IT209910Z2 (it) | 1987-02-06 | 1988-11-04 | Sgs Microelettronica Spa | Contenitore porta-wafer o fretta di slicio, utilizzato perl'immagazzinamento e/o spedizione sotto vuoto degli stessi. |
US4976996A (en) | 1987-02-17 | 1990-12-11 | Lam Research Corporation | Chemical vapor deposition reactor and method of use thereof |
US4874273A (en) | 1987-03-16 | 1989-10-17 | Hitachi, Ltd. | Apparatus for holding and/or conveying articles by fluid |
US4863374A (en) | 1987-03-27 | 1989-09-05 | Edward Orton, Jr., Ceramic Foundation | Kiln with ventilation system |
US5198034A (en) | 1987-03-31 | 1993-03-30 | Epsilon Technology, Inc. | Rotatable substrate supporting mechanism with temperature sensing device for use in chemical vapor deposition equipment |
US4821674A (en) | 1987-03-31 | 1989-04-18 | Deboer Wiebe B | Rotatable substrate supporting mechanism with temperature sensing device for use in chemical vapor deposition equipment |
US4790258A (en) | 1987-04-03 | 1988-12-13 | Tegal Corporation | Magnetically coupled wafer lift pins |
US4812217A (en) | 1987-04-27 | 1989-03-14 | American Telephone And Telegraph Company, At&T Bell Laboratories | Method and apparatus for feeding and coating articles in a controlled atmosphere |
US4827430A (en) | 1987-05-11 | 1989-05-02 | Baxter International Inc. | Flow measurement system |
US4780169A (en) | 1987-05-11 | 1988-10-25 | Tegal Corporation | Non-uniform gas inlet for dry etching apparatus |
US4738618A (en) | 1987-05-14 | 1988-04-19 | Semitherm | Vertical thermal processor |
US4871523A (en) | 1987-05-15 | 1989-10-03 | Exxon Chemical Patents Inc. | Vanadium tetrachloride stabilization |
US4808387A (en) | 1987-05-15 | 1989-02-28 | Exxon Chemical Patents Inc. | Stabilization of vanadium tetrachloride |
US4828224A (en) | 1987-10-15 | 1989-05-09 | Epsilon Technology, Inc. | Chemical vapor deposition system |
US5221556A (en) | 1987-06-24 | 1993-06-22 | Epsilon Technology, Inc. | Gas injectors for reaction chambers in CVD systems |
NO161941C (no) | 1987-06-25 | 1991-04-30 | Kvaerner Eng | Fremgangsmaate ved og anlegg for transport av hydrokarboner over lang avstand fra en hydrokarbonkilde til havs. |
NL8701549A (nl) | 1987-07-01 | 1989-02-01 | Asm International N V Amtc | Plasmareactor van het magnetrontype voor hoge-flux plasma-etsen en plasma-depositie. |
US4837113A (en) | 1987-07-16 | 1989-06-06 | Texas Instruments Incorporated | Method for depositing compound from group II-VI |
US5062386A (en) | 1987-07-27 | 1991-11-05 | Epitaxy Systems, Inc. | Induction heated pancake epitaxial reactor |
USD327534S (en) | 1987-07-30 | 1992-06-30 | CLM Investments, Inc. | Floor drain strainer |
US4854263B1 (en) | 1987-08-14 | 1997-06-17 | Applied Materials Inc | Inlet manifold and methods for increasing gas dissociation and for PECVD of dielectric films |
JPH0777211B2 (ja) | 1987-08-19 | 1995-08-16 | 富士通株式会社 | アッシング方法 |
JPS6455821A (en) | 1987-08-26 | 1989-03-02 | Dainippon Screen Mfg | Rapid cooling type heat treating apparatus |
US4756794A (en) | 1987-08-31 | 1988-07-12 | The United States Of America As Represented By The Secretary Of The Navy | Atomic layer etching |
JPS6465766A (en) | 1987-09-04 | 1989-03-13 | Hitachi Ltd | Life display fluorescent lamp |
KR970004947B1 (ko) | 1987-09-10 | 1997-04-10 | 도오교오 에레구토론 가부시끼가이샤 | 핸들링장치 |
US5180435A (en) | 1987-09-24 | 1993-01-19 | Research Triangle Institute, Inc. | Remote plasma enhanced CVD method and apparatus for growing an epitaxial semiconductor layer |
JPH0165766U (zh) | 1987-10-21 | 1989-04-27 | ||
US4854266A (en) | 1987-11-02 | 1989-08-08 | Btu Engineering Corporation | Cross-flow diffusion furnace |
US4916091A (en) | 1987-11-05 | 1990-04-10 | Texas Instruments Incorporated | Plasma and plasma UV deposition of SiO2 |
US4880982A (en) | 1987-11-17 | 1989-11-14 | Impex Production & Development A/S (Ltd.) | Fluid indicator for a containment vessel |
JPH0648217B2 (ja) | 1987-12-24 | 1994-06-22 | 川惣電機工業株式会社 | 溶融金属の連続測温装置 |
KR970003885B1 (ko) | 1987-12-25 | 1997-03-22 | 도오교오 에레구토론 가부시끼 가이샤 | 에칭 방법 및 그 장치 |
US4830515A (en) | 1987-12-28 | 1989-05-16 | Omega Engineering, Inc. | Mounting clip for a thermocouple assembly |
US5028366A (en) | 1988-01-12 | 1991-07-02 | Air Products And Chemicals, Inc. | Water based mold release compositions for making molded polyurethane foam |
JPH01185176A (ja) | 1988-01-18 | 1989-07-24 | Fujitsu Ltd | 静電吸着を用いた処理方法 |
FR2628985B1 (fr) | 1988-03-22 | 1990-12-28 | Labo Electronique Physique | Reacteur d'epitaxie a paroi protegee contre les depots |
KR0129406B1 (ko) | 1988-03-24 | 1998-04-07 | 카자마 젠쥬 | 반도체 웨이퍼처리장치 |
JP2768685B2 (ja) | 1988-03-28 | 1998-06-25 | 株式会社東芝 | 半導体装置の製造方法及びその装置 |
US4978567A (en) | 1988-03-31 | 1990-12-18 | Materials Technology Corporation, Subsidiary Of The Carbon/Graphite Group, Inc. | Wafer holding fixture for chemical reaction processes in rapid thermal processing equipment and method for making same |
JP2859632B2 (ja) | 1988-04-14 | 1999-02-17 | キヤノン株式会社 | 成膜装置及び成膜方法 |
US4857382A (en) | 1988-04-26 | 1989-08-15 | General Electric Company | Apparatus and method for photoetching of polyimides, polycarbonates and polyetherimides |
US4949848A (en) | 1988-04-29 | 1990-08-21 | Fluoroware, Inc. | Wafer carrier |
US5174881A (en) | 1988-05-12 | 1992-12-29 | Mitsubishi Denki Kabushiki Kaisha | Apparatus for forming a thin film on surface of semiconductor substrate |
US5407867A (en) | 1988-05-12 | 1995-04-18 | Mitsubishki Denki Kabushiki Kaisha | Method of forming a thin film on surface of semiconductor substrate |
JPH01296613A (ja) | 1988-05-25 | 1989-11-30 | Nec Corp | 3−v族化合物半導体の気相成長方法 |
JPH01307229A (ja) | 1988-06-06 | 1989-12-12 | Canon Inc | 堆積膜形成法 |
JPH01313954A (ja) | 1988-06-14 | 1989-12-19 | Fujitsu Ltd | 静電チャック |
KR960012876B1 (ko) | 1988-06-16 | 1996-09-25 | 도오교오 에레구토론 사가미 가부시끼가이샤 | 열처리 장치 |
US5178682A (en) | 1988-06-21 | 1993-01-12 | Mitsubishi Denki Kabushiki Kaisha | Method for forming a thin layer on a semiconductor substrate and apparatus therefor |
KR0155545B1 (ko) | 1988-06-27 | 1998-12-01 | 고다까 토시오 | 기판의 열처리 장치 |
US5064337A (en) | 1988-07-19 | 1991-11-12 | Tokyo Electron Limited | Handling apparatus for transferring carriers and a method of transferring carriers |
US5125358A (en) | 1988-07-26 | 1992-06-30 | Matsushita Electric Industrial Co., Ltd. | Microwave plasma film deposition system |
IT1227708B (it) | 1988-07-29 | 1991-05-06 | Pomini Farrel Spa | Dispositivo di rilevamento della temperatura del materiale contenuto entro un apparecchio chiuso. |
US4986215A (en) | 1988-09-01 | 1991-01-22 | Kyushu Electronic Metal Co., Ltd. | Susceptor for vapor-phase growth system |
US5158128A (en) | 1988-09-01 | 1992-10-27 | Sumitec, Inc. | Thermocouple for a continuous casting machine |
US4956538A (en) | 1988-09-09 | 1990-09-11 | Texas Instruments, Incorporated | Method and apparatus for real-time wafer temperature measurement using infrared pyrometry in advanced lamp-heated rapid thermal processors |
JPH0293071A (ja) | 1988-09-29 | 1990-04-03 | Toshiba Corp | 薄膜の形成方法 |
WO1990004045A1 (en) | 1988-10-14 | 1990-04-19 | Advantage Production Technology Inc. | Semiconductor wafer processing method and apparatus |
JP2918892B2 (ja) | 1988-10-14 | 1999-07-12 | 株式会社日立製作所 | プラズマエッチング処理方法 |
US5107170A (en) | 1988-10-18 | 1992-04-21 | Nissin Electric Co., Ltd. | Ion source having auxillary ion chamber |
US4837185A (en) | 1988-10-26 | 1989-06-06 | Intel Corporation | Pulsed dual radio frequency CVD process |
DE3836696C1 (en) | 1988-10-28 | 1989-12-07 | Fraunhofer-Gesellschaft Zur Foerderung Der Angewandten Forschung Ev, 8000 Muenchen, De | Lock for transporting material between clean rooms |
US4962063A (en) | 1988-11-10 | 1990-10-09 | Applied Materials, Inc. | Multistep planarized chemical vapor deposition process with the use of low melting inorganic material for flowing while depositing |
US5519234A (en) | 1991-02-25 | 1996-05-21 | Symetrix Corporation | Ferroelectric dielectric memory cell can switch at least giga cycles and has low fatigue - has high dielectric constant and low leakage current |
US5119760A (en) | 1988-12-27 | 1992-06-09 | Symetrix Corporation | Methods and apparatus for material deposition |
US5084126A (en) | 1988-12-29 | 1992-01-28 | Texas Instruments Incorporated | Method and apparatus for uniform flow distribution in plasma reactors |
USD320148S (en) | 1988-12-30 | 1991-09-24 | Andrews Edward A | Drill socket |
JPH02185038A (ja) | 1989-01-11 | 1990-07-19 | Nec Corp | 熱処理装置 |
JPH0834187B2 (ja) | 1989-01-13 | 1996-03-29 | 東芝セラミックス株式会社 | サセプタ |
US5160545A (en) | 1989-02-03 | 1992-11-03 | Applied Materials, Inc. | Method and apparatus for epitaxial deposition |
EP0382984A1 (en) | 1989-02-13 | 1990-08-22 | L'air Liquide, Societe Anonyme Pour L'etude Et L'exploitation Des Procedes Georges Claude | Thermal decomposition trap |
JPH0645893B2 (ja) | 1989-02-17 | 1994-06-15 | 科学技術庁長官官房会計課長 | 薄膜の形成方法 |
DE8902307U1 (de) | 1989-02-27 | 1989-08-31 | Söhlbrand, Heinrich, Dr. Dipl.-Chem., 8027 Neuried | Vorrichtung zur thermischen Behandlung von Halbleitermaterialien |
US5053247A (en) | 1989-02-28 | 1991-10-01 | Moore Epitaxial, Inc. | Method for increasing the batch size of a barrel epitaxial reactor and reactor produced thereby |
NL8900544A (nl) | 1989-03-06 | 1990-10-01 | Asm Europ | Behandelingsstelsel, behandelingsvat en werkwijze voor het behandelen van een substraat. |
US5088444A (en) | 1989-03-15 | 1992-02-18 | Kabushiki Kaisha Toshiba | Vapor deposition system |
US4934831A (en) | 1989-03-20 | 1990-06-19 | Claud S. Gordon Company | Temperature sensing device |
US5186120A (en) | 1989-03-22 | 1993-02-16 | Mitsubishi Denki Kabushiki Kaisha | Mixture thin film forming apparatus |
EP0422243B1 (en) | 1989-03-31 | 1994-09-21 | Canon Kabushiki Kaisha | Method of forming polycrystalline film by chemical vapor deposition |
NL8900980A (nl) | 1989-04-19 | 1990-11-16 | Asm Europ | Werkwijze voor het voorzien in een gedoseerde dampstroom alsmede inrichting voor het uitvoeren daarvan. |
US5194401A (en) | 1989-04-18 | 1993-03-16 | Applied Materials, Inc. | Thermally processing semiconductor wafers at non-ambient pressures |
US4920918A (en) | 1989-04-18 | 1990-05-01 | Applied Materials, Inc. | Pressure-resistant thermal reactor system for semiconductor processing |
US4963506A (en) | 1989-04-24 | 1990-10-16 | Motorola Inc. | Selective deposition of amorphous and polycrystalline silicon |
EP0395358B1 (en) | 1989-04-25 | 2001-03-14 | Matsushita Electronics Corporation | Manufacturing method of a bipolar transistor |
JP2779950B2 (ja) | 1989-04-25 | 1998-07-23 | 東陶機器株式会社 | 静電チャックの電圧印加方法および電圧印加装置 |
US5192717A (en) | 1989-04-28 | 1993-03-09 | Canon Kabushiki Kaisha | Process for the formation of a polycrystalline semiconductor film by microwave plasma chemical vapor deposition method |
US5360269A (en) | 1989-05-10 | 1994-11-01 | Tokyo Kogyo Kabushiki Kaisha | Immersion-type temperature measuring apparatus using thermocouple |
US4987856A (en) | 1989-05-22 | 1991-01-29 | Advanced Semiconductor Materials America, Inc. | High throughput multi station processor for multiple single wafers |
US5313061A (en) | 1989-06-06 | 1994-05-17 | Viking Instrument | Miniaturized mass spectrometer system |
US5134965A (en) | 1989-06-16 | 1992-08-04 | Hitachi, Ltd. | Processing apparatus and method for plasma processing |
US5061083A (en) | 1989-06-19 | 1991-10-29 | The United States Of America As Represented By The Department Of Energy | Temperature monitoring device and thermocouple assembly therefor |
JP2890494B2 (ja) | 1989-07-11 | 1999-05-17 | セイコーエプソン株式会社 | プラズマ薄膜の製造方法 |
US5022961B1 (en) | 1989-07-26 | 1997-05-27 | Dainippon Screen Mfg | Method for removing a film on a silicon layer surface |
US5060322A (en) | 1989-07-27 | 1991-10-29 | Delepine Jean C | Shower room and ceiling element, especially for a shower room |
US5013691A (en) | 1989-07-31 | 1991-05-07 | At&T Bell Laboratories | Anisotropic deposition of silicon dioxide |
EP0417457A3 (en) | 1989-08-11 | 1991-07-03 | Seiko Instruments Inc. | Method of producing field effect transistor |
US5213650A (en) | 1989-08-25 | 1993-05-25 | Applied Materials, Inc. | Apparatus for removing deposits from backside and end edge of semiconductor wafer while preventing removal of materials from front surface of wafer |
FI83176C (fi) | 1989-09-12 | 1991-06-10 | Aitec Oy | Foerfarande foer styrning av roerelser hos en robot och en styckemanipulator under en robotcells inlaerningsskede. |
US5057436A (en) | 1989-10-02 | 1991-10-15 | Agmaster, Inc. | Method and apparatus for detecting toxic gases |
JPH03125453A (ja) | 1989-10-09 | 1991-05-28 | Toshiba Corp | 半導体ウエハ移送装置 |
US5098865A (en) | 1989-11-02 | 1992-03-24 | Machado Jose R | High step coverage silicon oxide thin films |
KR0161674B1 (ko) | 1989-11-03 | 1999-02-01 | 한스 피터 후크숀 | 수분 존재하에 반도체 기판을 할로겐 에칭하는 방법 |
JPH03155625A (ja) | 1989-11-14 | 1991-07-03 | Seiko Epson Corp | プラズマcvd膜の製造方法 |
US5002632A (en) | 1989-11-22 | 1991-03-26 | Texas Instruments Incorporated | Method and apparatus for etching semiconductor materials |
EP0454846B1 (en) | 1989-11-22 | 1996-09-11 | Nippon Steel Corporation | Thermocouple-type temperature sensor and method of measuring temperature of molten steel |
US4987102A (en) | 1989-12-04 | 1991-01-22 | Motorola, Inc. | Process for forming high purity thin films |
RU1786406C (ru) | 1989-12-12 | 1993-01-07 | Научно-Техническое Кооперативное Предприятие "Акцент" | Способ контрол дефектов на плоской отражающей поверхности и устройство дл его осуществлени |
USD333606S (en) | 1989-12-12 | 1993-03-02 | Kabushiki Kaisha Kanemitsu | Pulley |
JPH0738407B2 (ja) | 1989-12-28 | 1995-04-26 | 株式会社荏原製作所 | 保管庫 |
JP2867526B2 (ja) | 1990-01-16 | 1999-03-08 | 富士通株式会社 | 半導体製造装置 |
JP2723324B2 (ja) | 1990-01-25 | 1998-03-09 | 日本特殊陶業株式会社 | アルミナ焼結基板 |
USD330900S (en) | 1990-02-08 | 1992-11-10 | Wakegijig William M | Drill adapter |
JP2936623B2 (ja) | 1990-02-26 | 1999-08-23 | 日本電気株式会社 | 半導体装置の製造方法 |
JPH03257182A (ja) | 1990-03-07 | 1991-11-15 | Hitachi Ltd | 表面加工装置 |
LU87693A1 (fr) | 1990-03-07 | 1991-10-08 | Wurth Paul Sa | Sonde de prise d'echantillons gazeux et de mesures thermiques dans un four a cuve |
DE69126724T2 (de) | 1990-03-19 | 1998-01-15 | Toshiba Kawasaki Kk | Vorrichtung zur Dampfphasenabscheidung |
JPH03277774A (ja) | 1990-03-27 | 1991-12-09 | Semiconductor Energy Lab Co Ltd | 光気相反応装置 |
US5310410A (en) | 1990-04-06 | 1994-05-10 | Sputtered Films, Inc. | Method for processing semi-conductor wafers in a multiple vacuum and non-vacuum chamber apparatus |
DE4011933C2 (de) | 1990-04-12 | 1996-11-21 | Balzers Hochvakuum | Verfahren zur reaktiven Oberflächenbehandlung eines Werkstückes sowie Behandlungskammer hierfür |
US5243202A (en) | 1990-04-25 | 1993-09-07 | Casio Computer Co., Ltd. | Thin-film transistor and a liquid crystal matrix display device using thin-film transistors of this type |
US5328810A (en) | 1990-05-07 | 1994-07-12 | Micron Technology, Inc. | Method for reducing, by a factor or 2-N, the minimum masking pitch of a photolithographic process |
US5356672A (en) | 1990-05-09 | 1994-10-18 | Jet Process Corporation | Method for microwave plasma assisted supersonic gas jet deposition of thin films |
CA2016970A1 (en) | 1990-05-16 | 1991-11-16 | Prasad N. Gadgil | Inverted diffusion stagnation point flow reactor for vapor deposition of thin films |
JPH0429313A (ja) | 1990-05-24 | 1992-01-31 | Fujitsu Ltd | 半導体結晶の製造装置 |
US5130003A (en) | 1990-06-14 | 1992-07-14 | Conrad Richard H | method of powering corona discharge in ozone generators |
US5393577A (en) | 1990-06-19 | 1995-02-28 | Nec Corporation | Method for forming a patterned layer by selective chemical vapor deposition |
US5225366A (en) | 1990-06-22 | 1993-07-06 | The United States Of America As Represented By The Secretary Of The Navy | Apparatus for and a method of growing thin films of elemental semiconductors |
NL9001451A (nl) | 1990-06-25 | 1992-01-16 | Asm Europ | Driewegklep. |
KR0153250B1 (ko) | 1990-06-28 | 1998-12-01 | 카자마 겐쥬 | 종형 열처리 장치 |
JPH0464025A (ja) | 1990-07-02 | 1992-02-28 | Matsushita Electric Ind Co Ltd | 調理器用温度センサー |
US5362328A (en) | 1990-07-06 | 1994-11-08 | Advanced Technology Materials, Inc. | Apparatus and method for delivering reagents in vapor form to a CVD reactor, incorporating a cleaning subsystem |
DE69127609T2 (de) | 1990-07-18 | 1998-01-22 | Sumitomo Electric Industries | Vorrichtung und verfahren zur herstellung von diamanten |
KR0176715B1 (ko) | 1990-07-30 | 1999-04-15 | 오가 노리오 | 드라이에칭방법 |
US5231062A (en) | 1990-08-09 | 1993-07-27 | Minnesota Mining And Manufacturing Company | Transparent aluminum oxynitride-based ceramic article |
US5082517A (en) | 1990-08-23 | 1992-01-21 | Texas Instruments Incorporated | Plasma density controller for semiconductor device processing equipment |
JPH04115531A (ja) | 1990-09-05 | 1992-04-16 | Mitsubishi Electric Corp | 化学気相成長装置 |
US5273609A (en) | 1990-09-12 | 1993-12-28 | Texas Instruments Incorporated | Method and apparatus for time-division plasma chopping in a multi-channel plasma processing equipment |
KR0167476B1 (ko) | 1990-09-27 | 1999-02-01 | 이노우에 다케시 | 종형 열처리 장치 |
US5167716A (en) | 1990-09-28 | 1992-12-01 | Gasonics, Inc. | Method and apparatus for batch processing a semiconductor wafer |
JP2780866B2 (ja) | 1990-10-11 | 1998-07-30 | 大日本スクリーン製造 株式会社 | 光照射加熱基板の温度測定装置 |
TW214599B (zh) | 1990-10-15 | 1993-10-11 | Seiko Epson Corp | |
JP2714247B2 (ja) | 1990-10-29 | 1998-02-16 | キヤノン株式会社 | マイクロ波プラズマcvd法による大面積の機能性堆積膜を連続的に形成する方法及び装置 |
US5228114A (en) | 1990-10-30 | 1993-07-13 | Tokyo Electron Sagami Limited | Heat-treating apparatus with batch scheme having improved heat controlling capability |
US5855687A (en) | 1990-12-05 | 1999-01-05 | Applied Materials, Inc. | Substrate support shield in wafer processing reactors |
US5304248A (en) | 1990-12-05 | 1994-04-19 | Applied Materials, Inc. | Passive shield for CVD wafer processing which provides frontside edge exclusion and prevents backside depositions |
JP2839720B2 (ja) | 1990-12-19 | 1998-12-16 | 株式会社東芝 | 熱処理装置 |
US5071258A (en) | 1991-02-01 | 1991-12-10 | Vesuvius Crucible Company | Thermocouple assembly |
DE69117166T2 (de) | 1991-02-15 | 1996-07-04 | Air Liquide | Verfahren zur Herstellung eines faserverstärkten keramischen Verbundwerkstoffs |
JPH05136218A (ja) | 1991-02-19 | 1993-06-01 | Tokyo Electron Yamanashi Kk | 検査装置 |
US6110531A (en) | 1991-02-25 | 2000-08-29 | Symetrix Corporation | Method and apparatus for preparing integrated circuit thin films by chemical vapor deposition |
JP2740050B2 (ja) | 1991-03-19 | 1998-04-15 | 株式会社東芝 | 溝埋込み配線形成方法 |
JP2986121B2 (ja) | 1991-03-26 | 1999-12-06 | 東京エレクトロン株式会社 | ロードロック装置及び真空処理装置 |
US5271732A (en) | 1991-04-03 | 1993-12-21 | Tokyo Electron Sagami Kabushiki Kaisha | Heat-treating apparatus |
WO1992017621A1 (en) | 1991-04-04 | 1992-10-15 | Conner Peripherals, Inc. | Apparatus and method for high throughput sputtering |
JP3323530B2 (ja) | 1991-04-04 | 2002-09-09 | 株式会社日立製作所 | 半導体装置の製造方法 |
US5182232A (en) | 1991-04-08 | 1993-01-26 | Micron Technology, Inc. | Metal silicide texturizing technique |
US5116018A (en) | 1991-04-12 | 1992-05-26 | Automax, Inc. | Lockout modules |
JPH0812847B2 (ja) | 1991-04-22 | 1996-02-07 | 株式会社半導体プロセス研究所 | 半導体製造装置及び半導体装置の製造方法 |
US5243195A (en) | 1991-04-25 | 1993-09-07 | Nikon Corporation | Projection exposure apparatus having an off-axis alignment system and method of alignment therefor |
US5125710A (en) | 1991-05-14 | 1992-06-30 | Angelo Gianelo | Under-platform drawer for trucks |
US5104514A (en) | 1991-05-16 | 1992-04-14 | The United States Of America As Represented By The Secretary Of The Navy | Protective coating system for aluminum |
US5565038A (en) | 1991-05-16 | 1996-10-15 | Intel Corporation | Interhalogen cleaning of process equipment |
US5193969A (en) | 1991-05-20 | 1993-03-16 | Fortrend Engineering Corporation | Wafer transfer machine |
US5234526A (en) | 1991-05-24 | 1993-08-10 | Lam Research Corporation | Window for microwave plasma processing device |
US5252134A (en) | 1991-05-31 | 1993-10-12 | Stauffer Craig M | Integrated delivery system for chemical vapor from non-gaseous sources for semiconductor processing |
JP3002013B2 (ja) | 1991-06-04 | 2000-01-24 | 松下技研株式会社 | 薄膜および多層膜の製造方法およびその製造装置 |
US5249960A (en) | 1991-06-14 | 1993-10-05 | Tokyo Electron Sagami Kabushiki Kaisha | Forced cooling apparatus for heat treatment apparatus |
JP3086719B2 (ja) | 1991-06-27 | 2000-09-11 | 株式会社東芝 | 表面処理方法 |
US6095083A (en) | 1991-06-27 | 2000-08-01 | Applied Materiels, Inc. | Vacuum processing chamber having multi-mode access |
DE4122452C2 (de) | 1991-07-06 | 1993-10-28 | Schott Glaswerke | Verfahren und Vorrichtung zum Zünden von CVD-Plasmen |
US5221369A (en) | 1991-07-08 | 1993-06-22 | Air Products And Chemicals, Inc. | In-situ generation of heat treating atmospheres using non-cryogenically produced nitrogen |
JPH0523079A (ja) | 1991-07-19 | 1993-02-02 | Shimano Inc | 釣り竿及びその製造方法 |
US5277932A (en) | 1991-07-29 | 1994-01-11 | Syracuse University | CVD method for forming metal boride films using metal borane cluster compounds |
JP2580928Y2 (ja) | 1991-08-22 | 1998-09-17 | 日本電気株式会社 | 気相成長装置 |
US5137286A (en) | 1991-08-23 | 1992-08-11 | General Electric Company | Permanent magnet floating shaft seal |
CA2069132C (en) | 1991-08-29 | 1996-01-09 | Koji Fujii | Light-beam heating apparatus |
JP3040212B2 (ja) | 1991-09-05 | 2000-05-15 | 株式会社東芝 | 気相成長装置 |
US5294778A (en) | 1991-09-11 | 1994-03-15 | Lam Research Corporation | CVD platen heater system utilizing concentric electric heating elements |
US5154301A (en) | 1991-09-12 | 1992-10-13 | Fluoroware, Inc. | Wafer carrier |
JPH05217921A (ja) | 1991-09-13 | 1993-08-27 | Motorola Inc | 材料膜のエピタキシアル成長を行うための温度制御された処理 |
US5430011A (en) | 1991-09-17 | 1995-07-04 | Sumitomi Electric Industries, Ltd. | Crystal compensated superconducting thin film formed of oxide superconductor material |
FR2682047B1 (fr) | 1991-10-07 | 1993-11-12 | Commissariat A Energie Atomique | Reacteur de traitement chimique en phase gazeuse. |
JPH05118928A (ja) | 1991-10-25 | 1993-05-14 | Tokyo Electron Ltd | 接触式の温度測定方法 |
US5219226A (en) | 1991-10-25 | 1993-06-15 | Quadtek, Inc. | Imaging and temperature monitoring system |
US5387265A (en) | 1991-10-29 | 1995-02-07 | Kokusai Electric Co., Ltd. | Semiconductor wafer reaction furnace with wafer transfer means |
US5193912A (en) | 1991-11-18 | 1993-03-16 | Saunders Roger I | Probe for sensing and measuring temperature |
JP3140111B2 (ja) | 1991-11-19 | 2001-03-05 | オリンパス光学工業株式会社 | 高倍率顕微鏡対物レンズ |
US5199603A (en) | 1991-11-26 | 1993-04-06 | Prescott Norman F | Delivery system for organometallic compounds |
US6400996B1 (en) | 1999-02-01 | 2002-06-04 | Steven M. Hoffberg | Adaptive pattern recognition based control system and method |
JPH05171446A (ja) | 1991-12-24 | 1993-07-09 | Furukawa Electric Co Ltd:The | 薄膜形成方法 |
DE69227575T2 (de) | 1991-12-30 | 1999-06-02 | Texas Instruments Inc | Programmierbarer Multizonen-Gasinjektor für eine Anlage zur Behandlung von einzelnen Halbleiterscheiben |
US5414221A (en) | 1991-12-31 | 1995-05-09 | Intel Corporation | Embedded ground plane and shielding structures using sidewall insulators in high frequency circuits having vias |
US5443686A (en) | 1992-01-15 | 1995-08-22 | International Business Machines Corporation Inc. | Plasma CVD apparatus and processes |
US6379466B1 (en) | 1992-01-17 | 2002-04-30 | Applied Materials, Inc. | Temperature controlled gas distribution plate |
US5215588A (en) | 1992-01-17 | 1993-06-01 | Amtech Systems, Inc. | Photo-CVD system |
US5480818A (en) | 1992-02-10 | 1996-01-02 | Fujitsu Limited | Method for forming a film and method for manufacturing a thin film transistor |
JP2506539B2 (ja) | 1992-02-27 | 1996-06-12 | 株式会社ジーティシー | 絶縁膜の形成方法 |
US5208961A (en) | 1992-02-28 | 1993-05-11 | National Semiconductor Corporation | Semiconductor processing furnace door alignment apparatus and method |
NL9200446A (nl) | 1992-03-10 | 1993-10-01 | Tempress B V | Inrichting voor het behandelen van microschakeling-schijven (wafers). |
US5226383A (en) | 1992-03-12 | 1993-07-13 | Bell Communications Research, Inc. | Gas foil rotating substrate holder |
JPH05267186A (ja) | 1992-03-18 | 1993-10-15 | Fujitsu Ltd | 気相成長装置および該装置を用いた気相成長方法 |
US5766360A (en) | 1992-03-27 | 1998-06-16 | Kabushiki Kaisha Toshiba | Substrate processing apparatus and substrate processing method |
JP3191392B2 (ja) | 1992-04-07 | 2001-07-23 | 神鋼電機株式会社 | クリーンルーム用密閉式コンテナ |
JPH05291142A (ja) | 1992-04-15 | 1993-11-05 | Nec Corp | 液体ソース供給装置 |
US5268989A (en) | 1992-04-16 | 1993-12-07 | Texas Instruments Incorporated | Multi zone illuminator with embeded process control sensors and light interference elimination circuit |
US5226967A (en) | 1992-05-14 | 1993-07-13 | Lam Research Corporation | Plasma apparatus including dielectric window for inducing a uniform electric field in a plasma chamber |
US5455069A (en) | 1992-06-01 | 1995-10-03 | Motorola, Inc. | Method of improving layer uniformity in a CVD reactor |
WO1993024801A1 (de) | 1992-06-03 | 1993-12-09 | Esec S.A. | Vorrichtung zur wärmebehandlung eines magazins für systemträger mit elektronischen bauelementen |
US5461214A (en) | 1992-06-15 | 1995-10-24 | Thermtec, Inc. | High performance horizontal diffusion furnace system |
KR100293830B1 (ko) | 1992-06-22 | 2001-09-17 | 리차드 에이치. 로브그렌 | 플라즈마 처리 쳄버내의 잔류물 제거를 위한 플라즈마 정결방법 |
US5534072A (en) | 1992-06-24 | 1996-07-09 | Anelva Corporation | Integrated module multi-chamber CVD processing system and its method for processing subtrates |
JP2964779B2 (ja) | 1992-06-29 | 1999-10-18 | 松下電器産業株式会社 | 光学素子のプレス成形用金型 |
JP3148004B2 (ja) | 1992-07-06 | 2001-03-19 | 株式会社東芝 | 光cvd装置及びこれを用いた半導体装置の製造方法 |
US5601641A (en) | 1992-07-21 | 1997-02-11 | Tse Industries, Inc. | Mold release composition with polybutadiene and method of coating a mold core |
US5306666A (en) | 1992-07-24 | 1994-04-26 | Nippon Steel Corporation | Process for forming a thin metal film by chemical vapor deposition |
JPH0653210A (ja) | 1992-07-28 | 1994-02-25 | Nec Corp | 半導体装置 |
KR100304127B1 (ko) | 1992-07-29 | 2001-11-30 | 이노마다 시게오 | 가반식 밀폐 컨테이너를 사용한 전자기판 처리시스템과 그의 장치 |
JP3334911B2 (ja) | 1992-07-31 | 2002-10-15 | キヤノン株式会社 | パターン形成方法 |
ATE129361T1 (de) | 1992-08-04 | 1995-11-15 | Ibm | Fertigungsstrasse architektur mit vollautomatisierten und rechnergesteuerten fördereinrichtungen geeignet für abdichtbaren tragbaren unter druck stehenden behältern. |
US5271967A (en) | 1992-08-21 | 1993-12-21 | General Motors Corporation | Method and apparatus for application of thermal spray coatings to engine blocks |
USD363464S (en) | 1992-08-27 | 1995-10-24 | Tokyo Electron Yamanashi Limited | Electrode for a semiconductor processing apparatus |
US5338362A (en) | 1992-08-29 | 1994-08-16 | Tokyo Electron Limited | Apparatus for processing semiconductor wafer comprising continuously rotating wafer table and plural chamber compartments |
JP3183575B2 (ja) | 1992-09-03 | 2001-07-09 | 東京エレクトロン株式会社 | 処理装置および処理方法 |
US5326427A (en) | 1992-09-11 | 1994-07-05 | Lsi Logic Corporation | Method of selectively etching titanium-containing materials on a semiconductor wafer using remote plasma generation |
US5246218A (en) | 1992-09-25 | 1993-09-21 | Intel Corporation | Apparatus for securing an automatically loaded wafer cassette on a wafer processing equipment |
US5280894A (en) | 1992-09-30 | 1994-01-25 | Honeywell Inc. | Fixture for backside wafer etching |
US6438502B1 (en) | 1992-10-07 | 2002-08-20 | Dallas Semiconductor Corporation | Environmental condition sensor device and method |
USD354898S (en) | 1992-10-13 | 1995-01-31 | Verdel Innovations | Egg holder for use with a stand for decorating eggs |
JP2906873B2 (ja) | 1992-10-26 | 1999-06-21 | 日本電気株式会社 | 金配線の製造方法 |
JP3190745B2 (ja) | 1992-10-27 | 2001-07-23 | 株式会社東芝 | 気相成長方法 |
JP3179212B2 (ja) | 1992-10-27 | 2001-06-25 | 日本電気株式会社 | 半導体装置の製造方法 |
DE4236324C1 (zh) | 1992-10-28 | 1993-09-02 | Schott Glaswerke, 55122 Mainz, De | |
JP3093487B2 (ja) | 1992-10-28 | 2000-10-03 | 松下電子工業株式会社 | 半導体装置およびその製造方法 |
US6235858B1 (en) | 1992-10-30 | 2001-05-22 | Ppg Industries Ohio, Inc. | Aminoplast curable film-forming compositions providing films having resistance to acid etching |
JPH06295862A (ja) | 1992-11-20 | 1994-10-21 | Mitsubishi Electric Corp | 化合物半導体製造装置及び有機金属材料容器 |
JPH086181B2 (ja) | 1992-11-30 | 1996-01-24 | 日本電気株式会社 | 化学気相成長法および化学気相成長装置 |
IT1257434B (it) | 1992-12-04 | 1996-01-17 | Cselt Centro Studi Lab Telecom | Generatore di vapori per impianti di deposizione chimica da fase vapore |
US5382311A (en) | 1992-12-17 | 1995-01-17 | Tokyo Electron Limited | Stage having electrostatic chuck and plasma processing apparatus using same |
US5295777A (en) | 1992-12-23 | 1994-03-22 | Materials Research Corporation | Wafer transport module with rotatable and horizontally extendable wafer holder |
DE4244189C2 (de) | 1992-12-24 | 1995-06-01 | Busch Dieter & Co Prueftech | Anlegetemperaturfühler |
US5453124A (en) | 1992-12-30 | 1995-09-26 | Texas Instruments Incorporated | Programmable multizone gas injector for single-wafer semiconductor processing equipment |
CA2114294A1 (en) | 1993-01-05 | 1995-07-27 | Thomas Earle Allen | Apparatus and method for continuously mixing fluids |
US5478429A (en) | 1993-01-20 | 1995-12-26 | Tokyo Electron Limited | Plasma process apparatus |
US5444217A (en) | 1993-01-21 | 1995-08-22 | Moore Epitaxial Inc. | Rapid thermal processing apparatus for processing semiconductor wafers |
US5447294A (en) | 1993-01-21 | 1995-09-05 | Tokyo Electron Limited | Vertical type heat treatment system |
US5820686A (en) | 1993-01-21 | 1998-10-13 | Moore Epitaxial, Inc. | Multi-layer susceptor for rapid thermal process reactors |
US5709745A (en) | 1993-01-25 | 1998-01-20 | Ohio Aerospace Institute | Compound semi-conductors and controlled doping thereof |
JP3245246B2 (ja) | 1993-01-27 | 2002-01-07 | 東京エレクトロン株式会社 | 熱処理装置 |
JP2683208B2 (ja) | 1993-01-28 | 1997-11-26 | アプライド マテリアルズ インコーポレイテッド | ロボット機構を用いた搬入および搬出のためのワークピース位置合わせ方法および装置 |
JP3258748B2 (ja) | 1993-02-08 | 2002-02-18 | 東京エレクトロン株式会社 | 熱処理装置 |
JPH06319177A (ja) | 1993-02-24 | 1994-11-15 | Hewlett Packard Co <Hp> | 適応遠隔制御システム |
US5421893A (en) | 1993-02-26 | 1995-06-06 | Applied Materials, Inc. | Susceptor drive and wafer displacement mechanism |
JP3348936B2 (ja) | 1993-10-21 | 2002-11-20 | 東京エレクトロン株式会社 | 縦型熱処理装置 |
US5474410A (en) | 1993-03-14 | 1995-12-12 | Tel-Varian Limited | Multi-chamber system provided with carrier units |
JP2948437B2 (ja) | 1993-03-18 | 1999-09-13 | 富士通株式会社 | 論理シミュレーション用のデータ作成方法 |
JP3265042B2 (ja) | 1993-03-18 | 2002-03-11 | 東京エレクトロン株式会社 | 成膜方法 |
US5305417A (en) | 1993-03-26 | 1994-04-19 | Texas Instruments Incorporated | Apparatus and method for determining wafer temperature using pyrometry |
DE4311197A1 (de) | 1993-04-05 | 1994-10-06 | Patent Treuhand Ges Fuer Elektrische Gluehlampen Mbh | Verfahren zum Betreiben einer inkohärent strahlenden Lichtquelle |
US5346961A (en) | 1993-04-07 | 1994-09-13 | Union Carbide Chemicals & Plastics Technology Corporation | Process for crosslinking |
JP3190165B2 (ja) | 1993-04-13 | 2001-07-23 | 東京エレクトロン株式会社 | 縦型熱処理装置及び熱処理方法 |
KR100221983B1 (ko) | 1993-04-13 | 1999-09-15 | 히가시 데쓰로 | 처리장치 |
EP0621051B1 (de) | 1993-04-17 | 2001-08-22 | MESSER GRIESHEIM AUSTRIA Ges.m.b.H. | Gerät zur kontrollierten Zudosierung von NO zur Atemluft von Patienten |
JPH06310438A (ja) | 1993-04-22 | 1994-11-04 | Mitsubishi Electric Corp | 化合物半導体気相成長用基板ホルダおよび化合物半導体気相成長装置 |
US5404082A (en) | 1993-04-23 | 1995-04-04 | North American Philips Corporation | High frequency inverter with power-line-controlled frequency modulation |
USD353452S (en) | 1993-04-27 | 1994-12-13 | Groenhoff Larry C | Window adapter for portable box fans |
US5637153A (en) | 1993-04-30 | 1997-06-10 | Tokyo Electron Limited | Method of cleaning reaction tube and exhaustion piping system in heat processing apparatus |
DE69425821T2 (de) | 1993-05-13 | 2001-04-05 | Advanced Semiconductor Materials B.V., Bilthoven | Verfahren zum Ätzen Silizium-Oxid-Schichten mit Mischungen von HF und Carbonsäure |
JPH06330323A (ja) | 1993-05-18 | 1994-11-29 | Mitsubishi Electric Corp | 半導体装置製造装置及びそのクリーニング方法 |
JPH0711446A (ja) | 1993-05-27 | 1995-01-13 | Applied Materials Inc | 気相成長用サセプタ装置 |
JP2508581B2 (ja) | 1993-05-28 | 1996-06-19 | 日本電気株式会社 | 化学気相成長法 |
US5501740A (en) | 1993-06-04 | 1996-03-26 | Applied Science And Technology, Inc. | Microwave plasma reactor |
US5354580A (en) | 1993-06-08 | 1994-10-11 | Cvd Incorporated | Triangular deposition chamber for a vapor deposition system |
US5616264A (en) | 1993-06-15 | 1997-04-01 | Tokyo Electron Limited | Method and apparatus for controlling temperature in rapid heat treatment system |
JPH0799162A (ja) | 1993-06-21 | 1995-04-11 | Hitachi Ltd | Cvdリアクタ装置 |
EP0630749B1 (en) | 1993-06-28 | 1998-12-23 | Canon Kabushiki Kaisha | Heat generating resistor containing TaN0.8, substrate provided with said heat generating resistor for liquid jet head, liquid jet head provided with said substrate, and liquid jet apparatus provided with said liquid jet head |
US5997768A (en) | 1993-06-29 | 1999-12-07 | Ciba Specialty Chemicals Corporation | Pelletization of metal soap powders |
US5484484A (en) | 1993-07-03 | 1996-01-16 | Tokyo Electron Kabushiki | Thermal processing method and apparatus therefor |
US5972196A (en) | 1995-06-07 | 1999-10-26 | Lynntech, Inc. | Electrochemical production of ozone and hydrogen peroxide |
EP0634785B1 (en) | 1993-07-13 | 1997-07-23 | Applied Materials, Inc. | Improved susceptor design |
JPH0729836A (ja) | 1993-07-14 | 1995-01-31 | Sony Corp | プラズマシリコンナイトライド膜の形成方法 |
US5540821A (en) | 1993-07-16 | 1996-07-30 | Applied Materials, Inc. | Method and apparatus for adjustment of spacing between wafer and PVD target during semiconductor processing |
JP3667781B2 (ja) | 1993-07-16 | 2005-07-06 | 株式会社日立製作所 | エンジンシステムの診断装置 |
US5312245A (en) | 1993-07-16 | 1994-05-17 | International Business Machines Corporation | Particulate trap for vertical furnace |
US5415753A (en) | 1993-07-22 | 1995-05-16 | Materials Research Corporation | Stationary aperture plate for reactive sputter deposition |
US5350480A (en) | 1993-07-23 | 1994-09-27 | Aspect International, Inc. | Surface cleaning and conditioning using hot neutral gas beam array |
FR2708624A1 (fr) | 1993-07-30 | 1995-02-10 | Neuville Stephane | Procédé de dépôt d'un revêtement protecteur à base de pseudo carbone diamant amorphe ou de carbure de silicium modifié. |
US5348774A (en) | 1993-08-11 | 1994-09-20 | Alliedsignal Inc. | Method of rapidly densifying a porous structure |
JPH0766267A (ja) | 1993-08-27 | 1995-03-10 | Kokusai Electric Co Ltd | ウェーハカセット授受装置 |
JP3576188B2 (ja) | 1993-08-31 | 2004-10-13 | 株式会社半導体エネルギー研究所 | 気相反応装置および気相反応方法 |
JP3418458B2 (ja) | 1993-08-31 | 2003-06-23 | 富士通株式会社 | 半導体装置の製造方法 |
US5418382A (en) | 1993-09-23 | 1995-05-23 | Fsi International, Inc. | Substrate location and detection apparatus |
US5417803A (en) | 1993-09-29 | 1995-05-23 | Intel Corporation | Method for making Si/SiC composite material |
US5556275A (en) | 1993-09-30 | 1996-09-17 | Tokyo Electron Limited | Heat treatment apparatus |
US5378501A (en) | 1993-10-05 | 1995-01-03 | Foster; Robert F. | Method for chemical vapor deposition of titanium nitride films at low temperatures |
JPH07109576A (ja) | 1993-10-07 | 1995-04-25 | Shinko Seiki Co Ltd | プラズマcvdによる成膜方法 |
US6122036A (en) | 1993-10-21 | 2000-09-19 | Nikon Corporation | Projection exposure apparatus and method |
US5650082A (en) | 1993-10-29 | 1997-07-22 | Applied Materials, Inc. | Profiled substrate heating |
JP2682403B2 (ja) | 1993-10-29 | 1997-11-26 | 日本電気株式会社 | 半導体装置の製造方法 |
DE69408405T2 (de) | 1993-11-11 | 1998-08-20 | Nissin Electric Co Ltd | Plasma-CVD-Verfahren und Vorrichtung |
US5413813A (en) | 1993-11-23 | 1995-05-09 | Enichem S.P.A. | CVD of silicon-based ceramic materials on internal surface of a reactor |
US5463176A (en) | 1994-01-03 | 1995-10-31 | Eckert; C. Edward | Liquid waste oxygenation |
JPH07209093A (ja) | 1994-01-20 | 1995-08-11 | Tokyo Electron Ltd | 温度計 |
US5616947A (en) | 1994-02-01 | 1997-04-01 | Matsushita Electric Industrial Co., Ltd. | Semiconductor device having an MIS structure |
US5681779A (en) | 1994-02-04 | 1997-10-28 | Lsi Logic Corporation | Method of doping metal layers for electromigration resistance |
JPH07225214A (ja) | 1994-02-14 | 1995-08-22 | Shimadzu Corp | NOx計測装置 |
JP2844304B2 (ja) | 1994-02-15 | 1999-01-06 | 日本原子力研究所 | プラズマ対向材料 |
US5766365A (en) | 1994-02-23 | 1998-06-16 | Applied Materials, Inc. | Removable ring for controlling edge deposition in substrate processing apparatus |
US5888304A (en) | 1996-04-02 | 1999-03-30 | Applied Materials, Inc. | Heater with shadow ring and purge above wafer surface |
US5645646A (en) | 1994-02-25 | 1997-07-08 | Applied Materials, Inc. | Susceptor for deposition apparatus |
JP2959947B2 (ja) | 1994-02-28 | 1999-10-06 | 信越石英株式会社 | 原料ガス供給方法及び装置 |
US5589002A (en) | 1994-03-24 | 1996-12-31 | Applied Materials, Inc. | Gas distribution plate for semiconductor wafer processing apparatus with means for inhibiting arcing |
US5900103A (en) | 1994-04-20 | 1999-05-04 | Tokyo Electron Limited | Plasma treatment method and apparatus |
JP3211548B2 (ja) | 1994-03-30 | 2001-09-25 | ウシオ電機株式会社 | 誘電体バリア放電蛍光ランプ |
JPH07283149A (ja) | 1994-04-04 | 1995-10-27 | Nissin Electric Co Ltd | 薄膜気相成長装置 |
US5685914A (en) | 1994-04-05 | 1997-11-11 | Applied Materials, Inc. | Focus ring for semiconductor wafer processing in a plasma reactor |
DE69419496T2 (de) | 1994-04-20 | 1999-10-28 | Stmicroelectronics S.R.L., Agrate Brianza | Beobachtung des RF-Plasmainduzierten Potentials auf einem Gatterdielektrikum innerhalb eines Plasmaätzers |
JPH07297271A (ja) | 1994-04-22 | 1995-11-10 | Shinko Electric Co Ltd | 異サイズのウェ−ハカセットを任意に支持可能な支持機構 |
US6447232B1 (en) | 1994-04-28 | 2002-09-10 | Semitool, Inc. | Semiconductor wafer processing apparatus having improved wafer input/output handling system |
US5431734A (en) | 1994-04-28 | 1995-07-11 | International Business Machines Corporation | Aluminum oxide low pressure chemical vapor deposition (LPCVD) system-fourier transform infrared (FTIR) source chemical control |
RU95106478A (ru) | 1994-04-29 | 1997-01-20 | Моторола | Устройство и способ для разложения химических соединений |
US5456207A (en) | 1994-05-16 | 1995-10-10 | The United States Of America As Represented By The Secretary Of The Navy | Synthesis of triisopropylindium diisopropyltelluride adduct and use for semiconductor materials |
US5775889A (en) | 1994-05-17 | 1998-07-07 | Tokyo Electron Limited | Heat treatment process for preventing slips in semiconductor wafers |
US5531835A (en) | 1994-05-18 | 1996-07-02 | Applied Materials, Inc. | Patterned susceptor to reduce electrostatic force in a CVD chamber |
JP3181171B2 (ja) | 1994-05-20 | 2001-07-03 | シャープ株式会社 | 気相成長装置および気相成長方法 |
KR960002534A (ko) | 1994-06-07 | 1996-01-26 | 이노우에 아키라 | 감압·상압 처리장치 |
KR0144956B1 (ko) | 1994-06-10 | 1998-08-17 | 김광호 | 반도체 장치의 배선 구조 및 그 형성방법 |
GB9411911D0 (en) | 1994-06-14 | 1994-08-03 | Swan Thomas & Co Ltd | Improvements in or relating to chemical vapour deposition |
US5858819A (en) | 1994-06-15 | 1999-01-12 | Seiko Epson Corporation | Fabrication method for a thin film semiconductor device, the thin film semiconductor device itself, liquid crystal display, and electronic device |
US5518780A (en) | 1994-06-16 | 1996-05-21 | Ford Motor Company | Method of making hard, transparent amorphous hydrogenated boron nitride films |
US5423942A (en) | 1994-06-20 | 1995-06-13 | Texas Instruments Incorporated | Method and apparatus for reducing etching erosion in a plasma containment tube |
US5504042A (en) | 1994-06-23 | 1996-04-02 | Texas Instruments Incorporated | Porous dielectric material with improved pore surface properties for electronics applications |
US5510277A (en) | 1994-06-29 | 1996-04-23 | At&T Corp. | Surface treatment for silicon substrates |
JP2709568B2 (ja) | 1994-06-30 | 1998-02-04 | 日本プレシジョン・サーキッツ株式会社 | ダウンフロー型スピンドライヤ |
US5826129A (en) | 1994-06-30 | 1998-10-20 | Tokyo Electron Limited | Substrate processing system |
US6022414A (en) | 1994-07-18 | 2000-02-08 | Semiconductor Equipment Group, Llc | Single body injector and method for delivering gases to a surface |
US5838029A (en) | 1994-08-22 | 1998-11-17 | Rohm Co., Ltd. | GaN-type light emitting device formed on a silicon substrate |
US5730801A (en) | 1994-08-23 | 1998-03-24 | Applied Materials, Inc. | Compartnetalized substrate processing chamber |
JPH0878347A (ja) | 1994-09-06 | 1996-03-22 | Komatsu Electron Metals Co Ltd | エピタキシャル成長装置のサセプタ |
US5669713A (en) | 1994-09-27 | 1997-09-23 | Rosemount Inc. | Calibration of process control temperature transmitter |
JPH0897167A (ja) | 1994-09-28 | 1996-04-12 | Tokyo Electron Ltd | 処理装置及び熱処理装置 |
JP3632256B2 (ja) | 1994-09-30 | 2005-03-23 | 株式会社デンソー | 窒化シリコン膜を有する半導体装置の製造方法 |
US5514439A (en) | 1994-10-14 | 1996-05-07 | Sibley; Thomas | Wafer support fixtures for rapid thermal processing |
US5576629A (en) | 1994-10-24 | 1996-11-19 | Fourth State Technology, Inc. | Plasma monitoring and control method and system |
JP2845163B2 (ja) | 1994-10-27 | 1999-01-13 | 日本電気株式会社 | プラズマ処理方法及びその装置 |
EP0792493B1 (en) | 1994-11-08 | 1999-08-11 | Vermeer Technologies, Inc. | An online service development tool with fee setting capabilities |
US5562947A (en) | 1994-11-09 | 1996-10-08 | Sony Corporation | Method and apparatus for isolating a susceptor heating element from a chemical vapor deposition environment |
US6699530B2 (en) | 1995-07-06 | 2004-03-02 | Applied Materials, Inc. | Method for constructing a film on a semiconductor wafer |
US5811022A (en) | 1994-11-15 | 1998-09-22 | Mattson Technology, Inc. | Inductive plasma reactor |
US5583736A (en) | 1994-11-17 | 1996-12-10 | The United States Of America As Represented By The Department Of Energy | Micromachined silicon electrostatic chuck |
FI97730C (fi) | 1994-11-28 | 1997-02-10 | Mikrokemia Oy | Laitteisto ohutkalvojen valmistamiseksi |
FI97731C (fi) | 1994-11-28 | 1997-02-10 | Mikrokemia Oy | Menetelmä ja laite ohutkalvojen valmistamiseksi |
FI100409B (fi) | 1994-11-28 | 1997-11-28 | Asm Int | Menetelmä ja laitteisto ohutkalvojen valmistamiseksi |
US5558717A (en) | 1994-11-30 | 1996-09-24 | Applied Materials | CVD Processing chamber |
JPH08181135A (ja) | 1994-12-22 | 1996-07-12 | Sharp Corp | 半導体装置の製造方法 |
US5776254A (en) | 1994-12-28 | 1998-07-07 | Mitsubishi Denki Kabushiki Kaisha | Apparatus for forming thin film by chemical vapor deposition |
US5716133A (en) | 1995-01-17 | 1998-02-10 | Applied Komatsu Technology, Inc. | Shielded heat sensor for measuring temperature |
US5586585A (en) | 1995-02-27 | 1996-12-24 | Asyst Technologies, Inc. | Direct loadlock interface |
JP3151118B2 (ja) | 1995-03-01 | 2001-04-03 | 東京エレクトロン株式会社 | 熱処理装置 |
AUPN164695A0 (en) | 1995-03-10 | 1995-04-06 | Luminis Pty Limited | Improved induction nozzle and arrangement |
US5662470A (en) | 1995-03-31 | 1997-09-02 | Asm International N.V. | Vertical furnace |
US5518549A (en) | 1995-04-18 | 1996-05-21 | Memc Electronic Materials, Inc. | Susceptor and baffle therefor |
JP3360098B2 (ja) | 1995-04-20 | 2002-12-24 | 東京エレクトロン株式会社 | 処理装置のシャワーヘッド構造 |
US5852879A (en) | 1995-04-26 | 1998-12-29 | Schumaier; Daniel R. | Moisture sensitive item drying appliance |
SE506163C2 (sv) | 1995-04-27 | 1997-11-17 | Ericsson Telefon Ab L M | Anordning vid ett kiselsubstrat med ett urtag för upptagande av ett element jämte förfarande för framställande av en dylik anordning |
US6088216A (en) | 1995-04-28 | 2000-07-11 | International Business Machines Corporation | Lead silicate based capacitor structures |
US5661263A (en) | 1995-05-10 | 1997-08-26 | Phaeton, Llc | Surface raceway and method |
JP3028462B2 (ja) | 1995-05-12 | 2000-04-04 | 東京エレクトロン株式会社 | 熱処理装置 |
US5985032A (en) | 1995-05-17 | 1999-11-16 | Matsushita Electric Industrial Co., Ltd. | Semiconductor manufacturing apparatus |
US5761328A (en) | 1995-05-22 | 1998-06-02 | Solberg Creations, Inc. | Computer automated system and method for converting source-documents bearing alphanumeric text relating to survey measurements |
US5698036A (en) | 1995-05-26 | 1997-12-16 | Tokyo Electron Limited | Plasma processing apparatus |
US5540898A (en) | 1995-05-26 | 1996-07-30 | Vasogen Inc. | Ozone generator with in-line ozone sensor |
US5708825A (en) | 1995-05-26 | 1998-01-13 | Iconovex Corporation | Automatic summary page creation and hyperlink generation |
US5663899A (en) | 1995-06-05 | 1997-09-02 | Advanced Micro Devices | Redundant thermocouple |
US5982931A (en) | 1995-06-07 | 1999-11-09 | Ishimaru; Mikio | Apparatus and method for the manipulation of image containing documents |
US5683517A (en) | 1995-06-07 | 1997-11-04 | Applied Materials, Inc. | Plasma reactor with programmable reactant gas distribution |
US6190634B1 (en) | 1995-06-07 | 2001-02-20 | President And Fellows Of Harvard College | Carbide nanomaterials |
JPH08335558A (ja) | 1995-06-08 | 1996-12-17 | Nissin Electric Co Ltd | 薄膜気相成長装置 |
JP3380091B2 (ja) | 1995-06-09 | 2003-02-24 | 株式会社荏原製作所 | 反応ガス噴射ヘッド及び薄膜気相成長装置 |
JP3700733B2 (ja) | 1995-06-12 | 2005-09-28 | 富士ゼロックス株式会社 | 文書管理装置及び文書管理方法 |
US5685912A (en) | 1995-06-20 | 1997-11-11 | Sony Corporation | Pressure control system for semiconductor manufacturing equipment |
USD392855S (en) | 1995-06-26 | 1998-03-31 | Pillow Daryl R | Floor protection template for use while spray-painting door frames |
US20020114886A1 (en) | 1995-07-06 | 2002-08-22 | Applied Materials, Inc. | Method of tisin deposition using a chemical vapor deposition process |
TW294820B (en) | 1995-07-10 | 1997-01-01 | Watkins Johnson Co | Gas distribution apparatus |
TW283250B (en) | 1995-07-10 | 1996-08-11 | Watkins Johnson Co | Plasma enhanced chemical processing reactor and method |
US5670786A (en) | 1995-07-18 | 1997-09-23 | Uvp, Inc. | Multiple wavelength light source |
JPH0936198A (ja) | 1995-07-19 | 1997-02-07 | Hitachi Ltd | 真空処理装置およびそれを用いた半導体製造ライン |
US6093252A (en) | 1995-08-03 | 2000-07-25 | Asm America, Inc. | Process chamber with inner support |
DE19528746C1 (de) | 1995-08-04 | 1996-10-31 | Siemens Ag | Verfahren zum Erzeugen einer Siliziumdioxidschicht auf Oberflächenabschnitten einer Struktur |
NO953217L (no) | 1995-08-16 | 1997-02-17 | Aker Eng As | Metode og innretning ved rörbunter |
JPH0964149A (ja) | 1995-08-29 | 1997-03-07 | Hitachi Electron Eng Co Ltd | 半導体製造装置 |
US6053982A (en) | 1995-09-01 | 2000-04-25 | Asm America, Inc. | Wafer support system |
US6113702A (en) | 1995-09-01 | 2000-09-05 | Asm America, Inc. | Wafer support system |
JP3504784B2 (ja) | 1995-09-07 | 2004-03-08 | 東京エレクトロン株式会社 | 熱処理方法 |
TW371796B (en) | 1995-09-08 | 1999-10-11 | Semiconductor Energy Lab Co Ltd | Method and apparatus for manufacturing a semiconductor device |
US5791782A (en) | 1995-09-21 | 1998-08-11 | Fusion Systems Corporation | Contact temperature probe with unrestrained orientation |
JPH0989676A (ja) | 1995-09-21 | 1997-04-04 | Casio Comput Co Ltd | 電子体温計 |
DE19535178C2 (de) | 1995-09-22 | 2001-07-19 | Jenoptik Jena Gmbh | Einrichtung zum Ver- und Entriegeln einer Tür eines Behälters |
US5611448A (en) | 1995-09-25 | 1997-03-18 | United Microelectronics Corporation | Wafer container |
US5997588A (en) | 1995-10-13 | 1999-12-07 | Advanced Semiconductor Materials America, Inc. | Semiconductor processing system with gas curtain |
DE29517100U1 (de) | 1995-10-17 | 1997-02-13 | Zimmer, Johannes, Klagenfurt | Strömungsteilungs- und -umformungskörper |
TW356554B (en) | 1995-10-23 | 1999-04-21 | Watkins Johnson Co | Gas injection system for semiconductor processing |
US5801104A (en) | 1995-10-24 | 1998-09-01 | Micron Technology, Inc. | Uniform dielectric film deposition on textured surfaces |
US6299404B1 (en) | 1995-10-27 | 2001-10-09 | Brooks Automation Inc. | Substrate transport apparatus with double substrate holders |
KR100201386B1 (ko) | 1995-10-28 | 1999-06-15 | 구본준 | 화학기상증착장비의 반응가스 분사장치 |
IL115931A0 (en) | 1995-11-09 | 1996-01-31 | Oramir Semiconductor Ltd | Laser stripping improvement by modified gas composition |
JP3796782B2 (ja) | 1995-11-13 | 2006-07-12 | アシスト シンコー株式会社 | 機械的インターフェイス装置 |
US5736314A (en) | 1995-11-16 | 1998-04-07 | Microfab Technologies, Inc. | Inline thermo-cycler |
JPH09148322A (ja) | 1995-11-22 | 1997-06-06 | Sharp Corp | シリコン酸化膜の成膜方法及びプラズマcvd成膜装置 |
US5796074A (en) | 1995-11-28 | 1998-08-18 | Applied Materials, Inc. | Wafer heater assembly |
US5768125A (en) | 1995-12-08 | 1998-06-16 | Asm International N.V. | Apparatus for transferring a substantially circular article |
US5584936A (en) | 1995-12-14 | 1996-12-17 | Cvd, Incorporated | Susceptor for semiconductor wafer processing |
JPH09172055A (ja) | 1995-12-19 | 1997-06-30 | Fujitsu Ltd | 静電チャック及びウエハの吸着方法 |
US5954375A (en) | 1995-12-21 | 1999-09-21 | Edstrom Industries, Inc. | Sanitary fitting having ferrule with grooved undercut |
US5697706A (en) | 1995-12-26 | 1997-12-16 | Chrysler Corporation | Multi-point temperature probe |
KR100267418B1 (ko) | 1995-12-28 | 2000-10-16 | 엔도 마코토 | 플라스마처리방법및플라스마처리장치 |
US5679215A (en) | 1996-01-02 | 1997-10-21 | Lam Research Corporation | Method of in situ cleaning a vacuum plasma processing chamber |
US5650351A (en) | 1996-01-11 | 1997-07-22 | Vanguard International Semiconductor Company | Method to form a capacitor having multiple pillars for advanced DRAMS |
JPH09205130A (ja) | 1996-01-17 | 1997-08-05 | Applied Materials Inc | ウェハ支持装置 |
US6017818A (en) | 1996-01-22 | 2000-01-25 | Texas Instruments Incorporated | Process for fabricating conformal Ti-Si-N and Ti-B-N based barrier films with low defect density |
US5754390A (en) | 1996-01-23 | 1998-05-19 | Micron Technology, Inc. | Integrated capacitor bottom electrode for use with conformal dielectric |
US5632919A (en) | 1996-01-25 | 1997-05-27 | T.G.M., Inc. | Temperature controlled insulation system |
JPH09213772A (ja) | 1996-01-30 | 1997-08-15 | Dainippon Screen Mfg Co Ltd | 基板保持装置 |
DE69728256T2 (de) | 1996-01-31 | 2005-03-03 | Asm America Inc., Phoenix | Modellgestützte prädiktive regelung für thermische behandlungen |
US5554557A (en) | 1996-02-02 | 1996-09-10 | Vanguard International Semiconductor Corp. | Method for fabricating a stacked capacitor with a self aligned node contact in a memory cell |
US6054013A (en) | 1996-02-02 | 2000-04-25 | Applied Materials, Inc. | Parallel plate electrode plasma reactor having an inductive antenna and adjustable radial distribution of plasma ion density |
US5732957A (en) | 1996-02-09 | 1998-03-31 | Yu; Chung-Hsiung | Roller skate with auxiliary roller for assisting turning and braking action thereof |
JP3769802B2 (ja) | 1996-02-09 | 2006-04-26 | 株式会社日立製作所 | 半導体装置の製造方法 |
US6030902A (en) | 1996-02-16 | 2000-02-29 | Micron Technology Inc | Apparatus and method for improving uniformity in batch processing of semiconductor wafers |
SE9600705D0 (sv) | 1996-02-26 | 1996-02-26 | Abb Research Ltd | A susceptor for a device for epitaxially growing objects and such a device |
US5837320A (en) | 1996-02-27 | 1998-11-17 | The University Of New Mexico | Chemical vapor deposition of metal sulfide films from metal thiocarboxylate complexes with monodenate or multidentate ligands |
US5732744A (en) | 1996-03-08 | 1998-03-31 | Control Systems, Inc. | Method and apparatus for aligning and supporting semiconductor process gas delivery and regulation components |
US5656093A (en) | 1996-03-08 | 1997-08-12 | Applied Materials, Inc. | Wafer spacing mask for a substrate support chuck and method of fabricating same |
DE19609678C2 (de) | 1996-03-12 | 2003-04-17 | Infineon Technologies Ag | Speicherzellenanordnung mit streifenförmigen, parallel verlaufenden Gräben und vertikalen MOS-Transistoren und Verfahren zu deren Herstellung |
USD411516S (en) | 1996-03-15 | 1999-06-29 | Tokyo Electron Limited | Gas diffusion plate for electrode of semiconductor wafer processing apparatus |
US5732597A (en) | 1996-03-19 | 1998-03-31 | Hughes Electronics | Pre-loaded self-aligning roller nut assembly for standard micrometer spindle and the like |
USD380527S (en) | 1996-03-19 | 1997-07-01 | Cherle Velez | Sink drain shield |
US5653807A (en) | 1996-03-28 | 1997-08-05 | The United States Of America As Represented By The Secretary Of The Air Force | Low temperature vapor phase epitaxial system for depositing thin layers of silicon-germanium alloy |
US6106678A (en) | 1996-03-29 | 2000-08-22 | Lam Research Corporation | Method of high density plasma CVD gap-filling |
US5851293A (en) | 1996-03-29 | 1998-12-22 | Atmi Ecosys Corporation | Flow-stabilized wet scrubber system for treatment of process gases from semiconductor manufacturing operations |
US5667592A (en) | 1996-04-16 | 1997-09-16 | Gasonics International | Process chamber sleeve with ring seals for isolating individual process modules in a common cluster |
KR100212132B1 (ko) | 1996-04-24 | 1999-08-02 | 윤종용 | 횡형 확산로의 프로파일 열전대 |
US5819434A (en) | 1996-04-25 | 1998-10-13 | Applied Materials, Inc. | Etch enhancement using an improved gas distribution plate |
US6440221B2 (en) | 1996-05-13 | 2002-08-27 | Applied Materials, Inc. | Process chamber having improved temperature control |
USD386076S (en) | 1996-05-14 | 1997-11-11 | Camco Manufacturing, Inc. | Awning clamp |
US5844683A (en) | 1996-05-22 | 1998-12-01 | Applied Materials, Inc. | Position sensor system for substrate holders |
US5920798A (en) | 1996-05-28 | 1999-07-06 | Matsushita Battery Industrial Co., Ltd. | Method of preparing a semiconductor layer for an optical transforming device |
US6001183A (en) | 1996-06-10 | 1999-12-14 | Emcore Corporation | Wafer carriers for epitaxial growth processes |
US6534133B1 (en) | 1996-06-14 | 2003-03-18 | Research Foundation Of State University Of New York | Methodology for in-situ doping of aluminum coatings |
US6342277B1 (en) | 1996-08-16 | 2002-01-29 | Licensee For Microelectronics: Asm America, Inc. | Sequential chemical vapor deposition |
US5801945A (en) | 1996-06-28 | 1998-09-01 | Lam Research Corporation | Scheduling method for robotic manufacturing processes |
US5779203A (en) | 1996-06-28 | 1998-07-14 | Edlinger; Erich | Adjustable wafer cassette stand |
US6183565B1 (en) | 1997-07-08 | 2001-02-06 | Asm International N.V | Method and apparatus for supporting a semiconductor wafer during processing |
US5950327A (en) | 1996-07-08 | 1999-09-14 | Speedfam-Ipec Corporation | Methods and apparatus for cleaning and drying wafers |
US5820366A (en) | 1996-07-10 | 1998-10-13 | Eaton Corporation | Dual vertical thermal processing furnace |
US5937142A (en) | 1996-07-11 | 1999-08-10 | Cvc Products, Inc. | Multi-zone illuminator for rapid thermal processing |
US5993916A (en) | 1996-07-12 | 1999-11-30 | Applied Materials, Inc. | Method for substrate processing with improved throughput and yield |
US5915562A (en) | 1996-07-12 | 1999-06-29 | Fluoroware, Inc. | Transport module with latching door |
US5846332A (en) | 1996-07-12 | 1998-12-08 | Applied Materials, Inc. | Thermally floating pedestal collar in a chemical vapor deposition chamber |
EP0818671A3 (en) | 1996-07-12 | 1998-07-08 | Isuzu Ceramics Research Institute Co., Ltd. | A ceramic sheath type thermocouple |
US5837058A (en) | 1996-07-12 | 1998-11-17 | Applied Materials, Inc. | High temperature susceptor |
US5700729A (en) | 1996-07-15 | 1997-12-23 | Taiwan Semiconductor Manufacturing Company, Ltd. | Masked-gate MOS S/D implantation |
US5827757A (en) | 1996-07-16 | 1998-10-27 | Direct Radiography Corp. | Fabrication of large area x-ray image capturing element |
EP0821395A3 (en) | 1996-07-19 | 1998-03-25 | Tokyo Electron Limited | Plasma processing apparatus |
JP3122617B2 (ja) | 1996-07-19 | 2001-01-09 | 東京エレクトロン株式会社 | プラズマ処理装置 |
US5724748A (en) | 1996-07-24 | 1998-03-10 | Brooks; Ray G. | Apparatus for packaging contaminant-sensitive articles and resulting package |
US5781693A (en) | 1996-07-24 | 1998-07-14 | Applied Materials, Inc. | Gas introduction showerhead for an RTP chamber with upper and lower transparent plates and gas flow therebetween |
US5879128A (en) | 1996-07-24 | 1999-03-09 | Applied Materials, Inc. | Lift pin and support pin apparatus for a processing chamber |
US5987480A (en) | 1996-07-25 | 1999-11-16 | Donohue; Michael | Method and system for delivering documents customized for a particular user over the internet using imbedded dynamic content |
JPH1050635A (ja) | 1996-07-29 | 1998-02-20 | Kokusai Electric Co Ltd | 金属薄膜の生成方法及びcvd装置 |
JPH1050800A (ja) | 1996-08-05 | 1998-02-20 | Canon Sales Co Inc | 処理装置 |
US5891251A (en) | 1996-08-07 | 1999-04-06 | Macleish; Joseph H. | CVD reactor having heated process chamber within isolation chamber |
US5928426A (en) | 1996-08-08 | 1999-07-27 | Novellus Systems, Inc. | Method and apparatus for treating exhaust gases from CVD, PECVD or plasma etch reactors |
KR0183912B1 (ko) | 1996-08-08 | 1999-05-01 | 김광호 | 다중 반응 챔버에 연결된 펌핑 설비 및 이를 사용하는 방법 |
US5916365A (en) | 1996-08-16 | 1999-06-29 | Sherman; Arthur | Sequential chemical vapor deposition |
JP3122618B2 (ja) | 1996-08-23 | 2001-01-09 | 東京エレクトロン株式会社 | プラズマ処理装置 |
TW344847B (en) | 1996-08-29 | 1998-11-11 | Tokyo Electron Co Ltd | Substrate treatment system, substrate transfer system, and substrate transfer method |
US5806980A (en) | 1996-09-11 | 1998-09-15 | Novellus Systems, Inc. | Methods and apparatus for measuring temperatures at high potential |
US5857777A (en) | 1996-09-25 | 1999-01-12 | Claud S. Gordon Company | Smart temperature sensing device |
US5880980A (en) | 1996-09-30 | 1999-03-09 | Rockwell International Corporation | Distributed decimation sample rate conversion |
US6048154A (en) | 1996-10-02 | 2000-04-11 | Applied Materials, Inc. | High vacuum dual stage load lock and method for loading and unloading wafers using a high vacuum dual stage load lock |
USD403949S (en) | 1996-10-03 | 1999-01-12 | Shinagawa Shoko Co., Ltd. | Insulating bushing |
KR19980026850A (ko) | 1996-10-11 | 1998-07-15 | 김광호 | 웨이퍼의 휨을 검사하는 기능을 갖는 급속 열처리 장비 |
KR100492258B1 (ko) | 1996-10-11 | 2005-09-02 | 가부시키가이샤 에바라 세이사꾸쇼 | 반응가스분출헤드 |
US6071572A (en) | 1996-10-15 | 2000-06-06 | Applied Materials, Inc. | Forming tin thin films using remote activated specie generation |
US5818716A (en) | 1996-10-18 | 1998-10-06 | Taiwan Semiconductor Manufacturing Company Ltd. | Dynamic lot dispatching required turn rate factory control system and method of operation thereof |
US5928389A (en) | 1996-10-21 | 1999-07-27 | Applied Materials, Inc. | Method and apparatus for priority based scheduling of wafer processing within a multiple chamber semiconductor wafer processing tool |
JP2983476B2 (ja) | 1996-10-30 | 1999-11-29 | キヤノン販売株式会社 | 成膜方法及び半導体装置の製造方法 |
US6073973A (en) | 1996-10-31 | 2000-06-13 | Stanley Aviation Corporation | Lightweight positive lock coupling |
US6444037B1 (en) | 1996-11-13 | 2002-09-03 | Applied Materials, Inc. | Chamber liner for high temperature processing chamber |
US6347636B1 (en) | 1996-11-13 | 2002-02-19 | Applied Materials, Inc. | Methods and apparatus for gettering fluorine from chamber material surfaces |
US5855681A (en) | 1996-11-18 | 1999-01-05 | Applied Materials, Inc. | Ultra high throughput wafer vacuum processing system |
US6126744A (en) | 1996-11-18 | 2000-10-03 | Asm America, Inc. | Method and system for adjusting semiconductor processing equipment |
US6152070A (en) | 1996-11-18 | 2000-11-28 | Applied Materials, Inc. | Tandem process chamber |
DE19648744A1 (de) | 1996-11-25 | 1998-05-28 | Basf Ag | Verfahren zur Herstellung einer Polymerdispersion durch radikalische wäßrige Emulsionspolymerisation mit einer kontinuierlich hergestellten wäßrigen Monomerenemulsion |
JPH10154712A (ja) | 1996-11-25 | 1998-06-09 | Fujitsu Ltd | 半導体装置の製造方法 |
JP3740587B2 (ja) | 1996-11-25 | 2006-02-01 | 山里産業株式会社 | 熱電対 |
JP3901265B2 (ja) | 1996-11-26 | 2007-04-04 | 大陽日酸株式会社 | 薄板状基体の搬送方法及び搬送装置 |
CN1186873A (zh) | 1996-11-26 | 1998-07-08 | 西门子公司 | 带多个气体入口和独立质流控制回路的反应室的分布板 |
US5836483A (en) | 1997-02-05 | 1998-11-17 | Aerotech Dental Systems, Inc. | Self-regulating fluid dispensing cap with safety pressure relief valve for dental/medical unit fluid bottles |
JPH1160735A (ja) | 1996-12-09 | 1999-03-05 | Toshiba Corp | ポリシランおよびパターン形成方法 |
US5753835A (en) | 1996-12-12 | 1998-05-19 | Caterpillar Inc. | Receptacle for holding a sensing device |
US6367410B1 (en) | 1996-12-16 | 2002-04-09 | Applied Materials, Inc. | Closed-loop dome thermal control apparatus for a semiconductor wafer processing system |
US5953635A (en) | 1996-12-19 | 1999-09-14 | Intel Corporation | Interlayer dielectric with a composite dielectric stack |
US6066204A (en) | 1997-01-08 | 2000-05-23 | Bandwidth Semiconductor, Llc | High pressure MOCVD reactor system |
US6189482B1 (en) | 1997-02-12 | 2001-02-20 | Applied Materials, Inc. | High temperature, high flow rate chemical vapor deposition apparatus and related methods |
NL1005102C2 (nl) | 1997-01-27 | 1998-07-29 | Advanced Semiconductor Mat | Inrichting voor het behandelen van halfgeleiderschijven. |
US5984391A (en) | 1997-02-03 | 1999-11-16 | Novellus Systems, Inc. | Microfeature wafer handling apparatus and methods |
US5893741A (en) | 1997-02-07 | 1999-04-13 | National Science Council | Method for simultaneously forming local interconnect with silicided elevated source/drain MOSFET's |
JP3336897B2 (ja) | 1997-02-07 | 2002-10-21 | 三菱住友シリコン株式会社 | 気相成長装置用サセプター |
US20020174106A1 (en) | 1997-02-10 | 2002-11-21 | Actioneer, Inc. | Method and apparatus for receiving information in response to a request |
US6035101A (en) | 1997-02-12 | 2000-03-07 | Applied Materials, Inc. | High temperature multi-layered alloy heater assembly and related methods |
JP3492135B2 (ja) | 1997-02-13 | 2004-02-03 | 三菱重工業株式会社 | 熱流束計 |
US6127249A (en) | 1997-02-20 | 2000-10-03 | Micron Technology, Inc. | Metal silicidation methods and methods for using same |
US6447937B1 (en) | 1997-02-26 | 2002-09-10 | Kyocera Corporation | Ceramic materials resistant to halogen plasma and components using the same |
JPH10239165A (ja) | 1997-02-27 | 1998-09-11 | Sony Corp | 基板の温度測定器、基板の温度を測定する方法および基板の加熱方法 |
US6461982B2 (en) | 1997-02-27 | 2002-10-08 | Micron Technology, Inc. | Methods for forming a dielectric film |
NL1005410C2 (nl) | 1997-02-28 | 1998-08-31 | Advanced Semiconductor Mat | Stelsel voor het laden, behandelen en ontladen van op een drager aangebrachte substraten. |
US6096267A (en) | 1997-02-28 | 2000-08-01 | Extraction Systems, Inc. | System for detecting base contaminants in air |
DE69816277T2 (de) | 1997-02-28 | 2004-06-03 | Extraction Systems, Inc., Franklin | System zum nachweis von aminen und anderen basischen molekularen verumreinigungen in einem gas |
US5879459A (en) | 1997-08-29 | 1999-03-09 | Genus, Inc. | Vertically-stacked process reactor and cluster tool system for atomic layer deposition |
US6174377B1 (en) | 1997-03-03 | 2001-01-16 | Genus, Inc. | Processing chamber for atomic layer deposition processes |
US5947718A (en) | 1997-03-07 | 1999-09-07 | Semitool, Inc. | Semiconductor processing furnace |
US6213708B1 (en) | 1997-03-12 | 2001-04-10 | Advanced Micro Devices, Inc. | System for sorting multiple semiconductor wafers |
NL1005541C2 (nl) | 1997-03-14 | 1998-09-18 | Advanced Semiconductor Mat | Werkwijze voor het koelen van een oven alsmede oven voorzien van een koelinrichting. |
JP3124506B2 (ja) | 1997-03-14 | 2001-01-15 | 白光株式会社 | ヒータ・センサ複合体 |
US5866795A (en) | 1997-03-17 | 1999-02-02 | Applied Materials, Inc. | Liquid flow rate estimation and verification by direct liquid measurement |
US6214122B1 (en) | 1997-03-17 | 2001-04-10 | Motorola, Inc. | Rapid thermal processing susceptor |
US6287988B1 (en) | 1997-03-18 | 2001-09-11 | Kabushiki Kaisha Toshiba | Semiconductor device manufacturing method, semiconductor device manufacturing apparatus and semiconductor device |
JPH10261620A (ja) | 1997-03-19 | 1998-09-29 | Hitachi Ltd | 表面処理装置 |
US6217662B1 (en) | 1997-03-24 | 2001-04-17 | Cree, Inc. | Susceptor designs for silicon carbide thin films |
NL1005625C2 (nl) | 1997-03-25 | 1998-10-01 | Asm Int | Stelsel voor het overbrengen van wafers uit cassettes naar ovens alsmede werkwijze. |
US6387827B1 (en) | 1997-03-28 | 2002-05-14 | Imec (Vzw) | Method for growing thin silicon oxides on a silicon substrate using chlorine precursors |
US5872065A (en) | 1997-04-02 | 1999-02-16 | Applied Materials Inc. | Method for depositing low K SI-O-F films using SIF4 /oxygen chemistry |
US6891138B2 (en) | 1997-04-04 | 2005-05-10 | Robert C. Dalton | Electromagnetic susceptors with coatings for artificial dielectric systems and devices |
NL1005802C2 (nl) | 1997-04-11 | 1998-10-14 | Asm Int | Afvoersysteem voor een reactor alsmede processtelsel voorzien van een dergelijk afvoersysteem. |
US6090442A (en) | 1997-04-14 | 2000-07-18 | University Technology Corporation | Method of growing films on substrates at room temperatures using catalyzed binary reaction sequence chemistry |
US5865205A (en) | 1997-04-17 | 1999-02-02 | Applied Materials, Inc. | Dynamic gas flow controller |
JP3752578B2 (ja) | 1997-04-21 | 2006-03-08 | 株式会社フジキン | 流体制御器用加熱装置 |
US6029602A (en) | 1997-04-22 | 2000-02-29 | Applied Materials, Inc. | Apparatus and method for efficient and compact remote microwave plasma generation |
US6026762A (en) | 1997-04-23 | 2000-02-22 | Applied Materials, Inc. | Apparatus for improved remote microwave plasma source for use with substrate processing systems |
US6190113B1 (en) | 1997-04-30 | 2001-02-20 | Applied Materials, Inc. | Quartz pin lift for single wafer chemical vapor deposition/etch process chamber |
JP3967424B2 (ja) | 1997-04-30 | 2007-08-29 | 東京エレクトロン株式会社 | 真空処理装置及び圧力調整方法 |
NL1005963C2 (nl) | 1997-05-02 | 1998-11-09 | Asm Int | Verticale oven voor het behandelen van halfgeleidersubstraten. |
US6053983A (en) | 1997-05-08 | 2000-04-25 | Tokyo Electron, Ltd. | Wafer for carrying semiconductor wafers and method detecting wafers on carrier |
US5904170A (en) | 1997-05-14 | 1999-05-18 | Applied Materials, Inc. | Pressure flow and concentration control of oxygen/ozone gas mixtures |
JP3230051B2 (ja) | 1997-05-16 | 2001-11-19 | 東京エレクトロン株式会社 | 乾燥処理方法及びその装置 |
US6390754B2 (en) | 1997-05-21 | 2002-05-21 | Tokyo Electron Limited | Wafer processing apparatus, method of operating the same and wafer detecting system |
JPH1144799A (ja) | 1997-05-27 | 1999-02-16 | Ushio Inc | 光路分割型紫外線照射装置 |
US5937323A (en) | 1997-06-03 | 1999-08-10 | Applied Materials, Inc. | Sequencing of the recipe steps for the optimal low-k HDP-CVD processing |
US6201999B1 (en) | 1997-06-09 | 2001-03-13 | Applied Materials, Inc. | Method and apparatus for automatically generating schedules for wafer processing within a multichamber semiconductor wafer processing tool |
US6104401A (en) | 1997-06-12 | 2000-08-15 | Netscape Communications Corporation | Link filters |
EP0887632A1 (en) | 1997-06-24 | 1998-12-30 | Isuzu Ceramics Research Institute Co., Ltd. | A ceramic thermocouple for measuring temperature of molten metal |
US5968275A (en) | 1997-06-25 | 1999-10-19 | Lam Research Corporation | Methods and apparatus for passivating a substrate in a plasma reactor |
US5759281A (en) | 1997-06-30 | 1998-06-02 | Emcore Corporation | CVD reactor for uniform heating with radiant heating filaments |
JP3957818B2 (ja) | 1997-07-02 | 2007-08-15 | 富士通株式会社 | ライブラリ装置用カートリッジ移送ロボット |
NL1006461C2 (nl) | 1997-07-03 | 1999-01-05 | Asm Int | Opslagsamenstel voor wafers. |
FI972874A0 (fi) | 1997-07-04 | 1997-07-04 | Mikrokemia Oy | Foerfarande och anordning foer framstaellning av tunnfilmer |
US6531193B2 (en) | 1997-07-07 | 2003-03-11 | The Penn State Research Foundation | Low temperature, high quality silicon dioxide thin films deposited using tetramethylsilane (TMS) for stress control and coverage applications |
US6576064B2 (en) | 1997-07-10 | 2003-06-10 | Sandia Corporation | Support apparatus for semiconductor wafer processing |
US6083321A (en) | 1997-07-11 | 2000-07-04 | Applied Materials, Inc. | Fluid delivery system and method |
US6024799A (en) | 1997-07-11 | 2000-02-15 | Applied Materials, Inc. | Chemical vapor deposition manifold |
US6312525B1 (en) | 1997-07-11 | 2001-11-06 | Applied Materials, Inc. | Modular architecture for semiconductor wafer fabrication equipment |
US5975492A (en) | 1997-07-14 | 1999-11-02 | Brenes; Arthur | Bellows driver slot valve |
JP3362113B2 (ja) | 1997-07-15 | 2003-01-07 | 日本碍子株式会社 | 耐蝕性部材、ウエハー設置部材および耐蝕性部材の製造方法 |
US6176929B1 (en) | 1997-07-22 | 2001-01-23 | Ebara Corporation | Thin-film deposition apparatus |
US6099596A (en) | 1997-07-23 | 2000-08-08 | Applied Materials, Inc. | Wafer out-of-pocket detection tool |
US6020243A (en) | 1997-07-24 | 2000-02-01 | Texas Instruments Incorporated | Zirconium and/or hafnium silicon-oxynitride gate dielectric |
KR100385946B1 (ko) | 1999-12-08 | 2003-06-02 | 삼성전자주식회사 | 원자층 증착법을 이용한 금속층 형성방법 및 그 금속층을장벽금속층, 커패시터의 상부전극, 또는 하부전극으로구비한 반도체 소자 |
US6287965B1 (en) | 1997-07-28 | 2001-09-11 | Samsung Electronics Co, Ltd. | Method of forming metal layer using atomic layer deposition and semiconductor device having the metal layer as barrier metal layer or upper or lower electrode of capacitor |
US5827420A (en) | 1997-07-29 | 1998-10-27 | World Precision Instruments, Inc. | Method and apparatus for the generation of nitric oxide |
US6135460A (en) | 1997-07-31 | 2000-10-24 | Texas Instruments Incorporated | Method of and apparatus for purifying reduced pressure process chambers |
US5884640A (en) | 1997-08-07 | 1999-03-23 | Applied Materials, Inc. | Method and apparatus for drying substrates |
US7393561B2 (en) | 1997-08-11 | 2008-07-01 | Applied Materials, Inc. | Method and apparatus for layer by layer deposition of thin films |
US6321680B2 (en) | 1997-08-11 | 2001-11-27 | Torrex Equipment Corporation | Vertical plasma enhanced process apparatus and method |
US20030049372A1 (en) | 1997-08-11 | 2003-03-13 | Cook Robert C. | High rate deposition at low pressures in a small batch reactor |
JP3425592B2 (ja) | 1997-08-12 | 2003-07-14 | 東京エレクトロン株式会社 | 処理装置 |
JP3317209B2 (ja) | 1997-08-12 | 2002-08-26 | 東京エレクトロンエイ・ティー株式会社 | プラズマ処理装置及びプラズマ処理方法 |
US6121158A (en) | 1997-08-13 | 2000-09-19 | Sony Corporation | Method for hardening a photoresist material formed on a substrate |
US6530994B1 (en) | 1997-08-15 | 2003-03-11 | Micro C Technologies, Inc. | Platform for supporting a semiconductor substrate and method of supporting a substrate during rapid high temperature processing |
US6090212A (en) | 1997-08-15 | 2000-07-18 | Micro C Technologies, Inc. | Substrate platform for a semiconductor substrate during rapid high temperature processing and method of supporting a substrate |
USD404370S (en) | 1997-08-20 | 1999-01-19 | Tokyo Electron Limited | Cap for use in a semiconductor wafer heat processing apparatus |
USD404372S (en) | 1997-08-20 | 1999-01-19 | Tokyo Electron Limited | Ring for use in a semiconductor wafer heat processing apparatus |
US6242359B1 (en) | 1997-08-20 | 2001-06-05 | Air Liquide America Corporation | Plasma cleaning and etching methods using non-global-warming compounds |
KR100253664B1 (ko) | 1997-08-22 | 2000-04-15 | 이해광 | 폴리이미드 건조기의 작동 시스템 |
US6104011A (en) | 1997-09-04 | 2000-08-15 | Watlow Electric Manufacturing Company | Sheathed thermocouple with internal coiled wires |
AUPO904597A0 (en) | 1997-09-08 | 1997-10-02 | Canon Information Systems Research Australia Pty Ltd | Method for non-linear document conversion and printing |
US6027163A (en) | 1997-09-10 | 2000-02-22 | Graco Children's Products Inc. | Juvenile carrier with moveable canopy |
US6258170B1 (en) | 1997-09-11 | 2001-07-10 | Applied Materials, Inc. | Vaporization and deposition apparatus |
JP3581537B2 (ja) | 1997-09-24 | 2004-10-27 | 三菱重工業株式会社 | 高周波加熱コイルの設置間隙保持装置 |
US6348376B2 (en) | 1997-09-29 | 2002-02-19 | Samsung Electronics Co., Ltd. | Method of forming metal nitride film by chemical vapor deposition and method of forming metal contact and capacitor of semiconductor device using the same |
US6161500A (en) | 1997-09-30 | 2000-12-19 | Tokyo Electron Limited | Apparatus and method for preventing the premature mixture of reactant gases in CVD and PECVD reactions |
AU1269499A (en) | 1997-10-07 | 1999-04-27 | Electronics Development Corporation | Transducer assembly with smart connector |
JPH11118615A (ja) | 1997-10-09 | 1999-04-30 | Kakunenryo Cycle Kaihatsu Kiko | 伸縮性を有する被測定物用温度センサ |
US6624064B1 (en) | 1997-10-10 | 2003-09-23 | Applied Materials, Inc. | Chamber seasoning method to improve adhesion of F-containing dielectric film to metal for VLSI application |
US5908672A (en) | 1997-10-15 | 1999-06-01 | Applied Materials, Inc. | Method and apparatus for depositing a planarized passivation layer |
EP1036407A1 (en) | 1997-11-03 | 2000-09-20 | ASM America, Inc. | Method of processing wafers with low mass support |
US6325858B1 (en) | 1997-11-03 | 2001-12-04 | Asm America, Inc. | Long life high temperature process chamber |
WO1999023691A2 (en) | 1997-11-03 | 1999-05-14 | Asm America, Inc. | Improved low mass wafer support system |
US6164894A (en) | 1997-11-04 | 2000-12-26 | Cheng; David | Method and apparatus for integrated wafer handling and testing |
JPH11140648A (ja) | 1997-11-07 | 1999-05-25 | Tokyo Electron Ltd | プロセスチャンバ装置及び処理装置 |
