WO2015182699A1 - 真空排気システム - Google Patents
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Abstract
Description
本発明の好ましい態様は、前記集合管および前記第2真空ポンプはそれぞれ複数設けられており、前記複数の集合管のいずれも、前記複数の第1真空ポンプに接続されており、前記複数の第2真空ポンプは、前記複数の集合管にそれぞれ接続されていることを特徴とする。
本発明の好ましい態様は、前記第2真空ポンプに連結された第3真空ポンプをさらに備え、前記第2真空ポンプは容積型多段真空ポンプであることを特徴とする。
本発明の好ましい態様は、前記第3真空ポンプは複数設けられており、前記複数の第3真空ポンプは並列に配置されていることを特徴とする。
本発明の好ましい態様は、前記第2集合管は、前記複数の第3真空ポンプにそれぞれ接続される複数の分岐管を有しており、前記複数の分岐管には複数の開閉弁がそれぞれ取り付けられていることを特徴とする。
本発明の好ましい態様は、前記第3真空ポンプは複数設けられており、前記複数の第3真空ポンプの数は、前記複数の第2真空ポンプの数よりも少ないことを特徴とする。
本発明の好ましい態様は、前記第2集合管および前記第3真空ポンプはそれぞれ複数設けられており、前記複数の第3真空ポンプは、並列に配置された前記複数の第2集合管を介して前記複数の第2真空ポンプに連結されていることを特徴とする。
本発明の好ましい態様は、前記複数の第2集合管のそれぞれは、前記複数の第2真空ポンプにそれぞれ接続された複数の排気管と、前記複数の排気管が接続された連通管と、前記連通管に接続された主管を備え、前記複数の排気管には複数の開閉弁がそれぞれ取り付けられており、前記連通管には複数の遮断弁が取り付けられており、前記複数の遮断弁のそれぞれは、前記複数の排気ユニットのうちの隣接する2つの間に位置していることを特徴とする。
本発明の好ましい態様は、前記集合管は、前記複数の第2真空ポンプにそれぞれ接続される複数の分岐管を有しており、前記複数の分岐管には複数の開閉弁がそれぞれ取り付けられていることを特徴とする。
本発明の好ましい態様は、前記複数の第1真空ポンプに接続されたクリーニングガス排出管と、前記クリーニングガス排出管に接続されたクリーニングガス排出用ポンプをさらに備え、前記クリーニングガス排出管と前記集合管は、並列に配置されていることを特徴とする。
本発明の好ましい態様は、クリーニングガスを処理するガス処理装置をさらに備えたことを特徴とする。
本発明の好ましい態様は、前記集合管には除害装置が取り付けられていることを特徴とする。
本発明の好ましい態様は、前記複数の処理チャンバから排気された処理ガスを無害化するガス処理装置をさらに備えたことを特徴とする。
本発明の好ましい態様は、前記真空ポンプの回転速度が前記しきい値以上であるときは、前記バックアップポンプは第1の回転速度で運転し、前記真空ポンプの回転速度が前記しきい値よりも低いときは、前記バックアップポンプは前記第1の回転速度よりも高い第2の回転速度で運転することを特徴とする。
本発明の好ましい態様は、前記動作制御部は、前記バックアップ弁を開けた後であって前記開閉弁を閉じる前に、前記真空ポンプの回転速度を前記しきい値と再度比較し、前記真空ポンプの回転速度が前記しきい値よりも低い場合には、前記開閉弁を閉じることを特徴とする。
真空排気動作が真空ポンプからバックアップポンプに切り替えられるとき、吸込側圧力、例えば、吸込管に接続された処理チャンバ内の圧力は、吸込側圧力の異常上昇を示す圧力上限値よりも低い。したがって、吸込側圧力の異常上昇を防止しつつ、バックアップポンプによって真空排気動作を継続することができる。
図1は、本発明の一実施形態に係る真空排気システムを示す図である。この真空排気システムは、CVD装置、エッチング装置などの半導体デバイス製造装置に使用される複数の処理チャンバから処理ガスを排気するために使用される。
5 第1真空ポンプ
7 第1集合管
8 第2真空ポンプ
10 ガス処理装置
12 搬送チャンバ
15 粗引きポンプ
16 ロードロックチャンバ
20 排気管
21 横引き管(連通管)
22 主管
24 開閉弁
28 第3真空ポンプ
30 大気排出管
31 粗引きポンプ
32 開閉弁
33 排気管