US6136211A (en) | 1997-11-12 | 2000-10-24 | Applied Materials, Inc. | Self-cleaning etch process |
JP3050193B2 (ja) | 1997-11-12 | 2000-06-12 | 日本電気株式会社 | 半導体装置及びその製造方法 |
GB9724168D0 (en) | 1997-11-14 | 1998-01-14 | Air Prod & Chem | Gas control device and method of supplying gas |
US6068441A (en) | 1997-11-21 | 2000-05-30 | Asm America, Inc. | Substrate transfer system for semiconductor processing equipment |
US6574644B2 (en) | 1997-11-26 | 2003-06-03 | Siemens Corporate Research, Inc | Automatic capturing of hyperlink specifications for multimedia documents |
EP1049640A4 (en) | 1997-11-28 | 2008-03-12 | Mattson Tech Inc | SYSTEMS AND METHODS FOR HANDLING WORKPIECES FOR VACUUM PROCESSING AT HIGH FLOW RATE AND LOW CONTAMINATION |
US6013920A (en) | 1997-11-28 | 2000-01-11 | Fortrend Engineering Coirporation | Wafer-mapping load post interface having an effector position sensing device |
US6079356A (en) | 1997-12-02 | 2000-06-27 | Applied Materials, Inc. | Reactor optimized for chemical vapor deposition of titanium |
US6106625A (en) | 1997-12-02 | 2000-08-22 | Applied Materials, Inc. | Reactor useful for chemical vapor deposition of titanium nitride |
US6432479B2 (en) | 1997-12-02 | 2002-08-13 | Applied Materials, Inc. | Method for in-situ, post deposition surface passivation of a chemical vapor deposited film |
KR100295043B1 (ko) | 1997-12-03 | 2001-10-19 | 윤종용 | 저유전상수절연막을층간절연막으로사용하는반도체장치의금속막형성방법 |
JPH11319545A (ja) | 1997-12-15 | 1999-11-24 | Canon Inc | プラズマ処理方法及び基体の処理方法 |
US6248168B1 (en) | 1997-12-15 | 2001-06-19 | Tokyo Electron Limited | Spin coating apparatus including aging unit and solvent replacement unit |
JPH11183265A (ja) | 1997-12-16 | 1999-07-09 | Tokyo Yogyo Co Ltd | 熱電対をもつ温度測定器 |
JPH11183264A (ja) | 1997-12-16 | 1999-07-09 | Tokyo Yogyo Co Ltd | 熱電対をもつ温度測定器 |
JP3283459B2 (ja) | 1997-12-17 | 2002-05-20 | 日本エー・エス・エム株式会社 | 半導体処理用の基板保持装置 |
EP0926731A1 (en) | 1997-12-18 | 1999-06-30 | STMicroelectronics S.r.l. | Process for the final passivation of intergrated circuits |
US5897379A (en) | 1997-12-19 | 1999-04-27 | Sharp Microelectronics Technology, Inc. | Low temperature system and method for CVD copper removal |
US6093611A (en) | 1997-12-19 | 2000-07-25 | Advanced Micro Devices, Inc. | Oxide liner for high reliability with reduced encroachment of the source/drain region |
US6099649A (en) | 1997-12-23 | 2000-08-08 | Applied Materials, Inc. | Chemical vapor deposition hot-trap for unreacted precursor conversion and effluent removal |
JPH11195688A (ja) | 1997-12-26 | 1999-07-21 | Mc Electronics Kk | 基板処理装置 |
KR100273261B1 (ko) | 1997-12-26 | 2000-12-15 | 김영환 | 반도체 화학기상증착장비의 가스혼합장치 |
USD409894S (en) | 1997-12-30 | 1999-05-18 | Mcclurg Ben B | Sheet rock plug |
EP0932194A1 (en) | 1997-12-30 | 1999-07-28 | International Business Machines Corporation | Method and system for semiconductor wafer fabrication process real-time in-situ interactive supervision |
KR100249391B1 (ko) | 1997-12-30 | 2000-03-15 | 김영환 | 가열장치 |
KR100269328B1 (ko) | 1997-12-31 | 2000-10-16 | 윤종용 | 원자층 증착 공정을 이용하는 도전층 형성방법 |
JP3314151B2 (ja) | 1998-01-05 | 2002-08-12 | 株式会社日立国際電気 | プラズマcvd装置及び半導体装置の製造方法 |
KR100275727B1 (ko) | 1998-01-06 | 2001-01-15 | 윤종용 | 반도체 장치의 커패시터 형성방법 |
JP3998418B2 (ja) | 1998-01-16 | 2007-10-24 | ブルックス オートメーション インコーポレイテッド | 半導体ウエファーカセットの位置決め及び検知機構 |
JPH11274067A (ja) | 1998-01-21 | 1999-10-08 | Mitsubishi Electric Corp | X線マスクの応力調整方法 |
US6039809A (en) | 1998-01-27 | 2000-03-21 | Mitsubishi Materials Silicon Corporation | Method and apparatus for feeding a gas for epitaxial growth |
US6091062A (en) | 1998-01-27 | 2000-07-18 | Kinetrix, Inc. | Method and apparatus for temperature control of a semiconductor electrical-test contractor assembly |
NL1008143C2 (nl) | 1998-01-27 | 1999-07-28 | Asm Int | Stelsel voor het behandelen van wafers. |
US6125789A (en) | 1998-01-30 | 2000-10-03 | Applied Materials, Inc. | Increasing the sensitivity of an in-situ particle monitor |
TWI237305B (en) | 1998-02-04 | 2005-08-01 | Nikon Corp | Exposure apparatus and positioning apparatus of substrate receiving cassette |
US7354873B2 (en) | 1998-02-05 | 2008-04-08 | Asm Japan K.K. | Method for forming insulation film |
US7582575B2 (en) | 1998-02-05 | 2009-09-01 | Asm Japan K.K. | Method for forming insulation film |
US6383955B1 (en) | 1998-02-05 | 2002-05-07 | Asm Japan K.K. | Silicone polymer insulation film on semiconductor substrate and method for forming the film |
TW437017B (en) | 1998-02-05 | 2001-05-28 | Asm Japan Kk | Silicone polymer insulation film on semiconductor substrate and method for formation thereof |
US6635578B1 (en) | 1998-02-09 | 2003-10-21 | Applied Materials, Inc | Method of operating a dual chamber reactor with neutral density decoupled from ion density |
US6074514A (en) | 1998-02-09 | 2000-06-13 | Applied Materials, Inc. | High selectivity etch using an external plasma discharge |
US6352049B1 (en) | 1998-02-09 | 2002-03-05 | Applied Materials, Inc. | Plasma assisted processing chamber with separate control of species density |
US6413583B1 (en) | 1998-02-11 | 2002-07-02 | Applied Materials, Inc. | Formation of a liquid-like silica layer by reaction of an organosilicon compound and a hydroxyl forming compound |
US6303523B2 (en) | 1998-02-11 | 2001-10-16 | Applied Materials, Inc. | Plasma processes for depositing low dielectric constant films |
US6050506A (en) | 1998-02-13 | 2000-04-18 | Applied Materials, Inc. | Pattern of apertures in a showerhead for chemical vapor deposition |
JPH11238688A (ja) | 1998-02-23 | 1999-08-31 | Shin Etsu Handotai Co Ltd | 薄膜の製造方法 |
US6072163A (en) | 1998-03-05 | 2000-06-06 | Fsi International Inc. | Combination bake/chill apparatus incorporating low thermal mass, thermally conductive bakeplate |
US5897348A (en) | 1998-03-13 | 1999-04-27 | Texas Instruments - Acer Incorporated | Low mask count self-aligned silicided CMOS transistors with a high electrostatic discharge resistance |
US7181501B2 (en) | 1998-03-19 | 2007-02-20 | Isochron, Inc. | Remote data acquisition, transmission and analysis system including handheld wireless equipment |
WO1999049705A1 (fr) | 1998-03-20 | 1999-09-30 | Tokyo Electron Limited | Dispositif de traitement plasmique |
JP3656701B2 (ja) | 1998-03-23 | 2005-06-08 | 東京エレクトロン株式会社 | 処理装置 |
NL1008749C2 (nl) | 1998-03-30 | 1999-10-05 | Asm Int | Werkwijze voor het chemisch behandelen van een halfgeleidersubstraat. |
JP3554219B2 (ja) | 1998-03-31 | 2004-08-18 | キヤノン株式会社 | 排気装置と排気方法、および堆積膜形成装置と堆積膜形成方法 |
JPH11287715A (ja) | 1998-04-02 | 1999-10-19 | Canon Inc | 熱電対 |
SE9801190D0 (sv) | 1998-04-06 | 1998-04-06 | Abb Research Ltd | A method and a device for epitaxial growth of objects by Chemical Vapour Deposition |
US6015465A (en) | 1998-04-08 | 2000-01-18 | Applied Materials, Inc. | Temperature control system for semiconductor process chamber |
US6296711B1 (en) | 1998-04-14 | 2001-10-02 | Cvd Systems, Inc. | Film processing system |
KR100265287B1 (ko) | 1998-04-21 | 2000-10-02 | 윤종용 | 반도체소자 제조용 식각설비의 멀티챔버 시스템 |
US6079927A (en) | 1998-04-22 | 2000-06-27 | Varian Semiconductor Equipment Associates, Inc. | Automated wafer buffer for use with wafer processing equipment |
KR100376983B1 (ko) | 1998-04-30 | 2003-08-02 | 주식회사 하이닉스반도체 | 포토레지스트중합체및이를이용한미세패턴의형성방법 |
KR100376984B1 (ko) | 1998-04-30 | 2003-07-16 | 주식회사 하이닉스반도체 | 포토레지스트중합체및이를이용한미세패턴의형성방법 |
US6287435B1 (en) | 1998-05-06 | 2001-09-11 | Tokyo Electron Limited | Method and apparatus for ionized physical vapor deposition |
US6060721A (en) | 1998-05-06 | 2000-05-09 | Taiwan Semiconductor Manufacturing Co., Ltd | Apparatus for detecting correct positioning of a wafer cassette |
US6126848A (en) | 1998-05-06 | 2000-10-03 | International Business Machines Corporation | Indirect endpoint detection by chemical reaction and chemiluminescence |
US20010016273A1 (en) | 1998-05-08 | 2001-08-23 | Krishnan Narasimhan | Multilayer cvd coated article and process for producing same |
US6218288B1 (en) | 1998-05-11 | 2001-04-17 | Micron Technology, Inc. | Multiple step methods for forming conformal layers |
TW446995B (en) | 1998-05-11 | 2001-07-21 | Semitool Inc | Temperature control system for a thermal reactor |
NL1009171C2 (nl) | 1998-05-14 | 1999-12-10 | Asm Int | Waferrek voorzien van een gasverdeelinrichting. |
KR100309918B1 (ko) | 1998-05-16 | 2001-12-17 | 윤종용 | 광시야각액정표시장치및그제조방법 |
US6284050B1 (en) | 1998-05-18 | 2001-09-04 | Novellus Systems, Inc. | UV exposure for improving properties and adhesion of dielectric polymer films formed by chemical vapor deposition |
JP3208376B2 (ja) | 1998-05-20 | 2001-09-10 | 株式会社半導体プロセス研究所 | 成膜方法及び半導体装置の製造方法 |
JPH11343571A (ja) | 1998-05-29 | 1999-12-14 | Ngk Insulators Ltd | サセプター |
KR20000000946A (ko) | 1998-06-05 | 2000-01-15 | 주재현 | 기화기 및 이를 사용한 화학 기상 증착장치 |
NL1009327C2 (nl) | 1998-06-05 | 1999-12-10 | Asm Int | Werkwijze en inrichting voor het overbrengen van wafers. |
JPH11354637A (ja) | 1998-06-11 | 1999-12-24 | Oki Electric Ind Co Ltd | 配線の接続構造及び配線の接続部の形成方法 |
US20020009861A1 (en) | 1998-06-12 | 2002-01-24 | Pravin K. Narwankar | Method and apparatus for the formation of dielectric layers |
US6146463A (en) | 1998-06-12 | 2000-11-14 | Applied Materials, Inc. | Apparatus and method for aligning a substrate on a support member |
US6148761A (en) | 1998-06-16 | 2000-11-21 | Applied Materials, Inc. | Dual channel gas distribution plate |
US6086677A (en) | 1998-06-16 | 2000-07-11 | Applied Materials, Inc. | Dual gas faceplate for a showerhead in a semiconductor wafer processing system |
US6302964B1 (en) | 1998-06-16 | 2001-10-16 | Applied Materials, Inc. | One-piece dual gas faceplate for a showerhead in a semiconductor wafer processing system |
JP2963443B1 (ja) | 1998-06-19 | 1999-10-18 | キヤノン販売株式会社 | 半導体装置の製造装置 |
KR20000002833A (ko) | 1998-06-23 | 2000-01-15 | 윤종용 | 반도체 웨이퍼 보트 |
USD412512S (en) | 1998-06-24 | 1999-08-03 | Marc H Boisvert | Tool holding device |
JP3333135B2 (ja) | 1998-06-25 | 2002-10-07 | 東京エレクトロン株式会社 | 熱処理装置及び熱処理方法 |
US6015459A (en) | 1998-06-26 | 2000-01-18 | Extreme Devices, Inc. | Method for doping semiconductor materials |
JP3472482B2 (ja) | 1998-06-30 | 2003-12-02 | 富士通株式会社 | 半導体装置の製造方法と製造装置 |
US6232248B1 (en) | 1998-07-03 | 2001-05-15 | Tokyo Electron Limited | Single-substrate-heat-processing method for performing reformation and crystallization |
US6335293B1 (en) | 1998-07-13 | 2002-01-01 | Mattson Technology, Inc. | Systems and methods for two-sided etch of a semiconductor substrate |
US6182603B1 (en) | 1998-07-13 | 2001-02-06 | Applied Komatsu Technology, Inc. | Surface-treated shower head for use in a substrate processing chamber |
US6210485B1 (en) | 1998-07-21 | 2001-04-03 | Applied Materials, Inc. | Chemical vapor deposition vaporizer |
JP2000040728A (ja) | 1998-07-22 | 2000-02-08 | Nippon Asm Kk | ウェハ搬送機構 |
JP4641569B2 (ja) | 1998-07-24 | 2011-03-02 | 日本碍子株式会社 | 窒化アルミニウム質焼結体、耐蝕性部材、金属埋設および半導体保持装置 |
US20010001384A1 (en) | 1998-07-29 | 2001-05-24 | Takeshi Arai | Silicon epitaxial wafer and production method therefor |
NL1009767C2 (nl) | 1998-07-29 | 2000-02-04 | Asm Int | Werkwijze en inrichting voor het etsen van een substraat. |
US6344232B1 (en) | 1998-07-30 | 2002-02-05 | The United States Of America As Represented By The Secretary Of The Air Force | Computer controlled temperature and oxygen maintenance for fiber coating CVD |
KR100297552B1 (ko) | 1998-08-03 | 2001-11-30 | 윤종용 | 반도체소자제조용식각장치의절연창 |
KR100275738B1 (ko) | 1998-08-07 | 2000-12-15 | 윤종용 | 원자층 증착법을 이용한 박막 제조방법 |
USD412270S (en) | 1998-08-10 | 1999-07-27 | David Frank Fredrickson | Article lifter |
US6462310B1 (en) | 1998-08-12 | 2002-10-08 | Asml Us, Inc | Hot wall rapid thermal processor |
JP2000068355A (ja) | 1998-08-21 | 2000-03-03 | Dainippon Screen Mfg Co Ltd | 基板処理装置 |
US6596398B1 (en) | 1998-08-21 | 2003-07-22 | Atofina Chemicals, Inc. | Solar control coated glass |
US6569971B2 (en) | 1998-08-27 | 2003-05-27 | Hyundai Electronics Industries Co., Ltd. | Polymers for photoresist and photoresist compositions using the same |
US6133161A (en) | 1998-08-27 | 2000-10-17 | Micron Technology, Inc. | Methods of forming a film on a substrate using complexes having tris(pyrazolyl) methanate ligands |
US6427622B2 (en) | 1998-08-28 | 2002-08-06 | Mv Systems, Inc. | Hot wire chemical vapor deposition method and apparatus using graphite hot rods |
US6323081B1 (en) | 1998-09-03 | 2001-11-27 | Micron Technology, Inc. | Diffusion barrier layers and methods of forming same |
US6190732B1 (en) | 1998-09-03 | 2001-02-20 | Cvc Products, Inc. | Method and system for dispensing process gas for fabricating a device on a substrate |
JP3830670B2 (ja) | 1998-09-03 | 2006-10-04 | 三菱電機株式会社 | 半導体製造装置 |
US6727190B2 (en) | 1998-09-03 | 2004-04-27 | Micron Technology, Inc. | Method of forming fluorine doped boron-phosphorous silicate glass (F-BPSG) insulating materials |
KR100566905B1 (ko) | 1998-09-11 | 2006-07-03 | 에이에스엠지니텍코리아 주식회사 | 표면 촉매를 이용한 화학 증착방법_ |
US6344084B1 (en) | 1998-09-11 | 2002-02-05 | Japan Science And Technology Corporation | Combinatorial molecular layer epitaxy device |
US6284149B1 (en) | 1998-09-18 | 2001-09-04 | Applied Materials, Inc. | High-density plasma etching of carbon-based low-k materials in a integrated circuit |
KR100646906B1 (ko) | 1998-09-22 | 2006-11-17 | 동경 엘렉트론 주식회사 | 기판처리장치 및 기판처리방법 |
US6187672B1 (en) | 1998-09-22 | 2001-02-13 | Conexant Systems, Inc. | Interconnect with low dielectric constant insulators for semiconductor integrated circuit manufacturing |
US6800571B2 (en) | 1998-09-29 | 2004-10-05 | Applied Materials Inc. | CVD plasma assisted low dielectric constant films |
US6143082A (en) | 1998-10-08 | 2000-11-07 | Novellus Systems, Inc. | Isolation of incompatible processes in a multi-station processing chamber |
US6257758B1 (en) | 1998-10-09 | 2001-07-10 | Claud S. Gordon Company | Surface temperature sensor |
NL1010317C2 (nl) | 1998-10-14 | 2000-05-01 | Asm Int | Sorteer/opslaginrichting voor wafers en werkwijze voor het hanteren daarvan. |
USD451893S1 (en) | 1998-10-15 | 2001-12-11 | Meto International Gmbh | Arrangement of aluminum foil coils forming an inductor of a resonant frequency identification element |
US6462671B2 (en) | 1998-10-20 | 2002-10-08 | Brendyl Trent Bushner | Remote securities based data reception and order system |
US20030101938A1 (en) | 1998-10-27 | 2003-06-05 | Applied Materials, Inc. | Apparatus for the deposition of high dielectric constant films |
US6454860B2 (en) | 1998-10-27 | 2002-09-24 | Applied Materials, Inc. | Deposition reactor having vaporizing, mixing and cleaning capabilities |
JP3234576B2 (ja) | 1998-10-30 | 2001-12-04 | アプライド マテリアルズ インコーポレイテッド | 半導体製造装置におけるウェハ支持装置 |
US6063196A (en) | 1998-10-30 | 2000-05-16 | Applied Materials, Inc. | Semiconductor processing chamber calibration tool |
KR100317238B1 (ko) | 1998-11-03 | 2002-02-19 | 윤종용 | 가열로 온도검출용 스파이크 열전대 소자_ |
US6423613B1 (en) | 1998-11-10 | 2002-07-23 | Micron Technology, Inc. | Low temperature silicon wafer bond process with bulk material bond strength |
US6183564B1 (en) | 1998-11-12 | 2001-02-06 | Tokyo Electron Limited | Buffer chamber for integrating physical and chemical vapor deposition chambers together in a processing system |
US6214717B1 (en) | 1998-11-16 | 2001-04-10 | Taiwan Semiconductor Manufacturing Company | Method for adding plasma treatment on bond pad to prevent bond pad staining problems |
JP2000150617A (ja) | 1998-11-17 | 2000-05-30 | Tokyo Electron Ltd | 搬送装置 |
JP3664897B2 (ja) | 1998-11-18 | 2005-06-29 | 東京エレクトロン株式会社 | 縦型熱処理装置 |
US6143079A (en) | 1998-11-19 | 2000-11-07 | Asm America, Inc. | Compact process chamber for improved process uniformity |
US6177688B1 (en) | 1998-11-24 | 2001-01-23 | North Carolina State University | Pendeoepitaxial gallium nitride semiconductor layers on silcon carbide substrates |
US6113703A (en) | 1998-11-25 | 2000-09-05 | Applied Materials, Inc. | Method and apparatus for processing the upper and lower faces of a wafer |
DE19956531A1 (de) | 1998-11-27 | 2000-05-31 | Hyundai Electronics Ind | Vernetzer für ein Photoresist und diesen enthaltende Photoresistzusammensetzung |
US6383300B1 (en) | 1998-11-27 | 2002-05-07 | Tokyo Electron Ltd. | Heat treatment apparatus and cleaning method of the same |
RU2141647C1 (ru) | 1998-11-30 | 1999-11-20 | Войналович Александр Владимирович | Способ контроля анализируемой поверхности и сканирующий анализатор поверхности |
US6283692B1 (en) | 1998-12-01 | 2001-09-04 | Applied Materials, Inc. | Apparatus for storing and moving a cassette |
JP2000174123A (ja) | 1998-12-09 | 2000-06-23 | Nec Corp | 半導体装置及びその製造方法 |
US6310328B1 (en) | 1998-12-10 | 2001-10-30 | Mattson Technologies, Inc. | Rapid thermal processing chamber for processing multiple wafers |
US6364954B2 (en) | 1998-12-14 | 2002-04-02 | Applied Materials, Inc. | High temperature chemical vapor deposition chamber |
US20010052556A1 (en) | 1998-12-14 | 2001-12-20 | Weichi Ting | Injector |
JP2000183346A (ja) | 1998-12-15 | 2000-06-30 | Toshiba Corp | 半導体装置及びその製造方法 |
JP3375294B2 (ja) | 1998-12-17 | 2003-02-10 | 東京エレクトロン株式会社 | 処理装置、処理システムおよび該装置における清浄エアの供給方法 |
US6255221B1 (en) | 1998-12-17 | 2001-07-03 | Lam Research Corporation | Methods for running a high density plasma etcher to achieve reduced transistor device damage |
US6129954A (en) | 1998-12-22 | 2000-10-10 | General Electric Company | Method for thermally spraying crack-free mullite coatings on ceramic-based substrates |
US6607948B1 (en) | 1998-12-24 | 2003-08-19 | Kabushiki Kaisha Toshiba | Method of manufacturing a substrate using an SiGe layer |
US6496819B1 (en) | 1998-12-28 | 2002-12-17 | Oracle Corporation | Rewriting a query in terms of a summary based on functional dependencies and join backs, and based on join derivability |
KR100281094B1 (ko) | 1998-12-30 | 2001-02-01 | 서평원 | 이동 통신 시스템에서 셀 탐색 방법 |
US6137240A (en) | 1998-12-31 | 2000-10-24 | Lumion Corporation | Universal ballast control circuit |
US6579805B1 (en) | 1999-01-05 | 2003-06-17 | Ronal Systems Corp. | In situ chemical generator and method |
JP3433392B2 (ja) | 1999-01-12 | 2003-08-04 | セントラル硝子株式会社 | クリーニングガス及び真空処理装置のクリーニング方法 |
NL1011017C2 (nl) | 1999-01-13 | 2000-07-31 | Asm Int | Inrichting voor het positioneren van een wafer. |
KR100331544B1 (ko) | 1999-01-18 | 2002-04-06 | 윤종용 | 반응챔버에 가스를 유입하는 방법 및 이에 사용되는 샤워헤드 |
JP3119641B2 (ja) | 1999-01-19 | 2000-12-25 | 九州日本電気株式会社 | 縦型熱処理装置 |
US6490493B1 (en) | 1999-01-21 | 2002-12-03 | Rosemount Inc. | Industrial process device management software |
TW455912B (en) | 1999-01-22 | 2001-09-21 | Sony Corp | Method and apparatus for film deposition |
US7217325B2 (en) | 1999-01-22 | 2007-05-15 | Semitool, Inc. | System for processing a workpiece |
JP2987148B1 (ja) | 1999-01-26 | 1999-12-06 | 国際電気株式会社 | 基板処理装置 |
JP3579278B2 (ja) | 1999-01-26 | 2004-10-20 | 東京エレクトロン株式会社 | 縦型熱処理装置及びシール装置 |
US6250747B1 (en) | 1999-01-28 | 2001-06-26 | Hewlett-Packard Company | Print cartridge with improved back-pressure regulation |
US6737716B1 (en) | 1999-01-29 | 2004-05-18 | Kabushiki Kaisha Toshiba | Semiconductor device and method of manufacturing the same |
US6044860A (en) | 1999-02-01 | 2000-04-04 | Spx Corporation | Adjustable lockout device for knife gate valves |
US6374831B1 (en) | 1999-02-04 | 2002-04-23 | Applied Materials, Inc. | Accelerated plasma clean |
US6281141B1 (en) | 1999-02-08 | 2001-08-28 | Steag Rtp Systems, Inc. | Process for forming thin dielectric layers in semiconductor devices |
KR20010042649A (ko) | 1999-02-12 | 2001-05-25 | 베리 아이클스 | 텅스텐 질화물의 화학기상증착 |
IT1308606B1 (it) | 1999-02-12 | 2002-01-08 | Lpe Spa | Dispositivo per maneggiare substrati mediante un istema autolivellante a depressione in reattori epistassiali ad induzione con suscettore |
US6190037B1 (en) | 1999-02-19 | 2001-02-20 | Applied Materials, Inc. | Non-intrusive, on-the-fly (OTF) temperature measurement and monitoring system |
JP2000249058A (ja) | 1999-02-26 | 2000-09-12 | Ebara Corp | トラップ装置 |
PT1161572E (pt) | 1999-03-03 | 2003-11-28 | Widia Gmbh | Pastilha de corte para maquinar por levantamento de aparas materiais metalicos com um revestimento contendo sulfureto de molibdenio e processo para o seu fabrico |
US6540838B2 (en) | 2000-11-29 | 2003-04-01 | Genus, Inc. | Apparatus and concept for minimizing parasitic chemical vapor deposition during atomic layer deposition |
US6426125B1 (en) | 1999-03-17 | 2002-07-30 | General Electric Company | Multilayer article and method of making by ARC plasma deposition |
US6022802A (en) | 1999-03-18 | 2000-02-08 | Taiwan Semiconductor Manufacturing Company | Low dielectric constant intermetal dielectric (IMD) by formation of air gap between metal lines |
US6250250B1 (en) | 1999-03-18 | 2001-06-26 | Yuri Maishev | Multiple-cell source of uniform plasma |
JP2000269163A (ja) | 1999-03-18 | 2000-09-29 | Sony Corp | 金属膜の形成方法及び配線の形成方法 |
TW464919B (en) | 1999-03-30 | 2001-11-21 | Tokyo Electron Ltd | Plasma processing apparatus, maintenance method thereof and setting method thereof |
US20020052119A1 (en) | 1999-03-31 | 2002-05-02 | Patrick A. Van Cleemput | In-situ flowing bpsg gap fill process using hdp |
JP3250154B2 (ja) | 1999-03-31 | 2002-01-28 | 株式会社スーパーシリコン研究所 | 半導体ウエハ製造装置 |
JP3398936B2 (ja) | 1999-04-09 | 2003-04-21 | 日本エー・エス・エム株式会社 | 半導体処理装置 |
US6263830B1 (en) | 1999-04-12 | 2001-07-24 | Matrix Integrated Systems, Inc. | Microwave choke for remote plasma generator |
TW465017B (en) | 1999-04-13 | 2001-11-21 | Applied Materials Inc | A corrosion-resistant protective coating for an apparatus and method for processing a substrate |
US6264467B1 (en) | 1999-04-14 | 2001-07-24 | Applied Materials, Inc. | Micro grooved support surface for reducing substrate wear and slip formation |
US6326597B1 (en) | 1999-04-15 | 2001-12-04 | Applied Materials, Inc. | Temperature control system for process chamber |
JP3782938B2 (ja) | 1999-04-20 | 2006-06-07 | 東京エレクトロン株式会社 | IC製造におけるPECVD−TiフィルムとCVD−TiNフィルムの単一室処理方法 |
US6265311B1 (en) | 1999-04-27 | 2001-07-24 | Tokyo Electron Limited | PECVD of TaN films from tantalum halide precursors |
US6410433B1 (en) | 1999-04-27 | 2002-06-25 | Tokyo Electron Limited | Thermal CVD of TaN films from tantalum halide precursors |
JP3965258B2 (ja) | 1999-04-30 | 2007-08-29 | 日本碍子株式会社 | 半導体製造装置用のセラミックス製ガス供給構造 |
US7588720B2 (en) | 1999-04-30 | 2009-09-15 | Tso3, Inc. | Method and apparatus for ozone sterilization |
KR100347379B1 (ko) | 1999-05-01 | 2002-08-07 | 주식회사 피케이엘 | 복수매 기판의 박막 증착 공정이 가능한 원자층 증착장치 |
JP3072989B1 (ja) | 1999-05-14 | 2000-08-07 | 日本エー・エス・エム株式会社 | 半導体基板上に薄膜を形成する成膜装置における成膜方法 |
JP2000323487A (ja) | 1999-05-14 | 2000-11-24 | Tokyo Electron Ltd | 枚葉式熱処理装置 |
JP4294791B2 (ja) | 1999-05-17 | 2009-07-15 | アプライド マテリアルズ インコーポレイテッド | 半導体製造装置 |
JP2000329447A (ja) | 1999-05-17 | 2000-11-30 | Matsushita Refrig Co Ltd | 冷蔵庫および除霜用ヒーター |
US6617553B2 (en) | 1999-05-19 | 2003-09-09 | Applied Materials, Inc. | Multi-zone resistive heater |
US6423949B1 (en) | 1999-05-19 | 2002-07-23 | Applied Materials, Inc. | Multi-zone resistive heater |
US6440261B1 (en) | 1999-05-25 | 2002-08-27 | Applied Materials, Inc. | Dual buffer chamber cluster tool for semiconductor wafer processing |
US6119710A (en) | 1999-05-26 | 2000-09-19 | Cyber Instrument Technologies Llc | Method for wide range gas flow system with real time flow measurement and correction |
AU5448200A (en) | 1999-05-27 | 2000-12-18 | Matrix Integrated Systems, Inc. | Rapid heating and cooling of workpiece chucks |
EP1109210A1 (en) | 1999-05-28 | 2001-06-20 | Tokyo Electron Limited | Ozone treatment device of semiconductor process system |
US20020033183A1 (en) | 1999-05-29 | 2002-03-21 | Sheng Sun | Method and apparatus for enhanced chamber cleaning |
JP3668079B2 (ja) | 1999-05-31 | 2005-07-06 | 忠弘 大見 | プラズマプロセス装置 |
US6200897B1 (en) | 1999-06-06 | 2001-03-13 | United Semiconductor Corp. | Method for manufacturing even dielectric layer |
JP3940546B2 (ja) | 1999-06-07 | 2007-07-04 | 株式会社東芝 | パターン形成方法およびパターン形成材料 |
US6656281B1 (en) | 1999-06-09 | 2003-12-02 | Tokyo Electron Limited | Substrate processing apparatus and substrate processing method |
US6548402B2 (en) | 1999-06-11 | 2003-04-15 | Applied Materials, Inc. | Method of depositing a thick titanium nitride film |
US6555183B2 (en) | 1999-06-11 | 2003-04-29 | Applied Materials, Inc. | Plasma treatment of a titanium nitride film formed by chemical vapor deposition |
US6281098B1 (en) | 1999-06-15 | 2001-08-28 | Midwest Research Institute | Process for Polycrystalline film silicon growth |
TW466576B (en) | 1999-06-15 | 2001-12-01 | Ebara Corp | Substrate processing apparatus |
JP2001007102A (ja) | 1999-06-17 | 2001-01-12 | Mitsubishi Electric Corp | 半導体形成方法および半導体製造装置 |
JP2001004062A (ja) | 1999-06-17 | 2001-01-09 | Benkan Corp | 流量制御用バルブ |
US6821571B2 (en) | 1999-06-18 | 2004-11-23 | Applied Materials Inc. | Plasma treatment to enhance adhesion and to minimize oxidation of carbon-containing layers |
US6528752B1 (en) | 1999-06-18 | 2003-03-04 | Tokyo Electron Limited | Plasma processing apparatus and plasma processing method |
JP4726369B2 (ja) | 1999-06-19 | 2011-07-20 | エー・エス・エムジニテックコリア株式会社 | 化学蒸着反応炉及びこれを利用した薄膜形成方法 |
US6812157B1 (en) | 1999-06-24 | 2004-11-02 | Prasad Narhar Gadgil | Apparatus for atomic layer chemical vapor deposition |
US6314974B1 (en) | 1999-06-28 | 2001-11-13 | Fairchild Semiconductor Corporation | Potted transducer array with matching network in a multiple pass configuration |
US6245192B1 (en) | 1999-06-30 | 2001-06-12 | Lam Research Corporation | Gas distribution apparatus for semiconductor processing |
FR2795745B1 (fr) | 1999-06-30 | 2001-08-03 | Saint Gobain Vitrage | Procede de depot d'une couche a base de tungstene et/ou de molybdene sur un substrat verrier, ceramique ou vitroceramique, et substrat ainsi revetu |
US6587108B1 (en) | 1999-07-01 | 2003-07-01 | Honeywell Inc. | Multivariable process matrix display and methods regarding same |
JP3252835B2 (ja) | 1999-07-02 | 2002-02-04 | 松下電器産業株式会社 | 半導体装置およびその製造方法 |
US6151446A (en) | 1999-07-06 | 2000-11-21 | Applied Materials, Inc. | Apparatus and method for thermally processing substrates including a processor using multiple detection signals |
US6240875B1 (en) | 1999-07-07 | 2001-06-05 | Asm International N.V. | Vertical oven with a boat for the uniform treatment of wafers |
JP4288767B2 (ja) | 1999-07-07 | 2009-07-01 | 東京エレクトロン株式会社 | 半導体装置の製造方法 |
US6214121B1 (en) | 1999-07-07 | 2001-04-10 | Applied Materials, Inc. | Pedestal with a thermally controlled platen |
JP2001023955A (ja) | 1999-07-07 | 2001-01-26 | Mitsubishi Electric Corp | プラズマ処理装置 |
US6238734B1 (en) | 1999-07-08 | 2001-05-29 | Air Products And Chemicals, Inc. | Liquid precursor mixtures for deposition of multicomponent metal containing materials |
JP2001023872A (ja) | 1999-07-09 | 2001-01-26 | Hitachi Ltd | 半導体基板処理装置 |
US6375749B1 (en) | 1999-07-14 | 2002-04-23 | Seh America, Inc. | Susceptorless semiconductor wafer support and reactor system for epitaxial layer growth |
US6368988B1 (en) | 1999-07-16 | 2002-04-09 | Micron Technology, Inc. | Combined gate cap or digit line and spacer deposition using HDP |
US6297539B1 (en) | 1999-07-19 | 2001-10-02 | Sharp Laboratories Of America, Inc. | Doped zirconia, or zirconia-like, dielectric film transistor structure and deposition method for same |
FI110311B (fi) | 1999-07-20 | 2002-12-31 | Asm Microchemistry Oy | Menetelmä ja laitteisto aineiden poistamiseksi kaasuista |
KR100327346B1 (ko) | 1999-07-20 | 2002-03-06 | 윤종용 | 선택적 폴리머 증착을 이용한 플라즈마 식각방법 및 이를이용한 콘택홀 형성방법 |
US6239715B1 (en) | 1999-07-21 | 2001-05-29 | Karen L. Belton | Beeper system |
JP3701148B2 (ja) | 1999-07-28 | 2005-09-28 | 株式会社日立製作所 | コンテンツの配信方法 |
US6867859B1 (en) | 1999-08-03 | 2005-03-15 | Lightwind Corporation | Inductively coupled plasma spectrometer for process diagnostics and control |
EP1077479A1 (en) | 1999-08-17 | 2001-02-21 | Applied Materials, Inc. | Post-deposition treatment to enchance properties of Si-O-C low K film |
KR100557594B1 (ko) | 1999-08-17 | 2006-03-10 | 주식회사 하이닉스반도체 | 노광후 지연 안정성을 갖는 신규의 포토레지스트용 단량체, 그의 공중합체 및 이를 함유한 포토레지스트 조성물 |
US6602806B1 (en) | 1999-08-17 | 2003-08-05 | Applied Materials, Inc. | Thermal CVD process for depositing a low dielectric constant carbon-doped silicon oxide film |
EP1077274A1 (en) | 1999-08-17 | 2001-02-21 | Applied Materials, Inc. | Lid cooling mechanism and method for optimized deposition of low-k dielectric using tri methylsilane-ozone based processes |
ATE418158T1 (de) | 1999-08-17 | 2009-01-15 | Applied Materials Inc | Oberflächenbehandlung von kohlenstoffdotierten sio2-filmen zur erhöhung der stabilität während der o2-veraschung |
US6432206B1 (en) | 1999-08-30 | 2002-08-13 | Si Diamond Technology, Inc. | Heating element for use in a hot filament chemical vapor deposition chamber |
US6579833B1 (en) | 1999-09-01 | 2003-06-17 | The Board Of Trustees Of The University Of Illinois | Process for converting a metal carbide to carbon by etching in halogens |
JP2001077088A (ja) | 1999-09-02 | 2001-03-23 | Tokyo Electron Ltd | プラズマ処理装置 |
US6429146B2 (en) | 1999-09-02 | 2002-08-06 | Micron Technology, Inc. | Wafer planarization using a uniform layer of material and method and apparatus for forming uniform layer of material used in semiconductor processing |
WO2001018856A1 (fr) | 1999-09-03 | 2001-03-15 | Mitsubishi Materials Silicon Corporation | Support de tranche |
US6238636B1 (en) | 1999-09-03 | 2001-05-29 | Air Liquide America Corporation | Process and systems for purification of boron trichloride |
US6511539B1 (en) | 1999-09-08 | 2003-01-28 | Asm America, Inc. | Apparatus and method for growth of a thin film |
US7894474B1 (en) | 1999-09-10 | 2011-02-22 | Koninklijke Philips Electronics N.V. | Remote control of an electronic device through downloading of a control interface of the electronic device in a mobile station |
US6355153B1 (en) | 1999-09-17 | 2002-03-12 | Nutool, Inc. | Chip interconnect and packaging deposition methods and structures |
US6451157B1 (en) | 1999-09-23 | 2002-09-17 | Lam Research Corporation | Gas distribution apparatus for semiconductor processing |
US6420792B1 (en) | 1999-09-24 | 2002-07-16 | Texas Instruments Incorporated | Semiconductor wafer edge marking |
US6293700B1 (en) | 1999-09-24 | 2001-09-25 | Fluke Corporation | Calibrated isothermal assembly for a thermocouple thermometer |
US7066703B2 (en) | 1999-09-29 | 2006-06-27 | Tokyo Electron Limited | Chuck transport method and system |
US6740853B1 (en) | 1999-09-29 | 2004-05-25 | Tokyo Electron Limited | Multi-zone resistance heater |
US6333275B1 (en) | 1999-10-01 | 2001-12-25 | Novellus Systems, Inc. | Etchant mixing system for edge bevel removal of copper from silicon wafers |
US6296710B1 (en) | 1999-10-06 | 2001-10-02 | Advanced Micro Devices, Inc. | Multi-port gas injector for a vertical furnace used in semiconductor processing |
US7010580B1 (en) | 1999-10-08 | 2006-03-07 | Agile Software Corp. | Method and apparatus for exchanging data in a platform independent manner |
US6503758B1 (en) | 1999-10-12 | 2003-01-07 | President & Fellows Of Harvard College | Systems and methods for measuring nitrate levels |
JP5331282B2 (ja) | 1999-10-13 | 2013-10-30 | ジーイー・エナジー・ユーエスエー・エルエルシー | サファイア強化熱電対保護管 |
US6500487B1 (en) | 1999-10-18 | 2002-12-31 | Advanced Technology Materials, Inc | Abatement of effluent from chemical vapor deposition processes using ligand exchange resistant metal-organic precursor solutions |
US6391385B1 (en) | 1999-10-18 | 2002-05-21 | Advanced Technology Materials, Inc. | Method of abating of effluents from chemical vapor deposition processes using organometallic source reagents |
US6203613B1 (en) | 1999-10-19 | 2001-03-20 | International Business Machines Corporation | Atomic layer deposition with nitrate containing precursors |
JP4387573B2 (ja) | 1999-10-26 | 2009-12-16 | 東京エレクトロン株式会社 | プロセス排気ガスモニタ装置及び方法、半導体製造装置、及び半導体製造装置管理システム及び方法 |
US6287913B1 (en) | 1999-10-26 | 2001-09-11 | International Business Machines Corporation | Double polysilicon process for providing single chip high performance logic and compact embedded memory structure |
KR100340716B1 (ko) | 1999-10-29 | 2002-06-20 | 윤종용 | 실리콘 질화막 형성방법 |
KR20010045418A (ko) | 1999-11-05 | 2001-06-05 | 박종섭 | 신규한 포토레지스트 단량체, 그의 중합체 및 이를함유하는 포토레지스트 조성물 |
JP3551867B2 (ja) | 1999-11-09 | 2004-08-11 | 信越化学工業株式会社 | シリコンフォーカスリング及びその製造方法 |
KR100547248B1 (ko) | 1999-11-12 | 2006-02-01 | 주식회사 하이닉스반도체 | 알루미나를 사용한 반도체 소자의 게이트 절연막 형성방법 |
US6320320B1 (en) | 1999-11-15 | 2001-11-20 | Lam Research Corporation | Method and apparatus for producing uniform process rates |
JP4209057B2 (ja) | 1999-12-01 | 2009-01-14 | 東京エレクトロン株式会社 | セラミックスヒーターならびにそれを用いた基板処理装置および基板処理方法 |
KR100369324B1 (ko) | 1999-12-02 | 2003-01-24 | 한국전자통신연구원 | 평면형 마이크로 공동구조 제조 방법 |
US6582891B1 (en) | 1999-12-02 | 2003-06-24 | Axcelis Technologies, Inc. | Process for reducing edge roughness in patterned photoresist |
EP1107512A1 (en) | 1999-12-03 | 2001-06-13 | Sony International (Europe) GmbH | Communication device and software for operating multimedia applications |
US6780704B1 (en) | 1999-12-03 | 2004-08-24 | Asm International Nv | Conformal thin films over textured capacitor electrodes |
FI118804B (fi) | 1999-12-03 | 2008-03-31 | Asm Int | Menetelmä oksidikalvojen kasvattamiseksi |
TW514996B (en) | 1999-12-10 | 2002-12-21 | Tokyo Electron Ltd | Processing apparatus with a chamber having therein a high-corrosion-resistant sprayed film |
US6589352B1 (en) | 1999-12-10 | 2003-07-08 | Applied Materials, Inc. | Self aligning non contact shadow ring process kit |
US6452338B1 (en) | 1999-12-13 | 2002-09-17 | Semequip, Inc. | Electron beam ion source with integral low-temperature vaporizer |
US7838842B2 (en) | 1999-12-13 | 2010-11-23 | Semequip, Inc. | Dual mode ion source for ion implantation |
JP3659101B2 (ja) | 1999-12-13 | 2005-06-15 | 富士ゼロックス株式会社 | 窒化物半導体素子及びその製造方法 |
WO2001043157A1 (en) | 1999-12-13 | 2001-06-14 | Semequip, Inc. | Ion implantation ion source, system and method |
EP1247292B1 (en) | 1999-12-15 | 2009-02-04 | Genitech Co., Ltd. | Method of forming copper interconnections and thin films using chemical vapor deposition with catalyst |
US6225745B1 (en) | 1999-12-17 | 2001-05-01 | Axcelis Technologies, Inc. | Dual plasma source for plasma process chamber |
JP3810604B2 (ja) | 1999-12-21 | 2006-08-16 | Smc株式会社 | ゲートバルブ |
JP2001176952A (ja) | 1999-12-21 | 2001-06-29 | Toshiba Mach Co Ltd | ウェーハ位置ずれ検出装置 |
US6503330B1 (en) | 1999-12-22 | 2003-01-07 | Genus, Inc. | Apparatus and method to achieve continuous interface and ultrathin film during atomic layer deposition |
US6673198B1 (en) | 1999-12-22 | 2004-01-06 | Lam Research Corporation | Semiconductor processing equipment having improved process drift control |
JP3582437B2 (ja) | 1999-12-24 | 2004-10-27 | 株式会社村田製作所 | 薄膜製造方法及びそれに用いる薄膜製造装置 |
JP4089113B2 (ja) | 1999-12-28 | 2008-05-28 | 株式会社Ihi | 薄膜作成装置 |
US7055094B2 (en) | 1999-12-30 | 2006-05-30 | Rutgers, The State University Of New Jersey | Virtual tags and the process of virtual tagging utilizing user feedback in transformation rules |
US6335049B1 (en) | 2000-01-03 | 2002-01-01 | Micron Technology, Inc. | Chemical vapor deposition methods of forming a high K dielectric layer and methods of forming a capacitor |
US6576062B2 (en) | 2000-01-06 | 2003-06-10 | Tokyo Electron Limited | Film forming apparatus and film forming method |
WO2001052302A1 (en) | 2000-01-10 | 2001-07-19 | Tokyo Electron Limited | Segmented electrode assembly and method for plasma processing |
KR100767762B1 (ko) | 2000-01-18 | 2007-10-17 | 에이에스엠 저펜 가부시기가이샤 | 자가 세정을 위한 원격 플라즈마 소스를 구비한 cvd 반도체 공정장치 |
US6541367B1 (en) | 2000-01-18 | 2003-04-01 | Applied Materials, Inc. | Very low dielectric constant plasma-enhanced CVD films |
TW473792B (en) | 2000-01-20 | 2002-01-21 | Ngk Insulators Ltd | Electrostatic chuck |
JP2001203211A (ja) | 2000-01-20 | 2001-07-27 | Hitachi Kokusai Electric Inc | 水素アニール処理方法及びその装置 |
JP3654142B2 (ja) | 2000-01-20 | 2005-06-02 | 住友電気工業株式会社 | 半導体製造装置用ガスシャワー体 |
JP4384770B2 (ja) | 2000-01-27 | 2009-12-16 | 株式会社日立国際電気 | 基板処理装置 |
JP2001207268A (ja) | 2000-01-27 | 2001-07-31 | Kubota Corp | 成膜装置 |
JP2001207265A (ja) | 2000-01-27 | 2001-07-31 | Kubota Corp | 成膜装置 |
US6432255B1 (en) | 2000-01-31 | 2002-08-13 | Applied Materials, Inc. | Method and apparatus for enhancing chamber cleaning |
US6475930B1 (en) | 2000-01-31 | 2002-11-05 | Motorola, Inc. | UV cure process and tool for low k film formation |
US6436819B1 (en) | 2000-02-01 | 2002-08-20 | Applied Materials, Inc. | Nitrogen treatment of a metal nitride/metal stack |
US6191399B1 (en) | 2000-02-01 | 2001-02-20 | Asm America, Inc. | System of controlling the temperature of a processing chamber |
JP4174941B2 (ja) | 2000-02-03 | 2008-11-05 | 株式会社デンソー | 薄膜製造方法及び薄膜製造装置 |
EP1252363B1 (de) | 2000-02-04 | 2003-09-10 | Aixtron AG | Vorrichtung und verfahren zum abscheiden einer oder mehrerer schichten auf ein substrat |
US6521046B2 (en) | 2000-02-04 | 2003-02-18 | Kabushiki Kaisha Kobe Seiko Sho | Chamber material made of Al alloy and heater block |
US6372583B1 (en) | 2000-02-09 | 2002-04-16 | Intel Corporation | Process for making semiconductor device with epitaxially grown source and drain |
DE10005820C1 (de) | 2000-02-10 | 2001-08-02 | Schott Glas | Gasversorungsvorrichtung für Precursoren geringen Dampfdrucks |
US20020009119A1 (en) | 2000-02-11 | 2002-01-24 | Matthew William T. | Environmental heat stress monitor |
US6407435B1 (en) | 2000-02-11 | 2002-06-18 | Sharp Laboratories Of America, Inc. | Multilayer dielectric stack and method |
US6573030B1 (en) | 2000-02-17 | 2003-06-03 | Applied Materials, Inc. | Method for depositing an amorphous carbon layer |
KR100520188B1 (ko) | 2000-02-18 | 2005-10-10 | 주식회사 하이닉스반도체 | 부분적으로 가교화된 2층 포토레지스트용 중합체 |
TW476996B (en) | 2000-02-28 | 2002-02-21 | Mitsubishi Material Silicon | Semiconductor manufacturing method and semiconductor manufacturing apparatus |
US6517634B2 (en) | 2000-02-28 | 2003-02-11 | Applied Materials, Inc. | Chemical vapor deposition chamber lid assembly |
US6846711B2 (en) | 2000-03-02 | 2005-01-25 | Tokyo Electron Limited | Method of making a metal oxide capacitor, including a barrier film |
US6644324B1 (en) | 2000-03-06 | 2003-11-11 | Cymer, Inc. | Laser discharge chamber passivation by plasma |
US7419903B2 (en) | 2000-03-07 | 2008-09-02 | Asm International N.V. | Thin films |
DE60125338T2 (de) | 2000-03-07 | 2007-07-05 | Asm International N.V. | Gradierte dünne schichten |
JP4054159B2 (ja) | 2000-03-08 | 2008-02-27 | 東京エレクトロン株式会社 | 基板処理方法及びその装置 |
US6455098B2 (en) | 2000-03-09 | 2002-09-24 | Semix Incorporated | Wafer processing apparatus and method |
CA2402280C (en) | 2000-03-10 | 2008-12-02 | Cyrano Sciences, Inc. | Control for an industrial process using one or more multidimensional variables |
US6475902B1 (en) | 2000-03-10 | 2002-11-05 | Applied Materials, Inc. | Chemical vapor deposition of niobium barriers for copper metallization |
JP2001332609A (ja) | 2000-03-13 | 2001-11-30 | Nikon Corp | 基板保持装置及び露光装置 |
JP3438696B2 (ja) | 2000-03-13 | 2003-08-18 | 松下電器産業株式会社 | プラズマ処理方法及び装置 |
US6506009B1 (en) | 2000-03-16 | 2003-01-14 | Applied Materials, Inc. | Apparatus for storing and moving a cassette |
US6759098B2 (en) | 2000-03-20 | 2004-07-06 | Axcelis Technologies, Inc. | Plasma curing of MSQ-based porous low-k film materials |
US6576300B1 (en) | 2000-03-20 | 2003-06-10 | Dow Corning Corporation | High modulus, low dielectric constant coatings |
US6913796B2 (en) | 2000-03-20 | 2005-07-05 | Axcelis Technologies, Inc. | Plasma curing process for porous low-k materials |
US6558755B2 (en) | 2000-03-20 | 2003-05-06 | Dow Corning Corporation | Plasma curing process for porous silica thin film |
US6598559B1 (en) | 2000-03-24 | 2003-07-29 | Applied Materials, Inc. | Temperature controlled chamber |
AT412302B (de) | 2000-03-28 | 2004-12-27 | Hoerbiger Ventilwerke Gmbh | Selbsttätiges ventil |
JP3676983B2 (ja) | 2000-03-29 | 2005-07-27 | 株式会社日立国際電気 | 半導体製造方法、基板処理方法、及び半導体製造装置 |
AU2001247685A1 (en) | 2000-03-30 | 2001-10-15 | Tokyo Electron Limited | Method of and apparatus for tunable gas injection in a plasma processing system |
JP2001342570A (ja) | 2000-03-30 | 2001-12-14 | Hitachi Kokusai Electric Inc | 半導体装置の製造方法および半導体製造装置 |
JP2001345263A (ja) | 2000-03-31 | 2001-12-14 | Nikon Corp | 露光装置及び露光方法、並びにデバイス製造方法 |
US6390905B1 (en) | 2000-03-31 | 2002-05-21 | Speedfam-Ipec Corporation | Workpiece carrier with adjustable pressure zones and barriers |
JP4281208B2 (ja) | 2000-04-04 | 2009-06-17 | ソニー株式会社 | ロボット遠隔制御システム |
WO2001078115A2 (en) | 2000-04-06 | 2001-10-18 | Asm America, Inc. | Barrier coating for vitreous materials |
KR100360252B1 (ko) | 2000-04-06 | 2002-11-13 | 엘지전자 주식회사 | 진공청소기의 유로 시스템 |
US7011710B2 (en) | 2000-04-10 | 2006-03-14 | Applied Materials Inc. | Concentration profile on demand gas delivery system (individual divert delivery system) |
FI117979B (fi) | 2000-04-14 | 2007-05-15 | Asm Int | Menetelmä oksidiohutkalvojen valmistamiseksi |
TW496907B (en) | 2000-04-14 | 2002-08-01 | Asm Microchemistry Oy | Method and apparatus of growing a thin film onto a substrate |
TW576873B (en) | 2000-04-14 | 2004-02-21 | Asm Int | Method of growing a thin film onto a substrate |
US6641350B2 (en) | 2000-04-17 | 2003-11-04 | Hitachi Kokusai Electric Inc. | Dual loading port semiconductor processing equipment |
CN1331199C (zh) | 2000-04-17 | 2007-08-08 | 马特森技术公司 | 用于生成四氮化三硅薄膜的超薄氧氮化物的uv预处理方法 |
TW503449B (en) | 2000-04-18 | 2002-09-21 | Ngk Insulators Ltd | Halogen gas plasma-resistive members and method for producing the same, laminates, and corrosion-resistant members |
US6984591B1 (en) | 2000-04-20 | 2006-01-10 | International Business Machines Corporation | Precursor source mixtures |
US6329297B1 (en) | 2000-04-21 | 2001-12-11 | Applied Materials, Inc. | Dilute remote plasma clean |
US6502530B1 (en) | 2000-04-26 | 2003-01-07 | Unaxis Balzers Aktiengesellschaft | Design of gas injection for the electrode in a capacitively coupled RF plasma reactor |
US6635117B1 (en) | 2000-04-26 | 2003-10-21 | Axcelis Technologies, Inc. | Actively-cooled distribution plate for reducing reactive gas temperature in a plasma processing system |
US6952656B1 (en) | 2000-04-28 | 2005-10-04 | Applied Materials, Inc. | Wafer fabrication data acquisition and management systems |
US7141768B2 (en) | 2000-04-28 | 2006-11-28 | Nexicor, Llc | Fastening device |
JP2001313329A (ja) | 2000-04-28 | 2001-11-09 | Applied Materials Inc | 半導体製造装置におけるウェハ支持装置 |
US6387207B1 (en) | 2000-04-28 | 2002-05-14 | Applied Materials, Inc. | Integration of remote plasma generator with semiconductor processing chamber |
KR100367662B1 (ko) | 2000-05-02 | 2003-01-10 | 주식회사 셈테크놀러지 | 하이퍼서멀 중성입자 발생 장치 및 이를 채용하는 중성입자 처리 장치 |
DE10021871A1 (de) | 2000-05-05 | 2001-11-15 | Infineon Technologies Ag | Verfahren zum Herstellen einer Barriereschicht in einem elektronischen Bauelement und Verfahren zum Herstellen eines elektronischen Bauelements mit einer Barriereschicht |
JP2001319921A (ja) | 2000-05-09 | 2001-11-16 | Canon Inc | プロセスチャンバ |
US6553932B2 (en) | 2000-05-12 | 2003-04-29 | Applied Materials, Inc. | Reduction of plasma edge effect on plasma enhanced CVD processes |
US20020195056A1 (en) | 2000-05-12 | 2002-12-26 | Gurtej Sandhu | Versatile atomic layer deposition apparatus |
US7494927B2 (en) | 2000-05-15 | 2009-02-24 | Asm International N.V. | Method of growing electrical conductors |
JP4422295B2 (ja) | 2000-05-17 | 2010-02-24 | キヤノンアネルバ株式会社 | Cvd装置 |
US20020078893A1 (en) | 2000-05-18 | 2002-06-27 | Applied Materials , Inc. | Plasma enhanced chemical processing reactor and method |
JP4449226B2 (ja) | 2000-05-22 | 2010-04-14 | 東京エレクトロン株式会社 | 金属酸化膜の改質方法、金属酸化膜の成膜方法及び熱処理装置 |
US6387823B1 (en) | 2000-05-23 | 2002-05-14 | Advanced Micro Devices, Inc. | Method and apparatus for controlling deposition process using residual gas analysis |
US6559026B1 (en) | 2000-05-25 | 2003-05-06 | Applied Materials, Inc | Trench fill with HDP-CVD process including coupled high power density plasma deposition |
JP3448737B2 (ja) | 2000-05-25 | 2003-09-22 | 住友重機械工業株式会社 | ウエハーチャック用冷却板及びウエハーチャック |
US6558517B2 (en) | 2000-05-26 | 2003-05-06 | Micron Technology, Inc. | Physical vapor deposition methods |
US6884295B2 (en) | 2000-05-29 | 2005-04-26 | Tokyo Electron Limited | Method of forming oxynitride film or the like and system for carrying out the same |
US6645585B2 (en) | 2000-05-30 | 2003-11-11 | Kyocera Corporation | Container for treating with corrosive-gas and plasma and method for manufacturing the same |
DE60131698T2 (de) | 2000-05-31 | 2008-10-30 | Tokyo Electron Ltd. | Thermische Behandlungsvorrichtung und Verfahren |
US6998097B1 (en) | 2000-06-07 | 2006-02-14 | Tegal Corporation | High pressure chemical vapor trapping system |
EP2293322A1 (en) | 2000-06-08 | 2011-03-09 | Genitech, Inc. | Method for forming a metal nitride layer |
USD455024S1 (en) | 2000-06-09 | 2002-04-02 | Levenger Company | Portable writing surface |
KR100406173B1 (ko) | 2000-06-13 | 2003-11-19 | 주식회사 하이닉스반도체 | 촉매 분사 수단을 구비한 히터 블록 |
US6863019B2 (en) | 2000-06-13 | 2005-03-08 | Applied Materials, Inc. | Semiconductor device fabrication chamber cleaning method and apparatus with recirculation of cleaning gas |
JP2004503934A (ja) | 2000-06-15 | 2004-02-05 | コーニンクレッカ フィリップス エレクトロニクス エヌ ヴィ | 基板カセットのホルダー及び該ホルダーを備えたデバイス |
US6461435B1 (en) | 2000-06-22 | 2002-10-08 | Applied Materials, Inc. | Showerhead with reduced contact area |
US6346419B1 (en) | 2000-06-26 | 2002-02-12 | The United States Of America As Represented By The Department Of Commerce | Photolysis system for fast-response NO2 measurements and method therefor |
KR100351056B1 (ko) | 2000-06-27 | 2002-09-05 | 삼성전자 주식회사 | 선택적 금속산화막 형성단계를 포함하는 반도체 소자의 제조방법 |
US6620723B1 (en) | 2000-06-27 | 2003-09-16 | Applied Materials, Inc. | Formation of boride barrier layers using chemisorption techniques |
JP4371543B2 (ja) | 2000-06-29 | 2009-11-25 | 日本電気株式会社 | リモートプラズマcvd装置及び膜形成方法 |
KR100467366B1 (ko) | 2000-06-30 | 2005-01-24 | 주식회사 하이닉스반도체 | 원자층 증착법을 이용한 지르코늄산화막 형성방법 |
US6632322B1 (en) | 2000-06-30 | 2003-10-14 | Lam Research Corporation | Switched uniformity control |
KR100546138B1 (ko) | 2000-06-30 | 2006-01-24 | 주식회사 하이닉스반도체 | 신규한 포토레지스트 단량체, 그의 중합체 및 이를함유하는 포토레지스트 조성물 |
US6874480B1 (en) | 2000-07-03 | 2005-04-05 | Combustion Dynamics Corp. | Flow meter |
JP3589954B2 (ja) | 2000-07-04 | 2004-11-17 | シャープ株式会社 | 電磁波検出器、画像検出器、および電磁波検出器の製造方法 |
JP3497450B2 (ja) | 2000-07-06 | 2004-02-16 | 東京エレクトロン株式会社 | バッチ式熱処理装置及びその制御方法 |
KR100729472B1 (ko) | 2000-07-06 | 2007-06-15 | 브룩스 오토메이션, 인크. | 레티클 저장 및 회수 시스템 |
US6835278B2 (en) | 2000-07-07 | 2004-12-28 | Mattson Technology Inc. | Systems and methods for remote plasma clean |
JP3485896B2 (ja) | 2000-07-11 | 2004-01-13 | 東京エレクトロン株式会社 | プラズマ処理装置 |
JP2002164342A (ja) | 2000-07-21 | 2002-06-07 | Canon Sales Co Inc | 半導体装置及びその製造方法 |
US6821910B2 (en) | 2000-07-24 | 2004-11-23 | University Of Maryland, College Park | Spatially programmable microelectronics process equipment using segmented gas injection showerhead with exhaust gas recirculation |
JP4357715B2 (ja) | 2000-07-24 | 2009-11-04 | 東京エレクトロン株式会社 | 熱処理装置の温度校正方法 |
US6685991B2 (en) | 2000-07-31 | 2004-02-03 | Shin-Etsu Chemical Co., Ltd. | Method for formation of thermal-spray coating layer of rare earth fluoride |
FR2812568B1 (fr) | 2000-08-01 | 2003-08-08 | Sidel Sa | Revetement barriere depose par plasma comprenant une couche d'interface, procede d'obtention d'un tel revetement et recipient revetu d'un tel revetement |
US6450117B1 (en) | 2000-08-07 | 2002-09-17 | Applied Materials, Inc. | Directing a flow of gas in a substrate processing chamber |
US6712929B1 (en) | 2000-08-08 | 2004-03-30 | Lam Research Corporation | Deformation reduction at the main chamber |
US7223676B2 (en) | 2002-06-05 | 2007-05-29 | Applied Materials, Inc. | Very low temperature CVD process with independently variable conformality, stress and composition of the CVD layer |
US7166524B2 (en) | 2000-08-11 | 2007-01-23 | Applied Materials, Inc. | Method for ion implanting insulator material to reduce dielectric constant |
US7465478B2 (en) | 2000-08-11 | 2008-12-16 | Applied Materials, Inc. | Plasma immersion ion implantation process |
KR100373853B1 (ko) | 2000-08-11 | 2003-02-26 | 삼성전자주식회사 | 반도체소자의 선택적 에피택시얼 성장 방법 |
US20020136214A1 (en) | 2000-08-14 | 2002-09-26 | Consumer Direct Link | Pervasive computing network architecture |
US6437290B1 (en) | 2000-08-17 | 2002-08-20 | Tokyo Electron Limited | Heat treatment apparatus having a thin light-transmitting window |
JP4048112B2 (ja) | 2000-08-18 | 2008-02-13 | 東京エレクトロン株式会社 | 半導体装置の製造方法および半導体装置 |
US6451692B1 (en) | 2000-08-18 | 2002-09-17 | Micron Technology, Inc. | Preheating of chemical vapor deposition precursors |
JP4150493B2 (ja) | 2000-08-22 | 2008-09-17 | 株式会社東芝 | パターン描画装置における温度測定方法 |
US6630053B2 (en) | 2000-08-22 | 2003-10-07 | Asm Japan K.K. | Semiconductor processing module and apparatus |
JP4365017B2 (ja) | 2000-08-23 | 2009-11-18 | 東京エレクトロン株式会社 | 熱処理装置の降温レート制御方法および熱処理装置 |
US6566278B1 (en) | 2000-08-24 | 2003-05-20 | Applied Materials Inc. | Method for densification of CVD carbon-doped silicon oxide films through UV irradiation |
EP1251551A1 (en) | 2000-08-30 | 2002-10-23 | Ibiden Co., Ltd. | Ceramic heater for semiconductor manufacturing and inspecting equipment |
US6494998B1 (en) | 2000-08-30 | 2002-12-17 | Tokyo Electron Limited | Process apparatus and method for improving plasma distribution and performance in an inductively coupled plasma using an internal inductive element |
US6784108B1 (en) | 2000-08-31 | 2004-08-31 | Micron Technology, Inc. | Gas pulsing for etch profile control |
KR20020019414A (ko) | 2000-09-05 | 2002-03-12 | 엔도 마코토 | 기판 처리 장치 및 기판 처리 장치를 이용한 반도체디바이스 제조 방법 |
USD449873S1 (en) | 2000-09-22 | 2001-10-30 | James Bronson | Garbage disposal strainer and splash guard |
JP4232330B2 (ja) | 2000-09-22 | 2009-03-04 | 東京エレクトロン株式会社 | 励起ガス形成装置、処理装置及び処理方法 |
JP3929261B2 (ja) | 2000-09-25 | 2007-06-13 | 株式会社日立国際電気 | 基板処理装置および基板処理方法 |
US20030143846A1 (en) | 2000-09-25 | 2003-07-31 | Akira Sekiya | Gas compositions for cleaning the interiors of reactors as well as for etching films of silicon- containing compounds |
US6494065B2 (en) | 2000-09-26 | 2002-12-17 | Babbitt Steam Specialty Company | Valve lockout/tag out system |
US6632068B2 (en) | 2000-09-27 | 2003-10-14 | Asm International N.V. | Wafer handling system |
US6492625B1 (en) | 2000-09-27 | 2002-12-10 | Emcore Corporation | Apparatus and method for controlling temperature uniformity of substrates |
US6969539B2 (en) | 2000-09-28 | 2005-11-29 | President And Fellows Of Harvard College | Vapor deposition of metal oxides, silicates and phosphates, and silicon dioxide |
US6370796B1 (en) | 2000-09-29 | 2002-04-16 | Sony Corporation | Heater block cooling system for wafer processing apparatus |
AU146326S (en) | 2000-09-29 | 2001-12-18 | American Standard Int Inc | Faucet |
US6578893B2 (en) | 2000-10-02 | 2003-06-17 | Ajs Automation, Inc. | Apparatus and methods for handling semiconductor wafers |
US6745095B1 (en) | 2000-10-04 | 2004-06-01 | Applied Materials, Inc. | Detection of process endpoint through monitoring fluctuation of output data |
KR100492906B1 (ko) | 2000-10-04 | 2005-06-02 | 주식회사 하이닉스반도체 | 반도체소자의 층간절연막 형성 방법 |
JP2002110570A (ja) | 2000-10-04 | 2002-04-12 | Asm Japan Kk | 半導体製造装置用ガスラインシステム |
JP3572247B2 (ja) | 2000-10-06 | 2004-09-29 | 東芝セラミックス株式会社 | 半導体熱処理炉用ガス導入管 |
US6660660B2 (en) | 2000-10-10 | 2003-12-09 | Asm International, Nv. | Methods for making a dielectric stack in an integrated circuit |
US7204887B2 (en) | 2000-10-16 | 2007-04-17 | Nippon Steel Corporation | Wafer holding, wafer support member, wafer boat and heat treatment furnace |
TW541425B (en) | 2000-10-20 | 2003-07-11 | Ebara Corp | Frequency measuring device, polishing device using the same and eddy current sensor |
JP4156788B2 (ja) | 2000-10-23 | 2008-09-24 | 日本碍子株式会社 | 半導体製造装置用サセプター |
TW548239B (en) | 2000-10-23 | 2003-08-21 | Asm Microchemistry Oy | Process for producing aluminium oxide films at low temperatures |
US6395650B1 (en) | 2000-10-23 | 2002-05-28 | International Business Machines Corporation | Methods for forming metal oxide layers with enhanced purity |
US6688784B1 (en) | 2000-10-25 | 2004-02-10 | Advanced Micro Devices, Inc. | Parallel plate development with multiple holes in top plate for control of developer flow and pressure |
US6824665B2 (en) | 2000-10-25 | 2004-11-30 | Shipley Company, L.L.C. | Seed layer deposition |
JP3910821B2 (ja) | 2000-10-26 | 2007-04-25 | 東京エレクトロン株式会社 | 基板の処理装置 |
JP3408527B2 (ja) | 2000-10-26 | 2003-05-19 | 松下電器産業株式会社 | 半導体装置の製造方法 |
US6445574B1 (en) | 2000-10-30 | 2002-09-03 | Motorola, Inc. | Electronic device |
US6498091B1 (en) | 2000-11-01 | 2002-12-24 | Applied Materials, Inc. | Method of using a barrier sputter reactor to remove an underlying barrier layer |
US7032614B2 (en) | 2000-11-03 | 2006-04-25 | Applied Materials, Inc. | Facilities connection box for pre-facilitation of wafer fabrication equipment |
US6649540B2 (en) | 2000-11-09 | 2003-11-18 | The Boc Group, Inc. | Organosilane CVD precursors and their use for making organosilane polymer low-k dielectric film |
JP4669605B2 (ja) | 2000-11-20 | 2011-04-13 | 東京エレクトロン株式会社 | 半導体製造装置のクリーニング方法 |
JP2002158178A (ja) | 2000-11-21 | 2002-05-31 | Hitachi Kokusai Electric Inc | 基板処理装置および半導体装置の製造方法 |
US6689220B1 (en) | 2000-11-22 | 2004-02-10 | Simplus Systems Corporation | Plasma enhanced pulsed layer deposition |
US6613695B2 (en) | 2000-11-24 | 2003-09-02 | Asm America, Inc. | Surface preparation prior to deposition |
US20020064592A1 (en) | 2000-11-29 | 2002-05-30 | Madhav Datta | Electroless method of seed layer depostion, repair, and fabrication of Cu interconnects |
KR100688484B1 (ko) | 2000-11-30 | 2007-02-28 | 삼성전자주식회사 | 활성화 산소를 이용하여 기판을 처리하는 장치 및 그 방법 |
JP3610900B2 (ja) | 2000-11-30 | 2005-01-19 | 東京エレクトロン株式会社 | 熱処理装置 |
US20020069222A1 (en) | 2000-12-01 | 2002-06-06 | Wiznet, Inc. | System and method for placing active tags in HTML document |
US6913152B2 (en) | 2000-12-04 | 2005-07-05 | Peter Zuk, Jr. | Disposable vacuum filtration apparatus capable of detecting microorganisms and particulates in liquid samples |
JP3650025B2 (ja) | 2000-12-04 | 2005-05-18 | シャープ株式会社 | プラズマプロセス装置 |
JP3939101B2 (ja) | 2000-12-04 | 2007-07-04 | 株式会社荏原製作所 | 基板搬送方法および基板搬送容器 |
EP1351283A4 (en) | 2000-12-05 | 2006-01-25 | Tokyo Electron Ltd | METHOD AND DEVICE FOR TREATING AN ARTICLE TO BE TREATED |
JP2002237375A (ja) | 2000-12-05 | 2002-08-23 | Ibiden Co Ltd | 半導体製造・検査装置用セラミック基板およびその製造方法 |
KR100385947B1 (ko) | 2000-12-06 | 2003-06-02 | 삼성전자주식회사 | 원자층 증착 방법에 의한 박막 형성 방법 |
US20020104481A1 (en) | 2000-12-06 | 2002-08-08 | Chiang Tony P. | System and method for modulated ion-induced atomic layer deposition (MII-ALD) |
US6949450B2 (en) | 2000-12-06 | 2005-09-27 | Novellus Systems, Inc. | Method for integrated in-situ cleaning and subsequent atomic layer deposition within a single processing chamber |
US6878402B2 (en) | 2000-12-06 | 2005-04-12 | Novellus Systems, Inc. | Method and apparatus for improved temperature control in atomic layer deposition |
US7871676B2 (en) | 2000-12-06 | 2011-01-18 | Novellus Systems, Inc. | System for depositing a film by modulated ion-induced atomic layer deposition (MII-ALD) |
US6428859B1 (en) | 2000-12-06 | 2002-08-06 | Angstron Systems, Inc. | Sequential method for depositing a film by modulated ion-induced atomic layer deposition (MII-ALD) |
US20020197402A1 (en) | 2000-12-06 | 2002-12-26 | Chiang Tony P. | System for depositing a film by modulated ion-induced atomic layer deposition (MII-ALD) |
US6930041B2 (en) | 2000-12-07 | 2005-08-16 | Micron Technology, Inc. | Photo-assisted method for semiconductor fabrication |
US6576564B2 (en) | 2000-12-07 | 2003-06-10 | Micron Technology, Inc. | Photo-assisted remote plasma apparatus and method |
US6413321B1 (en) | 2000-12-07 | 2002-07-02 | Applied Materials, Inc. | Method and apparatus for reducing particle contamination on wafer backside during CVD process |
TWI313059B (zh) | 2000-12-08 | 2009-08-01 | Sony Corporatio | |
US7482283B2 (en) | 2000-12-12 | 2009-01-27 | Tokyo Electron Limited | Thin film forming method and thin film forming device |
US6692903B2 (en) | 2000-12-13 | 2004-02-17 | Applied Materials, Inc | Substrate cleaning apparatus and method |
US6814096B2 (en) | 2000-12-15 | 2004-11-09 | Nor-Cal Products, Inc. | Pressure controller and method |
US6800173B2 (en) | 2000-12-15 | 2004-10-05 | Novellus Systems, Inc. | Variable gas conductance control for a process chamber |
US20020076507A1 (en) | 2000-12-15 | 2002-06-20 | Chiang Tony P. | Process sequence for atomic layer deposition |
US6641673B2 (en) | 2000-12-20 | 2003-11-04 | General Electric Company | Fluid injector for and method of prolonged delivery and distribution of reagents into plasma |
US6544906B2 (en) | 2000-12-21 | 2003-04-08 | Texas Instruments Incorporated | Annealing of high-k dielectric materials |
US7015422B2 (en) | 2000-12-21 | 2006-03-21 | Mattson Technology, Inc. | System and process for heating semiconductor wafers by optimizing absorption of electromagnetic energy |
US20020151327A1 (en) | 2000-12-22 | 2002-10-17 | David Levitt | Program selector and guide system and method |
US20020152244A1 (en) | 2000-12-22 | 2002-10-17 | International Business Machines Corporation | Method and apparatus to dynamically create a customized user interface based on a document type definition |
US6634882B2 (en) | 2000-12-22 | 2003-10-21 | Asm America, Inc. | Susceptor pocket profile to improve process performance |
JP5068402B2 (ja) | 2000-12-28 | 2012-11-07 | 公益財団法人国際科学振興財団 | 誘電体膜およびその形成方法、半導体装置、不揮発性半導体メモリ装置、および半導体装置の製造方法 |
US6533910B2 (en) | 2000-12-29 | 2003-03-18 | Lam Research Corporation | Carbonitride coated component of semiconductor processing equipment and method of manufacturing thereof |
US6537429B2 (en) | 2000-12-29 | 2003-03-25 | Lam Research Corporation | Diamond coatings on reactor wall and method of manufacturing thereof |
US6398184B1 (en) | 2000-12-29 | 2002-06-04 | General Signal Corporation | Lock device and lock method for knife gate valves |
US7172497B2 (en) | 2001-01-05 | 2007-02-06 | Asm Nutool, Inc. | Fabrication of semiconductor interconnect structures |
US6572923B2 (en) | 2001-01-12 | 2003-06-03 | The Boc Group, Inc. | Asymmetric organocyclosiloxanes and their use for making organosilicon polymer low-k dielectric film |
JP4633269B2 (ja) | 2001-01-15 | 2011-02-16 | 株式会社日立国際電気 | 基板処理装置及び半導体装置の製造方法 |
US6583048B2 (en) | 2001-01-17 | 2003-06-24 | Air Products And Chemicals, Inc. | Organosilicon precursors for interlayer dielectric films with low dielectric constants |
JP3625197B2 (ja) | 2001-01-18 | 2005-03-02 | 東京エレクトロン株式会社 | プラズマ装置およびプラズマ生成方法 |
US7087482B2 (en) | 2001-01-19 | 2006-08-08 | Samsung Electronics Co., Ltd. | Method of forming material using atomic layer deposition and method of forming capacitor of semiconductor device using the same |
KR20070116696A (ko) | 2001-01-22 | 2007-12-10 | 동경 엘렉트론 주식회사 | 전자 디바이스 재료의 제조 방법 및 플라즈마 처리 방법 |
JP4644943B2 (ja) | 2001-01-23 | 2011-03-09 | 東京エレクトロン株式会社 | 処理装置 |
JP4429300B2 (ja) | 2001-01-25 | 2010-03-10 | 東京エレクトロン株式会社 | 電子デバイス材料の製造方法 |
JP4334225B2 (ja) | 2001-01-25 | 2009-09-30 | 東京エレクトロン株式会社 | 電子デバイス材料の製造方法 |
US6660662B2 (en) | 2001-01-26 | 2003-12-09 | Applied Materials, Inc. | Method of reducing plasma charge damage for plasma processes |
KR20020064028A (ko) | 2001-01-31 | 2002-08-07 | 한빛 세마텍(주) | 펄스형 자외선조사에 의한 세정 및 표면처리 장치 |
US7371633B2 (en) | 2001-02-02 | 2008-05-13 | Samsung Electronics Co., Ltd. | Dielectric layer for semiconductor device and method of manufacturing the same |
WO2002063535A2 (en) | 2001-02-07 | 2002-08-15 | Exalt Solutions, Inc. | Intelligent multimedia e-catalog |
US6844273B2 (en) | 2001-02-07 | 2005-01-18 | Tokyo Electron Limited | Precleaning method of precleaning a silicon nitride film forming system |
JP3626933B2 (ja) | 2001-02-08 | 2005-03-09 | 東京エレクトロン株式会社 | 基板載置台の製造方法 |
US6589868B2 (en) | 2001-02-08 | 2003-07-08 | Applied Materials, Inc. | Si seasoning to reduce particles, extend clean frequency, block mobile ions and increase chamber throughput |
JP2005033221A (ja) | 2001-02-08 | 2005-02-03 | Tokyo Electron Ltd | 基板載置台および処理装置 |
EP1421607A2 (en) | 2001-02-12 | 2004-05-26 | ASM America, Inc. | Improved process for deposition of semiconductor films |
US20020108670A1 (en) | 2001-02-12 | 2002-08-15 | Baker John Eric | High purity chemical container with external level sensor and removable dip tube |
US7072061B2 (en) | 2001-02-13 | 2006-07-04 | Ariba, Inc. | Method and system for extracting information from RFQ documents and compressing RFQ files into a common RFQ file type |
US6613656B2 (en) | 2001-02-13 | 2003-09-02 | Micron Technology, Inc. | Sequential pulse deposition |
CN1322556C (zh) | 2001-02-15 | 2007-06-20 | 东京毅力科创株式会社 | 被处理件的处理方法及处理装置 |
US6632478B2 (en) | 2001-02-22 | 2003-10-14 | Applied Materials, Inc. | Process for forming a low dielectric constant carbon-containing film |
KR100410991B1 (ko) | 2001-02-22 | 2003-12-18 | 삼성전자주식회사 | 반도체 제조장치의 로드포트 |
JP3494435B2 (ja) | 2001-02-27 | 2004-02-09 | 東京エレクトロン株式会社 | 基板処理装置 |
TW544775B (en) | 2001-02-28 | 2003-08-01 | Japan Pionics | Chemical vapor deposition apparatus and chemical vapor deposition method |
US6852167B2 (en) | 2001-03-01 | 2005-02-08 | Micron Technology, Inc. | Methods, systems, and apparatus for uniform chemical-vapor depositions |
US6878206B2 (en) | 2001-07-16 | 2005-04-12 | Applied Materials, Inc. | Lid assembly for a processing system to facilitate sequential deposition techniques |
US20020123237A1 (en) | 2001-03-05 | 2002-09-05 | Tue Nguyen | Plasma pulse semiconductor processing system and method |
JP4487135B2 (ja) | 2001-03-05 | 2010-06-23 | 東京エレクトロン株式会社 | 流体制御装置 |
US7491634B2 (en) | 2006-04-28 | 2009-02-17 | Asm International N.V. | Methods for forming roughened surfaces and applications thereof |
US7563715B2 (en) | 2005-12-05 | 2009-07-21 | Asm International N.V. | Method of producing thin films |
US6939579B2 (en) | 2001-03-07 | 2005-09-06 | Asm International N.V. | ALD reactor and method with controlled wall temperature |
US6447651B1 (en) | 2001-03-07 | 2002-09-10 | Applied Materials, Inc. | High-permeability magnetic shield for improved process uniformity in nonmagnetized plasma process chambers |
US7111232B1 (en) | 2001-03-07 | 2006-09-19 | Thomas Layne Bascom | Method and system for making document objects available to users of a network |
US6855037B2 (en) | 2001-03-12 | 2005-02-15 | Asm-Nutool, Inc. | Method of sealing wafer backside for full-face electrochemical plating |
US6939206B2 (en) | 2001-03-12 | 2005-09-06 | Asm Nutool, Inc. | Method and apparatus of sealing wafer backside for full-face electrochemical plating |
US7186648B1 (en) | 2001-03-13 | 2007-03-06 | Novellus Systems, Inc. | Barrier first method for single damascene trench applications |
US20020129768A1 (en) | 2001-03-15 | 2002-09-19 | Carpenter Craig M. | Chemical vapor deposition apparatuses and deposition methods |
US7348042B2 (en) | 2001-03-19 | 2008-03-25 | Novellus Systems, Inc. | Continuous method for depositing a film by modulated ion-induced atomic layer deposition (MII-ALD) |
JP3912993B2 (ja) | 2001-03-26 | 2007-05-09 | 株式会社荏原製作所 | 中性粒子ビーム処理装置 |
JP4073174B2 (ja) | 2001-03-26 | 2008-04-09 | 株式会社荏原製作所 | 中性粒子ビーム処理装置 |
JP4727057B2 (ja) | 2001-03-28 | 2011-07-20 | 忠弘 大見 | プラズマ処理装置 |
US6716571B2 (en) | 2001-03-28 | 2004-04-06 | Advanced Micro Devices, Inc. | Selective photoresist hardening to facilitate lateral trimming |
US6723654B2 (en) | 2001-03-30 | 2004-04-20 | Taiwan Semiconductor Manufacturing Co., Ltd | Method and apparatus for in-situ descum/hot bake/dry etch photoresist/polyimide layer |
US6583572B2 (en) | 2001-03-30 | 2003-06-24 | Lam Research Corporation | Inductive plasma processor including current sensor for plasma excitation coil |
TW540093B (en) | 2001-04-05 | 2003-07-01 | Angstron Systems Inc | Atomic layer deposition system and method |
US6902622B2 (en) | 2001-04-12 | 2005-06-07 | Mattson Technology, Inc. | Systems and methods for epitaxially depositing films on a semiconductor substrate |
US6448192B1 (en) | 2001-04-16 | 2002-09-10 | Motorola, Inc. | Method for forming a high dielectric constant material |
US6521295B1 (en) | 2001-04-17 | 2003-02-18 | Pilkington North America, Inc. | Chemical vapor deposition of antimony-doped metal oxide and the coated article made thereby |
US6482331B2 (en) | 2001-04-18 | 2002-11-19 | Taiwan Semiconductor Manufacturing Co., Ltd. | Method for preventing contamination in a plasma process chamber |
US7125783B2 (en) | 2001-04-18 | 2006-10-24 | Integrated Device Technology, Inc. | Dielectric anti-reflective coating surface treatment to prevent defect generation in associated wet clean |
JP2002317287A (ja) | 2001-04-18 | 2002-10-31 | Permelec Electrode Ltd | 過酸化水素製造用電解槽及び過酸化水素製造方法 |
TW538327B (en) | 2001-04-24 | 2003-06-21 | Unit Instr Inc | System and method for a mass flow controller |
US6753507B2 (en) | 2001-04-27 | 2004-06-22 | Kyocera Corporation | Wafer heating apparatus |
US20030019428A1 (en) | 2001-04-28 | 2003-01-30 | Applied Materials, Inc. | Chemical vapor deposition chamber |
US6847014B1 (en) | 2001-04-30 | 2005-01-25 | Lam Research Corporation | Method and apparatus for controlling the spatial temperature distribution across the surface of a workpiece support |
US6528430B2 (en) | 2001-05-01 | 2003-03-04 | Samsung Electronics Co., Ltd. | Method of forming silicon containing thin films by atomic layer deposition utilizing Si2C16 and NH3 |
US6864041B2 (en) | 2001-05-02 | 2005-03-08 | International Business Machines Corporation | Gate linewidth tailoring and critical dimension control for sub-100 nm devices using plasma etching |
US6627268B1 (en) | 2001-05-03 | 2003-09-30 | Novellus Systems, Inc. | Sequential ion, UV, and electron induced chemical vapor deposition |
US6602800B2 (en) | 2001-05-09 | 2003-08-05 | Asm Japan K.K. | Apparatus for forming thin film on semiconductor substrate by plasma reaction |
KR20020086763A (ko) | 2001-05-10 | 2002-11-20 | 주식회사 엘지이아이 | 플라즈마를 이용한 연속중합장치용 열전대 |
US6596653B2 (en) | 2001-05-11 | 2003-07-22 | Applied Materials, Inc. | Hydrogen assisted undoped silicon oxide deposition process for HDP-CVD |
JP2003053688A (ja) | 2001-05-15 | 2003-02-26 | Fanuc Robotics North America Inc | 教示ペンダントを有するロボット・システム |
DE10156441A1 (de) | 2001-05-18 | 2002-11-21 | Mattson Thermal Products Gmbh | Vorrichtung zur Aufnahme von scheibenförmigen Objekten und Vorrichtung zur Handhabung von Objekten |
JP2002343790A (ja) | 2001-05-21 | 2002-11-29 | Nec Corp | 金属化合物薄膜の気相堆積方法及び半導体装置の製造方法 |
US6528767B2 (en) | 2001-05-22 | 2003-03-04 | Applied Materials, Inc. | Pre-heating and load lock pedestal material for high temperature CVD liquid crystal and flat panel display applications |
US7262125B2 (en) | 2001-05-22 | 2007-08-28 | Novellus Systems, Inc. | Method of forming low-resistivity tungsten interconnects |
US7037574B2 (en) | 2001-05-23 | 2006-05-02 | Veeco Instruments, Inc. | Atomic layer deposition for fabricating thin films |
US6810886B2 (en) | 2001-05-24 | 2004-11-02 | Applied Materials, Inc. | Chamber cleaning via rapid thermal process during a cleaning period |
US20020181612A1 (en) | 2001-05-29 | 2002-12-05 | Motorola, Inc. | Monolithic, software-definable circuit including a power amplifier and method for use therewith |
US7159597B2 (en) | 2001-06-01 | 2007-01-09 | Applied Materials, Inc. | Multistep remote plasma clean process |
GB0113735D0 (en) | 2001-06-05 | 2001-07-25 | Holset Engineering Co | Mixing fluid streams |
US6758909B2 (en) | 2001-06-05 | 2004-07-06 | Honeywell International Inc. | Gas port sealing for CVD/CVI furnace hearth plates |
JP3421329B2 (ja) | 2001-06-08 | 2003-06-30 | 東京エレクトロン株式会社 | 薄膜形成装置の洗浄方法 |
US6955928B1 (en) | 2001-06-18 | 2005-10-18 | Advanced Micro Devices, Inc. | Closed loop residual gas analyzer process control technique |
US6472266B1 (en) | 2001-06-18 | 2002-10-29 | Taiwan Semiconductor Manufacturing Company | Method to reduce bit line capacitance in cub drams |
DE10129630A1 (de) | 2001-06-20 | 2003-01-02 | Philips Corp Intellectual Pty | Niederdruckgasentladungslampe mit Leuchtstoffbeschichtung |
US6391803B1 (en) | 2001-06-20 | 2002-05-21 | Samsung Electronics Co., Ltd. | Method of forming silicon containing thin films by atomic layer deposition utilizing trisdimethylaminosilane |
US6709989B2 (en) | 2001-06-21 | 2004-03-23 | Motorola, Inc. | Method for fabricating a semiconductor structure including a metal oxide interface with silicon |
US6658933B2 (en) | 2001-06-22 | 2003-12-09 | Clesse Industries | Fill-level indicator for a liquefied-petroleum-gas tank |
US6514313B1 (en) | 2001-06-22 | 2003-02-04 | Aeronex, Inc. | Gas purification system and method |
US20030002562A1 (en) | 2001-06-27 | 2003-01-02 | Yerlikaya Y. Denis | Temperature probe adapter |
KR20030001939A (ko) | 2001-06-28 | 2003-01-08 | 동부전자 주식회사 | 반도체소자의 장벽층 형성 방법 및 장치 |
US6420279B1 (en) | 2001-06-28 | 2002-07-16 | Sharp Laboratories Of America, Inc. | Methods of using atomic layer deposition to deposit a high dielectric constant material on a substrate |
JP3708031B2 (ja) | 2001-06-29 | 2005-10-19 | 株式会社日立製作所 | プラズマ処理装置および処理方法 |
US20030003696A1 (en) | 2001-06-29 | 2003-01-02 | Avgerinos Gelatos | Method and apparatus for tuning a plurality of processing chambers |
US20030000647A1 (en) | 2001-06-29 | 2003-01-02 | Applied Materials, Inc. | Substrate processing chamber |
TW539822B (en) | 2001-07-03 | 2003-07-01 | Asm Inc | Source chemical container assembly |
US20030013314A1 (en) | 2001-07-06 | 2003-01-16 | Chentsau Ying | Method of reducing particulates in a plasma etch chamber during a metal etch process |
DE10133013C2 (de) | 2001-07-06 | 2003-07-03 | Karlsruhe Forschzent | Verschluss für Hohlräume oder Durchführungen |
CN1277293C (zh) | 2001-07-10 | 2006-09-27 | 东京毅力科创株式会社 | 干蚀刻方法 |
US6746308B1 (en) | 2001-07-11 | 2004-06-08 | Advanced Micro Devices, Inc. | Dynamic lot allocation based upon wafer state characteristics, and system for accomplishing same |
US6838122B2 (en) | 2001-07-13 | 2005-01-04 | Micron Technology, Inc. | Chemical vapor deposition methods of forming barium strontium titanate comprising dielectric layers |
US6868856B2 (en) | 2001-07-13 | 2005-03-22 | Applied Materials, Inc. | Enhanced remote plasma cleaning |
US20030017266A1 (en) | 2001-07-13 | 2003-01-23 | Cem Basceri | Chemical vapor deposition methods of forming barium strontium titanate comprising dielectric layers, including such layers having a varied concentration of barium and strontium within the layer |
KR100400044B1 (ko) | 2001-07-16 | 2003-09-29 | 삼성전자주식회사 | 간격 조절 장치를 가지는 웨이퍼 처리 장치의 샤워 헤드 |
US20030017268A1 (en) | 2001-07-18 | 2003-01-23 | Applied Materials, Inc. | .method of cvd titanium nitride film deposition for increased titanium nitride film uniformity |
JP3926588B2 (ja) | 2001-07-19 | 2007-06-06 | キヤノンマーケティングジャパン株式会社 | 半導体装置の製造方法 |
FR2827682B1 (fr) | 2001-07-20 | 2004-04-02 | Gemplus Card Int | Regulation de pression par transfert d'un volume de gaz calibre |
US6712949B2 (en) | 2001-07-22 | 2004-03-30 | The Electrosynthesis Company, Inc. | Electrochemical synthesis of hydrogen peroxide |
JP2003035574A (ja) | 2001-07-23 | 2003-02-07 | Mitsubishi Heavy Ind Ltd | 応答型センサ及び応用計測システム |
US6677254B2 (en) | 2001-07-23 | 2004-01-13 | Applied Materials, Inc. | Processes for making a barrier between a dielectric and a conductor and products produced therefrom |
US20080268635A1 (en) | 2001-07-25 | 2008-10-30 | Sang-Ho Yu | Process for forming cobalt and cobalt silicide materials in copper contact applications |
US6638839B2 (en) | 2001-07-26 | 2003-10-28 | The University Of Toledo | Hot-filament chemical vapor deposition chamber and process with multiple gas inlets |
US7085616B2 (en) | 2001-07-27 | 2006-08-01 | Applied Materials, Inc. | Atomic layer deposition apparatus |
US6435865B1 (en) | 2001-07-30 | 2002-08-20 | Taiwan Semiconductor Manufacturing Co., Ltd. | Apparatus and method for positioning gas injectors in a vertical furnace |
WO2003012843A1 (fr) | 2001-07-31 | 2003-02-13 | L'air Liquide, Societe Anonyme Pour L'etude Et L'exploitation Des Procedes Georges Claude | Procede et appareil de nettoyage et procede et appareil de gravure |
JP4236882B2 (ja) | 2001-08-01 | 2009-03-11 | 東京エレクトロン株式会社 | ガス処理装置およびガス処理方法 |
JP3958539B2 (ja) | 2001-08-02 | 2007-08-15 | 東京エレクトロン株式会社 | 基板処理装置及び基板処理方法 |
JP4921652B2 (ja) | 2001-08-03 | 2012-04-25 | エイエスエム インターナショナル エヌ.ヴェー. | イットリウム酸化物およびランタン酸化物薄膜を堆積する方法 |
US6896929B2 (en) | 2001-08-03 | 2005-05-24 | Applied Materials, Inc. | Susceptor shaft vacuum pumping |
EP1421606A4 (en) | 2001-08-06 | 2008-03-05 | Genitech Co Ltd | PLASMA ACTIVE ATOMIC LAYER (PEALD) DEPOSITION APPARATUS AND METHOD OF FORMING THIN FILM USING SAID APPARATUS |
US6678583B2 (en) | 2001-08-06 | 2004-01-13 | Seminet, Inc. | Robotic storage buffer system for substrate carrier pods |
JP2003060012A (ja) | 2001-08-08 | 2003-02-28 | Asm Japan Kk | 半導体処理用反応チャンバ |
JP3775262B2 (ja) | 2001-08-09 | 2006-05-17 | ヤマハ株式会社 | 電子楽器及び電子楽器システム |
US6734111B2 (en) | 2001-08-09 | 2004-05-11 | Comlase Ab | Method to GaAs based lasers and a GaAs based laser |
US6531412B2 (en) | 2001-08-10 | 2003-03-11 | International Business Machines Corporation | Method for low temperature chemical vapor deposition of low-k films using selected cyclosiloxane and ozone gases for semiconductor applications |
TW559905B (en) | 2001-08-10 | 2003-11-01 | Toshiba Corp | Vertical chemical vapor deposition system cross-reference to related applications |
US20030029563A1 (en) | 2001-08-10 | 2003-02-13 | Applied Materials, Inc. | Corrosion resistant coating for semiconductor processing chamber |
JP2003059999A (ja) | 2001-08-14 | 2003-02-28 | Tokyo Electron Ltd | 処理システム |
US20030035002A1 (en) | 2001-08-15 | 2003-02-20 | Samsung Electronics Co., Ltd. | Alternate interpretation of markup language documents |
US6820570B2 (en) | 2001-08-15 | 2004-11-23 | Nobel Biocare Services Ag | Atomic layer deposition reactor |
USD699816S1 (en) | 2001-08-17 | 2014-02-18 | Neoperl Gmbh | Stream straightener for faucet |
JP2003060076A (ja) | 2001-08-21 | 2003-02-28 | Nec Corp | 半導体装置及びその製造方法 |
KR100604751B1 (ko) | 2001-08-24 | 2006-07-26 | 주식회사 하이닉스반도체 | 산 확산 방지용 포토레지스트 공중합체 및 이를 함유하는포토레지스트 조성물 |
KR20030018134A (ko) | 2001-08-27 | 2003-03-06 | 한국전자통신연구원 | 조성과 도핑 농도의 제어를 위한 반도체 소자의 절연막형성 방법 |
US20030037800A1 (en) | 2001-08-27 | 2003-02-27 | Applied Materials, Inc. | Method for removing contamination particles from substrate processing chambers |
JP3886424B2 (ja) | 2001-08-28 | 2007-02-28 | 鹿児島日本電気株式会社 | 基板処理装置及び方法 |
JP3832293B2 (ja) | 2001-08-31 | 2006-10-11 | 株式会社ダイフク | 荷保管設備 |
JP3832294B2 (ja) | 2001-08-31 | 2006-10-11 | 株式会社ダイフク | 荷保管設備 |
JP2003077782A (ja) | 2001-08-31 | 2003-03-14 | Toshiba Corp | 半導体装置の製造方法 |
JP2003077845A (ja) | 2001-09-05 | 2003-03-14 | Hitachi Kokusai Electric Inc | 半導体装置の製造方法および基板処理装置 |
JP4460803B2 (ja) | 2001-09-05 | 2010-05-12 | パナソニック株式会社 | 基板表面処理方法 |
JP2003158127A (ja) | 2001-09-07 | 2003-05-30 | Arieesu Gijutsu Kenkyu Kk | 成膜方法、成膜装置、及び半導体装置 |
US6521547B1 (en) | 2001-09-07 | 2003-02-18 | United Microelectronics Corp. | Method of repairing a low dielectric constant material layer |
US9708707B2 (en) | 2001-09-10 | 2017-07-18 | Asm International N.V. | Nanolayer deposition using bias power treatment |
US6756318B2 (en) | 2001-09-10 | 2004-06-29 | Tegal Corporation | Nanolayer thick film processing system and method |
JP4094262B2 (ja) | 2001-09-13 | 2008-06-04 | 住友大阪セメント株式会社 | 吸着固定装置及びその製造方法 |
US6756085B2 (en) | 2001-09-14 | 2004-06-29 | Axcelis Technologies, Inc. | Ultraviolet curing processes for advanced low-k materials |
EP1425435A2 (en) | 2001-09-14 | 2004-06-09 | Asm International N.V. | Metal nitride deposition by ald using gettering reactant |
US6541370B1 (en) | 2001-09-17 | 2003-04-01 | Taiwan Semiconductor Manufacturing Co., Ltd. | Composite microelectronic dielectric layer with inhibited crack susceptibility |
JP2003100717A (ja) | 2001-09-21 | 2003-04-04 | Tokyo Electron Ltd | プラズマ処理装置 |
US20030059535A1 (en) | 2001-09-25 | 2003-03-27 | Lee Luo | Cycling deposition of low temperature films in a cold wall single wafer process chamber |
US6607976B2 (en) | 2001-09-25 | 2003-08-19 | Applied Materials, Inc. | Copper interconnect barrier layer structure and formation method |
US7049226B2 (en) | 2001-09-26 | 2006-05-23 | Applied Materials, Inc. | Integration of ALD tantalum nitride for copper metallization |
US6782305B2 (en) | 2001-10-01 | 2004-08-24 | Massachusetts Institute Of Technology | Method of geometric information sharing and parametric consistency maintenance in a collaborative design environment |
US6960537B2 (en) | 2001-10-02 | 2005-11-01 | Asm America, Inc. | Incorporation of nitrogen into high k dielectric film |
US6720259B2 (en) | 2001-10-02 | 2004-04-13 | Genus, Inc. | Passivation method for improved uniformity and repeatability for atomic layer deposition and chemical vapor deposition |
KR100431658B1 (ko) | 2001-10-05 | 2004-05-17 | 삼성전자주식회사 | 기판 가열 장치 및 이를 갖는 장치 |
US6656282B2 (en) | 2001-10-11 | 2003-12-02 | Moohan Co., Ltd. | Atomic layer deposition apparatus and process using remote plasma |
US6461436B1 (en) | 2001-10-15 | 2002-10-08 | Micron Technology, Inc. | Apparatus and process of improving atomic layer deposition chamber performance |
US6936183B2 (en) | 2001-10-17 | 2005-08-30 | Applied Materials, Inc. | Etch process for etching microstructures |
JP2003133299A (ja) | 2001-10-24 | 2003-05-09 | Oki Electric Ind Co Ltd | 半導体製造装置および半導体製造方法 |
JP2003133300A (ja) | 2001-10-26 | 2003-05-09 | Tokyo Electron Ltd | 成膜装置及び成膜方法 |
US7780785B2 (en) | 2001-10-26 | 2010-08-24 | Applied Materials, Inc. | Gas delivery apparatus for atomic layer deposition |
US7204886B2 (en) | 2002-11-14 | 2007-04-17 | Applied Materials, Inc. | Apparatus and method for hybrid chemical processing |
TW563176B (en) | 2001-10-26 | 2003-11-21 | Applied Materials Inc | Gas delivery apparatus for atomic layer deposition |
US20080102203A1 (en) | 2001-10-26 | 2008-05-01 | Dien-Yeh Wu | Vortex chamber lids for atomic layer deposition |
US6916398B2 (en) | 2001-10-26 | 2005-07-12 | Applied Materials, Inc. | Gas delivery apparatus and method for atomic layer deposition |
US20080102208A1 (en) | 2001-10-26 | 2008-05-01 | Dien-Yeh Wu | Vortex chamber lids for atomic layer deposition |
US7780789B2 (en) | 2001-10-26 | 2010-08-24 | Applied Materials, Inc. | Vortex chamber lids for atomic layer deposition |
AU2002343583A1 (en) | 2001-10-29 | 2003-05-12 | Genus, Inc. | Chemical vapor deposition system |
US20040253867A1 (en) | 2001-11-05 | 2004-12-16 | Shuzo Matsumoto | Circuit part connector structure and gasket |
WO2003041140A1 (en) | 2001-11-05 | 2003-05-15 | Eugene Technology Co., Ltd. | Apparatus of chemical vapor deposition |
KR100481307B1 (ko) | 2001-11-08 | 2005-04-07 | 삼성전자주식회사 | 반도체 제조 설비의 카세트 테이블 |
KR100782529B1 (ko) | 2001-11-08 | 2007-12-06 | 에이에스엠지니텍코리아 주식회사 | 증착 장치 |
KR100760291B1 (ko) | 2001-11-08 | 2007-09-19 | 에이에스엠지니텍코리아 주식회사 | 박막 형성 방법 |
WO2003040150A1 (en) | 2001-11-09 | 2003-05-15 | Yun Chi | Volatile noble metal organometallic complexes |
US6975921B2 (en) | 2001-11-09 | 2005-12-13 | Asm International Nv | Graphical representation of a wafer processing process |
KR20030039247A (ko) | 2001-11-12 | 2003-05-17 | 주성엔지니어링(주) | 서셉터 |
US20040010772A1 (en) | 2001-11-13 | 2004-01-15 | General Electric Company | Interactive method and system for faciliting the development of computer software applications |
WO2003044843A2 (en) | 2001-11-16 | 2003-05-30 | Trikon Holdings Limited | Forming low k dielectric layers |
JP2003153706A (ja) | 2001-11-20 | 2003-05-27 | Toyobo Co Ltd | 面ファスナー雌材及びその製造方法 |
US6926774B2 (en) | 2001-11-21 | 2005-08-09 | Applied Materials, Inc. | Piezoelectric vaporizer |
KR100588774B1 (ko) | 2001-11-26 | 2006-06-14 | 주성엔지니어링(주) | 웨이퍼 서셉터 |
USD461233S1 (en) | 2001-11-29 | 2002-08-06 | James Michael Whalen | Marine deck drain strainer |
DE60239828D1 (de) | 2001-11-30 | 2011-06-01 | Panasonic Corp | Ür |
JP4116283B2 (ja) | 2001-11-30 | 2008-07-09 | レール・リキード−ソシエテ・アノニム・プール・レテュード・エ・レクスプロワタシオン・デ・プロセデ・ジョルジュ・クロード | ヘキサキス(モノヒドロカルビルアミノ)ジシランおよびその製造方法 |
US7017514B1 (en) | 2001-12-03 | 2006-03-28 | Novellus Systems, Inc. | Method and apparatus for plasma optimization in water processing |
US6638879B2 (en) | 2001-12-06 | 2003-10-28 | Macronix International Co., Ltd. | Method for forming nitride spacer by using atomic layer deposition |
KR100641762B1 (ko) | 2001-12-07 | 2006-11-06 | 동경 엘렉트론 주식회사 | 절연막의 질화 방법, 반도체 장치 및 반도체 장치의 제조방법, 기판 처리 장치 및 기판 처리 방법 |
KR100446619B1 (ko) | 2001-12-14 | 2004-09-04 | 삼성전자주식회사 | 유도 결합 플라즈마 장치 |
US6699784B2 (en) | 2001-12-14 | 2004-03-02 | Applied Materials Inc. | Method for depositing a low k dielectric film (K>3.5) for hard mask application |
SE0104252D0 (sv) | 2001-12-17 | 2001-12-17 | Sintercast Ab | New device |
US20030111013A1 (en) | 2001-12-19 | 2003-06-19 | Oosterlaken Theodorus Gerardus Maria | Method for the deposition of silicon germanium layers |
DE10163394A1 (de) | 2001-12-21 | 2003-07-03 | Aixtron Ag | Verfahren und Vorrichtung zum Abscheiden kristalliner Schichten und auf kristallinen Substraten |
US6841201B2 (en) | 2001-12-21 | 2005-01-11 | The Procter & Gamble Company | Apparatus and method for treating a workpiece using plasma generated from microwave radiation |
US20030116087A1 (en) | 2001-12-21 | 2003-06-26 | Nguyen Anh N. | Chamber hardware design for titanium nitride atomic layer deposition |
JP3891267B2 (ja) | 2001-12-25 | 2007-03-14 | キヤノンアネルバ株式会社 | シリコン酸化膜作製方法 |
US20030124842A1 (en) | 2001-12-27 | 2003-07-03 | Applied Materials, Inc. | Dual-gas delivery system for chemical vapor deposition processes |
KR100442104B1 (ko) | 2001-12-27 | 2004-07-27 | 삼성전자주식회사 | 커패시터를 갖는 반도체 소자의 제조방법 |
US20030124818A1 (en) | 2001-12-28 | 2003-07-03 | Applied Materials, Inc. | Method and apparatus for forming silicon containing films |
US6497734B1 (en) | 2002-01-02 | 2002-12-24 | Novellus Systems, Inc. | Apparatus and method for enhanced degassing of semiconductor wafers for increased throughput |
US6766260B2 (en) | 2002-01-04 | 2004-07-20 | Mks Instruments, Inc. | Mass flow ratio system and method |
US6942929B2 (en) | 2002-01-08 | 2005-09-13 | Nianci Han | Process chamber having component with yttrium-aluminum coating |
US7371467B2 (en) | 2002-01-08 | 2008-05-13 | Applied Materials, Inc. | Process chamber component having electroplated yttrium containing coating |
US7125812B2 (en) | 2002-01-15 | 2006-10-24 | Tokyo Electron Limited | CVD method and device for forming silicon-containing insulation film |
US6827815B2 (en) | 2002-01-15 | 2004-12-07 | Applied Materials, Inc. | Showerhead assembly for a processing chamber |
US6580050B1 (en) | 2002-01-16 | 2003-06-17 | Pace, Incorporated | Soldering station with built-in self-calibration function |
JP4071968B2 (ja) | 2002-01-17 | 2008-04-02 | 東芝三菱電機産業システム株式会社 | ガス供給システム及びガス供給方法 |
JP4908738B2 (ja) | 2002-01-17 | 2012-04-04 | サンデュー・テクノロジーズ・エルエルシー | Ald方法 |
US7077913B2 (en) | 2002-01-17 | 2006-07-18 | Hitachi Kokusai Electric, Inc. | Apparatus for fabricating a semiconductor device |
US6760981B2 (en) | 2002-01-18 | 2004-07-13 | Speedline Technologies, Inc. | Compact convection drying chamber for drying printed circuit boards and other electronic assemblies by enhanced evaporation |
US6793733B2 (en) | 2002-01-25 | 2004-09-21 | Applied Materials Inc. | Gas distribution showerhead |
US6998014B2 (en) | 2002-01-26 | 2006-02-14 | Applied Materials, Inc. | Apparatus and method for plasma assisted deposition |
US6866746B2 (en) | 2002-01-26 | 2005-03-15 | Applied Materials, Inc. | Clamshell and small volume chamber with fixed substrate support |
KR100450669B1 (ko) | 2002-01-30 | 2004-10-01 | 삼성전자주식회사 | 산소 침투 경로 및 캡슐화 장벽막을 구비하는 강유전체메모리 소자 및 그 제조 방법 |
US20030141820A1 (en) | 2002-01-30 | 2003-07-31 | Applied Materials, Inc. | Method and apparatus for substrate processing |
DE10203838B4 (de) | 2002-01-31 | 2006-12-28 | Infineon Technologies Ag | Fluorhaltiger Fotoresist mit Reaktionsankern für eine chemische Nachverstärkung und verbesserten Copolymerisationseigenschaften |
US7115305B2 (en) | 2002-02-01 | 2006-10-03 | California Institute Of Technology | Method of producing regular arrays of nano-scale objects using nano-structured block-copolymeric materials |
KR100377095B1 (en) | 2002-02-01 | 2003-03-20 | Nexo Co Ltd | Semiconductor fabrication apparatus using low energy plasma |
US20080264443A1 (en) | 2002-02-05 | 2008-10-30 | Novellus Systems, Inc. | Apparatus and methods for increasing the rate of solute concentration evolution in a supercritical process chamber |
US6732006B2 (en) | 2002-02-06 | 2004-05-04 | Asm International Nv | Method and system to process semiconductor wafers |
US6899507B2 (en) | 2002-02-08 | 2005-05-31 | Asm Japan K.K. | Semiconductor processing apparatus comprising chamber partitioned into reaction and transfer sections |
US6777352B2 (en) | 2002-02-11 | 2004-08-17 | Applied Materials, Inc. | Variable flow deposition apparatus and method in semiconductor substrate processing |
US7479304B2 (en) | 2002-02-14 | 2009-01-20 | Applied Materials, Inc. | Gas distribution plate fabricated from a solid yttrium oxide-comprising substrate |
US6734090B2 (en) | 2002-02-20 | 2004-05-11 | International Business Machines Corporation | Method of making an edge seal for a semiconductor device |
DE10207131B4 (de) | 2002-02-20 | 2007-12-20 | Infineon Technologies Ag | Verfahren zur Bildung einer Hartmaske in einer Schicht auf einer flachen Scheibe |
JP2003243481A (ja) | 2002-02-21 | 2003-08-29 | Asm Japan Kk | 半導体製造装置及びメンテナンス方法 |
NL1020054C2 (nl) | 2002-02-25 | 2003-09-05 | Asm Int | Inrichting voor het behandelen van wafers, voorzien van een meetmiddelendoos. |
US6787185B2 (en) | 2002-02-25 | 2004-09-07 | Micron Technology, Inc. | Deposition methods for improved delivery of metastable species |
US6766545B2 (en) | 2002-02-27 | 2004-07-27 | B. Eugene Hodges | Shower drain |
US20050063451A1 (en) | 2002-02-28 | 2005-03-24 | Shin-Etsu Handotai Co., Ltd | Temperature measuring system, heating device using it and production method for semiconductor wafer, heat ray insulating translucent member, visible light reflection membner, exposure system-use reflection mirror and exposure system, and semiconductor device produced by using them and vetical heat treating device |
US20030159653A1 (en) | 2002-02-28 | 2003-08-28 | Dando Ross S. | Manifold assembly for feeding reactive precursors to substrate processing chambers |
US20030170583A1 (en) | 2002-03-01 | 2003-09-11 | Hitachi Kokusai Electric Inc. | Heat treatment apparatus and a method for fabricating substrates |
KR100449028B1 (ko) | 2002-03-05 | 2004-09-16 | 삼성전자주식회사 | 원자층 증착법을 이용한 박막 형성방법 |
KR100997699B1 (ko) | 2002-03-05 | 2010-12-02 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 트랜지스터 |
US20030168012A1 (en) | 2002-03-07 | 2003-09-11 | Hitoshi Tamura | Plasma processing device and plasma processing method |
US6596973B1 (en) | 2002-03-07 | 2003-07-22 | Asm America, Inc. | Pyrometer calibrated wafer temperature estimator |
US20030168174A1 (en) | 2002-03-08 | 2003-09-11 | Foree Michael Todd | Gas cushion susceptor system |
EP1485513A2 (en) | 2002-03-08 | 2004-12-15 | Sundew Technologies, LLC | Ald method and apparatus |
US6753618B2 (en) | 2002-03-11 | 2004-06-22 | Micron Technology, Inc. | MIM capacitor with metal nitride electrode materials and method of formation |
JP2003264186A (ja) | 2002-03-11 | 2003-09-19 | Asm Japan Kk | Cvd装置処理室のクリーニング方法 |
US6902395B2 (en) | 2002-03-15 | 2005-06-07 | Asm International, N.V. | Multilevel pedestal for furnace |
US6746240B2 (en) | 2002-03-15 | 2004-06-08 | Asm International N.V. | Process tube support sleeve with circumferential channels |
US6776849B2 (en) | 2002-03-15 | 2004-08-17 | Asm America, Inc. | Wafer holder with peripheral lift ring |
US6835039B2 (en) | 2002-03-15 | 2004-12-28 | Asm International N.V. | Method and apparatus for batch processing of wafers in a furnace |
US6962644B2 (en) | 2002-03-18 | 2005-11-08 | Applied Materials, Inc. | Tandem etch chamber plasma processing system |
US20030173346A1 (en) | 2002-03-18 | 2003-09-18 | Renken Wayne Glenn | System and method for heating and cooling wafer at accelerated rates |
JP4157914B2 (ja) | 2002-03-20 | 2008-10-01 | 坂野 數仁 | 温度測定装置及び温度測定方法 |
US6780787B2 (en) | 2002-03-21 | 2004-08-24 | Lam Research Corporation | Low contamination components for semiconductor processing apparatus and methods for making components |
US20030178145A1 (en) | 2002-03-25 | 2003-09-25 | Applied Materials, Inc. | Closed hole edge lift pin and susceptor for wafer process chambers |
JP4099092B2 (ja) | 2002-03-26 | 2008-06-11 | 東京エレクトロン株式会社 | 基板処理装置および基板処理方法、高速ロータリバルブ |
US6800134B2 (en) | 2002-03-26 | 2004-10-05 | Micron Technology, Inc. | Chemical vapor deposition methods and atomic layer deposition methods |
US6825134B2 (en) | 2002-03-26 | 2004-11-30 | Applied Materials, Inc. | Deposition of film layers by alternately pulsing a precursor and high frequency power in a continuous gas flow |
JP4128383B2 (ja) | 2002-03-27 | 2008-07-30 | 東京エレクトロン株式会社 | 処理装置及び処理方法 |
WO2003083167A1 (en) | 2002-03-28 | 2003-10-09 | President And Fellows Of Harvard College | Vapor deposition of silicon dioxide nanolaminates |
DE10214066B4 (de) | 2002-03-28 | 2007-02-01 | Advanced Micro Devices, Inc., Sunnyvale | Halbleiterbauelement mit retrogradem Dotierprofil in einem Kanalgebiet und Verfahren zur Herstellung desselben |
US6883733B1 (en) | 2002-03-28 | 2005-04-26 | Novellus Systems, Inc. | Tapered post, showerhead design to improve mixing on dual plenum showerheads |
US6594550B1 (en) | 2002-03-29 | 2003-07-15 | Asm America, Inc. | Method and system for using a buffer to track robotic movement |
US20030231698A1 (en) | 2002-03-29 | 2003-12-18 | Takatomo Yamaguchi | Apparatus and method for fabricating a semiconductor device and a heat treatment apparatus |
JP4001498B2 (ja) | 2002-03-29 | 2007-10-31 | 東京エレクトロン株式会社 | 絶縁膜の形成方法及び絶縁膜の形成システム |
JP4106948B2 (ja) | 2002-03-29 | 2008-06-25 | 東京エレクトロン株式会社 | 被処理体の跳上り検出装置、被処理体の跳上り検出方法、プラズマ処理装置及びプラズマ処理方法 |
US6843858B2 (en) | 2002-04-02 | 2005-01-18 | Applied Materials, Inc. | Method of cleaning a semiconductor processing chamber |
KR100829327B1 (ko) | 2002-04-05 | 2008-05-13 | 가부시키가이샤 히다치 고쿠사이 덴키 | 기판 처리 장치 및 반응 용기 |
US20030188685A1 (en) | 2002-04-08 | 2003-10-09 | Applied Materials, Inc. | Laser drilled surfaces for substrate processing chambers |
US6875271B2 (en) | 2002-04-09 | 2005-04-05 | Applied Materials, Inc. | Simultaneous cyclical deposition in different processing regions |
JP4092937B2 (ja) | 2002-04-11 | 2008-05-28 | 松下電工株式会社 | プラズマ処理装置及びプラズマ処理方法 |
KR20030081144A (ko) | 2002-04-11 | 2003-10-17 | 가부시키가이샤 히다치 고쿠사이 덴키 | 종형 반도체 제조 장치 |
US7988833B2 (en) | 2002-04-12 | 2011-08-02 | Schneider Electric USA, Inc. | System and method for detecting non-cathode arcing in a plasma generation apparatus |
US6710312B2 (en) | 2002-04-12 | 2004-03-23 | B H Thermal Corporation | Heating jacket assembly with field replaceable thermostat |
US7279432B2 (en) | 2002-04-16 | 2007-10-09 | Applied Materials, Inc. | System and method for forming an integrated barrier layer |
US8293001B2 (en) | 2002-04-17 | 2012-10-23 | Air Products And Chemicals, Inc. | Porogens, porogenated precursors and methods for using the same to provide porous organosilica glass films with low dielectric constants |
US6846515B2 (en) | 2002-04-17 | 2005-01-25 | Air Products And Chemicals, Inc. | Methods for using porogens and/or porogenated precursors to provide porous organosilica glass films with low dielectric constants |
KR100439948B1 (ko) | 2002-04-19 | 2004-07-12 | 주식회사 아이피에스 | 리모트 플라즈마 ald 장치 및 이를 이용한 ald 박막증착방법 |
KR101040446B1 (ko) | 2002-04-19 | 2011-06-09 | 맷슨 테크놀로지, 인크. | 저증기압 가스 전구체를 이용하여 기판 상에 막을증착하기 위한 시스템 |
US6814813B2 (en) | 2002-04-24 | 2004-11-09 | Micron Technology, Inc. | Chemical vapor deposition apparatus |
US6825126B2 (en) | 2002-04-25 | 2004-11-30 | Hitachi Kokusai Electric Inc. | Manufacturing method of semiconductor device and substrate processing apparatus |
KR100472730B1 (ko) | 2002-04-26 | 2005-03-08 | 주식회사 하이닉스반도체 | 원자층증착법을 이용한 반도체 소자의 금속전극 형성방법 |
US7589029B2 (en) | 2002-05-02 | 2009-09-15 | Micron Technology, Inc. | Atomic layer deposition and conversion |
US7160577B2 (en) | 2002-05-02 | 2007-01-09 | Micron Technology, Inc. | Methods for atomic-layer deposition of aluminum oxides in integrated circuits |
US7045430B2 (en) | 2002-05-02 | 2006-05-16 | Micron Technology Inc. | Atomic layer-deposited LaAlO3 films for gate dielectrics |
US6684719B2 (en) | 2002-05-03 | 2004-02-03 | Caterpillar Inc | Method and apparatus for mixing gases |
US7086347B2 (en) | 2002-05-06 | 2006-08-08 | Lam Research Corporation | Apparatus and methods for minimizing arcing in a plasma processing chamber |
JP2003324072A (ja) | 2002-05-07 | 2003-11-14 | Nec Electronics Corp | 半導体製造装置 |
US20030209326A1 (en) | 2002-05-07 | 2003-11-13 | Mattson Technology, Inc. | Process and system for heating semiconductor substrates in a processing chamber containing a susceptor |
KR100437458B1 (ko) | 2002-05-07 | 2004-06-23 | 삼성전자주식회사 | 상변화 기억 셀들 및 그 제조방법들 |
JP4338355B2 (ja) | 2002-05-10 | 2009-10-07 | 東京エレクトロン株式会社 | プラズマ処理装置 |
US7122844B2 (en) | 2002-05-13 | 2006-10-17 | Cree, Inc. | Susceptor for MOCVD reactor |
US6682973B1 (en) | 2002-05-16 | 2004-01-27 | Advanced Micro Devices, Inc. | Formation of well-controlled thin SiO, SiN, SiON layer for multilayer high-K dielectric applications |
US20030213560A1 (en) | 2002-05-16 | 2003-11-20 | Yaxin Wang | Tandem wafer processing system and process |
US6825051B2 (en) | 2002-05-17 | 2004-11-30 | Asm America, Inc. | Plasma etch resistant coating and process |
US7074298B2 (en) | 2002-05-17 | 2006-07-11 | Applied Materials | High density plasma CVD chamber |
KR100466818B1 (ko) | 2002-05-17 | 2005-01-24 | 주식회사 하이닉스반도체 | 반도체 소자의 절연막 형성 방법 |
US6797525B2 (en) | 2002-05-22 | 2004-09-28 | Agere Systems Inc. | Fabrication process for a semiconductor device having a metal oxide dielectric material with a high dielectric constant, annealed with a buffered anneal process |
US6902656B2 (en) | 2002-05-24 | 2005-06-07 | Dalsa Semiconductor Inc. | Fabrication of microstructures with vacuum-sealed cavity |
KR20030092305A (ko) | 2002-05-29 | 2003-12-06 | 삼성전자주식회사 | 고온 언도우프 막 증착 설비의 챔버 외벽에 대한 온도측정장치 |
US7135421B2 (en) | 2002-06-05 | 2006-11-14 | Micron Technology, Inc. | Atomic layer-deposited hafnium aluminum oxide |
US7195693B2 (en) | 2002-06-05 | 2007-03-27 | Advanced Thermal Sciences | Lateral temperature equalizing system for large area surfaces during processing |
JP4311914B2 (ja) | 2002-06-05 | 2009-08-12 | 住友電気工業株式会社 | 半導体製造装置用ヒータモジュール |
US20060014384A1 (en) | 2002-06-05 | 2006-01-19 | Jong-Cheol Lee | Method of forming a layer and forming a capacitor of a semiconductor device having the same layer |
US6849464B2 (en) | 2002-06-10 | 2005-02-01 | Micron Technology, Inc. | Method of fabricating a multilayer dielectric tunnel barrier structure |
JP2004014952A (ja) | 2002-06-10 | 2004-01-15 | Tokyo Electron Ltd | 処理装置および処理方法 |
AU2003242104A1 (en) | 2002-06-10 | 2003-12-22 | Tokyo Electron Limited | Processing device and processing method |
US7067439B2 (en) | 2002-06-14 | 2006-06-27 | Applied Materials, Inc. | ALD metal oxide deposition process using direct oxidation |
US6858547B2 (en) | 2002-06-14 | 2005-02-22 | Applied Materials, Inc. | System and method for forming a gate dielectric |
US7601225B2 (en) | 2002-06-17 | 2009-10-13 | Asm International N.V. | System for controlling the sublimation of reactants |
JP2004022902A (ja) | 2002-06-18 | 2004-01-22 | Fujitsu Ltd | 半導体装置の製造方法 |
WO2003106338A1 (ja) | 2002-06-18 | 2003-12-24 | 株式会社トクヤマ | シリコン製造用反応装置 |
WO2004001804A2 (en) | 2002-06-19 | 2003-12-31 | Ziegler Byron J | Device for generation of reactive ions |
KR100455297B1 (ko) | 2002-06-19 | 2004-11-06 | 삼성전자주식회사 | 무기물 나노튜브 제조방법 |
JP3670628B2 (ja) | 2002-06-20 | 2005-07-13 | 株式会社東芝 | 成膜方法、成膜装置、および半導体装置の製造方法 |
TWI278532B (en) | 2002-06-23 | 2007-04-11 | Asml Us Inc | Method for energy-assisted atomic layer deposition and removal |
US6552209B1 (en) | 2002-06-24 | 2003-04-22 | Air Products And Chemicals, Inc. | Preparation of metal imino/amino complexes for metal oxide and metal nitride thin films |
JP3999059B2 (ja) | 2002-06-26 | 2007-10-31 | 東京エレクトロン株式会社 | 基板処理システム及び基板処理方法 |
JP4278441B2 (ja) | 2002-06-28 | 2009-06-17 | コバレントマテリアル株式会社 | 半導体ウエハ処理用部材 |
US7255775B2 (en) | 2002-06-28 | 2007-08-14 | Toshiba Ceramics Co., Ltd. | Semiconductor wafer treatment member |
US6827789B2 (en) | 2002-07-01 | 2004-12-07 | Semigear, Inc. | Isolation chamber arrangement for serial processing of semiconductor wafers for the electronic industry |
US20040018750A1 (en) | 2002-07-02 | 2004-01-29 | Sophie Auguste J.L. | Method for deposition of nitrogen doped silicon carbide films |
US6869641B2 (en) | 2002-07-03 | 2005-03-22 | Unaxis Balzers Ltd. | Method and apparatus for ALD on a rotary susceptor |
KR100505668B1 (ko) | 2002-07-08 | 2005-08-03 | 삼성전자주식회사 | 원자층 증착 방법에 의한 실리콘 산화막 형성 방법 |
US6821347B2 (en) | 2002-07-08 | 2004-11-23 | Micron Technology, Inc. | Apparatus and method for depositing materials onto microelectronic workpieces |
US7356762B2 (en) | 2002-07-08 | 2008-04-08 | Asm International Nv | Method for the automatic generation of an interactive electronic equipment documentation package |
US6838125B2 (en) | 2002-07-10 | 2005-01-04 | Applied Materials, Inc. | Method of film deposition using activated precursor gases |
CN1675402A (zh) | 2002-07-12 | 2005-09-28 | 哈佛学院院长等 | 氮化钨的汽相沉积 |
TWI277140B (en) | 2002-07-12 | 2007-03-21 | Asm Int | Method and apparatus for the pulse-wise supply of a vaporized liquid reactant |
US20050136657A1 (en) | 2002-07-12 | 2005-06-23 | Tokyo Electron Limited | Film-formation method for semiconductor process |
US20070243317A1 (en) | 2002-07-15 | 2007-10-18 | Du Bois Dale R | Thermal Processing System and Configurable Vertical Chamber |
AU2003256487A1 (en) | 2002-07-15 | 2004-02-02 | Aviza Technology, Inc. | Variable heater element for low to high temperature ranges |
US6976822B2 (en) | 2002-07-16 | 2005-12-20 | Semitool, Inc. | End-effectors and transfer devices for handling microelectronic workpieces |
US7186385B2 (en) | 2002-07-17 | 2007-03-06 | Applied Materials, Inc. | Apparatus for providing gas to a processing chamber |
US6955211B2 (en) | 2002-07-17 | 2005-10-18 | Applied Materials, Inc. | Method and apparatus for gas temperature control in a semiconductor processing system |
US7357138B2 (en) | 2002-07-18 | 2008-04-15 | Air Products And Chemicals, Inc. | Method for etching high dielectric constant materials and for cleaning deposition chambers for high dielectric constant materials |
JP4186536B2 (ja) | 2002-07-18 | 2008-11-26 | 松下電器産業株式会社 | プラズマ処理装置 |
TW200427858A (en) | 2002-07-19 | 2004-12-16 | Asml Us Inc | Atomic layer deposition of high k dielectric films |
TWI294792B (en) | 2002-07-19 | 2008-03-21 | Mykrolis Corp | Liquid flow controller and precision dispense apparatus and system |
CN1643674A (zh) | 2002-07-19 | 2005-07-20 | 阿维扎技术公司 | 使用氨基硅烷和臭氧的低温介电沉积 |
JP5005170B2 (ja) | 2002-07-19 | 2012-08-22 | エーエスエム アメリカ インコーポレイテッド | 超高品質シリコン含有化合物層の形成方法 |
KR100447284B1 (ko) | 2002-07-19 | 2004-09-07 | 삼성전자주식회사 | 화학기상증착 챔버의 세정 방법 |
JP4133062B2 (ja) | 2002-07-19 | 2008-08-13 | 大日本スクリーン製造株式会社 | 熱処理装置 |
US6772072B2 (en) | 2002-07-22 | 2004-08-03 | Applied Materials, Inc. | Method and apparatus for monitoring solid precursor delivery |
US6921062B2 (en) | 2002-07-23 | 2005-07-26 | Advanced Technology Materials, Inc. | Vaporizer delivery ampoule |
US7223323B2 (en) | 2002-07-24 | 2007-05-29 | Applied Materials, Inc. | Multi-chemistry plating system |
US7018555B2 (en) | 2002-07-26 | 2006-03-28 | Dainippon Screen Mfg. Co., Ltd. | Substrate treatment method and substrate treatment apparatus |
KR100464855B1 (ko) | 2002-07-26 | 2005-01-06 | 삼성전자주식회사 | 박막 형성 방법과, 이를 이용한 커패시터 형성 방법 및트랜지스터 형성 방법 |
JP3908112B2 (ja) | 2002-07-29 | 2007-04-25 | Sumco Techxiv株式会社 | サセプタ、エピタキシャルウェーハ製造装置及びエピタキシャルウェーハ製造方法 |
EP1525337A2 (en) | 2002-07-30 | 2005-04-27 | ASM America, Inc. | Sublimation system employing carrier gas |
DE10234694A1 (de) | 2002-07-30 | 2004-02-12 | Infineon Technologies Ag | Verfahren zum Oxidieren einer Schicht und zugehörige Aufnamevorrichtung für ein Substrat |
US6844119B2 (en) | 2002-07-30 | 2005-01-18 | Hoya Corporation | Method for producing a halftone phase shift mask blank, a halftone phase shift mask blank and halftone phase shift mask |
JP3725100B2 (ja) | 2002-07-31 | 2005-12-07 | アプライド マテリアルズ インコーポレイテッド | 成膜方法 |
US7504006B2 (en) | 2002-08-01 | 2009-03-17 | Applied Materials, Inc. | Self-ionized and capacitively-coupled plasma for sputtering and resputtering |
DE10235427A1 (de) | 2002-08-02 | 2004-02-12 | Eos Gmbh Electro Optical Systems | Vorrichtung und Verfahren zum Herstellen von dreidimensionalen Objekten mittels eines generativen Fertigungsverfahrens |
US7153542B2 (en) | 2002-08-06 | 2006-12-26 | Tegal Corporation | Assembly line processing method |
US6818864B2 (en) | 2002-08-09 | 2004-11-16 | Asm America, Inc. | LED heat lamp arrays for CVD heating |
JP4034145B2 (ja) | 2002-08-09 | 2008-01-16 | 住友大阪セメント株式会社 | サセプタ装置 |
KR100480610B1 (ko) | 2002-08-09 | 2005-03-31 | 삼성전자주식회사 | 실리콘 산화막을 이용한 미세 패턴 형성방법 |
US6887521B2 (en) | 2002-08-15 | 2005-05-03 | Micron Technology, Inc. | Gas delivery system for pulsed-type deposition processes used in the manufacturing of micro-devices |
US7085623B2 (en) | 2002-08-15 | 2006-08-01 | Asm International Nv | Method and system for using short ranged wireless enabled computers as a service tool |
US7192486B2 (en) | 2002-08-15 | 2007-03-20 | Applied Materials, Inc. | Clog-resistant gas delivery system |
US6890596B2 (en) | 2002-08-15 | 2005-05-10 | Micron Technology, Inc. | Deposition methods |
TW200408015A (en) | 2002-08-18 | 2004-05-16 | Asml Us Inc | Atomic layer deposition of high K metal silicates |
TW200408323A (en) | 2002-08-18 | 2004-05-16 | Asml Us Inc | Atomic layer deposition of high k metal oxides |
US6649921B1 (en) | 2002-08-19 | 2003-11-18 | Fusion Uv Systems, Inc. | Apparatus and method providing substantially two-dimensionally uniform irradiation |
US6927140B2 (en) | 2002-08-21 | 2005-08-09 | Intel Corporation | Method for fabricating a bipolar transistor base |
US20040036129A1 (en) | 2002-08-22 | 2004-02-26 | Micron Technology, Inc. | Atomic layer deposition of CMOS gates with variable work functions |
US6884296B2 (en) | 2002-08-23 | 2005-04-26 | Micron Technology, Inc. | Reactors having gas distributors and methods for depositing materials onto micro-device workpieces |
US6967154B2 (en) | 2002-08-26 | 2005-11-22 | Micron Technology, Inc. | Enhanced atomic layer deposition |
US6794284B2 (en) | 2002-08-28 | 2004-09-21 | Micron Technology, Inc. | Systems and methods for forming refractory metal nitride layers using disilazanes |
US7041609B2 (en) | 2002-08-28 | 2006-05-09 | Micron Technology, Inc. | Systems and methods for forming metal oxides using alcohols |
US6902647B2 (en) | 2002-08-29 | 2005-06-07 | Asm International N.V. | Method of processing substrates with integrated weighing steps |
US7256375B2 (en) | 2002-08-30 | 2007-08-14 | Asm International N.V. | Susceptor plate for high temperature heat treatment |
JP2004091848A (ja) | 2002-08-30 | 2004-03-25 | Tokyo Electron Ltd | 薄膜形成装置の原料ガス供給系および薄膜形成装置 |
USD511280S1 (en) | 2002-09-04 | 2005-11-08 | Thermal Dynamics Corporation | Plasma arc torch tip |
US6884066B2 (en) | 2002-09-10 | 2005-04-26 | Fsi International, Inc. | Thermal process station with heated lid |
US6936086B2 (en) | 2002-09-11 | 2005-08-30 | Planar Systems, Inc. | High conductivity particle filter |
US7122415B2 (en) | 2002-09-12 | 2006-10-17 | Promos Technologies, Inc. | Atomic layer deposition of interpoly oxides in a non-volatile memory device |
US20040050325A1 (en) | 2002-09-12 | 2004-03-18 | Samoilov Arkadii V. | Apparatus and method for delivering process gas to a substrate processing system |
JP2004103990A (ja) | 2002-09-12 | 2004-04-02 | Hitachi Kokusai Electric Inc | 半導体製造装置および半導体装置の製造方法 |
US7011299B2 (en) | 2002-09-16 | 2006-03-14 | Matheson Tri-Gas, Inc. | Liquid vapor delivery system and method of maintaining a constant level of fluid therein |
KR100497748B1 (ko) | 2002-09-17 | 2005-06-29 | 주식회사 무한 | 반도체소자 제조용 원자층 증착 장치 및 원자층 증착 방법 |
US7411352B2 (en) | 2002-09-19 | 2008-08-12 | Applied Process Technologies, Inc. | Dual plasma beam sources and method |
JP3594947B2 (ja) | 2002-09-19 | 2004-12-02 | 東京エレクトロン株式会社 | 絶縁膜の形成方法、半導体装置の製造方法、基板処理装置 |
US6905940B2 (en) | 2002-09-19 | 2005-06-14 | Applied Materials, Inc. | Method using TEOS ramp-up during TEOS/ozone CVD for improved gap-fill |
US6715949B1 (en) | 2002-09-20 | 2004-04-06 | Eastman Kodak Company | Medium-handling in printer for donor and receiver mediums |
US7252738B2 (en) | 2002-09-20 | 2007-08-07 | Lam Research Corporation | Apparatus for reducing polymer deposition on a substrate and substrate support |
US6767824B2 (en) | 2002-09-23 | 2004-07-27 | Padmapani C. Nallan | Method of fabricating a gate structure of a field effect transistor using an alpha-carbon mask |
JP3887291B2 (ja) | 2002-09-24 | 2007-02-28 | 東京エレクトロン株式会社 | 基板処理装置 |
JP3877157B2 (ja) | 2002-09-24 | 2007-02-07 | 東京エレクトロン株式会社 | 基板処理装置 |
JP4231953B2 (ja) | 2002-09-24 | 2009-03-04 | ペガサスネット株式会社 | 耳孔式saw体温計及び該体温計による体温管理システム |
US6696367B1 (en) | 2002-09-27 | 2004-02-24 | Asm America, Inc. | System for the improved handling of wafers within a process tool |
JP2004127957A (ja) | 2002-09-30 | 2004-04-22 | Fujitsu Ltd | 半導体装置の製造方法と半導体装置 |
JP2004128019A (ja) | 2002-09-30 | 2004-04-22 | Applied Materials Inc | プラズマ処理方法及び装置 |
US20040065255A1 (en) | 2002-10-02 | 2004-04-08 | Applied Materials, Inc. | Cyclical layer deposition system |
US8187377B2 (en) | 2002-10-04 | 2012-05-29 | Silicon Genesis Corporation | Non-contact etch annealing of strained layers |
US20070051471A1 (en) | 2002-10-04 | 2007-03-08 | Applied Materials, Inc. | Methods and apparatus for stripping |
US7445690B2 (en) | 2002-10-07 | 2008-11-04 | Tokyo Electron Limited | Plasma processing apparatus |
US7749563B2 (en) | 2002-10-07 | 2010-07-06 | Applied Materials, Inc. | Two-layer film for next generation damascene barrier application with good oxidation resistance |
JP3671951B2 (ja) | 2002-10-08 | 2005-07-13 | 住友電気工業株式会社 | 測温装置及びそれを用いたセラミックスヒータ |
JP4093462B2 (ja) | 2002-10-09 | 2008-06-04 | 東京エレクトロン株式会社 | 基板処理方法及び基板処理装置 |
JP2004134553A (ja) | 2002-10-10 | 2004-04-30 | Sony Corp | レジストパターンの形成方法及び半導体装置の製造方法 |
US6905737B2 (en) | 2002-10-11 | 2005-06-14 | Applied Materials, Inc. | Method of delivering activated species for rapid cyclical deposition |
EP1408140A1 (en) | 2002-10-11 | 2004-04-14 | STMicroelectronics S.r.l. | A high-density plasma process for depositing a layer of Silicon Nitride |
US7080545B2 (en) | 2002-10-17 | 2006-07-25 | Advanced Technology Materials, Inc. | Apparatus and process for sensing fluoro species in semiconductor processing systems |
US6818566B2 (en) | 2002-10-18 | 2004-11-16 | The Boc Group, Inc. | Thermal activation of fluorine for use in a semiconductor chamber |
KR100460841B1 (ko) | 2002-10-22 | 2004-12-09 | 한국전자통신연구원 | 플라즈마 인가 원자층 증착법을 통한 질소첨가 산화물박막의 형성방법 |
US7144806B1 (en) | 2002-10-23 | 2006-12-05 | Novellus Systems, Inc. | ALD of tantalum using a hydride reducing agent |
US6821909B2 (en) | 2002-10-30 | 2004-11-23 | Applied Materials, Inc. | Post rinse to improve selective deposition of electroless cobalt on copper for ULSI application |
JP2004153037A (ja) | 2002-10-31 | 2004-05-27 | Renesas Technology Corp | 半導体装置の製造方法 |
US6982230B2 (en) | 2002-11-08 | 2006-01-03 | International Business Machines Corporation | Deposition of hafnium oxide and/or zirconium oxide and fabrication of passivated electronic structures |
JP4009523B2 (ja) | 2002-11-14 | 2007-11-14 | 岩谷産業株式会社 | オゾンガス濃度計測方法及びオゾンガス濃度計測装置 |
JP4502590B2 (ja) | 2002-11-15 | 2010-07-14 | 株式会社ルネサステクノロジ | 半導体製造装置 |
KR102220703B1 (ko) | 2002-11-15 | 2021-02-26 | 프레지던트 앤드 펠로우즈 오브 하바드 칼리지 | 금속 아미디네이트를 이용한 원자층 증착법 |
US6676290B1 (en) | 2002-11-15 | 2004-01-13 | Hsueh-Yu Lu | Electronic clinical thermometer |
KR100520902B1 (ko) | 2002-11-20 | 2005-10-12 | 주식회사 아이피에스 | 알루미늄 화합물을 이용한 박막증착방법 |
JP3946130B2 (ja) | 2002-11-20 | 2007-07-18 | 東京エレクトロン株式会社 | プラズマ処理装置およびプラズマ処理方法 |
KR100935291B1 (ko) | 2002-11-28 | 2010-01-06 | 도쿄엘렉트론가부시키가이샤 | 기판 처리 시스템 및 도포 현상 장치 |
US7062161B2 (en) | 2002-11-28 | 2006-06-13 | Dainippon Screen Mfg. Co., Ltd. | Photoirradiation thermal processing apparatus and thermal processing susceptor employed therefor |
KR100496265B1 (ko) | 2002-11-29 | 2005-06-17 | 한국전자통신연구원 | 반도체 소자의 박막 형성방법 |
KR100486690B1 (ko) | 2002-11-29 | 2005-05-03 | 삼성전자주식회사 | 기판 이송 모듈의 오염을 제어할 수 있는 기판 처리 장치및 방법 |
TW200410337A (en) | 2002-12-02 | 2004-06-16 | Au Optronics Corp | Dry cleaning method for plasma reaction chamber |
US7122414B2 (en) | 2002-12-03 | 2006-10-17 | Asm International, Inc. | Method to fabricate dual metal CMOS devices |
US6858524B2 (en) | 2002-12-03 | 2005-02-22 | Asm International, Nv | Method of depositing barrier layer for metal gates |
US6895158B2 (en) | 2002-12-09 | 2005-05-17 | Eastman Kodak Company | Waveguide and method of smoothing optical surfaces |
US6720531B1 (en) | 2002-12-11 | 2004-04-13 | Asm America, Inc. | Light scattering process chamber walls |
USD496008S1 (en) | 2002-12-12 | 2004-09-14 | Tokyo Electron Limited | Exhaust ring for manufacturing semiconductors |
USD494552S1 (en) | 2002-12-12 | 2004-08-17 | Tokyo Electron Limited | Exhaust ring for manufacturing semiconductors |
US6929699B2 (en) | 2002-12-13 | 2005-08-16 | Texas Instruments Incorporated | Gas injectors for a vertical furnace used in semiconductor processing |
JP2004244298A (ja) | 2002-12-17 | 2004-09-02 | Kobe Steel Ltd | ダイヤモンド気相合成用基板ホルダ及びダイヤモンド気相合成方法 |
US7296532B2 (en) | 2002-12-18 | 2007-11-20 | Taiwan Semiconductor Manufacturing Co., Ltd. | Bypass gas feed system and method to improve reactant gas flow and film deposition |
US7092287B2 (en) | 2002-12-18 | 2006-08-15 | Asm International N.V. | Method of fabricating silicon nitride nanodots |
AU2003301074A1 (en) | 2002-12-20 | 2004-07-22 | Brooks Automation, Inc. | System and method for on-the-fly eccentricity recognition |
DE10259945A1 (de) | 2002-12-20 | 2004-07-01 | Tews, Walter, Dipl.-Chem. Dr.rer.nat.habil. | Leuchtstoffe mit verlängerter Fluoreszenzlebensdauer |
JP2004207564A (ja) | 2002-12-26 | 2004-07-22 | Fujitsu Ltd | 半導体装置の製造方法と半導体装置 |
CN2588350Y (zh) | 2002-12-26 | 2003-11-26 | 张连合 | 一种热电偶 |
US6855645B2 (en) | 2002-12-30 | 2005-02-15 | Novellus Systems, Inc. | Silicon carbide having low dielectric constant |
DE10261362B8 (de) | 2002-12-30 | 2008-08-28 | Osram Opto Semiconductors Gmbh | Substrat-Halter |
US6692249B1 (en) | 2003-01-06 | 2004-02-17 | Texas Instruments Incorporated | Hot liner insertion/removal fixture |
US7270713B2 (en) | 2003-01-07 | 2007-09-18 | Applied Materials, Inc. | Tunable gas distribution plate assembly |
US7262133B2 (en) | 2003-01-07 | 2007-08-28 | Applied Materials, Inc. | Enhancement of copper line reliability using thin ALD tan film to cap the copper line |
US6790788B2 (en) | 2003-01-13 | 2004-09-14 | Applied Materials Inc. | Method of improving stability in low k barrier layers |
USD486891S1 (en) | 2003-01-21 | 2004-02-17 | Richard W. Cronce, Jr. | Vent pipe protective cover |
USD497977S1 (en) | 2003-01-22 | 2004-11-02 | Tour & Andersson Ab | Sealing ring membrane |
US7122222B2 (en) | 2003-01-23 | 2006-10-17 | Air Products And Chemicals, Inc. | Precursors for depositing silicon containing films and processes thereof |
US20040144980A1 (en) | 2003-01-27 | 2004-07-29 | Ahn Kie Y. | Atomic layer deposition of metal oxynitride layers as gate dielectrics and semiconductor device structures utilizing metal oxynitride layers |
USD497536S1 (en) | 2003-01-28 | 2004-10-26 | Bridgestone Corporation | Rubber vibration insulator |
USD558021S1 (en) | 2003-01-30 | 2007-12-25 | Roger Lawrence | Metal fabrication clamp |
JP2004235516A (ja) | 2003-01-31 | 2004-08-19 | Trecenti Technologies Inc | ウエハ収納治具のパージ方法、ロードポートおよび半導体装置の製造方法 |
US20040152287A1 (en) | 2003-01-31 | 2004-08-05 | Sherrill Adrian B. | Deposition of a silicon film |
JP4472372B2 (ja) | 2003-02-03 | 2010-06-02 | 株式会社オクテック | プラズマ処理装置及びプラズマ処理装置用の電極板 |
US7713592B2 (en) | 2003-02-04 | 2010-05-11 | Tegal Corporation | Nanolayer deposition process |
US7163721B2 (en) | 2003-02-04 | 2007-01-16 | Tegal Corporation | Method to plasma deposit on organic polymer dielectric film |
JP2004241203A (ja) | 2003-02-04 | 2004-08-26 | Hitachi High-Technologies Corp | プラズマ処理室壁処理方法 |
US7129165B2 (en) | 2003-02-04 | 2006-10-31 | Asm Nutool, Inc. | Method and structure to improve reliability of copper interconnects |
KR100505670B1 (ko) | 2003-02-05 | 2005-08-03 | 삼성전자주식회사 | 부산물 제거용 고온 유체 공급 장치를 구비한 반도체 소자제조 장치 |
WO2004070816A1 (ja) | 2003-02-06 | 2004-08-19 | Tokyo Electron Limited | プラズマ処理方法,半導体基板及びプラズマ処理装置 |
US6854580B2 (en) | 2003-02-06 | 2005-02-15 | Borgwarner, Inc. | Torsional damper having variable bypass clutch with centrifugal release mechanism |
US6876017B2 (en) | 2003-02-08 | 2005-04-05 | Intel Corporation | Polymer sacrificial light absorbing structure and method |
JP4168775B2 (ja) | 2003-02-12 | 2008-10-22 | 株式会社デンソー | 薄膜の製造方法 |
KR100505061B1 (ko) | 2003-02-12 | 2005-08-01 | 삼성전자주식회사 | 기판 이송 모듈 |
US7374696B2 (en) | 2003-02-14 | 2008-05-20 | Applied Materials, Inc. | Method and apparatus for removing a halogen-containing residue |
TWI338323B (en) | 2003-02-17 | 2011-03-01 | Nikon Corp | Stage device, exposure device and manufacguring method of devices |
JP4214795B2 (ja) | 2003-02-20 | 2009-01-28 | 東京エレクトロン株式会社 | 成膜方法 |
US20040163590A1 (en) | 2003-02-24 | 2004-08-26 | Applied Materials, Inc. | In-situ health check of liquid injection vaporizer |
US20040168627A1 (en) | 2003-02-27 | 2004-09-02 | Sharp Laboratories Of America, Inc. | Atomic layer deposition of oxide film |
US6930059B2 (en) | 2003-02-27 | 2005-08-16 | Sharp Laboratories Of America, Inc. | Method for depositing a nanolaminate film by atomic layer deposition |
US7091453B2 (en) | 2003-02-27 | 2006-08-15 | Dainippon Screen Mfg. Co., Ltd. | Heat treatment apparatus by means of light irradiation |
US6917755B2 (en) | 2003-02-27 | 2005-07-12 | Applied Materials, Inc. | Substrate support |
US7077911B2 (en) | 2003-03-03 | 2006-07-18 | Seiko Epson Corporation | MOCVD apparatus and MOCVD method |
US7098149B2 (en) | 2003-03-04 | 2006-08-29 | Air Products And Chemicals, Inc. | Mechanical enhancement of dense and porous organosilicate materials by UV exposure |
US7192892B2 (en) | 2003-03-04 | 2007-03-20 | Micron Technology, Inc. | Atomic layer deposited dielectric layers |
JP2004273766A (ja) | 2003-03-07 | 2004-09-30 | Watanabe Shoko:Kk | 気化装置及びそれを用いた成膜装置並びに気化方法及び成膜方法 |
US7238653B2 (en) | 2003-03-10 | 2007-07-03 | Hynix Semiconductor Inc. | Cleaning solution for photoresist and method for forming pattern using the same |
US6867086B1 (en) | 2003-03-13 | 2005-03-15 | Novellus Systems, Inc. | Multi-step deposition and etch back gap fill process |
CN1777696B (zh) | 2003-03-14 | 2011-04-20 | 杰努斯公司 | 用于原子层沉积的方法和设备 |
JP2004288916A (ja) | 2003-03-24 | 2004-10-14 | Renesas Technology Corp | Cvd装置 |
JP4369203B2 (ja) | 2003-03-24 | 2009-11-18 | 信越化学工業株式会社 | 反射防止膜材料、反射防止膜を有する基板及びパターン形成方法 |
US7140558B2 (en) | 2003-03-24 | 2006-11-28 | Irene Base, legal representative | Mixing arrangement for atomizing nozzle in multi-phase flow |
WO2004086496A1 (ja) | 2003-03-26 | 2004-10-07 | Shin-Etsu Handotai Co., Ltd. | 熱処理用ウェーハ支持具及び熱処理装置 |
JP2004294638A (ja) | 2003-03-26 | 2004-10-21 | Tokyo Ohka Kogyo Co Ltd | ネガ型レジスト材料およびレジストパターン形成方法 |
US6972055B2 (en) | 2003-03-28 | 2005-12-06 | Finens Corporation | Continuous flow deposition system |
US7223014B2 (en) | 2003-03-28 | 2007-05-29 | Intempco Controls Ltd. | Remotely programmable integrated sensor transmitter |
US7208389B1 (en) | 2003-03-31 | 2007-04-24 | Novellus Systems, Inc. | Method of porogen removal from porous low-k films using UV radiation |
US20040198069A1 (en) | 2003-04-04 | 2004-10-07 | Applied Materials, Inc. | Method for hafnium nitride deposition |
EP1612854A4 (en) | 2003-04-07 | 2007-10-17 | Tokyo Electron Ltd | LOADING TABLE AND HEAT TREATMENT DEVICE WITH LOADING TABLE |
SE525113C2 (sv) | 2003-04-08 | 2004-11-30 | Tetra Laval Holdings & Finance | Metod och anordning för kontinuerlig blandning av två flöden |
KR100500246B1 (ko) | 2003-04-09 | 2005-07-11 | 삼성전자주식회사 | 가스공급장치 |
US7037376B2 (en) | 2003-04-11 | 2006-05-02 | Applied Materials Inc. | Backflush chamber clean |
US6843830B2 (en) | 2003-04-15 | 2005-01-18 | Advanced Technology Materials, Inc. | Abatement system targeting a by-pass effluent stream of a semiconductor process tool |
US6942753B2 (en) | 2003-04-16 | 2005-09-13 | Applied Materials, Inc. | Gas distribution plate assembly for large area plasma enhanced chemical vapor deposition |
JP2004336019A (ja) | 2003-04-18 | 2004-11-25 | Advanced Lcd Technologies Development Center Co Ltd | 成膜方法、半導体素子の形成方法、半導体素子、表示装置の形成方法及び表示装置 |
KR20050115940A (ko) | 2003-04-18 | 2005-12-08 | 가부시키가이샤 히다치 고쿠사이 덴키 | 반도체 제조 장치 및 반도체 장치의 제조 방법 |
US7077973B2 (en) | 2003-04-18 | 2006-07-18 | Applied Materials, Inc. | Methods for substrate orientation |
TW200506093A (en) | 2003-04-21 | 2005-02-16 | Aviza Tech Inc | System and method for forming multi-component films |
US7183186B2 (en) | 2003-04-22 | 2007-02-27 | Micro Technology, Inc. | Atomic layer deposited ZrTiO4 films |
US7221553B2 (en) | 2003-04-22 | 2007-05-22 | Applied Materials, Inc. | Substrate support having heat transfer system |
US6953608B2 (en) | 2003-04-23 | 2005-10-11 | Taiwan Semiconductor Manufacturing Co., Ltd. | Solution for FSG induced metal corrosion & metal peeling defects with extra bias liner and smooth RF bias ramp up |
US7335396B2 (en) | 2003-04-24 | 2008-02-26 | Micron Technology, Inc. | Methods for controlling mass flow rates and pressures in passageways coupled to reaction chambers and systems for depositing material onto microfeature workpieces in reaction chambers |
US20040261946A1 (en) | 2003-04-24 | 2004-12-30 | Tokyo Electron Limited | Plasma processing apparatus, focus ring, and susceptor |
US20040211357A1 (en) | 2003-04-24 | 2004-10-28 | Gadgil Pradad N. | Method of manufacturing a gap-filled structure of a semiconductor device |
US20040261712A1 (en) | 2003-04-25 | 2004-12-30 | Daisuke Hayashi | Plasma processing apparatus |
KR200319645Y1 (ko) | 2003-04-28 | 2003-07-12 | 이규옥 | 웨이퍼 캐리어 고정 장치 |
US7115528B2 (en) | 2003-04-29 | 2006-10-03 | Micron Technology, Inc. | Systems and method for forming silicon oxide layers |
US7375035B2 (en) | 2003-04-29 | 2008-05-20 | Ronal Systems Corporation | Host and ancillary tool interface methodology for distributed processing |
US7601223B2 (en) | 2003-04-29 | 2009-10-13 | Asm International N.V. | Showerhead assembly and ALD methods |
US7033113B2 (en) | 2003-05-01 | 2006-04-25 | Shell Oil Company | Mid-line connector and method for pipe-in-pipe electrical heating |
US20090204403A1 (en) | 2003-05-07 | 2009-08-13 | Omega Engineering, Inc. | Speech generating means for use with signal sensors |
JP2004335715A (ja) | 2003-05-07 | 2004-11-25 | Toppoly Optoelectronics Corp | シリコン酸化層の形成方法 |
US6939817B2 (en) | 2003-05-08 | 2005-09-06 | Micron Technology, Inc. | Removal of carbon from an insulative layer using ozone |
US6905944B2 (en) | 2003-05-08 | 2005-06-14 | International Business Machines Corporation | Sacrificial collar method for improved deep trench processing |
JP3642572B2 (ja) | 2003-05-09 | 2005-04-27 | 東芝三菱電機産業システム株式会社 | オゾン発生装置およびオゾン発生方法 |
US7265061B1 (en) | 2003-05-09 | 2007-09-04 | Novellus Systems, Inc. | Method and apparatus for UV exposure of low dielectric constant materials for porogen removal and improved mechanical properties |
EP1623454A2 (en) | 2003-05-09 | 2006-02-08 | ASM America, Inc. | Reactor surface passivation through chemical deactivation |
JP4152802B2 (ja) | 2003-05-09 | 2008-09-17 | 日本エー・エス・エム株式会社 | 薄膜形成装置 |
TW200507141A (en) | 2003-05-12 | 2005-02-16 | Agere Systems Inc | Method of mass flow control flow verification and calibration |
US7846254B2 (en) | 2003-05-16 | 2010-12-07 | Applied Materials, Inc. | Heat transfer assembly |
US20050000428A1 (en) | 2003-05-16 | 2005-01-06 | Shero Eric J. | Method and apparatus for vaporizing and delivering reactant |
USD505590S1 (en) | 2003-05-22 | 2005-05-31 | Kraft Foods Holdings, Inc. | Susceptor tray |
JP4403824B2 (ja) | 2003-05-26 | 2010-01-27 | 東京エレクトロン株式会社 | シリコン窒化膜の成膜方法 |
KR101104058B1 (ko) | 2003-05-27 | 2012-01-06 | 어플라이드 머티어리얼스, 인코포레이티드 | 반도체 처리 장치를 위한 프리커서를 생성하는 방법 및장치 |
US7205240B2 (en) | 2003-06-04 | 2007-04-17 | Applied Materials, Inc. | HDP-CVD multistep gapfill process |
US8512798B2 (en) | 2003-06-05 | 2013-08-20 | Superpower, Inc. | Plasma assisted metalorganic chemical vapor deposition (MOCVD) system |
US7141500B2 (en) | 2003-06-05 | 2006-11-28 | American Air Liquide, Inc. | Methods for forming aluminum containing films utilizing amino aluminum precursors |
JP2005005406A (ja) | 2003-06-10 | 2005-01-06 | Semiconductor Leading Edge Technologies Inc | 半導体装置の製造方法 |
WO2004114368A2 (en) | 2003-06-13 | 2004-12-29 | Arizona Board Of Regents, A Body Corporate Of The State Of Arizona Acting For And On Behalf Of Arizona State University | METHOD FOR PREPARING GE1-x-ySnxEy (E=P, As, Sb) SEMICONDUCTORS AND RELATED Si-Ge-Sn-E AND Si-Ge-E ANALOGS |
DE10326755A1 (de) | 2003-06-13 | 2006-01-26 | Patent-Treuhand-Gesellschaft für elektrische Glühlampen mbH | Entladungslampe mit Zweibanden-Leuchtstoff |
US7598513B2 (en) | 2003-06-13 | 2009-10-06 | Arizona Board Of Regents, Acting For And On Behalf Of Arizona State University, A Corporate Body Organized Under Arizona Law | SixSnyGe1-x-y and related alloy heterostructures based on Si, Ge and Sn |
US7589003B2 (en) | 2003-06-13 | 2009-09-15 | Arizona Board Of Regents, Acting For And On Behalf Of Arizona State University, A Corporate Body Organized Under Arizona Law | GeSn alloys and ordered phases with direct tunable bandgaps grown directly on silicon |
JP4823690B2 (ja) | 2003-06-16 | 2011-11-24 | 東京エレクトロン株式会社 | 成膜方法および半導体装置の製造方法 |
JP2007523994A (ja) | 2003-06-18 | 2007-08-23 | アプライド マテリアルズ インコーポレイテッド | バリヤ物質の原子層堆積 |
US7192824B2 (en) | 2003-06-24 | 2007-03-20 | Micron Technology, Inc. | Lanthanide oxide / hafnium oxide dielectric layers |
US6955072B2 (en) | 2003-06-25 | 2005-10-18 | Mks Instruments, Inc. | System and method for in-situ flow verification and calibration |
US7021330B2 (en) | 2003-06-26 | 2006-04-04 | Planar Systems, Inc. | Diaphragm valve with reliability enhancements for atomic layer deposition |
KR20050001793A (ko) | 2003-06-26 | 2005-01-07 | 삼성전자주식회사 | 단원자층 증착 공정의 실시간 분석 방법 |
DE10328660B3 (de) | 2003-06-26 | 2004-12-02 | Infineon Technologies Ag | Verfahren zum Bestimmen der Temperatur eines Halbleiterwafers |
US20100129548A1 (en) | 2003-06-27 | 2010-05-27 | Sundew Technologies, Llc | Ald apparatus and method |
US9725805B2 (en) | 2003-06-27 | 2017-08-08 | Spts Technologies Limited | Apparatus and method for controlled application of reactive vapors to produce thin films and coatings |
WO2005003406A2 (en) | 2003-06-27 | 2005-01-13 | Sundew Technologies, Llc | Apparatus and method for chemical source vapor pressure control |
US7833580B2 (en) | 2003-07-04 | 2010-11-16 | Samsung Electronics Co., Ltd. | Method of forming a carbon nano-material layer using a cyclic deposition technique |
WO2005007283A2 (en) | 2003-07-08 | 2005-01-27 | Sundew Technologies, Llc | Apparatus and method for downstream pressure control and sub-atmospheric reactive gas abatement |
US7547363B2 (en) | 2003-07-08 | 2009-06-16 | Tosoh Finechem Corporation | Solid organometallic compound-filled container and filling method thereof |
KR100512180B1 (ko) | 2003-07-10 | 2005-09-02 | 삼성전자주식회사 | 자기 랜덤 엑세스 메모리 소자의 자기 터널 접합 및 그의형성방법 |
US7055875B2 (en) | 2003-07-11 | 2006-06-06 | Asyst Technologies, Inc. | Ultra low contact area end effector |
KR100541050B1 (ko) | 2003-07-22 | 2006-01-11 | 삼성전자주식회사 | 가스공급장치 및 이를 이용한 반도체소자 제조설비 |
US6909839B2 (en) | 2003-07-23 | 2005-06-21 | Advanced Technology Materials, Inc. | Delivery systems for efficient vaporization of precursor source material |
KR20060056331A (ko) | 2003-07-23 | 2006-05-24 | 에이에스엠 아메리카, 인코포레이티드 | 절연체-상-실리콘 구조 및 벌크 기판 상의 SiGe 증착 |
JP4298421B2 (ja) | 2003-07-23 | 2009-07-22 | エスペック株式会社 | サーマルプレートおよび試験装置 |
US7399388B2 (en) | 2003-07-25 | 2008-07-15 | Applied Materials, Inc. | Sequential gas flow oxide deposition technique |
KR100527672B1 (ko) | 2003-07-25 | 2005-11-28 | 삼성전자주식회사 | 서셉터 및 이를 포함하는 증착 장치 |
US7072028B2 (en) | 2003-07-25 | 2006-07-04 | Lightwind Corporation | Method and apparatus for chemical monitoring |
US20050019960A1 (en) | 2003-07-25 | 2005-01-27 | Moon-Sook Lee | Method and apparatus for forming a ferroelectric layer |
US7122481B2 (en) | 2003-07-25 | 2006-10-17 | Intel Corporation | Sealing porous dielectrics with silane coupling reagents |
US7361447B2 (en) | 2003-07-30 | 2008-04-22 | Hynix Semiconductor Inc. | Photoresist polymer and photoresist composition containing the same |
TWI310850B (en) | 2003-08-01 | 2009-06-11 | Foxsemicon Integrated Tech Inc | Substrate supporting rod and substrate cassette using the same |
JP2007516599A (ja) | 2003-08-04 | 2007-06-21 | エーエスエム アメリカ インコーポレイテッド | ゲルマニウム上の堆積前の表面調製 |
US7695692B2 (en) | 2003-08-06 | 2010-04-13 | Sanderson William D | Apparatus and method for producing chlorine dioxide |
EP1661161A2 (en) | 2003-08-07 | 2006-05-31 | Sundew Technologies, LLC | Perimeter partition-valve with protected seals |
US20050037578A1 (en) | 2003-08-14 | 2005-02-17 | Wei Wen Chen | [method for forming an oxide/ nitride/oxide stacked layer] |
KR100536604B1 (ko) | 2003-08-14 | 2005-12-14 | 삼성전자주식회사 | 고밀도 플라즈마 증착법을 이용한 갭필 방법 |
US6967305B2 (en) | 2003-08-18 | 2005-11-22 | Mks Instruments, Inc. | Control of plasma transitions in sputter processing systems |
JP2005072405A (ja) | 2003-08-27 | 2005-03-17 | Sony Corp | 薄膜の形成方法および半導体装置の製造方法 |
US7422635B2 (en) | 2003-08-28 | 2008-09-09 | Micron Technology, Inc. | Methods and apparatus for processing microfeature workpieces, e.g., for depositing materials on microfeature workpieces |
US8152922B2 (en) | 2003-08-29 | 2012-04-10 | Asm America, Inc. | Gas mixer and manifold assembly for ALD reactor |
JP3881973B2 (ja) | 2003-08-29 | 2007-02-14 | 三菱重工業株式会社 | 窒化シリコン膜の成膜方法 |
JP4235066B2 (ja) | 2003-09-03 | 2009-03-04 | 日本エー・エス・エム株式会社 | 薄膜形成方法 |
US7179758B2 (en) | 2003-09-03 | 2007-02-20 | International Business Machines Corporation | Recovery of hydrophobicity of low-k and ultra low-k organosilicate films used as inter metal dielectrics |
CN100495655C (zh) | 2003-09-03 | 2009-06-03 | 东京毅力科创株式会社 | 气体处理装置和散热方法 |
JP4563729B2 (ja) | 2003-09-04 | 2010-10-13 | 東京エレクトロン株式会社 | プラズマ処理装置 |
US7235482B2 (en) | 2003-09-08 | 2007-06-26 | Taiwan Semiconductor Manufacturing Company, Ltd. | Method of manufacturing a contact interconnection layer containing a metal and nitrogen by atomic layer deposition for deep sub-micron semiconductor technology |
US7335277B2 (en) | 2003-09-08 | 2008-02-26 | Hitachi High-Technologies Corporation | Vacuum processing apparatus |
US6921711B2 (en) | 2003-09-09 | 2005-07-26 | International Business Machines Corporation | Method for forming metal replacement gate of high performance |
US7414281B1 (en) | 2003-09-09 | 2008-08-19 | Spansion Llc | Flash memory with high-K dielectric material between substrate and gate |
KR100551138B1 (ko) | 2003-09-09 | 2006-02-10 | 어댑티브프라즈마테크놀로지 주식회사 | 균일한 플라즈마 발생을 위한 적응형 플라즈마 소스 |
US7132201B2 (en) | 2003-09-12 | 2006-11-07 | Micron Technology, Inc. | Transparent amorphous carbon structure in semiconductor devices |
US7223970B2 (en) | 2003-09-17 | 2007-05-29 | Sionex Corporation | Solid-state gas flow generator and related systems, applications, and methods |
US7056806B2 (en) | 2003-09-17 | 2006-06-06 | Micron Technology, Inc. | Microfeature workpiece processing apparatus and methods for controlling deposition of materials on microfeature workpieces |
US6911399B2 (en) | 2003-09-19 | 2005-06-28 | Applied Materials, Inc. | Method of controlling critical dimension microloading of photoresist trimming process by selective sidewall polymer deposition |
CN101914760B (zh) | 2003-09-19 | 2012-08-29 | 株式会社日立国际电气 | 半导体装置的制造方法及衬底处理装置 |
JP4356410B2 (ja) | 2003-09-22 | 2009-11-04 | 株式会社日立製作所 | 化学物質探知装置及び化学物質探知方法 |
US20050098107A1 (en) | 2003-09-24 | 2005-05-12 | Du Bois Dale R. | Thermal processing system with cross-flow liner |
US20070137794A1 (en) | 2003-09-24 | 2007-06-21 | Aviza Technology, Inc. | Thermal processing system with across-flow liner |
US20050121145A1 (en) | 2003-09-25 | 2005-06-09 | Du Bois Dale R. | Thermal processing system with cross flow injection system with rotatable injectors |
JP4524554B2 (ja) | 2003-09-25 | 2010-08-18 | 信越化学工業株式会社 | γ,δ−不飽和カルボン酸及びそのシリルエステルの製造方法、カルボキシル基を有する有機ケイ素化合物及びその製造方法 |
US7156380B2 (en) | 2003-09-29 | 2007-01-02 | Asm International, N.V. | Safe liquid source containers |
US20050069651A1 (en) | 2003-09-30 | 2005-03-31 | Tokyo Electron Limited | Plasma processing system |
US7205247B2 (en) | 2003-09-30 | 2007-04-17 | Aviza Technology, Inc. | Atomic layer deposition of hafnium-based high-k dielectric |
US6875677B1 (en) | 2003-09-30 | 2005-04-05 | Sharp Laboratories Of America, Inc. | Method to control the interfacial layer for deposition of high dielectric constant films |
US6825106B1 (en) | 2003-09-30 | 2004-11-30 | Sharp Laboratories Of America, Inc. | Method of depositing a conductive niobium monoxide film for MOSFET gates |
US6982046B2 (en) | 2003-10-01 | 2006-01-03 | General Electric Company | Light sources with nanometer-sized VUV radiation-absorbing phosphors |
US7052757B2 (en) | 2003-10-03 | 2006-05-30 | Hewlett-Packard Development Company, L.P. | Capping layer for enhanced performance media |
US7408225B2 (en) | 2003-10-09 | 2008-08-05 | Asm Japan K.K. | Apparatus and method for forming thin film using upstream and downstream exhaust mechanisms |
US7166528B2 (en) | 2003-10-10 | 2007-01-23 | Applied Materials, Inc. | Methods of selective deposition of heavily doped epitaxial SiGe |
US8501594B2 (en) | 2003-10-10 | 2013-08-06 | Applied Materials, Inc. | Methods for forming silicon germanium layers |
US7647886B2 (en) | 2003-10-15 | 2010-01-19 | Micron Technology, Inc. | Systems for depositing material onto workpieces in reaction chambers and methods for removing byproducts from reaction chambers |
JP4274017B2 (ja) | 2003-10-15 | 2009-06-03 | 株式会社島津製作所 | 成膜装置 |
JP2005123532A (ja) | 2003-10-20 | 2005-05-12 | Tokyo Electron Ltd | 成膜装置及び成膜方法 |
US6974781B2 (en) | 2003-10-20 | 2005-12-13 | Asm International N.V. | Reactor precoating for reduced stress and uniform CVD |
US7094613B2 (en) | 2003-10-21 | 2006-08-22 | Applied Materials, Inc. | Method for controlling accuracy and repeatability of an etch process |
US20050092439A1 (en) | 2003-10-29 | 2005-05-05 | Keeton Tony J. | Low/high temperature substrate holder to reduce edge rolloff and backside damage |
KR100587669B1 (ko) | 2003-10-29 | 2006-06-08 | 삼성전자주식회사 | 반도체 장치에서의 저항 소자 형성방법. |
US7020981B2 (en) | 2003-10-29 | 2006-04-04 | Asm America, Inc | Reaction system for growing a thin film |
US7108753B2 (en) | 2003-10-29 | 2006-09-19 | Asm America, Inc. | Staggered ribs on process chamber to reduce thermal effects |
US20050095859A1 (en) | 2003-11-03 | 2005-05-05 | Applied Materials, Inc. | Precursor delivery system with rate control |
US20050101843A1 (en) | 2003-11-06 | 2005-05-12 | Welch Allyn, Inc. | Wireless disposable physiological sensor |
US7329947B2 (en) | 2003-11-07 | 2008-02-12 | Sumitomo Mitsubishi Silicon Corporation | Heat treatment jig for semiconductor substrate |
US8313277B2 (en) | 2003-11-10 | 2012-11-20 | Brooks Automation, Inc. | Semiconductor manufacturing process modules |
US7071118B2 (en) | 2003-11-12 | 2006-07-04 | Veeco Instruments, Inc. | Method and apparatus for fabricating a conformal thin film on a substrate |
US20050153571A1 (en) | 2003-11-17 | 2005-07-14 | Yoshihide Senzaki | Nitridation of high-k dielectric films |
KR100802990B1 (ko) | 2003-11-20 | 2008-02-14 | 가부시키가이샤 히다치 고쿠사이 덴키 | 반도체장치의 제조 방법 및 기판처리장치 |
KR100550641B1 (ko) | 2003-11-22 | 2006-02-09 | 주식회사 하이닉스반도체 | 산화하프늄과 산화알루미늄이 혼합된 유전막 및 그 제조방법 |
US7055263B2 (en) | 2003-11-25 | 2006-06-06 | Air Products And Chemicals, Inc. | Method for cleaning deposition chambers for high dielectric constant materials |
KR20050053417A (ko) | 2003-12-02 | 2005-06-08 | 한국전자통신연구원 | 래디칼 보조 산화 장치 |
KR20050054122A (ko) | 2003-12-04 | 2005-06-10 | 성명모 | 자외선 원자층 증착법을 이용한 박막 제조 방법 |
US20050120805A1 (en) | 2003-12-04 | 2005-06-09 | John Lane | Method and apparatus for substrate temperature control |
JP4725085B2 (ja) | 2003-12-04 | 2011-07-13 | 株式会社豊田中央研究所 | 非晶質炭素、非晶質炭素被膜部材および非晶質炭素膜の成膜方法 |
US7431966B2 (en) | 2003-12-09 | 2008-10-07 | Micron Technology, Inc. | Atomic layer deposition method of depositing an oxide on a substrate |
US7143897B1 (en) | 2003-12-09 | 2006-12-05 | H20 International, Inc. | Water filter |
JP2005172489A (ja) | 2003-12-09 | 2005-06-30 | Tokyo Yogyo Co Ltd | 溶湯用測温プローブ |
KR100519798B1 (ko) | 2003-12-11 | 2005-10-10 | 삼성전자주식회사 | 향상된 생산성을 갖는 박막 형성 방법 |
US7301623B1 (en) | 2003-12-16 | 2007-11-27 | Nanometrics Incorporated | Transferring, buffering and measuring a substrate in a metrology system |
US7220497B2 (en) | 2003-12-18 | 2007-05-22 | Lam Research Corporation | Yttria-coated ceramic components of semiconductor material processing apparatuses and methods of manufacturing the components |
US20050133166A1 (en) | 2003-12-19 | 2005-06-23 | Applied Materials, Inc. | Tuned potential pedestal for mask etch processing apparatus |
US7569193B2 (en) | 2003-12-19 | 2009-08-04 | Applied Materials, Inc. | Apparatus and method for controlled combustion of gaseous pollutants |
JP2007518878A (ja) | 2003-12-22 | 2007-07-12 | セコ ツールズ アクティエボラーグ | 切削工具を被覆するための支持物体とその方法 |
US7645341B2 (en) | 2003-12-23 | 2010-01-12 | Lam Research Corporation | Showerhead electrode assembly for plasma processing apparatuses |
US7662689B2 (en) | 2003-12-23 | 2010-02-16 | Intel Corporation | Strained transistor integration for CMOS |
US20050148162A1 (en) | 2004-01-02 | 2005-07-07 | Huajie Chen | Method of preventing surface roughening during hydrogen pre-bake of SiGe substrates using chlorine containing gases |
KR100620673B1 (ko) | 2004-01-05 | 2006-09-13 | 주식회사 하이닉스반도체 | 포토레지스트 세정액 조성물 및 이를 이용한 패턴 형성 방법 |
KR100593960B1 (ko) | 2004-01-09 | 2006-06-30 | 병호 최 | 광원자층 증착장치 및 증착방법 |
US7892357B2 (en) | 2004-01-12 | 2011-02-22 | Axcelis Technologies, Inc. | Gas distribution plate assembly for plasma reactors |
JP4583764B2 (ja) | 2004-01-14 | 2010-11-17 | ルネサスエレクトロニクス株式会社 | 半導体装置およびその製造方法 |
KR100549273B1 (ko) | 2004-01-15 | 2006-02-03 | 주식회사 테라세미콘 | 반도체 제조장치의 기판홀더 |
JP4513329B2 (ja) | 2004-01-16 | 2010-07-28 | 東京エレクトロン株式会社 | 処理装置 |
USD535673S1 (en) | 2004-01-16 | 2007-01-23 | Thermal Dynamics Corporation | Gas distributor for a plasma arc torch |
US7071051B1 (en) | 2004-01-20 | 2006-07-04 | Advanced Micro Devices, Inc. | Method for forming a thin, high quality buffer layer in a field effect transistor and related structure |
US7005227B2 (en) | 2004-01-21 | 2006-02-28 | Intel Corporation | One component EUV photoresist |
US7128570B2 (en) | 2004-01-21 | 2006-10-31 | Asm International N.V. | Method and apparatus for purging seals in a thermal reactor |
KR100848226B1 (ko) | 2004-01-21 | 2008-07-24 | 가부시키가이샤 히다치 고쿠사이 덴키 | 반도체 장치의 제조 방법 및 기판 처리 장치 |
US7354847B2 (en) | 2004-01-26 | 2008-04-08 | Taiwan Semiconductor Manufacturing Company | Method of trimming technology |
US20050164469A1 (en) | 2004-01-28 | 2005-07-28 | Infineon Technologies North America Corp. | Method for N+ doping of amorphous silicon and polysilicon electrodes in deep trenches |
JP4722501B2 (ja) | 2004-01-29 | 2011-07-13 | 三星電子株式会社 | 半導体素子の多層誘電体構造物、半導体及びその製造方法 |
CN100452306C (zh) | 2004-01-30 | 2009-01-14 | 东京毅力科创株式会社 | 具有流体间隙的衬底保持器和制造衬底保持器的方法 |
US7163393B2 (en) | 2004-02-02 | 2007-01-16 | Sumitomo Mitsubishi Silicon Corporation | Heat treatment jig for semiconductor silicon substrate |
DE102004005385A1 (de) | 2004-02-03 | 2005-10-20 | Infineon Technologies Ag | Verwendung von gelösten Hafniumalkoxiden bzw. Zirkoniumalkoxiden als Precursoren für Hafniumoxid- und Hafniumoxynitridschichten bzw. Zirkoniumoxid- und Zirkoniumoxynitridschichten |
KR101112029B1 (ko) | 2004-02-13 | 2012-03-21 | 에이에스엠 아메리카, 인코포레이티드 | 자동 도핑 및 후면 증착의 감소를 위한 기판 지지 시스템 |
JP4364667B2 (ja) | 2004-02-13 | 2009-11-18 | 東京エレクトロン株式会社 | 溶射部材、電極、およびプラズマ処理装置 |
US20050229849A1 (en) | 2004-02-13 | 2005-10-20 | Applied Materials, Inc. | High productivity plasma processing chamber |
TWI263709B (en) | 2004-02-17 | 2006-10-11 | Ind Tech Res Inst | Structure of strain relaxed thin Si/Ge epitaxial layer and fabricating method thereof |
US20050181535A1 (en) | 2004-02-17 | 2005-08-18 | Yun Sun J. | Method of fabricating passivation layer for organic devices |
US20050178333A1 (en) | 2004-02-18 | 2005-08-18 | Asm Japan K.K. | System and method of CVD chamber cleaning |
US7088003B2 (en) | 2004-02-19 | 2006-08-08 | International Business Machines Corporation | Structures and methods for integration of ultralow-k dielectrics with improved reliability |
US20050187647A1 (en) | 2004-02-19 | 2005-08-25 | Kuo-Hua Wang | Intelligent full automation controlled flow for a semiconductor furnace tool |
JP4698251B2 (ja) | 2004-02-24 | 2011-06-08 | アプライド マテリアルズ インコーポレイテッド | 可動又は柔軟なシャワーヘッド取り付け |
US20100297391A1 (en) | 2004-02-25 | 2010-11-25 | General Nanotechnoloy Llc | Diamond capsules and methods of manufacture |
JP4354987B2 (ja) | 2004-02-27 | 2009-10-28 | 株式会社日立国際電気 | 基板処理装置 |
USD525127S1 (en) | 2004-03-01 | 2006-07-18 | Kraft Foods Holdings, Inc. | Susceptor ring |
US20050214458A1 (en) | 2004-03-01 | 2005-09-29 | Meiere Scott H | Low zirconium hafnium halide compositions |
US20060062910A1 (en) | 2004-03-01 | 2006-03-23 | Meiere Scott H | Low zirconium, hafnium-containing compositions, processes for the preparation thereof and methods of use thereof |
JP5058785B2 (ja) | 2004-03-02 | 2012-10-24 | ローズマウント インコーポレイテッド | 改良された発電を備えたプロセス装置 |
US20050233477A1 (en) | 2004-03-05 | 2005-10-20 | Tokyo Electron Limited | Substrate processing apparatus, substrate processing method, and program for implementing the method |
US7098150B2 (en) | 2004-03-05 | 2006-08-29 | Air Liquide America L.P. | Method for novel deposition of high-k MSiON dielectric films |
CN100373545C (zh) | 2004-03-05 | 2008-03-05 | 东京毅力科创株式会社 | 基板处理装置、基板处理方法及程序 |
WO2005087974A2 (en) | 2004-03-05 | 2005-09-22 | Applied Materials, Inc. | Cvd processes for the deposition of amorphous carbon films |
ES2336224T3 (es) | 2004-03-08 | 2010-04-09 | Adc Telecommunications, Inc. | Terminal de acceso de fibras. |
JP4246654B2 (ja) | 2004-03-08 | 2009-04-02 | 株式会社日立ハイテクノロジーズ | 真空処理装置 |
US7072743B2 (en) | 2004-03-09 | 2006-07-04 | Mks Instruments, Inc. | Semiconductor manufacturing gas flow divider system and method |
US7079740B2 (en) | 2004-03-12 | 2006-07-18 | Applied Materials, Inc. | Use of amorphous carbon film as a hardmask in the fabrication of optical waveguides |
KR100538096B1 (ko) | 2004-03-16 | 2005-12-21 | 삼성전자주식회사 | 원자층 증착 방법을 이용하는 커패시터 형성 방법 |
US7053010B2 (en) | 2004-03-22 | 2006-05-30 | Micron Technology, Inc. | Methods of depositing silicon dioxide comprising layers in the fabrication of integrated circuitry, methods of forming trench isolation, and methods of forming arrays of memory cells |
US7582555B1 (en) | 2005-12-29 | 2009-09-01 | Novellus Systems, Inc. | CVD flowable gap fill |
US7074690B1 (en) | 2004-03-25 | 2006-07-11 | Novellus Systems, Inc. | Selective gap-fill process |
US7524735B1 (en) | 2004-03-25 | 2009-04-28 | Novellus Systems, Inc | Flowable film dielectric gap fill process |
US20050214457A1 (en) | 2004-03-29 | 2005-09-29 | Applied Materials, Inc. | Deposition of low dielectric constant films by N2O addition |
US20050221618A1 (en) | 2004-03-31 | 2005-10-06 | Amrhein Frederick J | System for controlling a plenum output flow geometry |
US20070087579A1 (en) | 2004-03-31 | 2007-04-19 | Hitachi Kokusai Electric Inc. | Semiconductor device manufacturing method |
US20050221021A1 (en) | 2004-03-31 | 2005-10-06 | Tokyo Electron Limited | Method and system for performing atomic layer deposition |
CN1292092C (zh) | 2004-04-01 | 2006-12-27 | 南昌大学 | 用于金属有机化学气相沉积设备的双层进气喷头 |
US7585371B2 (en) | 2004-04-08 | 2009-09-08 | Micron Technology, Inc. | Substrate susceptors for receiving semiconductor substrates to be deposited upon |
US20050227502A1 (en) | 2004-04-12 | 2005-10-13 | Applied Materials, Inc. | Method for forming an ultra low dielectric film by forming an organosilicon matrix and large porogens as a template for increased porosity |
US7273526B2 (en) | 2004-04-15 | 2007-09-25 | Asm Japan K.K. | Thin-film deposition apparatus |
US20060019502A1 (en) | 2004-07-23 | 2006-01-26 | Park Beom S | Method of controlling the film properties of a CVD-deposited silicon nitride film |
US7785672B2 (en) | 2004-04-20 | 2010-08-31 | Applied Materials, Inc. | Method of controlling the film properties of PECVD-deposited thin films |
US8083853B2 (en) | 2004-05-12 | 2011-12-27 | Applied Materials, Inc. | Plasma uniformity control by gas diffuser hole design |
USD553104S1 (en) | 2004-04-21 | 2007-10-16 | Tokyo Electron Limited | Absorption board for an electric chuck used in semiconductor manufacture |
KR100840705B1 (ko) | 2004-04-21 | 2008-06-24 | 가부시키가이샤 히다치 고쿠사이 덴키 | 열처리장치 |
US7018941B2 (en) | 2004-04-21 | 2006-03-28 | Applied Materials, Inc. | Post treatment of low k dielectric films |
US20050238807A1 (en) | 2004-04-27 | 2005-10-27 | Applied Materials, Inc. | Refurbishment of a coated chamber component |
WO2005106450A1 (en) | 2004-04-28 | 2005-11-10 | Sionex Corporation | System and method for ion species analysis with enhanced condition control and data interpretation using differential mobility spectrometers |
US7708859B2 (en) | 2004-04-30 | 2010-05-04 | Lam Research Corporation | Gas distribution system having fast gas switching capabilities |
US7712434B2 (en) | 2004-04-30 | 2010-05-11 | Lam Research Corporation | Apparatus including showerhead electrode and heater for plasma processing |
ATE503866T1 (de) | 2004-04-30 | 2011-04-15 | Dichroic Cell S R L | Verfahren zur herstellung von virtuellen ge- substraten zur iii/v-integration auf si(001) |
US20070066038A1 (en) | 2004-04-30 | 2007-03-22 | Lam Research Corporation | Fast gas switching plasma processing apparatus |
US7049247B2 (en) | 2004-05-03 | 2006-05-23 | International Business Machines Corporation | Method for fabricating an ultralow dielectric constant material as an intralevel or interlevel dielectric in a semiconductor device and electronic device made |
US6982208B2 (en) | 2004-05-03 | 2006-01-03 | Taiwan Semiconductor Manufacturing Co., Ltd. | Method for producing high throughput strained-Si channel MOSFETS |
JP2005322668A (ja) | 2004-05-06 | 2005-11-17 | Renesas Technology Corp | 成膜装置および成膜方法 |
US7109114B2 (en) | 2004-05-07 | 2006-09-19 | Applied Materials, Inc. | HDP-CVD seasoning process for high power HDP-CVD gapfil to improve particle performance |
US7202148B2 (en) | 2004-05-10 | 2007-04-10 | Taiwan Semiconductor Manufacturing Company | Method utilizing compensation features in semiconductor processing |
US20050252447A1 (en) | 2004-05-11 | 2005-11-17 | Applied Materials, Inc. | Gas blocker plate for improved deposition |
US8074599B2 (en) | 2004-05-12 | 2011-12-13 | Applied Materials, Inc. | Plasma uniformity control by gas diffuser curvature |
US20050252449A1 (en) | 2004-05-12 | 2005-11-17 | Nguyen Son T | Control of gas flow and delivery to suppress the formation of particles in an MOCVD/ALD system |
US8328939B2 (en) | 2004-05-12 | 2012-12-11 | Applied Materials, Inc. | Diffuser plate with slit valve compensation |
WO2005109486A1 (en) | 2004-05-12 | 2005-11-17 | Viatron Technologies Inc. | System for heat treatment of semiconductor device |
US7748138B2 (en) | 2004-05-13 | 2010-07-06 | Tokyo Electron Limited | Particle removal method for a substrate transfer mechanism and apparatus |
JP5042820B2 (ja) | 2004-05-14 | 2012-10-03 | ベクトン・ディキンソン・アンド・カンパニー | 生物活性表面を有する物品およびそれらの無溶媒調製法 |
KR100469132B1 (ko) | 2004-05-18 | 2005-01-29 | 주식회사 아이피에스 | 주기적 펄스 두 단계 플라즈마 원자층 증착장치 및 방법 |
CN100594261C (zh) | 2004-05-18 | 2010-03-17 | 胜高股份有限公司 | 气相生长装置用基座 |
US20060019033A1 (en) | 2004-05-21 | 2006-01-26 | Applied Materials, Inc. | Plasma treatment of hafnium-containing materials |
US8119210B2 (en) | 2004-05-21 | 2012-02-21 | Applied Materials, Inc. | Formation of a silicon oxynitride layer on a high-k dielectric material |
US7271093B2 (en) | 2004-05-24 | 2007-09-18 | Asm Japan K.K. | Low-carbon-doped silicon oxide film and damascene structure using same |
US7396746B2 (en) | 2004-05-24 | 2008-07-08 | Varian Semiconductor Equipment Associates, Inc. | Methods for stable and repeatable ion implantation |
JP2005340251A (ja) | 2004-05-24 | 2005-12-08 | Shin Etsu Chem Co Ltd | プラズマ処理装置用のシャワープレート及びプラズマ処理装置 |
US7622005B2 (en) | 2004-05-26 | 2009-11-24 | Applied Materials, Inc. | Uniformity control for low flow process and chamber to chamber matching |
US20050266173A1 (en) | 2004-05-26 | 2005-12-01 | Tokyo Electron Limited | Method and apparatus of distributed plasma processing system for conformal ion stimulated nanoscale deposition process |
US7229502B2 (en) | 2004-05-27 | 2007-06-12 | Macronix International Co., Ltd. | Method of forming a silicon nitride layer |
JP3972126B2 (ja) | 2004-05-28 | 2007-09-05 | 独立行政法人産業技術総合研究所 | 紫外線発生源、紫外線照射処理装置及び半導体製造装置 |
US7580388B2 (en) | 2004-06-01 | 2009-08-25 | Lg Electronics Inc. | Method and apparatus for providing enhanced messages on common control channel in wireless communication system |
US7699932B2 (en) | 2004-06-02 | 2010-04-20 | Micron Technology, Inc. | Reactors, systems and methods for depositing thin films onto microfeature workpieces |
JP4503356B2 (ja) | 2004-06-02 | 2010-07-14 | 東京エレクトロン株式会社 | 基板処理方法および半導体装置の製造方法 |
US7651583B2 (en) | 2004-06-04 | 2010-01-26 | Tokyo Electron Limited | Processing system and method for treating a substrate |
US7037794B2 (en) | 2004-06-09 | 2006-05-02 | International Business Machines Corporation | Raised STI process for multiple gate ox and sidewall protection on strained Si/SGOI structure with elevated source/drain |