34 横引き管(連通管)
35 第2集合管
36 排気管
37 横引き管(連通管)
38 主管
39 分岐管
40 開閉弁
42 開閉弁
43 開閉弁
47 不活性ガス供給装置
50 集合管
51 排気管
53 開閉弁
61 上段湿式除害装置
62 触媒式除害装置
63 下段湿式除害装置
70 排気ユニット
72 立ち上げ配管
73 遮断弁
74 立ち上げ用ポンプ
80 クリーニングガス排出管
81 クリーニングガス排出用ポンプ
84 排気管
85 横引き管(連通管)
86 主管
87 分岐管
91 開閉弁
92 開閉弁
101 燃焼式除害装置
102 湿式除害装置
111 排気管
112 開閉弁
118 排ガス処理装置
119 湿式除害装置
121,122,124 遮断弁
130 除害装置
145 吸込管
146,146A,146B 分岐管
148 バックアップ管
150,150A,150B 真空ポンプ
152 バックアップポンプ
155,155A,155B 開閉弁
156 バックアップ弁
160 動作制御部
161 圧力センサ
165 ブースタポンプ
Claims (23)
- 複数の処理チャンバから気体を排気するための真空排気システムであって、
前記複数の処理チャンバにそれぞれ接続される複数の第1真空ポンプと、
前記複数の第1真空ポンプに接続された集合管と、
前記集合管に接続された第2真空ポンプとを備えたことを特徴とする真空排気システム。 - 前記第2真空ポンプは、前記複数の第1真空ポンプの近傍に配置されていることを特徴とする請求項1に記載の真空排気システム。
- 前記集合管および前記第2真空ポンプはそれぞれ複数設けられており、
前記複数の集合管のいずれも、前記複数の第1真空ポンプに接続されており、
前記複数の第2真空ポンプは、前記複数の集合管にそれぞれ接続されていることを特徴とする請求項1に記載の真空排気システム。 - 前記第2真空ポンプに連結された第3真空ポンプをさらに備え、
前記第2真空ポンプは容積型多段真空ポンプであることを特徴とする請求項3に記載の真空排気システム。 - 前記複数の集合管は、複数の第1集合管であり、
前記複数の第2真空ポンプを前記第3真空ポンプに連結する第2集合管をさらに備えたことを特徴とする請求項4に記載の真空排気システム。 - 前記第3真空ポンプは複数設けられており、
前記複数の第3真空ポンプは並列に配置されていることを特徴とする請求項5に記載の真空排気システム。 - 前記第2集合管は、前記複数の第3真空ポンプにそれぞれ接続される複数の分岐管を有しており、
前記複数の分岐管には複数の開閉弁がそれぞれ取り付けられていることを特徴とする請求項6に記載の真空排気システム。 - 前記集合管は、第1集合管であり、
前記真空排気システムは、複数の排気ユニットと、前記第2真空ポンプの下流側に配置された第3真空ポンプを有し、
前記複数の第1真空ポンプ、前記第2真空ポンプ、および前記第1集合管は、前記複数の排気ユニットのうちの1つの排気ユニットを構成し、
前記複数の排気ユニットに含まれる前記複数の第2真空ポンプを前記第3真空ポンプに連結する第2集合管をさらに備えたことを特徴とする請求項1に記載の真空排気システム。 - 前記第3真空ポンプは複数設けられており、
前記複数の第3真空ポンプの数は、前記複数の第2真空ポンプの数よりも少ないことを特徴とする請求項8に記載の真空排気システム。 - 前記第2集合管および前記第3真空ポンプはそれぞれ複数設けられており、
前記複数の第3真空ポンプは、並列に配置された前記複数の第2集合管を介して前記複数の第2真空ポンプに連結されていることを特徴とする請求項8に記載の真空排気システム。 - 前記複数の第2集合管のそれぞれは、
前記複数の第2真空ポンプにそれぞれ接続された複数の排気管と、
前記複数の排気管が接続された連通管と、
前記連通管に接続された主管を備え、
前記複数の排気管には複数の開閉弁がそれぞれ取り付けられており、
前記連通管には複数の遮断弁が取り付けられており、
前記複数の遮断弁のそれぞれは、前記複数の排気ユニットのうちの隣接する2つの間に位置していることを特徴とする請求項10に記載の真空排気システム。 - 前記第2真空ポンプは複数設けられており、前記複数の第2真空ポンプは前記集合管に並列に接続されていることを特徴とする請求項1に記載の真空排気システム。
- 前記集合管は、前記複数の第2真空ポンプにそれぞれ接続される複数の分岐管を有しており、