KR100589062B1 (ko) | 2004-06-10 | 2006-06-12 | 삼성전자주식회사 | 원자층 적층 방식의 박막 형성방법 및 이를 이용한 반도체소자의 커패시터 형성방법 |
US7396743B2 (en) | 2004-06-10 | 2008-07-08 | Singh Kaushal K | Low temperature epitaxial growth of silicon-containing films using UV radiation |
US7132360B2 (en) | 2004-06-10 | 2006-11-07 | Freescale Semiconductor, Inc. | Method for treating a semiconductor surface to form a metal-containing layer |
DE602005017272D1 (de) | 2004-06-10 | 2009-12-03 | Humanscale Corp | Mechanismus für die positionsverstellung einer angebrachten vorrichtung |
JP4565897B2 (ja) | 2004-06-14 | 2010-10-20 | 株式会社Adeka | 薄膜形成用原料及び薄膜の製造方法 |
GB0413554D0 (en) | 2004-06-17 | 2004-07-21 | Point 35 Microstructures Ltd | Improved method and apparartus for the etching of microstructures |
US7399570B2 (en) | 2004-06-18 | 2008-07-15 | Hynix Semiconductor Inc. | Water-soluble negative photoresist polymer and composition containing the same |
US7446335B2 (en) | 2004-06-18 | 2008-11-04 | Regents Of The University Of Minnesota | Process and apparatus for forming nanoparticles using radiofrequency plasmas |
US7951262B2 (en) | 2004-06-21 | 2011-05-31 | Tokyo Electron Limited | Plasma processing apparatus and method |
CN102256432B (zh) | 2004-06-21 | 2014-10-29 | 东京毅力科创株式会社 | 等离子体处理装置和方法 |
JP4534619B2 (ja) | 2004-06-21 | 2010-09-01 | 株式会社Sumco | 半導体シリコン基板用熱処理治具 |
US20050282350A1 (en) | 2004-06-22 | 2005-12-22 | You-Hua Chou | Atomic layer deposition for filling a gap between devices |
KR20050121426A (ko) | 2004-06-22 | 2005-12-27 | 삼성에스디아이 주식회사 | 탄소나노튜브 제조용 촉매의 제조 방법 |
US7244958B2 (en) | 2004-06-24 | 2007-07-17 | International Business Machines Corporation | Integration of strained Ge into advanced CMOS technology |
US20050284573A1 (en) | 2004-06-24 | 2005-12-29 | Egley Fred D | Bare aluminum baffles for resist stripping chambers |
US7073834B2 (en) | 2004-06-25 | 2006-07-11 | Applied Materials, Inc. | Multiple section end effector assembly |
US20050285208A1 (en) | 2004-06-25 | 2005-12-29 | Chi Ren | Metal gate electrode for semiconductor devices |
US8202575B2 (en) | 2004-06-28 | 2012-06-19 | Cambridge Nanotech, Inc. | Vapor deposition systems and methods |
US20060006538A1 (en) | 2004-07-02 | 2006-01-12 | Lsi Logic Corporation | Extreme low-K interconnect structure and method |
KR100614801B1 (ko) | 2004-07-05 | 2006-08-22 | 삼성전자주식회사 | 반도체 장치의 막 형성방법 |
US7363195B2 (en) | 2004-07-07 | 2008-04-22 | Sensarray Corporation | Methods of configuring a sensor network |
US7687997B2 (en) | 2004-07-09 | 2010-03-30 | Koninklijke Philips Electronics N.V. | UVC/VUV dielectric barrier discharge lamp with reflector |
US7422653B2 (en) | 2004-07-13 | 2008-09-09 | Applied Materials, Inc. | Single-sided inflatable vertical slit valve |
US7094442B2 (en) | 2004-07-13 | 2006-08-22 | Applied Materials, Inc. | Methods for the reduction and elimination of particulate contamination with CVD of amorphous carbon |
KR100831933B1 (ko) | 2004-07-13 | 2008-05-23 | 가부시키가이샤 히다치 고쿠사이 덴키 | 기판처리장치 및 반도체장치의 제조방법 |
US7409263B2 (en) | 2004-07-14 | 2008-08-05 | Applied Materials, Inc. | Methods and apparatus for repositioning support for a substrate carrier |
JP4674061B2 (ja) | 2004-07-14 | 2011-04-20 | 株式会社アルバック | 薄膜形成方法 |
KR100578819B1 (ko) | 2004-07-15 | 2006-05-11 | 삼성전자주식회사 | 원자층 적층 방법과 이를 이용한 게이트 구조물의 제조방법 및 커패시터의 제조 방법 |
US7241686B2 (en) | 2004-07-20 | 2007-07-10 | Applied Materials, Inc. | Atomic layer deposition of tantalum-containing materials using the tantalum precursor TAIMATA |
US20060016783A1 (en) | 2004-07-22 | 2006-01-26 | Dingjun Wu | Process for titanium nitride removal |
JP4179311B2 (ja) | 2004-07-28 | 2008-11-12 | 東京エレクトロン株式会社 | 成膜方法、成膜装置及び記憶媒体 |
US20060021703A1 (en) | 2004-07-29 | 2006-02-02 | Applied Materials, Inc. | Dual gas faceplate for a showerhead in a semiconductor wafer processing system |
PL1771599T3 (pl) | 2004-07-30 | 2008-04-30 | Lpe Spa | Reaktor epitaksjalny z kontrolowaną pozycją podstawy |
KR100689401B1 (ko) | 2004-07-30 | 2007-03-08 | 주식회사 하이닉스반도체 | 포토레지스트 중합체 및 이를 함유하는 포토레지스트 조성물 |
JP4417197B2 (ja) | 2004-07-30 | 2010-02-17 | 住友大阪セメント株式会社 | サセプタ装置 |
US20060021572A1 (en) | 2004-07-30 | 2006-02-02 | Colorado School Of Mines | High Vacuum Plasma-Assisted Chemical Vapor Deposition System |
US7689687B2 (en) | 2004-07-30 | 2010-03-30 | Fisher-Rosemount Systems, Inc. | Communication controller with automatic time stamping |
US7601649B2 (en) | 2004-08-02 | 2009-10-13 | Micron Technology, Inc. | Zirconium-doped tantalum oxide films |
US20090011150A1 (en) | 2004-08-04 | 2009-01-08 | Hyeong-Tag Jeon | Remote Plasma Atomic Layer Deposition Apparatus and Method Using Dc Bias |
JP4718141B2 (ja) | 2004-08-06 | 2011-07-06 | 東京エレクトロン株式会社 | 薄膜形成方法及び薄膜形成装置 |
US7470633B2 (en) | 2004-08-09 | 2008-12-30 | Asm Japan K.K. | Method of forming a carbon polymer film using plasma CVD |
US7504344B2 (en) | 2004-08-09 | 2009-03-17 | Asm Japan K.K. | Method of forming a carbon polymer film using plasma CVD |
US7955646B2 (en) | 2004-08-09 | 2011-06-07 | Applied Materials, Inc. | Elimination of flow and pressure gradients in low utilization processes |
KR101114219B1 (ko) | 2004-08-09 | 2012-03-05 | 주성엔지니어링(주) | 광원을 포함하는 원자층 증착장치 및 이를 이용한 증착방법 |
CN101040371A (zh) | 2004-08-16 | 2007-09-19 | 阿维扎技术公司 | 用于形成多组分介电薄膜的直接液体注入系统和方法 |
JP2006059931A (ja) | 2004-08-18 | 2006-03-02 | Canon Anelva Corp | 急速加熱処理装置 |
US20060040054A1 (en) | 2004-08-18 | 2006-02-23 | Pearlstein Ronald M | Passivating ALD reactor chamber internal surfaces to prevent residue buildup |
US7119032B2 (en) | 2004-08-23 | 2006-10-10 | Air Products And Chemicals, Inc. | Method to protect internal components of semiconductor processing equipment using layered superlattice materials |
JP4348542B2 (ja) | 2004-08-24 | 2009-10-21 | 信越半導体株式会社 | 石英治具及び半導体製造装置 |
USD524600S1 (en) | 2004-08-26 | 2006-07-11 | Maytag Corporation | Convection cover for cooking appliance |
KR101071136B1 (ko) | 2004-08-27 | 2011-10-10 | 엘지디스플레이 주식회사 | 평판표시장치의 제조를 위한 기판의 박막처리장치 |
ITMI20041677A1 (it) | 2004-08-30 | 2004-11-30 | E T C Epitaxial Technology Ct | Processo di pulitura e processo operativo per un reattore cvd. |
US8158488B2 (en) | 2004-08-31 | 2012-04-17 | Micron Technology, Inc. | Method of increasing deposition rate of silicon dioxide on a catalyst |
DE102004042431B4 (de) | 2004-08-31 | 2008-07-03 | Schott Ag | Verfahren und Vorrichtung zur Plasmabeschichtung von Werkstücken mit spektraler Auswertung der Prozessparameter und Verwendung der Vorrichtung |
US7910288B2 (en) | 2004-09-01 | 2011-03-22 | Micron Technology, Inc. | Mask material conversion |
US7253084B2 (en) | 2004-09-03 | 2007-08-07 | Asm America, Inc. | Deposition from liquid sources |
JP2006108629A (ja) | 2004-09-10 | 2006-04-20 | Toshiba Corp | 半導体装置の製造方法 |
US20060137609A1 (en) | 2004-09-13 | 2006-06-29 | Puchacz Jerzy P | Multi-single wafer processing apparatus |
WO2006034025A1 (en) | 2004-09-16 | 2006-03-30 | Arizona Board Of Regents | MATERIALS AND OPTICAL DEVICES BASED ON GROUP IV QUANTUM WELLS GROWN ON Si-Ge-Sn BUFFERED SILICON |
US8882914B2 (en) | 2004-09-17 | 2014-11-11 | Intermolecular, Inc. | Processing substrates using site-isolated processing |
US8084400B2 (en) | 2005-10-11 | 2011-12-27 | Intermolecular, Inc. | Methods for discretized processing and process sequence integration of regions of a substrate |
US20060060930A1 (en) | 2004-09-17 | 2006-03-23 | Metz Matthew V | Atomic layer deposition of high dielectric constant gate dielectrics |
JP4698190B2 (ja) | 2004-09-22 | 2011-06-08 | 川惣電機工業株式会社 | 測温装置 |
JP2006097044A (ja) | 2004-09-28 | 2006-04-13 | L'air Liquide Sa Pour L'etude & L'exploitation Des Procede S Georges Claude | 成膜用前駆体、ルテニウム含有膜の成膜方法、ルテニウム膜の成膜方法、ルテニウム酸化物膜の成膜方法およびルテニウム酸塩膜の成膜方法 |
JP4572100B2 (ja) | 2004-09-28 | 2010-10-27 | 日本エー・エス・エム株式会社 | プラズマ処理装置 |
US7806587B2 (en) | 2004-09-29 | 2010-10-05 | Citizen Holdings Co., Ltd. | Electronic clinical thermometer and method of producing the same |
DE102005045081B4 (de) | 2004-09-29 | 2011-07-07 | Covalent Materials Corp. | Suszeptor |
US7189431B2 (en) | 2004-09-30 | 2007-03-13 | Tokyo Electron Limited | Method for forming a passivated metal layer |
US7241475B2 (en) | 2004-09-30 | 2007-07-10 | The Aerospace Corporation | Method for producing carbon surface films by plasma exposure of a carbide compound |
JP2006124832A (ja) | 2004-09-30 | 2006-05-18 | Nichias Corp | 気相成長装置及び気相成長法 |
JP2006124831A (ja) | 2004-09-30 | 2006-05-18 | Nichias Corp | 気相成長用反応容器及び気相成長方法 |
US7361958B2 (en) | 2004-09-30 | 2008-04-22 | Intel Corporation | Nonplanar transistors with metal gate electrodes |
US6874247B1 (en) | 2004-10-12 | 2005-04-05 | Tsang-Hung Hsu | Toothbrush dryer |
US20060257563A1 (en) | 2004-10-13 | 2006-11-16 | Seok-Joo Doh | Method of fabricating silicon-doped metal oxide layer using atomic layer deposition technique |
US7674726B2 (en) | 2004-10-15 | 2010-03-09 | Asm International N.V. | Parts for deposition reactors |
US7427571B2 (en) | 2004-10-15 | 2008-09-23 | Asm International, N.V. | Reactor design for reduced particulate generation |
US20060099782A1 (en) | 2004-10-15 | 2006-05-11 | Massachusetts Institute Of Technology | Method for forming an interface between germanium and other materials |
CN101061578A (zh) | 2004-10-19 | 2007-10-24 | 佳能安内华股份有限公司 | 基板支撑·运送用托盘 |
JP2006128188A (ja) | 2004-10-26 | 2006-05-18 | Nikon Corp | 基板搬送装置、基板搬送方法および露光装置 |
US7790633B1 (en) | 2004-10-26 | 2010-09-07 | Novellus Systems, Inc. | Sequential deposition/anneal film densification method |
KR100754386B1 (ko) | 2004-10-28 | 2007-08-31 | 삼성전자주식회사 | 양방향 화학기상증착 시스템 및 이를 이용한 펄스형 공정진행 방법 |
US7163900B2 (en) | 2004-11-01 | 2007-01-16 | Infineon Technologies Ag | Using polydentate ligands for sealing pores in low-k dielectrics |
US7727880B1 (en) | 2004-11-03 | 2010-06-01 | Novellus Systems, Inc. | Protective self-aligned buffer layers for damascene interconnects |
US20060093756A1 (en) | 2004-11-03 | 2006-05-04 | Nagarajan Rajagopalan | High-power dielectric seasoning for stable wafer-to-wafer thickness uniformity of dielectric CVD films |
US7189626B2 (en) | 2004-11-03 | 2007-03-13 | Micron Technology, Inc. | Electroless plating of metal caps for chalcogenide-based memory devices |
JP2006135161A (ja) | 2004-11-08 | 2006-05-25 | Canon Inc | 絶縁膜の形成方法及び装置 |
KR100728962B1 (ko) | 2004-11-08 | 2007-06-15 | 주식회사 하이닉스반도체 | 지르코늄산화막을 갖는 반도체소자의 캐패시터 및 그 제조방법 |
JP4435666B2 (ja) | 2004-11-09 | 2010-03-24 | 東京エレクトロン株式会社 | プラズマ処理方法、成膜方法 |
KR100742276B1 (ko) | 2004-11-10 | 2007-07-24 | 삼성전자주식회사 | 저유전율 유전막을 제거하기 위한 식각 용액 및 이를이용한 저유전율 유전막 식각 방법 |
KR100782369B1 (ko) | 2004-11-11 | 2007-12-07 | 삼성전자주식회사 | 반도체 제조장치 |
US7678682B2 (en) | 2004-11-12 | 2010-03-16 | Axcelis Technologies, Inc. | Ultraviolet assisted pore sealing of porous low k dielectric films |
US7428958B2 (en) | 2004-11-15 | 2008-09-30 | Nikon Corporation | Substrate conveyor apparatus, substrate conveyance method and exposure apparatus |
US7242055B2 (en) | 2004-11-15 | 2007-07-10 | International Business Machines Corporation | Nitrogen-containing field effect transistor gate stack containing a threshold voltage control layer formed via deposition of a metal oxide |
KR100773755B1 (ko) | 2004-11-18 | 2007-11-09 | 주식회사 아이피에스 | 플라즈마 ald 박막증착방법 |
TWI536429B (zh) | 2004-11-18 | 2016-06-01 | 尼康股份有限公司 | A position measuring method, a position control method, a measuring method, a loading method, an exposure method and an exposure apparatus, and a device manufacturing method |
US20060107898A1 (en) | 2004-11-19 | 2006-05-25 | Blomberg Tom E | Method and apparatus for measuring consumption of reactants |
US20070134821A1 (en) | 2004-11-22 | 2007-06-14 | Randhir Thakur | Cluster tool for advanced front-end processing |
US20060156979A1 (en) | 2004-11-22 | 2006-07-20 | Applied Materials, Inc. | Substrate processing apparatus using a batch processing chamber |
US20060108221A1 (en) | 2004-11-24 | 2006-05-25 | William Goodwin | Method and apparatus for improving measuring accuracy in gas monitoring systems |
CN101728206B (zh) | 2004-11-24 | 2011-11-23 | 欧瑞康太阳能股份公司(特吕巴赫) | 用于非常大面积基片的真空处理室 |
JP4646752B2 (ja) | 2004-11-29 | 2011-03-09 | 株式会社神戸製鋼所 | 高配向ダイヤモンド膜及びその製造方法並びに高配向ダイヤモンド膜を備えた電子デバイス |
US20060113806A1 (en) | 2004-11-29 | 2006-06-01 | Asm Japan K.K. | Wafer transfer mechanism |
US8435351B2 (en) | 2004-11-29 | 2013-05-07 | Tokyo Electron Limited | Method and system for measuring a flow rate in a solid precursor delivery system |
US7722737B2 (en) | 2004-11-29 | 2010-05-25 | Applied Materials, Inc. | Gas distribution system for improved transient phase deposition |
JP4512098B2 (ja) | 2004-11-29 | 2010-07-28 | 株式会社日立国際電気 | 半導体装置の製造方法及び基板処理装置 |
JP2006153706A (ja) | 2004-11-30 | 2006-06-15 | Taiyo Nippon Sanso Corp | 測温体および気相成長装置 |
JP4830290B2 (ja) | 2004-11-30 | 2011-12-07 | 信越半導体株式会社 | 直接接合ウェーハの製造方法 |
US20060113675A1 (en) | 2004-12-01 | 2006-06-01 | Chung-Liang Chang | Barrier material and process for Cu interconnect |
US20060118240A1 (en) | 2004-12-03 | 2006-06-08 | Applied Science And Technology, Inc. | Methods and apparatus for downstream dissociation of gases |
US7368377B2 (en) | 2004-12-09 | 2008-05-06 | Interuniversitair Microelektronica Centrum (Imec) Vzw | Method for selective deposition of a thin self-assembled monolayer |
US7271463B2 (en) | 2004-12-10 | 2007-09-18 | Micron Technology, Inc. | Trench insulation structures including an oxide liner that is thinner along the walls of the trench than along the base |
US7235501B2 (en) | 2004-12-13 | 2007-06-26 | Micron Technology, Inc. | Lanthanum hafnium oxide dielectrics |
US20060127067A1 (en) | 2004-12-13 | 2006-06-15 | General Electric Company | Fast heating and cooling wafer handling assembly and method of manufacturing thereof |
US7290813B2 (en) | 2004-12-16 | 2007-11-06 | Asyst Technologies, Inc. | Active edge grip rest pad |
KR100558922B1 (ko) | 2004-12-16 | 2006-03-10 | (주)퓨전에이드 | 박막 증착장치 및 방법 |
US7396732B2 (en) | 2004-12-17 | 2008-07-08 | Interuniversitair Microelektronica Centrum Vzw (Imec) | Formation of deep trench airgaps and related applications |
US20060133955A1 (en) | 2004-12-17 | 2006-06-22 | Peters David W | Apparatus and method for delivering vapor phase reagent to a deposition chamber |
US7699021B2 (en) | 2004-12-22 | 2010-04-20 | Sokudo Co., Ltd. | Cluster tool substrate throughput optimization |
US7396412B2 (en) | 2004-12-22 | 2008-07-08 | Sokudo Co., Ltd. | Coat/develop module with shared dispense |
JP4560681B2 (ja) | 2004-12-24 | 2010-10-13 | ミネベア株式会社 | 多灯式放電灯点灯装置 |
DE102004063036A1 (de) | 2004-12-28 | 2006-07-06 | Advanced Micro Devices, Inc., Sunnyvale | Verfahren zum Ausbilden von Kontaktflecken |
WO2006070602A1 (ja) | 2004-12-28 | 2006-07-06 | Bridgestone Corporation | 導電性エンドレスベルト、その製造方法およびそれを用いた画像形成装置 |
JP2006186271A (ja) | 2004-12-28 | 2006-07-13 | Sharp Corp | 気相成長装置および成膜済基板の製造方法 |
US20060137608A1 (en) | 2004-12-28 | 2006-06-29 | Choi Seung W | Atomic layer deposition apparatus |
AU2005322159A1 (en) | 2004-12-29 | 2006-07-06 | Biogen Idec Ma Inc. | Bioreactor process control system and method |
KR20070107017A (ko) | 2004-12-30 | 2007-11-06 | 어플라이드 머티어리얼스, 인코포레이티드 | 트리밍과 호환되는 라인 에지 조도 감소 방법 |
US7482247B1 (en) | 2004-12-30 | 2009-01-27 | Novellus Systems, Inc. | Conformal nanolaminate dielectric deposition and etch bag gap fill process |
US7846499B2 (en) | 2004-12-30 | 2010-12-07 | Asm International N.V. | Method of pulsing vapor precursors in an ALD reactor |
US20060144820A1 (en) | 2004-12-30 | 2006-07-06 | Sawin Herbert H | Remote chamber methods for removing surface deposits |
US7195985B2 (en) | 2005-01-04 | 2007-03-27 | Intel Corporation | CMOS transistor junction regions formed by a CVD etching and deposition sequence |
US7560395B2 (en) | 2005-01-05 | 2009-07-14 | Micron Technology, Inc. | Atomic layer deposited hafnium tantalum oxide dielectrics |
JP2006188729A (ja) | 2005-01-05 | 2006-07-20 | Hitachi Kokusai Electric Inc | 基板処理装置 |
US7598516B2 (en) | 2005-01-07 | 2009-10-06 | International Business Machines Corporation | Self-aligned process for nanotube/nanowire FETs |
US7169668B2 (en) | 2005-01-09 | 2007-01-30 | United Microelectronics Corp. | Method of manufacturing a split-gate flash memory device |
US8211230B2 (en) | 2005-01-18 | 2012-07-03 | Asm America, Inc. | Reaction system for growing a thin film |
KR20070091332A (ko) | 2005-01-18 | 2007-09-10 | 에이에스엠 아메리카, 인코포레이티드 | 웨이퍼 지지핀 어셈블리 |
US20060156980A1 (en) | 2005-01-19 | 2006-07-20 | Samsung Electronics Co., Ltd. | Apparatus including 4-way valve for fabricating semiconductor device, method of controlling valve, and method of fabricating semiconductor device using the apparatus |
US7964380B2 (en) | 2005-01-21 | 2011-06-21 | Argylia Technologies | Nanoparticles for manipulation of biopolymers and methods of thereof |
KR100725037B1 (ko) | 2005-01-21 | 2007-06-07 | 세메스 주식회사 | 반도체 플라즈마 처리 장치 및 방법 |
US20060162661A1 (en) | 2005-01-22 | 2006-07-27 | Applied Materials, Inc. | Mixing energized and non-energized gases for silicon nitride deposition |
JP2006203120A (ja) | 2005-01-24 | 2006-08-03 | Toshiba Corp | 半導体装置の製造方法 |
KR100640550B1 (ko) | 2005-01-26 | 2006-10-31 | 주식회사 아이피에스 | 플라즈마 ald 박막증착방법 |
US20060162658A1 (en) | 2005-01-27 | 2006-07-27 | Applied Materials, Inc. | Ruthenium layer deposition apparatus and method |
US7438949B2 (en) | 2005-01-27 | 2008-10-21 | Applied Materials, Inc. | Ruthenium containing layer deposition method |
US20060240187A1 (en) | 2005-01-27 | 2006-10-26 | Applied Materials, Inc. | Deposition of an intermediate catalytic layer on a barrier layer for copper metallization |
US8148886B2 (en) | 2005-01-31 | 2012-04-03 | Ube Industries, Ltd. | Red nitride phosphor and production method thereof |
US7235492B2 (en) | 2005-01-31 | 2007-06-26 | Applied Materials, Inc. | Low temperature etchant for treatment of silicon-containing surfaces |
US7135402B2 (en) | 2005-02-01 | 2006-11-14 | Taiwan Semiconductor Manufacturing Company, Ltd. | Sealing pores of low-k dielectrics using CxHy |
US7298009B2 (en) | 2005-02-01 | 2007-11-20 | Infineon Technologies Ag | Semiconductor method and device with mixed orientation substrate |
US7816236B2 (en) | 2005-02-04 | 2010-10-19 | Asm America Inc. | Selective deposition of silicon-containing films |
KR100585178B1 (ko) | 2005-02-05 | 2006-05-30 | 삼성전자주식회사 | 금속 게이트 전극을 가지는 FinFET을 포함하는반도체 소자 및 그 제조방법 |
US20060176928A1 (en) | 2005-02-08 | 2006-08-10 | Tokyo Electron Limited | Substrate processing apparatus, control method adopted in substrate processing apparatus and program |
US20060182885A1 (en) | 2005-02-14 | 2006-08-17 | Xinjian Lei | Preparation of metal silicon nitride films via cyclic deposition |
JP4734317B2 (ja) | 2005-02-17 | 2011-07-27 | 株式会社日立国際電気 | 基板処理方法および基板処理装置 |
CN101527263B (zh) | 2005-02-17 | 2013-03-20 | 株式会社日立国际电气 | 半导体器件的制造方法 |
TW200634982A (en) | 2005-02-22 | 2006-10-01 | Asm Inc | Plasma pre-treating surfaces for atomic layer deposition |
US20060185589A1 (en) | 2005-02-23 | 2006-08-24 | Raanan Zehavi | Silicon gas injector and method of making |
US7410340B2 (en) | 2005-02-24 | 2008-08-12 | Asyst Technologies, Inc. | Direct tool loading |
KR100667598B1 (ko) | 2005-02-25 | 2007-01-12 | 주식회사 아이피에스 | 반도체 처리 장치 |
JP4764028B2 (ja) | 2005-02-28 | 2011-08-31 | 株式会社日立ハイテクノロジーズ | プラズマ処理方法 |
KR100854995B1 (ko) | 2005-03-02 | 2008-08-28 | 삼성전자주식회사 | 고밀도 플라즈마 화학 기상 증착 장치 |
US8211235B2 (en) | 2005-03-04 | 2012-07-03 | Picosun Oy | Apparatuses and methods for deposition of material on surfaces |
US6972478B1 (en) | 2005-03-07 | 2005-12-06 | Advanced Micro Devices, Inc. | Integrated circuit and method for its manufacture |
US7629267B2 (en) | 2005-03-07 | 2009-12-08 | Asm International N.V. | High stress nitride film and method for formation thereof |
JP4258518B2 (ja) | 2005-03-09 | 2009-04-30 | 東京エレクトロン株式会社 | 成膜方法、成膜装置及び記憶媒体 |
JP4214124B2 (ja) | 2005-03-14 | 2009-01-28 | 株式会社バイオエコーネット | 耳式体温計 |
US7666773B2 (en) | 2005-03-15 | 2010-02-23 | Asm International N.V. | Selective deposition of noble metal thin films |
US7608549B2 (en) | 2005-03-15 | 2009-10-27 | Asm America, Inc. | Method of forming non-conformal layers |
US7211525B1 (en) | 2005-03-16 | 2007-05-01 | Novellus Systems, Inc. | Hydrogen treatment enhanced gap fill |
US7376520B2 (en) | 2005-03-16 | 2008-05-20 | Lam Research Corporation | System and method for gas flow verification |
JP2006261434A (ja) | 2005-03-17 | 2006-09-28 | L'air Liquide Sa Pour L'etude & L'exploitation Des Procede S Georges Claude | シリコン酸化膜の形成方法 |
US20060211259A1 (en) | 2005-03-21 | 2006-09-21 | Maes Jan W | Silicon oxide cap over high dielectric constant films |
US8486845B2 (en) | 2005-03-21 | 2013-07-16 | Tokyo Electron Limited | Plasma enhanced atomic layer deposition system and method |
US7314835B2 (en) | 2005-03-21 | 2008-01-01 | Tokyo Electron Limited | Plasma enhanced atomic layer deposition system and method |
US8974868B2 (en) | 2005-03-21 | 2015-03-10 | Tokyo Electron Limited | Post deposition plasma cleaning system and method |
KR100669828B1 (ko) | 2005-03-22 | 2007-01-16 | 성균관대학교산학협력단 | 중성빔을 이용한 원자층 증착장치 및 이 장치를 이용한원자층 증착방법 |
KR100655431B1 (ko) | 2005-03-23 | 2006-12-11 | 삼성전자주식회사 | 웨이퍼와의 접촉 면적을 최소화할 수 있는 웨이퍼 캐리어 및 이를 이용한 웨이퍼 세정방법 |
US7422636B2 (en) | 2005-03-25 | 2008-09-09 | Tokyo Electron Limited | Plasma enhanced atomic layer deposition system having reduced contamination |
US20060213437A1 (en) | 2005-03-28 | 2006-09-28 | Tokyo Electron Limited | Plasma enhanced atomic layer deposition system |
JP2006278058A (ja) | 2005-03-28 | 2006-10-12 | Matsushita Electric Works Ltd | プラズマ処理装置 |
US7687409B2 (en) | 2005-03-29 | 2010-03-30 | Micron Technology, Inc. | Atomic layer deposited titanium silicon oxide films |
US20060226117A1 (en) | 2005-03-29 | 2006-10-12 | Bertram Ronald T | Phase change based heating element system and method |
US20080210162A1 (en) | 2005-03-29 | 2008-09-04 | Hitachi Kokusai Electric Inc | Substrate Processing Apparatus and Substrate Processing System |
US7282415B2 (en) | 2005-03-29 | 2007-10-16 | Freescale Semiconductor, Inc. | Method for making a semiconductor device with strain enhancement |
US20060228898A1 (en) | 2005-03-30 | 2006-10-12 | Cory Wajda | Method and system for forming a high-k dielectric layer |
USD559994S1 (en) | 2005-03-30 | 2008-01-15 | Tokyo Electron Limited | Cover ring |
USD559993S1 (en) | 2005-03-30 | 2008-01-15 | Tokyo Electron Limited | Cover ring |
US7993489B2 (en) | 2005-03-31 | 2011-08-09 | Tokyo Electron Limited | Capacitive coupling plasma processing apparatus and method for using the same |
US8298336B2 (en) | 2005-04-01 | 2012-10-30 | Lam Research Corporation | High strip rate downstream chamber |
WO2006110750A2 (en) | 2005-04-07 | 2006-10-19 | Aviza Technology, Inc. | Multilayer, multicomponent high-k films and methods for depositing the same |
US7479198B2 (en) | 2005-04-07 | 2009-01-20 | Timothy D'Annunzio | Methods for forming nanofiber adhesive structures |
KR100640640B1 (ko) | 2005-04-19 | 2006-10-31 | 삼성전자주식회사 | 미세 피치의 하드마스크를 이용한 반도체 소자의 미세 패턴형성 방법 |
CN101733696A (zh) | 2005-04-19 | 2010-06-16 | 株式会社荏原制作所 | 基板抛光方法及处理方法 |
JP4694878B2 (ja) | 2005-04-20 | 2011-06-08 | Okiセミコンダクタ株式会社 | 半導体製造装置および半導体装置の製造方法 |
CN101208444A (zh) | 2005-04-21 | 2008-06-25 | 霍尼韦尔国际公司 | 钌基材料和钌合金 |
US7160819B2 (en) | 2005-04-25 | 2007-01-09 | Sharp Laboratories Of America, Inc. | Method to perform selective atomic layer deposition of zinc oxide |
US8137465B1 (en) | 2005-04-26 | 2012-03-20 | Novellus Systems, Inc. | Single-chamber sequential curing of semiconductor wafers |
US7544398B1 (en) | 2005-04-26 | 2009-06-09 | The Regents Of The Univesity Of California | Controlled nano-doping of ultra thin films |
WO2006114781A2 (en) | 2005-04-26 | 2006-11-02 | University College Cork - National University Of Ireland, Cork | Deposition of materials |
US7351057B2 (en) | 2005-04-27 | 2008-04-01 | Asm International N.V. | Door plate for furnace |
US7425350B2 (en) | 2005-04-29 | 2008-09-16 | Asm Japan K.K. | Apparatus, precursors and deposition methods for silicon-containing materials |
US7084060B1 (en) | 2005-05-04 | 2006-08-01 | International Business Machines Corporation | Forming capping layer over metal wire structure using selective atomic layer deposition |
US7169018B2 (en) | 2005-05-04 | 2007-01-30 | Micrel, Incorporated | Wafer carrier checker and method of using same |
US7915173B2 (en) | 2005-05-05 | 2011-03-29 | Macronix International Co., Ltd. | Shallow trench isolation structure having reduced dislocation density |
US7214630B1 (en) | 2005-05-06 | 2007-05-08 | Novellus Systems, Inc. | PMOS transistor with compressive dielectric capping layer |
US20060249175A1 (en) | 2005-05-09 | 2006-11-09 | Applied Materials, Inc. | High efficiency UV curing system |
US20060251827A1 (en) | 2005-05-09 | 2006-11-09 | Applied Materials, Inc. | Tandem uv chamber for curing dielectric materials |
KR100688836B1 (ko) | 2005-05-11 | 2007-03-02 | 삼성에스디아이 주식회사 | 촉매 화학기상증착장치 |
JP4666473B2 (ja) | 2005-05-12 | 2011-04-06 | 大日本スクリーン製造株式会社 | 基板熱処理装置 |
JP2006319261A (ja) | 2005-05-16 | 2006-11-24 | Dainippon Screen Mfg Co Ltd | 基板処理装置 |
US7875556B2 (en) | 2005-05-16 | 2011-01-25 | Air Products And Chemicals, Inc. | Precursors for CVD silicon carbo-nitride and silicon nitride films |
US7101763B1 (en) | 2005-05-17 | 2006-09-05 | International Business Machines Corporation | Low capacitance junction-isolation for bulk FinFET technology |
US7109098B1 (en) | 2005-05-17 | 2006-09-19 | Applied Materials, Inc. | Semiconductor junction formation process including low temperature plasma deposition of an optical absorption layer and high speed optical annealing |
US7422775B2 (en) | 2005-05-17 | 2008-09-09 | Applied Materials, Inc. | Process for low temperature plasma deposition of an optical absorption layer and high speed optical annealing |
US7312162B2 (en) | 2005-05-17 | 2007-12-25 | Applied Materials, Inc. | Low temperature plasma deposition process for carbon layer deposition |
US20060260545A1 (en) | 2005-05-17 | 2006-11-23 | Kartik Ramaswamy | Low temperature absorption layer deposition and high speed optical annealing system |
KR100731164B1 (ko) | 2005-05-19 | 2007-06-20 | 주식회사 피에조닉스 | 샤워헤드를 구비한 화학기상 증착 방법 및 장치 |
JP2006324551A (ja) | 2005-05-20 | 2006-11-30 | Shibaura Mechatronics Corp | プラズマ発生装置及びプラズマ処理装置 |
US20070155138A1 (en) | 2005-05-24 | 2007-07-05 | Pierre Tomasini | Apparatus and method for depositing silicon germanium films |
US8129290B2 (en) | 2005-05-26 | 2012-03-06 | Applied Materials, Inc. | Method to increase tensile stress of silicon nitride films using a post PECVD deposition UV cure |
US8138104B2 (en) | 2005-05-26 | 2012-03-20 | Applied Materials, Inc. | Method to increase silicon nitride tensile stress using nitrogen plasma in-situ treatment and ex-situ UV cure |
US7732342B2 (en) | 2005-05-26 | 2010-06-08 | Applied Materials, Inc. | Method to increase the compressive stress of PECVD silicon nitride films |
US20060269690A1 (en) | 2005-05-27 | 2006-11-30 | Asm Japan K.K. | Formation technology for nanoparticle films having low dielectric constant |
TW200709296A (en) | 2005-05-31 | 2007-03-01 | Tokyo Electron Ltd | Plasma treatment apparatus and plasma treatment method |
US20060275933A1 (en) | 2005-06-02 | 2006-12-07 | Applied Materials, Inc. | Thermally conductive ceramic tipped contact thermocouple |
US7608490B2 (en) | 2005-06-02 | 2009-10-27 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and manufacturing method thereof |
KR100750968B1 (ko) | 2005-06-07 | 2007-08-22 | 주식회사 알지비하이텍 | 플라즈마화학적기상증착 기구 내의 서셉터 구조 |
US20060281310A1 (en) | 2005-06-08 | 2006-12-14 | Applied Materials, Inc. | Rotating substrate support and methods of use |
JP2008544484A (ja) | 2005-06-09 | 2008-12-04 | アクセリス テクノロジーズ インコーポレーテッド | プリメタルおよび/またはシャロートレンチアイソレーションに用いられるスピン−オン誘電体材料のための紫外線硬化処理方法 |
KR100960273B1 (ko) | 2005-06-13 | 2010-06-04 | 가부시키가이샤 히다치 고쿠사이 덴키 | 반도체 장치의 제조 방법 및 기판 처리 장치 |
US20060278524A1 (en) | 2005-06-14 | 2006-12-14 | Stowell Michael W | System and method for modulating power signals to control sputtering |
JP4853857B2 (ja) | 2005-06-15 | 2012-01-11 | 東京エレクトロン株式会社 | 基板の処理方法,コンピュータ読み取り可能な記録媒体及び基板処理装置 |
JP4753173B2 (ja) | 2005-06-17 | 2011-08-24 | 株式会社フジキン | 流体制御装置 |
US7473655B2 (en) | 2005-06-17 | 2009-01-06 | Applied Materials, Inc. | Method for silicon based dielectric chemical vapor deposition |
JP4728708B2 (ja) | 2005-06-17 | 2011-07-20 | 日本電気株式会社 | 配線基板及びその製造方法 |
US7651955B2 (en) | 2005-06-21 | 2010-01-26 | Applied Materials, Inc. | Method for forming silicon-containing materials during a photoexcitation deposition process |
US20060286774A1 (en) | 2005-06-21 | 2006-12-21 | Applied Materials. Inc. | Method for forming silicon-containing materials during a photoexcitation deposition process |
US7601652B2 (en) | 2005-06-21 | 2009-10-13 | Applied Materials, Inc. | Method for treating substrates and films with photoexcitation |
US7648927B2 (en) | 2005-06-21 | 2010-01-19 | Applied Materials, Inc. | Method for forming silicon-containing materials during a photoexcitation deposition process |
US20060286819A1 (en) | 2005-06-21 | 2006-12-21 | Applied Materials, Inc. | Method for silicon based dielectric deposition and clean with photoexcitation |
KR100915722B1 (ko) | 2005-06-23 | 2009-09-04 | 도쿄엘렉트론가부시키가이샤 | 반도체 처리 장치용의 구성 부재 및 그 제조 방법, 및반도체 처리 장치 |
JP2007005582A (ja) | 2005-06-24 | 2007-01-11 | Asm Japan Kk | 基板搬送装置及びそれを搭載した半導体基板製造装置 |
US20060292310A1 (en) | 2005-06-27 | 2006-12-28 | Applied Materials, Inc. | Process kit design to reduce particle generation |
US7575990B2 (en) | 2005-07-01 | 2009-08-18 | Macronix International Co., Ltd. | Method of forming self-aligned contacts and local interconnects |
KR101255873B1 (ko) | 2005-07-07 | 2013-04-17 | 엠케이에스 인스트루먼츠, 인코포레이티드 | 멀티 챔버 툴을 위한 오존 시스템 |
EP1907599A2 (en) | 2005-07-08 | 2008-04-09 | Aviza Technology, Inc. | Method for depositing silicon-containing films |
US8771806B2 (en) | 2005-07-09 | 2014-07-08 | Bang-Kwon Kang | Surface coating method for hydrophobic and superhydrophobic treatment in atmospheric pressure plasma |
US20070010072A1 (en) | 2005-07-09 | 2007-01-11 | Aviza Technology, Inc. | Uniform batch film deposition process and films so produced |
US7925378B2 (en) | 2005-07-11 | 2011-04-12 | Brooks Automation, Inc. | Process apparatus with on-the-fly workpiece centering |
US7579285B2 (en) | 2005-07-11 | 2009-08-25 | Imec | Atomic layer deposition method for depositing a layer |
US7762755B2 (en) | 2005-07-11 | 2010-07-27 | Brooks Automation, Inc. | Equipment storage for substrate processing apparatus |
TW200702647A (en) | 2005-07-13 | 2007-01-16 | Actherm Inc | Heat conductive structure of electronic clinical thermometer and clinical thermometer with the same |
US20070014919A1 (en) | 2005-07-15 | 2007-01-18 | Jani Hamalainen | Atomic layer deposition of noble metal oxides |
US7271044B2 (en) | 2005-07-21 | 2007-09-18 | International Business Machines Corporation | CMOS (complementary metal oxide semiconductor) technology |
US7314838B2 (en) | 2005-07-21 | 2008-01-01 | Taiwan Semiconductor Manufacturing Co., Ltd. | Method for forming a high density dielectric film by chemical vapor deposition |
JP2007035747A (ja) | 2005-07-25 | 2007-02-08 | Sumitomo Electric Ind Ltd | ウェハ保持体およびそれを搭載したウェハプローバ |
CN101142012B (zh) | 2005-07-26 | 2011-08-24 | 川崎重工业株式会社 | 混合流体的均匀化装置以及混合流体供给设备 |
JP2007035899A (ja) | 2005-07-27 | 2007-02-08 | Sumitomo Electric Ind Ltd | ウエハプローバ用ウエハ保持体及びそれを搭載したウエハプローバ |
TWI313486B (en) | 2005-07-28 | 2009-08-11 | Nuflare Technology Inc | Position measurement apparatus and method and writing apparatus and method |
TWI327339B (en) | 2005-07-29 | 2010-07-11 | Nuflare Technology Inc | Vapor phase growing apparatus and vapor phase growing method |
TWI261313B (en) | 2005-07-29 | 2006-09-01 | Ind Tech Res Inst | A method for a large dimension plasma enhanced atomic layer deposition cavity and an apparatus thereof |
USD593585S1 (en) | 2005-07-29 | 2009-06-02 | Tokyo Electron Limited | Top panel for microwave introduction window of a plasma processing apparatus |
USD571383S1 (en) | 2005-07-29 | 2008-06-17 | Tokyo Electron Limited | Top panel for microwave introduction window of a plasma processing apparatus |
USD571831S1 (en) | 2005-07-29 | 2008-06-24 | Tokyo Electron Limited | Top panel for microwave introduction window of a plasma processing apparatus |
US20070028842A1 (en) | 2005-08-02 | 2007-02-08 | Makoto Inagawa | Vacuum chamber bottom |
US20090047447A1 (en) | 2005-08-02 | 2009-02-19 | Sawin Herbert H | Method for removing surface deposits and passivating interior surfaces of the interior of a chemical vapor deposition reactor |
WO2007015436A1 (ja) | 2005-08-04 | 2007-02-08 | Tosoh Corporation | 金属含有化合物、その製造方法、金属含有薄膜及びその形成方法 |
US20090045829A1 (en) | 2005-08-04 | 2009-02-19 | Sumitomo Electric Industries, Ltd. | Wafer holder for wafer prober and wafer prober equipped with same |
JP5117856B2 (ja) | 2005-08-05 | 2013-01-16 | 株式会社日立国際電気 | 基板処理装置、冷却ガス供給ノズルおよび半導体装置の製造方法 |
US20070037412A1 (en) | 2005-08-05 | 2007-02-15 | Tokyo Electron Limited | In-situ atomic layer deposition |
US20100162956A1 (en) | 2005-08-05 | 2010-07-01 | Seishi Murakami | Substrate Processing Apparatus and Substrate Mount Table Used in the Apparatus |
US7312148B2 (en) | 2005-08-08 | 2007-12-25 | Applied Materials, Inc. | Copper barrier reflow process employing high speed optical annealing |
US7335611B2 (en) | 2005-08-08 | 2008-02-26 | Applied Materials, Inc. | Copper conductor annealing process employing high speed optical annealing with a low temperature-deposited optical absorber layer |
US7323401B2 (en) | 2005-08-08 | 2008-01-29 | Applied Materials, Inc. | Semiconductor substrate process using a low temperature deposited carbon-containing hard mask |
US7429532B2 (en) | 2005-08-08 | 2008-09-30 | Applied Materials, Inc. | Semiconductor substrate process using an optically writable carbon-containing mask |
JP4666215B2 (ja) | 2005-08-10 | 2011-04-06 | 株式会社ダイフク | 物品搬送装置 |
US7229873B2 (en) | 2005-08-10 | 2007-06-12 | Texas Instruments Incorporated | Process for manufacturing dual work function metal gates in a microelectronics device |
US8709162B2 (en) | 2005-08-16 | 2014-04-29 | Applied Materials, Inc. | Active cooling substrate support |
US20090130331A1 (en) | 2005-08-16 | 2009-05-21 | Hitachi Kokusai Electric Inc. | Method of Forming Thin Film and Method of Manufacturing Semiconductor Device |
US7718225B2 (en) | 2005-08-17 | 2010-05-18 | Applied Materials, Inc. | Method to control semiconductor film deposition characteristics |
KR100689037B1 (ko) | 2005-08-24 | 2007-03-08 | 삼성전자주식회사 | 마이크로파 공명 플라즈마 발생장치 및 그것을 구비하는플라즈마 처리 시스템 |
JP5184357B2 (ja) | 2005-08-24 | 2013-04-17 | エレクトロニクス アンド テレコミュニケーションズ リサーチ インスチチュート | バナジウム酸化物薄膜の製造方法 |
JP4628900B2 (ja) | 2005-08-24 | 2011-02-09 | 株式会社日立ハイテクノロジーズ | プラズマ処理装置 |
USD557226S1 (en) | 2005-08-25 | 2007-12-11 | Hitachi High-Technologies Corporation | Electrode cover for a plasma processing apparatus |
US8123968B2 (en) | 2005-08-25 | 2012-02-28 | Round Rock Research, Llc | Multiple deposition for integration of spacers in pitch multiplication process |
USD556704S1 (en) | 2005-08-25 | 2007-12-04 | Hitachi High-Technologies Corporation | Grounded electrode for a plasma processing apparatus |
US7402534B2 (en) | 2005-08-26 | 2008-07-22 | Applied Materials, Inc. | Pretreatment processes within a batch ALD reactor |
US7393736B2 (en) | 2005-08-29 | 2008-07-01 | Micron Technology, Inc. | Atomic layer deposition of Zrx Hfy Sn1-x-y O2 films as high k gate dielectrics |
US8110469B2 (en) | 2005-08-30 | 2012-02-07 | Micron Technology, Inc. | Graded dielectric layers |
US20070047384A1 (en) | 2005-09-01 | 2007-03-01 | Mclaughlin Jon K | Control system for and method of combining materials |
JP4815600B2 (ja) | 2005-09-06 | 2011-11-16 | 株式会社テラセミコン | 多結晶シリコン薄膜製造方法及びその製造装置 |
EP1937419A4 (en) | 2005-09-08 | 2009-11-04 | Applied Materials Inc | ELECTRICITY-FREE MODELING METALLIZATION PROCESS FOR LARGE-SURFACE ELECTRONICS |
US8052794B2 (en) | 2005-09-12 | 2011-11-08 | The United States Of America As Represented By The Secretary Of The Navy | Directed reagents to improve material uniformity |
US20070056850A1 (en) | 2005-09-13 | 2007-03-15 | Applied Materials, Inc. | Large-area magnetron sputtering chamber with individually controlled sputtering zones |
US20070056843A1 (en) | 2005-09-13 | 2007-03-15 | Applied Materials, Inc. | Method of processing a substrate using a large-area magnetron sputtering chamber with individually controlled sputtering zones |
US20070065597A1 (en) | 2005-09-15 | 2007-03-22 | Asm Japan K.K. | Plasma CVD film formation apparatus provided with mask |
US20070065578A1 (en) | 2005-09-21 | 2007-03-22 | Applied Materials, Inc. | Treatment processes for a batch ALD reactor |
US20070066084A1 (en) | 2005-09-21 | 2007-03-22 | Cory Wajda | Method and system for forming a layer with controllable spstial variation |
JP2007088113A (ja) | 2005-09-21 | 2007-04-05 | Sony Corp | 半導体装置の製造方法 |
JP5017950B2 (ja) | 2005-09-21 | 2012-09-05 | 株式会社Sumco | エピタキシャル成長装置の温度管理方法 |
US7578616B2 (en) | 2005-09-22 | 2009-08-25 | Lam Research Corporation | Apparatus for determining a temperature of a substrate and methods therefor |
US7691204B2 (en) | 2005-09-30 | 2010-04-06 | Applied Materials, Inc. | Film formation apparatus and methods including temperature and emissivity/pattern compensation |
US7976641B1 (en) | 2005-09-30 | 2011-07-12 | Lam Research Corporation | Extending storage time of removed plasma chamber components prior to cleaning thereof |
US20090137055A1 (en) | 2005-09-30 | 2009-05-28 | Bognar John A | Measuring nitrogen oxides and other gases by ozone formation |
US8372203B2 (en) | 2005-09-30 | 2013-02-12 | Applied Materials, Inc. | Apparatus temperature control and pattern compensation |
USD541125S1 (en) | 2005-10-05 | 2007-04-24 | Powers Products Iii, Llc | Fastener slide |
US7785658B2 (en) | 2005-10-07 | 2010-08-31 | Asm Japan K.K. | Method for forming metal wiring structure |
US7754906B2 (en) | 2005-10-07 | 2010-07-13 | Air Products And Chemicals, Inc. | Ti, Ta, Hf, Zr and related metal silicon amides for ALD/CVD of metal-silicon nitrides, oxides or oxynitrides |
US7955436B2 (en) | 2006-02-24 | 2011-06-07 | Intermolecular, Inc. | Systems and methods for sealing in site-isolated reactors |
KR101153118B1 (ko) | 2005-10-12 | 2012-06-07 | 파나소닉 주식회사 | 플라즈마 처리장치 및 플라즈마 처리방법 |
WO2007043206A1 (ja) | 2005-10-14 | 2007-04-19 | Yatabe Massao | 半導体製造装置及び製造方法 |
US8149346B2 (en) | 2005-10-14 | 2012-04-03 | Semiconductor Energy Laboratory Co., Ltd. | Display device and manufacturing method thereof |
US7294581B2 (en) | 2005-10-17 | 2007-11-13 | Applied Materials, Inc. | Method for fabricating silicon nitride spacer structures |
US7244658B2 (en) | 2005-10-17 | 2007-07-17 | Applied Materials, Inc. | Low stress STI films and methods |
KR100725108B1 (ko) | 2005-10-18 | 2007-06-04 | 삼성전자주식회사 | 가스 공급 장치 및 이를 갖는 기판 가공 장치 |
US7691205B2 (en) | 2005-10-18 | 2010-04-06 | Asm Japan K.K. | Substrate-supporting device |
US7727828B2 (en) | 2005-10-20 | 2010-06-01 | Applied Materials, Inc. | Method for fabricating a gate dielectric of a field effect transistor |
ATE421922T1 (de) | 2005-10-20 | 2009-02-15 | Agfa Graphics Nv | Negativ arbeitender, wärmeempfindlicher lithografiedruckplattenvorläufer |
US7968205B2 (en) | 2005-10-21 | 2011-06-28 | Shin-Etsu Chemical Co., Ltd. | Corrosion resistant multilayer member |
JP2007115973A (ja) | 2005-10-21 | 2007-05-10 | Shin Etsu Chem Co Ltd | 耐食性部材 |
US7906910B2 (en) | 2005-10-27 | 2011-03-15 | Luxim Corporation | Plasma lamp with conductive material positioned relative to RF feed |
US7994721B2 (en) | 2005-10-27 | 2011-08-09 | Luxim Corporation | Plasma lamp and methods using a waveguide body and protruding bulb |
US7638951B2 (en) | 2005-10-27 | 2009-12-29 | Luxim Corporation | Plasma lamp with stable feedback amplification and method therefor |
US8993055B2 (en) | 2005-10-27 | 2015-03-31 | Asm International N.V. | Enhanced thin film deposition |
JP5044931B2 (ja) | 2005-10-31 | 2012-10-10 | 東京エレクトロン株式会社 | ガス供給装置及び基板処理装置 |
JP5102217B2 (ja) | 2005-10-31 | 2012-12-19 | アプライド マテリアルズ インコーポレイテッド | プロセス削減反応器 |
DE102005051994B4 (de) | 2005-10-31 | 2011-12-01 | Globalfoundries Inc. | Verformungsverfahrenstechnik in Transistoren auf Siliziumbasis unter Anwendung eingebetteter Halbleiterschichten mit Atomen mit einem großen kovalenten Radius |
US20070095283A1 (en) | 2005-10-31 | 2007-05-03 | Galewski Carl J | Pumping System for Atomic Layer Deposition |
US7399712B1 (en) | 2005-10-31 | 2008-07-15 | Novellus Systems, Inc. | Method for etching organic hardmasks |
US9127362B2 (en) | 2005-10-31 | 2015-09-08 | Applied Materials, Inc. | Process kit and target for substrate processing chamber |
CN101448977B (zh) | 2005-11-04 | 2010-12-15 | 应用材料股份有限公司 | 用于等离子体增强的原子层沉积的设备和工艺 |
US7695808B2 (en) | 2005-11-07 | 2010-04-13 | 3M Innovative Properties Company | Thermal transfer coating |
US7622378B2 (en) | 2005-11-09 | 2009-11-24 | Tokyo Electron Limited | Multi-step system and method for curing a dielectric film |
US7561982B2 (en) | 2005-11-10 | 2009-07-14 | Shake Awake Products, LLC | Physical attribute recording method and system |
US20090087967A1 (en) | 2005-11-14 | 2009-04-02 | Todd Michael A | Precursors and processes for low temperature selective epitaxial growth |
JP4940635B2 (ja) | 2005-11-14 | 2012-05-30 | 東京エレクトロン株式会社 | 加熱装置、熱処理装置及び記憶媒体 |
US7589028B1 (en) | 2005-11-15 | 2009-09-15 | Novellus Systems, Inc. | Hydroxyl bond removal and film densification method for oxide films using microwave post treatment |
JP4975414B2 (ja) | 2005-11-16 | 2012-07-11 | エーエスエム インターナショナル エヌ.ヴェー. | Cvd又はaldによる膜の堆積のための方法 |
KR100660890B1 (ko) | 2005-11-16 | 2006-12-26 | 삼성전자주식회사 | Ald를 이용한 이산화실리콘막 형성 방법 |
GB2432363B (en) | 2005-11-16 | 2010-06-23 | Epichem Ltd | Hafnocene and zirconocene precursors, and use thereof in atomic layer deposition |
US7897217B2 (en) | 2005-11-18 | 2011-03-01 | Tokyo Electron Limited | Method and system for performing plasma enhanced atomic layer deposition |
US8815014B2 (en) | 2005-11-18 | 2014-08-26 | Tokyo Electron Limited | Method and system for performing different deposition processes within a single chamber |
US20070116873A1 (en) | 2005-11-18 | 2007-05-24 | Tokyo Electron Limited | Apparatus for thermal and plasma enhanced vapor deposition and method of operating |
KR100975268B1 (ko) | 2005-11-18 | 2010-08-11 | 가부시키가이샤 히다치 고쿠사이 덴키 | 반도체 장치의 제조 방법 및 기판 처리 장치 |
US20070116888A1 (en) | 2005-11-18 | 2007-05-24 | Tokyo Electron Limited | Method and system for performing different deposition processes within a single chamber |
US20070116872A1 (en) | 2005-11-18 | 2007-05-24 | Tokyo Electron Limited | Apparatus for thermal and plasma enhanced vapor deposition and method of operating |
EP1957688A2 (en) | 2005-11-22 | 2008-08-20 | Genus, Inc. | Small volume symmetric flow single wafer ald apparatus |
US8382909B2 (en) | 2005-11-23 | 2013-02-26 | Edwards Limited | Use of spectroscopic techniques to monitor and control reactant gas input into a pre-pump reactive gas injection system |
US7629277B2 (en) | 2005-11-23 | 2009-12-08 | Honeywell International Inc. | Frag shield |
US7912439B2 (en) | 2005-11-25 | 2011-03-22 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and operating method thereof |
US8603580B2 (en) | 2005-11-28 | 2013-12-10 | Msp Corporation | High stability and high capacity precursor vapor generation for thin film deposition |
JP5082229B2 (ja) | 2005-11-29 | 2012-11-28 | 東京エレクトロン株式会社 | プラズマ処理装置 |
US20070125762A1 (en) | 2005-12-01 | 2007-06-07 | Applied Materials, Inc. | Multi-zone resistive heater |
US7862683B2 (en) | 2005-12-02 | 2011-01-04 | Tokyo Electron Limited | Chamber dry cleaning |
US7857506B2 (en) | 2005-12-05 | 2010-12-28 | Sencal Llc | Disposable, pre-calibrated, pre-validated sensors for use in bio-processing applications |
US7963917B2 (en) | 2005-12-05 | 2011-06-21 | Echo Therapeutics, Inc. | System and method for continuous non-invasive glucose monitoring |
US8003919B2 (en) | 2005-12-06 | 2011-08-23 | Dainippon Screen Mfg. Co., Ltd. | Substrate heat treatment apparatus |
DE112006003315T5 (de) | 2005-12-06 | 2008-10-16 | ULVAC, Inc., Chigasaki | Gaskopf und Dünnfilm-Herstellungsvorrichtung |
JP4666496B2 (ja) | 2005-12-07 | 2011-04-06 | 大日本スクリーン製造株式会社 | 基板熱処理装置 |
US7592251B2 (en) | 2005-12-08 | 2009-09-22 | Micron Technology, Inc. | Hafnium tantalum titanium oxide films |
JP4803578B2 (ja) | 2005-12-08 | 2011-10-26 | 東京エレクトロン株式会社 | 成膜方法 |
US8454749B2 (en) | 2005-12-19 | 2013-06-04 | Tokyo Electron Limited | Method and system for sealing a first assembly to a second assembly of a processing system |
US20070264427A1 (en) | 2005-12-21 | 2007-11-15 | Asm Japan K.K. | Thin film formation by atomic layer growth and chemical vapor deposition |
DE602006004834D1 (de) | 2005-12-22 | 2009-03-05 | Freiberger Compound Mat Gmbh | Verfahren zum selektiven Maskieren von III-N-Schichten und zur Herstellung von selbsttragenden III-N-Schichten oder Bauelementen |
US7651571B2 (en) | 2005-12-22 | 2010-01-26 | Kyocera Corporation | Susceptor |
US7713584B2 (en) | 2005-12-22 | 2010-05-11 | Asm International N.V. | Process for producing oxide films |
US7381644B1 (en) | 2005-12-23 | 2008-06-03 | Novellus Systems, Inc. | Pulsed PECVD method for modulating hydrogen content in hard mask |
JP4629574B2 (ja) | 2005-12-27 | 2011-02-09 | 日本発條株式会社 | 基板支持装置と、その製造方法 |
KR101296911B1 (ko) | 2005-12-28 | 2013-08-14 | 엘지디스플레이 주식회사 | 평판표시소자의 제조장치 및 그의 정전기량 검출장치 및검출방법 |
TWM292692U (en) | 2005-12-29 | 2006-06-21 | Powerchip Semiconductor Corp | Thermocouple apparatus |
TWI284390B (en) | 2006-01-10 | 2007-07-21 | Ind Tech Res Inst | Manufacturing method of charge store device |
US8088248B2 (en) | 2006-01-11 | 2012-01-03 | Lam Research Corporation | Gas switching section including valves having different flow coefficients for gas distribution system |
CN101003895B (zh) | 2006-01-16 | 2011-10-19 | 中微半导体设备(上海)有限公司 | 一种传送反应物到基片的装置及其处理方法 |
JP5324026B2 (ja) | 2006-01-18 | 2013-10-23 | 東京エレクトロン株式会社 | プラズマ処理装置およびプラズマ処理装置の制御方法 |
JP5068458B2 (ja) | 2006-01-18 | 2012-11-07 | 東京エレクトロン株式会社 | プラズマ処理装置およびプラズマ処理方法 |
US7918938B2 (en) | 2006-01-19 | 2011-04-05 | Asm America, Inc. | High temperature ALD inlet manifold |
JP2007191792A (ja) | 2006-01-19 | 2007-08-02 | Atto Co Ltd | ガス分離型シャワーヘッド |
US20080254220A1 (en) | 2006-01-20 | 2008-10-16 | Tokyo Electron Limited | Plasma processing apparatus |
US20070173071A1 (en) | 2006-01-20 | 2007-07-26 | International Business Machines Corporation | SiCOH dielectric |
US8673413B2 (en) | 2006-01-27 | 2014-03-18 | Tosoh Finechem Corporation | Method for packing solid organometallic compound and packed container |
JP4854317B2 (ja) | 2006-01-31 | 2012-01-18 | 東京エレクトロン株式会社 | 基板処理方法 |
JP4911980B2 (ja) | 2006-02-02 | 2012-04-04 | 東京エレクトロン株式会社 | 減圧処理装置 |
US7736437B2 (en) | 2006-02-03 | 2010-06-15 | Integrated Materials, Incorporated | Baffled liner cover |
KR100785163B1 (ko) | 2006-02-03 | 2007-12-11 | 위순임 | 다중 원격 플라즈마 발생기를 구비하는 기판 처리 시스템 |
US20070184179A1 (en) | 2006-02-09 | 2007-08-09 | Akshay Waghray | Methods and apparatus to monitor a process of depositing a constituent of a multi-constituent gas during production of a composite brake disc |
US20090031954A1 (en) | 2006-02-09 | 2009-02-05 | Kouichi Nishikido | Susceptor and apparatus for manufacturing epitaxial wafer |
US7695567B2 (en) | 2006-02-10 | 2010-04-13 | Applied Materials, Inc. | Water vapor passivation of a wall facing a plasma |
US20070187363A1 (en) | 2006-02-13 | 2007-08-16 | Tokyo Electron Limited | Substrate processing apparatus and substrate processing method |
JP4783169B2 (ja) | 2006-02-13 | 2011-09-28 | パナソニック株式会社 | ドライエッチング方法、微細構造形成方法、モールド及びその製造方法 |
US8057603B2 (en) | 2006-02-13 | 2011-11-15 | Tokyo Electron Limited | Method of cleaning substrate processing chamber, storage medium, and substrate processing chamber |
JP2007211326A (ja) | 2006-02-13 | 2007-08-23 | Nec Electronics Corp | 成膜装置および成膜方法 |
KR101379015B1 (ko) | 2006-02-15 | 2014-03-28 | 한국에이에스엠지니텍 주식회사 | 플라즈마 원자층 증착법을 이용한 루테늄 막 증착 방법 및고밀도 루테늄 층 |
KR101186740B1 (ko) | 2006-02-17 | 2012-09-28 | 삼성전자주식회사 | 뱅크형성 방법 및 이에 의해 형성된 뱅크를 함유하는 유기박막 트랜지스터 |
KR101224377B1 (ko) | 2006-02-17 | 2013-01-21 | 삼성디스플레이 주식회사 | 실리콘층의 형성방법 및 이를 이용한 표시기판의 제조방법 |
US20070207275A1 (en) | 2006-02-21 | 2007-09-06 | Applied Materials, Inc. | Enhancement of remote plasma source clean for dielectric films |
KR20070084683A (ko) | 2006-02-21 | 2007-08-27 | 국민대학교산학협력단 | 분자층 증착법 |
JP4497103B2 (ja) | 2006-02-21 | 2010-07-07 | 住友電気工業株式会社 | ウェハ保持体およびそれを搭載したヒータユニット、ウェハプローバ |
US20100022097A1 (en) | 2006-02-27 | 2010-01-28 | Youtec Co., Ltd. | Vaporizer, semiconductor production apparatus and process of semiconductor production |
US7354849B2 (en) | 2006-02-28 | 2008-04-08 | Intel Corporation | Catalytically enhanced atomic layer deposition process |
US20070215278A1 (en) | 2006-03-06 | 2007-09-20 | Muneo Furuse | Plasma etching apparatus and method for forming inner wall of plasma processing chamber |
KR101003446B1 (ko) | 2006-03-07 | 2010-12-28 | 가부시키가이샤 히다치 고쿠사이 덴키 | 기판 처리 장치 및 기판 처리 방법 |
US7716993B2 (en) | 2006-03-07 | 2010-05-18 | Ckd Corporation | Gas flow rate verification unit |
US7670432B2 (en) | 2006-03-08 | 2010-03-02 | Tokyo Electron Limited | Exhaust system for a vacuum processing system |
US7740705B2 (en) | 2006-03-08 | 2010-06-22 | Tokyo Electron Limited | Exhaust apparatus configured to reduce particle contamination in a deposition system |
US7794546B2 (en) | 2006-03-08 | 2010-09-14 | Tokyo Electron Limited | Sealing device and method for a processing system |
US7460003B2 (en) | 2006-03-09 | 2008-12-02 | International Business Machines Corporation | Electronic fuse with conformal fuse element formed over a freestanding dielectric spacer |
US7494882B2 (en) | 2006-03-10 | 2009-02-24 | Texas Instruments Incorporated | Manufacturing a semiconductive device using a controlled atomic layer removal process |
KR20070093493A (ko) | 2006-03-14 | 2007-09-19 | 엘지이노텍 주식회사 | 서셉터 및 반도체 제조장치 |
US20070218200A1 (en) | 2006-03-16 | 2007-09-20 | Kenji Suzuki | Method and apparatus for reducing particle formation in a vapor distribution system |
US8268078B2 (en) | 2006-03-16 | 2012-09-18 | Tokyo Electron Limited | Method and apparatus for reducing particle contamination in a deposition system |
US8008596B2 (en) | 2006-03-16 | 2011-08-30 | Tokyo Electron Limited | Plasma processing apparatus and electrode used therein |
US7692171B2 (en) | 2006-03-17 | 2010-04-06 | Andrzei Kaszuba | Apparatus and method for exposing a substrate to UV radiation using asymmetric reflectors |
US7566891B2 (en) | 2006-03-17 | 2009-07-28 | Applied Materials, Inc. | Apparatus and method for treating a substrate with UV radiation using primary and secondary reflectors |
DE102006012367B4 (de) | 2006-03-17 | 2015-07-16 | Air Liquide Deutschland Gmbh | Verfahren zur Herstellung eines Hohlkörpers aus Kunststoff mit innenseitiger Sperrschicht |
JP4733738B2 (ja) | 2006-03-20 | 2011-07-27 | 株式会社日立国際電気 | 半導体装置の製造方法および基板処理装置 |
JP4781867B2 (ja) | 2006-03-23 | 2011-09-28 | 大日本スクリーン製造株式会社 | 熱処理装置 |
US7410915B2 (en) | 2006-03-23 | 2008-08-12 | Asm Japan K.K. | Method of forming carbon polymer film using plasma CVD |
WO2007112058A2 (en) | 2006-03-24 | 2007-10-04 | Applied Materials, Inc. | Carbon precursors for use during silicon epitaxial firm formation |
USD549815S1 (en) | 2006-03-27 | 2007-08-28 | Murphy Timothy M | Air flow directing fixture for heating, air conditioning and ventilation devices |
US7456429B2 (en) | 2006-03-29 | 2008-11-25 | Eastman Kodak Company | Apparatus for atomic layer deposition |
US20070234955A1 (en) | 2006-03-29 | 2007-10-11 | Tokyo Electron Limited | Method and apparatus for reducing carbon monoxide poisoning at the peripheral edge of a substrate in a thin film deposition system |
JP2007266464A (ja) | 2006-03-29 | 2007-10-11 | Hitachi Ltd | 半導体集積回路装置の製造方法 |
US7910494B2 (en) | 2006-03-29 | 2011-03-22 | Tokyo Electron Limited | Thermal processing furnace, gas delivery system therefor, and methods for delivering a process gas thereto |
US7829463B2 (en) | 2006-03-30 | 2010-11-09 | Tokyo Electron Limited | Plasma processing method and plasma processing apparatus |
US8951478B2 (en) | 2006-03-30 | 2015-02-10 | Applied Materials, Inc. | Ampoule with a thermally conductive coating |
US8202367B2 (en) | 2006-03-30 | 2012-06-19 | Mitsui Engineering & Shipbuilding Co., Ltd. | Atomic layer growing apparatus |
US8097300B2 (en) | 2006-03-31 | 2012-01-17 | Tokyo Electron Limited | Method of forming mixed rare earth oxynitride and aluminum oxynitride films by atomic layer deposition |
US20070287301A1 (en) | 2006-03-31 | 2007-12-13 | Huiwen Xu | Method to minimize wet etch undercuts and provide pore sealing of extreme low k (k<2.5) dielectrics |
WO2007115257A2 (en) | 2006-03-31 | 2007-10-11 | Mesoscribe Technologies, Inc. | Thermocouples |
US7645484B2 (en) | 2006-03-31 | 2010-01-12 | Tokyo Electron Limited | Method of forming a metal carbide or metal carbonitride film having improved adhesion |
US7780865B2 (en) | 2006-03-31 | 2010-08-24 | Applied Materials, Inc. | Method to improve the step coverage and pattern loading for dielectric films |
US20070237697A1 (en) | 2006-03-31 | 2007-10-11 | Tokyo Electron Limited | Method of forming mixed rare earth oxide and aluminate films by atomic layer deposition |
JP4597894B2 (ja) | 2006-03-31 | 2010-12-15 | 東京エレクトロン株式会社 | 基板載置台および基板処理装置 |
US8012442B2 (en) | 2006-03-31 | 2011-09-06 | Tokyo Electron Limited | Method of forming mixed rare earth nitride and aluminum nitride films by atomic layer deposition |
US7737035B1 (en) | 2006-03-31 | 2010-06-15 | Novellus Systems, Inc. | Dual seal deposition process chamber and process |
US7396491B2 (en) | 2006-04-06 | 2008-07-08 | Osram Sylvania Inc. | UV-emitting phosphor and lamp containing same |
USD614258S1 (en) | 2006-04-06 | 2010-04-20 | Anemos Company Ltd. | Motionless mixer |
JP4943047B2 (ja) | 2006-04-07 | 2012-05-30 | 東京エレクトロン株式会社 | 処理装置及び処理方法 |
US7902074B2 (en) | 2006-04-07 | 2011-03-08 | Micron Technology, Inc. | Simplified pitch doubling process flow |
US7276447B1 (en) | 2006-04-11 | 2007-10-02 | Applied Materials, Inc. | Plasma dielectric etch process including ex-situ backside polymer removal for low-dielectric constant material |
JP4764241B2 (ja) | 2006-04-17 | 2011-08-31 | 株式会社日立ハイテクノロジーズ | ドライエッチング方法 |
US8399349B2 (en) | 2006-04-18 | 2013-03-19 | Air Products And Chemicals, Inc. | Materials and methods of forming controlled void |
US20070248767A1 (en) | 2006-04-19 | 2007-10-25 | Asm Japan K.K. | Method of self-cleaning of carbon-based film |
KR101344990B1 (ko) | 2006-04-20 | 2013-12-24 | 신에쓰 가가꾸 고교 가부시끼가이샤 | 도전성 내플라즈마 부재 |
US8187415B2 (en) | 2006-04-21 | 2012-05-29 | Applied Materials, Inc. | Plasma etch reactor with distribution of etch gases across a wafer surface and a polymer oxidizing gas in an independently fed center gas zone |
US7410852B2 (en) | 2006-04-21 | 2008-08-12 | International Business Machines Corporation | Opto-thermal annealing methods for forming metal gate and fully silicided gate field effect transistors |
FR2900276B1 (fr) | 2006-04-25 | 2008-09-12 | St Microelectronics Sa | Depot peald d'un materiau a base de silicium |
JP4345774B2 (ja) | 2006-04-26 | 2009-10-14 | ソニー株式会社 | 半導体装置の製造方法 |
US20070251456A1 (en) | 2006-04-27 | 2007-11-01 | Applied Materials, Inc., A Delaware Corporation | Composite heater and chill plate |
US8231799B2 (en) | 2006-04-28 | 2012-07-31 | Applied Materials, Inc. | Plasma reactor apparatus with multiple gas injection zones having time-changing separate configurable gas compositions for each zone |
US20070252233A1 (en) | 2006-04-28 | 2007-11-01 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the semiconductor device |
US7537804B2 (en) | 2006-04-28 | 2009-05-26 | Micron Technology, Inc. | ALD methods in which two or more different precursors are utilized with one or more reactants to form materials over substrates |
US20070259778A1 (en) | 2006-04-28 | 2007-11-08 | Syracuse University | Flameless heating system |
US7547633B2 (en) | 2006-05-01 | 2009-06-16 | Applied Materials, Inc. | UV assisted thermal processing |
US7997795B2 (en) | 2006-05-02 | 2011-08-16 | Watlow Electric Manufacturing Company | Temperature sensors and methods of manufacture thereof |
US7798096B2 (en) | 2006-05-05 | 2010-09-21 | Applied Materials, Inc. | Plasma, UV and ion/neutral assisted ALD or CVD in a batch tool |
US20070261868A1 (en) | 2006-05-12 | 2007-11-15 | Gross James R | Magnetic torque-limiting device and method |
KR100829605B1 (ko) | 2006-05-12 | 2008-05-15 | 삼성전자주식회사 | 소노스 타입의 비휘발성 메모리 장치의 제조 방법 |
US20070266945A1 (en) | 2006-05-16 | 2007-11-22 | Asm Japan K.K. | Plasma cvd apparatus equipped with plasma blocking insulation plate |
JP2007311558A (ja) | 2006-05-18 | 2007-11-29 | Toshiba Corp | 気相成長装置および気相成長基板の製造方法 |
US8530361B2 (en) | 2006-05-23 | 2013-09-10 | Air Products And Chemicals, Inc. | Process for producing silicon and oxide films from organoaminosilane precursors |
US7875312B2 (en) | 2006-05-23 | 2011-01-25 | Air Products And Chemicals, Inc. | Process for producing silicon oxide films for organoaminosilane precursors |
EP2021124B1 (en) | 2006-05-26 | 2020-10-07 | INEOS Manufacturing Belgium NV | Loop type reactor for polymerization |
US7825038B2 (en) | 2006-05-30 | 2010-11-02 | Applied Materials, Inc. | Chemical vapor deposition of high quality flow-like silicon dioxide using a silicon containing precursor and atomic oxygen |
US20070281106A1 (en) | 2006-05-30 | 2007-12-06 | Applied Materials, Inc. | Process chamber for dielectric gapfill |
US20070289534A1 (en) | 2006-05-30 | 2007-12-20 | Applied Materials, Inc. | Process chamber for dielectric gapfill |
US7790634B2 (en) | 2006-05-30 | 2010-09-07 | Applied Materials, Inc | Method for depositing and curing low-k films for gapfill and conformal film applications |
JP2007324350A (ja) | 2006-05-31 | 2007-12-13 | Tokyo Electron Ltd | 熱処理方法および熱処理装置、ならびに基板処理装置 |
CN101460657A (zh) | 2006-06-02 | 2009-06-17 | 乔治洛德方法研究和开发液化空气有限公司 | 基于新型钛、锆和铪前体的高k介电膜的形成方法及其用于半导体制造的用途 |
US7623940B2 (en) | 2006-06-02 | 2009-11-24 | The Boeing Company | Direct-manufactured duct interconnects |
US20070277735A1 (en) | 2006-06-02 | 2007-12-06 | Nima Mokhlesi | Systems for Atomic Layer Deposition of Oxides Using Krypton as an Ion Generating Feeding Gas |
US20070281082A1 (en) | 2006-06-02 | 2007-12-06 | Nima Mokhlesi | Flash Heating in Atomic Layer Deposition |
US20070281105A1 (en) | 2006-06-02 | 2007-12-06 | Nima Mokhlesi | Atomic Layer Deposition of Oxides Using Krypton as an Ion Generating Feeding Gas |
US8278176B2 (en) | 2006-06-07 | 2012-10-02 | Asm America, Inc. | Selective epitaxial formation of semiconductor films |
KR100790779B1 (ko) | 2006-06-09 | 2008-01-02 | 주식회사 아이피에스 | 갭 필 능력을 향상시킨 절연막 증착 방법 |
US20080018004A1 (en) | 2006-06-09 | 2008-01-24 | Air Products And Chemicals, Inc. | High Flow GaCl3 Delivery |
JP5069427B2 (ja) | 2006-06-13 | 2012-11-07 | 北陸成型工業株式会社 | シャワープレート、並びにそれを用いたプラズマ処理装置、プラズマ処理方法及び電子装置の製造方法 |
EP2032738A1 (en) | 2006-06-16 | 2009-03-11 | Fuji Film Manufacturing Europe B.V. | Method and apparatus for atomic layer deposition using an atmospheric pressure glow discharge plasma |
JP5045000B2 (ja) | 2006-06-20 | 2012-10-10 | 東京エレクトロン株式会社 | 成膜装置、ガス供給装置、成膜方法及び記憶媒体 |
US7625820B1 (en) | 2006-06-21 | 2009-12-01 | Novellus Systems, Inc. | Method of selective coverage of high aspect ratio structures with a conformal film |
US7482211B2 (en) | 2006-06-22 | 2009-01-27 | Taiwan Semiconductor Manufacturing Company, Ltd. | Junction leakage reduction in SiGe process by implantation |
US7691757B2 (en) | 2006-06-22 | 2010-04-06 | Asm International N.V. | Deposition of complex nitride films |
US7833351B2 (en) | 2006-06-26 | 2010-11-16 | Applied Materials, Inc. | Batch processing platform for ALD and CVD |
US7554103B2 (en) | 2006-06-26 | 2009-06-30 | Applied Materials, Inc. | Increased tool utilization/reduction in MWBC for UV curing chamber |
US7494272B2 (en) | 2006-06-27 | 2009-02-24 | Applied Materials, Inc. | Dynamic surface annealing using addressable laser array with pyrometry feedback |
US7718045B2 (en) | 2006-06-27 | 2010-05-18 | Applied Materials, Inc. | Ground shield with reentrant feature |
US20080153311A1 (en) | 2006-06-28 | 2008-06-26 | Deenesh Padhi | Method for depositing an amorphous carbon film with improved density and step coverage |
US7867578B2 (en) | 2006-06-28 | 2011-01-11 | Applied Materials, Inc. | Method for depositing an amorphous carbon film with improved density and step coverage |
US7501355B2 (en) | 2006-06-29 | 2009-03-10 | Applied Materials, Inc. | Decreasing the etch rate of silicon nitride by carbon addition |
JP4193910B2 (ja) | 2006-06-29 | 2008-12-10 | ダイキン工業株式会社 | 冷媒分流器一体化構造の膨張弁 |
US20080003425A1 (en) | 2006-06-29 | 2008-01-03 | Spencer James T | Systems and Methods of the Formation of Solid State Metal Boride and Oxide Coatings |
JP4847231B2 (ja) | 2006-06-29 | 2011-12-28 | ルネサスエレクトロニクス株式会社 | 電界に起因する剥離物による汚染を防止する装置 |
US7416989B1 (en) | 2006-06-30 | 2008-08-26 | Novellus Systems, Inc. | Adsorption based material removal process |
WO2008004278A1 (fr) | 2006-07-04 | 2008-01-10 | Toshiba Mitsubishi-Electric Industrial Systems Corporation | Procédé et dispositif de concentration / dilution de gaz spécifique |
JP4193883B2 (ja) | 2006-07-05 | 2008-12-10 | 住友電気工業株式会社 | 有機金属気相成長装置 |
JP5027573B2 (ja) | 2006-07-06 | 2012-09-19 | 株式会社小松製作所 | 温度センサおよび温調装置 |
KR100799735B1 (ko) | 2006-07-10 | 2008-02-01 | 삼성전자주식회사 | 금속 산화물 형성 방법 및 이를 수행하기 위한 장치 |
WO2008008737A2 (en) | 2006-07-10 | 2008-01-17 | Asyst Technologies, Inc. | Variable lot size load port |
KR100782484B1 (ko) | 2006-07-13 | 2007-12-05 | 삼성전자주식회사 | 열처리 설비 |
US7981815B2 (en) | 2006-07-20 | 2011-07-19 | Hitachi Kokusai Electric Inc. | Semiconductor device producing method and substrate processing apparatus |
JP4098338B2 (ja) | 2006-07-20 | 2008-06-11 | 川崎重工業株式会社 | ウェハ移載装置および基板移載装置 |
US20080072821A1 (en) | 2006-07-21 | 2008-03-27 | Dalton Jeremic J | Small volume symmetric flow single wafer ald apparatus |
US7795160B2 (en) | 2006-07-21 | 2010-09-14 | Asm America Inc. | ALD of metal silicate films |
KR100791334B1 (ko) | 2006-07-26 | 2008-01-07 | 삼성전자주식회사 | 원자층 증착법을 이용한 금속 산화막 형성 방법 |
EP2050132B1 (de) | 2006-07-26 | 2021-03-10 | Tec-Sem AG | Vorrichtung zur lagerung von objekten aus dem bereich der fertigung von elektronischen bauteilen |
WO2008012665A1 (en) | 2006-07-27 | 2008-01-31 | L'air Liquide-Societe Anonyme Pour L'etude Et L'exploitation Des Procedes Georges Claude | Method of cleaning film forming apparatus and film forming apparatus |
FR2904328B1 (fr) | 2006-07-27 | 2008-10-24 | St Microelectronics Sa | Depot par adsorption sous un champ electrique |
WO2008016836A2 (en) | 2006-07-29 | 2008-02-07 | Lotus Applied Technology, Llc | Radical-enhanced atomic layer deposition system and method |
JP2008041734A (ja) | 2006-08-02 | 2008-02-21 | Sony Corp | 半導体装置および半導体装置の製造方法 |
US7749879B2 (en) | 2006-08-03 | 2010-07-06 | Micron Technology, Inc. | ALD of silicon films on germanium |
JP2008039513A (ja) | 2006-08-03 | 2008-02-21 | Hitachi Metals Ltd | 質量流量制御装置の流量制御補正方法 |
US8080282B2 (en) | 2006-08-08 | 2011-12-20 | Asm Japan K.K. | Method for forming silicon carbide film containing oxygen |
US7632354B2 (en) | 2006-08-08 | 2009-12-15 | Tokyo Electron Limited | Thermal processing system with improved process gas flow and method for injecting a process gas into a thermal processing system |
US7514375B1 (en) | 2006-08-08 | 2009-04-07 | Novellus Systems, Inc. | Pulsed bias having high pulse frequency for filling gaps with dielectric material |
US20080035306A1 (en) | 2006-08-08 | 2008-02-14 | White John M | Heating and cooling of substrate support |
GB0615722D0 (en) | 2006-08-08 | 2006-09-20 | Boc Group Plc | Apparatus for conveying a waste stream |
TW200814131A (en) | 2006-08-11 | 2008-03-16 | Schott Ag | External electrode fluorescent lamp with optimized operating efficiency |
US20080045030A1 (en) | 2006-08-15 | 2008-02-21 | Shigeru Tahara | Substrate processing method, substrate processing system and storage medium |
US7935942B2 (en) | 2006-08-15 | 2011-05-03 | Varian Semiconductor Equipment Associates, Inc. | Technique for low-temperature ion implantation |
WO2008020267A2 (en) | 2006-08-16 | 2008-02-21 | Freescale Semiconductor, Inc. | Etch method in the manufacture of an integrated circuit |
KR100825787B1 (ko) | 2006-08-18 | 2008-04-29 | 삼성전자주식회사 | 전하트랩층을 포함하는 반도체 메모리소자 |
JP5037510B2 (ja) | 2006-08-23 | 2012-09-26 | 株式会社堀場エステック | 集積型ガスパネル装置 |
JP4961895B2 (ja) | 2006-08-25 | 2012-06-27 | 東京エレクトロン株式会社 | ウェハ搬送装置、ウェハ搬送方法及び記憶媒体 |
JP4904995B2 (ja) | 2006-08-28 | 2012-03-28 | シンフォニアテクノロジー株式会社 | ロードポート装置 |
US20080260963A1 (en) | 2007-04-17 | 2008-10-23 | Hyungsuk Alexander Yoon | Apparatus and method for pre and post treatment of atomic layer deposition |
KR100753020B1 (ko) | 2006-08-30 | 2007-08-30 | 한국화학연구원 | 원자층 증착법을 이용한 비휘발성 부유 게이트 메모리소자를 위한 나노적층체의 제조방법 |
US20080063798A1 (en) | 2006-08-30 | 2008-03-13 | Kher Shreyas S | Precursors and hardware for cvd and ald |
US7611980B2 (en) | 2006-08-30 | 2009-11-03 | Micron Technology, Inc. | Single spacer process for multiplying pitch by a factor greater than two and related intermediate IC structures |
US7690881B2 (en) | 2006-08-30 | 2010-04-06 | Asm Japan K.K. | Substrate-processing apparatus with buffer mechanism and substrate-transferring apparatus |
US7605030B2 (en) | 2006-08-31 | 2009-10-20 | Micron Technology, Inc. | Hafnium tantalum oxynitride high-k dielectric and metal gates |
US7759747B2 (en) | 2006-08-31 | 2010-07-20 | Micron Technology, Inc. | Tantalum aluminum oxynitride high-κ dielectric |
US20080057659A1 (en) | 2006-08-31 | 2008-03-06 | Micron Technology, Inc. | Hafnium aluminium oxynitride high-K dielectric and metal gates |
US7544604B2 (en) | 2006-08-31 | 2009-06-09 | Micron Technology, Inc. | Tantalum lanthanide oxynitride films |
US20080241805A1 (en) | 2006-08-31 | 2008-10-02 | Q-Track Corporation | System and method for simulated dosimetry using a real time locating system |
JP4943780B2 (ja) | 2006-08-31 | 2012-05-30 | 株式会社日立ハイテクノロジーズ | プラズマ処理装置およびプラズマ処理方法 |
KR100752190B1 (ko) | 2006-09-04 | 2007-08-27 | 동부일렉트로닉스 주식회사 | 반도체 소자의 갭필 방법 |
JP5138253B2 (ja) | 2006-09-05 | 2013-02-06 | 東京エレクトロン株式会社 | アニール装置 |
ATE474215T1 (de) | 2006-09-06 | 2010-07-15 | Kistler Holding Ag | Temperatursensor mit bearbeitbarer front |
JP4762835B2 (ja) | 2006-09-07 | 2011-08-31 | 東京エレクトロン株式会社 | 基板処理方法、基板処理装置、プログラムおよびプログラム記録媒体 |
KR100761857B1 (ko) | 2006-09-08 | 2007-09-28 | 삼성전자주식회사 | 반도체 소자의 미세패턴 형성방법 및 이를 이용한 반도체소자의 제조방법 |
JP2008066159A (ja) | 2006-09-08 | 2008-03-21 | Noritsu Koki Co Ltd | プラズマ発生装置およびそれを用いるワーク処理装置 |
USD613829S1 (en) | 2006-09-13 | 2010-04-13 | Hayward Industries, Inc. | Circular suction outlet assembly cover |
TWI275658B (en) | 2006-09-13 | 2007-03-11 | Ind Tech Res Inst | Method of improving surface frame resistance of a substrate |
JP2008072030A (ja) | 2006-09-15 | 2008-03-27 | Matsushita Electric Ind Co Ltd | プラズマ処理装置、プラズマ処理装置の異常検出方法、及びプラズマ処理方法 |
US8852349B2 (en) | 2006-09-15 | 2014-10-07 | Applied Materials, Inc. | Wafer processing hardware for epitaxial deposition with reduced auto-doping and backside defects |
US7789965B2 (en) | 2006-09-19 | 2010-09-07 | Asm Japan K.K. | Method of cleaning UV irradiation chamber |
US7976898B2 (en) | 2006-09-20 | 2011-07-12 | Asm Genitech Korea Ltd. | Atomic layer deposition apparatus |
US20080194113A1 (en) | 2006-09-20 | 2008-08-14 | Samsung Electronics Co., Ltd. | Methods and apparatus for semiconductor etching including an electro static chuck |
US7902991B2 (en) | 2006-09-21 | 2011-03-08 | Applied Materials, Inc. | Frequency monitoring to detect plasma process abnormality |
US9632073B2 (en) | 2012-04-02 | 2017-04-25 | Lux Bio Group, Inc. | Apparatus and method for molecular separation, purification, and sensing |
JP2008074963A (ja) | 2006-09-21 | 2008-04-03 | Fujifilm Corp | 組成物、膜、およびその製造方法 |
US7718553B2 (en) | 2006-09-21 | 2010-05-18 | Asm Japan K.K. | Method for forming insulation film having high density |
JP4899744B2 (ja) | 2006-09-22 | 2012-03-21 | 東京エレクトロン株式会社 | 被処理体の酸化装置 |
US7829815B2 (en) | 2006-09-22 | 2010-11-09 | Taiwan Semiconductor Manufacturing Co., Ltd. | Adjustable electrodes and coils for plasma density distribution control |
US7740437B2 (en) | 2006-09-22 | 2010-06-22 | Asm International N.V. | Processing system with increased cassette storage capacity |
US7723648B2 (en) | 2006-09-25 | 2010-05-25 | Tokyo Electron Limited | Temperature controlled substrate holder with non-uniform insulation layer for a substrate processing system |
WO2008039448A2 (en) | 2006-09-25 | 2008-04-03 | Lightsources Inc. | Snap-lock connector |
JP4814038B2 (ja) | 2006-09-25 | 2011-11-09 | 株式会社日立国際電気 | 基板処理装置および反応容器の着脱方法 |
WO2008039465A2 (en) | 2006-09-25 | 2008-04-03 | E. I. Du Pont De Nemours And Company | Method for removing surface deposits in the interior of a chemical vapor deposition reactor |
USD634329S1 (en) | 2006-09-26 | 2011-03-15 | Margareta Wastrom | Computer platform with forearm support |
US8137048B2 (en) | 2006-09-27 | 2012-03-20 | Vserv Technologies | Wafer processing system with dual wafer robots capable of asynchronous motion |
TWI462179B (zh) | 2006-09-28 | 2014-11-21 | Tokyo Electron Ltd | 用以形成氧化矽膜之成膜方法與裝置 |
US7476291B2 (en) | 2006-09-28 | 2009-01-13 | Lam Research Corporation | High chamber temperature process and chamber design for photo-resist stripping and post-metal etch passivation |
JP2008085129A (ja) | 2006-09-28 | 2008-04-10 | Taiheiyo Cement Corp | 基板載置装置 |
DE102006046374B4 (de) | 2006-09-29 | 2010-11-11 | Advanced Micro Devices, Inc., Sunnyvale | Verfahren zum Reduzieren der Lackvergiftung während des Strukturierens von Siliziumnitridschichten in einem Halbleiterbauelement |
US7767262B2 (en) | 2006-09-29 | 2010-08-03 | Tokyo Electron Limited | Nitrogen profile engineering in nitrided high dielectric constant films |
JP2008089320A (ja) | 2006-09-29 | 2008-04-17 | Nicom Co Ltd | 流量計測装置 |
KR100799152B1 (ko) | 2006-10-02 | 2008-01-29 | 주식회사 하이닉스반도체 | 스토리지노드 쓰러짐을 방지한 실린더형 캐패시터의 제조방법 |
TW200822253A (en) | 2006-10-02 | 2008-05-16 | Matsushita Electric Ind Co Ltd | Component crimping apparatus control method, component crimping apparatus, and measuring tool |
JP2008091761A (ja) | 2006-10-04 | 2008-04-17 | Hitachi Kokusai Electric Inc | 基板処理装置及び半導体装置の製造方法 |
KR101427142B1 (ko) | 2006-10-05 | 2014-08-07 | 에이에스엠 아메리카, 인코포레이티드 | 금속 규산염 막의 원자층 증착 |
US7494884B2 (en) | 2006-10-05 | 2009-02-24 | Taiwan Semiconductor Manufacturing Company, Ltd. | SiGe selective growth without a hard mask |
USD593969S1 (en) | 2006-10-10 | 2009-06-09 | Tokyo Electron Limited | Processing chamber for manufacturing semiconductors |
US8986456B2 (en) | 2006-10-10 | 2015-03-24 | Asm America, Inc. | Precursor delivery system |
JP5073751B2 (ja) | 2006-10-10 | 2012-11-14 | エーエスエム アメリカ インコーポレイテッド | 前駆体送出システム |
NZ550531A (en) | 2006-10-12 | 2009-05-31 | Canterprise Ltd | A method of producing an implant with an improved bone growth surface |
US20080087890A1 (en) | 2006-10-16 | 2008-04-17 | Micron Technology, Inc. | Methods to form dielectric structures in semiconductor devices and resulting devices |
CN100451163C (zh) | 2006-10-18 | 2009-01-14 | 中微半导体设备(上海)有限公司 | 用于半导体工艺件处理反应器的气体分布装置及其反应器 |
JP2008108860A (ja) | 2006-10-25 | 2008-05-08 | Elpida Memory Inc | 半導体装置の製造方法 |
US20080099147A1 (en) | 2006-10-26 | 2008-05-01 | Nyi Oo Myo | Temperature controlled multi-gas distribution assembly |
US8795771B2 (en) | 2006-10-27 | 2014-08-05 | Sean T. Barry | ALD of metal-containing films using cyclopentadienyl compounds |
JP2008108991A (ja) | 2006-10-27 | 2008-05-08 | Daihen Corp | ワーク保持機構 |
US7851232B2 (en) | 2006-10-30 | 2010-12-14 | Novellus Systems, Inc. | UV treatment for carbon-containing low-k dielectric repair in semiconductor processing |
US7727864B2 (en) | 2006-11-01 | 2010-06-01 | Asm America, Inc. | Controlled composition using plasma-enhanced atomic layer deposition |
US7888273B1 (en) | 2006-11-01 | 2011-02-15 | Novellus Systems, Inc. | Density gradient-free gap fill |
US7611751B2 (en) | 2006-11-01 | 2009-11-03 | Asm America, Inc. | Vapor deposition of metal carbide films |
US9245739B2 (en) | 2006-11-01 | 2016-01-26 | Lam Research Corporation | Low-K oxide deposition by hydrolysis and condensation |
JP2008117903A (ja) | 2006-11-02 | 2008-05-22 | Toshiba Corp | 半導体装置の製造方法 |
US7955516B2 (en) | 2006-11-02 | 2011-06-07 | Applied Materials, Inc. | Etching of nano-imprint templates using an etch reactor |
US8084368B2 (en) | 2006-11-09 | 2011-12-27 | Ulvac, Inc. | Method of forming barrier film |
WO2008056295A1 (en) | 2006-11-09 | 2008-05-15 | Nxp B.V. | A semiconductor device and a method of manufacturing thereof |
JP4464949B2 (ja) | 2006-11-10 | 2010-05-19 | 株式会社日立国際電気 | 基板処理装置及び選択エピタキシャル膜成長方法 |
KR101447184B1 (ko) | 2006-11-10 | 2014-10-08 | 엘아이지에이디피 주식회사 | 게이트슬릿 개폐장치가 구비된 공정챔버 |
US7776395B2 (en) | 2006-11-14 | 2010-08-17 | Applied Materials, Inc. | Method of depositing catalyst assisted silicates of high-k materials |
US7749574B2 (en) | 2006-11-14 | 2010-07-06 | Applied Materials, Inc. | Low temperature ALD SiO2 |
US20080179104A1 (en) | 2006-11-14 | 2008-07-31 | Smith International, Inc. | Nano-reinforced wc-co for improved properties |
US7671134B2 (en) | 2006-11-15 | 2010-03-02 | Brady Worldwide, Inc. | Compositions with improved adhesion to low surface energy substrates |
US7976634B2 (en) | 2006-11-21 | 2011-07-12 | Applied Materials, Inc. | Independent radiant gas preheating for precursor disassociation control and gas reaction kinetics in low temperature CVD systems |
US20090223441A1 (en) | 2006-11-22 | 2009-09-10 | Chantal Arena | High volume delivery system for gallium trichloride |
US20080118334A1 (en) | 2006-11-22 | 2008-05-22 | Bonora Anthony C | Variable pitch storage shelves |
US8128333B2 (en) | 2006-11-27 | 2012-03-06 | Hitachi Kokusai Electric Inc. | Substrate processing apparatus and manufacturing method for semiconductor devices |
US20080121177A1 (en) | 2006-11-28 | 2008-05-29 | Applied Materials, Inc. | Dual top gas feed through distributor for high density plasma chamber |
US7758698B2 (en) | 2006-11-28 | 2010-07-20 | Applied Materials, Inc. | Dual top gas feed through distributor for high density plasma chamber |
US20080124946A1 (en) | 2006-11-28 | 2008-05-29 | Air Products And Chemicals, Inc. | Organosilane compounds for modifying dielectrical properties of silicon oxide and silicon nitride films |
US7807575B2 (en) | 2006-11-29 | 2010-10-05 | Micron Technology, Inc. | Methods to reduce the critical dimension of semiconductor devices |
US7853364B2 (en) | 2006-11-30 | 2010-12-14 | Veeco Instruments, Inc. | Adaptive controller for ion source |
US20080132046A1 (en) | 2006-12-04 | 2008-06-05 | Varian Semiconductor Equipment Associates, Inc. | Plasma Doping With Electronically Controllable Implant Angle |
US20080193673A1 (en) | 2006-12-05 | 2008-08-14 | Applied Materials, Inc. | Method of processing a workpiece using a mid-chamber gas distribution plate, tuned plasma flow control grid and electrode |
US7906174B1 (en) | 2006-12-07 | 2011-03-15 | Novellus Systems, Inc. | PECVD methods for producing ultra low-k dielectric films using UV treatment |
US20080142483A1 (en) | 2006-12-07 | 2008-06-19 | Applied Materials, Inc. | Multi-step dep-etch-dep high density plasma chemical vapor deposition processes for dielectric gapfills |
EP2089897A2 (en) | 2006-12-07 | 2009-08-19 | Innovalight, Inc. | Methods for creating a densified group iv semiconductor nanoparticle thin film |
JP2008147393A (ja) | 2006-12-08 | 2008-06-26 | Toshiba Corp | 半導体装置及びその製造方法 |
US20080202689A1 (en) | 2006-12-08 | 2008-08-28 | Tes Co., Ltd. | Plasma processing apparatus |
US7960236B2 (en) | 2006-12-12 | 2011-06-14 | Applied Materials, Inc. | Phosphorus containing Si epitaxial layers in N-type source/drain junctions |
US20080173238A1 (en) | 2006-12-12 | 2008-07-24 | Hitachi Kokusai Electric Inc. | Substrate processing apparatus, method of manufacturing semiconductor device, and reaction vessel |
US20080142046A1 (en) | 2006-12-13 | 2008-06-19 | Andrew David Johnson | Thermal F2 etch process for cleaning CVD chambers |
US7378618B1 (en) | 2006-12-14 | 2008-05-27 | Applied Materials, Inc. | Rapid conductive cooling using a secondary process plane |
USD583395S1 (en) | 2006-12-15 | 2008-12-23 | Tokyo Electron Limited | Cover for a heater stage of a plasma processing apparatus |
WO2008072164A1 (en) | 2006-12-15 | 2008-06-19 | Nxp B.V. | Transistor device and method of manufacturing such a transistor device |
WO2008075280A1 (en) | 2006-12-19 | 2008-06-26 | Philips Intellectual Property & Standards Gmbh | System for and method of heating objects in a production line |
US8178436B2 (en) | 2006-12-21 | 2012-05-15 | Intel Corporation | Adhesion and electromigration performance at an interface between a dielectric and metal |
KR20080058620A (ko) | 2006-12-22 | 2008-06-26 | 세메스 주식회사 | 복수 개의 노즐들로 가스를 분할 공급하는 플라즈마 화학기상 증착 설비 |
JP4553891B2 (ja) | 2006-12-27 | 2010-09-29 | シャープ株式会社 | 半導体層製造方法 |
DE202006019492U1 (de) | 2006-12-27 | 2007-03-01 | Blum, Holger | Filter- und Sterilisiervorrichtung |
US8120114B2 (en) | 2006-12-27 | 2012-02-21 | Intel Corporation | Transistor having an etch stop layer including a metal compound that is selectively formed over a metal gate |
JP2008166360A (ja) | 2006-12-27 | 2008-07-17 | Hitachi Ltd | 半導体集積回路装置 |
US7682891B2 (en) | 2006-12-28 | 2010-03-23 | Intel Corporation | Tunable gate electrode work function material for transistor applications |
US8011317B2 (en) | 2006-12-29 | 2011-09-06 | Intermolecular, Inc. | Advanced mixing system for integrated tool having site-isolated reactors |
GB2445188B (en) | 2006-12-29 | 2009-07-01 | Thermo Fisher Scientific Inc | Apparatus and method for generating nitrogen oxides |
KR100877153B1 (ko) | 2007-01-09 | 2009-01-09 | 한국전자통신연구원 | 전자소자용 ZnO 반도체막 형성방법 및 상기 반도체막을포함하는 박막 트랜지스터 |
JP2008172083A (ja) | 2007-01-12 | 2008-07-24 | Sharp Corp | 気相成長装置および気相成長方法 |
US7860379B2 (en) | 2007-01-15 | 2010-12-28 | Applied Materials, Inc. | Temperature measurement and control of wafer support in thermal processing chamber |
DE102007003416A1 (de) | 2007-01-16 | 2008-07-17 | Hansgrohe Ag | Duschvorrichtung |
JP5108489B2 (ja) | 2007-01-16 | 2012-12-26 | 株式会社日立ハイテクノロジーズ | プラズマ処理方法 |
CN101583736A (zh) | 2007-01-19 | 2009-11-18 | 应用材料股份有限公司 | 浸没式等离子体室 |
US7725012B2 (en) | 2007-01-19 | 2010-05-25 | Asm America, Inc. | Movable radiant heat sources |
DE102007002962B3 (de) | 2007-01-19 | 2008-07-31 | Qimonda Ag | Verfahren zum Herstellen einer dielektrischen Schicht und zum Herstellen eines Kondensators |
WO2008143716A2 (en) | 2007-01-22 | 2008-11-27 | Innovalight, Inc. | In situ modification of group iv nanoparticles using gas phase nanoparticle reactors |
JP5109376B2 (ja) | 2007-01-22 | 2012-12-26 | 東京エレクトロン株式会社 | 加熱装置、加熱方法及び記憶媒体 |
JP4299863B2 (ja) | 2007-01-22 | 2009-07-22 | エルピーダメモリ株式会社 | 半導体装置の製造方法 |
US7993457B1 (en) | 2007-01-23 | 2011-08-09 | Novellus Systems, Inc. | Deposition sub-chamber with variable flow |
US7550090B2 (en) | 2007-01-23 | 2009-06-23 | Applied Materials, Inc. | Oxygen plasma clean to remove carbon species deposited on a glass dome surface |
US7833353B2 (en) | 2007-01-24 | 2010-11-16 | Asm Japan K.K. | Liquid material vaporization apparatus for semiconductor processing apparatus |
US20080173239A1 (en) | 2007-01-24 | 2008-07-24 | Yuri Makarov | Method, system, and apparatus for the growth of SiC and related or similar material, by chemical vapor deposition, using precursors in modified cold-wall reactor |
US7858898B2 (en) | 2007-01-26 | 2010-12-28 | Lam Research Corporation | Bevel etcher with gap control |
KR20090104896A (ko) | 2007-01-26 | 2009-10-06 | 어플라이드 머티어리얼스, 인코포레이티드 | 공기―갭 ild를 위한 pecvd-증착된 희생 폴리머 필름의 uv 경화 |
JP4564973B2 (ja) | 2007-01-26 | 2010-10-20 | 株式会社日立ハイテクノロジーズ | プラズマ処理装置 |
US7598170B2 (en) | 2007-01-26 | 2009-10-06 | Asm America, Inc. | Plasma-enhanced ALD of tantalum nitride films |
US7967996B2 (en) | 2007-01-30 | 2011-06-28 | Applied Materials, Inc. | Process for wafer backside polymer removal and wafer front side photoresist removal |
JP4270284B2 (ja) | 2007-01-30 | 2009-05-27 | トヨタ自動車株式会社 | 車輪状態監視システムおよび車輪状態検出装置 |
US20080179715A1 (en) | 2007-01-30 | 2008-07-31 | Micron Technology, Inc. | Shallow trench isolation using atomic layer deposition during fabrication of a semiconductor device |
JP2008192643A (ja) | 2007-01-31 | 2008-08-21 | Tokyo Electron Ltd | 基板処理装置 |
DE102007004867B4 (de) | 2007-01-31 | 2009-07-30 | Advanced Micro Devices, Inc., Sunnyvale | Verfahren zum Erhöhen der Zuverlässigkeit von kupferbasierten Metallisierungsstrukturen in einem Mikrostrukturbauelement durch Anwenden von Aluminiumnitrid |
JP4569638B2 (ja) | 2007-01-31 | 2010-10-27 | 株式会社デンソー | 温度センサ |
JP4896899B2 (ja) | 2007-01-31 | 2012-03-14 | 東京エレクトロン株式会社 | 基板処理装置およびパーティクル付着防止方法 |
KR101144497B1 (ko) | 2007-02-06 | 2012-05-11 | 샌트랄 글래스 컴퍼니 리미티드 | 저유전율막의 개질제 및 제조방법 |
JP2008198629A (ja) | 2007-02-08 | 2008-08-28 | Mitsubishi Electric Corp | 表面処理方法および太陽電池セル |
US7959735B2 (en) | 2007-02-08 | 2011-06-14 | Applied Materials, Inc. | Susceptor with insulative inserts |
US8043432B2 (en) | 2007-02-12 | 2011-10-25 | Tokyo Electron Limited | Atomic layer deposition systems and methods |
US7892964B2 (en) | 2007-02-14 | 2011-02-22 | Micron Technology, Inc. | Vapor deposition methods for forming a metal-containing layer on a substrate |
US7851360B2 (en) | 2007-02-14 | 2010-12-14 | Intel Corporation | Organometallic precursors for seed/barrier processes and methods thereof |
US7500397B2 (en) | 2007-02-15 | 2009-03-10 | Air Products And Chemicals, Inc. | Activated chemical process for enhancing material properties of dielectric films |
USD576001S1 (en) | 2007-02-16 | 2008-09-02 | Brenda Brunderman | Faux brick tool |
JP4805862B2 (ja) | 2007-02-21 | 2011-11-02 | 富士通セミコンダクター株式会社 | 基板処理装置、基板処理方法、及び半導体装置の製造方法 |
JP2008202107A (ja) | 2007-02-21 | 2008-09-04 | Hitachi Kokusai Electric Inc | 基板処理装置 |
KR101483318B1 (ko) | 2007-02-21 | 2015-01-16 | 레르 리키드 쏘시에떼 아노님 뿌르 레?드 에렉스뿔라따시옹 데 프로세데 조르즈 클로드 | 기판상에 루테늄계 막을 형성하는 방법 |
US7871198B2 (en) | 2007-02-26 | 2011-01-18 | Battelle Energy Alliance, Llc | High-temperature thermocouples and related methods |
US20080207007A1 (en) | 2007-02-27 | 2008-08-28 | Air Products And Chemicals, Inc. | Plasma Enhanced Cyclic Chemical Vapor Deposition of Silicon-Containing Films |
DE102007009914B4 (de) | 2007-02-28 | 2010-04-22 | Advanced Micro Devices, Inc., Sunnyvale | Halbleiterbauelement in Form eines Feldeffekttransistors mit einem Zwischenschichtdielektrikumsmaterial mit erhöhter innerer Verspannung und Verfahren zur Herstellung desselben |
KR101374583B1 (ko) | 2007-03-01 | 2014-03-17 | 어플라이드 머티어리얼스, 인코포레이티드 | Rf 셔터 |
US20080216077A1 (en) | 2007-03-02 | 2008-09-04 | Applied Materials, Inc. | Software sequencer for integrated substrate processing system |
US20080216958A1 (en) | 2007-03-07 | 2008-09-11 | Novellus Systems, Inc. | Plasma Reaction Apparatus Having Pre-Seasoned Showerheads and Methods for Manufacturing the Same |
US20080220619A1 (en) | 2007-03-09 | 2008-09-11 | Asm Japan K.K. | Method for increasing mechanical strength of dielectric film by using sequential combination of two types of uv irradiation |
US8012259B2 (en) | 2007-03-09 | 2011-09-06 | Hitachi Kokusai Electric, Inc. | Substrate processing apparatus |
US20080223130A1 (en) | 2007-03-13 | 2008-09-18 | Provina Incorporated | Method and device for measuring density of a liquid |
DE602008003316D1 (de) | 2007-03-16 | 2010-12-16 | Philips Intellectual Property | Oberflächenemittierender laser mit einem erweiterten vertikalen resonator und verfahren zur herstellung einer zugehörigen lichtemittierenden komponente |
US7621672B2 (en) | 2007-03-19 | 2009-11-24 | Babcock & Wilcox Technical Services Y-12, Llc | Thermocouple shield |
US20080230352A1 (en) | 2007-03-20 | 2008-09-25 | Yasunari Hirata | Conveyer apparatus |
US7607647B2 (en) | 2007-03-20 | 2009-10-27 | Kla-Tencor Technologies Corporation | Stabilizing a substrate using a vacuum preload air bearing chuck |
US7833913B2 (en) | 2007-03-20 | 2010-11-16 | Tokyo Electron Limited | Method of forming crystallographically stabilized doped hafnium zirconium based films |
US8906249B2 (en) | 2007-03-22 | 2014-12-09 | Panasonic Corporation | Plasma processing apparatus and plasma processing method |
US8298379B2 (en) | 2007-03-22 | 2012-10-30 | Tokyo Electron Limited | Method and apparatus for extending chamber component life in a substrate processing system |
US7763869B2 (en) | 2007-03-23 | 2010-07-27 | Asm Japan K.K. | UV light irradiating apparatus with liquid filter |
KR20070041701A (ko) | 2007-03-26 | 2007-04-19 | 노영환 | 제습냉난방환기 시스템 |
US7435987B1 (en) | 2007-03-27 | 2008-10-14 | Intel Corporation | Forming a type I heterostructure in a group IV semiconductor |
JP5034594B2 (ja) | 2007-03-27 | 2012-09-26 | 東京エレクトロン株式会社 | 成膜装置、成膜方法及び記憶媒体 |
KR101119627B1 (ko) | 2007-03-29 | 2012-03-07 | 도쿄엘렉트론가부시키가이샤 | 플라즈마 처리 장치 |
US20080241387A1 (en) | 2007-03-29 | 2008-10-02 | Asm International N.V. | Atomic layer deposition reactor |
US7588749B2 (en) | 2007-03-29 | 2009-09-15 | Minimus Spine, Inc. | Apparatus, method and system for delivering oxygen-ozone |
US20080237604A1 (en) | 2007-03-30 | 2008-10-02 | Husam Niman Alshareef | Plasma nitrided gate oxide, high-k metal gate based cmos device |
JP2008251826A (ja) | 2007-03-30 | 2008-10-16 | Nec Electronics Corp | 半導体装置の製造方法 |
US7651961B2 (en) | 2007-03-30 | 2010-01-26 | Tokyo Electron Limited | Method for forming strained silicon nitride films and a device containing such films |
US20080241384A1 (en) | 2007-04-02 | 2008-10-02 | Asm Genitech Korea Ltd. | Lateral flow deposition apparatus and method of depositing film by using the apparatus |
ITMI20070671A1 (it) | 2007-04-02 | 2008-10-03 | St Microelectronics Srl | Architettura circuitale su base organica e relativo metodo fi realizzazione |
US8235001B2 (en) | 2007-04-02 | 2012-08-07 | Hitachi Kokusai Electric Inc. | Substrate processing apparatus and method for manufacturing semiconductor device |
US8242028B1 (en) | 2007-04-03 | 2012-08-14 | Novellus Systems, Inc. | UV treatment of etch stop and hard mask films for selectivity and hermeticity enhancement |
KR100829759B1 (ko) | 2007-04-04 | 2008-05-15 | 삼성에스디아이 주식회사 | 카바이드 유도 탄소를 이용한 카본나노튜브 혼성체, 이를포함하는 전자 방출원 및 상기 전자 방출원을 구비한 전자방출 소자 |
US20080246101A1 (en) | 2007-04-05 | 2008-10-09 | Applied Materials Inc. | Method of poly-silicon grain structure formation |
US7592212B2 (en) | 2007-04-06 | 2009-09-22 | Micron Technology, Inc. | Methods for determining a dose of an impurity implanted in a semiconductor substrate |
WO2008127935A1 (en) | 2007-04-13 | 2008-10-23 | The Board Of Trustees Of The University Of Illinois | Metal complex compositions and methods for making metal-containing films |
CN101641272B (zh) | 2007-04-16 | 2011-11-16 | 株式会社爱发科 | 输送机和成膜装置及其维护方法 |
US8419854B2 (en) | 2007-04-17 | 2013-04-16 | Ulvac, Inc. | Film-forming apparatus |
US7807579B2 (en) | 2007-04-19 | 2010-10-05 | Applied Materials, Inc. | Hydrogen ashing enhanced with water vapor and diluent gas |
US20080257102A1 (en) | 2007-04-20 | 2008-10-23 | William Packer | Mechanically retained motorcycle handlebar grips |
USD562357S1 (en) | 2007-04-20 | 2008-02-19 | Alamo Group, Inc. | Disk for rotary mower knives |
US8357214B2 (en) | 2007-04-26 | 2013-01-22 | Trulite, Inc. | Apparatus, system, and method for generating a gas from solid reactant pouches |
JP4853374B2 (ja) | 2007-04-27 | 2012-01-11 | 東京エレクトロン株式会社 | 塗布、現像装置及びその方法並びに記憶媒体 |
US7575968B2 (en) | 2007-04-30 | 2009-08-18 | Freescale Semiconductor, Inc. | Inverse slope isolation and dual surface orientation integration |
US7713874B2 (en) | 2007-05-02 | 2010-05-11 | Asm America, Inc. | Periodic plasma annealing in an ALD-type process |
KR100894098B1 (ko) | 2007-05-03 | 2009-04-20 | 주식회사 하이닉스반도체 | 빠른 소거속도 및 향상된 리텐션 특성을 갖는 불휘발성메모리소자 및 그 제조방법 |
US20110067522A1 (en) | 2007-05-08 | 2011-03-24 | Lai Ching-Chuan | Bicycle handlebar grip |
DE102007022431A1 (de) | 2007-05-09 | 2008-11-13 | Leybold Optics Gmbh | Behandlungssystem für flache Substrate |
US8057601B2 (en) | 2007-05-09 | 2011-11-15 | Applied Materials, Inc. | Apparatus and method for supporting, positioning and rotating a substrate in a processing chamber |
US8110099B2 (en) | 2007-05-09 | 2012-02-07 | Contech Stormwater Solutions Inc. | Stormwater filter assembly |
JP2009024252A (ja) | 2007-05-15 | 2009-02-05 | Applied Materials Inc | タングステン材料の原子層堆積法 |
US7750429B2 (en) | 2007-05-15 | 2010-07-06 | International Business Machines Corporation | Self-aligned and extended inter-well isolation structure |
JP5103056B2 (ja) | 2007-05-15 | 2012-12-19 | ルネサスエレクトロニクス株式会社 | 半導体装置の製造方法 |
GB0709723D0 (en) | 2007-05-22 | 2007-06-27 | Goodrich Control Sys Ltd | Temperature sensing |
JP4898556B2 (ja) | 2007-05-23 | 2012-03-14 | 株式会社日立ハイテクノロジーズ | プラズマ処理装置 |
US7874726B2 (en) | 2007-05-24 | 2011-01-25 | Asm America, Inc. | Thermocouple |
US20080289650A1 (en) | 2007-05-24 | 2008-11-27 | Asm America, Inc. | Low-temperature cleaning of native oxide |
US7942969B2 (en) | 2007-05-30 | 2011-05-17 | Applied Materials, Inc. | Substrate cleaning chamber and components |
US20080299326A1 (en) | 2007-05-30 | 2008-12-04 | Asm Japan K.K. | Plasma cvd apparatus having non-metal susceptor |
CN103862463B (zh) | 2007-05-31 | 2017-08-15 | 应用材料公司 | 延伸双scara机械手连接装置的伸出距离的方法及设备 |
US20090017631A1 (en) | 2007-06-01 | 2009-01-15 | Bencher Christopher D | Self-aligned pillar patterning using multiple spacer masks |
US7807578B2 (en) | 2007-06-01 | 2010-10-05 | Applied Materials, Inc. | Frequency doubling using spacer mask |
US8084352B2 (en) | 2007-06-04 | 2011-12-27 | Panasonic Corporation | Method of manufacturing semiconductor device |
US7781352B2 (en) | 2007-06-06 | 2010-08-24 | Asm Japan K.K. | Method for forming inorganic silazane-based dielectric film |
US20080302303A1 (en) | 2007-06-07 | 2008-12-11 | Applied Materials, Inc. | Methods and apparatus for depositing a uniform silicon film with flow gradient designs |
US7955650B2 (en) | 2007-06-07 | 2011-06-07 | Asm Japan K.K. | Method for forming dielectric film using porogen gas |
US20080305014A1 (en) | 2007-06-07 | 2008-12-11 | Hitachi Kokusai Electric Inc. | Substrate processing apparatus |
US8142606B2 (en) | 2007-06-07 | 2012-03-27 | Applied Materials, Inc. | Apparatus for depositing a uniform silicon film and methods for manufacturing the same |
WO2008149989A1 (ja) | 2007-06-08 | 2008-12-11 | Tokyo Electron Limited | パターニング方法 |
KR101217778B1 (ko) | 2007-06-08 | 2013-01-02 | 도쿄엘렉트론가부시키가이샤 | 패터닝 방법 |
US20080303744A1 (en) | 2007-06-11 | 2008-12-11 | Tokyo Electron Limited | Plasma processing system, antenna, and use of plasma processing system |
JP4427562B2 (ja) | 2007-06-11 | 2010-03-10 | 株式会社東芝 | パターン形成方法 |
US8329541B2 (en) | 2007-06-15 | 2012-12-11 | Taiwan Semiconductor Manufacturing Company, Ltd. | InP-based transistor fabrication |
US20080314319A1 (en) | 2007-06-19 | 2008-12-25 | Memc Electronic Materials, Inc. | Susceptor for improving throughput and reducing wafer damage |
US8017182B2 (en) | 2007-06-21 | 2011-09-13 | Asm International N.V. | Method for depositing thin films by mixed pulsed CVD and ALD |
USD575713S1 (en) | 2007-06-21 | 2008-08-26 | Ratcliffe Peter W | Vehicle accessory |
CN100590804C (zh) | 2007-06-22 | 2010-02-17 | 中芯国际集成电路制造(上海)有限公司 | 原子层沉积方法以及形成的半导体器件 |
US20080314892A1 (en) | 2007-06-25 | 2008-12-25 | Graham Robert G | Radiant shield |
US20090004875A1 (en) | 2007-06-27 | 2009-01-01 | Meihua Shen | Methods of trimming amorphous carbon film for forming ultra thin structures on a substrate |
US8905124B2 (en) | 2007-06-27 | 2014-12-09 | Taiwan Semiconductor Manufacturing Company, Ltd. | Temperature controlled loadlock chamber |
JP2011511881A (ja) | 2007-06-28 | 2011-04-14 | アドバンスド テクノロジー マテリアルズ,インコーポレイテッド | 二酸化ケイ素ギャップ充填材のための前駆体 |
US20090000550A1 (en) | 2007-06-29 | 2009-01-01 | Applied Materials, Inc. | Manifold assembly |
TW200903625A (en) | 2007-07-04 | 2009-01-16 | Advanced Micro Fab Equip Inc | Multi-station decoupled reactive ion etch chamber |
US20090033907A1 (en) | 2007-07-05 | 2009-02-05 | Nikon Corporation | Devices and methods for decreasing residual chucking forces |
JP2009016672A (ja) | 2007-07-06 | 2009-01-22 | Tokyo Electron Ltd | 半導体装置の製造方法、半導体装置、半導体製造装置及び記憶媒体。 |
US7875486B2 (en) | 2007-07-10 | 2011-01-25 | Applied Materials, Inc. | Solar cells and methods and apparatuses for forming the same including I-layer and N-layer chamber cleaning |
US8021514B2 (en) | 2007-07-11 | 2011-09-20 | Applied Materials, Inc. | Remote plasma source for pre-treatment of substrates prior to deposition |
US8322533B2 (en) | 2007-07-11 | 2012-12-04 | Shin-Etsu Polymer Co., Ltd. | Lid body for substrate storage container and substrate storage container |
KR101275025B1 (ko) | 2007-07-12 | 2013-06-14 | 삼성전자주식회사 | 반도체 소자용 배선 구조물 및 이의 형성방법 |
US7501292B2 (en) | 2007-07-19 | 2009-03-10 | Asm Japan K.K. | Method for managing UV irradiation for curing semiconductor substrate |
US7651269B2 (en) | 2007-07-19 | 2010-01-26 | Lam Research Corporation | Temperature probes having a thermally isolated tip |
JP4900110B2 (ja) | 2007-07-20 | 2012-03-21 | 東京エレクトロン株式会社 | 薬液気化タンク及び薬液処理システム |
US7720560B2 (en) | 2007-07-26 | 2010-05-18 | International Business Machines Corporation | Semiconductor manufacturing process monitoring |
US8008166B2 (en) | 2007-07-26 | 2011-08-30 | Applied Materials, Inc. | Method and apparatus for cleaning a substrate surface |
US8004045B2 (en) | 2007-07-27 | 2011-08-23 | Panasonic Corporation | Semiconductor device and method for producing the same |
USD596476S1 (en) | 2007-07-27 | 2009-07-21 | Daniel P. Welch | Handle bar grip |
JP5058084B2 (ja) | 2007-07-27 | 2012-10-24 | 株式会社半導体エネルギー研究所 | 光電変換装置の作製方法及びマイクロ波プラズマcvd装置 |
US7910497B2 (en) | 2007-07-30 | 2011-03-22 | Applied Materials, Inc. | Method of forming dielectric layers on a substrate and apparatus therefor |
US8980756B2 (en) | 2007-07-30 | 2015-03-17 | Micron Technology, Inc. | Methods for device fabrication using pitch reduction |
US20090035946A1 (en) | 2007-07-31 | 2009-02-05 | Asm International N.V. | In situ deposition of different metal-containing films using cyclopentadienyl metal precursors |
US8367227B2 (en) | 2007-08-02 | 2013-02-05 | Applied Materials, Inc. | Plasma-resistant ceramics with controlled electrical resistivity |
US8021968B2 (en) | 2007-08-03 | 2011-09-20 | Shin-Etsu Handotai Co., Ltd. | Susceptor and method for manufacturing silicon epitaxial wafer |
US20090035463A1 (en) | 2007-08-03 | 2009-02-05 | Tokyo Electron Limited | Thermal processing system and method for forming an oxide layer on substrates |
JP2009044023A (ja) | 2007-08-10 | 2009-02-26 | Hitachi Kokusai Electric Inc | 半導体装置の製造方法および基板処理装置 |
US20090041952A1 (en) | 2007-08-10 | 2009-02-12 | Asm Genitech Korea Ltd. | Method of depositing silicon oxide films |
WO2009023169A1 (en) | 2007-08-10 | 2009-02-19 | Nano Terra Inc. | Structured smudge-resistant coatings and methods of making and using the same |
TWI405295B (zh) | 2007-08-13 | 2013-08-11 | Advanced Display Proc Eng Co | 基板處理裝置及方法 |
US8443484B2 (en) | 2007-08-14 | 2013-05-21 | Hitachi Kokusai Electric Inc. | Substrate processing apparatus |
GB0715854D0 (en) | 2007-08-15 | 2007-09-26 | Enigma Diagnostics Ltd | Apparatus and method for calibration of non-contact thermal sensors |
KR20090018290A (ko) | 2007-08-17 | 2009-02-20 | 에이에스엠지니텍코리아 주식회사 | 증착 장치 |
JP5514413B2 (ja) | 2007-08-17 | 2014-06-04 | 東京エレクトロン株式会社 | プラズマエッチング方法 |
US8084372B2 (en) | 2007-08-24 | 2011-12-27 | Tokyo Electron Limited | Substrate processing method and computer storage medium |
US20090052498A1 (en) | 2007-08-24 | 2009-02-26 | Asm America, Inc. | Thermocouple |
US7745352B2 (en) | 2007-08-27 | 2010-06-29 | Applied Materials, Inc. | Curing methods for silicon dioxide thin films deposited from alkoxysilane precursor with harp II process |
US20100252434A1 (en) | 2007-08-28 | 2010-10-07 | University Of Florida Research Foundation, Inc. | Bio-Sensor Using Gated Electrokinetic Transport |
WO2009028619A1 (ja) | 2007-08-30 | 2009-03-05 | Tokyo Electron Limited | 処理ガス供給システム及び処理装置 |
JP2009076881A (ja) | 2007-08-30 | 2009-04-09 | Tokyo Electron Ltd | 処理ガス供給システム及び処理装置 |
US8962101B2 (en) | 2007-08-31 | 2015-02-24 | Novellus Systems, Inc. | Methods and apparatus for plasma-based deposition |
JP2009060035A (ja) | 2007-09-03 | 2009-03-19 | Shinko Electric Ind Co Ltd | 静電チャック部材、その製造方法及び静電チャック装置 |
US7831135B2 (en) | 2007-09-04 | 2010-11-09 | Sokudo Co., Ltd. | Method and system for controlling bake plate temperature in a semiconductor processing chamber |
US7879250B2 (en) | 2007-09-05 | 2011-02-01 | Applied Materials, Inc. | Method of processing a workpiece in a plasma reactor with independent wafer edge process gas injection |
US7832354B2 (en) | 2007-09-05 | 2010-11-16 | Applied Materials, Inc. | Cathode liner with wafer edge gas injection in a plasma reactor chamber |
US8334015B2 (en) | 2007-09-05 | 2012-12-18 | Intermolecular, Inc. | Vapor based combinatorial processing |
JP5663305B2 (ja) | 2007-09-07 | 2015-02-04 | フジフィルム マニュファクチュアリング ヨーロッパ ビー.ヴィ. | 大気圧グロー放電プラズマを用いる原子層堆積の方法及び装置 |
CA122619S (en) | 2007-10-09 | 2010-01-27 | Silvano Breda | Shower strainer |
JP5347294B2 (ja) | 2007-09-12 | 2013-11-20 | 東京エレクトロン株式会社 | 成膜装置、成膜方法及び記憶媒体 |
US20090075491A1 (en) | 2007-09-13 | 2009-03-19 | Tokyo Electron Limited | Method for curing a dielectric film |
WO2009039251A1 (en) | 2007-09-18 | 2009-03-26 | L'air Liquide - Societe Anonyme Pour L'etude Et L'exploitation Des Procedes Georges Claude | Method of forming silicon-containing films |
JP4986784B2 (ja) | 2007-09-18 | 2012-07-25 | 東京エレクトロン株式会社 | 処理システムの制御装置、処理システムの制御方法および制御プログラムを記憶した記憶媒体 |
US20120122319A1 (en) | 2007-09-19 | 2012-05-17 | Hironobu Shimizu | Coating method for coating reaction tube prior to film forming process |
JP2009076661A (ja) | 2007-09-20 | 2009-04-09 | Elpida Memory Inc | 半導体装置の製造方法 |
JP2009081223A (ja) | 2007-09-26 | 2009-04-16 | Tokyo Electron Ltd | 静電チャック部材 |
JP2009087989A (ja) | 2007-09-27 | 2009-04-23 | Nuflare Technology Inc | エピタキシャル成長膜形成方法 |
US20090085156A1 (en) | 2007-09-28 | 2009-04-02 | Gilbert Dewey | Metal surface treatments for uniformly growing dielectric layers |
JP5236983B2 (ja) | 2007-09-28 | 2013-07-17 | 東京エレクトロン株式会社 | 半導体装置の製造方法、半導体装置の製造装置、制御プログラム及びプログラム記憶媒体 |
US20090084317A1 (en) | 2007-09-28 | 2009-04-02 | Applied Materials, Inc. | Atomic layer deposition chamber and components |
US7824743B2 (en) | 2007-09-28 | 2010-11-02 | Applied Materials, Inc. | Deposition processes for titanium nitride barrier and aluminum |
JP2009088421A (ja) | 2007-10-03 | 2009-04-23 | Renesas Technology Corp | 半導体装置の製造方法 |
US8041450B2 (en) | 2007-10-04 | 2011-10-18 | Asm Japan K.K. | Position sensor system for substrate transfer robot |
US20090090382A1 (en) | 2007-10-05 | 2009-04-09 | Asm Japan K.K. | Method of self-cleaning of carbon-based film |
US7776698B2 (en) | 2007-10-05 | 2010-08-17 | Applied Materials, Inc. | Selective formation of silicon carbon epitaxial layer |
US20090093100A1 (en) | 2007-10-09 | 2009-04-09 | Li-Qun Xia | Method for forming an air gap in multilevel interconnect structure |
KR101177983B1 (ko) | 2007-10-11 | 2012-08-29 | 발렌스 프로세스 이큅먼트, 인코포레이티드 | 화학 기상 증착 반응기 |
US20090095221A1 (en) | 2007-10-16 | 2009-04-16 | Alexander Tam | Multi-gas concentric injection showerhead |
EP2203934A1 (en) | 2007-10-18 | 2010-07-07 | Nxp B.V. | Method of manufacturing localized semiconductor-on-insulator (soi) structures in a bulk semiconductor wafer |
KR101399117B1 (ko) | 2007-10-19 | 2014-05-28 | 주성엔지니어링(주) | 원격 플라즈마를 이용한 기판 식각장치 및 이를 이용한기판 식각방법 |
US7541297B2 (en) | 2007-10-22 | 2009-06-02 | Applied Materials, Inc. | Method and system for improving dielectric film quality for void free gap fill |
US8070880B2 (en) | 2007-10-22 | 2011-12-06 | Hitachi Kokusai Electric, Inc. | Substrate processing apparatus |
US7803722B2 (en) | 2007-10-22 | 2010-09-28 | Applied Materials, Inc | Methods for forming a dielectric layer within trenches |
US7867923B2 (en) | 2007-10-22 | 2011-01-11 | Applied Materials, Inc. | High quality silicon oxide films by remote plasma CVD from disilane precursors |
US7939447B2 (en) | 2007-10-26 | 2011-05-10 | Asm America, Inc. | Inhibitors for selective deposition of silicon containing films |
US7615831B2 (en) | 2007-10-26 | 2009-11-10 | International Business Machines Corporation | Structure and method for fabricating self-aligned metal contacts |
JP4730369B2 (ja) | 2007-10-30 | 2011-07-20 | 株式会社デンソー | ナビゲーションシステム |
KR101369907B1 (ko) | 2007-10-31 | 2014-03-04 | 주성엔지니어링(주) | 트랜지스터 및 그 제조 방법 |
RU2470065C2 (ru) | 2007-10-31 | 2012-12-20 | Чайна Петролеум & Кемикал Корпорейшн | Способ пассивации для установки непрерывного риформинга (варианты) |
US7737039B2 (en) | 2007-11-01 | 2010-06-15 | Micron Technology, Inc. | Spacer process for on pitch contacts and related structures |
JP5192214B2 (ja) | 2007-11-02 | 2013-05-08 | 東京エレクトロン株式会社 | ガス供給装置、基板処理装置および基板処理方法 |
US7772097B2 (en) | 2007-11-05 | 2010-08-10 | Asm America, Inc. | Methods of selectively depositing silicon-containing films |
KR20090047211A (ko) | 2007-11-07 | 2009-05-12 | 삼성전자주식회사 | 도전 패턴의 형성 방법 및 이를 이용한 반도체 소자의 제조방법 |
US20090124131A1 (en) | 2007-11-09 | 2009-05-14 | Electronic Controls Design | Thermocouple adapter |
CN101861641B (zh) | 2007-11-14 | 2012-03-21 | 东京毅力科创株式会社 | 等离子体处理装置以及半导体衬底的等离子体处理方法 |
US20090122458A1 (en) | 2007-11-14 | 2009-05-14 | Varian Semiconductor Epuipment Associated, Inc. | Embossed electrostatic chuck |
US8272516B2 (en) | 2007-11-19 | 2012-09-25 | Caterpillar Inc. | Fluid filter system |
CA123273S (en) | 2007-11-19 | 2010-01-27 | Silvano Breda | Shower strainer |
CA123272S (en) | 2007-11-19 | 2010-01-27 | Silvano Breda | Shower strainer |
KR101412144B1 (ko) | 2007-11-26 | 2014-06-26 | 삼성전자 주식회사 | 금속 배선의 제조 방법 및 이를 이용한 이미지 센서의 제조방법 |
EP2065927B1 (en) | 2007-11-27 | 2013-10-02 | Imec | Integration and manufacturing method of Cu germanide and Cu silicide as Cu capping layer |
US8021723B2 (en) | 2007-11-27 | 2011-09-20 | Asm Japan K.K. | Method of plasma treatment using amplitude-modulated RF power |
US8282735B2 (en) | 2007-11-27 | 2012-10-09 | Asm Genitech Korea Ltd. | Atomic layer deposition apparatus |
KR20090055443A (ko) | 2007-11-28 | 2009-06-02 | 주식회사 케이씨텍 | 원자층 증착 장치 |
EP2215650B1 (en) | 2007-11-28 | 2016-06-22 | Philips Intellectual Property & Standards GmbH | Dielectric barrier discharge lamp |
US7967912B2 (en) | 2007-11-29 | 2011-06-28 | Nuflare Technology, Inc. | Manufacturing apparatus for semiconductor device and manufacturing method for semiconductor device |
KR20090056475A (ko) | 2007-11-30 | 2009-06-03 | 삼성전자주식회사 | 플라즈마 처리장치 |
US8060252B2 (en) | 2007-11-30 | 2011-11-15 | Novellus Systems, Inc. | High throughput method of in transit wafer position correction in system using multiple robots |
JP5464843B2 (ja) | 2007-12-03 | 2014-04-09 | 株式会社半導体エネルギー研究所 | Soi基板の作製方法 |
US7651959B2 (en) | 2007-12-03 | 2010-01-26 | Asm Japan K.K. | Method for forming silazane-based dielectric film |
US20090139657A1 (en) | 2007-12-04 | 2009-06-04 | Applied Materials, Inc. | Etch system |
DE112008003277T5 (de) | 2007-12-06 | 2011-01-05 | Shin-Etsu Handotai Co., Ltd. | Suszeptor für das Dampfphasenwachstum und Dampfphasenwachstumsvorrichtung |
US8047706B2 (en) | 2007-12-07 | 2011-11-01 | Asm America, Inc. | Calibration of temperature control system for semiconductor processing chamber |
US7807566B2 (en) | 2007-12-07 | 2010-10-05 | Asm Japan K.K. | Method for forming dielectric SiOCH film having chemical stability |
US8440569B2 (en) | 2007-12-07 | 2013-05-14 | Cadence Design Systems, Inc. | Method of eliminating a lithography operation |
US8628616B2 (en) | 2007-12-11 | 2014-01-14 | Sumitomo Electric Industries, Ltd. | Vapor-phase process apparatus, vapor-phase process method, and substrate |
KR100956247B1 (ko) | 2007-12-13 | 2010-05-06 | 삼성엘이디 주식회사 | 금속유기 화학기상 증착장치 |
US8003174B2 (en) | 2007-12-13 | 2011-08-23 | Asm Japan K.K. | Method for forming dielectric film using siloxane-silazane mixture |
US20100259152A1 (en) | 2007-12-17 | 2010-10-14 | Orc Manufacturing Co., Ltd. | Discharge lamp |
FI123322B (fi) | 2007-12-17 | 2013-02-28 | Beneq Oy | Menetelmä ja laitteisto plasman muodostamiseksi |
US8092606B2 (en) | 2007-12-18 | 2012-01-10 | Asm Genitech Korea Ltd. | Deposition apparatus |
US20090155488A1 (en) | 2007-12-18 | 2009-06-18 | Asm Japan K.K. | Shower plate electrode for plasma cvd reactor |
KR101542636B1 (ko) | 2007-12-19 | 2015-08-06 | 램 리써치 코포레이션 | 나노다공성 로우-k 유전체 재료 처리 방법 |
US8137463B2 (en) | 2007-12-19 | 2012-03-20 | Applied Materials, Inc. | Dual zone gas injection nozzle |
US20090159002A1 (en) | 2007-12-19 | 2009-06-25 | Kallol Bera | Gas distribution plate with annular plenum having a sloped ceiling for uniform distribution |
US7993057B2 (en) | 2007-12-20 | 2011-08-09 | Asm America, Inc. | Redundant temperature sensor for semiconductor processing chambers |
CN101903977A (zh) | 2007-12-21 | 2010-12-01 | 朗姆研究公司 | 光刻胶两次图案化 |
US7678715B2 (en) | 2007-12-21 | 2010-03-16 | Applied Materials, Inc. | Low wet etch rate silicon nitride film |
US8501637B2 (en) | 2007-12-21 | 2013-08-06 | Asm International N.V. | Silicon dioxide thin films by ALD |
US7989329B2 (en) | 2007-12-21 | 2011-08-02 | Applied Materials, Inc. | Removal of surface dopants from a substrate |
JP3140111U (ja) | 2007-12-21 | 2008-03-13 | 日本エー・エス・エム株式会社 | 半導体製造装置用ガス供給装置 |
US8129029B2 (en) | 2007-12-21 | 2012-03-06 | Applied Materials, Inc. | Erosion-resistant plasma chamber components comprising a metal base structure with an overlying thermal oxidation coating |
US20090197015A1 (en) | 2007-12-25 | 2009-08-06 | Applied Materials, Inc. | Method and apparatus for controlling plasma uniformity |
JP5291928B2 (ja) | 2007-12-26 | 2013-09-18 | 株式会社日立製作所 | 酸化物半導体装置およびその製造方法 |
KR101444873B1 (ko) | 2007-12-26 | 2014-09-26 | 주성엔지니어링(주) | 기판처리장치 |
JP5374039B2 (ja) | 2007-12-27 | 2013-12-25 | 東京エレクトロン株式会社 | 基板処理方法、基板処理装置及び記憶媒体 |
US8333839B2 (en) | 2007-12-27 | 2012-12-18 | Synos Technology, Inc. | Vapor deposition reactor |
KR100936694B1 (ko) | 2007-12-27 | 2010-01-13 | 주식회사 케이씨텍 | 플라즈마 발생부를 구비하는 원자층 증착 장치 |
US20090165721A1 (en) | 2007-12-27 | 2009-07-02 | Memc Electronic Materials, Inc. | Susceptor with Support Bosses |
KR101571180B1 (ko) | 2007-12-27 | 2015-11-23 | 램 리써치 코포레이션 | 위치 및 오프셋을 결정하는 장치 및 방법 |
US8496377B2 (en) | 2007-12-31 | 2013-07-30 | Covidien Lp | Thermometer having molded probe component |
KR101013413B1 (ko) | 2008-01-07 | 2011-02-14 | 한국과학기술연구원 | 플라즈마 표면 처리를 이용한 투명 기체 차단 필름의 제조방법 및 이로부터 제조된 투명 기체 차단 필름 |
US7935940B1 (en) | 2008-01-08 | 2011-05-03 | Novellus Systems, Inc. | Measuring in-situ UV intensity in UV cure tool |
US20090176018A1 (en) | 2008-01-09 | 2009-07-09 | Min Zou | Nano/micro-textured surfaces and methods of making same by aluminum-induced crystallization of amorphous silicon |
US8129288B2 (en) | 2008-05-02 | 2012-03-06 | Intermolecular, Inc. | Combinatorial plasma enhanced deposition techniques |
US8198567B2 (en) | 2008-01-15 | 2012-06-12 | Applied Materials, Inc. | High temperature vacuum chuck assembly |
CN101919041B (zh) | 2008-01-16 | 2013-03-27 | 索绍股份有限公司 | 衬底固持器,衬底支撑设备,衬底处理设备以及使用所述衬底处理设备的衬底处理方法 |
JP5200551B2 (ja) | 2008-01-18 | 2013-06-05 | 東京エレクトロン株式会社 | 気化原料供給装置、成膜装置及び気化原料供給方法 |
US20090186571A1 (en) | 2008-01-22 | 2009-07-23 | Asm America, Inc. | Air ventilation system |
JP2011514660A (ja) | 2008-01-31 | 2011-05-06 | アプライド マテリアルズ インコーポレイテッド | 閉ループmocvdにおける堆積制御 |
US9103019B2 (en) | 2008-02-01 | 2015-08-11 | American Air Liquide, Inc. | Metal precursors containing beta-diketiminato ligands |
US20090203197A1 (en) | 2008-02-08 | 2009-08-13 | Hiroji Hanawa | Novel method for conformal plasma immersed ion implantation assisted by atomic layer deposition |
US7855153B2 (en) | 2008-02-08 | 2010-12-21 | Semiconductor Energy Laboratory Co., Ltd. | Method for manufacturing semiconductor device |
KR100988390B1 (ko) | 2008-02-11 | 2010-10-18 | 성균관대학교산학협력단 | 기판처리장치 및 기판처리방법 |
US20090200494A1 (en) | 2008-02-11 | 2009-08-13 | Varian Semiconductor Equipment Associates, Inc. | Techniques for cold implantation of carbon-containing species |
KR101362811B1 (ko) | 2008-02-11 | 2014-02-14 | (주)소슬 | 배치식 기판 지지 장치 및 이를 구비하는 기판 처리 장치 |
KR101043211B1 (ko) | 2008-02-12 | 2011-06-22 | 신웅철 | 배치형 원자층 증착 장치 |
GB0802486D0 (en) | 2008-02-12 | 2008-03-19 | Gilbert Patrick C | Warm water economy device |
US7795045B2 (en) | 2008-02-13 | 2010-09-14 | Icemos Technology Ltd. | Trench depth monitor for semiconductor manufacturing |
US20090206056A1 (en) | 2008-02-14 | 2009-08-20 | Songlin Xu | Method and Apparatus for Plasma Process Performance Matching in Multiple Wafer Chambers |
JP2009194248A (ja) | 2008-02-15 | 2009-08-27 | Tokyo Electron Ltd | パターン形成方法、半導体製造装置及び記憶媒体 |
CN101772833B (zh) | 2008-02-20 | 2012-04-18 | 东京毅力科创株式会社 | 气体供给装置 |
US20090214777A1 (en) | 2008-02-22 | 2009-08-27 | Demetrius Sarigiannis | Multiple ampoule delivery systems |
US20090214825A1 (en) | 2008-02-26 | 2009-08-27 | Applied Materials, Inc. | Ceramic coating comprising yttrium which is resistant to a reducing plasma |
WO2009107718A1 (ja) | 2008-02-27 | 2009-09-03 | 東京エレクトロン株式会社 | プラズマエッチング処理装置およびプラズマエッチング処理方法 |
US20090221149A1 (en) | 2008-02-28 | 2009-09-03 | Hammond Iv Edward P | Multiple port gas injection system utilized in a semiconductor processing system |
US8273178B2 (en) | 2008-02-28 | 2012-09-25 | Asm Genitech Korea Ltd. | Thin film deposition apparatus and method of maintaining the same |
JP5223377B2 (ja) | 2008-02-29 | 2013-06-26 | 東京エレクトロン株式会社 | プラズマ処理装置用の電極、プラズマ処理装置及びプラズマ処理方法 |
US20090302002A1 (en) | 2008-02-29 | 2009-12-10 | Applied Materials, Inc. | Method and apparatus for removing polymer from a substrate |
KR100968132B1 (ko) | 2008-02-29 | 2010-07-06 | (주)얼라이드 테크 파인더즈 | 안테나 및 이를 구비한 반도체 장치 |
US7727866B2 (en) | 2008-03-05 | 2010-06-01 | Varian Semiconductor Equipment Associates, Inc. | Use of chained implants in solar cells |
US7858533B2 (en) | 2008-03-06 | 2010-12-28 | Tokyo Electron Limited | Method for curing a porous low dielectric constant dielectric film |
USD585968S1 (en) | 2008-03-06 | 2009-02-03 | West Coast Washers, Inc. | Pipe flashing |
US7977256B2 (en) | 2008-03-06 | 2011-07-12 | Tokyo Electron Limited | Method for removing a pore-generating material from an uncured low-k dielectric film |
EP2099067A1 (en) | 2008-03-07 | 2009-09-09 | Nederlandse Organisatie voor toegepast- natuurwetenschappelijk onderzoek TNO | Process for adjusting the friction coefficient between surfaces of two solid objects |
JP5507097B2 (ja) | 2008-03-12 | 2014-05-28 | 富士フイルム株式会社 | ペロブスカイト型酸化物とその製造方法、圧電体、圧電素子、液体吐出装置 |
JP5188849B2 (ja) | 2008-03-14 | 2013-04-24 | Sppテクノロジーズ株式会社 | プラズマ処理装置 |
GB2458507A (en) | 2008-03-20 | 2009-09-23 | Tecvac Ltd | Oxidation of non ferrous metal components |
CN101978475B (zh) | 2008-03-21 | 2013-09-25 | 应用材料公司 | 屏蔽性盖加热器组件 |
US7695619B2 (en) | 2008-03-21 | 2010-04-13 | Pentair Filtration, Inc. | Modular drinking water filtration system with adapter rings for replaceable cartridges to assure proper fit |
US8430620B1 (en) | 2008-03-24 | 2013-04-30 | Novellus Systems, Inc. | Dedicated hot and cold end effectors for improved throughput |
GB0805328D0 (en) | 2008-03-25 | 2008-04-30 | Aviza Technologies Ltd | Deposition of an amorphous layer |
JP2009239082A (ja) | 2008-03-27 | 2009-10-15 | Tokyo Electron Ltd | ガス供給装置、処理装置及び処理方法 |
US8252114B2 (en) | 2008-03-28 | 2012-08-28 | Tokyo Electron Limited | Gas distribution system and method for distributing process gas in a processing system |
US20090246399A1 (en) | 2008-03-28 | 2009-10-01 | Asm Japan K.K. | Method for activating reactive oxygen species for cleaning carbon-based film deposition |
US7816278B2 (en) | 2008-03-28 | 2010-10-19 | Tokyo Electron Limited | In-situ hybrid deposition of high dielectric constant films using atomic layer deposition and chemical vapor deposition |
USD590933S1 (en) | 2008-03-31 | 2009-04-21 | Mcp Industries, Inc. | Vent cap device |
US7659158B2 (en) | 2008-03-31 | 2010-02-09 | Applied Materials, Inc. | Atomic layer deposition processes for non-volatile memory devices |
US20100078601A1 (en) | 2008-03-31 | 2010-04-01 | American Air Liquide, Inc. | Preparation of Lanthanide-Containing Precursors and Deposition of Lanthanide-Containing Films |
JP2009252851A (ja) | 2008-04-02 | 2009-10-29 | Nikon Corp | 露光装置及びデバイス製造方法 |
US7963736B2 (en) | 2008-04-03 | 2011-06-21 | Asm Japan K.K. | Wafer processing apparatus with wafer alignment device |
WO2009122751A1 (ja) | 2008-04-04 | 2009-10-08 | ダイセル化学工業株式会社 | フォトレジスト用ポリオール化合物 |
JP5007827B2 (ja) | 2008-04-04 | 2012-08-22 | 信越化学工業株式会社 | ダブルパターン形成方法 |
US20090250955A1 (en) | 2008-04-07 | 2009-10-08 | Applied Materials, Inc. | Wafer transfer blade |
US8193388B2 (en) | 2008-04-15 | 2012-06-05 | American Air Liquide, Inc. | Compounds for depositing tellurium-containing films |
WO2009129332A2 (en) | 2008-04-16 | 2009-10-22 | Asm America, Inc. | Atomic layer deposition of metal carbide films using aluminum hydrocarbon compounds |
WO2009129391A2 (en) | 2008-04-17 | 2009-10-22 | Applied Materials, Inc. | Low temperature thin film transistor process, device property, and device stability improvement |
KR100971414B1 (ko) | 2008-04-18 | 2010-07-21 | 주식회사 하이닉스반도체 | 스트레인드 채널을 갖는 반도체 소자 및 그 제조방법 |
US8741062B2 (en) | 2008-04-22 | 2014-06-03 | Picosun Oy | Apparatus and methods for deposition reactors |
US8900422B2 (en) | 2008-04-23 | 2014-12-02 | Intermolecular, Inc. | Yttrium and titanium high-K dielectric film |
US20090269506A1 (en) | 2008-04-24 | 2009-10-29 | Seiji Okura | Method and apparatus for cleaning of a CVD reactor |
US8383525B2 (en) | 2008-04-25 | 2013-02-26 | Asm America, Inc. | Plasma-enhanced deposition process for forming a metal oxide thin film and related structures |
CN102067281B (zh) | 2008-04-25 | 2013-06-12 | 株式会社半导体能源研究所 | 半导体器件及其制造方法 |
JP5404772B2 (ja) | 2008-04-28 | 2014-02-05 | ビーエーエスエフ ソシエタス・ヨーロピア | ツイン重合によって得られるLow−k誘電体 |
JP5253875B2 (ja) | 2008-04-28 | 2013-07-31 | 株式会社東芝 | 不揮発性半導体記憶装置、及びその製造方法 |
US20090269507A1 (en) | 2008-04-29 | 2009-10-29 | Sang-Ho Yu | Selective cobalt deposition on copper surfaces |
US8252194B2 (en) | 2008-05-02 | 2012-08-28 | Micron Technology, Inc. | Methods of removing silicon oxide |
US7632549B2 (en) | 2008-05-05 | 2009-12-15 | Asm Japan K.K. | Method of forming a high transparent carbon film |
US20090280248A1 (en) | 2008-05-06 | 2009-11-12 | Asm America, Inc. | Porous substrate holder with thinned portions |
FR2930900B1 (fr) | 2008-05-06 | 2010-09-10 | Commissariat Energie Atomique | Dispositif de separation de biomolecules d'un fluide |
US8076237B2 (en) | 2008-05-09 | 2011-12-13 | Asm America, Inc. | Method and apparatus for 3D interconnect |
US20090277874A1 (en) | 2008-05-09 | 2009-11-12 | Applied Materials, Inc. | Method and apparatus for removing polymer from a substrate |
US20090286402A1 (en) | 2008-05-13 | 2009-11-19 | Applied Materials, Inc | Method for critical dimension shrink using conformal pecvd films |
US8277670B2 (en) | 2008-05-13 | 2012-10-02 | Lam Research Corporation | Plasma process with photoresist mask pretreatment |
US8264154B2 (en) | 2008-05-14 | 2012-09-11 | Applied Materials, Inc. | Method and apparatus for pulsed plasma processing using a time resolved tuning scheme for RF power delivery |
US8333842B2 (en) | 2008-05-15 | 2012-12-18 | Applied Materials, Inc. | Apparatus for etching semiconductor wafers |
TWI475594B (zh) | 2008-05-19 | 2015-03-01 | Entegris Inc | 靜電夾頭 |
US7514058B1 (en) | 2008-05-22 | 2009-04-07 | The Lata Group, Inc. | Apparatus for on-site production of nitrate ions |
US10041169B2 (en) | 2008-05-27 | 2018-08-07 | Picosun Oy | System and method for loading a substrate holder carrying a batch of vertically placed substrates into an atomic layer deposition reactor |
US8945675B2 (en) | 2008-05-29 | 2015-02-03 | Asm International N.V. | Methods for forming conductive titanium oxide thin films |
EP2128299B1 (en) | 2008-05-29 | 2016-12-28 | General Electric Technology GmbH | Multilayer thermal barrier coating |
US20090297731A1 (en) | 2008-05-30 | 2009-12-03 | Asm Japan K.K. | Apparatus and method for improving production throughput in cvd chamber |
US7622369B1 (en) | 2008-05-30 | 2009-11-24 | Asm Japan K.K. | Device isolation technology on semiconductor substrate |
US8298628B2 (en) | 2008-06-02 | 2012-10-30 | Air Products And Chemicals, Inc. | Low temperature deposition of silicon-containing films |
WO2009146744A1 (de) | 2008-06-05 | 2009-12-10 | Osram Gesellschaft mit beschränkter Haftung | Verfahren zur behandlung von oberflächen, strahler für dieses verfahren sowie bestrahlungssystem mit diesem strahler |
WO2009149372A1 (en) | 2008-06-05 | 2009-12-10 | L'air Liquide Societe Anonyme Pour L'etude Et L'exploitation Des Procedes Georges Claude | Preparation of lanthanide-containing precursors and deposition of lanthanide-containing films |
JP2009295932A (ja) | 2008-06-09 | 2009-12-17 | Canon Inc | 露光装置及びデバイス製造方法 |
JP5421551B2 (ja) | 2008-06-11 | 2014-02-19 | 東京エレクトロン株式会社 | プラズマ処理装置及びプラズマ処理方法 |
US7915667B2 (en) | 2008-06-11 | 2011-03-29 | Qimonda Ag | Integrated circuits having a contact region and methods for manufacturing the same |
US20090308315A1 (en) | 2008-06-13 | 2009-12-17 | Asm International N.V. | Semiconductor processing apparatus with improved thermal characteristics and method for providing the same |
US7946762B2 (en) | 2008-06-17 | 2011-05-24 | Asm America, Inc. | Thermocouple |
US7699935B2 (en) | 2008-06-19 | 2010-04-20 | Applied Materials, Inc. | Method and system for supplying a cleaning gas into a process chamber |
CN101609858B (zh) | 2008-06-20 | 2011-06-22 | 福建钧石能源有限公司 | 薄膜沉积方法 |
WO2009154889A2 (en) | 2008-06-20 | 2009-12-23 | Applied Materials, Inc. | Gas distribution showerhead skirt |
US8726837B2 (en) | 2008-06-23 | 2014-05-20 | Applied Materials, Inc. | Semiconductor process chamber vision and monitoring system |
US8827695B2 (en) | 2008-06-23 | 2014-09-09 | Taiwan Semiconductor Manufacturing Company, Ltd. | Wafer's ambiance control |
JP2011525719A (ja) | 2008-06-24 | 2011-09-22 | アプライド マテリアルズ インコーポレイテッド | 低温pecvd用途用のペデスタルヒータ |
KR101036605B1 (ko) | 2008-06-30 | 2011-05-24 | 세메스 주식회사 | 기판 지지 유닛 및 이를 이용한 매엽식 기판 연마 장치 |
US20090325391A1 (en) | 2008-06-30 | 2009-12-31 | Asm International Nv | Ozone and teos process for silicon oxide deposition |
US8291857B2 (en) | 2008-07-03 | 2012-10-23 | Applied Materials, Inc. | Apparatuses and methods for atomic layer deposition |
US8206506B2 (en) | 2008-07-07 | 2012-06-26 | Lam Research Corporation | Showerhead electrode |
US8702867B2 (en) | 2008-07-08 | 2014-04-22 | Jusung Engineering Co., Ltd. | Gas distribution plate and substrate treating apparatus including the same |
JP2010021204A (ja) | 2008-07-08 | 2010-01-28 | Toshiba Corp | 半導体装置及びその製造方法 |
CN102084469B (zh) | 2008-07-09 | 2013-05-01 | 东京毅力科创株式会社 | 等离子体处理装置 |
US20100012036A1 (en) | 2008-07-11 | 2010-01-21 | Hugo Silva | Isolation for multi-single-wafer processing apparatus |
US8111978B2 (en) | 2008-07-11 | 2012-02-07 | Applied Materials, Inc. | Rapid thermal processing chamber with shower head |
US9997325B2 (en) | 2008-07-17 | 2018-06-12 | Verity Instruments, Inc. | Electron beam exciter for use in chemical analysis in processing systems |
US8058138B2 (en) | 2008-07-17 | 2011-11-15 | Micron Technology, Inc. | Gap processing |
USD614593S1 (en) | 2008-07-21 | 2010-04-27 | Asm Genitech Korea Ltd | Substrate support for a semiconductor deposition apparatus |
USD609652S1 (en) | 2008-07-22 | 2010-02-09 | Tokyo Electron Limited | Wafer attracting plate |
WO2010017136A1 (en) | 2008-08-04 | 2010-02-11 | Amir Dassoud Dabiran | Microchannel plate photocathode |
KR20100015213A (ko) | 2008-08-04 | 2010-02-12 | 삼성전기주식회사 | Cvd용 샤워 헤드 및 이를 구비하는 화학 기상 증착 장치 |
KR101482944B1 (ko) | 2008-08-04 | 2015-01-16 | 한국과학기술원 | 산화티타늄을 활성층으로 갖는 박막 트랜지스터의 제조방법 및 이에 의해 제조된 박막 트랜지스터 |
US8047711B2 (en) | 2008-08-06 | 2011-11-01 | Heinz Ploechinger | Thermocouple vacuum gauge |
US20100034719A1 (en) | 2008-08-06 | 2010-02-11 | Christian Dussarrat | Novel lanthanide beta-diketonate precursors for lanthanide thin film deposition |
US8394229B2 (en) | 2008-08-07 | 2013-03-12 | Asm America, Inc. | Susceptor ring |
US8328585B2 (en) | 2008-08-07 | 2012-12-11 | Texas Instruments Incorporated | Modulated deposition process for stress control in thick TiN films |
USD600223S1 (en) | 2008-08-07 | 2009-09-15 | Ravinder Aggarwal | Susceptor ring |
WO2010017555A1 (en) | 2008-08-08 | 2010-02-11 | Cornell Research Foundation, Inc. | Inorganic bulk multijunction materials and processes for preparing the same |
US8129555B2 (en) | 2008-08-12 | 2012-03-06 | Air Products And Chemicals, Inc. | Precursors for depositing silicon-containing films and methods for making and using same |
US8470718B2 (en) | 2008-08-13 | 2013-06-25 | Synos Technology, Inc. | Vapor deposition reactor for forming thin film |
JP5338335B2 (ja) | 2008-08-13 | 2013-11-13 | 東京エレクトロン株式会社 | 搬送容器の開閉装置及びプローブ装置 |
KR101017170B1 (ko) | 2008-08-13 | 2011-02-25 | 주식회사 동부하이텍 | 백 메탈 공정챔버 |
US8263502B2 (en) | 2008-08-13 | 2012-09-11 | Synos Technology, Inc. | Forming substrate structure by filling recesses with deposition material |
US7816218B2 (en) | 2008-08-14 | 2010-10-19 | Intel Corporation | Selective deposition of amorphous silicon films on metal gates |
US8147648B2 (en) | 2008-08-15 | 2012-04-03 | Lam Research Corporation | Composite showerhead electrode assembly for a plasma processing apparatus |
JP4866402B2 (ja) | 2008-08-25 | 2012-02-01 | 独立行政法人科学技術振興機構 | 化学蒸着方法 |
JP5593472B2 (ja) | 2008-08-27 | 2014-09-24 | 株式会社日立国際電気 | 基板処理装置および半導体デバイスの製造方法 |
JP5188326B2 (ja) | 2008-08-28 | 2013-04-24 | 株式会社日立国際電気 | 半導体装置の製造方法、基板処理方法、及び基板処理装置 |
US20100055318A1 (en) | 2008-08-29 | 2010-03-04 | Veeco Instruments Inc. | Wafer carrier with varying thermal resistance |
US8084104B2 (en) | 2008-08-29 | 2011-12-27 | Asm Japan K.K. | Atomic composition controlled ruthenium alloy film formed by plasma-enhanced atomic layer deposition |
US20100055442A1 (en) | 2008-09-03 | 2010-03-04 | International Business Machines Corporation | METHOD OF PE-ALD OF SiNxCy AND INTEGRATION OF LINER MATERIALS ON POROUS LOW K SUBSTRATES |
JP5107185B2 (ja) | 2008-09-04 | 2012-12-26 | 東京エレクトロン株式会社 | 成膜装置、基板処理装置、成膜方法及びこの成膜方法を実行させるためのプログラムを記録した記録媒体 |
TW201011861A (en) | 2008-09-04 | 2010-03-16 | Nanya Technology Corp | Method for fabricating integrated circuit |
JP5276388B2 (ja) | 2008-09-04 | 2013-08-28 | 東京エレクトロン株式会社 | 成膜装置及び基板処理装置 |
JP2010087467A (ja) | 2008-09-04 | 2010-04-15 | Tokyo Electron Ltd | 成膜装置、基板処理装置、成膜方法及びこの成膜方法を実行させるためのプログラムを記録した記録媒体 |
US9099513B2 (en) | 2008-09-08 | 2015-08-04 | Shibaura Mechatronics Corporation | Substrate processing apparatus, and substrate processing method |
JP5226438B2 (ja) | 2008-09-10 | 2013-07-03 | 株式会社日立国際電気 | 基板処理装置、半導体装置の製造方法及び基板処理方法 |
USD643055S1 (en) | 2008-09-11 | 2011-08-09 | Asm Japan K.K. | Heater block for use in a semiconductor processing tool |
US8731706B2 (en) | 2008-09-12 | 2014-05-20 | Hitachi High-Technologies Corporation | Vacuum processing apparatus |
JP5511273B2 (ja) | 2008-09-12 | 2014-06-04 | 株式会社日立国際電気 | 基板処理装置及び基板処理方法 |
US20100065758A1 (en) | 2008-09-16 | 2010-03-18 | Tokyo Electron Limited | Dielectric material treatment system and method of operating |
JP2010073822A (ja) | 2008-09-17 | 2010-04-02 | Tokyo Electron Ltd | 成膜装置、成膜方法、プログラム及びコンピュータ可読記憶媒体 |
US20100075488A1 (en) | 2008-09-19 | 2010-03-25 | Applied Materials, Inc. | Cvd reactor with multiple processing levels and dual-axis motorized lift mechanism |
US20100075037A1 (en) | 2008-09-22 | 2010-03-25 | Marsh Eugene P | Deposition Systems, ALD Systems, CVD Systems, Deposition Methods, ALD Methods and CVD Methods |
US9711373B2 (en) | 2008-09-22 | 2017-07-18 | Taiwan Semiconductor Manufacturing Company, Ltd. | Method of fabricating a gate dielectric for high-k metal gate devices |
JP2010077508A (ja) | 2008-09-26 | 2010-04-08 | Tokyo Electron Ltd | 成膜装置及び基板処理装置 |
JP4638550B2 (ja) | 2008-09-29 | 2011-02-23 | 東京エレクトロン株式会社 | マスクパターンの形成方法、微細パターンの形成方法及び成膜装置 |
DE102008049353A1 (de) | 2008-09-29 | 2010-04-08 | Vat Holding Ag | Vakuumventil |
US9493875B2 (en) | 2008-09-30 | 2016-11-15 | Eugene Technology Co., Ltd. | Shower head unit and chemical vapor deposition apparatus |
US20100090149A1 (en) | 2008-10-01 | 2010-04-15 | Compressor Engineering Corp. | Poppet valve assembly, system, and apparatus for use in high speed compressor applications |
KR20100037212A (ko) | 2008-10-01 | 2010-04-09 | 주식회사 동부하이텍 | 반도체 소자 및 그 제조 방법 |
US20100081293A1 (en) | 2008-10-01 | 2010-04-01 | Applied Materials, Inc. | Methods for forming silicon nitride based film or silicon carbon based film |
KR20110079831A (ko) | 2008-10-03 | 2011-07-08 | 비코 프로세스 이큅먼트, 아이엔씨. | 기상 에피택시 시스템 |
USD609655S1 (en) | 2008-10-03 | 2010-02-09 | Ngk Insulators, Ltd. | Electrostatic chuck |
KR101632031B1 (ko) | 2008-10-07 | 2016-06-21 | 어플라이드 머티어리얼스, 인코포레이티드 | 에칭된 기판으로부터 할로겐 잔류물들의 효율적인 제거 장치 |
EP2174942B1 (en) | 2008-10-07 | 2011-11-30 | L'Air Liquide Société Anonyme pour l'Etude et l'Exploitation des Procédés Georges Claude | Niobium and vanadium organometallic precursors for thin film deposition |
JP2010114420A (ja) | 2008-10-07 | 2010-05-20 | Hitachi Kokusai Electric Inc | 半導体デバイスの製造方法 |
KR101491726B1 (ko) | 2008-10-08 | 2015-02-17 | 주성엔지니어링(주) | 반도체 소자의 갭필 방법 |
CN102177274B (zh) | 2008-10-08 | 2014-08-06 | Abcd技术有限公司 | 汽相沉积系统 |
KR101627297B1 (ko) | 2008-10-13 | 2016-06-03 | 한국에이에스엠지니텍 주식회사 | 플라즈마 처리부 및 이를 포함하는 증착 장치 및 증착 방법 |
KR20100041529A (ko) | 2008-10-14 | 2010-04-22 | 삼성전자주식회사 | 초임계 유체를 이용한 물질막 증착장치, 이를 포함하는 물질막 증착 시스템 및 물질막 형성방법 |
US8133555B2 (en) | 2008-10-14 | 2012-03-13 | Asm Japan K.K. | Method for forming metal film by ALD using beta-diketone metal complex |
KR101357181B1 (ko) | 2008-10-14 | 2014-01-29 | 어플라이드 머티어리얼스, 인코포레이티드 | 플라즈마-강화 화학적 기상 증착(pecvd)에 의해 등각성 비정질 탄소막을 증착하기 위한 방법 |
WO2010044978A1 (en) | 2008-10-15 | 2010-04-22 | Arizona Board of Regents, a body corporate acting for and on behalf of Arizona State University | Hybrid group iv/iii-v semiconductor structures |
US7745346B2 (en) | 2008-10-17 | 2010-06-29 | Novellus Systems, Inc. | Method for improving process control and film conformality of PECVD film |
JP2010097834A (ja) | 2008-10-17 | 2010-04-30 | Ushio Inc | バックライトユニット |
US8114734B2 (en) | 2008-10-21 | 2012-02-14 | United Microelectronics Corp. | Metal capacitor and method of making the same |
US8697189B2 (en) | 2008-10-21 | 2014-04-15 | Intevac, Inc. | Method and apparatus for precision surface modification in nano-imprint lithography |
US7964858B2 (en) | 2008-10-21 | 2011-06-21 | Applied Materials, Inc. | Ultraviolet reflector with coolant gas holes and method |
US7967913B2 (en) | 2008-10-22 | 2011-06-28 | Applied Materials, Inc. | Remote plasma clean process with cycled high and low pressure clean steps |
WO2010062582A2 (en) | 2008-10-27 | 2010-06-03 | Applied Materials, Inc. | Vapor deposition method for ternary compounds |
US8185443B2 (en) | 2008-10-27 | 2012-05-22 | Ebay, Inc. | Method and apparatus for authorizing a payment via a remote device |
JP5410074B2 (ja) | 2008-11-07 | 2014-02-05 | 東京エレクトロン株式会社 | オゾンガス濃度測定方法、オゾンガス濃度測定システム及び基板処理装置 |
EP2353176A4 (en) | 2008-11-07 | 2013-08-28 | Asm Inc | REACTION CHAMBER |
JP5062143B2 (ja) | 2008-11-10 | 2012-10-31 | 東京エレクトロン株式会社 | 成膜装置 |
US8524616B2 (en) | 2008-11-12 | 2013-09-03 | Microchip Technology Incorporated | Method of nonstoichiometric CVD dielectric film surface passivation for film roughness control |
US20100121100A1 (en) | 2008-11-12 | 2010-05-13 | Daniel Travis Shay | Supported palladium-gold catalysts and preparation of vinyl acetate therewith |
US8858745B2 (en) | 2008-11-12 | 2014-10-14 | Applied Materials, Inc. | Corrosion-resistant bonding agents for bonding ceramic components which are exposed to plasmas |
US9017765B2 (en) | 2008-11-12 | 2015-04-28 | Applied Materials, Inc. | Protective coatings resistant to reactive plasma processing |
US20100116208A1 (en) | 2008-11-13 | 2010-05-13 | Applied Materials, Inc. | Ampoule and delivery system for solid precursors |
US8647722B2 (en) | 2008-11-14 | 2014-02-11 | Asm Japan K.K. | Method of forming insulation film using plasma treatment cycles |
US10378106B2 (en) | 2008-11-14 | 2019-08-13 | Asm Ip Holding B.V. | Method of forming insulation film by modified PEALD |
JP2010153769A (ja) | 2008-11-19 | 2010-07-08 | Tokyo Electron Ltd | 基板位置検出装置、基板位置検出方法、成膜装置、成膜方法、プログラム及びコンピュータ可読記憶媒体 |
US20100130017A1 (en) | 2008-11-21 | 2010-05-27 | Axcelis Technologies, Inc. | Front end of line plasma mediated ashing processes and apparatus |
JP5225041B2 (ja) | 2008-11-21 | 2013-07-03 | 京セラ株式会社 | 静電チャック |
US8714169B2 (en) | 2008-11-26 | 2014-05-06 | Semes Co. Ltd. | Spin head, apparatus for treating substrate, and method for treating substrate |
KR101004434B1 (ko) | 2008-11-26 | 2010-12-28 | 세메스 주식회사 | 기판 지지 유닛과, 이를 이용한 기판 연마 장치 및 방법 |
JP5185790B2 (ja) | 2008-11-27 | 2013-04-17 | 株式会社日立ハイテクノロジーズ | プラズマ処理装置 |
US8138676B2 (en) | 2008-12-01 | 2012-03-20 | Mills Robert L | Methods and systems for dimmable fluorescent lighting using multiple frequencies |
US9714465B2 (en) | 2008-12-01 | 2017-07-25 | Applied Materials, Inc. | Gas distribution blocker apparatus |
EP2194574B1 (en) | 2008-12-02 | 2018-11-07 | IMEC vzw | Method for producing interconnect structures for integrated circuits |
US8273634B2 (en) | 2008-12-04 | 2012-09-25 | Micron Technology, Inc. | Methods of fabricating substrates |
US8262287B2 (en) | 2008-12-08 | 2012-09-11 | Asm America, Inc. | Thermocouple |
US8765233B2 (en) | 2008-12-09 | 2014-07-01 | Asm Japan K.K. | Method for forming low-carbon CVD film for filling trenches |
JP5390846B2 (ja) | 2008-12-09 | 2014-01-15 | 東京エレクトロン株式会社 | プラズマエッチング装置及びプラズマクリーニング方法 |
JP5356005B2 (ja) | 2008-12-10 | 2013-12-04 | 株式会社東芝 | 不揮発性半導体記憶装置及びその製造方法 |
US20100151206A1 (en) | 2008-12-11 | 2010-06-17 | Air Products And Chemicals, Inc. | Method for Removal of Carbon From An Organosilicate Material |
US8033771B1 (en) | 2008-12-11 | 2011-10-11 | Novellus Systems, Inc. | Minimum contact area wafer clamping with gas flow for rapid wafer cooling |
US7902009B2 (en) | 2008-12-11 | 2011-03-08 | Intel Corporation | Graded high germanium compound films for strained semiconductor devices |
US8557712B1 (en) | 2008-12-15 | 2013-10-15 | Novellus Systems, Inc. | PECVD flowable dielectric gap fill |
US20100147396A1 (en) | 2008-12-15 | 2010-06-17 | Asm Japan K.K. | Multiple-Substrate Transfer Apparatus and Multiple-Substrate Processing Apparatus |
US20110264250A1 (en) | 2008-12-15 | 2011-10-27 | Tokyo Electron Limited | Substrate processing system, substrate processing method and storage medium storing program |
US9379011B2 (en) | 2008-12-19 | 2016-06-28 | Asm International N.V. | Methods for depositing nickel films and for making nickel silicide and nickel germanide |
DE112009003819T5 (de) | 2008-12-23 | 2012-06-06 | Mks Instruments, Inc. | Containment- bzw. Sicherheitsbehältersystem für reaktive Chemikalien |
KR20100075070A (ko) | 2008-12-24 | 2010-07-02 | 삼성전자주식회사 | 비휘발성 메모리 장치의 제조 방법 |
US8816424B2 (en) | 2008-12-26 | 2014-08-26 | SK Hynix Inc. | Nonvolatile memory device |
JP2010157536A (ja) | 2008-12-26 | 2010-07-15 | Nuflare Technology Inc | サセプタの製造方法 |
JP5268626B2 (ja) | 2008-12-26 | 2013-08-21 | 株式会社日立ハイテクノロジーズ | プラズマ処理装置 |
TWI465599B (zh) | 2008-12-29 | 2014-12-21 | K C Tech Co Ltd | 原子層沉積裝置 |
KR20100077442A (ko) | 2008-12-29 | 2010-07-08 | 주식회사 케이씨텍 | 샤워헤드 및 이를 구비하는 원자층 증착장치 |
US20100183825A1 (en) | 2008-12-31 | 2010-07-22 | Cambridge Nanotech Inc. | Plasma atomic layer deposition system and method |
KR101111063B1 (ko) | 2008-12-31 | 2012-02-16 | 엘아이지에이디피 주식회사 | 기판합착장치 |
US7964490B2 (en) | 2008-12-31 | 2011-06-21 | Intel Corporation | Methods of forming nickel sulfide film on a semiconductor device |
US9640396B2 (en) | 2009-01-07 | 2017-05-02 | Brewer Science Inc. | Spin-on spacer materials for double- and triple-patterning lithography |
US8216380B2 (en) | 2009-01-08 | 2012-07-10 | Asm America, Inc. | Gap maintenance for opening to process chamber |
US20100176513A1 (en) | 2009-01-09 | 2010-07-15 | International Business Machines Corporation | Structure and method of forming metal interconnect structures in ultra low-k dielectrics |
WO2010081003A2 (en) | 2009-01-11 | 2010-07-15 | Applied Materials, Inc. | Systems, apparatus and methods for moving substrates |
US8151814B2 (en) | 2009-01-13 | 2012-04-10 | Asm Japan K.K. | Method for controlling flow and concentration of liquid precursor |
USD606952S1 (en) | 2009-01-16 | 2009-12-29 | Asm Genitech Korea Ltd. | Plasma inducing plate for semiconductor deposition apparatus |
US8591659B1 (en) | 2009-01-16 | 2013-11-26 | Novellus Systems, Inc. | Plasma clean method for deposition chamber |
US8142862B2 (en) | 2009-01-21 | 2012-03-27 | Asm Japan K.K. | Method of forming conformal dielectric film having Si-N bonds by PECVD |
US7972980B2 (en) | 2009-01-21 | 2011-07-05 | Asm Japan K.K. | Method of forming conformal dielectric film having Si-N bonds by PECVD |
US7919416B2 (en) | 2009-01-21 | 2011-04-05 | Asm Japan K.K. | Method of forming conformal dielectric film having Si-N bonds by PECVD |
US20100189923A1 (en) | 2009-01-29 | 2010-07-29 | Asm Japan K.K. | Method of forming hardmask by plasma cvd |
US8557702B2 (en) | 2009-02-02 | 2013-10-15 | Asm America, Inc. | Plasma-enhanced atomic layers deposition of conductive material over dielectric layers |
US8680650B2 (en) | 2009-02-03 | 2014-03-25 | Micron Technology, Inc. | Capacitor structures having improved area efficiency |
JP5330004B2 (ja) | 2009-02-03 | 2013-10-30 | 株式会社東芝 | 半導体装置の製造方法 |
KR101691044B1 (ko) | 2009-02-04 | 2016-12-29 | 맷슨 테크놀로지, 인크. | 기판의 표면에 걸친 온도 프로파일을 방사상으로 튜닝하는 정전 척 시스템 및 방법 |
US8307472B1 (en) | 2009-02-04 | 2012-11-13 | Thomas Jason Saxon | Light emitting diode system |
US20100203242A1 (en) | 2009-02-06 | 2010-08-12 | Applied Materials, Inc. | self-cleaning susceptor for solar cell processing |
US8287648B2 (en) | 2009-02-09 | 2012-10-16 | Asm America, Inc. | Method and apparatus for minimizing contamination in semiconductor processing chamber |
US8716132B2 (en) | 2009-02-13 | 2014-05-06 | Tokyo Electron Limited | Radiation-assisted selective deposition of metal-containing cap layers |
US8663735B2 (en) | 2009-02-13 | 2014-03-04 | Advanced Technology Materials, Inc. | In situ generation of RuO4 for ALD of Ru and Ru related materials |
JPWO2010093041A1 (ja) | 2009-02-16 | 2012-08-16 | 三菱樹脂株式会社 | ガスバリア性積層フィルムの製造方法 |
GB2469112A (en) | 2009-04-03 | 2010-10-06 | Mapper Lithography Ip Bv | Wafer support using controlled capillary liquid layer to hold and release wafer |
KR101172147B1 (ko) | 2009-02-23 | 2012-08-07 | 시너스 테크놀리지, 인코포레이티드 | 플라즈마에 의한 라디칼을 이용한 박막 형성 방법 |
US8673081B2 (en) | 2009-02-25 | 2014-03-18 | Crystal Solar, Inc. | High throughput multi-wafer epitaxial reactor |
US8692466B2 (en) | 2009-02-27 | 2014-04-08 | Mks Instruments Inc. | Method and apparatus of providing power to ignite and sustain a plasma in a reactive gas generator |
JP5216632B2 (ja) | 2009-03-03 | 2013-06-19 | 東京エレクトロン株式会社 | 流体制御装置 |
JP2010205967A (ja) | 2009-03-04 | 2010-09-16 | Tokyo Electron Ltd | プラズマエッチング方法、プラズマエッチング装置及びコンピュータ記憶媒体 |
CN102341891A (zh) | 2009-03-04 | 2012-02-01 | 富士电机株式会社 | 成膜方法与成膜装置 |
KR101049801B1 (ko) | 2009-03-05 | 2011-07-15 | 삼성모바일디스플레이주식회사 | 다결정 실리콘층의 제조방법 및 이에 이용되는 원자층 증착장치 |
USD616394S1 (en) | 2009-03-06 | 2010-05-25 | Tokyo Electron Limited | Support of wafer boat for manufacturing semiconductor wafers |
USD616390S1 (en) | 2009-03-06 | 2010-05-25 | Tokyo Electron Limited | Quartz cover for manufacturing semiconductor wafers |
JP2010239115A (ja) | 2009-03-10 | 2010-10-21 | Hitachi Kokusai Electric Inc | 基板処理装置 |
JP5221421B2 (ja) | 2009-03-10 | 2013-06-26 | 東京エレクトロン株式会社 | シャワーヘッド及びプラズマ処理装置 |
JP5337542B2 (ja) | 2009-03-12 | 2013-11-06 | 株式会社堀場エステック | マスフローメータ、マスフローコントローラ、それらを含むマスフローメータシステムおよびマスフローコントローラシステム |
JP5275094B2 (ja) | 2009-03-13 | 2013-08-28 | 東京エレクトロン株式会社 | 基板処理方法 |
US8703624B2 (en) | 2009-03-13 | 2014-04-22 | Air Products And Chemicals, Inc. | Dielectric films comprising silicon and methods for making same |
WO2010104656A2 (en) | 2009-03-13 | 2010-09-16 | The Board Trustees Ofthe University Of Illinois | Rapid crystallization of heavily doped metal oxides and products produced thereby |
EP2230703A3 (en) | 2009-03-18 | 2012-05-02 | Semiconductor Energy Laboratory Co., Ltd. | Manufacturing apparatus and manufacturing method of lighting device |
KR101055862B1 (ko) | 2009-03-23 | 2011-08-09 | 주식회사 테라세미콘 | 인라인 열처리 장치 |
KR101583608B1 (ko) | 2009-03-24 | 2016-01-08 | 삼성전자 주식회사 | 무기계 실리콘 전구체를 이용한 실리콘 산화막의 형성 방법및 이를 이용한 반도체 장치의 제조 방법 |
WO2010109848A1 (ja) | 2009-03-26 | 2010-09-30 | パナソニック株式会社 | プラズマ処理装置及びプラズマ処理方法 |
KR20110131220A (ko) | 2009-03-27 | 2011-12-06 | 도쿄엘렉트론가부시키가이샤 | 금속 질화막의 성막 방법 |
US9004744B1 (en) | 2009-03-30 | 2015-04-14 | Techni-Blend, Inc. | Fluid mixer using countercurrent injection |
JP5292160B2 (ja) | 2009-03-31 | 2013-09-18 | 東京エレクトロン株式会社 | ガス流路構造体及び基板処理装置 |
US8118484B2 (en) | 2009-03-31 | 2012-02-21 | Rosemount Inc. | Thermocouple temperature sensor with connection detection circuitry |
US8197915B2 (en) | 2009-04-01 | 2012-06-12 | Asm Japan K.K. | Method of depositing silicon oxide film by plasma enhanced atomic layer deposition at low temperature |
JP5647792B2 (ja) | 2009-04-01 | 2015-01-07 | ピーエスフォー ルクスコ エスエイアールエルPS4 Luxco S.a.r.l. | キャパシタ用容量絶縁膜の製造方法 |
US8284601B2 (en) | 2009-04-01 | 2012-10-09 | Samsung Electronics Co., Ltd. | Semiconductor memory device comprising three-dimensional memory cell array |
US9394608B2 (en) | 2009-04-06 | 2016-07-19 | Asm America, Inc. | Semiconductor processing reactor and components thereof |
US8402918B2 (en) | 2009-04-07 | 2013-03-26 | Lam Research Corporation | Showerhead electrode with centering feature |
US8486191B2 (en) | 2009-04-07 | 2013-07-16 | Asm America, Inc. | Substrate reactor with adjustable injectors for mixing gases within reaction chamber |
JP5338443B2 (ja) | 2009-04-14 | 2013-11-13 | 信越半導体株式会社 | Soiウェーハの製造方法 |
JP5710591B2 (ja) | 2009-04-20 | 2015-04-30 | アプライド マテリアルズ インコーポレイテッドApplied Materials,Incorporated | プロセスチャンバ壁上にシリコンコーティングを使用した残留フッ素ラジカルの除去の促進 |
US8404499B2 (en) | 2009-04-20 | 2013-03-26 | Applied Materials, Inc. | LED substrate processing |
US8193075B2 (en) | 2009-04-20 | 2012-06-05 | Applied Materials, Inc. | Remote hydrogen plasma with ion filter for terminating silicon dangling bonds |
US9431237B2 (en) | 2009-04-20 | 2016-08-30 | Applied Materials, Inc. | Post treatment methods for oxide layers on semiconductor devices |
SG174993A1 (en) | 2009-04-21 | 2011-11-28 | Applied Materials Inc | Cvd apparatus for improved film thickness non-uniformity and particle performance |
US20100266765A1 (en) | 2009-04-21 | 2010-10-21 | White Carl L | Method and apparatus for growing a thin film onto a substrate |
JP5204031B2 (ja) | 2009-04-22 | 2013-06-05 | Jfe鋼板株式会社 | 嵌合式折板屋根材 |
US8071452B2 (en) | 2009-04-27 | 2011-12-06 | Asm America, Inc. | Atomic layer deposition of hafnium lanthanum oxides |
US8415753B2 (en) | 2009-04-28 | 2013-04-09 | Canon Anelva Corporation | Semiconductor device and method of manufacturing the same |
JP5136574B2 (ja) | 2009-05-01 | 2013-02-06 | 東京エレクトロン株式会社 | プラズマ処理装置及びプラズマ処理方法 |
US8100583B2 (en) | 2009-05-06 | 2012-01-24 | Asm America, Inc. | Thermocouple |
US9297705B2 (en) | 2009-05-06 | 2016-03-29 | Asm America, Inc. | Smart temperature measuring device |
US8382370B2 (en) | 2009-05-06 | 2013-02-26 | Asm America, Inc. | Thermocouple assembly with guarded thermocouple junction |
KR20100032812A (ko) | 2009-05-11 | 2010-03-26 | 주식회사 테스 | 화학기상증착 장치와 이를 이용한 기판 처리 시스템 |
KR20100122701A (ko) | 2009-05-13 | 2010-11-23 | 주식회사 하이닉스반도체 | 반도체 소자의 제조방법 |
US7842622B1 (en) | 2009-05-15 | 2010-11-30 | Asm Japan K.K. | Method of forming highly conformal amorphous carbon layer |
US8962876B2 (en) | 2009-05-15 | 2015-02-24 | Wayne State University | Thermally stable volatile film precursors |
JP5356516B2 (ja) | 2009-05-20 | 2013-12-04 | 株式会社東芝 | 凹凸パターン形成方法 |
US8004198B2 (en) | 2009-05-28 | 2011-08-23 | Osram Sylvania Inc. | Resetting an electronic ballast in the event of fault |
KR101064210B1 (ko) | 2009-06-01 | 2011-09-14 | 한국생산기술연구원 | 막증착 진공장비용 샤워헤드 |
BRPI1015106A2 (pt) | 2009-06-05 | 2016-04-26 | Andrew Llc | conector coaxial de agarre e sujeição. |
US8758512B2 (en) | 2009-06-08 | 2014-06-24 | Veeco Ald Inc. | Vapor deposition reactor and method for forming thin film |
KR101610773B1 (ko) | 2009-06-10 | 2016-04-08 | 주성엔지니어링(주) | 박막 형성 방법 및 이의 제조 장치 |
JP5456036B2 (ja) | 2009-06-12 | 2014-03-26 | 株式会社東芝 | 不揮発性半導体記憶装置 |
US20100317198A1 (en) | 2009-06-12 | 2010-12-16 | Novellus Systems, Inc. | Remote plasma processing of interface surfaces |
USD652896S1 (en) | 2009-06-17 | 2012-01-24 | Neoperl Gmbh | Faucet stream former |
US8926502B2 (en) | 2011-03-07 | 2015-01-06 | Endochoice, Inc. | Multi camera endoscope having a side service channel |
US8715574B2 (en) | 2009-06-19 | 2014-05-06 | Abbott Laboratories | System for managing inventory of bulk liquids |
US7825040B1 (en) | 2009-06-22 | 2010-11-02 | Asm Japan K.K. | Method for depositing flowable material using alkoxysilane or aminosilane precursor |
JP5285519B2 (ja) | 2009-07-01 | 2013-09-11 | パナソニック株式会社 | 半導体装置及びその製造方法 |
JP5038365B2 (ja) | 2009-07-01 | 2012-10-03 | 株式会社東芝 | サセプタおよび成膜装置 |
KR101050405B1 (ko) | 2009-07-03 | 2011-07-19 | 주식회사 하이닉스반도체 | 스트레인드채널을 갖는 반도체장치 제조 방법 |
US20110006406A1 (en) | 2009-07-08 | 2011-01-13 | Imec | Fabrication of porogen residues free and mechanically robust low-k materials |
KR101110080B1 (ko) | 2009-07-08 | 2012-03-13 | 주식회사 유진테크 | 확산판을 선택적으로 삽입설치하는 기판처리방법 |
US8382939B2 (en) | 2009-07-13 | 2013-02-26 | Applied Materials, Inc. | Plasma processing chamber with enhanced gas delivery |
JP2012533680A (ja) | 2009-07-14 | 2012-12-27 | レール・リキード−ソシエテ・アノニム・プール・レテュード・エ・レクスプロワタシオン・デ・プロセデ・ジョルジュ・クロード | 高温でのiv族金属含有膜の堆積 |
JP2011023718A (ja) | 2009-07-15 | 2011-02-03 | Asm Japan Kk | PEALDによってSi−N結合を有するストレス調節された誘電体膜を形成する方法 |
JP5646478B2 (ja) | 2009-07-17 | 2014-12-24 | 三井化学株式会社 | 積層体およびその製造方法 |
US8507389B2 (en) | 2009-07-17 | 2013-08-13 | Applied Materials, Inc. | Methods for forming dielectric layers |
JP5223804B2 (ja) | 2009-07-22 | 2013-06-26 | 東京エレクトロン株式会社 | 成膜方法及び成膜装置 |
US8980719B2 (en) | 2010-04-28 | 2015-03-17 | Taiwan Semiconductor Manufacturing Company, Ltd. | Methods for doping fin field-effect transistors |
KR101245769B1 (ko) | 2009-07-28 | 2013-03-20 | 엘아이지에이디피 주식회사 | 화학기상증착장치, 화학기상증착장치용 가이드부재 및 화학기상증착장치를 이용한 박막제조방법 |
US8071451B2 (en) | 2009-07-29 | 2011-12-06 | Axcelis Technologies, Inc. | Method of doping semiconductors |
JP5618505B2 (ja) | 2009-07-30 | 2014-11-05 | テクノクオーツ株式会社 | 石英ガラス部材の再生方法 |
US8119527B1 (en) | 2009-08-04 | 2012-02-21 | Novellus Systems, Inc. | Depositing tungsten into high aspect ratio features |
US8124531B2 (en) | 2009-08-04 | 2012-02-28 | Novellus Systems, Inc. | Depositing tungsten into high aspect ratio features |
US20110121503A1 (en) | 2009-08-05 | 2011-05-26 | Applied Materials, Inc. | Cvd apparatus |
US8741788B2 (en) | 2009-08-06 | 2014-06-03 | Applied Materials, Inc. | Formation of silicon oxide using non-carbon flowable CVD processes |
US8258588B2 (en) | 2009-08-07 | 2012-09-04 | Taiwan Semiconductor Manufacturing Company, Ltd. | Sealing layer of a field effect transistor |
JP5600351B2 (ja) | 2009-08-07 | 2014-10-01 | シグマ−アルドリッチ・カンパニー、エルエルシー | 高分子量アルキル−アリルコバルトトリカルボニル錯体及び誘電体薄膜を作製するためのそれらの使用 |
US8877655B2 (en) | 2010-05-07 | 2014-11-04 | Asm America, Inc. | Systems and methods for thin-film deposition of metal oxides using excited nitrogen-oxygen species |
US8883270B2 (en) | 2009-08-14 | 2014-11-11 | Asm America, Inc. | Systems and methods for thin-film deposition of metal oxides using excited nitrogen—oxygen species |
US8802201B2 (en) | 2009-08-14 | 2014-08-12 | Asm America, Inc. | Systems and methods for thin-film deposition of metal oxides using excited nitrogen-oxygen species |
US7989365B2 (en) | 2009-08-18 | 2011-08-02 | Applied Materials, Inc. | Remote plasma source seasoning |
US8563085B2 (en) | 2009-08-18 | 2013-10-22 | Samsung Electronics Co., Ltd. | Precursor composition, methods of forming a layer, methods of forming a gate structure and methods of forming a capacitor |
CN102473634B (zh) | 2009-08-20 | 2015-02-18 | 东京毅力科创株式会社 | 等离子体处理装置和等离子体处理方法 |
KR101031226B1 (ko) | 2009-08-21 | 2011-04-29 | 에이피시스템 주식회사 | 급속열처리 장치의 히터블록 |
WO2011021607A1 (ja) | 2009-08-21 | 2011-02-24 | 東京エレクトロン株式会社 | プラズマ処理装置および基板処理方法 |
US20110185969A1 (en) | 2009-08-21 | 2011-08-04 | Varian Semiconductor Equipment Associates, Inc. | Dual heating for precise wafer temperature control |
US9117773B2 (en) | 2009-08-26 | 2015-08-25 | Asm America, Inc. | High concentration water pulses for atomic layer deposition |
USD634719S1 (en) | 2009-08-27 | 2011-03-22 | Ebara Corporation | Elastic membrane for semiconductor wafer polishing apparatus |
CN102414801A (zh) | 2009-08-27 | 2012-04-11 | 应用材料公司 | 在原位腔室清洁后的处理腔室去污方法 |
USD633452S1 (en) | 2009-08-27 | 2011-03-01 | Ebara Corporation | Elastic membrane for semiconductor wafer polishing apparatus |
US9117769B2 (en) | 2009-08-27 | 2015-08-25 | Tokyo Electron Limited | Plasma etching method |
WO2011026064A1 (en) | 2009-08-31 | 2011-03-03 | The Penn State Research Foundation | Improved plasma enhanced atomic layer deposition process |
JP2011054708A (ja) | 2009-09-01 | 2011-03-17 | Elpida Memory Inc | 絶縁膜およびその製造方法、半導体装置、ならびにデータ処理システム |
JP5457109B2 (ja) | 2009-09-02 | 2014-04-02 | 東京エレクトロン株式会社 | プラズマ処理装置 |
KR101805211B1 (ko) | 2009-09-02 | 2017-12-05 | 레르 리키드 쏘시에떼 아노님 뿌르 레드 에렉스뿔라따시옹 데 프로세데 조르즈 클로드 | 게르마늄 함유 막 침착을 위한 디할라이드 게르마늄(ⅱ) 전구체 |
JP2011054878A (ja) | 2009-09-04 | 2011-03-17 | Panasonic Corp | 半導体装置及びその製造方法 |
US9012333B2 (en) | 2009-09-09 | 2015-04-21 | Spansion Llc | Varied silicon richness silicon nitride formation |
DE212010000009U1 (de) | 2009-09-10 | 2011-05-26 | LAM RESEARCH CORPORATION (Delaware Corporation), California | Auswechselbare obere Kammerteile einer Plasmaverarbeitungsvorrichtung |
US20110061810A1 (en) | 2009-09-11 | 2011-03-17 | Applied Materials, Inc. | Apparatus and Methods for Cyclical Oxidation and Etching |
JP2011082493A (ja) | 2009-09-14 | 2011-04-21 | Hitachi Kokusai Electric Inc | 半導体装置の製造方法及び基板処理装置 |
WO2011034057A1 (ja) | 2009-09-17 | 2011-03-24 | 東京エレクトロン株式会社 | プラズマ処理装置およびプラズマ処理装置用ガス供給機構 |