前記複数の分岐管には複数の開閉弁がそれぞれ取り付けられていることを特徴とする請求項12に記載の真空排気システム。 - 前記複数の第1真空ポンプに接続されたクリーニングガス排出管と、
前記クリーニングガス排出管に接続されたクリーニングガス排出用ポンプをさらに備え、
前記クリーニングガス排出管と前記集合管は、並列に配置されていることを特徴とする請求項1に記載の真空排気システム。 - クリーニングガスを処理するガス処理装置をさらに備えたことを特徴とする請求項14に記載の真空排気システム。
- 前記複数の処理チャンバに連結された大気排出管と、
前記大気排出管に接続された粗引きポンプをさらに備え、
前記大気排出管と前記集合管は、並列に配置されており、
前記粗引きポンプは、大気圧下で動作することが可能であることを特徴とする請求項1に記載の真空排気システム。 - 前記集合管には除害装置が取り付けられていることを特徴とする請求項12に記載の真空排気システム。
- 前記複数の処理チャンバから排気された処理ガスを無害化するガス処理装置をさらに備えたことを特徴とする請求項1乃至17のいずれか一項に記載の真空排気システム。
- 吸込管と、
前記吸込管から分岐した分岐管およびバックアップ管と、
前記分岐管および前記バックアップ管にそれぞれ取り付けられた開閉弁およびバックアップ弁と、
前記分岐管に接続された真空ポンプと、
前記バックアップ管に接続されたバックアップポンプと、
前記開閉弁および前記バックアップ弁の開閉動作を制御する動作制御部とを備え、
前記動作制御部は、前記真空ポンプの回転速度をしきい値と比較し、前記真空ポンプの回転速度が前記しきい値よりも低いときに、前記バックアップ弁を開け、前記開閉弁を閉じるように構成され、
前記真空ポンプの回転速度が前記しきい値に等しいときの前記吸込側圧力は、前記吸込側圧力の異常上昇を示す圧力上限値よりも低いことを特徴とする真空排気システム。 - 前記真空ポンプは、その回転速度が予め設定された速度下限値に達した場合は、速度低下信号を前記動作制御部に送信するように構成されており、
前記しきい値は前記速度下限値よりも大きいことを特徴とする請求項19に記載の真空排気システム。 - 前記真空ポンプの回転速度が前記しきい値以上であるときは、前記バックアップポンプは第1の回転速度で運転し、前記真空ポンプの回転速度が前記しきい値よりも低いときは、前記バックアップポンプは前記第1の回転速度よりも高い第2の回転速度で運転することを特徴とする請求項19に記載の真空排気システム。
- 前記動作制御部は、前記バックアップ弁を開けた後であって前記開閉弁を閉じる前に、前記真空ポンプの回転速度を前記しきい値と再度比較し、前記真空ポンプの回転速度が前記しきい値よりも低い場合には、前記開閉弁を閉じることを特徴とする請求項19に記載の真空排気システム。
- 吸込管と、
前記吸込管から分岐した分岐管およびバックアップ管と、
前記分岐管および前記バックアップ管にそれぞれ取り付けられた開閉弁およびバックアップ弁と、
前記分岐管に接続された真空ポンプと、
前記バックアップ管に接続されたバックアップポンプと、
前記開閉弁および前記バックアップ弁の開閉動作を制御する動作制御部とを備え、
前記動作制御部は、前記真空ポンプの吸込側圧力がしきい値に達したときに、前記バックアップ弁を開け、前記開閉弁を閉じるように構成され、
前記しきい値は、前記吸込側圧力の異常上昇を示す圧力上限値よりも低いことを特徴とする真空排気システム。
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Also Published As
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KR102154082B1 (ko) | 2020-09-09 |
US10978315B2 (en) | 2021-04-13 |
TW201604315A (zh) | 2016-02-01 |
US20170200622A1 (en) | 2017-07-13 |
TWI700387B (zh) | 2020-08-01 |
KR20170013326A (ko) | 2017-02-06 |
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