TWM412457U (en) | 2009-09-18 | 2011-09-21 | Lam Res Corp | Showerhead electrode for use in a plasma reaction chamber and showerhead electrode assembly |
US8278224B1 (en) | 2009-09-24 | 2012-10-02 | Novellus Systems, Inc. | Flowable oxide deposition using rapid delivery of process gases |
US8216640B2 (en) | 2009-09-25 | 2012-07-10 | Hermes-Epitek Corporation | Method of making showerhead for semiconductor processing apparatus |
JP5504793B2 (ja) | 2009-09-26 | 2014-05-28 | 東京エレクトロン株式会社 | 熱処理装置及び冷却方法 |
US20120183689A1 (en) | 2009-09-29 | 2012-07-19 | Tokyo Electron Limited | Ni film forming method |
JP5467007B2 (ja) | 2009-09-30 | 2014-04-09 | 株式会社日立国際電気 | 半導体装置の製造方法および基板処理装置 |
EP2306497B1 (en) | 2009-10-02 | 2012-06-06 | Imec | Method for manufacturing a low defect interface between a dielectric and a III/V compound |
WO2011043337A1 (ja) | 2009-10-05 | 2011-04-14 | 国立大学法人東北大学 | 低誘電率絶縁膜およびその形成方法 |
US8544317B2 (en) | 2009-10-09 | 2013-10-01 | Taiwan Semiconductor Manufacturing Co., Ltd. | Semiconductor processing apparatus with simultaneously movable stages |
US8415259B2 (en) | 2009-10-14 | 2013-04-09 | Asm Japan K.K. | Method of depositing dielectric film by modified PEALD method |
US8173554B2 (en) | 2009-10-14 | 2012-05-08 | Asm Japan K.K. | Method of depositing dielectric film having Si-N bonds by modified peald method |
JP5410235B2 (ja) | 2009-10-15 | 2014-02-05 | 小島プレス工業株式会社 | 有機高分子薄膜の形成方法及び形成装置 |
US8465791B2 (en) | 2009-10-16 | 2013-06-18 | Msp Corporation | Method for counting particles in a gas |
US10513772B2 (en) | 2009-10-20 | 2019-12-24 | Asm International N.V. | Process for passivating dielectric films |
KR101490726B1 (ko) | 2009-10-21 | 2015-02-09 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 반도체 장치 |
US8637794B2 (en) | 2009-10-21 | 2014-01-28 | Lam Research Corporation | Heating plate with planar heating zones for semiconductor processing |
US20110097901A1 (en) | 2009-10-26 | 2011-04-28 | Applied Materials, Inc. | Dual mode inductively coupled plasma reactor with adjustable phase coil assembly |
WO2011056519A2 (en) | 2009-10-26 | 2011-05-12 | Asm International N.V. | Synthesis and use of precursors for ald of group va element containing thin films |
CA2778113C (en) | 2009-10-29 | 2018-04-03 | Oceana Energy Company | Energy conversion systems and methods |
JP5434484B2 (ja) | 2009-11-02 | 2014-03-05 | 東京エレクトロン株式会社 | 成膜装置、成膜方法及び記憶媒体 |
JP5257328B2 (ja) | 2009-11-04 | 2013-08-07 | 東京エレクトロン株式会社 | 基板処理装置、基板処理方法及び記憶媒体 |
JP5451324B2 (ja) | 2009-11-10 | 2014-03-26 | 株式会社日立ハイテクノロジーズ | プラズマ処理装置 |
US8528224B2 (en) | 2009-11-12 | 2013-09-10 | Novellus Systems, Inc. | Systems and methods for at least partially converting films to silicon oxide and/or improving film quality using ultraviolet curing in steam and densification of films using UV curing in ammonia |
US8854734B2 (en) | 2009-11-12 | 2014-10-07 | Vela Technologies, Inc. | Integrating optical system and methods |
JP4948587B2 (ja) | 2009-11-13 | 2012-06-06 | 東京エレクトロン株式会社 | フォトレジスト塗布現像装置、基板搬送方法、インターフェイス装置 |
CN102666371B (zh) | 2009-11-13 | 2015-01-07 | 巴斯夫欧洲公司 | 提纯氯进料的方法 |
US8329585B2 (en) | 2009-11-17 | 2012-12-11 | Lam Research Corporation | Method for reducing line width roughness with plasma pre-etch treatment on photoresist |
US8367528B2 (en) | 2009-11-17 | 2013-02-05 | Asm America, Inc. | Cyclical epitaxial deposition and etch |
US8742665B2 (en) | 2009-11-18 | 2014-06-03 | Applied Materials, Inc. | Plasma source design |
US8771538B2 (en) | 2009-11-18 | 2014-07-08 | Applied Materials, Inc. | Plasma source design |
EP2336824A1 (en) | 2009-11-19 | 2011-06-22 | Rohm and Haas Electronic Materials, L.L.C. | Methods of forming electronic devices |
KR20110055912A (ko) | 2009-11-20 | 2011-05-26 | 주식회사 하이닉스반도체 | 반도체 소자의 콘택홀 형성방법 |
AU329418S (en) | 2009-11-23 | 2010-01-29 | Pusher tool | |
KR101128267B1 (ko) | 2009-11-26 | 2012-03-26 | 주식회사 테스 | 가스분사장치 및 이를 갖는 공정 챔버 |
US8323558B2 (en) | 2009-11-30 | 2012-12-04 | L'air Liquide Societe Anonyme Pour L'etude Et L'exploitation Des Procedes Georges Claude | Dynamic control of lance utilizing counterflow fluidic techniques |
JP5432686B2 (ja) | 2009-12-03 | 2014-03-05 | 東京エレクトロン株式会社 | プラズマ処理装置 |
US8389977B2 (en) | 2009-12-10 | 2013-03-05 | Transphorm Inc. | Reverse side engineered III-nitride devices |
JP5435039B2 (ja) | 2009-12-11 | 2014-03-05 | 株式会社Sumco | Cvd用トレーおよびそれを用いた成膜方法 |
US20110139748A1 (en) | 2009-12-15 | 2011-06-16 | University Of Houston | Atomic layer etching with pulsed plasmas |
US8328494B2 (en) | 2009-12-15 | 2012-12-11 | Varian Semiconductor Equipment Associates, Inc. | In vacuum optical wafer heater for cryogenic processing |
JP2013514662A (ja) | 2009-12-16 | 2013-04-25 | ナショナル セミコンダクター コーポレーション | ガリウム窒化物又は他の窒化物ベースのパワーデバイスのためのゲルマニウムを含む低オーミックコンタクト |
US8507720B2 (en) | 2010-01-29 | 2013-08-13 | Lyondell Chemical Technology, L.P. | Titania-alumina supported palladium catalyst |
JP5419276B2 (ja) | 2009-12-24 | 2014-02-19 | 株式会社堀場製作所 | 材料ガス濃度制御システム及び材料ガス濃度制御システム用プログラム |
JP5606063B2 (ja) | 2009-12-28 | 2014-10-15 | 東京エレクトロン株式会社 | プラズマ処理装置 |
US20110159202A1 (en) | 2009-12-29 | 2011-06-30 | Asm Japan K.K. | Method for Sealing Pores at Surface of Dielectric Layer by UV Light-Assisted CVD |
KR20110078326A (ko) | 2009-12-31 | 2011-07-07 | 삼성전자주식회사 | 유전막 형성 방법 및 이를 이용한 반도체 소자 제조 방법 |
USD653734S1 (en) | 2010-01-08 | 2012-02-07 | Bulk Tank, Inc. | Screened gasket |
JP2011166106A (ja) | 2010-01-13 | 2011-08-25 | Renesas Electronics Corp | 半導体装置の製造方法及び半導体装置 |
JP2011144412A (ja) | 2010-01-13 | 2011-07-28 | Honda Motor Co Ltd | プラズマ成膜装置 |
JP5549441B2 (ja) | 2010-01-14 | 2014-07-16 | 東京エレクトロン株式会社 | 保持体機構、ロードロック装置、処理装置及び搬送機構 |
US20110174362A1 (en) | 2010-01-18 | 2011-07-21 | Applied Materials, Inc. | Manufacture of thin film solar cells with high conversion efficiency |
USD651291S1 (en) | 2010-01-24 | 2011-12-27 | Glv International (1995) Ltd. | Duct connector ring |
US20110183269A1 (en) | 2010-01-25 | 2011-07-28 | Hongbin Zhu | Methods Of Forming Patterns, And Methods For Trimming Photoresist Features |
US8480942B2 (en) | 2010-01-27 | 2013-07-09 | The Board Of Trustees Of The University Of Illinois | Method of forming a patterned layer of a material on a substrate |
US20110180233A1 (en) | 2010-01-27 | 2011-07-28 | Applied Materials, Inc. | Apparatus for controlling temperature uniformity of a showerhead |
JP5610438B2 (ja) | 2010-01-29 | 2014-10-22 | 株式会社日立国際電気 | 基板処理装置及び半導体装置の製造方法 |
JP5107372B2 (ja) | 2010-02-04 | 2012-12-26 | 東京エレクトロン株式会社 | 熱処理装置、塗布現像処理システム、熱処理方法、塗布現像処理方法及びその熱処理方法又は塗布現像処理方法を実行させるためのプログラムを記録した記録媒体 |
KR101259862B1 (ko) | 2010-02-05 | 2013-05-02 | 도쿄엘렉트론가부시키가이샤 | 기판 보유지지구 및 기판 반송 장치 및 기판 처리 장치 |
KR101080604B1 (ko) | 2010-02-09 | 2011-11-04 | 성균관대학교산학협력단 | 원자층 식각 장치 및 이를 이용한 식각 방법 |
JP2011162830A (ja) | 2010-02-09 | 2011-08-25 | Fuji Electric Co Ltd | プラズマcvdによる成膜方法、成膜済基板および成膜装置 |
US20110198034A1 (en) | 2010-02-11 | 2011-08-18 | Jennifer Sun | Gas distribution showerhead with coating material for semiconductor processing |
WO2011100293A2 (en) | 2010-02-12 | 2011-08-18 | Applied Materials, Inc. | Process chamber gas flow improvements |
US8562272B2 (en) | 2010-02-16 | 2013-10-22 | Lam Research Corporation | Substrate load and unload mechanisms for high throughput |
US8293658B2 (en) | 2010-02-17 | 2012-10-23 | Asm America, Inc. | Reactive site deactivation against vapor deposition |
WO2011106072A2 (en) | 2010-02-23 | 2011-09-01 | L'air Liquide Societe Anonyme Pour L'etude Et L'exploitation Des Procedes Georges Claude | Use of ruthenium tetroxide as a precursor and reactant for thin film depositions |
EP2540387B1 (en) | 2010-02-23 | 2020-02-19 | Asahi Organic Chemicals Industry Co., Ltd. | In-line fluid mixing device |
USD625977S1 (en) | 2010-02-25 | 2010-10-26 | Vertex Stone and Chinaware Ltd. | Spacer tool |
US20110207332A1 (en) | 2010-02-25 | 2011-08-25 | Taiwan Semiconductor Manufacturing Co., Ltd. | Thin film coated process kits for semiconductor manufacturing tools |
JP5812606B2 (ja) | 2010-02-26 | 2015-11-17 | 株式会社日立国際電気 | 基板処理装置及び半導体装置の製造方法 |
EP2362411A1 (en) | 2010-02-26 | 2011-08-31 | Nederlandse Organisatie voor toegepast -natuurwetenschappelijk onderzoek TNO | Apparatus and method for reactive ion etching |
JP2011181681A (ja) | 2010-03-01 | 2011-09-15 | Mitsui Eng & Shipbuild Co Ltd | 原子層堆積方法及び原子層堆積装置 |
US8241991B2 (en) | 2010-03-05 | 2012-08-14 | Asm Japan K.K. | Method for forming interconnect structure having airgap |
EP2545197B1 (en) | 2010-03-12 | 2020-12-16 | Applied Materials, Inc. | Atomic layer deposition chamber with multi inject |
JP5592129B2 (ja) | 2010-03-16 | 2014-09-17 | 東京エレクトロン株式会社 | プラズマ処理装置 |
FR2957716B1 (fr) | 2010-03-18 | 2012-10-05 | Soitec Silicon On Insulator | Procede de finition d'un substrat de type semi-conducteur sur isolant |
US20110236201A1 (en) | 2010-03-23 | 2011-09-29 | Sumedhkumar Vyankatesh Shende | Method and apparatus for radial exhaust gas turbine |
US8039388B1 (en) | 2010-03-24 | 2011-10-18 | Taiwam Semiconductor Manufacturing Company, Ltd. | Main spacer trim-back method for replacement gate process |
US8709551B2 (en) | 2010-03-25 | 2014-04-29 | Novellus Systems, Inc. | Smooth silicon-containing films |
US8741394B2 (en) | 2010-03-25 | 2014-06-03 | Novellus Systems, Inc. | In-situ deposition of film stacks |
US9017933B2 (en) | 2010-03-29 | 2015-04-28 | Tokyo Electron Limited | Method for integrating low-k dielectrics |
US8988012B2 (en) | 2010-03-31 | 2015-03-24 | Tokyo Electron Limited | Dielectric window for plasma processing apparatus, plasma processing apparatus and method for mounting dielectric window for plasma processing apparatus |
US20130078376A1 (en) | 2010-04-01 | 2013-03-28 | L'air Liquide, Societe Anonyme Pour L'etude Et L'exploitation Des Procedes Georges Claude | Metal nitride containing film deposition using combination of amino-metal and halogenated metal precursors |
JP4733214B1 (ja) | 2010-04-02 | 2011-07-27 | 東京エレクトロン株式会社 | マスクパターンの形成方法及び半導体装置の製造方法 |
KR101211043B1 (ko) | 2010-04-05 | 2012-12-12 | 에스케이하이닉스 주식회사 | 매립게이트를 구비한 반도체 장치 제조방법 |
WO2011125395A1 (ja) | 2010-04-09 | 2011-10-13 | 株式会社日立国際電気 | 半導体装置の製造方法、基板処理方法および基板処理装置 |
US20110256692A1 (en) | 2010-04-14 | 2011-10-20 | Applied Materials, Inc. | Multiple precursor concentric delivery showerhead |
EP2378543B1 (en) | 2010-04-14 | 2015-05-20 | ASM Genitech Korea Ltd. | Method of forming semiconductor patterns |
US8637411B2 (en) | 2010-04-15 | 2014-01-28 | Novellus Systems, Inc. | Plasma activated conformal dielectric film deposition |
US9997357B2 (en) | 2010-04-15 | 2018-06-12 | Lam Research Corporation | Capped ALD films for doping fin-shaped channel regions of 3-D IC transistors |
US8993460B2 (en) | 2013-01-10 | 2015-03-31 | Novellus Systems, Inc. | Apparatuses and methods for depositing SiC/SiCN films via cross-metathesis reactions with organometallic co-reactants |
US9373500B2 (en) | 2014-02-21 | 2016-06-21 | Lam Research Corporation | Plasma assisted atomic layer deposition titanium oxide for conformal encapsulation and gapfill applications |
US8956983B2 (en) | 2010-04-15 | 2015-02-17 | Novellus Systems, Inc. | Conformal doping via plasma activated atomic layer deposition and conformal film deposition |
US9257274B2 (en) | 2010-04-15 | 2016-02-09 | Lam Research Corporation | Gapfill of variable aspect ratio features with a composite PEALD and PECVD method |
US9076646B2 (en) | 2010-04-15 | 2015-07-07 | Lam Research Corporation | Plasma enhanced atomic layer deposition with pulsed plasma exposure |
US9892917B2 (en) | 2010-04-15 | 2018-02-13 | Lam Research Corporation | Plasma assisted atomic layer deposition of multi-layer films for patterning applications |
US9611544B2 (en) | 2010-04-15 | 2017-04-04 | Novellus Systems, Inc. | Plasma activated conformal dielectric film deposition |
WO2011130174A1 (en) | 2010-04-15 | 2011-10-20 | Novellus Systems, Inc. | Gas and liquid injection methods and apparatus |
US9390909B2 (en) | 2013-11-07 | 2016-07-12 | Novellus Systems, Inc. | Soft landing nanolaminates for advanced patterning |
US8728956B2 (en) | 2010-04-15 | 2014-05-20 | Novellus Systems, Inc. | Plasma activated conformal film deposition |
CZ303655B6 (cs) | 2010-04-16 | 2013-01-30 | Skutchanová@Zuzana | Zpusob výroby brousicího povrchu skleneného kosmetického prípravku |
US8852685B2 (en) | 2010-04-23 | 2014-10-07 | Lam Research Corporation | Coating method for gas delivery system |
TWI536451B (zh) | 2010-04-26 | 2016-06-01 | 應用材料股份有限公司 | 使用具金屬系前驅物之化學氣相沉積與原子層沉積製程之n型金氧半導體金屬閘極材料、製造方法及設備 |
KR101121858B1 (ko) | 2010-04-27 | 2012-03-21 | 주식회사 하이닉스반도체 | 반도체 소자의 제조 방법 |
KR20110120661A (ko) | 2010-04-29 | 2011-11-04 | 주식회사 하이닉스반도체 | 비휘발성 메모리 장치 및 그의 제조 방법 |
CH702999A1 (de) | 2010-04-29 | 2011-10-31 | Amt Ag | Vorrichtung zur Beschichtung von Substraten mittels Hochgeschwindigkeitsflammspritzen. |
US8707754B2 (en) | 2010-04-30 | 2014-04-29 | Applied Materials, Inc. | Methods and apparatus for calibrating flow controllers in substrate processing systems |
US8496756B2 (en) | 2010-04-30 | 2013-07-30 | Applied Materials, Inc. | Methods for processing substrates in process systems having shared resources |
US9324597B2 (en) | 2010-04-30 | 2016-04-26 | Applied Materials, Inc. | Vertical inline CVD system |
JP5660804B2 (ja) | 2010-04-30 | 2015-01-28 | 東京エレクトロン株式会社 | カーボンナノチューブの形成方法及びカーボンナノチューブ成膜装置 |
US20110265951A1 (en) | 2010-04-30 | 2011-11-03 | Applied Materials, Inc. | Twin chamber processing system |
US20110269314A1 (en) | 2010-04-30 | 2011-11-03 | Applied Materials, Inc. | Process chambers having shared resources and methods of use thereof |
US8241992B2 (en) | 2010-05-10 | 2012-08-14 | International Business Machines Corporation | Method for air gap interconnect integration using photo-patternable low k material |
US9441295B2 (en) | 2010-05-14 | 2016-09-13 | Solarcity Corporation | Multi-channel gas-delivery system |
JP2012004536A (ja) | 2010-05-20 | 2012-01-05 | Hitachi Kokusai Electric Inc | 基板処理装置及び基板処理方法 |
US20110294075A1 (en) | 2010-05-25 | 2011-12-01 | United Microelectronics Corp. | Patterning method |
CN102917767B (zh) | 2010-05-28 | 2015-11-25 | 埃克森美孚上游研究公司 | 整合吸附器头以及与其相关的阀设计和变化吸附法 |
US8513129B2 (en) | 2010-05-28 | 2013-08-20 | Applied Materials, Inc. | Planarizing etch hardmask to increase pattern density and aspect ratio |
JP5593384B2 (ja) | 2010-06-01 | 2014-09-24 | パナソニック株式会社 | プラズマ処理装置及びプラズマ処理方法 |
US8912353B2 (en) | 2010-06-02 | 2014-12-16 | Air Products And Chemicals, Inc. | Organoaminosilane precursors and methods for depositing films comprising same |
US20110297088A1 (en) | 2010-06-04 | 2011-12-08 | Texas Instruments Incorporated | Thin edge carrier ring |
US8637390B2 (en) | 2010-06-04 | 2014-01-28 | Applied Materials, Inc. | Metal gate structures and methods for forming thereof |
JP5794497B2 (ja) | 2010-06-08 | 2015-10-14 | 国立研究開発法人産業技術総合研究所 | 連結システム |
JP5788975B2 (ja) | 2010-06-09 | 2015-10-07 | ザ プロクター アンド ギャンブルカンパニー | 液体パーソナルケア組成物の半連続供給式製造 |
JP5525339B2 (ja) | 2010-06-10 | 2014-06-18 | ナブテスコ株式会社 | ロボットアーム |
TWI529808B (zh) | 2010-06-10 | 2016-04-11 | Asm國際股份有限公司 | 使膜選擇性沈積於基板上的方法 |
JP2012004401A (ja) | 2010-06-18 | 2012-01-05 | Fujitsu Semiconductor Ltd | 半導体装置の製造方法 |
JP5597456B2 (ja) | 2010-06-29 | 2014-10-01 | 東京エレクトロン株式会社 | 誘電体の厚さ設定方法、及び電極に設けられた誘電体を備える基板処理装置 |
US8778745B2 (en) | 2010-06-29 | 2014-07-15 | Semiconductor Energy Laboratory Co., Ltd. | Method for manufacturing semiconductor device |
US9570328B2 (en) | 2010-06-30 | 2017-02-14 | Applied Materials, Inc. | Substrate support for use with multi-zonal heating sources |
JP5119297B2 (ja) | 2010-06-30 | 2013-01-16 | 東京エレクトロン株式会社 | 基板処理装置 |
WO2012002995A2 (en) | 2010-07-02 | 2012-01-05 | Matheson Tri-Gas, Inc. | Thin films and methods of making them using cyclohexasilane |
KR20120003677A (ko) | 2010-07-05 | 2012-01-11 | 삼성전자주식회사 | 반도체 장치 및 그의 형성 방법 |
US9373677B2 (en) | 2010-07-07 | 2016-06-21 | Entegris, Inc. | Doping of ZrO2 for DRAM applications |
JP5405667B2 (ja) | 2010-07-22 | 2014-02-05 | 株式会社日立国際電気 | 基板処理装置および半導体装置の製造方法 |
KR20130062980A (ko) | 2010-07-22 | 2013-06-13 | 시너스 테크놀리지, 인코포레이티드 | 원자층 증착에서 불활성 기체 플라즈마를 이용한 기판 표면의 처리 |
JP5707766B2 (ja) | 2010-07-28 | 2015-04-30 | 住友電気工業株式会社 | サセプタおよび半導体製造装置 |
US8721791B2 (en) | 2010-07-28 | 2014-05-13 | Applied Materials, Inc. | Showerhead support structure for improved gas flow |
JP5490753B2 (ja) | 2010-07-29 | 2014-05-14 | 東京エレクトロン株式会社 | トレンチの埋め込み方法および成膜システム |
US20120024478A1 (en) | 2010-07-29 | 2012-02-02 | Hermes-Epitek Corporation | Showerhead |
US9443753B2 (en) | 2010-07-30 | 2016-09-13 | Applied Materials, Inc. | Apparatus for controlling the flow of a gas in a process chamber |
US8318584B2 (en) | 2010-07-30 | 2012-11-27 | Applied Materials, Inc. | Oxide-rich liner layer for flowable CVD gapfill |
US8669185B2 (en) | 2010-07-30 | 2014-03-11 | Asm Japan K.K. | Method of tailoring conformality of Si-containing film |
JP2012038819A (ja) | 2010-08-04 | 2012-02-23 | Sanyo Electric Co Ltd | 半導体レーザ装置および光装置 |
US9449793B2 (en) | 2010-08-06 | 2016-09-20 | Lam Research Corporation | Systems, methods and apparatus for choked flow element extraction |
JP5503006B2 (ja) | 2010-08-06 | 2014-05-28 | 東京エレクトロン株式会社 | 基板処理システム、搬送モジュール、基板処理方法及び半導体素子の製造方法 |
EP2602356A1 (en) | 2010-08-06 | 2013-06-12 | Mitsubishi Heavy Industries, Ltd. | Vacuum processing apparatus and plasma processing method |
US9449858B2 (en) | 2010-08-09 | 2016-09-20 | Applied Materials, Inc. | Transparent reflector plate for rapid thermal processing chamber |
US8357608B2 (en) | 2010-08-09 | 2013-01-22 | International Business Machines Corporation | Multi component dielectric layer |
US20130152933A1 (en) | 2010-08-10 | 2013-06-20 | The Regents Of The University Of California, A California Corporation | Automated fluid delivery system and method |
US9783885B2 (en) | 2010-08-11 | 2017-10-10 | Unit Cell Diamond Llc | Methods for producing diamond mass and apparatus therefor |
KR101249999B1 (ko) | 2010-08-12 | 2013-04-03 | 주식회사 디엠에스 | 화학기상증착 장치 |
KR101658492B1 (ko) | 2010-08-13 | 2016-09-21 | 삼성전자주식회사 | 미세 패턴의 형성 방법 및 이를 이용한 반도체 소자의 제조 방법 |
US8535445B2 (en) | 2010-08-13 | 2013-09-17 | Veeco Instruments Inc. | Enhanced wafer carrier |
USD649986S1 (en) | 2010-08-17 | 2011-12-06 | Ebara Corporation | Sealing ring |
US9487600B2 (en) | 2010-08-17 | 2016-11-08 | Uchicago Argonne, Llc | Ordered nanoscale domains by infiltration of block copolymers |
US8685845B2 (en) | 2010-08-20 | 2014-04-01 | International Business Machines Corporation | Epitaxial growth of silicon doped with carbon and phosphorus using hydrogen carrier gas |
FI124113B (fi) | 2010-08-30 | 2014-03-31 | Beneq Oy | Laitteisto ja menetelmä substraatin pinnan muokkaamiseksi |
CN102386067B (zh) | 2010-08-31 | 2013-12-18 | 中国科学院上海微系统与信息技术研究所 | 有效抑制自掺杂效应的外延生长方法 |
US8945305B2 (en) | 2010-08-31 | 2015-02-03 | Micron Technology, Inc. | Methods of selectively forming a material using parylene coating |
US8394466B2 (en) | 2010-09-03 | 2013-03-12 | Asm Japan K.K. | Method of forming conformal film having si-N bonds on high-aspect ratio pattern |
CN102383106B (zh) | 2010-09-03 | 2013-12-25 | 甘志银 | 快速清除残余反应气体的金属有机物化学气相沉积反应腔体 |
US8573152B2 (en) | 2010-09-03 | 2013-11-05 | Lam Research Corporation | Showerhead electrode |
EP2426233B1 (en) | 2010-09-03 | 2013-05-01 | L'air Liquide, Societe Anonyme Pour L'etude Et L'exploitation Des Procedes Georges Claude | Use of dialkyl monoalkoxy aluminum for the growth of Al2O3 thin films for photovoltaic applications |
US20120058630A1 (en) | 2010-09-08 | 2012-03-08 | Veeco Instruments Inc. | Linear Cluster Deposition System |
JP2012080095A (ja) | 2010-09-10 | 2012-04-19 | Elpida Memory Inc | 半導体装置及びその製造方法 |
JP5560147B2 (ja) | 2010-09-13 | 2014-07-23 | 東京エレクトロン株式会社 | 成膜方法及び半導体装置の製造方法 |
JP5845754B2 (ja) | 2010-09-15 | 2016-01-20 | 東京エレクトロン株式会社 | プラズマエッチング処理方法 |
KR20120029291A (ko) | 2010-09-16 | 2012-03-26 | 삼성전자주식회사 | 반도체 소자 및 그 제조 방법 |
KR101408431B1 (ko) | 2010-09-21 | 2014-06-17 | 가부시키가이샤 아루박 | 박막 제조 방법 및 박막 제조 장치 |
US8524612B2 (en) | 2010-09-23 | 2013-09-03 | Novellus Systems, Inc. | Plasma-activated deposition of conformal films |
US9685320B2 (en) | 2010-09-23 | 2017-06-20 | Lam Research Corporation | Methods for depositing silicon oxide |
US8722548B2 (en) | 2010-09-24 | 2014-05-13 | International Business Machines Corporation | Structures and techniques for atomic layer deposition |
TWI513848B (zh) | 2010-09-24 | 2015-12-21 | Ferrotec Usa Corp | 混合氣體注射器 |
US20120073400A1 (en) | 2010-09-29 | 2012-03-29 | John Wang | Handlebar grip assembly |
US7994070B1 (en) | 2010-09-30 | 2011-08-09 | Tokyo Electron Limited | Low-temperature dielectric film formation by chemical vapor deposition |
US20120083134A1 (en) | 2010-09-30 | 2012-04-05 | Hui-Jung Wu | Method of mitigating substrate damage during deposition processes |
US8076250B1 (en) | 2010-10-06 | 2011-12-13 | Applied Materials, Inc. | PECVD oxide-nitride and oxide-silicon stacks for 3D memory application |
TW201224190A (en) | 2010-10-06 | 2012-06-16 | Applied Materials Inc | Atomic layer deposition of photoresist materials and hard mask precursors |
FR2965888B1 (fr) | 2010-10-08 | 2012-12-28 | Alcatel Lucent | Canalisation d'evacuation de gaz et procede d'evacuation associe |
JP5638405B2 (ja) | 2010-10-08 | 2014-12-10 | パナソニック株式会社 | 基板のプラズマ処理方法 |
US8664127B2 (en) | 2010-10-15 | 2014-03-04 | Applied Materials, Inc. | Two silicon-containing precursors for gapfill enhancing dielectric liner |
US8771791B2 (en) | 2010-10-18 | 2014-07-08 | Veeco Ald Inc. | Deposition of layer using depositing apparatus with reciprocating susceptor |
JP5734081B2 (ja) | 2010-10-18 | 2015-06-10 | 株式会社日立国際電気 | 基板処理装置、基板処理装置の温度制御方法、及び基板処理装置の加熱方法 |
US8911553B2 (en) | 2010-10-19 | 2014-12-16 | Applied Materials, Inc. | Quartz showerhead for nanocure UV chamber |
JP5636867B2 (ja) | 2010-10-19 | 2014-12-10 | 富士通株式会社 | 半導体装置及び半導体装置の製造方法 |
CN103168274B (zh) | 2010-10-21 | 2016-07-06 | 日产化学工业株式会社 | Euv光刻用抗蚀剂上层膜形成用组合物 |
USD654884S1 (en) | 2010-10-21 | 2012-02-28 | Tokyo Electron Limited | Top plate for reactor for manufacturing semiconductor |
USD654882S1 (en) | 2010-10-21 | 2012-02-28 | Tokyo Electron Limited | Gas-separating plate for reactor for manufacturing semiconductor |
USD655260S1 (en) | 2010-10-21 | 2012-03-06 | Tokyo Electron Limited | Gas-separating plate for reactor for manufacturing semiconductor |
US8192901B2 (en) | 2010-10-21 | 2012-06-05 | Asahi Glass Company, Limited | Glass substrate-holding tool |
USD655261S1 (en) | 2010-10-21 | 2012-03-06 | Tokyo Electron Limited | Gas-separating plate for reactor for manufacturing semiconductor |
US8845806B2 (en) | 2010-10-22 | 2014-09-30 | Asm Japan K.K. | Shower plate having different aperture dimensions and/or distributions |
US8926788B2 (en) | 2010-10-27 | 2015-01-06 | Lam Research Ag | Closed chamber for wafer wet processing |
WO2012057967A2 (en) | 2010-10-27 | 2012-05-03 | Applied Materials, Inc. | Methods and apparatus for controlling photoresist line width roughness |
JP4755307B1 (ja) | 2010-10-28 | 2011-08-24 | 株式会社朝日工業社 | クリーンルーム |
JP5544343B2 (ja) | 2010-10-29 | 2014-07-09 | 東京エレクトロン株式会社 | 成膜装置 |
KR20120047325A (ko) | 2010-11-01 | 2012-05-11 | 삼성전자주식회사 | 3차원 반도체 장치 및 그 제조 방법 |
KR101716113B1 (ko) | 2010-11-03 | 2017-03-15 | 삼성전자 주식회사 | 반도체 소자 및 이의 제조 방법 |
KR20130135261A (ko) | 2010-11-03 | 2013-12-10 | 어플라이드 머티어리얼스, 인코포레이티드 | 실리콘 카바이드 및 실리콘 카보나이트라이드 막들을 증착하기 위한 장치 및 방법들 |
WO2012061278A1 (en) | 2010-11-05 | 2012-05-10 | Synos Technology, Inc. | Radical reactor with multiple plasma chambers |
US8470187B2 (en) | 2010-11-05 | 2013-06-25 | Asm Japan K.K. | Method of depositing film with tailored comformality |
JP5722595B2 (ja) | 2010-11-11 | 2015-05-20 | 株式会社日立国際電気 | 基板処理装置および半導体装置の製造方法 |
US20120121823A1 (en) | 2010-11-12 | 2012-05-17 | Applied Materials, Inc. | Process for lowering adhesion layer thickness and improving damage resistance for thin ultra low-k dielectric film |
JP2012109446A (ja) | 2010-11-18 | 2012-06-07 | Tokyo Electron Ltd | 絶縁部材及び絶縁部材を備えた基板処理装置 |
JP2013544938A (ja) | 2010-11-22 | 2013-12-19 | イー・アイ・デュポン・ドウ・ヌムール・アンド・カンパニー | 半導体インク、膜、コーティングされた基板および製造方法 |
KR20120055363A (ko) | 2010-11-23 | 2012-05-31 | 삼성전자주식회사 | 커패시터 및 이를 포함하는 반도체 소자 |
KR101538874B1 (ko) | 2010-11-24 | 2015-07-22 | 비코 에이엘디 인코포레이티드 | 대형 기판상에 원자층 증착을 수행하기 위한 다중 섹션을 구비한 연장된 반응기 조립체 |
KR20130055694A (ko) | 2010-11-29 | 2013-05-28 | 가부시키가이샤 히다치 고쿠사이 덴키 | 반도체 장치의 제조 방법, 기판 처리 방법 및 기판 처리 장치 |
US8288758B2 (en) | 2010-12-02 | 2012-10-16 | International Business Machines Corporation | SOI SiGe-base lateral bipolar junction transistor |
US8415587B2 (en) | 2010-12-03 | 2013-04-09 | Uvtech Systems, Inc. | Fiber-optic beam delivery system for wafer edge processing |
KR101525813B1 (ko) | 2010-12-09 | 2015-06-05 | 울박, 인크 | 유기 박막 형성 장치 |
US20120149213A1 (en) | 2010-12-09 | 2012-06-14 | Lakshminarayana Nittala | Bottom up fill in high aspect ratio trenches |
TWI507561B (zh) | 2010-12-10 | 2015-11-11 | Ind Tech Res Inst | 結合進氣和排氣的噴灑頭 |
KR101411726B1 (ko) | 2010-12-10 | 2014-06-26 | 데이진 가부시키가이샤 | 반도체 적층체, 반도체 디바이스, 및 그들의 제조 방법 |
CN106887399B (zh) | 2010-12-20 | 2020-02-21 | Ev 集团 E·索尔纳有限责任公司 | 用于保持晶片的容纳装置 |
US9719169B2 (en) | 2010-12-20 | 2017-08-01 | Novellus Systems, Inc. | System and apparatus for flowable deposition in semiconductor fabrication |
US20120156890A1 (en) | 2010-12-20 | 2012-06-21 | Applied Materials, Inc. | In-situ low-k capping to improve integration damage resistance |
JP5735304B2 (ja) | 2010-12-21 | 2015-06-17 | 株式会社日立国際電気 | 基板処理装置、基板の製造方法、半導体デバイスの製造方法およびガス供給管 |
CN102094183B (zh) | 2010-12-22 | 2012-07-25 | 中国工程物理研究院激光聚变研究中心 | 冷壁间歇式反应器 |
US8314034B2 (en) | 2010-12-23 | 2012-11-20 | Intel Corporation | Feature size reduction |
JP2012138500A (ja) | 2010-12-27 | 2012-07-19 | Tokyo Electron Ltd | タングステン膜又は酸化タングステン膜上への酸化シリコン膜の成膜方法及び成膜装置 |
JP5675331B2 (ja) | 2010-12-27 | 2015-02-25 | 東京エレクトロン株式会社 | トレンチの埋め込み方法 |
WO2012090973A1 (en) | 2010-12-28 | 2012-07-05 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and manufacturing method thereof |
US9790594B2 (en) | 2010-12-28 | 2017-10-17 | Asm Ip Holding B.V. | Combination CVD/ALD method, source and pulse profile modification |
US8901016B2 (en) | 2010-12-28 | 2014-12-02 | Asm Japan K.K. | Method of forming metal oxide hardmask |
JP5573666B2 (ja) | 2010-12-28 | 2014-08-20 | 東京エレクトロン株式会社 | 原料供給装置及び成膜装置 |
USD655599S1 (en) | 2010-12-29 | 2012-03-13 | Bill Durham | Wall or door mountable holder |
FR2970110B1 (fr) | 2010-12-29 | 2013-09-06 | St Microelectronics Crolles 2 | Procede de fabrication d'une couche de dielectrique polycristalline |
JP6104817B2 (ja) | 2010-12-30 | 2017-03-29 | アプライド マテリアルズ インコーポレイテッドApplied Materials,Incorporated | マイクロ波プラズマを用いた薄膜堆積 |
US8698107B2 (en) | 2011-01-10 | 2014-04-15 | Varian Semiconductor Equipment Associates, Inc. | Technique and apparatus for monitoring ion mass, energy, and angle in processing systems |
KR101306315B1 (ko) | 2011-01-11 | 2013-09-09 | 주식회사 디엠에스 | 화학기상증착 장치 |
JP5236755B2 (ja) | 2011-01-14 | 2013-07-17 | 東京エレクトロン株式会社 | 成膜装置及び成膜方法 |
JP5609663B2 (ja) | 2011-01-18 | 2014-10-22 | 旭硝子株式会社 | ガラス基板保持手段、およびそれを用いたeuvマスクブランクスの製造方法 |
US20120180954A1 (en) | 2011-01-18 | 2012-07-19 | Applied Materials, Inc. | Semiconductor processing system and methods using capacitively coupled plasma |
JP5782279B2 (ja) | 2011-01-20 | 2015-09-24 | 株式会社Screenホールディングス | 基板処理方法および基板処理装置 |
US8398773B2 (en) | 2011-01-21 | 2013-03-19 | Asm International N.V. | Thermal processing furnace and liner for the same |
US8969823B2 (en) | 2011-01-21 | 2015-03-03 | Uchicago Argonne, Llc | Microchannel plate detector and methods for their fabrication |
US8450191B2 (en) | 2011-01-24 | 2013-05-28 | Applied Materials, Inc. | Polysilicon films by HDP-CVD |
US8900935B2 (en) | 2011-01-25 | 2014-12-02 | International Business Machines Corporation | Deposition on a nanowire using atomic layer deposition |
US8524589B2 (en) | 2011-01-26 | 2013-09-03 | Applied Materials, Inc. | Plasma treatment of silicon nitride and silicon oxynitride |
US20120196242A1 (en) | 2011-01-27 | 2012-08-02 | Applied Materials, Inc. | Substrate support with heater and rapid temperature change |
US8465811B2 (en) | 2011-01-28 | 2013-06-18 | Asm Japan K.K. | Method of depositing film by atomic layer deposition with pulse-time-modulated plasma |
JP2012164736A (ja) | 2011-02-04 | 2012-08-30 | Hitachi Kokusai Electric Inc | 基板処理装置及び半導体装置の製造方法 |
US20120263876A1 (en) | 2011-02-14 | 2012-10-18 | Asm Ip Holding B.V. | Deposition of silicon dioxide on hydrophobic surfaces |
JP5982129B2 (ja) | 2011-02-15 | 2016-08-31 | 東京エレクトロン株式会社 | 電極及びプラズマ処理装置 |
US8877300B2 (en) | 2011-02-16 | 2014-11-04 | Veeco Ald Inc. | Atomic layer deposition using radicals of gas mixture |
US9163310B2 (en) | 2011-02-18 | 2015-10-20 | Veeco Ald Inc. | Enhanced deposition of layer on substrate using radicals |
US20120213947A1 (en) | 2011-02-18 | 2012-08-23 | Synos Technology, Inc. | Depositing thin layer of material on permeable substrate |
US8563443B2 (en) | 2011-02-18 | 2013-10-22 | Asm Japan K.K. | Method of depositing dielectric film by ALD using precursor containing silicon, hydrocarbon, and halogen |
US8329599B2 (en) | 2011-02-18 | 2012-12-11 | Asm Japan K.K. | Method of depositing dielectric film by ALD using precursor containing silicon, hydrocarbon, and halogen |
CN202259160U (zh) | 2011-02-21 | 2012-05-30 | 盛陶盟(香港)有限公司 | 陶瓷玻璃合成电极及其荧光灯 |
US10011920B2 (en) | 2011-02-23 | 2018-07-03 | International Business Machines Corporation | Low-temperature selective epitaxial growth of silicon for device integration |
US8574340B2 (en) | 2011-02-27 | 2013-11-05 | Board Of Trustees Of The University Of Alabama | Methods for preparing and using metal and/or metal oxide porous materials |
JP2012195562A (ja) | 2011-02-28 | 2012-10-11 | Hitachi Kokusai Electric Inc | 異径基板用アタッチメントおよび基板処理装置ならびに基板若しくは半導体デバイスの製造方法 |
US20120219824A1 (en) | 2011-02-28 | 2012-08-30 | Uchicago Argonne Llc | Atomic layer deposition of super-conducting niobium silicide |
US9017457B2 (en) | 2011-03-01 | 2015-04-28 | Exxonmobil Upstream Research Company | Apparatus and systems having a reciprocating valve head assembly and swing adsorption processes related thereto |
US20120225191A1 (en) | 2011-03-01 | 2012-09-06 | Applied Materials, Inc. | Apparatus and Process for Atomic Layer Deposition |
WO2012118886A2 (en) | 2011-03-01 | 2012-09-07 | Applied Materials, Inc. | Vacuum chambers with shared pump |
US8466411B2 (en) | 2011-03-03 | 2013-06-18 | Asm Japan K.K. | Calibration method of UV sensor for UV curing |
CN102655086B (zh) | 2011-03-03 | 2015-07-01 | 东京毅力科创株式会社 | 半导体器件的制造方法 |
US9441296B2 (en) | 2011-03-04 | 2016-09-13 | Novellus Systems, Inc. | Hybrid ceramic showerhead |
ITMI20110401A1 (it) | 2011-03-14 | 2012-09-15 | Petroceramics S P A | Metodo per l'infiltrazione di un materiale poroso con un secondo materiale e relativo impianto |
US9064815B2 (en) | 2011-03-14 | 2015-06-23 | Applied Materials, Inc. | Methods for etch of metal and metal-oxide films |
US8501605B2 (en) | 2011-03-14 | 2013-08-06 | Applied Materials, Inc. | Methods and apparatus for conformal doping |
JP2012195513A (ja) | 2011-03-17 | 2012-10-11 | Tokyo Electron Ltd | プラズマ処理装置 |
JP5820731B2 (ja) | 2011-03-22 | 2015-11-24 | 株式会社日立国際電気 | 基板処理装置および固体原料補充方法 |
US8980418B2 (en) | 2011-03-24 | 2015-03-17 | Uchicago Argonne, Llc | Sequential infiltration synthesis for advanced lithography |
US9684234B2 (en) | 2011-03-24 | 2017-06-20 | Uchicago Argonne, Llc | Sequential infiltration synthesis for enhancing multiple-patterning lithography |
WO2012134605A1 (en) | 2011-03-25 | 2012-10-04 | Applied Materials, Inc. | Method and apparatus for thermocouple installation or replacement in a substrate support |
SG193516A1 (en) | 2011-03-28 | 2013-10-30 | Applied Materials Inc | Method and apparatus for the selective deposition of epitaxial germanium stressor alloys |
JP5203482B2 (ja) | 2011-03-28 | 2013-06-05 | 株式会社小松製作所 | 加熱装置 |
KR101303422B1 (ko) | 2011-03-28 | 2013-09-05 | 주식회사 엘지실트론 | 단결정 잉곳의 제조방법 및 이에 의해 제조된 단결정 잉곳과 웨이퍼 |
US8569158B2 (en) | 2011-03-31 | 2013-10-29 | Tokyo Electron Limited | Method for forming ultra-shallow doping regions by solid phase diffusion |
KR101200720B1 (ko) | 2011-03-31 | 2012-11-13 | 최대규 | 핫 배플판이 구비된 플라즈마 반응기 및 이를 이용한 기판 처리 방법 |
JP5922219B2 (ja) | 2011-03-31 | 2016-05-24 | アイメックImec | 単結晶スズ含有半導体材料を成長させる方法 |
US8697198B2 (en) | 2011-03-31 | 2014-04-15 | Veeco Ald Inc. | Magnetic field assisted deposition |
KR101819721B1 (ko) | 2011-04-07 | 2018-02-28 | 피코순 오와이 | 플라즈마 소오스를 갖는 원자층 퇴적 |
US8647993B2 (en) | 2011-04-11 | 2014-02-11 | Novellus Systems, Inc. | Methods for UV-assisted conformal film deposition |
US8900402B2 (en) | 2011-05-10 | 2014-12-02 | Lam Research Corporation | Semiconductor processing system having multiple decoupled plasma sources |
WO2012142230A2 (en) | 2011-04-12 | 2012-10-18 | Smith James S | Air gap control systems and methods |
US20120263887A1 (en) | 2011-04-13 | 2012-10-18 | Varian Semiconductor Equipment Associates, Inc. | Technique and apparatus for ion-assisted atomic layer deposition |
US8298951B1 (en) | 2011-04-13 | 2012-10-30 | Asm Japan K.K. | Footing reduction using etch-selective layer |
US8371567B2 (en) | 2011-04-13 | 2013-02-12 | Novellus Systems, Inc. | Pedestal covers |
US20140056679A1 (en) | 2011-04-15 | 2014-02-27 | Tazmo Co., Ltd. | Wafer exchange apparatus and wafer supporting hand |
DE102011007632B3 (de) | 2011-04-18 | 2012-02-16 | Siltronic Ag | Verfahren und Vorrichtung zum Abscheiden einer von Prozessgas stammenden Materialschicht auf einer Substratscheibe |
DE102011007682A1 (de) | 2011-04-19 | 2012-10-25 | Siltronic Ag | Suszeptor zum Abstützen einer Halbleiterscheibe und Verfahren zum Abscheiden einer Schicht auf einer Vorderseite einer Halbleiterscheibe |
TW201243030A (en) | 2011-04-20 | 2012-11-01 | Applied Materials Inc | Selective silicon nitride etch |
US20120269967A1 (en) | 2011-04-22 | 2012-10-25 | Applied Materials, Inc. | Hot Wire Atomic Layer Deposition Apparatus And Methods Of Use |
US8871617B2 (en) | 2011-04-22 | 2014-10-28 | Asm Ip Holding B.V. | Deposition and reduction of mixed metal oxide thin films |
US20120270384A1 (en) | 2011-04-22 | 2012-10-25 | Applied Materials, Inc. | Apparatus for deposition of materials on a substrate |
JP5955062B2 (ja) | 2011-04-25 | 2016-07-20 | 東京エレクトロン株式会社 | プラズマ処理装置 |
US8492170B2 (en) | 2011-04-25 | 2013-07-23 | Applied Materials, Inc. | UV assisted silylation for recovery and pore sealing of damaged low K films |
US8592005B2 (en) | 2011-04-26 | 2013-11-26 | Asm Japan K.K. | Atomic layer deposition for controlling vertical film growth |
USD655055S1 (en) | 2011-04-28 | 2012-02-28 | Carolyn Grace Toll | Pet outfit |
US8927066B2 (en) | 2011-04-29 | 2015-01-06 | Applied Materials, Inc. | Method and apparatus for gas delivery |
US9165804B2 (en) | 2011-04-29 | 2015-10-20 | Applied Materials, Inc. | Methods of cooling process chamber components |
DE102011081749B4 (de) | 2011-04-29 | 2016-04-14 | Von Ardenne Gmbh | Substratbehandlungsanlage |
JP5720406B2 (ja) | 2011-05-10 | 2015-05-20 | 東京エレクトロン株式会社 | ガス供給装置、熱処理装置、ガス供給方法及び熱処理方法 |
US8746284B2 (en) | 2011-05-11 | 2014-06-10 | Intermolecular, Inc. | Apparatus and method for multiple symmetrical divisional gas distribution |
US9218962B2 (en) | 2011-05-19 | 2015-12-22 | Globalfoundries Inc. | Low temperature epitaxy of a semiconductor alloy including silicon and germanium employing a high order silane precursor |
US8809170B2 (en) * | 2011-05-19 | 2014-08-19 | Asm America Inc. | High throughput cyclical epitaxial deposition and etch process |
JP2012244180A (ja) | 2011-05-24 | 2012-12-10 | Macronix Internatl Co Ltd | 多層接続構造及びその製造方法 |
US8771807B2 (en) | 2011-05-24 | 2014-07-08 | Air Products And Chemicals, Inc. | Organoaminosilane precursors and methods for making and using same |
JP5630379B2 (ja) | 2011-05-26 | 2014-11-26 | 東京エレクトロン株式会社 | 温度測定装置、温度測定方法、記憶媒体及び熱処理装置 |
JP5730670B2 (ja) | 2011-05-27 | 2015-06-10 | 株式会社Adeka | 酸化モリブデンを含有する薄膜の製造方法、及び酸化モリブデンを含有する薄膜の形成用原料 |
US20120304935A1 (en) | 2011-05-31 | 2012-12-06 | Oosterlaken Theodorus G M | Bubbler assembly and method for vapor flow control |
KR101085980B1 (ko) | 2011-05-31 | 2011-11-22 | 주식회사 쎄믹스 | 엘리먼트 셀레늄 증기 분위기에서의 셀레나이제이션 공정에 의한 태양 전지의 광흡수층 제조 방법 및 광흡수층 제조용 열처리 장치 |
JP2013012719A (ja) | 2011-05-31 | 2013-01-17 | Hitachi Kokusai Electric Inc | 基板処理装置および基板処理方法 |
US9136180B2 (en) | 2011-06-01 | 2015-09-15 | Asm Ip Holding B.V. | Process for depositing electrode with high effective work function |
EP3929326A3 (en) | 2011-06-03 | 2022-03-16 | Versum Materials US, LLC | Compositions and processes for depositing carbon-doped silicon-containing films |
TWI541938B (zh) | 2011-06-03 | 2016-07-11 | 諾菲勒斯系統公司 | 用於互連的含金屬及矽覆蓋層 |
US8692319B2 (en) | 2011-06-03 | 2014-04-08 | Infineon Technologies Austria Ag | Lateral trench MESFET |
US9312155B2 (en) | 2011-06-06 | 2016-04-12 | Asm Japan K.K. | High-throughput semiconductor-processing apparatus equipped with multiple dual-chamber modules |
US8927318B2 (en) | 2011-06-14 | 2015-01-06 | International Business Machines Corporation | Spalling methods to form multi-junction photovoltaic structure |
KR20120137986A (ko) | 2011-06-14 | 2012-12-24 | 삼성디스플레이 주식회사 | 정전척 |
WO2012173698A1 (en) | 2011-06-15 | 2012-12-20 | Applied Materials, Inc. | Methods and apparatus for controlling photoresist line width roughness with enhanced electron spin control |
JP5734757B2 (ja) | 2011-06-16 | 2015-06-17 | 株式会社東芝 | 半導体装置及びその製造方法 |
US20120318457A1 (en) | 2011-06-17 | 2012-12-20 | Son Nguyen | Materials and coatings for a showerhead in a processing system |
US9175392B2 (en) | 2011-06-17 | 2015-11-03 | Intermolecular, Inc. | System for multi-region processing |
US9793148B2 (en) | 2011-06-22 | 2017-10-17 | Asm Japan K.K. | Method for positioning wafers in multiple wafer transport |
US10364496B2 (en) | 2011-06-27 | 2019-07-30 | Asm Ip Holding B.V. | Dual section module having shared and unshared mass flow controllers |
WO2013003325A2 (en) | 2011-06-28 | 2013-01-03 | Federal-Mogul Ignition Company | Electrode material for a spark plug |
US8450212B2 (en) | 2011-06-28 | 2013-05-28 | International Business Machines Corporation | Method of reducing critical dimension process bias differences between narrow and wide damascene wires |
WO2013005726A1 (ja) | 2011-07-01 | 2013-01-10 | 太陽化学工業株式会社 | プライマー組成物、該組成物から成るプライマー層を含む構造体、及び該構造体の製造方法 |
JP5551831B2 (ja) | 2011-07-05 | 2014-07-16 | エピクルー株式会社 | サセプタ装置及びこれを備えた成膜装置 |
US20140234550A1 (en) | 2011-07-06 | 2014-08-21 | Wayne State University | Atomic layer deposition of transition metal thin films |
JP5377587B2 (ja) | 2011-07-06 | 2013-12-25 | 東京エレクトロン株式会社 | アンテナ、プラズマ処理装置及びプラズマ処理方法 |
US10707082B2 (en) | 2011-07-06 | 2020-07-07 | Asm International N.V. | Methods for depositing thin films comprising indium nitride by atomic layer deposition |
US8962400B2 (en) | 2011-07-07 | 2015-02-24 | Taiwan Semiconductor Manufacturing Company, Ltd. | In-situ doping of arsenic for source and drain epitaxy |
US20130011984A1 (en) | 2011-07-07 | 2013-01-10 | Taiwan Semiconductor Manufacturing Company, Ltd. | Using Hexachlorodisilane as a Silicon Precursor for Source/Drain Epitaxy |
US8647809B2 (en) | 2011-07-07 | 2014-02-11 | Brewer Science Inc. | Metal-oxide films from small molecules for lithographic applications |
JP5755958B2 (ja) | 2011-07-08 | 2015-07-29 | 株式会社フジキン | 半導体製造装置の原料ガス供給装置 |
US9223203B2 (en) | 2011-07-08 | 2015-12-29 | Asm International N.V. | Microcontact printed films as an activation layer for selective atomic layer deposition |
KR20130007806A (ko) | 2011-07-11 | 2013-01-21 | 주식회사 케이씨텍 | 원자층 증착장치의 히터 모듈 |
US20130014697A1 (en) | 2011-07-12 | 2013-01-17 | Asm Japan K.K. | Container Having Multiple Compartments Containing Liquid Material for Multiple Wafer-Processing Chambers |
CN103620751B (zh) | 2011-07-12 | 2017-08-01 | 松下知识产权经营株式会社 | 氮化物半导体装置及其制造方法 |
US9018567B2 (en) | 2011-07-13 | 2015-04-28 | Asm International N.V. | Wafer processing apparatus with heated, rotating substrate support |
US10854498B2 (en) | 2011-07-15 | 2020-12-01 | Asm Ip Holding B.V. | Wafer-supporting device and method for producing same |
JP5940342B2 (ja) | 2011-07-15 | 2016-06-29 | 東京エレクトロン株式会社 | 基板搬送装置、基板処理システムおよび基板搬送方法、ならびに記憶媒体 |
US9630127B2 (en) | 2011-07-19 | 2017-04-25 | Hayward Industries, Inc. | Filter vessel assembly and related methods of use |
US8741775B2 (en) | 2011-07-20 | 2014-06-03 | Applied Materials, Inc. | Method of patterning a low-K dielectric film |
US8617411B2 (en) | 2011-07-20 | 2013-12-31 | Lam Research Corporation | Methods and apparatus for atomic layer etching |
US20130023129A1 (en) | 2011-07-20 | 2013-01-24 | Asm America, Inc. | Pressure transmitter for a semiconductor processing environment |
JP5789149B2 (ja) | 2011-07-21 | 2015-10-07 | Jswアフティ株式会社 | 原子層成長方法及び原子層成長装置 |
US8778448B2 (en) | 2011-07-21 | 2014-07-15 | International Business Machines Corporation | Method of stabilizing hydrogenated amorphous silicon and amorphous hydrogenated silicon alloys |
KR20140050681A (ko) | 2011-07-22 | 2014-04-29 | 어플라이드 머티어리얼스, 인코포레이티드 | Ald/cvd 프로세스들을 위한 반응물 전달 시스템 |
US8716072B2 (en) | 2011-07-25 | 2014-05-06 | International Business Machines Corporation | Hybrid CMOS technology with nanowire devices and double gated planar devices |
US8551892B2 (en) | 2011-07-27 | 2013-10-08 | Asm Japan K.K. | Method for reducing dielectric constant of film using direct plasma of hydrogen |
US20130025538A1 (en) | 2011-07-27 | 2013-01-31 | Applied Materials, Inc. | Methods and apparatus for deposition processes |
CN104011866B (zh) | 2011-07-27 | 2017-06-09 | 伊利诺伊大学评议会 | 用于生物分子表征的纳米孔传感器 |
US20130025786A1 (en) | 2011-07-28 | 2013-01-31 | Vladislav Davidkovich | Systems for and methods of controlling time-multiplexed deep reactive-ion etching processes |
KR101271248B1 (ko) | 2011-08-02 | 2013-06-07 | 주식회사 유진테크 | 에피택셜 공정을 위한 반도체 제조설비 |
KR101252742B1 (ko) | 2011-08-02 | 2013-04-09 | 주식회사 유진테크 | 에피택셜 공정을 위한 반도체 제조설비 |
US20130032085A1 (en) | 2011-08-04 | 2013-02-07 | Applied Materials, Inc. | Plasma assisted hvpe chamber design |
US10242890B2 (en) | 2011-08-08 | 2019-03-26 | Applied Materials, Inc. | Substrate support with heater |
CN102931083B (zh) | 2011-08-10 | 2015-07-29 | 中芯国际集成电路制造(北京)有限公司 | 半导体器件及其制造方法 |
US9184100B2 (en) | 2011-08-10 | 2015-11-10 | United Microelectronics Corp. | Semiconductor device having strained fin structure and method of making the same |
US20130040481A1 (en) | 2011-08-12 | 2013-02-14 | Genesis Technology Usa, Inc. | U-Channel Coaxial F-Connector |
KR20140063684A (ko) | 2011-08-19 | 2014-05-27 | 도쿄엘렉트론가부시키가이샤 | Ge - Sb - Te막의 성막 방법, Ge - Te막의 성막 방법, Sb - Te막의 성막 방법 및 프로그램 |
US8614047B2 (en) | 2011-08-26 | 2013-12-24 | International Business Machines Corporation | Photodecomposable bases and photoresist compositions |
TWI492298B (zh) | 2011-08-26 | 2015-07-11 | Applied Materials Inc | 雙重圖案化蝕刻製程 |
US20130048606A1 (en) | 2011-08-31 | 2013-02-28 | Zhigang Mao | Methods for in-situ chamber dry clean in photomask plasma etching processing chamber |
KR101326518B1 (ko) | 2011-09-02 | 2013-11-07 | 엘지이노텍 주식회사 | 조명 장치 |
JP5712874B2 (ja) | 2011-09-05 | 2015-05-07 | 東京エレクトロン株式会社 | 成膜装置、成膜方法及び記憶媒体 |
JP2013058559A (ja) | 2011-09-07 | 2013-03-28 | Tokyo Electron Ltd | 半導体装置の製造方法及び基板処理システム |
US20130217240A1 (en) | 2011-09-09 | 2013-08-22 | Applied Materials, Inc. | Flowable silicon-carbon-nitrogen layers for semiconductor processing |
US8476743B2 (en) | 2011-09-09 | 2013-07-02 | International Business Machines Corporation | C-rich carbon boron nitride dielectric films for use in electronic devices |
US20130217241A1 (en) | 2011-09-09 | 2013-08-22 | Applied Materials, Inc. | Treatments for decreasing etch rates after flowable deposition of silicon-carbon-and-nitrogen-containing layers |
US20130217243A1 (en) | 2011-09-09 | 2013-08-22 | Applied Materials, Inc. | Doping of dielectric layers |
US20130217239A1 (en) | 2011-09-09 | 2013-08-22 | Applied Materials, Inc. | Flowable silicon-and-carbon-containing layers for semiconductor processing |
US10269615B2 (en) | 2011-09-09 | 2019-04-23 | Lam Research Ag | Apparatus for treating surfaces of wafer-shaped articles |
US20130064973A1 (en) | 2011-09-09 | 2013-03-14 | Taiwan Semiconductor Manufacturing Company, Ltd. | Chamber Conditioning Method |
JP2013062361A (ja) | 2011-09-13 | 2013-04-04 | Tokyo Electron Ltd | 熱処理装置、温度制御システム、熱処理方法、温度制御方法及びその熱処理方法又はその温度制御方法を実行させるためのプログラムを記録した記録媒体 |
US10023954B2 (en) | 2011-09-15 | 2018-07-17 | Applied Materials, Inc. | Slit valve apparatus, systems, and methods |
US9177872B2 (en) | 2011-09-16 | 2015-11-03 | Micron Technology, Inc. | Memory cells, semiconductor devices, systems including such cells, and methods of fabrication |
JP1438319S (zh) | 2011-09-20 | 2015-04-06 | ||
JP1438745S (zh) | 2011-09-20 | 2015-04-06 | ||
US20130068970A1 (en) | 2011-09-21 | 2013-03-21 | Asm Japan K.K. | UV Irradiation Apparatus Having UV Lamp-Shared Multiple Process Stations |
CN107342216B (zh) | 2011-09-23 | 2022-05-31 | 诺发系统公司 | 等离子体活化保形电介质膜沉积 |
US9312335B2 (en) | 2011-09-23 | 2016-04-12 | Alpha And Omega Semiconductor Incorporated | Lateral PNP bipolar transistor with narrow trench emitter |
JP5549655B2 (ja) | 2011-09-26 | 2014-07-16 | 株式会社安川電機 | ハンドおよびロボット |
KR20140085461A (ko) | 2011-09-27 | 2014-07-07 | 레르 리키드 쏘시에떼 아노님 뿌르 레?드 에렉스뿔라따시옹 데 프로세데 조르즈 클로드 | 니켈 비스 디아자부타디엔 전구체, 그들의 합성, 및 니켈 함유 필름 침착을 위한 그들의 용도 |
US8993072B2 (en) | 2011-09-27 | 2015-03-31 | Air Products And Chemicals, Inc. | Halogenated organoaminosilane precursors and methods for depositing films comprising same |
WO2013047531A1 (ja) | 2011-09-27 | 2013-04-04 | 東京エレクトロン株式会社 | プラズマエッチング方法及び半導体装置の製造方法 |
JP5784440B2 (ja) | 2011-09-28 | 2015-09-24 | トランスフォーム・ジャパン株式会社 | 半導体装置の製造方法及び半導体装置 |
US20130082274A1 (en) | 2011-09-29 | 2013-04-04 | Bridgelux, Inc. | Light emitting devices having dislocation density maintaining buffer layers |
US9644796B2 (en) | 2011-09-29 | 2017-05-09 | Applied Materials, Inc. | Methods for in-situ calibration of a flow controller |
US8569184B2 (en) | 2011-09-30 | 2013-10-29 | Asm Japan K.K. | Method for forming single-phase multi-element film by PEALD |
USD709536S1 (en) | 2011-09-30 | 2014-07-22 | Tokyo Electron Limited | Focusing ring |
JP6042656B2 (ja) | 2011-09-30 | 2016-12-14 | 株式会社日立国際電気 | 半導体装置の製造方法、基板処理方法、基板処理装置およびプログラム |
USD709537S1 (en) | 2011-09-30 | 2014-07-22 | Tokyo Electron Limited | Focusing ring |
CN103889888B (zh) | 2011-10-03 | 2017-04-26 | Asml荷兰有限公司 | 提供用于可自组装聚合物的图案化取向模板的方法 |
US8551891B2 (en) | 2011-10-04 | 2013-10-08 | Applied Materials, Inc. | Remote plasma burn-in |
US8849466B2 (en) | 2011-10-04 | 2014-09-30 | Mks Instruments, Inc. | Method of and apparatus for multiple channel flow ratio controller system |
TWI661746B (zh) | 2011-10-05 | 2019-06-01 | 應用材料股份有限公司 | 電漿處理設備及其蓋組件(一) |
TWI458843B (zh) | 2011-10-06 | 2014-11-01 | Ind Tech Res Inst | 蒸鍍裝置與有機薄膜的形成方法 |
US9653267B2 (en) | 2011-10-06 | 2017-05-16 | Applied Materials, Inc. | Temperature controlled chamber liner |
US8808563B2 (en) | 2011-10-07 | 2014-08-19 | Applied Materials, Inc. | Selective etch of silicon by way of metastable hydrogen termination |
US9767993B2 (en) | 2011-10-07 | 2017-09-19 | Tokyo Electron Limited | Plasma processing apparatus |
SG11201401430RA (en) | 2011-10-10 | 2014-09-26 | Brewer Science Inc | Spin-on carbon compositions for lithographic processing |
JP6202798B2 (ja) | 2011-10-12 | 2017-09-27 | エーエスエム インターナショナル エヌ.ヴェー.Asm International N.V. | 酸化アンチモン膜の原子層堆積 |
US9281231B2 (en) | 2011-10-12 | 2016-03-08 | Ferrotec (Usa) Corporation | Non-contact magnetic drive assembly with mechanical stop elements |
US8637930B2 (en) | 2011-10-13 | 2014-01-28 | International Business Machines Company | FinFET parasitic capacitance reduction using air gap |
TWI541928B (zh) | 2011-10-14 | 2016-07-11 | 晶元光電股份有限公司 | 晶圓載具 |
US8759234B2 (en) | 2011-10-17 | 2014-06-24 | Taiwan Semiconductor Manufacturing Company, Ltd. | Deposited material and method of formation |
US20130092085A1 (en) | 2011-10-17 | 2013-04-18 | Synos Technology, Inc. | Linear atomic layer deposition apparatus |
US9109754B2 (en) | 2011-10-19 | 2015-08-18 | Applied Materials, Inc. | Apparatus and method for providing uniform flow of gas |
USD695240S1 (en) | 2011-10-20 | 2013-12-10 | Tokyo Electron Limited | Arm for wafer transportation for manufacturing semiconductor |
US20130099318A1 (en) | 2011-10-25 | 2013-04-25 | International Business Machines Corporation | Thin semiconductor-on-insulator mosfet with co-integrated silicon, silicon germanium and silicon doped with carbon channels |
US9096931B2 (en) | 2011-10-27 | 2015-08-04 | Asm America, Inc | Deposition valve assembly and method of heating the same |
US9341296B2 (en) | 2011-10-27 | 2016-05-17 | Asm America, Inc. | Heater jacket for a fluid line |
US9017481B1 (en) | 2011-10-28 | 2015-04-28 | Asm America, Inc. | Process feed management for semiconductor substrate processing |
US11085112B2 (en) | 2011-10-28 | 2021-08-10 | Asm Ip Holding B.V. | Susceptor with ring to limit backside deposition |
US9574268B1 (en) | 2011-10-28 | 2017-02-21 | Asm America, Inc. | Pulsed valve manifold for atomic layer deposition |
WO2013063260A1 (en) | 2011-10-28 | 2013-05-02 | Applied Materials, Inc. | High temperature tungsten metallization process |
US20130107415A1 (en) | 2011-10-28 | 2013-05-02 | Applied Materials, Inc. | Electrostatic chuck |
US8927428B2 (en) | 2011-11-04 | 2015-01-06 | E I Du Pont De Nemours And Company | Process of forming an aluminum p-doped surface region of an n-doped semiconductor substrate |
TWI606136B (zh) | 2011-11-04 | 2017-11-21 | Asm國際股份有限公司 | 沉積摻雜氧化矽的方法以及用於沉積摻雜氧化矽至基板上的原子層沉積製程 |
US20130113085A1 (en) | 2011-11-04 | 2013-05-09 | Applied Materials, Inc. | Atomic Layer Deposition Of Films Using Precursors Containing Hafnium Or Zirconium |
US8927059B2 (en) | 2011-11-08 | 2015-01-06 | Applied Materials, Inc. | Deposition of metal films using alane-based precursors |
CN102352492A (zh) | 2011-11-10 | 2012-02-15 | 中微半导体设备(上海)有限公司 | 一种带冷却系统的气体注入装置 |
US9048070B2 (en) | 2011-11-11 | 2015-06-02 | Tokyo Electron Limited | Dielectric window for plasma treatment device, and plasma treatment device |
US20130122712A1 (en) | 2011-11-14 | 2013-05-16 | Jong Mun Kim | Method of etching high aspect ratio features in a dielectric layer |
US20130119018A1 (en) | 2011-11-15 | 2013-05-16 | Keren Jacobs Kanarik | Hybrid pulsing plasma processing systems |
WO2013075061A1 (en) | 2011-11-17 | 2013-05-23 | United Protective Technologies | Carbon based coatings and methods of producing the same |
WO2013078211A1 (en) | 2011-11-21 | 2013-05-30 | Brewer Science Inc. | Assist layers for euv lithography |
WO2013077321A1 (ja) | 2011-11-21 | 2013-05-30 | 株式会社日立国際電気 | 半導体装置の製造装置、半導体装置の製造方法及び記録媒体 |
US8609519B2 (en) | 2011-11-22 | 2013-12-17 | Intermolecular, Inc. | Combinatorial approach for screening of ALD film stacks |
US9005539B2 (en) | 2011-11-23 | 2015-04-14 | Asm Ip Holding B.V. | Chamber sealing member |
US9167625B2 (en) | 2011-11-23 | 2015-10-20 | Asm Ip Holding B.V. | Radiation shielding for a substrate holder |
US10276410B2 (en) | 2011-11-25 | 2019-04-30 | Nhk Spring Co., Ltd. | Substrate support device |
JP5694129B2 (ja) | 2011-11-29 | 2015-04-01 | 株式会社東芝 | 半導体装置及びその製造方法 |
JP5921168B2 (ja) | 2011-11-29 | 2016-05-24 | 株式会社日立国際電気 | 基板処理装置 |
US8633115B2 (en) | 2011-11-30 | 2014-01-21 | Applied Materials, Inc. | Methods for atomic layer etching |
US20130143415A1 (en) | 2011-12-01 | 2013-06-06 | Applied Materials, Inc. | Multi-Component Film Deposition |
CN104081545A (zh) | 2011-12-01 | 2014-10-01 | 夸克星有限责任公司 | 固态照明装置及其制造方法 |
JP6034156B2 (ja) | 2011-12-05 | 2016-11-30 | 東京エレクトロン株式会社 | プラズマ処理装置及びプラズマ処理方法 |
CN103534202B (zh) | 2011-12-07 | 2017-02-15 | 松下知识产权经营株式会社 | 光催化剂、氢生成装置及能量系统 |
US8663977B2 (en) | 2011-12-07 | 2014-03-04 | Intermolecular, Inc. | Vertically retractable flow cell system |
JP6049395B2 (ja) | 2011-12-09 | 2016-12-21 | 株式会社日立国際電気 | 半導体装置の製造方法、基板処理方法、基板処理装置およびプログラム |
AU340165S (en) | 2011-12-09 | 2012-01-06 | Hunter Pacific Int Pty Ltd | Electrical connector |
US9112003B2 (en) | 2011-12-09 | 2015-08-18 | Asm International N.V. | Selective formation of metallic films on metallic surfaces |
AU340167S (en) | 2011-12-09 | 2012-01-06 | Hunter Pacific Int Pty Ltd | Electrical connector |
US9552966B2 (en) | 2011-12-12 | 2017-01-24 | Tokyo Electron Limited | Antenna for plasma generation, plasma processing apparatus and plasma processing method |
US20130147050A1 (en) | 2011-12-12 | 2013-06-13 | Advanced Cooling Technologies, Inc. | Semiconductor having integrally-formed enhanced thermal management |
KR101347962B1 (ko) | 2011-12-13 | 2014-01-08 | 주식회사 케이씨텍 | 박막의 특성 향상을 위한 원자층 증착방법 |
KR20130067600A (ko) | 2011-12-14 | 2013-06-25 | 주식회사 케이씨텍 | 다이렉트 플라즈마 형성 원자층 증착장치 |
US9691839B2 (en) | 2011-12-14 | 2017-06-27 | Intel Corporation | Metal-insulator-metal (MIM) capacitor with insulator stack having a plurality of metal oxide layers |
WO2013090781A1 (en) | 2011-12-14 | 2013-06-20 | Cooper Technologies Company | Lockout tagout plug sleeve |
EP2791386B1 (en) | 2011-12-16 | 2018-10-03 | Element Six Technologies Limited | Large area optical quality synthetic polycrystalline diamond window |
US20130157409A1 (en) | 2011-12-16 | 2013-06-20 | Kaushik Vaidya | Selective atomic layer deposition of passivation layers for silicon-based photovoltaic devices |
WO2013095375A1 (en) | 2011-12-20 | 2013-06-27 | Intel Corporation | Iii-v layers for n-type and p-type mos source-drain contacts |
USD691974S1 (en) | 2011-12-22 | 2013-10-22 | Tokyo Electron Limited | Holding pad for transferring a wafer |
CN106847875B (zh) | 2011-12-23 | 2021-04-20 | 索尼公司 | 非平面栅极全包围器件及其制造方法 |
US9388492B2 (en) | 2011-12-27 | 2016-07-12 | Asm America, Inc. | Vapor flow control apparatus for atomic layer deposition |
US20130161629A1 (en) | 2011-12-27 | 2013-06-27 | Applied Materials, Inc. | Zero shrinkage smooth interface oxy-nitride and oxy-amorphous-silicon stacks for 3d memory vertical gate application |
JP5679581B2 (ja) | 2011-12-27 | 2015-03-04 | 東京エレクトロン株式会社 | 成膜方法 |
KR101427726B1 (ko) | 2011-12-27 | 2014-08-07 | 가부시키가이샤 히다치 고쿠사이 덴키 | 기판 처리 장치 및 반도체 장치의 제조 방법 |
US8883028B2 (en) | 2011-12-28 | 2014-11-11 | Lam Research Corporation | Mixed mode pulsing etching in plasma processing systems |
KR20130076979A (ko) | 2011-12-29 | 2013-07-09 | 삼성전자주식회사 | 반도체 소자 및 이의 제조방법 |
CN102505114A (zh) | 2012-01-03 | 2012-06-20 | 西安电子科技大学 | 基于Ni膜辅助退火的SiC衬底上石墨烯制备方法 |
CN102539019B (zh) | 2012-01-05 | 2013-09-25 | 北京东方计量测试研究所 | 空间真空环境下的温度测量与校准平台 |
TW201330086A (zh) | 2012-01-05 | 2013-07-16 | Duan-Ren Yu | 蝕刻裝置 |
US8659066B2 (en) | 2012-01-06 | 2014-02-25 | International Business Machines Corporation | Integrated circuit with a thin body field effect transistor and capacitor |
KR20140110080A (ko) | 2012-01-09 | 2014-09-16 | 어플라이드 머티어리얼스, 인코포레이티드 | 열화를 방지하기 위해 uv 챔버 광학 컴포넌트들을 시즈닝하기 위한 방법 |
USD676943S1 (en) | 2012-01-11 | 2013-02-26 | Bill Kluss | Pipe end cap |
US20130183814A1 (en) | 2012-01-13 | 2013-07-18 | Applied Materials, Inc. | Method of depositing a silicon germanium tin layer on a substrate |
WO2013109545A1 (en) | 2012-01-17 | 2013-07-25 | Synos Technology, Inc. | Deposition of graphene or conjugated carbons using radical reactor |
US10838123B2 (en) | 2012-01-19 | 2020-11-17 | Supriya Jaiswal | Materials, components, and methods for use with extreme ultraviolet radiation in lithography and other applications |
US8592328B2 (en) | 2012-01-20 | 2013-11-26 | Novellus Systems, Inc. | Method for depositing a chlorine-free conformal sin film |
USD665055S1 (en) | 2012-01-24 | 2012-08-07 | Asm Ip Holding B.V. | Shower plate |
JP2013151720A (ja) | 2012-01-25 | 2013-08-08 | Ulvac Japan Ltd | 真空成膜装置 |
US20130189635A1 (en) | 2012-01-25 | 2013-07-25 | First Solar, Inc. | Method and apparatus providing separate modules for processing a substrate |
US9190320B2 (en) | 2012-01-26 | 2015-11-17 | Applied Materials, Inc. | Devices including metal-silicon contacts using indium arsenide films and apparatus and methods |
JP5601331B2 (ja) | 2012-01-26 | 2014-10-08 | 株式会社安川電機 | ロボットハンドおよびロボット |
KR20130086806A (ko) | 2012-01-26 | 2013-08-05 | 삼성전자주식회사 | 박막 증착 장치 |
US9466524B2 (en) | 2012-01-31 | 2016-10-11 | Applied Materials, Inc. | Method of depositing metals using high frequency plasma |
US9177826B2 (en) | 2012-02-02 | 2015-11-03 | Globalfoundries Inc. | Methods of forming metal nitride materials |
US8784676B2 (en) | 2012-02-03 | 2014-07-22 | Lam Research Corporation | Waferless auto conditioning |
US8721833B2 (en) | 2012-02-05 | 2014-05-13 | Tokyo Electron Limited | Variable capacitance chamber component incorporating ferroelectric materials and methods of manufacturing and using thereof |
US9238865B2 (en) | 2012-02-06 | 2016-01-19 | Asm Ip Holding B.V. | Multiple vapor sources for vapor deposition |
USD698904S1 (en) | 2012-02-08 | 2014-02-04 | Asm Ip Holding B.V. | Vacuum flange ring |
US8728955B2 (en) | 2012-02-14 | 2014-05-20 | Novellus Systems, Inc. | Method of plasma activated deposition of a conformal film on a substrate surface |
KR101928356B1 (ko) | 2012-02-16 | 2018-12-12 | 엘지이노텍 주식회사 | 반도체 제조 장치 |
US8686386B2 (en) | 2012-02-17 | 2014-04-01 | Sandisk 3D Llc | Nonvolatile memory device using a varistor as a current limiter element |
JP5912637B2 (ja) | 2012-02-17 | 2016-04-27 | 東京エレクトロン株式会社 | 半導体装置の製造方法 |
FI123320B (en) | 2012-02-17 | 2013-02-28 | Beneq Oy | Nozzle and nozzle head |
JP5771339B2 (ja) | 2012-02-21 | 2015-08-26 | アプライド マテリアルズ インコーポレイテッドApplied Materials,Incorporated | 原子層堆積リソグラフィ |
US20130224964A1 (en) | 2012-02-28 | 2013-08-29 | Asm Ip Holding B.V. | Method for Forming Dielectric Film Containing Si-C bonds by Atomic Layer Deposition Using Precursor Containing Si-C-Si bond |
US9291063B2 (en) | 2012-02-29 | 2016-03-22 | Siemens Energy, Inc. | Mid-section of a can-annular gas turbine engine with an improved rotation of air flow from the compressor to the turbine |
CN103295867B (zh) | 2012-02-29 | 2016-12-28 | 细美事有限公司 | 等离子体边界限制器单元和用于处理基板的设备 |
US9162209B2 (en) | 2012-03-01 | 2015-10-20 | Novellus Systems, Inc. | Sequential cascading of reaction volumes as a chemical reuse strategy |
US9202727B2 (en) | 2012-03-02 | 2015-12-01 | ASM IP Holding | Susceptor heater shim |
US8846536B2 (en) | 2012-03-05 | 2014-09-30 | Novellus Systems, Inc. | Flowable oxide film with tunable wet etch rate |
JP6159536B2 (ja) | 2012-03-05 | 2017-07-05 | 株式会社日立国際電気 | 基板処理装置、基板処理装置の保守方法及び移載方法並びにプログラム |
US8785285B2 (en) | 2012-03-08 | 2014-07-22 | Taiwan Semiconductor Manufacturing Company, Ltd. | Semiconductor devices and methods of manufacture thereof |
EP2823083B1 (en) | 2012-03-09 | 2023-10-04 | Versum Materials US, LLC | Methods for making silicon containing films on thin film transistor devices |
KR102140719B1 (ko) | 2012-03-09 | 2020-08-03 | 에어 프로덕츠 앤드 케미칼스, 인코오포레이티드 | 디스플레이 디바이스를 위한 배리어 물질 |
US8912101B2 (en) | 2012-03-15 | 2014-12-16 | Asm Ip Holding B.V. | Method for forming Si-containing film using two precursors by ALD |
WO2013137115A1 (ja) | 2012-03-15 | 2013-09-19 | 東京エレクトロン株式会社 | 成膜方法及び成膜装置 |
US8902428B2 (en) | 2012-03-15 | 2014-12-02 | Applied Materials, Inc. | Process and apparatus for measuring the crystal fraction of crystalline silicon casted mono wafers |
JP5547763B2 (ja) | 2012-03-16 | 2014-07-16 | 三井造船株式会社 | プラズマ生成方法、この方法を用いた薄膜形成方法及びプラズマ生成装置 |
US9057388B2 (en) | 2012-03-21 | 2015-06-16 | International Business Machines Corporation | Vacuum trap |
USD715410S1 (en) | 2012-03-21 | 2014-10-14 | Blucher Metal A/S | Roof drain |
JP2015512471A (ja) | 2012-03-23 | 2015-04-27 | ピコサン オーワイPicosun Oy | 原子層堆積方法および装置 |
US9682398B2 (en) | 2012-03-30 | 2017-06-20 | Applied Materials, Inc. | Substrate processing system having susceptorless substrate support with enhanced substrate heating control |
US9082684B2 (en) | 2012-04-02 | 2015-07-14 | Applied Materials, Inc. | Method of epitaxial doped germanium tin alloy formation |
US8946830B2 (en) | 2012-04-04 | 2015-02-03 | Asm Ip Holdings B.V. | Metal oxide protective layer for a semiconductor device |
US9982340B2 (en) | 2012-04-04 | 2018-05-29 | Taiwan Semiconductor Manufacturing Co. Ltd. | Shower head apparatus and method for controlling plasma or gas distribution |
GB201206096D0 (en) | 2012-04-05 | 2012-05-16 | Dyson Technology Ltd | Atomic layer deposition |
US9460912B2 (en) | 2012-04-12 | 2016-10-04 | Air Products And Chemicals, Inc. | High temperature atomic layer deposition of silicon oxide thin films |
US8853070B2 (en) | 2012-04-13 | 2014-10-07 | Oti Lumionics Inc. | Functionalization of a substrate |
US9698386B2 (en) | 2012-04-13 | 2017-07-04 | Oti Lumionics Inc. | Functionalization of a substrate |
US9484233B2 (en) | 2012-04-13 | 2016-11-01 | Novellus Systems, Inc. | Carousel reactor for multi-station, sequential processing systems |
US20130269612A1 (en) | 2012-04-16 | 2013-10-17 | Hermes-Epitek Corporation | Gas Treatment Apparatus with Surrounding Spray Curtains |
WO2013158527A1 (en) | 2012-04-16 | 2013-10-24 | Brewer Science Inc. | Silicon hardmask layer for directed self-assembly |
US8535767B1 (en) | 2012-04-18 | 2013-09-17 | Asm Ip Holding B.V. | Method for repairing damage of dielectric film by hydrocarbon restoration and hydrocarbon depletion using UV irradiation |
KR102104688B1 (ko) | 2012-04-19 | 2020-05-29 | 인테벡, 인코포레이티드 | 태양 전지 제조를 위한 이중 마스크 장치 |
US10679883B2 (en) | 2012-04-19 | 2020-06-09 | Intevac, Inc. | Wafer plate and mask arrangement for substrate fabrication |
US20130280891A1 (en) | 2012-04-20 | 2013-10-24 | Yihwan Kim | Method and apparatus for germanium tin alloy formation by thermal cvd |
US8937800B2 (en) | 2012-04-24 | 2015-01-20 | Applied Materials, Inc. | Electrostatic chuck with advanced RF and temperature uniformity |
US8741723B2 (en) | 2012-04-25 | 2014-06-03 | Globalfoundries Inc. | Methods of forming self-aligned contacts for a semiconductor device |
TWI554636B (zh) | 2012-04-25 | 2016-10-21 | 應用材料股份有限公司 | 由金屬脒鹽前驅物製造介電膜的方法 |
US8647439B2 (en) | 2012-04-26 | 2014-02-11 | Applied Materials, Inc. | Method of epitaxial germanium tin alloy surface preparation |
US10062600B2 (en) | 2012-04-26 | 2018-08-28 | Intevac, Inc. | System and method for bi-facial processing of substrates |
MY170824A (en) | 2012-04-26 | 2019-09-04 | Intevac Inc | System architecture for vacuum processing |
US20130288485A1 (en) | 2012-04-30 | 2013-10-31 | Applied Materials, Inc. | Densification for flowable films |
TWI622664B (zh) | 2012-05-02 | 2018-05-01 | Asm智慧財產控股公司 | 相穩定薄膜,包括該薄膜之結構及裝置,及其形成方法 |
US8728832B2 (en) | 2012-05-07 | 2014-05-20 | Asm Ip Holdings B.V. | Semiconductor device dielectric interface layer |
JP2013235912A (ja) | 2012-05-08 | 2013-11-21 | Tokyo Electron Ltd | 被処理基体をエッチングする方法、及びプラズマエッチング装置 |
TWI522490B (zh) | 2012-05-10 | 2016-02-21 | 應用材料股份有限公司 | 利用微波電漿化學氣相沈積在基板上沈積膜的方法 |
US20130302520A1 (en) | 2012-05-11 | 2013-11-14 | Kai-An Wang | Co-evaporation system comprising vapor pre-mixer |
US8853826B2 (en) | 2012-05-14 | 2014-10-07 | Taiwan Semiconductor Manufacturing Company, Ltd. | Methods and apparatus for bipolar junction transistors and resistors |
TWI636571B (zh) | 2012-05-18 | 2018-09-21 | Novellus Systems, Inc. | 透過電漿活化原子層沉積及保形膜沉積之保形摻雜 |
US20130312663A1 (en) | 2012-05-22 | 2013-11-28 | Applied Microstructures, Inc. | Vapor Delivery Apparatus |
US8846543B2 (en) | 2012-05-24 | 2014-09-30 | Jinhong Tong | Methods of atomic layer deposition of hafnium oxide / erbium oxide bi-layer as advanced gate dielectrics |
JP6014661B2 (ja) | 2012-05-25 | 2016-10-25 | 東京エレクトロン株式会社 | プラズマ処理装置、及びプラズマ処理方法 |
TW201410688A (zh) | 2012-05-25 | 2014-03-16 | Air Liquide | 用於蒸氣沈積之含鋯前驅物 |
US8785215B2 (en) | 2012-05-31 | 2014-07-22 | Asm Ip Holding B.V. | Method for repairing damage of dielectric film by cyclic processes |
US20130320429A1 (en) | 2012-05-31 | 2013-12-05 | Asm Ip Holding B.V. | Processes and structures for dopant profile control in epitaxial trench fill |
US9337018B2 (en) | 2012-06-01 | 2016-05-10 | Air Products And Chemicals, Inc. | Methods for depositing films with organoaminodisilane precursors |
US8900886B2 (en) | 2012-06-01 | 2014-12-02 | Taiwan Semiconductor Manufacturing Co., Ltd. | System and method of monitoring and controlling atomic layer deposition of tungsten |
US9978585B2 (en) | 2012-06-01 | 2018-05-22 | Versum Materials Us, Llc | Organoaminodisilane precursors and methods for depositing films comprising same |
JP5920242B2 (ja) | 2012-06-02 | 2016-05-18 | 東京エレクトロン株式会社 | 成膜方法及び成膜装置 |
DE112013002823T5 (de) | 2012-06-07 | 2015-03-19 | Soitec | Gaseinspritzkomponenten für Abscheidungssysteme, Abscheidungssysteme mit derartigen Komponenten und dazugehörige Verfahren |
TWI565825B (zh) | 2012-06-07 | 2017-01-11 | 索泰克公司 | 沉積系統之氣體注入組件及相關使用方法 |
US20130330911A1 (en) | 2012-06-08 | 2013-12-12 | Yi-Chiau Huang | Method of semiconductor film stabilization |
US8722546B2 (en) | 2012-06-11 | 2014-05-13 | Asm Ip Holding B.V. | Method for forming silicon-containing dielectric film by cyclic deposition with side wall coverage control |
USD723330S1 (en) | 2012-06-11 | 2015-03-03 | Barry Dean York | Debris mask and basin |
US9984866B2 (en) | 2012-06-12 | 2018-05-29 | Component Re-Engineering Company, Inc. | Multiple zone heater |
US10325773B2 (en) | 2012-06-12 | 2019-06-18 | Novellus Systems, Inc. | Conformal deposition of silicon carbide films |
US8728938B2 (en) | 2012-06-13 | 2014-05-20 | Ostendo Technologies, Inc. | Method for substrate pretreatment to achieve high-quality III-nitride epitaxy |
WO2013186426A1 (en) | 2012-06-15 | 2013-12-19 | Picosun Oy | Coating a substrate web by atomic layer deposition |
US20130337653A1 (en) | 2012-06-15 | 2013-12-19 | Asm Ip Holding B.V. | Semiconductor processing apparatus with compact free radical source |
DE102012210332A1 (de) | 2012-06-19 | 2013-12-19 | Osram Opto Semiconductors Gmbh | Ald-beschichtungsanlage |
US20130337172A1 (en) | 2012-06-19 | 2013-12-19 | Synos Technology, Inc. | Reactor in deposition device with multi-staged purging structure |
US10103329B2 (en) | 2012-06-22 | 2018-10-16 | Nec Corporation | Switching element and method for manufacturing switching element |
US8962078B2 (en) | 2012-06-22 | 2015-02-24 | Tokyo Electron Limited | Method for depositing dielectric films |
CN103515222A (zh) | 2012-06-25 | 2014-01-15 | 中芯国际集成电路制造(上海)有限公司 | 顶层金属层沟槽的刻蚀方法 |
JP2014007289A (ja) | 2012-06-25 | 2014-01-16 | Tokyo Electron Ltd | ガス供給装置及び成膜装置 |
US8933375B2 (en) | 2012-06-27 | 2015-01-13 | Asm Ip Holding B.V. | Susceptor heater and method of heating a substrate |
US10233541B2 (en) | 2012-06-29 | 2019-03-19 | Applied Materials, Inc. | Deposition of films containing alkaline earth metals |
US10535735B2 (en) | 2012-06-29 | 2020-01-14 | Intel Corporation | Contact resistance reduced P-MOS transistors employing Ge-rich contact layer |
TWD157605S (zh) | 2012-07-04 | 2013-12-01 | 中磊電子股份有限公司 | 做為微型基地台的多模組化組合之通訊裝置 |
US9145612B2 (en) | 2012-07-06 | 2015-09-29 | Applied Materials, Inc. | Deposition of N-metal films comprising aluminum alloys |
US9023737B2 (en) | 2012-07-11 | 2015-05-05 | Asm Ip Holding B.V. | Method for forming conformal, homogeneous dielectric film by cyclic deposition and heat treatment |
US9630284B2 (en) | 2012-07-12 | 2017-04-25 | Lincoln Global, Inc. | Configurable welding table and force indicating clamp |
WO2014008557A1 (en) | 2012-07-13 | 2014-01-16 | Gallium Enterprises Pty Ltd | Apparatus and method for film formation |
US8784950B2 (en) | 2012-07-16 | 2014-07-22 | Asm Ip Holding B.V. | Method for forming aluminum oxide film using Al compound containing alkyl group and alkoxy or alkylamine group |
US9243325B2 (en) | 2012-07-18 | 2016-01-26 | Rohm And Haas Electronic Materials Llc | Vapor delivery device, methods of manufacture and methods of use thereof |
US9928987B2 (en) | 2012-07-20 | 2018-03-27 | Applied Materials, Inc. | Inductively coupled plasma source with symmetrical RF feed |
US10170279B2 (en) | 2012-07-20 | 2019-01-01 | Applied Materials, Inc. | Multiple coil inductively coupled plasma source with offset frequencies and double-walled shielding |
JP2015528011A (ja) | 2012-07-20 | 2015-09-24 | レール・リキード−ソシエテ・アノニム・プール・レテュード・エ・レクスプロワタシオン・デ・プロセデ・ジョルジュ・クロード | Ald/cvdシリコン含有膜用のオルガノシラン前駆体 |
US20140023794A1 (en) | 2012-07-23 | 2014-01-23 | Maitreyee Mahajani | Method And Apparatus For Low Temperature ALD Deposition |
JP5947138B2 (ja) | 2012-07-25 | 2016-07-06 | 東京エレクトロン株式会社 | 成膜装置 |
US9558931B2 (en) | 2012-07-27 | 2017-01-31 | Asm Ip Holding B.V. | System and method for gas-phase sulfur passivation of a semiconductor surface |
US9911676B2 (en) | 2012-07-27 | 2018-03-06 | Asm Ip Holding B.V. | System and method for gas-phase passivation of a semiconductor surface |
US10103018B2 (en) | 2012-07-31 | 2018-10-16 | Semes Co., Ltd. | Apparatus for treating substrate |
US9117866B2 (en) | 2012-07-31 | 2015-08-25 | Asm Ip Holding B.V. | Apparatus and method for calculating a wafer position in a processing chamber under process conditions |
US20140034632A1 (en) | 2012-08-01 | 2014-02-06 | Heng Pan | Apparatus and method for selective oxidation at lower temperature using remote plasma source |
US8911826B2 (en) | 2012-08-02 | 2014-12-16 | Asm Ip Holding B.V. | Method of parallel shift operation of multiple reactors |
TWM446412U (zh) | 2012-08-06 | 2013-02-01 | Boogang Semiconductor Co Ltd | 易清潔的排氣環 |
CN104768574B (zh) | 2012-08-07 | 2017-12-22 | 麻省理工学院 | 抗登革病毒抗体和其用途 |
US8664627B1 (en) | 2012-08-08 | 2014-03-04 | Asm Ip Holding B.V. | Method for supplying gas with flow rate gradient over substrate |
US9514932B2 (en) | 2012-08-08 | 2016-12-06 | Applied Materials, Inc. | Flowable carbon for semiconductor processing |
US8912070B2 (en) | 2012-08-16 | 2014-12-16 | The Institute of Microelectronics Chinese Academy of Science | Method for manufacturing semiconductor device |
JP5906318B2 (ja) | 2012-08-17 | 2016-04-20 | 株式会社Ihi | 耐熱複合材料の製造方法及び製造装置 |
US9707530B2 (en) | 2012-08-21 | 2017-07-18 | Uop Llc | Methane conversion apparatus and process using a supersonic flow reactor |
US9370757B2 (en) | 2012-08-21 | 2016-06-21 | Uop Llc | Pyrolytic reactor |
JP2015529395A (ja) | 2012-08-23 | 2015-10-05 | アプライド マテリアルズ インコーポレイテッドApplied Materials,Incorporated | Uvチャンバを洗浄するための方法及びハードウェア |
US9169975B2 (en) | 2012-08-28 | 2015-10-27 | Asm Ip Holding B.V. | Systems and methods for mass flow controller verification |
USD693200S1 (en) | 2012-08-28 | 2013-11-12 | Lee Valley Tools, Ltd. | Bench stop |
US9659799B2 (en) | 2012-08-28 | 2017-05-23 | Asm Ip Holding B.V. | Systems and methods for dynamic semiconductor process scheduling |
JP2014049529A (ja) | 2012-08-30 | 2014-03-17 | Tokyo Electron Ltd | プラズマ処理装置及び金属の酸化膜を洗浄する方法 |
US8859368B2 (en) | 2012-09-04 | 2014-10-14 | Globalfoundries Inc. | Semiconductor device incorporating a multi-function layer into gate stacks |
US8742668B2 (en) | 2012-09-05 | 2014-06-03 | Asm Ip Holdings B.V. | Method for stabilizing plasma ignition |
US9171715B2 (en) | 2012-09-05 | 2015-10-27 | Asm Ip Holding B.V. | Atomic layer deposition of GeO2 |
US8651788B1 (en) | 2012-09-06 | 2014-02-18 | Horst Budde | Variable-length, adjustable spacer |
CN104603914B (zh) | 2012-09-07 | 2017-07-14 | 应用材料公司 | 多腔室真空系统中的多孔电介质、聚合物涂布基板和环氧化物的集成处理 |
KR20140033911A (ko) | 2012-09-11 | 2014-03-19 | 에이에스엠 아이피 홀딩 비.브이. | 증착 장치 및 증착 방법 |
US9021985B2 (en) | 2012-09-12 | 2015-05-05 | Asm Ip Holdings B.V. | Process gas management for an inductively-coupled plasma deposition reactor |
JP5882167B2 (ja) | 2012-09-13 | 2016-03-09 | 東京エレクトロン株式会社 | 熱処理装置 |
US20140077240A1 (en) | 2012-09-17 | 2014-03-20 | Radek Roucka | Iv material photonic device on dbr |
JP6022274B2 (ja) | 2012-09-18 | 2016-11-09 | 株式会社日立国際電気 | 半導体装置の製造方法、基板処理装置およびプログラム |
MX2015003569A (es) | 2012-09-19 | 2016-06-21 | Apjet Inc | Aparato y metodo para procesar plasma bajo presion atmosferica. |
JP6136613B2 (ja) | 2012-09-21 | 2017-05-31 | 東京エレクトロン株式会社 | プラズマ処理方法 |
US20140099794A1 (en) | 2012-09-21 | 2014-04-10 | Applied Materials, Inc. | Radical chemistry modulation and control using multiple flow pathways |
US8921207B2 (en) | 2012-09-24 | 2014-12-30 | Asm Ip Holding B.V., Inc. | Tin precursors for vapor deposition and deposition processes |
US9076674B2 (en) | 2012-09-25 | 2015-07-07 | Intermolecular, Inc. | Method and apparatus for improving particle performance |
US9324811B2 (en) | 2012-09-26 | 2016-04-26 | Asm Ip Holding B.V. | Structures and devices including a tensile-stressed silicon arsenic layer and methods of forming same |
JP6042160B2 (ja) | 2012-10-03 | 2016-12-14 | 東京エレクトロン株式会社 | 成膜方法及び成膜装置 |
US20140099798A1 (en) | 2012-10-05 | 2014-04-10 | Asm Ip Holding B.V. | UV-Curing Apparatus Provided With Wavelength-Tuned Excimer Lamp and Method of Processing Semiconductor Substrate Using Same |
US9353441B2 (en) | 2012-10-05 | 2016-05-31 | Asm Ip Holding B.V. | Heating/cooling pedestal for semiconductor-processing apparatus |
US10714315B2 (en) | 2012-10-12 | 2020-07-14 | Asm Ip Holdings B.V. | Semiconductor reaction chamber showerhead |
JP2014086472A (ja) | 2012-10-19 | 2014-05-12 | Sinfonia Technology Co Ltd | クランプ装置及びワーク搬送ロボット |
US9064948B2 (en) | 2012-10-22 | 2015-06-23 | Globalfoundries Inc. | Methods of forming a semiconductor device with low-k spacers and the resulting device |
US9230815B2 (en) | 2012-10-26 | 2016-01-05 | Appled Materials, Inc. | Methods for depositing fluorine/carbon-free conformal tungsten |
US9018639B2 (en) | 2012-10-26 | 2015-04-28 | Dow Corning Corporation | Flat SiC semiconductor substrate |
CN103794458B (zh) | 2012-10-29 | 2016-12-21 | 中微半导体设备(上海)有限公司 | 用于等离子体处理腔室内部的部件及制造方法 |
US20140120678A1 (en) | 2012-10-29 | 2014-05-01 | Matheson Tri-Gas | Methods for Selective and Conformal Epitaxy of Highly Doped Si-containing Materials for Three Dimensional Structures |
JP5960028B2 (ja) | 2012-10-31 | 2016-08-02 | 東京エレクトロン株式会社 | 熱処理装置 |
US8939781B2 (en) | 2012-10-31 | 2015-01-27 | International Business Machines Corporation | Implementing reconfigurable power connector for multiple wiring configurations |
US20140116335A1 (en) | 2012-10-31 | 2014-05-01 | Asm Ip Holding B.V. | UV Irradiation Apparatus with Cleaning Mechanism and Method for Cleaning UV Irradiation Apparatus |
US9330899B2 (en) | 2012-11-01 | 2016-05-03 | Asm Ip Holding B.V. | Method of depositing thin film |
US8821985B2 (en) | 2012-11-02 | 2014-09-02 | Intermolecular, Inc. | Method and apparatus for high-K gate performance improvement and combinatorial processing |
US9105587B2 (en) | 2012-11-08 | 2015-08-11 | Micron Technology, Inc. | Methods of forming semiconductor structures with sulfur dioxide etch chemistries |
JP6538300B2 (ja) | 2012-11-08 | 2019-07-03 | ノベラス・システムズ・インコーポレーテッドNovellus Systems Incorporated | 感受性基材上にフィルムを蒸着するための方法 |
US20140141674A1 (en) | 2012-11-16 | 2014-05-22 | Liquipel IP, LLC | Apparatus and methods for plasma enhanced chemical vapor deposition of dielectric/polymer coatings |
US20150291830A1 (en) | 2012-11-16 | 2015-10-15 | Liquipel Ip Llc | Apparatus and methods for plasma enhanced chemical vapor deposition of polymer coatings |
US8784951B2 (en) | 2012-11-16 | 2014-07-22 | Asm Ip Holding B.V. | Method for forming insulation film using non-halide precursor having four or more silicons |
USD693782S1 (en) | 2012-11-19 | 2013-11-19 | Epicrew Corporation | Lid for epitaxial growing device |
US9190486B2 (en) | 2012-11-20 | 2015-11-17 | Globalfoundries Inc. | Integrated circuits and methods for fabricating integrated circuits with reduced parasitic capacitance |
KR102116469B1 (ko) | 2012-11-20 | 2020-05-29 | 삼성디스플레이 주식회사 | 터치 패널 표시 장치 |
US20140145332A1 (en) | 2012-11-26 | 2014-05-29 | Globalfoundries Inc. | Methods of forming graphene liners and/or cap layers on copper-based conductive structures |
US20150292088A1 (en) | 2012-11-27 | 2015-10-15 | Claudio Canizares | Deposition systems having interchangeable gas injectors and related methods |
US8973524B2 (en) | 2012-11-27 | 2015-03-10 | Intermolecular, Inc. | Combinatorial spin deposition |
US9146551B2 (en) | 2012-11-29 | 2015-09-29 | Asm Ip Holding B.V. | Scheduler for processing system |
CN102983093B (zh) | 2012-12-03 | 2016-04-20 | 安徽三安光电有限公司 | 一种用于led外延晶圆制程的石墨承载盘 |
KR102046976B1 (ko) | 2012-12-04 | 2019-12-02 | 삼성전자주식회사 | 반도체 메모리 장치 및 그 제조 방법 |
US9362092B2 (en) | 2012-12-07 | 2016-06-07 | LGS Innovations LLC | Gas dispersion disc assembly |
JP6071514B2 (ja) | 2012-12-12 | 2017-02-01 | 東京エレクトロン株式会社 | 静電チャックの改質方法及びプラズマ処理装置 |
US9123577B2 (en) | 2012-12-12 | 2015-09-01 | Sandisk Technologies Inc. | Air gap isolation in non-volatile memory using sacrificial films |
US9023438B2 (en) | 2012-12-17 | 2015-05-05 | Intermolecular, Inc. | Methods and apparatus for combinatorial PECVD or PEALD |
JP6017396B2 (ja) | 2012-12-18 | 2016-11-02 | 東京エレクトロン株式会社 | 薄膜形成方法および薄膜形成装置 |
CN104853855B (zh) | 2012-12-18 | 2020-07-24 | 海星化学有限公司 | 用于薄膜沉积反应器和薄膜层的原位干式清洁的过程和方法 |
US9064857B2 (en) | 2012-12-19 | 2015-06-23 | Taiwan Semiconductor Manufacturing Company, Ltd. | N metal for FinFET |
US9640416B2 (en) | 2012-12-26 | 2017-05-02 | Asm Ip Holding B.V. | Single-and dual-chamber module-attachable wafer-handling chamber |
KR101950349B1 (ko) | 2012-12-26 | 2019-02-20 | 에스케이하이닉스 주식회사 | 보이드 프리 폴리실리콘 갭필 방법 및 그를 이용한 반도체장치 제조 방법 |
JP6134740B2 (ja) | 2012-12-27 | 2017-05-24 | 住友化学株式会社 | オキシムの製造方法 |
GB201223473D0 (en) | 2012-12-28 | 2013-02-13 | Faradion Ltd | Metal-containing compounds |
US20140182053A1 (en) | 2012-12-29 | 2014-07-03 | Alexander Yeh Industry Co., Ltd. | Pullable drain plug |
GB2509335A (en) * | 2012-12-31 | 2014-07-02 | Univ Tartu | Double-structured corrosion resistant coatings and methods of application |
US9583363B2 (en) | 2012-12-31 | 2017-02-28 | Sunedison Semiconductor Limited (Uen201334164H) | Processes and apparatus for preparing heterostructures with reduced strain by radial distension |
EP2750167A1 (en) | 2012-12-31 | 2014-07-02 | Imec | Method for tuning the effective work function of a gate structure in a semiconductor device |
US9090972B2 (en) | 2012-12-31 | 2015-07-28 | Lam Research Corporation | Gas supply systems for substrate processing chambers and methods therefor |
US20140187045A1 (en) | 2013-01-02 | 2014-07-03 | Applied Materials, Inc. | Silicon nitride gapfill implementing high density plasma |
KR20140089793A (ko) | 2013-01-07 | 2014-07-16 | 에스케이하이닉스 주식회사 | 반도체 장치 및 그 제조 방법 |
CN103014846A (zh) | 2013-01-14 | 2013-04-03 | 东莞市中镓半导体科技有限公司 | 一种材料气相外延用同心圆环喷头结构 |
EP2946028B1 (en) | 2013-01-16 | 2018-12-26 | Universiteit Gent | Methods for obtaining hydrophilic fluoropolymers |
US8853039B2 (en) | 2013-01-17 | 2014-10-07 | Taiwan Semiconductor Manufacturing Company, Ltd. | Defect reduction for formation of epitaxial layer in source and drain regions |
KR102097109B1 (ko) | 2013-01-21 | 2020-04-10 | 에이에스엠 아이피 홀딩 비.브이. | 증착 장치 |
US10557190B2 (en) | 2013-01-24 | 2020-02-11 | Tokyo Electron Limited | Substrate processing apparatus and susceptor |
KR20140095738A (ko) | 2013-01-25 | 2014-08-04 | 삼성전자주식회사 | 트랜지스터 및 그 제조 방법 |
US9018093B2 (en) | 2013-01-25 | 2015-04-28 | Asm Ip Holding B.V. | Method for forming layer constituted by repeated stacked layers |
US9314854B2 (en) | 2013-01-30 | 2016-04-19 | Lam Research Corporation | Ductile mode drilling methods for brittle components of plasma processing apparatuses |
US20160376700A1 (en) | 2013-02-01 | 2016-12-29 | Asm Ip Holding B.V. | System for treatment of deposition reactor |
US8894870B2 (en) | 2013-02-01 | 2014-11-25 | Asm Ip Holding B.V. | Multi-step method and apparatus for etching compounds containing a metal |
JP5335155B1 (ja) | 2013-02-04 | 2013-11-06 | 善郎 水野 | 温度計の管理システム |
US9399228B2 (en) | 2013-02-06 | 2016-07-26 | Novellus Systems, Inc. | Method and apparatus for purging and plasma suppression in a process chamber |
EP2765218A1 (en) | 2013-02-07 | 2014-08-13 | Nederlandse Organisatie voor toegepast-natuurwetenschappelijk Onderzoek TNO | Method and apparatus for depositing atomic layers on a substrate |
US9184045B2 (en) | 2013-02-08 | 2015-11-10 | Taiwan Semiconductor Manufacturing Co., Ltd. | Bottom-up PEALD process |
US10256079B2 (en) | 2013-02-08 | 2019-04-09 | Applied Materials, Inc. | Semiconductor processing systems having multiple plasma configurations |
US9758866B2 (en) | 2013-02-13 | 2017-09-12 | Wayne State University | Synthesis and characterization of first row transition metal complexes containing α-imino alkoxides as precursors for deposition of metal films |
KR20140102782A (ko) | 2013-02-14 | 2014-08-25 | 삼성전자주식회사 | 웨이퍼 이송용 블레이드 및 이를 포함하는 웨이퍼 이송 장치 |
TWI624560B (zh) | 2013-02-18 | 2018-05-21 | 應用材料股份有限公司 | 用於原子層沉積的氣體分配板及原子層沉積系統 |
US8932923B2 (en) | 2013-02-19 | 2015-01-13 | Globalfoundries Inc. | Semiconductor gate structure for threshold voltage modulation and method of making same |
US20140234466A1 (en) | 2013-02-21 | 2014-08-21 | HGST Netherlands B.V. | Imprint mold and method for making using sidewall spacer line doubling |
TW201437423A (zh) | 2013-02-21 | 2014-10-01 | Applied Materials Inc | 用於注射器至基板的空隙控制之裝置及方法 |
US8623770B1 (en) | 2013-02-21 | 2014-01-07 | HGST Netherlands B.V. | Method for sidewall spacer line doubling using atomic layer deposition of a titanium oxide |
FR3002241B1 (fr) | 2013-02-21 | 2015-11-20 | Altatech Semiconductor | Dispositif de depot chimique en phase vapeur |
JP5934665B2 (ja) | 2013-02-22 | 2016-06-15 | 東京エレクトロン株式会社 | 成膜方法、プログラム、コンピュータ記憶媒体及び成膜システム |
JP5717888B2 (ja) | 2013-02-25 | 2015-05-13 | 東京エレクトロン株式会社 | プラズマ処理装置 |
US9304396B2 (en) | 2013-02-25 | 2016-04-05 | Lam Research Corporation | PECVD films for EUV lithography |
TWI615497B (zh) | 2013-02-28 | 2018-02-21 | 應用材料股份有限公司 | 金屬胺化物沉積前驅物及具有惰性安瓿襯裡之該前驅物的穩定化 |
US9449795B2 (en) | 2013-02-28 | 2016-09-20 | Novellus Systems, Inc. | Ceramic showerhead with embedded RF electrode for capacitively coupled plasma reactor |
USD743357S1 (en) | 2013-03-01 | 2015-11-17 | Asm Ip Holding B.V. | Susceptor |
US8790743B1 (en) | 2013-03-04 | 2014-07-29 | Asm Ip Holding B.V. | Method for controlling cyclic plasma-assisted process |
TWD164568S (zh) | 2013-03-05 | 2014-12-01 | 東京威力科創股份有限公司 | 探針卡盒 |
US9593410B2 (en) | 2013-03-05 | 2017-03-14 | Applied Materials, Inc. | Methods and apparatus for stable substrate processing with multiple RF power supplies |
USD751555S1 (en) | 2013-03-05 | 2016-03-15 | Japan Electronic Materials Corp. | Probe card case |
US9633889B2 (en) | 2013-03-06 | 2017-04-25 | Applied Materials, Inc. | Substrate support with integrated vacuum and edge purge conduits |
US10170282B2 (en) | 2013-03-08 | 2019-01-01 | Applied Materials, Inc. | Insulated semiconductor faceplate designs |
US20150218700A1 (en) | 2013-03-08 | 2015-08-06 | Applied Materials, Inc. | Chamber component with protective coating suitable for protection against flourine plasma |
US9484191B2 (en) | 2013-03-08 | 2016-11-01 | Asm Ip Holding B.V. | Pulsed remote plasma method and system |
USD723153S1 (en) | 2013-03-08 | 2015-02-24 | Olen Borkholder | Recess ceiling fan bezel |
KR102177738B1 (ko) | 2013-03-08 | 2020-11-11 | 어플라이드 머티어리얼스, 인코포레이티드 | 불소 플라즈마에 대한 보호에 적합한 보호 코팅을 갖는 챔버 컴포넌트 |
US9589770B2 (en) | 2013-03-08 | 2017-03-07 | Asm Ip Holding B.V. | Method and systems for in-situ formation of intermediate reactive species |
USD702188S1 (en) | 2013-03-08 | 2014-04-08 | Asm Ip Holding B.V. | Thermocouple |
US8933528B2 (en) | 2013-03-11 | 2015-01-13 | International Business Machines Corporation | Semiconductor fin isolation by a well trapping fin portion |
US9312222B2 (en) | 2013-03-12 | 2016-04-12 | Taiwan Semiconductor Manufacturing Co., Ltd. | Patterning approach for improved via landing profile |
US9543147B2 (en) | 2013-03-12 | 2017-01-10 | Taiwan Semiconductor Manufacturing Company, Ltd. | Photoresist and method of manufacture |
US20140262028A1 (en) | 2013-03-13 | 2014-09-18 | Intermolecular, Inc. | Non-Contact Wet-Process Cell Confining Liquid to a Region of a Solid Surface by Differential Pressure |
KR101317942B1 (ko) | 2013-03-13 | 2013-10-16 | (주)테키스트 | 반도체 제조용 척의 에지링 냉각모듈 |
US20140264444A1 (en) | 2013-03-13 | 2014-09-18 | International Business Machines Corporation | Stress-enhancing selective epitaxial deposition of embedded source and drain regions |
US9991153B2 (en) | 2013-03-14 | 2018-06-05 | Applied Materials, Inc. | Substrate support bushing |
US9564309B2 (en) | 2013-03-14 | 2017-02-07 | Asm Ip Holding B.V. | Si precursors for deposition of SiN at low temperatures |
US20140273531A1 (en) | 2013-03-14 | 2014-09-18 | Asm Ip Holding B.V. | Si PRECURSORS FOR DEPOSITION OF SiN AT LOW TEMPERATURES |
US20140273534A1 (en) | 2013-03-14 | 2014-09-18 | Tokyo Electron Limited | Integration of absorption based heating bake methods into a photolithography track system |
US8841182B1 (en) | 2013-03-14 | 2014-09-23 | Asm Ip Holding B.V. | Silane and borane treatments for titanium carbide films |
US20140272341A1 (en) | 2013-03-14 | 2014-09-18 | Applied Materials, Inc. | Thermal treated sandwich structure layer to improve adhesive strength |
US9824881B2 (en) | 2013-03-14 | 2017-11-21 | Asm Ip Holding B.V. | Si precursors for deposition of SiN at low temperatures |
US9309978B2 (en) | 2013-03-14 | 2016-04-12 | Dresser-Rand Company | Low head to stem ratio poppet valve |
US9252392B2 (en) | 2013-03-14 | 2016-02-02 | Applied Materials, Inc. | Thin film encapsulation-thin ultra high barrier layer for OLED application |
US9411237B2 (en) | 2013-03-14 | 2016-08-09 | Applied Materials, Inc. | Resist hardening and development processes for semiconductor device manufacturing |
US9556507B2 (en) | 2013-03-14 | 2017-01-31 | Applied Materials, Inc. | Yttria-based material coated chemical vapor deposition chamber heater |
US20140273530A1 (en) | 2013-03-15 | 2014-09-18 | Victor Nguyen | Post-Deposition Treatment Methods For Silicon Nitride |
WO2014140672A1 (en) | 2013-03-15 | 2014-09-18 | L'air Liquide, Societe Anonyme Pour I'etude Et I'exploitation Des Procedes Georges Claude | Bis(alkylimido)-bis(alkylamido)molybdenum molecules for deposition of molybdenum-containing films |
US9721784B2 (en) | 2013-03-15 | 2017-08-01 | Applied Materials, Inc. | Ultra-conformal carbon film deposition |
WO2014150260A1 (en) | 2013-03-15 | 2014-09-25 | Applied Materials, Inc | Process load lock apparatus, lift assemblies, electronic device processing systems, and methods of processing substrates in load lock locations |
CN105074164B (zh) | 2013-03-15 | 2018-11-23 | 普莱姆集团联盟有限责任公司 | 具有非粘性层密封的对置活塞内燃发动机 |
US9666702B2 (en) | 2013-03-15 | 2017-05-30 | Matthew H. Kim | Advanced heterojunction devices and methods of manufacturing advanced heterojunction devices |
TWI627305B (zh) | 2013-03-15 | 2018-06-21 | 應用材料股份有限公司 | 用於轉盤處理室之具有剛性板的大氣蓋 |
US9564348B2 (en) | 2013-03-15 | 2017-02-07 | Applied Materials, Inc. | Shutter blade and robot blade with CTE compensation |
US8984962B2 (en) | 2013-03-15 | 2015-03-24 | H. Aaron Christmann | Rotatable torque-measuring apparatus and method |
WO2014149258A1 (en) | 2013-03-15 | 2014-09-25 | Applied Materials, Inc. | Apparatus and method for tuning a plasma profile using a tuning electrode in a processing chamber |
JP5864637B2 (ja) | 2013-03-19 | 2016-02-17 | 株式会社日立国際電気 | 半導体装置の製造方法、基板処理装置、プログラム及び記録媒体 |
JP6096547B2 (ja) | 2013-03-21 | 2017-03-15 | 東京エレクトロン株式会社 | プラズマ処理装置及びシャワープレート |
JP5386046B1 (ja) | 2013-03-27 | 2014-01-15 | エピクルー株式会社 | サセプタ支持部およびこのサセプタ支持部を備えるエピタキシャル成長装置 |
USD734377S1 (en) | 2013-03-28 | 2015-07-14 | Hirata Corporation | Top cover of a load lock chamber |
JP6115244B2 (ja) | 2013-03-28 | 2017-04-19 | 東京エレクトロン株式会社 | 成膜装置 |
JP6107327B2 (ja) | 2013-03-29 | 2017-04-05 | 東京エレクトロン株式会社 | 成膜装置及びガス供給装置並びに成膜方法 |
JP6134191B2 (ja) | 2013-04-07 | 2017-05-24 | 村川 惠美 | 回転型セミバッチald装置 |
KR101390474B1 (ko) | 2013-04-08 | 2014-05-07 | 주식회사 유진테크 | 기판처리장치 |
US9142437B2 (en) | 2013-04-10 | 2015-09-22 | Globalfoundries Inc. | System for separately handling different size FOUPs |
US8864202B1 (en) | 2013-04-12 | 2014-10-21 | Varian Semiconductor Equipment Associates, Inc. | Spring retained end effector contact pad |
FR3004712B1 (fr) | 2013-04-19 | 2015-05-08 | Herakles | Procede de fabrication de materiau composite a matrice carbure |
JP2014216647A (ja) | 2013-04-29 | 2014-11-17 | エーエスエムアイピー ホールディング ビー.ブイ. | 金属ドープされた抵抗切り替え層を有する抵抗変化型メモリを製造する方法 |
US8956939B2 (en) | 2013-04-29 | 2015-02-17 | Asm Ip Holding B.V. | Method of making a resistive random access memory device |
CN106169415B (zh) | 2013-05-03 | 2020-02-14 | 应用材料公司 | 用于多图案化应用的光调谐硬掩模 |
JP6068255B2 (ja) | 2013-05-13 | 2017-01-25 | 大陽日酸株式会社 | 気相成長装置および気相成長装置の部材搬送方法 |
USD766849S1 (en) | 2013-05-15 | 2016-09-20 | Ebara Corporation | Substrate retaining ring |
US9252024B2 (en) | 2013-05-17 | 2016-02-02 | Applied Materials, Inc. | Deposition chambers with UV treatment and methods of use |
JP2014229680A (ja) | 2013-05-21 | 2014-12-08 | ピーエスフォー ルクスコ エスエイアールエルPS4 Luxco S.a.r.l. | 半導体装置及びその製造方法 |
US9299837B2 (en) | 2013-05-22 | 2016-03-29 | Globalfoundries Inc. | Integrated circuit having MOSFET with embedded stressor and method to fabricate same |
US9365924B2 (en) | 2013-05-23 | 2016-06-14 | Asm Ip Holding B.V. | Method for forming film by plasma-assisted deposition using two-frequency combined pulsed RF power |
US9142393B2 (en) | 2013-05-23 | 2015-09-22 | Asm Ip Holding B.V. | Method for cleaning reaction chamber using pre-cleaning process |
US8900467B1 (en) | 2013-05-25 | 2014-12-02 | HGST Netherlands B.V. | Method for making a chemical contrast pattern using block copolymers and sequential infiltration synthesis |
USD726365S1 (en) | 2013-05-29 | 2015-04-07 | Sis Resources Ltd. | Mouthpiece plug for electronic cigarette |
EP3004745A4 (en) | 2013-05-30 | 2017-02-08 | Knowles Capital Formation, Inc. | Wireless culinary probe calibration method and system |
US9605736B1 (en) | 2013-05-31 | 2017-03-28 | Rct Systems, Inc. | High temperature electromagnetic actuator |
US9552979B2 (en) | 2013-05-31 | 2017-01-24 | Asm Ip Holding B.V. | Cyclic aluminum nitride deposition in a batch reactor |
TWI609991B (zh) | 2013-06-05 | 2018-01-01 | 維克儀器公司 | 具有熱一致性改善特色的晶圓舟盒 |
US8895395B1 (en) | 2013-06-06 | 2014-11-25 | International Business Machines Corporation | Reduced resistance SiGe FinFET devices and method of forming same |
US9117657B2 (en) | 2013-06-07 | 2015-08-25 | Asm Ip Holding B.V. | Method for filling recesses using pre-treatment with hydrocarbon-containing gas |
US9245740B2 (en) | 2013-06-07 | 2016-01-26 | Dnf Co., Ltd. | Amino-silyl amine compound, method for preparing the same and silicon-containing thin-film using the same |
CN104233226B (zh) | 2013-06-09 | 2017-06-06 | 北京北方微电子基地设备工艺研究中心有限责任公司 | 一种原子层沉积设备 |
US9123510B2 (en) | 2013-06-12 | 2015-09-01 | ASM IP Holding, B.V. | Method for controlling in-plane uniformity of substrate processed by plasma-assisted process |
WO2014200815A1 (en) | 2013-06-14 | 2014-12-18 | Veeco Ald Inc. | Performing atomic layer deposition on large substrate using scanning reactors |
US20140367043A1 (en) | 2013-06-17 | 2014-12-18 | Applied Materials, Inc. | Method for fast and repeatable plasma ignition and tuning in plasma chambers |
USD794185S1 (en) | 2013-06-17 | 2017-08-08 | Q-Med Ab | Syringe part |
CN104244620B (zh) | 2013-06-19 | 2017-05-31 | 上海微电子装备有限公司 | 一种大型半导体设备集约型装配柜体 |
KR102100469B1 (ko) | 2013-06-20 | 2020-04-13 | 인텔 코포레이션 | 도핑된 서브-핀 영역을 갖는 비평면 반도체 디바이스 및 그 제조 방법 |
US10036089B2 (en) | 2013-06-26 | 2018-07-31 | Applied Materials, Inc. | Methods of depositing a metal alloy film |
WO2014210257A1 (en) | 2013-06-26 | 2014-12-31 | Beijing Sevenstar Electronics Co. Ltd. | Vertical no-spin process chamber |
US20150004798A1 (en) | 2013-06-28 | 2015-01-01 | Lam Research Corporation | Chemical deposition chamber having gas seal |
US9768016B2 (en) | 2013-07-02 | 2017-09-19 | Ultratech, Inc. | Formation of heteroepitaxial layers with rapid thermal processing to remove lattice dislocations |
US9490149B2 (en) | 2013-07-03 | 2016-11-08 | Lam Research Corporation | Chemical deposition apparatus having conductance control |
US9677176B2 (en) | 2013-07-03 | 2017-06-13 | Novellus Systems, Inc. | Multi-plenum, dual-temperature showerhead |
JP5861676B2 (ja) | 2013-07-08 | 2016-02-16 | 株式会社安川電機 | 吸着構造、ロボットハンドおよびロボット |
US20150010381A1 (en) | 2013-07-08 | 2015-01-08 | United Microelectronics Corp. | Wafer processing chamber and method for transferring wafer in the same |
USD705745S1 (en) | 2013-07-08 | 2014-05-27 | Witricity Corporation | Printed resonator coil |
US8993054B2 (en) | 2013-07-12 | 2015-03-31 | Asm Ip Holding B.V. | Method and system to reduce outgassing in a reaction chamber |
US8940646B1 (en) | 2013-07-12 | 2015-01-27 | Lam Research Corporation | Sequential precursor dosing in an ALD multi-station/batch reactor |
US9099423B2 (en) | 2013-07-12 | 2015-08-04 | Asm Ip Holding B.V. | Doped semiconductor films and processing |
US20150020848A1 (en) | 2013-07-19 | 2015-01-22 | Lam Research Corporation | Systems and Methods for In-Situ Wafer Edge and Backside Plasma Cleaning |
JP6116425B2 (ja) | 2013-07-19 | 2017-04-19 | 大陽日酸株式会社 | 金属薄膜の製膜方法 |
US9018111B2 (en) | 2013-07-22 | 2015-04-28 | Asm Ip Holding B.V. | Semiconductor reaction chamber with plasma capabilities |
JP6087236B2 (ja) | 2013-07-24 | 2017-03-01 | 東京エレクトロン株式会社 | 成膜方法 |
US20150030766A1 (en) | 2013-07-25 | 2015-01-29 | Novellus Systems, Inc. | Pedestal bottom clean for improved fluorine utilization and integrated symmetric foreline |
US9994954B2 (en) | 2013-07-26 | 2018-06-12 | Versum Materials Us, Llc | Volatile dihydropyrazinly and dihydropyrazine metal complexes |
US9663546B2 (en) | 2013-07-26 | 2017-05-30 | President And Fellows Of Harvard College | Metal amides of cyclic amines |
CN104342637B (zh) | 2013-07-26 | 2017-02-15 | 北京北方微电子基地设备工艺研究中心有限责任公司 | 一种原子层沉积设备 |
GB201313850D0 (en) | 2013-08-02 | 2013-09-18 | Johnson Matthey Plc | Getter composition |
US9099393B2 (en) | 2013-08-05 | 2015-08-04 | International Business Machines Corporation | Enabling enhanced reliability and mobility for replacement gate planar and FinFET structures |
USD784276S1 (en) | 2013-08-06 | 2017-04-18 | Applied Materials, Inc. | Susceptor assembly |
US8986562B2 (en) | 2013-08-07 | 2015-03-24 | Ultratech, Inc. | Methods of laser processing photoresist in a gaseous environment |
US9396934B2 (en) | 2013-08-14 | 2016-07-19 | Asm Ip Holding B.V. | Methods of forming films including germanium tin and structures and devices including the films |
US9793115B2 (en) | 2013-08-14 | 2017-10-17 | Asm Ip Holding B.V. | Structures and devices including germanium-tin films and methods of forming same |
US8900999B1 (en) | 2013-08-16 | 2014-12-02 | Applied Materials, Inc. | Low temperature high pressure high H2/WF6 ratio W process for 3D NAND application |
WO2015026230A1 (en) | 2013-08-19 | 2015-02-26 | Asm Ip Holding B.V. | Twin-assembly of diverging semiconductor processing systems |
JP6689020B2 (ja) | 2013-08-21 | 2020-04-28 | 東京エレクトロン株式会社 | プラズマ処理装置 |
US9209033B2 (en) | 2013-08-21 | 2015-12-08 | Tel Epion Inc. | GCIB etching method for adjusting fin height of finFET devices |
US9190263B2 (en) | 2013-08-22 | 2015-11-17 | Asm Ip Holding B.V. | Method for forming SiOCH film using organoaminosilane annealing |
US9310684B2 (en) | 2013-08-22 | 2016-04-12 | Inpria Corporation | Organometallic solution based high resolution patterning compositions |
GB2517697A (en) | 2013-08-27 | 2015-03-04 | Ibm | Compound semiconductor structure |
US9136108B2 (en) | 2013-09-04 | 2015-09-15 | Asm Ip Holding B.V. | Method for restoring porous surface of dielectric layer by UV light-assisted ALD |
US9484199B2 (en) | 2013-09-06 | 2016-11-01 | Applied Materials, Inc. | PECVD microcrystalline silicon germanium (SiGe) |
JP6338462B2 (ja) | 2013-09-11 | 2018-06-06 | 東京エレクトロン株式会社 | プラズマ処理装置 |
USD716742S1 (en) | 2013-09-13 | 2014-11-04 | Asm Ip Holding B.V. | Substrate supporter for semiconductor deposition apparatus |
USD724553S1 (en) | 2013-09-13 | 2015-03-17 | Asm Ip Holding B.V. | Substrate supporter for semiconductor deposition apparatus |
US10312127B2 (en) | 2013-09-16 | 2019-06-04 | Applied Materials, Inc. | Compliant robot blade for defect reduction |
US9284642B2 (en) | 2013-09-19 | 2016-03-15 | Asm Ip Holding B.V. | Method for forming oxide film by plasma-assisted processing |
US8969169B1 (en) | 2013-09-20 | 2015-03-03 | Intermolecular, Inc. | DRAM MIM capacitor using non-noble electrodes |
US9378971B1 (en) | 2014-12-04 | 2016-06-28 | Lam Research Corporation | Technique to deposit sidewall passivation for high aspect ratio cylinder etch |
US10453675B2 (en) | 2013-09-20 | 2019-10-22 | Versum Materials Us, Llc | Organoaminosilane precursors and methods for depositing films comprising same |
US8900951B1 (en) | 2013-09-24 | 2014-12-02 | International Business Machines Corporation | Gate-all-around nanowire MOSFET and method of formation |
WO2015047832A1 (en) | 2013-09-26 | 2015-04-02 | Veeco Ald Inc. | Printing of colored pattern using atommic layer deposition |
US9018103B2 (en) | 2013-09-26 | 2015-04-28 | Lam Research Corporation | High aspect ratio etch with combination mask |
US9202738B2 (en) | 2013-09-26 | 2015-12-01 | Applied Materials, Inc. | Pneumatic end effector apparatus and substrate transportation systems with annular flow channel |
US9920077B2 (en) | 2013-09-27 | 2018-03-20 | L'Air Liquide, SociétéAnonyme pour l'Etude et l'Exploitation des Procédés Georges Claude | Amine substituted trisilylamine and tridisilylamine compounds and synthesis methods thereof |
US9240412B2 (en) | 2013-09-27 | 2016-01-19 | Asm Ip Holding B.V. | Semiconductor structure and device and methods of forming same using selective epitaxial process |
CN105493248B (zh) | 2013-09-30 | 2018-04-10 | 株式会社日立国际电气 | 半导体器件的制造方法、衬底处理装置、衬底处理系统及记录介质 |
TWI649803B (zh) | 2013-09-30 | 2019-02-01 | 蘭姆研究公司 | 具有電漿輔助式原子層沉積及電漿輔助式化學氣相沉積合成法之深寬比可變的特徵物之間隙填充 |
USD756929S1 (en) | 2013-09-30 | 2016-05-24 | Danfoss A/S | Electrical connector for refrigeration valve |
US9905415B2 (en) | 2013-10-03 | 2018-02-27 | Versum Materials Us, Llc | Methods for depositing silicon nitride films |
US9396986B2 (en) | 2013-10-04 | 2016-07-19 | Taiwan Semiconductor Manufacturing Company, Ltd. | Mechanism of forming a trench structure |
JP6267080B2 (ja) | 2013-10-07 | 2018-01-24 | 東京エレクトロン株式会社 | シリコン窒化物膜の成膜方法および成膜装置 |
US9556516B2 (en) | 2013-10-09 | 2017-01-31 | ASM IP Holding B.V | Method for forming Ti-containing film by PEALD using TDMAT or TDEAT |
KR20160045784A (ko) | 2013-10-15 | 2016-04-27 | 비코 에이엘디 인코포레이티드 | 시드 전구체를 이용한 고속 원자층 증착 공정 |
US9576790B2 (en) | 2013-10-16 | 2017-02-21 | Asm Ip Holding B.V. | Deposition of boron and carbon containing materials |
US9034717B2 (en) | 2013-10-16 | 2015-05-19 | Taiwan Semiconductor Manufacturing Company Limited | Semiconductor-on-insulator structure and method of fabricating the same |
US10214817B2 (en) | 2013-10-16 | 2019-02-26 | The Board Of Trustees Of The University Of Illinois | Multi-metal films, alternating film multilayers, formation methods and deposition system |
KR101557016B1 (ko) | 2013-10-17 | 2015-10-05 | 주식회사 유진테크 | 기판 처리장치 |
US20150111374A1 (en) | 2013-10-18 | 2015-04-23 | International Business Machines Corporation | Surface treatment in a dep-etch-dep process |
JP5847783B2 (ja) | 2013-10-21 | 2016-01-27 | 株式会社日立国際電気 | 半導体装置の製造方法、基板処理装置、プログラム及び記録媒体 |
US9145607B2 (en) | 2013-10-22 | 2015-09-29 | Lam Research Corporation | Tandem source activation for cyclical deposition of films |
US20150118863A1 (en) | 2013-10-25 | 2015-04-30 | Lam Research Corporation | Methods and apparatus for forming flowable dielectric films having low porosity |
US10221481B2 (en) | 2013-10-28 | 2019-03-05 | Merck Patent Gmbh | Metal complexes containing amidoimine ligands |
US9343308B2 (en) | 2013-10-28 | 2016-05-17 | Asm Ip Holding B.V. | Method for trimming carbon-containing film at reduced trimming rate |
KR20150050638A (ko) | 2013-10-29 | 2015-05-11 | 에이에스엠 아이피 홀딩 비.브이. | 증착 장치 |
US9029272B1 (en) | 2013-10-31 | 2015-05-12 | Asm Ip Holding B.V. | Method for treating SiOCH film with hydrogen plasma |
TW201522696A (zh) | 2013-11-01 | 2015-06-16 | Applied Materials Inc | 使用遠端電漿cvd技術的低溫氮化矽膜 |
US10443127B2 (en) | 2013-11-05 | 2019-10-15 | Taiwan Semiconductor Manufacturing Company Limited | System and method for supplying a precursor for an atomic layer deposition (ALD) process |
US20150126036A1 (en) | 2013-11-05 | 2015-05-07 | Tokyo Electron Limited | Controlling etch rate drift and particles during plasma processing |
CN104630735B (zh) | 2013-11-06 | 2017-12-19 | 北京北方华创微电子装备有限公司 | 温度监控装置及等离子体加工设备 |
US20150125628A1 (en) | 2013-11-06 | 2015-05-07 | Asm Ip Holding B.V. | Method of depositing thin film |
KR20150052996A (ko) | 2013-11-07 | 2015-05-15 | 삼성디스플레이 주식회사 | 기판 이송 장치 및 이를 포함하는 박막 증착 장치 |
US9605343B2 (en) | 2013-11-13 | 2017-03-28 | Asm Ip Holding B.V. | Method for forming conformal carbon films, structures conformal carbon film, and system of forming same |
US9330937B2 (en) | 2013-11-13 | 2016-05-03 | Intermolecular, Inc. | Etching of semiconductor structures that include titanium-based layers |
USD739222S1 (en) | 2013-11-13 | 2015-09-22 | Jeff Chadbourne | Two-piece magnetic clamp |
KR20220002721A (ko) | 2013-11-21 | 2022-01-06 | 엔테그리스, 아이엔씨. | 플라즈마 시스템에서 사용되는 챔버 구성요소를 위한 표면 코팅 |
KR20150060086A (ko) | 2013-11-25 | 2015-06-03 | 주식회사 테라세미콘 | 클러스터형 배치식 기판처리 시스템 |
KR101539298B1 (ko) | 2013-11-25 | 2015-07-29 | 주식회사 엘지실트론 | 에피택셜 웨이퍼 성장 장치 |
US9745658B2 (en) | 2013-11-25 | 2017-08-29 | Lam Research Corporation | Chamber undercoat preparation method for low temperature ALD films |
TWI588286B (zh) | 2013-11-26 | 2017-06-21 | 烏翠泰克股份有限公司 | 經改良的電漿強化原子層沉積方法、周期及裝置 |
US10179947B2 (en) | 2013-11-26 | 2019-01-15 | Asm Ip Holding B.V. | Method for forming conformal nitrided, oxidized, or carbonized dielectric film by atomic layer deposition |
KR20150061179A (ko) | 2013-11-26 | 2015-06-04 | 에스케이하이닉스 주식회사 | 플라즈마 강화 기상 증착 |
US9245762B2 (en) | 2013-12-02 | 2016-01-26 | Applied Materials, Inc. | Procedure for etch rate consistency |
US9355882B2 (en) | 2013-12-04 | 2016-05-31 | Taiwan Semiconductor Manufacturing Co., Ltd. | Transfer module for bowed wafers |
KR20150064993A (ko) | 2013-12-04 | 2015-06-12 | 삼성전자주식회사 | 반도체 제조 장치 |
US9620382B2 (en) | 2013-12-06 | 2017-04-11 | University Of Maryland, College Park | Reactor for plasma-based atomic layer etching of materials |
TW201525173A (zh) | 2013-12-09 | 2015-07-01 | Applied Materials Inc | 選擇性層沉積之方法 |
US9401273B2 (en) | 2013-12-11 | 2016-07-26 | Asm Ip Holding B.V. | Atomic layer deposition of silicon carbon nitride based materials |
JP2015115461A (ja) | 2013-12-11 | 2015-06-22 | 大日本印刷株式会社 | 微細構造体の欠陥修正方法および製造方法 |
TWI678751B (zh) | 2013-12-13 | 2019-12-01 | 日商昕芙旎雅股份有限公司 | 設備前端模組(efem) |
US9305848B2 (en) | 2013-12-17 | 2016-04-05 | Texas Instruments Incorporated | Elongated contacts using litho-freeze-litho-etch process |
KR102102787B1 (ko) | 2013-12-17 | 2020-04-22 | 삼성전자주식회사 | 기판 처리 장치 및 블록커 플레이트 어셈블리 |
US10431489B2 (en) | 2013-12-17 | 2019-10-01 | Applied Materials, Inc. | Substrate support apparatus having reduced substrate particle generation |
JP5859586B2 (ja) | 2013-12-27 | 2016-02-10 | 株式会社日立国際電気 | 基板処理システム、半導体装置の製造方法および記録媒体 |
US9245742B2 (en) | 2013-12-18 | 2016-01-26 | Asm Ip Holding B.V. | Sulfur-containing thin films |
WO2015091781A2 (en) | 2013-12-18 | 2015-06-25 | Imec Vzw | Method of producing transition metal dichalcogenide layer |
US9478419B2 (en) | 2013-12-18 | 2016-10-25 | Asm Ip Holding B.V. | Sulfur-containing thin films |
US9362385B2 (en) | 2013-12-18 | 2016-06-07 | Taiwan Semiconductor Manufacturing Company Ltd. | Method for tuning threshold voltage of semiconductor device with metal gate structure |
US20150176124A1 (en) | 2013-12-19 | 2015-06-25 | Intermolecular, Inc. | Methods for Rapid Generation of ALD Saturation Curves Using Segmented Spatial ALD |
JP6230900B2 (ja) | 2013-12-19 | 2017-11-15 | 東京エレクトロン株式会社 | 基板処理装置 |
US20150179640A1 (en) | 2013-12-19 | 2015-06-25 | Globalfoundries Inc. | Common fabrication of different semiconductor devices with different threshold voltages |
KR20150073251A (ko) | 2013-12-20 | 2015-07-01 | 에스케이하이닉스 주식회사 | 반도체 장치 및 그 제조 방법 |
US9353440B2 (en) | 2013-12-20 | 2016-05-31 | Applied Materials, Inc. | Dual-direction chemical delivery system for ALD/CVD chambers |
KR102146705B1 (ko) | 2013-12-23 | 2020-08-21 | 삼성전자주식회사 | 반도체 소자의 배선 구조물 및 그 형성 방법 |
US9698035B2 (en) | 2013-12-23 | 2017-07-04 | Lam Research Corporation | Microstructures for improved wafer handling |
US20150175467A1 (en) | 2013-12-23 | 2015-06-25 | Infineon Technologies Austria Ag | Mold, method for producing a mold, and method for forming a mold article |
US9406547B2 (en) | 2013-12-24 | 2016-08-02 | Intel Corporation | Techniques for trench isolation using flowable dielectric materials |
TWI650832B (zh) | 2013-12-26 | 2019-02-11 | 維克儀器公司 | 用於化學氣相沉積系統之具有隔熱蓋的晶圓載具 |
US9159561B2 (en) | 2013-12-26 | 2015-10-13 | Taiwan Semiconductor Manufacturing Company, Ltd. | Method for overcoming broken line and photoresist scum issues in tri-layer photoresist patterning |
US20150184287A1 (en) | 2013-12-26 | 2015-07-02 | Intermolecular, Inc. | Systems and Methods for Parallel Combinatorial Vapor Deposition Processing |
JP6247095B2 (ja) | 2013-12-27 | 2017-12-13 | 株式会社日立国際電気 | 半導体装置の製造方法、基板処理装置およびプログラム |
CN104752351B (zh) | 2013-12-30 | 2019-03-29 | 中芯国际集成电路制造(上海)有限公司 | 半导体器件的形成方法 |
TWI654336B (zh) | 2013-12-30 | 2019-03-21 | 美商蘭姆研究公司 | 具有脈衝式電漿曝露之電漿輔助式原子層沉積 |
US9219006B2 (en) | 2014-01-13 | 2015-12-22 | Applied Materials, Inc. | Flowable carbon film by FCVD hardware using remote plasma PECVD |
WO2015156871A2 (en) | 2014-01-15 | 2015-10-15 | Forrest Stephen R Forrest | Non-destructive wafer recycling for epitaxial lift-off thin-film device using a superlattice epitaxial layer |
US9328416B2 (en) | 2014-01-17 | 2016-05-03 | Lam Research Corporation | Method for the reduction of defectivity in vapor deposited films |
WO2015107009A1 (en) | 2014-01-17 | 2015-07-23 | Koninklijke Philips N.V. | Heating system comprising semiconductor light sources |
US9677172B2 (en) | 2014-01-21 | 2017-06-13 | Applied Materials, Inc. | Methods for forming a cobalt-ruthenium liner layer for interconnect structures |
CN106103795B (zh) | 2014-01-23 | 2019-03-12 | 雅达公司 | 蒸气输送系统 |
JP6324739B2 (ja) | 2014-01-27 | 2018-05-16 | 株式会社Kelk | 半導体ウェーハの温度制御装置、及び半導体ウェーハの温度制御方法 |
WO2015115202A1 (ja) | 2014-01-28 | 2015-08-06 | 三菱電機株式会社 | 炭化珪素半導体装置及び炭化珪素半導体装置の製造方法 |
JP6208588B2 (ja) | 2014-01-28 | 2017-10-04 | 東京エレクトロン株式会社 | 支持機構及び基板処理装置 |
KR102155181B1 (ko) | 2014-01-28 | 2020-09-11 | 삼성전자주식회사 | 반도체 장치 및 그 제조 방법 |
JP5805227B2 (ja) | 2014-01-28 | 2015-11-04 | 東京エレクトロン株式会社 | プラズマ処理装置 |
CN106104775B (zh) | 2014-01-31 | 2019-05-21 | 应用材料公司 | 腔室涂层 |
US9502218B2 (en) | 2014-01-31 | 2016-11-22 | Applied Materials, Inc. | RPS assisted RF plasma source for semiconductor processing |
US9778561B2 (en) | 2014-01-31 | 2017-10-03 | Lam Research Corporation | Vacuum-integrated hardmask processes and apparatus |
USD724701S1 (en) | 2014-02-04 | 2015-03-17 | ASM IP Holding, B.V. | Shower plate |
USD732145S1 (en) | 2014-02-04 | 2015-06-16 | Asm Ip Holding B.V. | Shower plate |
US9370863B2 (en) | 2014-02-04 | 2016-06-21 | Asm Ip Holding B.V. | Anti-slip end-effector for transporting workpiece |
USD726884S1 (en) | 2014-02-04 | 2015-04-14 | Asm Ip Holding B.V. | Heater block |
USD732644S1 (en) | 2014-02-04 | 2015-06-23 | Asm Ip Holding B.V. | Top plate |
USD720838S1 (en) | 2014-02-04 | 2015-01-06 | Asm Ip Holding B.V. | Shower plate |
USD725168S1 (en) | 2014-02-04 | 2015-03-24 | Asm Ip Holding B.V. | Heater block |
US9895715B2 (en) | 2014-02-04 | 2018-02-20 | Asm Ip Holding B.V. | Selective deposition of metals, metal oxides, and dielectrics |
US9214340B2 (en) | 2014-02-05 | 2015-12-15 | Applied Materials, Inc. | Apparatus and method of forming an indium gallium zinc oxide layer |
US8993457B1 (en) | 2014-02-06 | 2015-03-31 | Cypress Semiconductor Corporation | Method of fabricating a charge-trapping gate stack using a CMOS process flow |
WO2015119794A1 (en) | 2014-02-06 | 2015-08-13 | Veeco Ald Inc. | Spatial deposition of material using short-distance reciprocating motions |
US11158526B2 (en) | 2014-02-07 | 2021-10-26 | Applied Materials, Inc. | Temperature controlled substrate support assembly |
US9416447B2 (en) | 2014-02-07 | 2016-08-16 | HGST Netherlands B.V. | Method for line density multiplication using block copolymers and sequential infiltration synthesis |
US9281211B2 (en) | 2014-02-10 | 2016-03-08 | International Business Machines Corporation | Nanoscale interconnect structure |
US9721947B2 (en) | 2014-02-12 | 2017-08-01 | Taiwan Semiconductor Manufacturing Company, Ltd. | Semiconductor device and method of manufacturing |
USD733257S1 (en) | 2014-02-14 | 2015-06-30 | Hansgrohe Se | Overhead shower |
JP6249815B2 (ja) | 2014-02-17 | 2017-12-20 | 株式会社Ihi | 耐熱複合材料の製造方法及び製造装置 |
CN203721699U (zh) | 2014-02-20 | 2014-07-16 | 北京七星华创电子股份有限公司 | 一种盘状物的夹持装置及盘状物的旋转平台 |
JP6396699B2 (ja) | 2014-02-24 | 2018-09-26 | 東京エレクトロン株式会社 | エッチング方法 |
US9916995B2 (en) | 2014-02-24 | 2018-03-13 | Lam Research Corporation | Compact substrate processing tool with multi-station processing and pre-processing and/or post-processing stations |
US9576952B2 (en) | 2014-02-25 | 2017-02-21 | Globalfoundries Inc. | Integrated circuits with varying gate structures and fabrication methods |
KR102233577B1 (ko) | 2014-02-25 | 2021-03-30 | 삼성전자주식회사 | 반도체 소자의 패턴 형성 방법 |
US9362180B2 (en) | 2014-02-25 | 2016-06-07 | Globalfoundries Inc. | Integrated circuit having multiple threshold voltages |
JP6303592B2 (ja) | 2014-02-25 | 2018-04-04 | 東京エレクトロン株式会社 | 基板処理装置 |
US10683571B2 (en) | 2014-02-25 | 2020-06-16 | Asm Ip Holding B.V. | Gas supply manifold and method of supplying gases to chamber using same |
JP5926753B2 (ja) | 2014-02-26 | 2016-05-25 | 東京エレクトロン株式会社 | 基板処理方法、プログラム、コンピュータ記憶媒体及び基板処理システム |
US9425078B2 (en) | 2014-02-26 | 2016-08-23 | Lam Research Corporation | Inhibitor plasma mediated atomic layer deposition for seamless feature fill |
CN108198748B (zh) | 2014-02-27 | 2022-04-29 | 斯克林集团公司 | 基板处理装置 |
WO2015127614A1 (zh) | 2014-02-27 | 2015-09-03 | 深圳市祥涛瑞杰贸易有限公司 | 空气净化结构和空气净化系统 |
JP6278751B2 (ja) | 2014-03-04 | 2018-02-14 | 東京エレクトロン株式会社 | 搬送方法及び基板処理装置 |
US9472410B2 (en) | 2014-03-05 | 2016-10-18 | Applied Materials, Inc. | Pixelated capacitance controlled ESC |
US20150255324A1 (en) | 2014-03-06 | 2015-09-10 | Applied Materials, Inc. | Seamless gap-fill with spatial atomic layer deposition |
KR20150104817A (ko) | 2014-03-06 | 2015-09-16 | 에스케이하이닉스 주식회사 | 반도체 장치 및 그 제조 방법 |
JP6204231B2 (ja) | 2014-03-11 | 2017-09-27 | 大陽日酸株式会社 | 空気液化分離装置及び方法 |
JP2015173230A (ja) | 2014-03-12 | 2015-10-01 | 株式会社東芝 | 半導体装置及び半導体装置の製造方法 |
US10109534B2 (en) | 2014-03-14 | 2018-10-23 | Applied Materials, Inc. | Multi-threshold voltage (Vt) workfunction metal by selective atomic layer deposition (ALD) |
US9447498B2 (en) | 2014-03-18 | 2016-09-20 | Asm Ip Holding B.V. | Method for performing uniform processing in gas system-sharing multiple reaction chambers |
US10167557B2 (en) | 2014-03-18 | 2019-01-01 | Asm Ip Holding B.V. | Gas distribution system, reactor including the system, and methods of using the same |
JP6379550B2 (ja) | 2014-03-18 | 2018-08-29 | 東京エレクトロン株式会社 | 成膜装置 |
KR102308587B1 (ko) | 2014-03-19 | 2021-10-01 | 가부시키가이샤 스크린 홀딩스 | 기판 처리 장치 및 기판 처리 방법 |
US11015245B2 (en) | 2014-03-19 | 2021-05-25 | Asm Ip Holding B.V. | Gas-phase reactor and system having exhaust plenum and components thereof |
US9299557B2 (en) | 2014-03-19 | 2016-03-29 | Asm Ip Holding B.V. | Plasma pre-clean module and process |
US20150267295A1 (en) | 2014-03-19 | 2015-09-24 | Asm Ip Holding B.V. | Removable substrate tray and assembly and reactor including same |
JP5944429B2 (ja) | 2014-03-20 | 2016-07-05 | 株式会社日立国際電気 | 基板処理装置、半導体装置の製造方法、プログラム及び記録媒体 |
KR101883583B1 (ko) | 2014-03-20 | 2018-07-30 | 가부시키가이샤 히다치 고쿠사이 덴키 | 기판 처리 장치, 천장부 및 반도체 장치의 제조 방법 |
JP6275822B2 (ja) | 2014-03-20 | 2018-02-07 | 株式会社東芝 | 非水電解質電池用活物質、非水電解質電池用電極、非水電解質二次電池、電池パック及び非水電解質電池用活物質の製造方法 |
JP6270575B2 (ja) | 2014-03-24 | 2018-01-31 | 株式会社日立国際電気 | 反応管、基板処理装置及び半導体装置の製造方法 |
JP6304592B2 (ja) | 2014-03-25 | 2018-04-04 | 株式会社Screenホールディングス | 基板処理方法および基板処理装置 |
JP5941491B2 (ja) | 2014-03-26 | 2016-06-29 | 株式会社日立国際電気 | 基板処理装置及び半導体装置の製造方法並びにプログラム |
US9583337B2 (en) | 2014-03-26 | 2017-02-28 | Ultratech, Inc. | Oxygen radical enhanced atomic-layer deposition using ozone plasma |
US20150275355A1 (en) | 2014-03-26 | 2015-10-01 | Air Products And Chemicals, Inc. | Compositions and methods for the deposition of silicon oxide films |
JP6204570B2 (ja) | 2014-03-28 | 2017-09-27 | 株式会社日立国際電気 | 基板処理装置、半導体装置の製造方法および記録媒体 |
JP6254036B2 (ja) | 2014-03-31 | 2017-12-27 | 三菱重工業株式会社 | 三次元積層装置及び三次元積層方法 |
JP6147693B2 (ja) | 2014-03-31 | 2017-06-14 | 株式会社日立国際電気 | 半導体装置の製造方法、基板処理装置、およびプログラム |
US9637823B2 (en) | 2014-03-31 | 2017-05-02 | Asm Ip Holding B.V. | Plasma atomic layer deposition |
US20150280051A1 (en) | 2014-04-01 | 2015-10-01 | Tsmc Solar Ltd. | Diffuser head apparatus and method of gas distribution |
US9343350B2 (en) | 2014-04-03 | 2016-05-17 | Asm Ip Holding B.V. | Anti-slip end effector for transporting workpiece using van der waals force |
US9269590B2 (en) | 2014-04-07 | 2016-02-23 | Applied Materials, Inc. | Spacer formation |
US9663857B2 (en) | 2014-04-07 | 2017-05-30 | Asm Ip Holding B.V. | Method for stabilizing reaction chamber pressure |
KR102094470B1 (ko) | 2014-04-08 | 2020-03-27 | 삼성전자주식회사 | 반도체 소자 및 그 제조 방법 |
US10047435B2 (en) | 2014-04-16 | 2018-08-14 | Asm Ip Holding B.V. | Dual selective deposition |
US9404587B2 (en) | 2014-04-24 | 2016-08-02 | ASM IP Holding B.V | Lockout tagout for semiconductor vacuum valve |
US9184054B1 (en) | 2014-04-25 | 2015-11-10 | Taiwan Semiconductor Manufacturing Company, Ltd. | Method for integrated circuit patterning |
US9976211B2 (en) | 2014-04-25 | 2018-05-22 | Applied Materials, Inc. | Plasma erosion resistant thin film coating for high temperature application |
US20150311043A1 (en) | 2014-04-25 | 2015-10-29 | Applied Materials, Inc. | Chamber component with fluorinated thin film coating |
US9343294B2 (en) | 2014-04-28 | 2016-05-17 | Taiwan Semiconductor Manufacturing Company, Ltd. | Interconnect structure having air gap and method of forming the same |
US9464352B2 (en) | 2014-05-02 | 2016-10-11 | Asm Ip Holding B.V. | Low-oxidation plasma-assisted process |
JP6324800B2 (ja) | 2014-05-07 | 2018-05-16 | 東京エレクトロン株式会社 | 成膜方法および成膜装置 |
KR102168792B1 (ko) | 2014-05-08 | 2020-10-23 | 스트라타시스 엘티디. | 선택적 소결에 의한 3d 프린팅 방법 및 장치 |
US9917295B2 (en) | 2014-05-13 | 2018-03-13 | Uchicago Argonne, Llc | Methods for using atomic layer deposition to produce a film for solid state electrolytes and protective electrode coatings for lithium batteries |
TWI518751B (zh) | 2014-05-14 | 2016-01-21 | 國立清華大學 | 成分元素濃度漸變分佈之載子通道及其製作方法 |
US9343343B2 (en) | 2014-05-19 | 2016-05-17 | Asm Ip Holding B.V. | Method for reducing particle generation at bevel portion of substrate |
US9257557B2 (en) | 2014-05-20 | 2016-02-09 | Globalfoundries Inc. | Semiconductor structure with self-aligned wells and multiple channel materials |
US9577192B2 (en) | 2014-05-21 | 2017-02-21 | Sony Semiconductor Solutions Corporation | Method for forming a metal cap in a semiconductor memory device |
US10062598B2 (en) | 2014-05-21 | 2018-08-28 | Applied Materials, Inc. | Thermal processing susceptor |
US9881788B2 (en) | 2014-05-22 | 2018-01-30 | Lam Research Corporation | Back side deposition apparatus and applications |
USD733262S1 (en) | 2014-05-22 | 2015-06-30 | Young Boung Kang | Disposer of connection member for kitchen sink bowl |
JP2016005900A (ja) | 2014-05-27 | 2016-01-14 | パナソニックIpマネジメント株式会社 | ガスバリア膜、ガスバリア膜付きフィルム基板およびこれを備えた電子デバイス。 |
US9309598B2 (en) | 2014-05-28 | 2016-04-12 | Applied Materials, Inc. | Oxide and metal removal |
US20150348755A1 (en) | 2014-05-29 | 2015-12-03 | Charm Engineering Co., Ltd. | Gas distribution apparatus and substrate processing apparatus including same |
KR102162733B1 (ko) | 2014-05-29 | 2020-10-07 | 에스케이하이닉스 주식회사 | 듀얼일함수 매립게이트형 트랜지스터 및 그 제조 방법, 그를 구비한 전자장치 |
WO2015181770A2 (en) | 2014-05-30 | 2015-12-03 | Eltek S.P.A. | A sensor for detecting the level of a medium |
WO2015182699A1 (ja) | 2014-05-30 | 2015-12-03 | 株式会社 荏原製作所 | 真空排気システム |
JP6301203B2 (ja) | 2014-06-02 | 2018-03-28 | 株式会社ディスコ | チップの製造方法 |
JP6225837B2 (ja) | 2014-06-04 | 2017-11-08 | 東京エレクトロン株式会社 | 成膜装置、成膜方法、記憶媒体 |
EP2953162A1 (en) | 2014-06-06 | 2015-12-09 | IMEC vzw | Method for manufacturing a semiconductor device comprising transistors each having a different effective work function |
US9773683B2 (en) | 2014-06-09 | 2017-09-26 | American Air Liquide, Inc. | Atomic layer or cyclic plasma etching chemistries and processes |
US10998228B2 (en) | 2014-06-12 | 2021-05-04 | Taiwan Semiconductor Manufacturing Company, Ltd. | Self-aligned interconnect with protection layer |
DE102014108352A1 (de) | 2014-06-13 | 2015-12-17 | Forschungszentrum Jülich GmbH | Verfahren zum Abscheiden einer Kristallschicht bei niedrigen Temperaturen, insbesondere einer photolumineszierenden IV-IV-Schicht auf einem IV-Substrat, sowie ein eine derartige Schicht aufweisendes optoelektronisches Bauelement |
USD743513S1 (en) | 2014-06-13 | 2015-11-17 | Asm Ip Holding B.V. | Seal ring |
US9978632B2 (en) | 2014-06-13 | 2018-05-22 | Applied Materials, Inc. | Direct lift process apparatus |
JP6225842B2 (ja) | 2014-06-16 | 2017-11-08 | 東京エレクトロン株式会社 | 成膜装置、成膜方法、記憶媒体 |
KR102195003B1 (ko) | 2014-06-18 | 2020-12-24 | 삼성전자주식회사 | 반도체 다이오드, 가변 저항 메모리 장치 및 가변 저항 메모리 장치의 제조 방법 |
US9378969B2 (en) | 2014-06-19 | 2016-06-28 | Applied Materials, Inc. | Low temperature gas-phase carbon removal |
USD753629S1 (en) | 2014-06-19 | 2016-04-12 | Yamaha Corporation | Speaker |
CN104022121B (zh) | 2014-06-23 | 2017-05-03 | 中国科学院微电子研究所 | 三维半导体器件及其制造方法 |
US20150367253A1 (en) | 2014-06-24 | 2015-12-24 | Us Synthetic Corporation | Photoluminescent thin-layer chromatography plate and methods for making same |
US20150380296A1 (en) | 2014-06-25 | 2015-12-31 | Lam Research Corporation | Cleaning of carbon-based contaminants in metal interconnects for interconnect capping applications |
WO2015199705A1 (en) | 2014-06-26 | 2015-12-30 | Intel Corporation | Non-planar semiconductor device having omega-fin with doped sub-fin region and method to fabricate same |
US9825191B2 (en) | 2014-06-27 | 2017-11-21 | Sunpower Corporation | Passivation of light-receiving surfaces of solar cells with high energy gap (EG) materials |
JP6629312B2 (ja) | 2014-07-03 | 2020-01-15 | アプライド マテリアルズ インコーポレイテッドApplied Materials,Incorporated | 選択的堆積のための方法及び装置 |
US9911579B2 (en) | 2014-07-03 | 2018-03-06 | Applied Materials, Inc. | Showerhead having a detachable high resistivity gas distribution plate |
USD736348S1 (en) | 2014-07-07 | 2015-08-11 | Jiangmen Triumph Rain Showers Co., LTD | Spray head for a shower |
JP5837962B1 (ja) | 2014-07-08 | 2015-12-24 | 株式会社日立国際電気 | 基板処理装置、半導体装置の製造方法およびガス整流部 |
US9349620B2 (en) | 2014-07-09 | 2016-05-24 | Asm Ip Holdings B.V. | Apparatus and method for pre-baking substrate upstream of process chamber |
SG11201610304SA (en) | 2014-07-10 | 2017-01-27 | Applied Materials Inc | Design of susceptor in chemical vapor deposition reactor |
US9617637B2 (en) | 2014-07-15 | 2017-04-11 | Lam Research Corporation | Systems and methods for improving deposition rate uniformity and reducing defects in substrate processing systems |
US9412581B2 (en) | 2014-07-16 | 2016-08-09 | Applied Materials, Inc. | Low-K dielectric gapfill by flowable deposition |
US10192717B2 (en) | 2014-07-21 | 2019-01-29 | Applied Materials, Inc. | Conditioning remote plasma source for enhanced performance having repeatable etch and deposition rates |
KR102262887B1 (ko) | 2014-07-21 | 2021-06-08 | 삼성전자주식회사 | 반도체 장치 및 그 제조 방법 |
FR3024051A1 (fr) | 2014-07-28 | 2016-01-29 | Total Raffinage Chimie | Chambre a plaques en materiau ceramique pour unite de craquage catalytique fluide |
US10858737B2 (en) | 2014-07-28 | 2020-12-08 | Asm Ip Holding B.V. | Showerhead assembly and components thereof |
US9617638B2 (en) | 2014-07-30 | 2017-04-11 | Lam Research Corporation | Methods and apparatuses for showerhead backside parasitic plasma suppression in a secondary purge enabled ALD system |
US9548188B2 (en) | 2014-07-30 | 2017-01-17 | Lam Research Corporation | Method of conditioning vacuum chamber of semiconductor substrate processing apparatus |
US9970108B2 (en) | 2014-08-01 | 2018-05-15 | Lam Research Corporation | Systems and methods for vapor delivery in a substrate processing system |
US9543180B2 (en) | 2014-08-01 | 2017-01-10 | Asm Ip Holding B.V. | Apparatus and method for transporting wafers between wafer carrier and process tool under vacuum |
US10176996B2 (en) | 2014-08-06 | 2019-01-08 | Globalfoundries Inc. | Replacement metal gate and fabrication process with reduced lithography steps |
USD751176S1 (en) | 2014-08-07 | 2016-03-08 | Hansgrohe Se | Overhead shower |
CN104197411B (zh) | 2014-08-08 | 2017-07-28 | 珠海格力电器股份有限公司 | 空调器的室内机及空调器 |
TWI656232B (zh) | 2014-08-14 | 2019-04-11 | 法商液態空氣喬治斯克勞帝方法研究開發股份有限公司 | 鉬組成物及其用於形成氧化鉬膜之用途 |
KR20160021958A (ko) | 2014-08-18 | 2016-02-29 | 삼성전자주식회사 | 플라즈마 처리 장치 및 기판 처리 방법 |
US9252238B1 (en) | 2014-08-18 | 2016-02-02 | Lam Research Corporation | Semiconductor structures with coplanar recessed gate layers and fabrication methods |
US9349637B2 (en) | 2014-08-21 | 2016-05-24 | Lam Research Corporation | Method for void-free cobalt gap fill |
US9890456B2 (en) | 2014-08-21 | 2018-02-13 | Asm Ip Holding B.V. | Method and system for in situ formation of gas-phase compounds |
USD782419S1 (en) | 2014-08-22 | 2017-03-28 | Christopher C. Willette | Female keyed lamp plug |
US9318319B2 (en) | 2014-08-27 | 2016-04-19 | Ultratech, Inc. | Radical-enhanced atomic layer deposition using CF4 to enhance oxygen radical generation |
CN104201108B (zh) | 2014-08-27 | 2017-11-07 | 上海集成电路研发中心有限公司 | SiGe源/漏区的制造方法 |
US9362131B2 (en) | 2014-08-29 | 2016-06-07 | Applied Materials, Inc. | Fast atomic layer etch process using an electron beam |
KR102400424B1 (ko) | 2014-09-05 | 2022-05-19 | 로제 가부시키가이샤 | 로드 포트 및 로드 포트의 분위기 치환 방법 |
US9410742B2 (en) | 2014-09-08 | 2016-08-09 | Tokyo Electron Limited | High capacity magnetic annealing system and method of operating |
US10224222B2 (en) | 2014-09-09 | 2019-03-05 | Asm Ip Holding B.V. | Assembly of liner and flange for vertical furnace as well as a vertical process furnace |
USD742202S1 (en) | 2014-09-11 | 2015-11-03 | Thomas Jason Cyphers | Sign frame key |
TW201613231A (en) | 2014-09-16 | 2016-04-01 | Huaquan Energy | Geometry and insulation components of motor mechanism |
US9576792B2 (en) | 2014-09-17 | 2017-02-21 | Asm Ip Holding B.V. | Deposition of SiN |
USD764196S1 (en) | 2014-09-17 | 2016-08-23 | Sheryl Handler | Stool |
KR102247416B1 (ko) | 2014-09-24 | 2021-05-03 | 인텔 코포레이션 | 표면 종단을 갖는 나노와이어를 사용하여 형성되는 스케일링된 tfet 트랜지스터 |
US20170309490A1 (en) | 2014-09-24 | 2017-10-26 | Hitachi Kokusai Electric Inc. | Method of manufacturing semiconductor device |
US9214333B1 (en) | 2014-09-24 | 2015-12-15 | Lam Research Corporation | Methods and apparatuses for uniform reduction of the in-feature wet etch rate of a silicon nitride film formed by ALD |
US9478414B2 (en) | 2014-09-26 | 2016-10-25 | Asm Ip Holding B.V. | Method for hydrophobization of surface of silicon-containing film by ALD |
US9362107B2 (en) | 2014-09-30 | 2016-06-07 | Applied Materials, Inc. | Flowable low-k dielectric gapfill treatment |
KR101949060B1 (ko) | 2014-09-30 | 2019-05-20 | 가부시키가이샤 코쿠사이 엘렉트릭 | 기판 처리 장치, 반도체 장치의 제조 방법 및 반응관 |
US9331093B2 (en) | 2014-10-03 | 2016-05-03 | Sandisk Technologies Inc. | Three dimensional NAND device with silicon germanium heterostructure channel |
US9558946B2 (en) | 2014-10-03 | 2017-01-31 | Taiwan Semiconductor Manufacturing Company, Ltd. | FinFETs and methods of forming FinFETs |
US10192770B2 (en) | 2014-10-03 | 2019-01-29 | Applied Materials, Inc. | Spring-loaded pins for susceptor assembly and processing methods using same |
US9657845B2 (en) | 2014-10-07 | 2017-05-23 | Asm Ip Holding B.V. | Variable conductance gas distribution apparatus and method |
US10941490B2 (en) | 2014-10-07 | 2021-03-09 | Asm Ip Holding B.V. | Multiple temperature range susceptor, assembly, reactor and system including the susceptor, and methods of using the same |
ES2703911T3 (es) | 2014-10-13 | 2019-03-13 | Heraeus Deutschland Gmbh & Co Kg | Pintura de color cobre |
USD759137S1 (en) | 2014-10-14 | 2016-06-14 | Victor Equipment Company | Consumables adapter for a welding torch |
US9530787B2 (en) | 2014-10-20 | 2016-12-27 | Sandisk Technologies Llc | Batch contacts for multiple electrically conductive layers |
US10460949B2 (en) | 2014-10-20 | 2019-10-29 | Tokyo Electron Limited | Substrate processing apparatus, substrate processing method and storage medium |
JP2016086099A (ja) | 2014-10-27 | 2016-05-19 | 東京エレクトロン株式会社 | プラズマ処理装置 |
KR20170070281A (ko) | 2014-10-30 | 2017-06-21 | 어플라이드 머티어리얼스, 인코포레이티드 | 저온에서 얇은 에피택셜 필름들을 성장시키는 방법 |
CN104307264A (zh) | 2014-10-31 | 2015-01-28 | 苏州博菡环保科技有限公司 | 空气净化器 |
KR101535573B1 (ko) | 2014-11-04 | 2015-07-13 | 연세대학교 산학협력단 | 전이금속 칼코겐 화합물 합성 방법 |
KR102268187B1 (ko) | 2014-11-10 | 2021-06-24 | 삼성전자주식회사 | 자기 기억 소자 및 그 제조 방법 |
US9305836B1 (en) | 2014-11-10 | 2016-04-05 | International Business Machines Corporation | Air gap semiconductor structure with selective cap bilayer |
US10269614B2 (en) | 2014-11-12 | 2019-04-23 | Applied Materials, Inc. | Susceptor design to reduce edge thermal peak |
KR102300403B1 (ko) | 2014-11-19 | 2021-09-09 | 에이에스엠 아이피 홀딩 비.브이. | 박막 증착 방법 |
JP2016098406A (ja) | 2014-11-21 | 2016-05-30 | 東京エレクトロン株式会社 | モリブデン膜の成膜方法 |
US9914995B2 (en) | 2014-11-21 | 2018-03-13 | Applied Materials, Inc. | Alcohol assisted ALD film deposition |
US9589790B2 (en) | 2014-11-24 | 2017-03-07 | Lam Research Corporation | Method of depositing ammonia free and chlorine free conformal silicon nitride film |
US9564312B2 (en) | 2014-11-24 | 2017-02-07 | Lam Research Corporation | Selective inhibition in atomic layer deposition of silicon-containing films |
JP6354539B2 (ja) | 2014-11-25 | 2018-07-11 | 東京エレクトロン株式会社 | 基板処理装置、基板処理方法、記憶媒体 |
JP6086892B2 (ja) | 2014-11-25 | 2017-03-01 | 株式会社日立国際電気 | 半導体装置の製造方法、基板処理装置およびプログラム |
US9837281B2 (en) | 2014-11-26 | 2017-12-05 | Asm Ip Holding B.V. | Cyclic doped aluminum nitride deposition |
US11637002B2 (en) | 2014-11-26 | 2023-04-25 | Applied Materials, Inc. | Methods and systems to enhance process uniformity |
US9885112B2 (en) | 2014-12-02 | 2018-02-06 | Asm Ip Holdings B.V. | Film forming apparatus |
US9406683B2 (en) | 2014-12-04 | 2016-08-02 | International Business Machines Corporation | Wet bottling process for small diameter deep trench capacitors |
US9620377B2 (en) | 2014-12-04 | 2017-04-11 | Lab Research Corporation | Technique to deposit metal-containing sidewall passivation for high aspect ratio cylinder etch |
US9997373B2 (en) | 2014-12-04 | 2018-06-12 | Lam Research Corporation | Technique to deposit sidewall passivation for high aspect ratio cylinder etch |
US9384998B2 (en) | 2014-12-04 | 2016-07-05 | Lam Research Corporation | Technique to deposit sidewall passivation for high aspect ratio cylinder etch |
US9142764B1 (en) | 2014-12-08 | 2015-09-22 | Intermolecular, Inc. | Methods of forming embedded resistors for resistive random access memory cells |
KR102307633B1 (ko) | 2014-12-10 | 2021-10-06 | 삼성전자주식회사 | 반도체 소자 및 그 제조 방법 |
KR20160070359A (ko) | 2014-12-10 | 2016-06-20 | 삼성전자주식회사 | 가스 인젝터 및 이를 갖는 웨이퍼 처리 장치 |
US9951421B2 (en) | 2014-12-10 | 2018-04-24 | Lam Research Corporation | Inlet for effective mixing and purging |
JP6459462B2 (ja) | 2014-12-11 | 2019-01-30 | 東京エレクトロン株式会社 | リーク判定方法、基板処理装置及び記憶媒体 |
US20160168699A1 (en) | 2014-12-12 | 2016-06-16 | Asm Ip Holding B.V. | Method for depositing metal-containing film using particle-reduction step |
US10062564B2 (en) | 2014-12-15 | 2018-08-28 | Tokyo Electron Limited | Method of selective gas phase film deposition on a substrate by modifying the surface using hydrogen plasma |
US9820289B1 (en) | 2014-12-18 | 2017-11-14 | Sprint Spectrum L.P. | Method and system for managing quantity of carriers in air interface connection based on type of content |
JP6404111B2 (ja) | 2014-12-18 | 2018-10-10 | 東京エレクトロン株式会社 | プラズマ処理装置 |
CN105762068A (zh) | 2014-12-19 | 2016-07-13 | 联华电子股份有限公司 | 半导体元件及其制作方法 |
US10332781B2 (en) | 2014-12-19 | 2019-06-25 | Globalwafers Co., Ltd. | Systems and methods for performing epitaxial smoothing processes on semiconductor structures |
US9396961B2 (en) | 2014-12-22 | 2016-07-19 | Lam Research Corporation | Integrated etch/clean for dielectric etch applications |
KR102263121B1 (ko) | 2014-12-22 | 2021-06-09 | 에이에스엠 아이피 홀딩 비.브이. | 반도체 소자 및 그 제조 방법 |
CN104498895B (zh) | 2014-12-23 | 2017-02-22 | 国家纳米科学中心 | 一种超薄氮氧化硅膜材料及其制备方法和用途 |
JP6322131B2 (ja) | 2014-12-24 | 2018-05-09 | 東京エレクトロン株式会社 | シリコン膜の成膜方法および成膜装置 |
US9515072B2 (en) | 2014-12-26 | 2016-12-06 | Taiwan Semiconductor Manufacturing Company Ltd. | FinFET structure and method for manufacturing thereof |
US9474163B2 (en) | 2014-12-30 | 2016-10-18 | Asm Ip Holding B.V. | Germanium oxide pre-clean module and process |
US9425041B2 (en) | 2015-01-06 | 2016-08-23 | Lam Research Corporation | Isotropic atomic layer etch for silicon oxides using no activation |
US9324846B1 (en) | 2015-01-08 | 2016-04-26 | Globalfoundries Inc. | Field plate in heterojunction bipolar transistor with improved break-down voltage |
USD753269S1 (en) | 2015-01-09 | 2016-04-05 | Asm Ip Holding B.V. | Top plate |
US9576811B2 (en) | 2015-01-12 | 2017-02-21 | Lam Research Corporation | Integrating atomic scale processes: ALD (atomic layer deposition) and ALE (atomic layer etch) |
CN107112267B (zh) | 2015-01-12 | 2020-09-22 | 应用材料公司 | 用于基板背侧变色控制的支撑组件 |
US10658222B2 (en) | 2015-01-16 | 2020-05-19 | Lam Research Corporation | Moveable edge coupling ring for edge process control during semiconductor wafer processing |
US9396956B1 (en) | 2015-01-16 | 2016-07-19 | Asm Ip Holding B.V. | Method of plasma-enhanced atomic layer etching |
US9496040B2 (en) | 2015-01-22 | 2016-11-15 | Sandisk Technologies Llc | Adaptive multi-page programming methods and apparatus for non-volatile memory |
TW201639063A (zh) | 2015-01-22 | 2016-11-01 | 應用材料股份有限公司 | 批量加熱和冷卻腔室或負載鎖定裝置 |
US9764986B2 (en) | 2015-01-22 | 2017-09-19 | Kennametal Inc. | Low temperature CVD coatings and applications thereof |
JP6470057B2 (ja) | 2015-01-29 | 2019-02-13 | 株式会社Kokusai Electric | 半導体装置の製造方法、基板処理装置およびプログラム |
CN204629865U (zh) | 2015-02-03 | 2015-09-09 | 宁波永茂电器厂 | 双单元移动式冷风机 |
US9816180B2 (en) | 2015-02-03 | 2017-11-14 | Asm Ip Holding B.V. | Selective deposition |
US9520295B2 (en) | 2015-02-03 | 2016-12-13 | Lam Research Corporation | Metal doping of amorphous carbon and silicon films used as hardmasks in substrate processing systems |
US9928994B2 (en) | 2015-02-03 | 2018-03-27 | Lam Research Corporation | Methods for decreasing carbon-hydrogen content of amorphous carbon hardmask films |
JP6398761B2 (ja) | 2015-02-04 | 2018-10-03 | 東京エレクトロン株式会社 | 基板処理装置 |
US9736920B2 (en) | 2015-02-06 | 2017-08-15 | Mks Instruments, Inc. | Apparatus and method for plasma ignition with a self-resonating device |
US9963782B2 (en) | 2015-02-12 | 2018-05-08 | Asm Ip Holding B.V. | Semiconductor manufacturing apparatus |
US9478415B2 (en) | 2015-02-13 | 2016-10-25 | Asm Ip Holding B.V. | Method for forming film having low resistance and shallow junction depth |
KR20180100734A (ko) | 2015-02-13 | 2018-09-11 | 엔테그리스, 아이엔씨. | 기판 제품 및 장치의 특성 및 성능을 향상시키기 위한 코팅 |
US9275834B1 (en) | 2015-02-20 | 2016-03-01 | Applied Materials, Inc. | Selective titanium nitride etch |
USD765882S1 (en) | 2015-02-25 | 2016-09-06 | Aluvision, N.V. | Frame element |
US10228291B2 (en) | 2015-02-25 | 2019-03-12 | Kokusai Electric Corporation | Substrate processing apparatus, and thermocouple |
US9808246B2 (en) | 2015-03-06 | 2017-11-07 | Ethicon Endo-Surgery, Llc | Method of operating a powered surgical instrument |
US10052044B2 (en) | 2015-03-06 | 2018-08-21 | Ethicon Llc | Time dependent evaluation of sensor data to determine stability, creep, and viscoelastic elements of measures |
US10529542B2 (en) | 2015-03-11 | 2020-01-07 | Asm Ip Holdings B.V. | Cross-flow reactor and method |
US10276355B2 (en) | 2015-03-12 | 2019-04-30 | Asm Ip Holding B.V. | Multi-zone reactor, system including the reactor, and method of using the same |
IL237775B (en) | 2015-03-16 | 2019-03-31 | Redler Tech Ltd | Automatic, highly reliable, fully redundant electornic circuit breaker that includes means for preventing short-circuit overcurrent |
JP6477075B2 (ja) | 2015-03-17 | 2019-03-06 | 東京エレクトロン株式会社 | 原料ガス供給装置及び成膜装置 |
US10961617B2 (en) | 2015-03-18 | 2021-03-30 | Entegris, Inc. | Articles coated with fluoro-annealed films |
USD761325S1 (en) | 2015-03-19 | 2016-07-12 | Issam N. Abed | Rear crankshaft seal housing |
US10566187B2 (en) | 2015-03-20 | 2020-02-18 | Lam Research Corporation | Ultrathin atomic layer deposition film accuracy thickness control |
JP2016178223A (ja) | 2015-03-20 | 2016-10-06 | ルネサスエレクトロニクス株式会社 | 半導体装置の製造方法 |
JP6484478B2 (ja) | 2015-03-25 | 2019-03-13 | 株式会社Kokusai Electric | 半導体装置の製造方法、基板処理装置およびプログラム |
JP5961297B1 (ja) | 2015-03-26 | 2016-08-02 | 株式会社日立国際電気 | 基板処理装置、半導体装置の製造方法及びプログラム |
US9828672B2 (en) | 2015-03-26 | 2017-11-28 | Lam Research Corporation | Minimizing radical recombination using ALD silicon oxide surface coating with intermittent restoration plasma |
US10475684B2 (en) | 2015-03-26 | 2019-11-12 | Murata Machinery, Ltd. | Supporting device and supporting method for articles |
JP6358143B2 (ja) | 2015-03-26 | 2018-07-18 | 株式会社ダイフク | 半導体容器保管設備 |
JP6458595B2 (ja) | 2015-03-27 | 2019-01-30 | 東京エレクトロン株式会社 | 成膜装置及び成膜方法並びに記憶媒体 |
US11124876B2 (en) | 2015-03-30 | 2021-09-21 | L'Air Liquide, Société Anonyme pour l'Etude et l'Exploitation des Procédés Georges Claude | Si-containing film forming precursors and methods of using the same |
US9777025B2 (en) | 2015-03-30 | 2017-10-03 | L'Air Liquide, Société pour l'Etude et l'Exploitation des Procédés Georges Claude | Si-containing film forming precursors and methods of using the same |
USD759193S1 (en) | 2015-04-01 | 2016-06-14 | Cummins Emission Solutions, Inc. | Water deflector |
US10246772B2 (en) | 2015-04-01 | 2019-04-02 | Applied Materials, Inc. | Plasma enhanced chemical vapor deposition of films for improved vertical etch performance in 3D NAND memory devices |
US9502238B2 (en) | 2015-04-03 | 2016-11-22 | Lam Research Corporation | Deposition of conformal films by atomic layer deposition and atomic layer etch |
KR102376982B1 (ko) | 2015-04-14 | 2022-03-21 | 삼성전자주식회사 | 세라믹을 이용하여 파티클 저감 효과를 가지는 원격 플라즈마 발생장치 |
USD801942S1 (en) | 2015-04-16 | 2017-11-07 | Applied Materials, Inc. | Target profile for a physical vapor deposition chamber target |
KR20160124028A (ko) | 2015-04-16 | 2016-10-26 | 레르 리키드 쏘시에떼 아노님 뿌르 레뜌드 에렉스뿔라따시옹 데 프로세데 조르즈 클로드 | V 족-함유 필름 형성 조성물 및 v 족-함유 필름의 증착 |
KR20160124992A (ko) | 2015-04-20 | 2016-10-31 | 삼성전자주식회사 | 기판 제조 장치, 및 그의 세라믹 박막 코팅 방법 |
USD797067S1 (en) | 2015-04-21 | 2017-09-12 | Applied Materials, Inc. | Target profile for a physical vapor deposition chamber target |
US20160314964A1 (en) | 2015-04-21 | 2016-10-27 | Lam Research Corporation | Gap fill using carbon-based films |
US11384432B2 (en) | 2015-04-22 | 2022-07-12 | Applied Materials, Inc. | Atomic layer deposition chamber with funnel-shaped gas dispersion channel and gas distribution plate |
US9865459B2 (en) | 2015-04-22 | 2018-01-09 | Applied Materials, Inc. | Plasma treatment to improve adhesion between hardmask film and silicon oxide film |
US9343297B1 (en) | 2015-04-22 | 2016-05-17 | Asm Ip Holding B.V. | Method for forming multi-element thin film constituted by at least five elements by PEALD |
TWI615917B (zh) | 2015-04-27 | 2018-02-21 | Sumco股份有限公司 | 承托器及磊晶生長裝置 |
JP6993881B2 (ja) | 2015-05-07 | 2022-01-14 | アプライド マテリアルズ インコーポレイテッド | チャンバ部品のための腐食制御 |
US10471428B2 (en) | 2015-05-11 | 2019-11-12 | The University Of North Carolina At Chapel Hill | Fluidic devices with nanoscale manifolds for molecular transport, related systems and methods of analysis |
US10177024B2 (en) | 2015-05-12 | 2019-01-08 | Lam Research Corporation | High temperature substrate pedestal module and components thereof |
US10935889B2 (en) | 2015-05-13 | 2021-03-02 | Tokyo Electron Limited | Extreme ultra-violet sensitivity reduction using shrink and growth method |
JP1544542S (zh) | 2015-05-14 | 2019-02-18 | ||
US10170320B2 (en) | 2015-05-18 | 2019-01-01 | Lam Research Corporation | Feature fill with multi-stage nucleation inhibition |
JP6806704B2 (ja) | 2015-05-22 | 2021-01-06 | アプライド マテリアルズ インコーポレイテッドApplied Materials,Incorporated | 方位角方向に調整可能なマルチゾーン静電チャック |
JP1547057S (zh) | 2015-05-28 | 2016-04-04 | ||
US9428833B1 (en) | 2015-05-29 | 2016-08-30 | Lam Research Corporation | Method and apparatus for backside deposition reduction by control of wafer support to achieve edge seal |
US9941111B2 (en) | 2015-05-29 | 2018-04-10 | Infineon Technologies Ag | Method for processing a semiconductor layer, method for processing a silicon substrate, and method for processing a silicon layer |
US9711350B2 (en) | 2015-06-03 | 2017-07-18 | Asm Ip Holding B.V. | Methods for semiconductor passivation by nitridation |
US9449843B1 (en) | 2015-06-09 | 2016-09-20 | Applied Materials, Inc. | Selectively etching metals and metal nitrides conformally |
JP1545222S (zh) | 2015-06-10 | 2016-03-07 | ||
CN107690487B (zh) | 2015-06-12 | 2021-03-09 | 应用材料公司 | 用于半导体外延生长的注射器 |
US10053774B2 (en) | 2015-06-12 | 2018-08-21 | Asm Ip Holding B.V. | Reactor system for sublimation of pre-clean byproducts and method thereof |
US9646883B2 (en) | 2015-06-12 | 2017-05-09 | International Business Machines Corporation | Chemoepitaxy etch trim using a self aligned hard mask for metal line to via |
CN106328702B (zh) | 2015-06-15 | 2020-03-06 | 联华电子股份有限公司 | 填充半导体元件间隙的方法及其形成的半导体元件 |
US9647071B2 (en) | 2015-06-15 | 2017-05-09 | Taiwan Semiconductor Manufacturing Company, Ltd. | FINFET structures and methods of forming the same |
USD798248S1 (en) | 2015-06-18 | 2017-09-26 | Applied Materials, Inc. | Target profile for a physical vapor deposition chamber target |
US10438795B2 (en) | 2015-06-22 | 2019-10-08 | Veeco Instruments, Inc. | Self-centering wafer carrier system for chemical vapor deposition |
US10458018B2 (en) | 2015-06-26 | 2019-10-29 | Asm Ip Holding B.V. | Structures including metal carbide material, devices including the structures, and methods of forming same |
US20160379851A1 (en) | 2015-06-29 | 2016-12-29 | Bharath Swaminathan | Temperature controlled substrate processing |
TWM512254U (zh) | 2015-07-02 | 2015-11-11 | Jjs Comm Co Ltd | 用於同軸電纜轉接頭之絕緣墊片結構 |
US10600673B2 (en) | 2015-07-07 | 2020-03-24 | Asm Ip Holding B.V. | Magnetic susceptor to baseplate seal |
KR102417934B1 (ko) | 2015-07-07 | 2022-07-07 | 에이에스엠 아이피 홀딩 비.브이. | 박막 증착 장치 |
US10174437B2 (en) | 2015-07-09 | 2019-01-08 | Applied Materials, Inc. | Wafer electroplating chuck assembly |
US10043661B2 (en) | 2015-07-13 | 2018-08-07 | Asm Ip Holding B.V. | Method for protecting layer by forming hydrocarbon-based extremely thin film |
US9899291B2 (en) | 2015-07-13 | 2018-02-20 | Asm Ip Holding B.V. | Method for protecting layer by forming hydrocarbon-based extremely thin film |
JP6578243B2 (ja) | 2015-07-17 | 2019-09-18 | 株式会社Kokusai Electric | ガス供給ノズル、基板処理装置、半導体装置の製造方法およびプログラム |
US20170025291A1 (en) | 2015-07-22 | 2017-01-26 | Taiwan Semiconductor Manufacturing Co., Ltd. | Multi-chamber furnace for batch processing |
US10745808B2 (en) | 2015-07-24 | 2020-08-18 | Versum Materials Us, Llc | Methods for depositing Group 13 metal or metalloid nitride films |
US10083836B2 (en) | 2015-07-24 | 2018-09-25 | Asm Ip Holding B.V. | Formation of boron-doped titanium metal films with high work function |
JP6529371B2 (ja) | 2015-07-27 | 2019-06-12 | 東京エレクトロン株式会社 | エッチング方法及びエッチング装置 |
US9793097B2 (en) | 2015-07-27 | 2017-10-17 | Lam Research Corporation | Time varying segmented pressure control |
FR3039531A1 (zh) | 2015-07-28 | 2017-02-03 | Nexdot | |
WO2017018834A1 (ko) | 2015-07-29 | 2017-02-02 | 한국표준과학연구원 | 2차원 전이금속 디칼코지나이드 박막의 제조 방법 |
JP6502779B2 (ja) | 2015-07-29 | 2019-04-17 | 東京エレクトロン株式会社 | ガス供給系のバルブのリークを検査する方法 |
JP6560924B2 (ja) | 2015-07-29 | 2019-08-14 | 株式会社Kokusai Electric | 基板処理装置、半導体装置の製造方法及びプログラム |
KR102420087B1 (ko) | 2015-07-31 | 2022-07-12 | 삼성전자주식회사 | 반도체 소자의 제조 방법 |
US11035039B2 (en) | 2015-07-31 | 2021-06-15 | Versum Materials Us, Llc | Compositions and methods for depositing silicon nitride films |
US20170032992A1 (en) | 2015-07-31 | 2017-02-02 | Infineon Technologies Ag | Substrate carrier, a method and a processing device |
US20170040146A1 (en) | 2015-08-03 | 2017-02-09 | Lam Research Corporation | Plasma etching device with plasma etch resistant coating |
US10428421B2 (en) | 2015-08-03 | 2019-10-01 | Asm Ip Holding B.V. | Selective deposition on metal or metallic surfaces relative to dielectric surfaces |
US20170350012A1 (en) * | 2015-08-04 | 2017-12-07 | Sun-min MOON | Semiconductor manufacturing apparatus |
US10087525B2 (en) | 2015-08-04 | 2018-10-02 | Asm Ip Holding B.V. | Variable gap hard stop design |
US10566185B2 (en) | 2015-08-05 | 2020-02-18 | Asm Ip Holding B.V. | Selective deposition of aluminum and nitrogen containing material |
JP1549880S (zh) | 2015-08-06 | 2016-05-23 | ||
US9691645B2 (en) | 2015-08-06 | 2017-06-27 | Applied Materials, Inc. | Bolted wafer chuck thermal management systems and methods for wafer processing systems |
US10950477B2 (en) | 2015-08-07 | 2021-03-16 | Applied Materials, Inc. | Ceramic heater and esc with enhanced wafer edge performance |
US10738381B2 (en) | 2015-08-13 | 2020-08-11 | Asm Ip Holding B.V. | Thin film deposition apparatus |
KR102417930B1 (ko) | 2015-08-13 | 2022-07-06 | 에이에스엠 아이피 홀딩 비.브이. | 증착 장치 및 이를 포함하는 증착 시스템 |
US9647114B2 (en) | 2015-08-14 | 2017-05-09 | Asm Ip Holding B.V. | Methods of forming highly p-type doped germanium tin films and structures and devices including the films |
US20170051402A1 (en) | 2015-08-17 | 2017-02-23 | Asm Ip Holding B.V. | Susceptor and substrate processing apparatus |
JP1550115S (zh) | 2015-08-18 | 2016-05-23 | ||
US20170051405A1 (en) | 2015-08-18 | 2017-02-23 | Asm Ip Holding B.V. | Method for forming sin or sicn film in trenches by peald |
JP1549882S (zh) | 2015-08-18 | 2016-05-23 | ||
US9449987B1 (en) | 2015-08-21 | 2016-09-20 | Sandisk Technologies Llc | Three dimensional memory device with epitaxial semiconductor pedestal for peripheral transistors |
US9978610B2 (en) | 2015-08-21 | 2018-05-22 | Lam Research Corporation | Pulsing RF power in etch process to enhance tungsten gapfill performance |
US10410857B2 (en) | 2015-08-24 | 2019-09-10 | Asm Ip Holding B.V. | Formation of SiN thin films |
US9711345B2 (en) | 2015-08-25 | 2017-07-18 | Asm Ip Holding B.V. | Method for forming aluminum nitride-based film by PEALD |
US9523148B1 (en) | 2015-08-25 | 2016-12-20 | Asm Ip Holdings B.V. | Process for deposition of titanium oxynitride for use in integrated circuit fabrication |
KR102540912B1 (ko) | 2015-08-27 | 2023-06-08 | 스미토모 오사카 세멘토 가부시키가이샤 | 정전 척 장치 |
US9711360B2 (en) | 2015-08-27 | 2017-07-18 | Applied Materials, Inc. | Methods to improve in-film particle performance of amorphous boron-carbon hardmask process in PECVD system |
KR102420015B1 (ko) | 2015-08-28 | 2022-07-12 | 삼성전자주식회사 | Cs-ald 장치의 샤워헤드 |
US10121671B2 (en) | 2015-08-28 | 2018-11-06 | Applied Materials, Inc. | Methods of depositing metal films using metal oxyhalide precursors |
US9455177B1 (en) | 2015-08-31 | 2016-09-27 | Dow Global Technologies Llc | Contact hole formation methods |
US11514096B2 (en) | 2015-09-01 | 2022-11-29 | Panjiva, Inc. | Natural language processing for entity resolution |
US9673042B2 (en) | 2015-09-01 | 2017-06-06 | Applied Materials, Inc. | Methods and apparatus for in-situ cleaning of copper surfaces and deposition and removal of self-assembled monolayers |
JP6486479B2 (ja) | 2015-09-03 | 2019-03-20 | 株式会社Kokusai Electric | 半導体装置の製造方法、基板処理装置、プログラム、および供給系 |
JP1546345S (zh) | 2015-09-04 | 2016-03-22 | ||
JP6448502B2 (ja) | 2015-09-09 | 2019-01-09 | 株式会社Kokusai Electric | 半導体装置の製造方法、基板処理装置及びプログラム |
CN117265512A (zh) | 2015-09-11 | 2023-12-22 | 弗萨姆材料美国有限责任公司 | 用于沉积保形的金属或准金属氮化硅膜的方法和所得的膜 |
US9601693B1 (en) | 2015-09-24 | 2017-03-21 | Lam Research Corporation | Method for encapsulating a chalcogenide material |
WO2017053771A1 (en) | 2015-09-25 | 2017-03-30 | Applied Materials, Inc. | Grooved backing plate for standing wave compensation |
US9960072B2 (en) | 2015-09-29 | 2018-05-01 | Asm Ip Holding B.V. | Variable adjustment for precise matching of multiple chamber cavity housings |
JP2017069313A (ja) | 2015-09-29 | 2017-04-06 | 株式会社日立国際電気 | 半導体装置の製造方法、基板処理装置、ガス供給システムおよびプログラム |
JP6163524B2 (ja) | 2015-09-30 | 2017-07-12 | 株式会社日立国際電気 | 半導体装置の製造方法、基板処理装置およびプログラム |
KR102395997B1 (ko) | 2015-09-30 | 2022-05-10 | 삼성전자주식회사 | 자기 저항 메모리 소자 및 그 제조 방법 |
US10118828B2 (en) * | 2015-10-02 | 2018-11-06 | Asm Ip Holding B.V. | Tritertbutyl aluminum reactants for vapor deposition |
WO2017058988A1 (en) | 2015-10-02 | 2017-04-06 | Corning Incorporated | Methods for treating a glass surface to reduce particle adhesion |
US9853101B2 (en) | 2015-10-07 | 2017-12-26 | Taiwan Semiconductor Manufacturing Company, Ltd. | Strained nanowire CMOS device and method of forming |
US10695794B2 (en) | 2015-10-09 | 2020-06-30 | Asm Ip Holding B.V. | Vapor phase deposition of organic films |
KR102652337B1 (ko) | 2015-10-09 | 2024-03-29 | 어플라이드 머티어리얼스, 인코포레이티드 | 에피 프로세스들을 위한 웨이퍼 가열을 위한 다이오드 레이저 |
US10228618B2 (en) | 2015-10-13 | 2019-03-12 | Inpria Corporation | Organotin oxide hydroxide patterning compositions, precursors, and patterning |
USD810705S1 (en) | 2016-04-01 | 2018-02-20 | Veeco Instruments Inc. | Self-centering wafer carrier for chemical vapor deposition |
USD819580S1 (en) | 2016-04-01 | 2018-06-05 | Veeco Instruments, Inc. | Self-centering wafer carrier for chemical vapor deposition |
US9909214B2 (en) | 2015-10-15 | 2018-03-06 | Asm Ip Holding B.V. | Method for depositing dielectric film in trenches by PEALD |
TWI740848B (zh) | 2015-10-16 | 2021-10-01 | 荷蘭商Asm智慧財產控股公司 | 實施原子層沉積以得閘極介電質 |
US9941425B2 (en) | 2015-10-16 | 2018-04-10 | Asm Ip Holdings B.V. | Photoactive devices and materials |
US10211308B2 (en) | 2015-10-21 | 2019-02-19 | Asm Ip Holding B.V. | NbMC layers |
JP6464990B2 (ja) | 2015-10-21 | 2019-02-06 | 東京エレクトロン株式会社 | 縦型熱処理装置 |
CN108140555B (zh) | 2015-10-22 | 2024-03-15 | 应用材料公司 | 沉积包含SiO及SiN的可流动薄膜的方法 |
KR102424720B1 (ko) | 2015-10-22 | 2022-07-25 | 삼성전자주식회사 | 수직형 메모리 장치 및 이의 제조 방법 |
US10358721B2 (en) | 2015-10-22 | 2019-07-23 | Asm Ip Holding B.V. | Semiconductor manufacturing system including deposition apparatus |
US20180312966A1 (en) | 2015-10-23 | 2018-11-01 | Applied Materials, Inc. | Methods For Spatial Metal Atomic Layer Deposition |
CN105253917B (zh) | 2015-10-28 | 2017-07-28 | 昆明理工大学 | 一种化学气相沉积金属铼用前驱体的制备方法 |
USD800782S1 (en) | 2015-11-09 | 2017-10-24 | Eaton Corporation | Drive plate |
US10322384B2 (en) | 2015-11-09 | 2019-06-18 | Asm Ip Holding B.V. | Counter flow mixer for process chamber |
US9455138B1 (en) | 2015-11-10 | 2016-09-27 | Asm Ip Holding B.V. | Method for forming dielectric film in trenches by PEALD using H-containing gas |
US9786492B2 (en) | 2015-11-12 | 2017-10-10 | Asm Ip Holding B.V. | Formation of SiOCN thin films |
US9786491B2 (en) | 2015-11-12 | 2017-10-10 | Asm Ip Holding B.V. | Formation of SiOCN thin films |
USD787458S1 (en) | 2015-11-18 | 2017-05-23 | Asm Ip Holding B.V. | Gas supply plate for semiconductor manufacturing apparatus |
US9996004B2 (en) | 2015-11-20 | 2018-06-12 | Lam Research Corporation | EUV photopatterning of vapor-deposited metal oxide-containing hardmasks |
WO2017091345A1 (en) | 2015-11-25 | 2017-06-01 | Applied Materials, Inc. | New materials for tensile stress and low contact resistance and method of forming |
CN114999968A (zh) | 2015-11-27 | 2022-09-02 | 株式会社国际电气 | 衬底处理装置、衬底搬送系统、半导体器件的制造方法及记录介质 |
US9905420B2 (en) | 2015-12-01 | 2018-02-27 | Asm Ip Holding B.V. | Methods of forming silicon germanium tin films and structures and devices including the films |
US20170167023A1 (en) | 2015-12-09 | 2017-06-15 | Lam Research Corporation | Silicon or silicon carbide gas injector for substrate processing systems |
JP6613864B2 (ja) | 2015-12-14 | 2019-12-04 | Tdk株式会社 | ミニエンバイロメント装置 |
US10332767B2 (en) | 2015-12-17 | 2019-06-25 | Asm Ip Holding B.V. | Substrate transport device and substrate processing apparatus |
KR102423818B1 (ko) | 2015-12-18 | 2022-07-21 | 삼성전자주식회사 | 정전척 어셈블리 및 그를 포함하는 반도체 제조장치, 그리고 정전척 온도 측정방법 |
US20170178899A1 (en) | 2015-12-18 | 2017-06-22 | Lam Research Corporation | Directional deposition on patterned structures |
US11257929B2 (en) | 2015-12-18 | 2022-02-22 | Intel Corporation | Stacked transistors |
TWI716511B (zh) | 2015-12-19 | 2021-01-21 | 美商應用材料股份有限公司 | 用於鎢原子層沉積製程作為成核層之正形非晶矽 |
US10087547B2 (en) | 2015-12-21 | 2018-10-02 | The Regents Of The University Of California | Growth of single crystal III-V semiconductors on amorphous substrates |
US9607837B1 (en) | 2015-12-21 | 2017-03-28 | Asm Ip Holding B.V. | Method for forming silicon oxide cap layer for solid state diffusion process |
CH711990A2 (de) | 2015-12-22 | 2017-06-30 | Interglass Tech Ag | Vakuumbeschichtungsanlage zum Beschichten von Linsen. |
AT518081B1 (de) | 2015-12-22 | 2017-07-15 | Sico Tech Gmbh | Injektor aus Silizium für die Halbleiterindustrie |
US9735024B2 (en) | 2015-12-28 | 2017-08-15 | Asm Ip Holding B.V. | Method of atomic layer etching using functional group-containing fluorocarbon |
US9633838B2 (en) | 2015-12-28 | 2017-04-25 | L'Air Liquide, Société Anonyme pour l'Etude et l'Exploitation des Procédés Georges Claude | Vapor deposition of silicon-containing films using penta-substituted disilanes |
US9627221B1 (en) | 2015-12-28 | 2017-04-18 | Asm Ip Holding B.V. | Continuous process incorporating atomic layer etching |
US11139308B2 (en) | 2015-12-29 | 2021-10-05 | Asm Ip Holding B.V. | Atomic layer deposition of III-V compounds to form V-NAND devices |
US20170191685A1 (en) | 2015-12-30 | 2017-07-06 | Lam Research Corporation | Self-sustained in-situ thermal control apparatus |
US10415137B2 (en) | 2016-01-01 | 2019-09-17 | Applied Materials, Inc. | Non-metallic thermal CVD/ALD Gas Injector and Purge Systems |
TWD178699S (zh) | 2016-01-08 | 2016-10-01 | ASM知識產權私人控股有	 | 用於半導體製造設備的氣體分散板 |
TWD178424S (zh) | 2016-01-08 | 2016-09-21 | ASM知識產權私人控股有	 | 用於半導體製造設備的氣流控制板 |
TWD178698S (zh) | 2016-01-08 | 2016-10-01 | ASM知識產權私人控股有	 | 用於半導體製造設備的反應器外壁 |
TWD178425S (zh) | 2016-01-08 | 2016-09-21 | ASM知識產權私人控股有	 | 用於半導體製造設備的電極板 |
US9412648B1 (en) | 2016-01-11 | 2016-08-09 | Taiwan Semiconductor Manufacturing Company, Ltd. | Via patterning using multiple photo multiple etch |
KR102684670B1 (ko) | 2016-01-19 | 2024-07-15 | 스미토모 오사카 세멘토 가부시키가이샤 | 정전 척 장치 |
DE102016100963A1 (de) | 2016-01-21 | 2017-07-27 | Knorr-Bremse Systeme für Schienenfahrzeuge GmbH | Luftversorgungsanlage |
US20170213960A1 (en) | 2016-01-26 | 2017-07-27 | Arm Ltd. | Fabrication and operation of correlated electron material devices |
KR20170090194A (ko) | 2016-01-28 | 2017-08-07 | 삼성전자주식회사 | 복수 개의 가스 배출관 들 및 가스 센서들을 가진 반도체 소자 제조 설비 |
US10153351B2 (en) | 2016-01-29 | 2018-12-11 | Taiwan Semiconductor Manufacturing Co., Ltd. | Semiconductor device and a method for fabricating the same |
US9496225B1 (en) | 2016-02-08 | 2016-11-15 | International Business Machines Corporation | Recessed metal liner contact with copper fill |
US10865477B2 (en) | 2016-02-08 | 2020-12-15 | Illinois Tool Works Inc. | Method and system for the localized deposit of metal on a surface |
US9570302B1 (en) | 2016-02-10 | 2017-02-14 | Taiwan Semiconductor Manufacturing Co., Ltd. | Method of patterning a material layer |
US10364497B2 (en) | 2016-02-11 | 2019-07-30 | Intermolecular, Inc. | Vapor based site-isolated processing systems and methods |
CA2920646A1 (en) | 2016-02-12 | 2017-08-12 | Seastar Chemicals Inc. | Organometallic compound and method |
JP6538582B2 (ja) | 2016-02-15 | 2019-07-03 | 株式会社Kokusai Electric | 基板処理装置、半導体装置の製造方法およびプログラム |
US9754779B1 (en) | 2016-02-19 | 2017-09-05 | Asm Ip Holding B.V. | Method for forming silicon nitride film selectively on sidewalls or flat surfaces of trenches |
US10468251B2 (en) | 2016-02-19 | 2019-11-05 | Asm Ip Holding B.V. | Method for forming spacers using silicon nitride film for spacer-defined multiple patterning |
US10529554B2 (en) | 2016-02-19 | 2020-01-07 | Asm Ip Holding B.V. | Method for forming silicon nitride film selectively on sidewalls or flat surfaces of trenches |
US10995405B2 (en) | 2016-02-19 | 2021-05-04 | Merck Patent Gmbh | Deposition of molybdenum thin films using a molybdenum carbonyl precursor |
US9666528B1 (en) | 2016-02-23 | 2017-05-30 | International Business Machines Corporation | BEOL vertical fuse formed over air gap |
US9748145B1 (en) | 2016-02-29 | 2017-08-29 | Globalfoundries Inc. | Semiconductor devices with varying threshold voltage and fabrication methods thereof |
USD855089S1 (en) | 2016-02-29 | 2019-07-30 | Moldman Systems Llc | Mixer assembly |
JP6240695B2 (ja) | 2016-03-02 | 2017-11-29 | 株式会社日立国際電気 | 基板処理装置、半導体装置の製造方法及びプログラム |
US10073342B2 (en) | 2016-03-04 | 2018-09-11 | Micron Technology, Inc. | Method of forming patterns |
US10018920B2 (en) | 2016-03-04 | 2018-07-10 | Taiwan Semiconductor Manufacturing Co., Ltd. | Lithography patterning with a gas phase resist |
WO2017155808A1 (en) | 2016-03-07 | 2017-09-14 | Sunedison Semiconductor Limited | Semiconductor on insulator structure comprising a plasma nitride layer and method of manufacture thereof |
US10501866B2 (en) | 2016-03-09 | 2019-12-10 | Asm Ip Holding B.V. | Gas distribution apparatus for improved film uniformity in an epitaxial system |
KR102293218B1 (ko) | 2016-03-13 | 2021-08-23 | 어플라이드 머티어리얼스, 인코포레이티드 | 스페이서 애플리케이션들을 위한 실리콘 질화물 막들의 선택적 증착 |
CN108778739B (zh) | 2016-03-13 | 2021-07-16 | 应用材料公司 | 用于选择性干式蚀刻的方法及设备 |
KR20170107323A (ko) | 2016-03-15 | 2017-09-25 | 연세대학교 산학협력단 | 전이금속 칼코겐 화합물 합금 및 그의 제조방법 |
CN205448240U (zh) | 2016-03-15 | 2016-08-10 | 核工业理化工程研究院华核新技术开发公司 | 一种高效型移动式自循环核级空气净化器 |
US10134672B2 (en) | 2016-03-15 | 2018-11-20 | Toshiba Memory Corporation | Semiconductor memory device having a stepped structure and contact wirings formed thereon |
KR102632725B1 (ko) | 2016-03-17 | 2024-02-05 | 에이에스엠 아이피 홀딩 비.브이. | 기판 지지 플레이트 및 이를 포함하는 박막 증착 장치 및 박막 증착 방법 |
JP6690496B2 (ja) | 2016-03-17 | 2020-04-28 | 東京エレクトロン株式会社 | 成膜方法及び成膜装置 |
US10343920B2 (en) | 2016-03-18 | 2019-07-09 | Asm Ip Holding B.V. | Aligned carbon nanotubes |
KR101758892B1 (ko) | 2016-03-18 | 2017-07-17 | 정예호 | 고효율 저소음용 미니 청소기 |
US9837355B2 (en) | 2016-03-22 | 2017-12-05 | International Business Machines Corporation | Method for maximizing air gap in back end of the line interconnect through via landing modification |
JP6576277B2 (ja) | 2016-03-23 | 2019-09-18 | 東京エレクトロン株式会社 | 窒化膜の形成方法 |
US9892913B2 (en) | 2016-03-24 | 2018-02-13 | Asm Ip Holding B.V. | Radial and thickness control via biased multi-port injection settings |
USD807494S1 (en) | 2016-03-24 | 2018-01-09 | Lg Electronics Inc. | Cover for air purifier with humidifier |
CN111627807B (zh) | 2016-03-28 | 2023-08-29 | 株式会社日立高新技术 | 等离子处理方法以及等离子处理装置 |
US9957192B2 (en) | 2016-03-29 | 2018-05-01 | Applied Materials, Inc. | Low temperature fluoride glasses and glazes |
JP6566904B2 (ja) | 2016-03-29 | 2019-08-28 | 東京エレクトロン株式会社 | 基板処理装置 |
US10573540B2 (en) | 2016-03-30 | 2020-02-25 | Shibaura Mechatronics Corporation | Substrate processing apparatus and substrate processing method |
US20190058043A1 (en) | 2016-03-30 | 2019-02-21 | Intel Corporation | Transistor gate-channel arrangements |
JP6608753B2 (ja) | 2016-03-31 | 2019-11-20 | 株式会社ノリタケカンパニーリミテド | PdRu合金電極材料およびその製造方法 |
KR20180130548A (ko) | 2016-04-01 | 2018-12-07 | 쓰리엠 이노베이티브 프로퍼티즈 캄파니 | 롤-투-롤 원자 층 침착 장치 및 방법 |
USD793526S1 (en) | 2016-04-08 | 2017-08-01 | Applied Materials, Inc. | Showerhead for a semiconductor processing chamber |
USD794753S1 (en) | 2016-04-08 | 2017-08-15 | Applied Materials, Inc. | Showerhead for a semiconductor processing chamber |
JP6095825B2 (ja) | 2016-04-08 | 2017-03-15 | 株式会社日立国際電気 | 基板処理装置および半導体装置の製造方法 |
US10224238B2 (en) | 2016-04-12 | 2019-03-05 | Apple Inc. | Electrical components having metal traces with protected sidewalls |
US10049913B2 (en) | 2016-04-12 | 2018-08-14 | Tokyo Electron Limited | Methods for SiO2 filling of fine recessed features and selective SiO2 deposition on catalytic surfaces |
US10388492B2 (en) | 2016-04-14 | 2019-08-20 | Fm Industries, Inc. | Coated semiconductor processing members having chlorine and fluorine plasma erosion resistance and complex oxide coatings therefor |
US10204782B2 (en) | 2016-04-18 | 2019-02-12 | Imec Vzw | Combined anneal and selective deposition process |
US10865475B2 (en) | 2016-04-21 | 2020-12-15 | Asm Ip Holding B.V. | Deposition of metal borides and silicides |
US10190213B2 (en) | 2016-04-21 | 2019-01-29 | Asm Ip Holding B.V. | Deposition of metal borides |
US10087522B2 (en) | 2016-04-21 | 2018-10-02 | Asm Ip Holding B.V. | Deposition of metal borides |
KR102457649B1 (ko) | 2016-04-22 | 2022-10-20 | 어플라이드 머티어리얼스, 인코포레이티드 | 플라즈마 한정 피쳐들을 갖는 기판 지지 페디스털 |
US10438860B2 (en) | 2016-04-22 | 2019-10-08 | Applied Materials, Inc. | Dynamic wafer leveling/tilting/swiveling steps for use during a chemical vapor deposition process |
US11326253B2 (en) | 2016-04-27 | 2022-05-10 | Applied Materials, Inc. | Atomic layer deposition of protective coatings for semiconductor process chamber components |
KR101820237B1 (ko) | 2016-04-29 | 2018-01-19 | 한양대학교 산학협력단 | 가압식 금속 단원자층 제조 방법, 금속 단원자층 구조체 및 가압식 금속 단원자층 제조 장치 |
US10367080B2 (en) | 2016-05-02 | 2019-07-30 | Asm Ip Holding B.V. | Method of forming a germanium oxynitride film |
US10032628B2 (en) | 2016-05-02 | 2018-07-24 | Asm Ip Holding B.V. | Source/drain performance through conformal solid state doping |
KR102378021B1 (ko) | 2016-05-06 | 2022-03-23 | 에이에스엠 아이피 홀딩 비.브이. | SiOC 박막의 형성 |
US10115586B2 (en) | 2016-05-08 | 2018-10-30 | Tokyo Electron Limited | Method for depositing a planarization layer using polymerization chemical vapor deposition |
KR102592471B1 (ko) | 2016-05-17 | 2023-10-20 | 에이에스엠 아이피 홀딩 비.브이. | 금속 배선 형성 방법 및 이를 이용한 반도체 장치의 제조 방법 |
US9680268B1 (en) | 2016-05-18 | 2017-06-13 | Itt Manufacturing Enterprises Llc | Genderless electrical connectors |
US10504754B2 (en) | 2016-05-19 | 2019-12-10 | Applied Materials, Inc. | Systems and methods for improved semiconductor etching and component protection |
US10522371B2 (en) | 2016-05-19 | 2019-12-31 | Applied Materials, Inc. | Systems and methods for improved semiconductor etching and component protection |
USD849662S1 (en) | 2016-05-21 | 2019-05-28 | Worthington Industries, Inc. | Cylinder support system |
US9987747B2 (en) | 2016-05-24 | 2018-06-05 | Semes Co., Ltd. | Stocker for receiving cassettes and method of teaching a stocker robot disposed therein |
US11453943B2 (en) | 2016-05-25 | 2022-09-27 | Asm Ip Holding B.V. | Method for forming carbon-containing silicon/metal oxide or nitride film by ALD using silicon precursor and hydrocarbon precursor |
JP7008918B2 (ja) | 2016-05-29 | 2022-01-25 | 東京エレクトロン株式会社 | 選択的窒化シリコンエッチングの方法 |
US10373820B2 (en) | 2016-06-01 | 2019-08-06 | Asm Ip Holding B.V. | Deposition of organic films |
WO2017209901A2 (en) | 2016-06-03 | 2017-12-07 | Applied Materials, Inc. | Substrate distance monitoring |
KR102326377B1 (ko) | 2016-06-07 | 2021-11-15 | 가부시키가이샤 코쿠사이 엘렉트릭 | 기판 처리 장치, 반도체 장치의 제조 방법 및 프로그램 |
JP2017220011A (ja) | 2016-06-07 | 2017-12-14 | 株式会社神戸製鋼所 | 積層膜、表示装置及び入力装置 |
CN106011785B (zh) | 2016-06-07 | 2018-10-16 | 上海纳米技术及应用国家工程研究中心有限公司 | 一种原子层沉积制备高均匀性Nb掺杂TiO2透明导电薄膜的方法 |
US10002958B2 (en) | 2016-06-08 | 2018-06-19 | The United States Of America, As Represented By The Secretary Of The Navy | Diamond on III-nitride device |
US10354873B2 (en) | 2016-06-08 | 2019-07-16 | Tokyo Electron Limited | Organic mandrel protection process |
US10014212B2 (en) | 2016-06-08 | 2018-07-03 | Asm Ip Holding B.V. | Selective deposition of metallic films |
US20170358445A1 (en) | 2016-06-13 | 2017-12-14 | Gvd Corporation | Methods for plasma depositing polymers comprising cyclic siloxanes and related compositions and articles |
USD785766S1 (en) | 2016-06-15 | 2017-05-02 | Asm Ip Holding B.V. | Shower plate |
JP6585551B2 (ja) | 2016-06-15 | 2019-10-02 | 株式会社Kokusai Electric | 半導体装置の製造方法、基板処理装置、およびプログラム |
US9850573B1 (en) | 2016-06-23 | 2017-12-26 | Applied Materials, Inc. | Non-line of sight deposition of erbium based plasma resistant ceramic coating |
US20170372919A1 (en) | 2016-06-25 | 2017-12-28 | Applied Materials, Inc. | Flowable Amorphous Silicon Films For Gapfill Applications |
US10388509B2 (en) | 2016-06-28 | 2019-08-20 | Asm Ip Holding B.V. | Formation of epitaxial layers via dislocation filtering |
US10217863B2 (en) | 2016-06-28 | 2019-02-26 | International Business Machines Corporation | Fabrication of a vertical fin field effect transistor with an asymmetric gate structure |
US9824893B1 (en) | 2016-06-28 | 2017-11-21 | Lam Research Corporation | Tin oxide thin film spacers in semiconductor device manufacturing |
CN117855106A (zh) | 2016-06-30 | 2024-04-09 | 株式会社国际电气 | 衬底处理装置、半导体器件的制造方法及记录介质 |
US20160315168A1 (en) | 2016-06-30 | 2016-10-27 | L'Air Liquide, Société Anonyme pour l'Etude et l'Exploitation des Procédés Georges Claude | Process for forming gate insulators for tft structures |
US20160314962A1 (en) | 2016-06-30 | 2016-10-27 | American Air Liquide, Inc. | Cyclic organoaminosilane precursors for forming silicon-containing films and methods of using the same |
US10062563B2 (en) | 2016-07-01 | 2018-08-28 | Lam Research Corporation | Selective atomic layer deposition with post-dose treatment |
KR102165711B1 (ko) | 2016-07-05 | 2020-10-14 | 가부시키가이샤 코쿠사이 엘렉트릭 | 기판 처리 장치, 가스 노즐 및 반도체 장치의 제조 방법 |
USD829306S1 (en) | 2016-07-06 | 2018-09-25 | Asm Ip Holding B.V. | Shower plate |
US9812319B1 (en) | 2016-07-06 | 2017-11-07 | Asm Ip Holding B.V. | Method for forming film filled in trench without seam or void |
KR102576702B1 (ko) | 2016-07-06 | 2023-09-08 | 삼성전자주식회사 | 증착 공정 모니터링 시스템, 및 그 시스템을 이용한 증착 공정 제어방법과 반도체 소자 제조방법 |
US9859151B1 (en) | 2016-07-08 | 2018-01-02 | Asm Ip Holding B.V. | Selective film deposition method to form air gaps |
US10612137B2 (en) | 2016-07-08 | 2020-04-07 | Asm Ip Holdings B.V. | Organic reactants for atomic layer deposition |
EP3267187B1 (en) | 2016-07-08 | 2020-04-15 | Volvo Car Corporation | Silicon carbide based field effect gas sensor for high temperature applications |
USD793352S1 (en) | 2016-07-11 | 2017-08-01 | Asm Ip Holding B.V. | Getter plate |
US9793135B1 (en) | 2016-07-14 | 2017-10-17 | ASM IP Holding B.V | Method of cyclic dry etching using etchant film |
CN109661481B (zh) | 2016-07-14 | 2021-11-30 | 恩特格里斯公司 | 使用MoOC14的CVD Mo沉积 |
CN109477214A (zh) | 2016-07-19 | 2019-03-15 | 应用材料公司 | 可流动含硅膜的沉积 |
US10714385B2 (en) | 2016-07-19 | 2020-07-14 | Asm Ip Holding B.V. | Selective deposition of tungsten |
US9799736B1 (en) | 2016-07-20 | 2017-10-24 | International Business Machines Corporation | High acceptor level doping in silicon germanium |
JP6616258B2 (ja) | 2016-07-26 | 2019-12-04 | 株式会社Kokusai Electric | 基板処理装置、蓋部カバーおよび半導体装置の製造方法 |
US20180033614A1 (en) | 2016-07-27 | 2018-02-01 | Versum Materials Us, Llc | Compositions and Methods Using Same for Carbon Doped Silicon Containing Films |
KR102354490B1 (ko) | 2016-07-27 | 2022-01-21 | 에이에스엠 아이피 홀딩 비.브이. | 기판 처리 방법 |
US10177025B2 (en) | 2016-07-28 | 2019-01-08 | Asm Ip Holding B.V. | Method and apparatus for filling a gap |
US9887082B1 (en) | 2016-07-28 | 2018-02-06 | Asm Ip Holding B.V. | Method and apparatus for filling a gap |
US10395919B2 (en) | 2016-07-28 | 2019-08-27 | Asm Ip Holding B.V. | Method and apparatus for filling a gap |
US9812320B1 (en) | 2016-07-28 | 2017-11-07 | Asm Ip Holding B.V. | Method and apparatus for filling a gap |
KR102532607B1 (ko) | 2016-07-28 | 2023-05-15 | 에이에스엠 아이피 홀딩 비.브이. | 기판 가공 장치 및 그 동작 방법 |
US10347547B2 (en) | 2016-08-09 | 2019-07-09 | Lam Research Corporation | Suppressing interfacial reactions by varying the wafer temperature throughout deposition |
EP3282037B1 (en) | 2016-08-09 | 2022-12-07 | IMEC vzw | Formation of a transition metal nitride |
US9865456B1 (en) | 2016-08-12 | 2018-01-09 | Micron Technology, Inc. | Methods of forming silicon nitride by atomic layer deposition and methods of forming semiconductor structures |
US10573522B2 (en) | 2016-08-16 | 2020-02-25 | Lam Research Corporation | Method for preventing line bending during metal fill process |
KR102429608B1 (ko) | 2016-08-17 | 2022-08-04 | 삼성전자주식회사 | 반도체 장치 및 그 제조 방법 |
KR102613349B1 (ko) | 2016-08-25 | 2023-12-14 | 에이에스엠 아이피 홀딩 비.브이. | 배기 장치 및 이를 이용한 기판 가공 장치와 박막 제조 방법 |
CA2974387A1 (en) | 2016-08-30 | 2018-02-28 | Rolls-Royce Corporation | Swirled flow chemical vapor deposition |
US10229851B2 (en) | 2016-08-30 | 2019-03-12 | International Business Machines Corporation | Self-forming barrier for use in air gap formation |
US10468244B2 (en) | 2016-08-30 | 2019-11-05 | Versum Materials Us, Llc | Precursors and flowable CVD methods for making low-K films to fill surface features |
TW201825623A (zh) | 2016-08-30 | 2018-07-16 | 美商康寧公司 | 用於片材接合的矽氧烷電漿聚合物 |
US10037884B2 (en) | 2016-08-31 | 2018-07-31 | Lam Research Corporation | Selective atomic layer deposition for gapfill using sacrificial underlayer |
US10273575B2 (en) | 2016-08-31 | 2019-04-30 | Kennametal Inc. | Composite refractory coatings and applications thereof |
US10090316B2 (en) | 2016-09-01 | 2018-10-02 | Asm Ip Holding B.V. | 3D stacked multilayer semiconductor memory using doped select transistor channel |
US10269714B2 (en) | 2016-09-06 | 2019-04-23 | International Business Machines Corporation | Low resistance contacts including intermetallic alloy of nickel, platinum, titanium, aluminum and type IV semiconductor elements |
US9865455B1 (en) | 2016-09-07 | 2018-01-09 | Lam Research Corporation | Nitride film formed by plasma-enhanced and thermal atomic layer deposition process |
AU201711335S (en) | 2016-09-08 | 2017-03-29 | Battlemax Pty Ltd | Suction Cover |
JP6710130B2 (ja) | 2016-09-13 | 2020-06-17 | 東京エレクトロン株式会社 | 基板処理装置 |
JP6456893B2 (ja) * | 2016-09-26 | 2019-01-23 | 株式会社Kokusai Electric | 半導体装置の製造方法、記録媒体および基板処理装置 |
JP6710134B2 (ja) | 2016-09-27 | 2020-06-17 | 東京エレクトロン株式会社 | ガス導入機構及び処理装置 |
JP6270952B1 (ja) | 2016-09-28 | 2018-01-31 | 株式会社日立国際電気 | 基板処理装置、半導体装置の製造方法および記録媒体。 |
KR102600998B1 (ko) | 2016-09-28 | 2023-11-13 | 삼성전자주식회사 | 반도체 장치 |
JP6550029B2 (ja) | 2016-09-28 | 2019-07-24 | 株式会社Kokusai Electric | 基板処理装置、ノズル基部および半導体装置の製造方法 |
US9847221B1 (en) | 2016-09-29 | 2017-12-19 | Lam Research Corporation | Low temperature formation of high quality silicon oxide films in semiconductor device manufacturing |
US10876205B2 (en) | 2016-09-30 | 2020-12-29 | Asm Ip Holding B.V. | Reactant vaporizer and related systems and methods |
US11926894B2 (en) | 2016-09-30 | 2024-03-12 | Asm Ip Holding B.V. | Reactant vaporizer and related systems and methods |
US9997606B2 (en) | 2016-09-30 | 2018-06-12 | International Business Machines Corporation | Fully depleted SOI device for reducing parasitic back gate capacitance |
US10546729B2 (en) | 2016-10-04 | 2020-01-28 | Applied Materials, Inc. | Dual-channel showerhead with improved profile |
FR3057102A1 (fr) | 2016-10-05 | 2018-04-06 | Stmicroelectronics Sa | Procede de depot par epitaxie en phase gazeuse |
US9824884B1 (en) | 2016-10-06 | 2017-11-21 | Lam Research Corporation | Method for depositing metals free ald silicon nitride films using halide-based precursors |
US9842835B1 (en) | 2016-10-10 | 2017-12-12 | International Business Machines Corporation | High density nanosheet diodes |
US10573549B2 (en) | 2016-12-01 | 2020-02-25 | Lam Research Corporation | Pad raising mechanism in wafer positioning pedestal for semiconductor processing |
TWM563652U (zh) | 2016-10-13 | 2018-07-11 | 美商應用材料股份有限公司 | 用於電漿處理裝置的腔室部件及包含其之裝置 |
US10410943B2 (en) | 2016-10-13 | 2019-09-10 | Asm Ip Holding B.V. | Method for passivating a surface of a semiconductor and related systems |
US10643826B2 (en) | 2016-10-26 | 2020-05-05 | Asm Ip Holdings B.V. | Methods for thermally calibrating reaction chambers |
US11532757B2 (en) | 2016-10-27 | 2022-12-20 | Asm Ip Holding B.V. | Deposition of charge trapping layers |
US20170044664A1 (en) | 2016-10-28 | 2017-02-16 | L'Air Liquide, Société Anonyme pour l'Etude et l'Exploitation des Procédés Georges Claude | Hafnium-containing film forming compositions for vapor deposition of hafnium-containing films |
US10714350B2 (en) | 2016-11-01 | 2020-07-14 | ASM IP Holdings, B.V. | Methods for forming a transition metal niobium nitride film on a substrate by atomic layer deposition and related semiconductor device structures |
US10229833B2 (en) | 2016-11-01 | 2019-03-12 | Asm Ip Holding B.V. | Methods for forming a transition metal nitride film on a substrate by atomic layer deposition and related semiconductor device structures |
US10643904B2 (en) | 2016-11-01 | 2020-05-05 | Asm Ip Holdings B.V. | Methods for forming a semiconductor device and related semiconductor device structures |
US10435790B2 (en) | 2016-11-01 | 2019-10-08 | Asm Ip Holding B.V. | Method of subatmospheric plasma-enhanced ALD using capacitively coupled electrodes with narrow gap |
CN206145834U (zh) | 2016-11-01 | 2017-05-03 | 深圳信息职业技术学院 | 一种可移动式空气净化装置 |
US10134757B2 (en) | 2016-11-07 | 2018-11-20 | Asm Ip Holding B.V. | Method of processing a substrate and a device manufactured by using the method |
KR101840378B1 (ko) | 2016-11-09 | 2018-03-21 | 한국화학연구원 | 올레핀 복분해 반응용 촉매 및 이의 제조방법 |
JP6737139B2 (ja) | 2016-11-14 | 2020-08-05 | 東京エレクトロン株式会社 | ガスインジェクタ、及び縦型熱処理装置 |
US10134579B2 (en) | 2016-11-14 | 2018-11-20 | Lam Research Corporation | Method for high modulus ALD SiO2 spacer |
KR102546317B1 (ko) | 2016-11-15 | 2023-06-21 | 에이에스엠 아이피 홀딩 비.브이. | 기체 공급 유닛 및 이를 포함하는 기판 처리 장치 |
KR102147174B1 (ko) | 2016-11-18 | 2020-08-28 | 가부시키가이샤 코쿠사이 엘렉트릭 | 기판 처리 장치, 반응관 구조 및 반도체 장치의 제조 방법 |
JP6804270B2 (ja) | 2016-11-21 | 2020-12-23 | 東京エレクトロン株式会社 | 基板処理装置、および基板処理方法 |
US20180148832A1 (en) | 2016-11-25 | 2018-05-31 | Applied Materials, Inc. | Methods for depositing flowable carbon films using hot wire chemical vapor deposition |
US9991277B1 (en) | 2016-11-28 | 2018-06-05 | Sandisk Technologies Llc | Three-dimensional memory device with discrete self-aligned charge storage elements and method of making thereof |
US10340135B2 (en) | 2016-11-28 | 2019-07-02 | Asm Ip Holding B.V. | Method of topologically restricted plasma-enhanced cyclic deposition of silicon or metal nitride |
US10186420B2 (en) | 2016-11-29 | 2019-01-22 | Asm Ip Holding B.V. | Formation of silicon-containing thin films |
US11761084B2 (en) | 2016-12-02 | 2023-09-19 | Asm Ip Holding B.V. | Substrate processing apparatus and method of processing substrate |
US10619242B2 (en) | 2016-12-02 | 2020-04-14 | Asm Ip Holding B.V. | Atomic layer deposition of rhenium containing thin films |
JP6824717B2 (ja) | 2016-12-09 | 2021-02-03 | 東京エレクトロン株式会社 | SiC膜の成膜方法 |
US10192734B2 (en) | 2016-12-11 | 2019-01-29 | L'Air Liquide, Société Anonyme pour l'Etude et l'Exploration des Procédés Georges Claude | Short inorganic trisilylamine-based polysilazanes for thin film deposition |
KR20180068582A (ko) | 2016-12-14 | 2018-06-22 | 에이에스엠 아이피 홀딩 비.브이. | 기판 처리 장치 |
US10604841B2 (en) | 2016-12-14 | 2020-03-31 | Lam Research Corporation | Integrated showerhead with thermal control for delivering radical and precursor gas to a downstream chamber to enable remote plasma film deposition |
US20190273133A1 (en) | 2016-12-14 | 2019-09-05 | Intel Corporation | Transistor source/drain amorphous interlayer arrangements |
USD834686S1 (en) | 2016-12-15 | 2018-11-27 | Asm Ip Holding B.V. | Shower plate |
US10801106B2 (en) | 2016-12-15 | 2020-10-13 | Asm Ip Holding B.V. | Shower plate structure for exhausting deposition inhibiting gas |
CN108227412A (zh) | 2016-12-15 | 2018-06-29 | Imec 非营利协会 | 光刻掩模层 |
US9916980B1 (en) | 2016-12-15 | 2018-03-13 | Asm Ip Holding B.V. | Method of forming a structure on a substrate |
US11581186B2 (en) | 2016-12-15 | 2023-02-14 | Asm Ip Holding B.V. | Sequential infiltration synthesis apparatus |
US11447861B2 (en) | 2016-12-15 | 2022-09-20 | Asm Ip Holding B.V. | Sequential infiltration synthesis apparatus and a method of forming a patterned structure |
US10591078B2 (en) | 2016-12-15 | 2020-03-17 | The Boeing Company | Fluid flow control device |
CN110050328A (zh) | 2016-12-15 | 2019-07-23 | Asm Ip控股有限公司 | 半导体处理设备 |
US9960033B1 (en) | 2016-12-16 | 2018-05-01 | Asm Ip Holding B.V. | Method of depositing and etching Si-containing film |
KR20180070971A (ko) | 2016-12-19 | 2018-06-27 | 에이에스엠 아이피 홀딩 비.브이. | 기판 처리 장치 |
US20180174801A1 (en) | 2016-12-21 | 2018-06-21 | Ulvac Technologies, Inc. | Apparatuses and methods for surface treatment |
US10269558B2 (en) | 2016-12-22 | 2019-04-23 | Asm Ip Holding B.V. | Method of forming a structure on a substrate |
JP6862821B2 (ja) | 2016-12-26 | 2021-04-21 | 東京エレクトロン株式会社 | 成膜装置、成膜方法及び断熱部材 |
US10867788B2 (en) | 2016-12-28 | 2020-12-15 | Asm Ip Holding B.V. | Method of forming a structure on a substrate |
US20180187303A1 (en) | 2016-12-30 | 2018-07-05 | L'air Liquide, Societe Anonyme Pour L'etude Et L'exploitation Des Procedes Georges Claude | Lanthanide precursors and deposition of lanthanide-containing films using the same |
US10049426B2 (en) | 2017-01-03 | 2018-08-14 | Qualcomm Incorporated | Draw call visibility stream |
US11390950B2 (en) | 2017-01-10 | 2022-07-19 | Asm Ip Holding B.V. | Reactor system and method to reduce residue buildup during a film deposition process |
WO2018136652A1 (en) | 2017-01-18 | 2018-07-26 | Tokyo Electron Limited | Method of preferential silicon nitride etching using sulfur hexafluoride |
US10186400B2 (en) | 2017-01-20 | 2019-01-22 | Applied Materials, Inc. | Multi-layer plasma resistant coating by atomic layer deposition |
JP1584906S (zh) | 2017-01-31 | 2017-08-28 | ||
JP1584241S (zh) | 2017-01-31 | 2017-08-21 | ||
US10822458B2 (en) | 2017-02-08 | 2020-11-03 | Versum Materials Us, Llc | Organoamino-functionalized linear and cyclic oligosiloxanes for deposition of silicon-containing films |
US10655221B2 (en) | 2017-02-09 | 2020-05-19 | Asm Ip Holding B.V. | Method for depositing oxide film by thermal ALD and PEALD |
US10468261B2 (en) | 2017-02-15 | 2019-11-05 | Asm Ip Holding B.V. | Methods for forming a metallic film on a substrate by cyclical deposition and related semiconductor device structures |
JP2018133471A (ja) | 2017-02-16 | 2018-08-23 | 漢民科技股▲分▼有限公司 | 気相成膜装置 |
CN106895521A (zh) | 2017-03-01 | 2017-06-27 | 大连葆光节能空调设备厂 | 恒温、恒湿、恒净静室内空气系统 |
CA176724S (en) | 2017-03-02 | 2018-07-03 | Ebm Papst Landshut Gmbh | Engine cap |
JP2018148143A (ja) | 2017-03-08 | 2018-09-20 | 株式会社東芝 | シャワープレート、処理装置、及び吐出方法 |
JP6949515B2 (ja) | 2017-03-15 | 2021-10-13 | ソニーセミコンダクタソリューションズ株式会社 | カメラモジュール及びその製造方法、並びに、電子機器 |
US11081337B2 (en) | 2017-03-15 | 2021-08-03 | Versum Materials U.S., LLC | Formulation for deposition of silicon doped hafnium oxide as ferroelectric materials |
US9911595B1 (en) | 2017-03-17 | 2018-03-06 | Lam Research Corporation | Selective growth of silicon nitride |
US10975469B2 (en) | 2017-03-17 | 2021-04-13 | Applied Materials, Inc. | Plasma resistant coating of porous body by atomic layer deposition |
JP6807792B2 (ja) | 2017-03-27 | 2021-01-06 | 東京エレクトロン株式会社 | プラズマ生成方法及びこれを用いたプラズマ処理方法、並びにプラズマ処理装置 |
JP6703496B2 (ja) | 2017-03-27 | 2020-06-03 | 株式会社Kokusai Electric | 基板処理装置、半導体装置の製造方法およびプログラム |
US10629415B2 (en) | 2017-03-28 | 2020-04-21 | Asm Ip Holding B.V. | Substrate processing apparatus and method for processing substrate |
WO2018182572A1 (en) | 2017-03-28 | 2018-10-04 | Intel Corporation | Integrated circuit contact structures |
US10283353B2 (en) | 2017-03-29 | 2019-05-07 | Asm Ip Holding B.V. | Method of reforming insulating film deposited on substrate with recess pattern |
US10529563B2 (en) | 2017-03-29 | 2020-01-07 | Asm Ip Holdings B.V. | Method for forming doped metal oxide films on a substrate by cyclical deposition and related semiconductor device structures |
US10460932B2 (en) | 2017-03-31 | 2019-10-29 | Asm Ip Holding B.V. | Semiconductor device with amorphous silicon filled gaps and methods for forming |
US10103040B1 (en) | 2017-03-31 | 2018-10-16 | Asm Ip Holding B.V. | Apparatus and method for manufacturing a semiconductor device |
USD876504S1 (en) | 2017-04-03 | 2020-02-25 | Asm Ip Holding B.V. | Exhaust flow control ring for semiconductor deposition apparatus |
USD830981S1 (en) | 2017-04-07 | 2018-10-16 | Asm Ip Holding B.V. | Susceptor for semiconductor substrate processing apparatus |
CN118366851A (zh) | 2017-04-10 | 2024-07-19 | 朗姆研究公司 | 含钼的低电阻率的膜 |
US10017856B1 (en) | 2017-04-17 | 2018-07-10 | Applied Materials, Inc. | Flowable gapfill using solvents |
US9984869B1 (en) | 2017-04-17 | 2018-05-29 | Asm Ip Holding B.V. | Method of plasma-assisted cyclic deposition using ramp-down flow of reactant gas |
US10242879B2 (en) | 2017-04-20 | 2019-03-26 | Lam Research Corporation | Methods and apparatus for forming smooth and conformal cobalt film by atomic layer deposition |
KR102457289B1 (ko) | 2017-04-25 | 2022-10-21 | 에이에스엠 아이피 홀딩 비.브이. | 박막 증착 방법 및 반도체 장치의 제조 방법 |
US10319582B2 (en) | 2017-04-27 | 2019-06-11 | Lam Research Corporation | Methods and apparatus for depositing silicon oxide on metal layers |
US10157785B2 (en) | 2017-05-01 | 2018-12-18 | Taiwan Semiconductor Manufacturing Company, Ltd. | Semiconductor device and method |
US11501965B2 (en) | 2017-05-05 | 2022-11-15 | Asm Ip Holding B.V. | Plasma enhanced deposition processes for controlled formation of metal oxide thin films |
US10446393B2 (en) | 2017-05-08 | 2019-10-15 | Asm Ip Holding B.V. | Methods for forming silicon-containing epitaxial layers and related semiconductor device structures |
US10770286B2 (en) | 2017-05-08 | 2020-09-08 | Asm Ip Holdings B.V. | Methods for selectively forming a silicon nitride film on a substrate and related semiconductor device structures |
US10892156B2 (en) | 2017-05-08 | 2021-01-12 | Asm Ip Holding B.V. | Methods for forming a silicon nitride film on a substrate and related semiconductor device structures |
US10443125B2 (en) | 2017-05-10 | 2019-10-15 | Applied Materials, Inc. | Flourination process to create sacrificial oxy-flouride layer |
US20180325414A1 (en) | 2017-05-12 | 2018-11-15 | Tech4Imaging Llc | Electro-magneto volume tomography system and methodology for non-invasive volume tomography |
US20180331117A1 (en) | 2017-05-12 | 2018-11-15 | Sandisk Technologies Llc | Multilevel memory stack structure with tapered inter-tier joint region and methods of making thereof |
KR102684628B1 (ko) | 2017-05-16 | 2024-07-15 | 에이에스엠 아이피 홀딩 비.브이. | 유전체 상에 옥사이드의 선택적 peald |
US10153195B1 (en) | 2017-05-18 | 2018-12-11 | Micron Technology, Inc. | Semiconductor constructions comprising dielectric material |
US10763139B2 (en) | 2017-05-23 | 2020-09-01 | Tokyo Electron Limited | Vacuum transfer module and substrate processing apparatus |
KR102417931B1 (ko) | 2017-05-30 | 2022-07-06 | 에이에스엠 아이피 홀딩 비.브이. | 기판 지지 장치 및 이를 포함하는 기판 처리 장치 |
US10504742B2 (en) | 2017-05-31 | 2019-12-10 | Asm Ip Holding B.V. | Method of atomic layer etching using hydrogen plasma |
US10886123B2 (en) | 2017-06-02 | 2021-01-05 | Asm Ip Holding B.V. | Methods for forming low temperature semiconductor layers and related semiconductor device structures |
WO2018226370A1 (en) | 2017-06-08 | 2018-12-13 | Applied Materials, Inc. | High-density low temperature carbon films for hardmask and other patterning applications |
US10246777B2 (en) | 2017-06-12 | 2019-04-02 | Asm Ip Holding B.V. | Heater block having continuous concavity |
KR102474876B1 (ko) | 2017-06-15 | 2022-12-07 | 삼성전자주식회사 | 텅스텐 전구체 및 이를 이용한 텅스텐 함유막의 형성 방법 |
US12040200B2 (en) | 2017-06-20 | 2024-07-16 | Asm Ip Holding B.V. | Semiconductor processing apparatus and methods for calibrating a semiconductor processing apparatus |
CN109112500B (zh) | 2017-06-22 | 2022-01-28 | 肯纳金属公司 | Cvd复合材料耐火涂层及其应用 |
KR20200022009A (ko) | 2017-06-23 | 2020-03-02 | 메르크 파텐트 게엠베하 | 선택적 필름 성장을 위한 원자층 증착 방법 |
US11306395B2 (en) | 2017-06-28 | 2022-04-19 | Asm Ip Holding B.V. | Methods for depositing a transition metal nitride film on a substrate by atomic layer deposition and related deposition apparatus |
US10361522B2 (en) | 2017-06-29 | 2019-07-23 | Commscope Technologies Llc | Inner contact for coaxial cable |
US10685834B2 (en) | 2017-07-05 | 2020-06-16 | Asm Ip Holdings B.V. | Methods for forming a silicon germanium tin layer and related semiconductor device structures |
TWI794238B (zh) | 2017-07-13 | 2023-03-01 | 荷蘭商Asm智慧財產控股公司 | 於單一加工腔室中自半導體膜移除氧化物及碳之裝置及方法 |
KR20190009245A (ko) | 2017-07-18 | 2019-01-28 | 에이에스엠 아이피 홀딩 비.브이. | 반도체 소자 구조물 형성 방법 및 관련된 반도체 소자 구조물 |
US10541333B2 (en) | 2017-07-19 | 2020-01-21 | Asm Ip Holding B.V. | Method for depositing a group IV semiconductor and related semiconductor device structures |
US11374112B2 (en) | 2017-07-19 | 2022-06-28 | Asm Ip Holding B.V. | Method for depositing a group IV semiconductor and related semiconductor device structures |
US11018002B2 (en) | 2017-07-19 | 2021-05-25 | Asm Ip Holding B.V. | Method for selectively depositing a Group IV semiconductor and related semiconductor device structures |
TWM553518U (zh) | 2017-07-20 | 2017-12-21 | Green Wind Technology Co Ltd | 馬達絕緣結構 |
US10312055B2 (en) | 2017-07-26 | 2019-06-04 | Asm Ip Holding B.V. | Method of depositing film by PEALD using negative bias |
US10605530B2 (en) | 2017-07-26 | 2020-03-31 | Asm Ip Holding B.V. | Assembly of a liner and a flange for a vertical furnace as well as the liner and the vertical furnace |
US10590535B2 (en) | 2017-07-26 | 2020-03-17 | Asm Ip Holdings B.V. | Chemical treatment, deposition and/or infiltration apparatus and method for using the same |
JP6925196B2 (ja) | 2017-07-31 | 2021-08-25 | 東京エレクトロン株式会社 | 処理装置及び処理方法 |
USD859136S1 (en) | 2017-07-31 | 2019-09-10 | Ge Healthcare Bio-Sciences Corp. | Tubing clamp |
USD867867S1 (en) | 2017-07-31 | 2019-11-26 | Ge Healthcare Bio-Sciences Corp. | Tubing clamp |
KR102481410B1 (ko) | 2017-07-31 | 2022-12-26 | 에이에스엠 아이피 홀딩 비.브이. | 기판 처리 장치 |
US10361366B2 (en) | 2017-08-03 | 2019-07-23 | Tokyo Electron Limited | Resistive random accress memory containing a conformal titanium aluminum carbide film and method of making |
TWI815813B (zh) | 2017-08-04 | 2023-09-21 | 荷蘭商Asm智慧財產控股公司 | 用於分配反應腔內氣體的噴頭總成 |
US10692741B2 (en) | 2017-08-08 | 2020-06-23 | Asm Ip Holdings B.V. | Radiation shield |
US10770336B2 (en) | 2017-08-08 | 2020-09-08 | Asm Ip Holding B.V. | Substrate lift mechanism and reactor including same |
US11358113B2 (en) | 2017-08-08 | 2022-06-14 | H Quest Vanguard, Inc. | Non-thermal micro-plasma conversion of hydrocarbons |
US11139191B2 (en) | 2017-08-09 | 2021-10-05 | Asm Ip Holding B.V. | Storage apparatus for storing cassettes for substrates and processing apparatus equipped therewith |
US10249524B2 (en) | 2017-08-09 | 2019-04-02 | Asm Ip Holding B.V. | Cassette holder assembly for a substrate cassette and holding member for use in such assembly |
TWI778102B (zh) | 2017-08-09 | 2022-09-21 | 荷蘭商Asm智慧財產控股公司 | 用於儲存基板用之卡匣的儲存設備及備有其之處理設備 |
US10763108B2 (en) | 2017-08-18 | 2020-09-01 | Lam Research Corporation | Geometrically selective deposition of a dielectric film |
US10236177B1 (en) | 2017-08-22 | 2019-03-19 | ASM IP Holding B.V.. | Methods for depositing a doped germanium tin semiconductor and related semiconductor device structures |
USD900036S1 (en) | 2017-08-24 | 2020-10-27 | Asm Ip Holding B.V. | Heater electrical connector and adapter |
US11830730B2 (en) | 2017-08-29 | 2023-11-28 | Asm Ip Holding B.V. | Layer forming method and apparatus |
US10622236B2 (en) | 2017-08-30 | 2020-04-14 | Taiwan Semiconductor Manufacturing Co., Ltd. | Apparatus and method for handling wafer carrier doors |
US11295980B2 (en) | 2017-08-30 | 2022-04-05 | Asm Ip Holding B.V. | Methods for depositing a molybdenum metal film over a dielectric surface of a substrate by a cyclical deposition process and related semiconductor device structures |
US20190067003A1 (en) | 2017-08-30 | 2019-02-28 | Asm Ip Holding B.V. | Methods for depositing a molybdenum metal film on a dielectric surface of a substrate and related semiconductor device structures |
US11056344B2 (en) | 2017-08-30 | 2021-07-06 | Asm Ip Holding B.V. | Layer forming method |
US20190067014A1 (en) | 2017-08-30 | 2019-02-28 | Asm Ip Holding B.V. | Methods for filling a gap feature on a substrate surface and related semiconductor device structures |
KR102491945B1 (ko) | 2017-08-30 | 2023-01-26 | 에이에스엠 아이피 홀딩 비.브이. | 기판 처리 장치 |
US20190067095A1 (en) | 2017-08-30 | 2019-02-28 | Asm Ip Holding B.V. | Layer forming method |
KR102401446B1 (ko) | 2017-08-31 | 2022-05-24 | 에이에스엠 아이피 홀딩 비.브이. | 기판 처리 장치 |
US10106892B1 (en) | 2017-08-31 | 2018-10-23 | Globalfoundries Inc. | Thermal oxide equivalent low temperature ALD oxide for dual purpose gate oxide and method for producing the same |
US20190078200A1 (en) | 2017-09-08 | 2019-03-14 | Applied Materials, Inc. | Fluorinated rare earth oxide ald coating for chamber productivity enhancement |
US10269559B2 (en) | 2017-09-13 | 2019-04-23 | Lam Research Corporation | Dielectric gapfill of high aspect ratio features utilizing a sacrificial etch cap layer |
EP3682041B1 (en) | 2017-09-14 | 2022-04-20 | Versum Materials US, LLC | Methods for depositing silicon-containing films |
CN107675144A (zh) | 2017-09-15 | 2018-02-09 | 武汉华星光电技术有限公司 | 等离子体增强化学气相沉积装置 |
US10607895B2 (en) | 2017-09-18 | 2020-03-31 | Asm Ip Holdings B.V. | Method for forming a semiconductor device structure comprising a gate fill metal |
KR102074346B1 (ko) | 2017-09-19 | 2020-02-06 | 서울과학기술대학교 산학협력단 | 리모트 플라즈마를 이용한 원자층 증착 시스템 |
EP3460177B1 (en) | 2017-09-21 | 2021-11-10 | AccessESP UK Limited | Stress control cones for downhole electrical power system tubing encapsulated power cables |
KR102630301B1 (ko) | 2017-09-21 | 2024-01-29 | 에이에스엠 아이피 홀딩 비.브이. | 침투성 재료의 순차 침투 합성 방법 처리 및 이를 이용하여 형성된 구조물 및 장치 |
US10844484B2 (en) | 2017-09-22 | 2020-11-24 | Asm Ip Holding B.V. | Apparatus for dispensing a vapor phase reactant to a reaction chamber and related methods |
US10658205B2 (en) | 2017-09-28 | 2020-05-19 | Asm Ip Holdings B.V. | Chemical dispensing apparatus and methods for dispensing a chemical to a reaction chamber |
US10468501B2 (en) | 2017-09-29 | 2019-11-05 | Taiwan Semiconductor Manufacturing Company, Ltd. | Gap-filling germanium through selective bottom-up growth |
US10403504B2 (en) | 2017-10-05 | 2019-09-03 | Asm Ip Holding B.V. | Method for selectively depositing a metallic film on a substrate |
US10319588B2 (en) | 2017-10-10 | 2019-06-11 | Asm Ip Holding B.V. | Method for depositing a metal chalcogenide on a substrate by cyclical deposition |
KR20190042977A (ko) | 2017-10-17 | 2019-04-25 | 삼성전자주식회사 | 반도체 장치의 제조 방법 |
US10923344B2 (en) | 2017-10-30 | 2021-02-16 | Asm Ip Holding B.V. | Methods for forming a semiconductor structure and related semiconductor structures |
US10468530B2 (en) | 2017-11-15 | 2019-11-05 | Taiwan Semiconductor Manufacturing Co., Ltd. | Semiconductor structure with source/drain multi-layer structure and method for forming the same |
US11948810B2 (en) | 2017-11-15 | 2024-04-02 | Taiwan Semiconductor Manufacturing Company, Ltd. | Apparatus for processing substrates or wafers |
US10910262B2 (en) | 2017-11-16 | 2021-02-02 | Asm Ip Holding B.V. | Method of selectively depositing a capping layer structure on a semiconductor device structure |
KR102443047B1 (ko) | 2017-11-16 | 2022-09-14 | 에이에스엠 아이피 홀딩 비.브이. | 기판 처리 장치 방법 및 그에 의해 제조된 장치 |
CN111356785A (zh) | 2017-11-19 | 2020-06-30 | 应用材料公司 | 用于金属氧化物在金属表面上的ald的方法 |
KR20200079339A (ko) | 2017-11-20 | 2020-07-02 | 램 리써치 코포레이션 | 자기 제한 성장 |
US11022879B2 (en) | 2017-11-24 | 2021-06-01 | Asm Ip Holding B.V. | Method of forming an enhanced unexposed photoresist layer |
WO2019103613A1 (en) | 2017-11-27 | 2019-05-31 | Asm Ip Holding B.V. | A storage device for storing wafer cassettes for use with a batch furnace |
KR102633318B1 (ko) | 2017-11-27 | 2024-02-05 | 에이에스엠 아이피 홀딩 비.브이. | 청정 소형 구역을 포함한 장치 |
KR20230169487A (ko) | 2017-12-01 | 2023-12-15 | 어플라이드 머티어리얼스, 인코포레이티드 | 고 에칭 선택성 비정질 탄소 막 |
US10229985B1 (en) | 2017-12-04 | 2019-03-12 | International Business Machines Corporation | Vertical field-effect transistor with uniform bottom spacer |
US10991573B2 (en) | 2017-12-04 | 2021-04-27 | Asm Ip Holding B.V. | Uniform deposition of SiOC on dielectric and metal surfaces |
US10290508B1 (en) | 2017-12-05 | 2019-05-14 | Asm Ip Holding B.V. | Method for forming vertical spacers for spacer-defined patterning |
US11037780B2 (en) | 2017-12-12 | 2021-06-15 | Asm Ip Holding B.V. | Method for manufacturing semiconductor device with helium-containing gas |
US10760158B2 (en) | 2017-12-15 | 2020-09-01 | Lam Research Corporation | Ex situ coating of chamber components for semiconductor processing |
US10903054B2 (en) | 2017-12-19 | 2021-01-26 | Applied Materials, Inc. | Multi-zone gas distribution systems and methods |
US20190189447A1 (en) | 2017-12-19 | 2019-06-20 | Lam Research Corporation | Method for forming square spacers |
US10283565B1 (en) | 2017-12-21 | 2019-05-07 | International Business Machines Corporation | Resistive memory with a plurality of resistive random access memory cells each comprising a transistor and a resistive element |
JP7149068B2 (ja) | 2017-12-21 | 2022-10-06 | 株式会社日立ハイテク | プラズマ処理装置およびプラズマ処理方法 |
US10415899B2 (en) | 2017-12-28 | 2019-09-17 | Asm Ip Holding B.V. | Cooling system, substrate processing system and flow rate adjusting method for cooling medium |
US10204788B1 (en) | 2018-01-01 | 2019-02-12 | United Microelectronics Corp. | Method of forming high dielectric constant dielectric layer by atomic layer deposition |
US11149350B2 (en) | 2018-01-10 | 2021-10-19 | Asm Ip Holding B.V. | Shower plate structure for supplying carrier and dry gas |
US10872771B2 (en) | 2018-01-16 | 2020-12-22 | Asm Ip Holding B. V. | Method for depositing a material film on a substrate within a reaction chamber by a cyclical deposition process and related device structures |
CN111630203A (zh) | 2018-01-19 | 2020-09-04 | Asm Ip私人控股有限公司 | 通过等离子体辅助沉积来沉积间隙填充层的方法 |
TWI799494B (zh) | 2018-01-19 | 2023-04-21 | 荷蘭商Asm 智慧財產控股公司 | 沈積方法 |
USD903477S1 (en) | 2018-01-24 | 2020-12-01 | Asm Ip Holdings B.V. | Metal clamp |
CN108389798B (zh) | 2018-01-24 | 2021-02-02 | 信利(惠州)智能显示有限公司 | 刻蚀方法、低温多晶硅薄膜晶体管及amoled面板 |
US10332747B1 (en) | 2018-01-24 | 2019-06-25 | Globalfoundries Inc. | Selective titanium nitride deposition using oxides of lanthanum masks |
US11018047B2 (en) | 2018-01-25 | 2021-05-25 | Asm Ip Holding B.V. | Hybrid lift pin |
US20190237325A1 (en) | 2018-01-26 | 2019-08-01 | Applied Materials, Inc. | Carbon film gapfill for patterning application |
KR20200104923A (ko) | 2018-01-26 | 2020-09-04 | 어플라이드 머티어리얼스, 인코포레이티드 | 실리콘 질화물 박막들을 위한 처리 방법들 |
US10332963B1 (en) | 2018-01-29 | 2019-06-25 | Globalfoundries Inc. | Uniformity tuning of variable-height features formed in trenches |
US11098069B2 (en) | 2018-01-30 | 2021-08-24 | Versum Materials Us, Llc | Organoamino-functionalized cyclic oligosiloxanes for deposition of silicon-containing films |
US10535516B2 (en) | 2018-02-01 | 2020-01-14 | Asm Ip Holdings B.V. | Method for depositing a semiconductor structure on a surface of a substrate and related semiconductor structures |
USD880437S1 (en) | 2018-02-01 | 2020-04-07 | Asm Ip Holding B.V. | Gas supply plate for semiconductor manufacturing apparatus |
WO2019152055A1 (en) | 2018-02-05 | 2019-08-08 | Visa International Service Association | Physical entity authentication platform |
US11081345B2 (en) | 2018-02-06 | 2021-08-03 | Asm Ip Holding B.V. | Method of post-deposition treatment for silicon oxide film |
US20190249303A1 (en) | 2018-02-09 | 2019-08-15 | Asm Ip Holding B.V. | Chemical precursors and methods for depositing a silicon oxide film on a substrate utilizing chemical precursors |
WO2019158960A1 (en) | 2018-02-14 | 2019-08-22 | Asm Ip Holding B.V. | A method for depositing a ruthenium-containing film on a substrate by a cyclical deposition process |
US10896820B2 (en) | 2018-02-14 | 2021-01-19 | Asm Ip Holding B.V. | Method for depositing a ruthenium-containing film on a substrate by a cyclical deposition process |
US10731249B2 (en) | 2018-02-15 | 2020-08-04 | Asm Ip Holding B.V. | Method of forming a transition metal containing film on a substrate by a cyclical deposition process, a method for supplying a transition metal halide compound to a reaction chamber, and related vapor deposition apparatus |
US10658181B2 (en) | 2018-02-20 | 2020-05-19 | Asm Ip Holding B.V. | Method of spacer-defined direct patterning in semiconductor fabrication |
KR102636427B1 (ko) | 2018-02-20 | 2024-02-13 | 에이에스엠 아이피 홀딩 비.브이. | 기판 처리 방법 및 장치 |
US10975470B2 (en) | 2018-02-23 | 2021-04-13 | Asm Ip Holding B.V. | Apparatus for detecting or monitoring for a chemical precursor in a high temperature environment |
US11473195B2 (en) | 2018-03-01 | 2022-10-18 | Asm Ip Holding B.V. | Semiconductor processing apparatus and a method for processing a substrate |
US11087961B2 (en) | 2018-03-02 | 2021-08-10 | Lam Research Corporation | Quartz component with protective coating |
US11629406B2 (en) | 2018-03-09 | 2023-04-18 | Asm Ip Holding B.V. | Semiconductor processing apparatus comprising one or more pyrometers for measuring a temperature of a substrate during transfer of the substrate |
US11114283B2 (en) | 2018-03-16 | 2021-09-07 | Asm Ip Holding B.V. | Reactor, system including the reactor, and methods of manufacturing and using same |
CA3037508C (en) | 2018-03-21 | 2021-08-31 | Iota Engineering Llc | Power over ethernet exit signage |
KR102646467B1 (ko) | 2018-03-27 | 2024-03-11 | 에이에스엠 아이피 홀딩 비.브이. | 기판 상에 전극을 형성하는 방법 및 전극을 포함하는 반도체 소자 구조 |
US11088002B2 (en) | 2018-03-29 | 2021-08-10 | Asm Ip Holding B.V. | Substrate rack and a substrate processing system and method |
US10510536B2 (en) | 2018-03-29 | 2019-12-17 | Asm Ip Holding B.V. | Method of depositing a co-doped polysilicon film on a surface of a substrate within a reaction chamber |
US11230766B2 (en) | 2018-03-29 | 2022-01-25 | Asm Ip Holding B.V. | Substrate processing apparatus and method |
KR102501472B1 (ko) | 2018-03-30 | 2023-02-20 | 에이에스엠 아이피 홀딩 비.브이. | 기판 처리 방법 |
KR102600229B1 (ko) | 2018-04-09 | 2023-11-10 | 에이에스엠 아이피 홀딩 비.브이. | 기판 지지 장치, 이를 포함하는 기판 처리 장치 및 기판 처리 방법 |
JP6519897B2 (ja) | 2018-04-10 | 2019-05-29 | シンフォニアテクノロジー株式会社 | パージノズルユニット、ロードポート |
US10756186B2 (en) | 2018-04-12 | 2020-08-25 | Sandisk Technologies Llc | Three-dimensional memory device including germanium-containing vertical channels and method of making the same |
US11462387B2 (en) | 2018-04-17 | 2022-10-04 | Asm Ip Holding B.V. | Substrate processing apparatus and substrate processing method |
US10782613B2 (en) | 2018-04-19 | 2020-09-22 | International Business Machines Corporation | Polymerizable self-assembled monolayers for use in atomic layer deposition |
US20190330740A1 (en) | 2018-04-30 | 2019-10-31 | Asm Ip Holding B.V. | Substrate processing apparatus and method |
US10580645B2 (en) | 2018-04-30 | 2020-03-03 | Asm Ip Holding B.V. | Plasma enhanced atomic layer deposition (PEALD) of SiN using silicon-hydrohalide precursors |
WO2019213604A1 (en) | 2018-05-03 | 2019-11-07 | Lam Research Corporation | Method of depositing tungsten and other metals in 3d nand structures |
US11639547B2 (en) | 2018-05-03 | 2023-05-02 | Applied Materials, Inc. | Halogen resistant coatings and methods of making and using thereof |
KR20190128558A (ko) | 2018-05-08 | 2019-11-18 | 에이에스엠 아이피 홀딩 비.브이. | 기판 상에 산화물 막을 주기적 증착 공정에 의해 증착하기 위한 방법 및 관련 소자 구조 |
US12025484B2 (en) | 2018-05-08 | 2024-07-02 | Asm Ip Holding B.V. | Thin film forming method |
US20190348261A1 (en) | 2018-05-09 | 2019-11-14 | Asm Ip Holding B.V. | Apparatus for use with hydrogen radicals and method of using same |
SG11202009703QA (en) | 2018-05-11 | 2020-10-29 | Lam Res Corp | Methods for making euv patternable hard masks |
TW202349473A (zh) | 2018-05-11 | 2023-12-16 | 荷蘭商Asm Ip私人控股有限公司 | 用於基板上形成摻雜金屬碳化物薄膜之方法及相關半導體元件結構 |
CN110473819B (zh) | 2018-05-11 | 2020-12-08 | 北京北方华创微电子装备有限公司 | 一种开门装置、传输腔室和半导体处理设备 |
AT520629B1 (de) | 2018-05-22 | 2019-06-15 | Sico Tech Gmbh | Injektor aus Silizium für die Halbleiterindustrie |
US10665505B2 (en) | 2018-05-22 | 2020-05-26 | International Business Machines Corporation | Self-aligned gate contact isolation |
CN109075167B (zh) | 2018-05-24 | 2020-08-25 | 长江存储科技有限责任公司 | 用于修复衬底晶格以及选择性外延处理的方法 |
US20190362989A1 (en) | 2018-05-25 | 2019-11-28 | Applied Materials, Inc. | Substrate manufacturing apparatus and methods with factory interface chamber heating |
KR102596988B1 (ko) | 2018-05-28 | 2023-10-31 | 에이에스엠 아이피 홀딩 비.브이. | 기판 처리 방법 및 그에 의해 제조된 장치 |
US20190368040A1 (en) | 2018-06-01 | 2019-12-05 | Asm Ip Holding B.V. | Infiltration apparatus and methods of infiltrating an infiltrateable material |
US11270899B2 (en) | 2018-06-04 | 2022-03-08 | Asm Ip Holding B.V. | Wafer handling chamber with moisture reduction |
US11718913B2 (en) | 2018-06-04 | 2023-08-08 | Asm Ip Holding B.V. | Gas distribution system and reactor system including same |
US11286562B2 (en) | 2018-06-08 | 2022-03-29 | Asm Ip Holding B.V. | Gas-phase chemical reactor and method of using same |
TW202403083A (zh) | 2018-06-19 | 2024-01-16 | 美商應用材料股份有限公司 | 間隙填充物沉積方法及類金剛石之碳的間隙填充物材料 |
US10741641B2 (en) | 2018-06-20 | 2020-08-11 | International Business Machines Corporation | Dielectric isolation and SiGe channel formation for integration in CMOS nanosheet channel devices |
KR102568797B1 (ko) | 2018-06-21 | 2023-08-21 | 에이에스엠 아이피 홀딩 비.브이. | 기판 처리 시스템 |
US10797133B2 (en) | 2018-06-21 | 2020-10-06 | Asm Ip Holding B.V. | Method for depositing a phosphorus doped silicon arsenide film and related semiconductor device structures |
US10483154B1 (en) | 2018-06-22 | 2019-11-19 | Globalfoundries Inc. | Front-end-of-line device structure and method of forming such a front-end-of-line device structure |
TW202405221A (zh) | 2018-06-27 | 2024-02-01 | 荷蘭商Asm Ip私人控股有限公司 | 用於形成含金屬材料及包含含金屬材料的膜及結構之循環沉積方法 |
TW202409324A (zh) | 2018-06-27 | 2024-03-01 | 荷蘭商Asm Ip私人控股有限公司 | 用於形成含金屬材料之循環沉積製程 |
TWI751420B (zh) | 2018-06-29 | 2022-01-01 | 荷蘭商Asm知識產權私人控股有限公司 | 薄膜沉積方法 |
US10612136B2 (en) | 2018-06-29 | 2020-04-07 | ASM IP Holding, B.V. | Temperature-controlled flange and reactor system including same |
JP7264894B2 (ja) | 2018-06-29 | 2023-04-25 | 株式会社半導体エネルギー研究所 | 半導体装置 |
US10755922B2 (en) | 2018-07-03 | 2020-08-25 | Asm Ip Holding B.V. | Method for depositing silicon-free carbon-containing film as gap-fill layer by pulse plasma-assisted deposition |
US10388513B1 (en) | 2018-07-03 | 2019-08-20 | Asm Ip Holding B.V. | Method for depositing silicon-free carbon-containing film as gap-fill layer by pulse plasma-assisted deposition |
US10767789B2 (en) | 2018-07-16 | 2020-09-08 | Asm Ip Holding B.V. | Diaphragm valves, valve components, and methods for forming valve components |
WO2020023790A1 (en) | 2018-07-26 | 2020-01-30 | Lam Research Corporation | Deposition of pure metal films |
EP3830860A4 (en) | 2018-07-30 | 2022-04-20 | Applied Materials, Inc. | PROCESS FOR SELECTIVE SILICON-GERMANIUM EPITAXY AT LOW TEMPERATURES |
CN109000352A (zh) | 2018-08-03 | 2018-12-14 | 珠海格力电器股份有限公司 | 风道模块、设有其的风道结构及空调 |
US11053591B2 (en) | 2018-08-06 | 2021-07-06 | Asm Ip Holding B.V. | Multi-port gas injection system and reactor system including same |
US10883175B2 (en) | 2018-08-09 | 2021-01-05 | Asm Ip Holding B.V. | Vertical furnace for processing substrates and a liner for use therein |
KR20200019308A (ko) | 2018-08-13 | 2020-02-24 | 삼성디스플레이 주식회사 | 유기 발광 표시 장치 |
CN108910843A (zh) | 2018-08-13 | 2018-11-30 | 中国工程物理研究院化工材料研究所 | 一种推进剂燃料的制备方法 |
US20200058469A1 (en) | 2018-08-14 | 2020-02-20 | Tokyo Electron Limited | Systems and methods of control for plasma processing |
US10510871B1 (en) | 2018-08-16 | 2019-12-17 | Taiwan Semiconductor Manufacturing Company, Ltd. | Semiconductor device and method |
US10829852B2 (en) | 2018-08-16 | 2020-11-10 | Asm Ip Holding B.V. | Gas distribution device for a wafer processing apparatus |
US11430674B2 (en) | 2018-08-22 | 2022-08-30 | Asm Ip Holding B.V. | Sensor array, apparatus for dispensing a vapor phase reactant to a reaction chamber and related methods |
KR20200023196A (ko) | 2018-08-23 | 2020-03-04 | 에이에스엠 아이피 홀딩 비.브이. | 기판 처리 장치 및 방법 |
JP6896682B2 (ja) | 2018-09-04 | 2021-06-30 | 株式会社Kokusai Electric | 基板処理装置および半導体装置の製造方法 |
KR20200030162A (ko) | 2018-09-11 | 2020-03-20 | 에이에스엠 아이피 홀딩 비.브이. | 박막 증착 방법 |
US11024523B2 (en) | 2018-09-11 | 2021-06-01 | Asm Ip Holding B.V. | Substrate processing apparatus and method |
US11501999B2 (en) | 2018-09-28 | 2022-11-15 | Taiwan Semiconductor Manufacturing Co., Ltd. | Cobalt fill for gate structures |
US11282938B2 (en) | 2018-09-28 | 2022-03-22 | Taiwan Semiconductor Manufacturing Company, Ltd. | Capping layers in metal gates of transistors |
CN110970344A (zh) | 2018-10-01 | 2020-04-07 | Asm Ip控股有限公司 | 衬底保持设备、包含所述设备的系统及其使用方法 |
US11232963B2 (en) | 2018-10-03 | 2022-01-25 | Asm Ip Holding B.V. | Substrate processing apparatus and method |
US20200109484A1 (en) | 2018-10-03 | 2020-04-09 | Asm Ip Holding B.V. | Susceptor and susceptor coating method |
US20200111669A1 (en) | 2018-10-04 | 2020-04-09 | Asm Ip Holding B.V. | Method for depositing oxide film by peald using nitrogen |
KR102592699B1 (ko) | 2018-10-08 | 2023-10-23 | 에이에스엠 아이피 홀딩 비.브이. | 기판 지지 유닛 및 이를 포함하는 박막 증착 장치와 기판 처리 장치 |
US10825828B2 (en) | 2018-10-11 | 2020-11-03 | Micron Technology, Inc. | Semiconductor devices and systems with channel openings or pillars extending through a tier stack, and methods of formation |
US10847365B2 (en) | 2018-10-11 | 2020-11-24 | Asm Ip Holding B.V. | Method of forming conformal silicon carbide film by cyclic CVD |
US10811256B2 (en) | 2018-10-16 | 2020-10-20 | Asm Ip Holding B.V. | Method for etching a carbon-containing feature |
KR102605121B1 (ko) | 2018-10-19 | 2023-11-23 | 에이에스엠 아이피 홀딩 비.브이. | 기판 처리 장치 및 기판 처리 방법 |
KR102546322B1 (ko) | 2018-10-19 | 2023-06-21 | 에이에스엠 아이피 홀딩 비.브이. | 기판 처리 장치 및 기판 처리 방법 |
USD864134S1 (en) | 2018-10-24 | 2019-10-22 | Asm Ip Holding B.V. | Susceptor |
US20200131634A1 (en) | 2018-10-26 | 2020-04-30 | Asm Ip Holding B.V. | High temperature coatings for a preclean and etch apparatus and related methods |
US11081584B2 (en) | 2018-10-30 | 2021-08-03 | Taiwan Semiconductor Manufacturing Co., Ltd. | Method of manufacturing semiconductor devices using a capping layer in forming gate electrode and semiconductor devices |
US11087997B2 (en) | 2018-10-31 | 2021-08-10 | Asm Ip Holding B.V. | Substrate processing apparatus for processing substrates |
KR20200051105A (ko) | 2018-11-02 | 2020-05-13 | 에이에스엠 아이피 홀딩 비.브이. | 기판 지지 유닛 및 이를 포함하는 기판 처리 장치 |
US11572620B2 (en) | 2018-11-06 | 2023-02-07 | Asm Ip Holding B.V. | Methods for selectively depositing an amorphous silicon film on a substrate |
US11031242B2 (en) | 2018-11-07 | 2021-06-08 | Asm Ip Holding B.V. | Methods for depositing a boron doped silicon germanium film |
US11443953B2 (en) | 2018-11-13 | 2022-09-13 | Tokyo Electron Limited | Method for forming and using stress-tuned silicon oxide films in semiconductor device patterning |
US10847366B2 (en) | 2018-11-16 | 2020-11-24 | Asm Ip Holding B.V. | Methods for depositing a transition metal chalcogenide film on a substrate by a cyclical deposition process |
US10818758B2 (en) | 2018-11-16 | 2020-10-27 | Asm Ip Holding B.V. | Methods for forming a metal silicate film on a substrate in a reaction chamber and related semiconductor device structures |
US12040199B2 (en) | 2018-11-28 | 2024-07-16 | Asm Ip Holding B.V. | Substrate processing apparatus for processing substrates |
US11217444B2 (en) | 2018-11-30 | 2022-01-04 | Asm Ip Holding B.V. | Method for forming an ultraviolet radiation responsive metal oxide-containing film |
KR102636428B1 (ko) | 2018-12-04 | 2024-02-13 | 에이에스엠 아이피 홀딩 비.브이. | 기판 처리 장치를 세정하는 방법 |
US20200181770A1 (en) | 2018-12-05 | 2020-06-11 | Asm Ip Holding B.V. | Method of forming a structure including silicon nitride on titanium nitride and structure formed using the method |
SG11202106002VA (en) | 2018-12-05 | 2021-07-29 | Lam Res Corp | Void free low stress fill |
US10777445B2 (en) | 2018-12-06 | 2020-09-15 | Asm Ip Holding B.V. | Substrate processing apparatus and substrate transfer method |
US11640917B2 (en) | 2018-12-07 | 2023-05-02 | Applied Materials, Inc. | Ground electrode formed in an electrostatic chuck for a plasma processing chamber |
US11158513B2 (en) | 2018-12-13 | 2021-10-26 | Asm Ip Holding B.V. | Methods for forming a rhenium-containing film on a substrate by a cyclical deposition process and related semiconductor device structures |
JP7504584B2 (ja) | 2018-12-14 | 2024-06-24 | エーエスエム・アイピー・ホールディング・ベー・フェー | 窒化ガリウムの選択的堆積を用いてデバイス構造体を形成する方法及びそのためのシステム |
US20200203157A1 (en) | 2018-12-20 | 2020-06-25 | Nanya Technology Corporation | Method for preparing multiplayer structure |
USD914620S1 (en) | 2019-01-17 | 2021-03-30 | Asm Ip Holding B.V. | Vented susceptor |
TWI819180B (zh) | 2019-01-17 | 2023-10-21 | 荷蘭商Asm 智慧財產控股公司 | 藉由循環沈積製程於基板上形成含過渡金屬膜之方法 |
KR20200091543A (ko) | 2019-01-22 | 2020-07-31 | 에이에스엠 아이피 홀딩 비.브이. | 기판 처리 장치 |
US10704143B1 (en) | 2019-01-25 | 2020-07-07 | Asm Ip Holding B.V. | Oxide film forming method |
CN111524788B (zh) | 2019-02-01 | 2023-11-24 | Asm Ip私人控股有限公司 | 氧化硅的拓扑选择性膜形成的方法 |
KR102626263B1 (ko) | 2019-02-20 | 2024-01-16 | 에이에스엠 아이피 홀딩 비.브이. | 처리 단계를 포함하는 주기적 증착 방법 및 이를 위한 장치 |
JP7509548B2 (ja) | 2019-02-20 | 2024-07-02 | エーエスエム・アイピー・ホールディング・ベー・フェー | 基材表面内に形成された凹部を充填するための周期的堆積方法および装置 |
US11482533B2 (en) | 2019-02-20 | 2022-10-25 | Asm Ip Holding B.V. | Apparatus and methods for plug fill deposition in 3-D NAND applications |
JP2020136678A (ja) | 2019-02-20 | 2020-08-31 | エーエスエム・アイピー・ホールディング・ベー・フェー | 基材表面内に形成された凹部を充填するための方法および装置 |
JP2020133004A (ja) | 2019-02-22 | 2020-08-31 | エーエスエム・アイピー・ホールディング・ベー・フェー | 基材を処理するための基材処理装置および方法 |
USD881338S1 (en) | 2019-02-26 | 2020-04-14 | Ziyong Chen | Filter |
KR20200108243A (ko) | 2019-03-08 | 2020-09-17 | 에이에스엠 아이피 홀딩 비.브이. | SiOC 층을 포함한 구조체 및 이의 형성 방법 |
KR20200108248A (ko) | 2019-03-08 | 2020-09-17 | 에이에스엠 아이피 홀딩 비.브이. | SiOCN 층을 포함한 구조체 및 이의 형성 방법 |
KR20200108242A (ko) | 2019-03-08 | 2020-09-17 | 에이에스엠 아이피 홀딩 비.브이. | 실리콘 질화물 층을 선택적으로 증착하는 방법, 및 선택적으로 증착된 실리콘 질화물 층을 포함하는 구조체 |
KR20200116033A (ko) | 2019-03-28 | 2020-10-08 | 에이에스엠 아이피 홀딩 비.브이. | 도어 개방기 및 이를 구비한 기판 처리 장치 |
JP7502039B2 (ja) | 2019-03-28 | 2024-06-18 | エーエスエム・アイピー・ホールディング・ベー・フェー | 基板処理装置 |
KR20200116855A (ko) | 2019-04-01 | 2020-10-13 | 에이에스엠 아이피 홀딩 비.브이. | 반도체 소자를 제조하는 방법 |
US20200318237A1 (en) | 2019-04-05 | 2020-10-08 | Asm Ip Holding B.V. | Methods for forming a boron nitride film by a plasma enhanced atomic layer deposition process |
KR20200123380A (ko) | 2019-04-19 | 2020-10-29 | 에이에스엠 아이피 홀딩 비.브이. | 층 형성 방법 및 장치 |
KR20200125453A (ko) | 2019-04-24 | 2020-11-04 | 에이에스엠 아이피 홀딩 비.브이. | 기상 반응기 시스템 및 이를 사용하는 방법 |
KR20200130121A (ko) | 2019-05-07 | 2020-11-18 | 에이에스엠 아이피 홀딩 비.브이. | 딥 튜브가 있는 화학물질 공급원 용기 |
KR20200130118A (ko) | 2019-05-07 | 2020-11-18 | 에이에스엠 아이피 홀딩 비.브이. | 비정질 탄소 중합체 막을 개질하는 방법 |
KR20200130652A (ko) | 2019-05-10 | 2020-11-19 | 에이에스엠 아이피 홀딩 비.브이. | 표면 상에 재료를 증착하는 방법 및 본 방법에 따라 형성된 구조 |
JP2020188255A (ja) | 2019-05-16 | 2020-11-19 | エーエスエム アイピー ホールディング ビー.ブイ. | ウェハボートハンドリング装置、縦型バッチ炉および方法 |
JP2020188254A (ja) | 2019-05-16 | 2020-11-19 | エーエスエム アイピー ホールディング ビー.ブイ. | ウェハボートハンドリング装置、縦型バッチ炉および方法 |
USD922229S1 (en) | 2019-06-05 | 2021-06-15 | Asm Ip Holding B.V. | Device for controlling a temperature of a gas supply unit |
KR20200141002A (ko) | 2019-06-06 | 2020-12-17 | 에이에스엠 아이피 홀딩 비.브이. | 배기 가스 분석을 포함한 기상 반응기 시스템을 사용하는 방법 |
KR20200141931A (ko) | 2019-06-10 | 2020-12-21 | 에이에스엠 아이피 홀딩 비.브이. | 석영 에피택셜 챔버를 세정하는 방법 |
KR20200143254A (ko) | 2019-06-11 | 2020-12-23 | 에이에스엠 아이피 홀딩 비.브이. | 개질 가스를 사용하여 전자 구조를 형성하는 방법, 상기 방법을 수행하기 위한 시스템, 및 상기 방법을 사용하여 형성되는 구조 |
US20200395199A1 (en) | 2019-06-14 | 2020-12-17 | Asm Ip Holding B.V. | Substrate treatment apparatus and method of cleaning inside of chamber |
KR20210005515A (ko) | 2019-07-03 | 2021-01-14 | 에이에스엠 아이피 홀딩 비.브이. | 기판 처리 장치용 온도 제어 조립체 및 이를 사용하는 방법 |
KR20210007862A (ko) | 2019-07-09 | 2021-01-20 | 에이에스엠 아이피 홀딩 비.브이. | 포토레지스트 하부층을 포함한 구조체 및 이의 형성 방법 |
JP7499079B2 (ja) | 2019-07-09 | 2024-06-13 | エーエスエム・アイピー・ホールディング・ベー・フェー | 同軸導波管を用いたプラズマ装置、基板処理方法 |
CN112216646A (zh) | 2019-07-10 | 2021-01-12 | Asm Ip私人控股有限公司 | 基板支撑组件及包括其的基板处理装置 |
KR20210010307A (ko) | 2019-07-16 | 2021-01-27 | 에이에스엠 아이피 홀딩 비.브이. | 기판 처리 장치 |
KR20210010820A (ko) | 2019-07-17 | 2021-01-28 | 에이에스엠 아이피 홀딩 비.브이. | 실리콘 게르마늄 구조를 형성하는 방법 |
KR20210010816A (ko) | 2019-07-17 | 2021-01-28 | 에이에스엠 아이피 홀딩 비.브이. | 라디칼 보조 점화 플라즈마 시스템 및 방법 |
US11643724B2 (en) | 2019-07-18 | 2023-05-09 | Asm Ip Holding B.V. | Method of forming structures using a neutral beam |
TWI839544B (zh) | 2019-07-19 | 2024-04-21 | 荷蘭商Asm Ip私人控股有限公司 | 形成形貌受控的非晶碳聚合物膜之方法 |
KR20210010817A (ko) | 2019-07-19 | 2021-01-28 | 에이에스엠 아이피 홀딩 비.브이. | 토폴로지-제어된 비정질 탄소 중합체 막을 형성하는 방법 |
TW202113936A (zh) | 2019-07-29 | 2021-04-01 | 荷蘭商Asm Ip私人控股有限公司 | 用於利用n型摻雜物及/或替代摻雜物選擇性沉積以達成高摻雜物併入之方法 |
KR20210014577A (ko) | 2019-07-29 | 2021-02-09 | 에이에스엠 아이피 홀딩 비.브이. | 불소 제거를 이용해서 구조물을 형성하는 방법 |
US20210033977A1 (en) | 2019-07-30 | 2021-02-04 | Asm Ip Holding B.V. | Substrate processing apparatus and method |
CN112309900A (zh) | 2019-07-30 | 2021-02-02 | Asm Ip私人控股有限公司 | 基板处理设备 |
CN112309899A (zh) | 2019-07-30 | 2021-02-02 | Asm Ip私人控股有限公司 | 基板处理设备 |
US11587814B2 (en) | 2019-07-31 | 2023-02-21 | Asm Ip Holding B.V. | Vertical batch furnace assembly |
US20210035842A1 (en) | 2019-07-31 | 2021-02-04 | Asm Ip Holding B.V. | Cassette lid opening device |
US11915960B2 (en) | 2019-07-31 | 2024-02-27 | Asm Ip Holding B.V. | Vertical batch furnace assembly |
US11587815B2 (en) | 2019-07-31 | 2023-02-21 | Asm Ip Holding B.V. | Vertical batch furnace assembly |
US11227782B2 (en) | 2019-07-31 | 2022-01-18 | Asm Ip Holding B.V. | Vertical batch furnace assembly |
CN112323048B (zh) | 2019-08-05 | 2024-02-09 | Asm Ip私人控股有限公司 | 用于化学源容器的液位传感器 |
KR20210018762A (ko) | 2019-08-09 | 2021-02-18 | 에이에스엠 아이피 홀딩 비.브이. | 온도 제어된 화학물질 전달 시스템 및 이를 포함하는 반응기 시스템 |
CN112342526A (zh) | 2019-08-09 | 2021-02-09 | Asm Ip私人控股有限公司 | 包括冷却装置的加热器组件及其使用方法 |
KR20210021266A (ko) | 2019-08-14 | 2021-02-25 | 에이에스엠 아이피 홀딩 비.브이. | 웨이퍼를 처리하는 장치 및 방법 |
JP2021031769A (ja) | 2019-08-21 | 2021-03-01 | エーエスエム アイピー ホールディング ビー.ブイ. | 成膜原料混合ガス生成装置及び成膜装置 |
KR20210024423A (ko) | 2019-08-22 | 2021-03-05 | 에이에스엠 아이피 홀딩 비.브이. | 홀을 구비한 구조체를 형성하기 위한 방법 |
US11133416B2 (en) | 2019-08-23 | 2021-09-28 | Taiwan Semiconductor Manufacturing Company, Ltd. | Methods of forming semiconductor devices having plural epitaxial layers |
KR20210024420A (ko) | 2019-08-23 | 2021-03-05 | 에이에스엠 아이피 홀딩 비.브이. | 비스(디에틸아미노)실란을 사용하여 peald에 의해 개선된 품질을 갖는 실리콘 산화물 막을 증착하기 위한 방법 |
US11286558B2 (en) | 2019-08-23 | 2022-03-29 | Asm Ip Holding B.V. | Methods for depositing a molybdenum nitride film on a surface of a substrate by a cyclical deposition process and related semiconductor device structures including a molybdenum nitride film |
KR20210028093A (ko) | 2019-08-29 | 2021-03-11 | 에이에스엠 아이피 홀딩 비.브이. | 유전체 층을 포함하는 구조체 및 이를 형성하는 방법 |
KR20210028578A (ko) | 2019-09-03 | 2021-03-12 | 에이에스엠 아이피 홀딩 비.브이. | 칼코지나이드 막 및 상기 막을 포함한 구조체를 증착하기 위한 방법 및 장치 |
KR20210029090A (ko) | 2019-09-04 | 2021-03-15 | 에이에스엠 아이피 홀딩 비.브이. | 희생 캡핑 층을 이용한 선택적 증착 방법 |
KR20210029663A (ko) | 2019-09-05 | 2021-03-16 | 에이에스엠 아이피 홀딩 비.브이. | 기판 처리 장치 |
US20210071296A1 (en) | 2019-09-06 | 2021-03-11 | Asm Ip Holding B.V. | Exhaust component cleaning method and substrate processing apparatus including exhaust component |
US20210082692A1 (en) | 2019-09-17 | 2021-03-18 | Asm Ip Holding B.V. | Method of forming a carbon-containing layer and structure including the layer |
US11562901B2 (en) | 2019-09-25 | 2023-01-24 | Asm Ip Holding B.V. | Substrate processing method |
CN112593212B (zh) | 2019-10-02 | 2023-12-22 | Asm Ip私人控股有限公司 | 通过循环等离子体增强沉积工艺形成拓扑选择性氧化硅膜的方法 |
WO2021071659A1 (en) | 2019-10-07 | 2021-04-15 | Applied Materials, Inc. | Integrated electrode and ground plane for a substrate support |
KR20210042810A (ko) | 2019-10-08 | 2021-04-20 | 에이에스엠 아이피 홀딩 비.브이. | 활성 종을 이용하기 위한 가스 분배 어셈블리를 포함한 반응기 시스템 및 이를 사용하는 방법 |
CN112635282A (zh) | 2019-10-08 | 2021-04-09 | Asm Ip私人控股有限公司 | 具有连接板的基板处理装置、基板处理方法 |
TW202128273A (zh) | 2019-10-08 | 2021-08-01 | 荷蘭商Asm Ip私人控股有限公司 | 氣體注入系統、及將材料沉積於反應室內之基板表面上的方法 |
KR20220076498A (ko) | 2019-10-08 | 2022-06-08 | 램 리써치 코포레이션 | Cvd euv 레지스트 막들의 포지티브 톤 현상 (positive tone development) |
KR20210043460A (ko) | 2019-10-10 | 2021-04-21 | 에이에스엠 아이피 홀딩 비.브이. | 포토레지스트 하부층을 형성하기 위한 방법 및 이를 포함한 구조체 |
US12009241B2 (en) | 2019-10-14 | 2024-06-11 | Asm Ip Holding B.V. | Vertical batch furnace assembly with detector to detect cassette |
TWI834919B (zh) | 2019-10-16 | 2024-03-11 | 荷蘭商Asm Ip私人控股有限公司 | 氧化矽之拓撲選擇性膜形成之方法 |
US11637014B2 (en) | 2019-10-17 | 2023-04-25 | Asm Ip Holding B.V. | Methods for selective deposition of doped semiconductor material |
KR20210047808A (ko) | 2019-10-21 | 2021-04-30 | 에이에스엠 아이피 홀딩 비.브이. | 막을 선택적으로 에칭하기 위한 장치 및 방법 |
KR20210050453A (ko) | 2019-10-25 | 2021-05-07 | 에이에스엠 아이피 홀딩 비.브이. | 기판 표면 상의 갭 피처를 충진하는 방법 및 이와 관련된 반도체 소자 구조 |
US11646205B2 (en) | 2019-10-29 | 2023-05-09 | Asm Ip Holding B.V. | Methods of selectively forming n-type doped material on a surface, systems for selectively forming n-type doped material, and structures formed using same |
KR20210054983A (ko) | 2019-11-05 | 2021-05-14 | 에이에스엠 아이피 홀딩 비.브이. | 도핑된 반도체 층을 갖는 구조체 및 이를 형성하기 위한 방법 및 시스템 |
KR20210057664A (ko) | 2019-11-11 | 2021-05-21 | 에이에스엠 아이피 홀딩 비.브이. | 실리콘 옥사이드를 포함한 구조물을 형성하는 방법 |
US11501968B2 (en) | 2019-11-15 | 2022-11-15 | Asm Ip Holding B.V. | Method for providing a semiconductor device with silicon filled gaps |
KR20210062561A (ko) | 2019-11-20 | 2021-05-31 | 에이에스엠 아이피 홀딩 비.브이. | 기판의 표면 상에 탄소 함유 물질을 증착하는 방법, 상기 방법을 사용하여 형성된 구조물, 및 상기 구조물을 형성하기 위한 시스템 |
US11450529B2 (en) | 2019-11-26 | 2022-09-20 | Asm Ip Holding B.V. | Methods for selectively forming a target film on a substrate comprising a first dielectric surface and a second metallic surface |
CN112951697A (zh) | 2019-11-26 | 2021-06-11 | Asm Ip私人控股有限公司 | 基板处理设备 |
CN112885692A (zh) | 2019-11-29 | 2021-06-01 | Asm Ip私人控股有限公司 | 基板处理设备 |
CN112885693A (zh) | 2019-11-29 | 2021-06-01 | Asm Ip私人控股有限公司 | 基板处理设备 |
CN112992637A (zh) | 2019-12-02 | 2021-06-18 | Asm Ip私人控股有限公司 | 衬底支撑板、包括它的衬底处理设备以及衬底处理方法 |
JP2021090042A (ja) | 2019-12-02 | 2021-06-10 | エーエスエム アイピー ホールディング ビー.ブイ. | 基板処理装置、基板処理方法 |
KR20210070898A (ko) | 2019-12-04 | 2021-06-15 | 에이에스엠 아이피 홀딩 비.브이. | 기판 처리 장치 |
JP2021091968A (ja) | 2019-12-06 | 2021-06-17 | エーエスエム・アイピー・ホールディング・ベー・フェー | 基板処理装置、べベルマスク、基板処理方法 |
CN112981372B (zh) | 2019-12-12 | 2024-02-13 | Asm Ip私人控股有限公司 | 衬底支撑板、包括它的衬底处理设备以及衬底处理方法 |
KR20210078405A (ko) | 2019-12-17 | 2021-06-28 | 에이에스엠 아이피 홀딩 비.브이. | 바나듐 나이트라이드 층을 형성하는 방법 및 바나듐 나이트라이드 층을 포함하는 구조 |
US11527403B2 (en) | 2019-12-19 | 2022-12-13 | Asm Ip Holding B.V. | Methods for filling a gap feature on a substrate surface and related semiconductor structures |
TW202140135A (zh) | 2020-01-06 | 2021-11-01 | 荷蘭商Asm Ip私人控股有限公司 | 氣體供應總成以及閥板總成 |
TW202140128A (zh) | 2020-01-06 | 2021-11-01 | 荷蘭商Asm Ip私人控股有限公司 | 過濾系統、過濾板、及反應器系統 |
KR20210089079A (ko) | 2020-01-06 | 2021-07-15 | 에이에스엠 아이피 홀딩 비.브이. | 채널형 리프트 핀 |
US11993847B2 (en) | 2020-01-08 | 2024-05-28 | Asm Ip Holding B.V. | Injector |
TW202132605A (zh) | 2020-01-10 | 2021-09-01 | 美商應用材料股份有限公司 | 催化劑增強之無縫釕間隙填充 |
KR20210093163A (ko) | 2020-01-16 | 2021-07-27 | 에이에스엠 아이피 홀딩 비.브이. | 고 종횡비 피처를 형성하는 방법 |
KR20210093758A (ko) | 2020-01-17 | 2021-07-28 | 에이에스엠 아이피 홀딩 비.브이. | 적산값을 모니터링하는 기판 처리 장치 및 기판 처리 방법 |
KR20210094462A (ko) | 2020-01-20 | 2021-07-29 | 에이에스엠 아이피 홀딩 비.브이. | 전처리를 사용하여 실리콘 질화물 층을 증착하는 방법, 상기 방법을 사용하여 형성된 구조체, 및 상기 방법을 수행하기 위한 시스템 |
KR102675856B1 (ko) | 2020-01-20 | 2024-06-17 | 에이에스엠 아이피 홀딩 비.브이. | 박막 형성 방법 및 박막 표면 개질 방법 |
KR20210095798A (ko) | 2020-01-23 | 2021-08-03 | 에이에스엠 아이피 홀딩 비.브이. | 반응 챔버 압력을 안정화하기 위한 시스템 및 방법 |
TW202131985A (zh) | 2020-01-29 | 2021-09-01 | 荷蘭商Asm Ip私人控股有限公司 | 汙染物捕集系統、及擋板堆疊 |
TW202130846A (zh) | 2020-02-03 | 2021-08-16 | 荷蘭商Asm Ip私人控股有限公司 | 形成包括釩或銦層的結構之方法 |
KR20210100010A (ko) | 2020-02-04 | 2021-08-13 | 에이에스엠 아이피 홀딩 비.브이. | 대형 물품의 투과율 측정을 위한 방법 및 장치 |
KR20210100535A (ko) | 2020-02-05 | 2021-08-17 | 에이에스엠 아이피 홀딩 비.브이. | 탄소 재료를 포함한 구조체를 형성하는 방법, 이 방법을 사용하여 형성된 구조체, 및 이 구조체를 형성하기 위한 시스템 |
US11776846B2 (en) | 2020-02-07 | 2023-10-03 | Asm Ip Holding B.V. | Methods for depositing gap filling fluids and related systems and devices |
KR20210103407A (ko) | 2020-02-12 | 2021-08-23 | 에이에스엠 아이피 홀딩 비.브이. | 다중 방향 반응 챔버를 갖는 반응기 시스템 |
KR20210103956A (ko) | 2020-02-13 | 2021-08-24 | 에이에스엠 아이피 홀딩 비.브이. | 수광 장치를 포함하는 기판 처리 장치 및 수광 장치의 교정 방법 |
TW202146691A (zh) | 2020-02-13 | 2021-12-16 | 荷蘭商Asm Ip私人控股有限公司 | 氣體分配總成、噴淋板總成、及調整至反應室之氣體的傳導率之方法 |
KR20210105289A (ko) | 2020-02-14 | 2021-08-26 | 에이에스엠 아이피 홀딩 비.브이. | 펄스형 플라즈마 전력을 사용하여 유전체 재료 층을 형성하기 위한 방법, 이 층을 포함한 구조물 및 소자, 그리고 이 층을 형성하기 위한 시스템 |
US11781243B2 (en) | 2020-02-17 | 2023-10-10 | Asm Ip Holding B.V. | Method for depositing low temperature phosphorous-doped silicon |
US20210265158A1 (en) | 2020-02-25 | 2021-08-26 | Asm Ip Holding B.V. | Method of forming low-k material layer, structure including the layer, and system for forming same |
TW202203344A (zh) | 2020-02-28 | 2022-01-16 | 荷蘭商Asm Ip控股公司 | 專用於零件清潔的系統 |
KR20210113043A (ko) | 2020-03-04 | 2021-09-15 | 에이에스엠 아이피 홀딩 비.브이. | 반응기 시스템용 정렬 고정구 |
US20210285102A1 (en) | 2020-03-11 | 2021-09-16 | Applied Materials, Inc. | Gap fill methods using catalyzed deposition |
KR20210116240A (ko) | 2020-03-11 | 2021-09-27 | 에이에스엠 아이피 홀딩 비.브이. | 조절성 접합부를 갖는 기판 핸들링 장치 |
US11876356B2 (en) | 2020-03-11 | 2024-01-16 | Asm Ip Holding B.V. | Lockout tagout assembly and system and method of using same |
CN113394086A (zh) | 2020-03-12 | 2021-09-14 | Asm Ip私人控股有限公司 | 用于制造具有目标拓扑轮廓的层结构的方法 |
CN113394067A (zh) | 2020-03-13 | 2021-09-14 | Asm Ip私人控股有限公司 | 基板处理设备 |
US20210292902A1 (en) | 2020-03-17 | 2021-09-23 | Asm Ip Holding B.V. | Method of depositing epitaxial material, structure formed using the method, and system for performing the method |
KR20210124042A (ko) | 2020-04-02 | 2021-10-14 | 에이에스엠 아이피 홀딩 비.브이. | 박막 형성 방법 |
TW202146689A (zh) | 2020-04-03 | 2021-12-16 | 荷蘭商Asm Ip控股公司 | 阻障層形成方法及半導體裝置的製造方法 |
TW202145344A (zh) | 2020-04-08 | 2021-12-01 | 荷蘭商Asm Ip私人控股有限公司 | 用於選擇性蝕刻氧化矽膜之設備及方法 |
KR20210127087A (ko) | 2020-04-10 | 2021-10-21 | 에이에스엠 아이피 홀딩 비.브이. | 기체 공급 유닛 및 이를 포함하는 기판 처리 장치 |
KR20210127620A (ko) | 2020-04-13 | 2021-10-22 | 에이에스엠 아이피 홀딩 비.브이. | 질소 함유 탄소 막을 형성하는 방법 및 이를 수행하기 위한 시스템 |
KR20210128343A (ko) | 2020-04-15 | 2021-10-26 | 에이에스엠 아이피 홀딩 비.브이. | 크롬 나이트라이드 층을 형성하는 방법 및 크롬 나이트라이드 층을 포함하는 구조 |
US11821078B2 (en) | 2020-04-15 | 2023-11-21 | Asm Ip Holding B.V. | Method for forming precoat film and method for forming silicon-containing film |
US11996289B2 (en) | 2020-04-16 | 2024-05-28 | Asm Ip Holding B.V. | Methods of forming structures including silicon germanium and silicon layers, devices formed using the methods, and systems for performing the methods |
KR20210129598A (ko) | 2020-04-17 | 2021-10-28 | 에이에스엠 아이피 홀딩 비.브이. | 수직형 퍼니스의 반응기 내에 배열되도록 구성된 인젝터와 수직형 퍼니스 |
TW202143328A (zh) | 2020-04-21 | 2021-11-16 | 荷蘭商Asm Ip私人控股有限公司 | 用於調整膜應力之方法 |
-
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Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TW201501186A (zh) * | 2013-03-14 | 2015-01-01 | Asm Ip Holding Bv | 金屬薄膜的矽烷或硼烷處理 |
TW201700764A (zh) * | 2015-06-16 | 2017-01-01 | Asm Ip控股公司 | 形成金屬-絕緣體-半導體結構之方法及積體電路製造方法 |
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