JP2023511645A - 冗長ポンプシステム及びこのポンプシステムによる圧送方法 - Google Patents
冗長ポンプシステム及びこのポンプシステムによる圧送方法 Download PDFInfo
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- 238000000034 method Methods 0.000 title claims abstract description 73
- 238000005086 pumping Methods 0.000 title claims abstract description 61
- 238000006073 displacement reaction Methods 0.000 claims abstract description 40
- 230000008569 process Effects 0.000 claims description 58
- 238000001514 detection method Methods 0.000 claims description 12
- 210000000078 claw Anatomy 0.000 claims description 2
- 239000007789 gas Substances 0.000 description 38
- 239000004065 semiconductor Substances 0.000 description 11
- 235000012431 wafers Nutrition 0.000 description 8
- 238000004519 manufacturing process Methods 0.000 description 7
- 230000006835 compression Effects 0.000 description 6
- 238000007906 compression Methods 0.000 description 6
- 238000011109 contamination Methods 0.000 description 6
- 230000006378 damage Effects 0.000 description 5
- 238000010586 diagram Methods 0.000 description 3
- 239000006227 byproduct Substances 0.000 description 2
- 238000005229 chemical vapour deposition Methods 0.000 description 2
- 238000005530 etching Methods 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 238000004320 controlled atmosphere Methods 0.000 description 1
- 238000002425 crystallisation Methods 0.000 description 1
- 230000008025 crystallization Effects 0.000 description 1
- 230000001419 dependent effect Effects 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 238000004821 distillation Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 235000013305 food Nutrition 0.000 description 1
- 238000004108 freeze drying Methods 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 238000004806 packaging method and process Methods 0.000 description 1
- 238000000059 patterning Methods 0.000 description 1
- 239000010909 process residue Substances 0.000 description 1
- 230000004044 response Effects 0.000 description 1
- 230000009528 severe injury Effects 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Chemical compound O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
- F04B37/10—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use
- F04B37/14—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use to obtain high vacuum
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B41/00—Pumping installations or systems specially adapted for elastic fluids
- F04B41/06—Combinations of two or more pumps
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
- F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
- F04C18/12—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
- F04C18/123—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with radially or approximately radially from the rotor body extending tooth-like elements, co-operating with recesses in the other rotor, e.g. one tooth
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
- F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
- F04C18/12—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
- F04C18/126—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with radially from the rotor body extending elements, not necessarily co-operating with corresponding recesses in the other rotor, e.g. lobes, Roots type
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- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
- F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
- F04C18/12—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
- F04C18/14—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with toothed rotary pistons
- F04C18/16—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with toothed rotary pistons with helical teeth, e.g. chevron-shaped, screw type
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
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- F04C23/00—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C23/00—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids
- F04C23/005—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids of dissimilar working principle
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C23/00—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids
- F04C23/005—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids of dissimilar working principle
- F04C23/006—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids of dissimilar working principle having complementary function
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C25/00—Adaptations of pumps for special use of pumps for elastic fluids
- F04C25/02—Adaptations of pumps for special use of pumps for elastic fluids for producing high vacuum
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C28/00—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids
- F04C28/02—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids specially adapted for several pumps connected in series or in parallel
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C28/00—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids
- F04C28/24—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids characterised by using valves controlling pressure or flow rate, e.g. discharge valves or unloading valves
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C28/00—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids
- F04C28/24—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids characterised by using valves controlling pressure or flow rate, e.g. discharge valves or unloading valves
- F04C28/26—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids characterised by using valves controlling pressure or flow rate, e.g. discharge valves or unloading valves using bypass channels
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B2205/00—Fluid parameters
- F04B2205/09—Flow through the pump
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
- F04C18/02—Rotary-piston pumps specially adapted for elastic fluids of arcuate-engagement type, i.e. with circular translatory movement of co-operating members, each member having the same number of teeth or tooth-equivalents
- F04C18/0207—Rotary-piston pumps specially adapted for elastic fluids of arcuate-engagement type, i.e. with circular translatory movement of co-operating members, each member having the same number of teeth or tooth-equivalents both members having co-operating elements in spiral form
- F04C18/0215—Rotary-piston pumps specially adapted for elastic fluids of arcuate-engagement type, i.e. with circular translatory movement of co-operating members, each member having the same number of teeth or tooth-equivalents both members having co-operating elements in spiral form where only one member is moving
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
- F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
- F04C18/12—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
- F04C18/14—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with toothed rotary pistons
- F04C18/18—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with toothed rotary pistons with similar tooth forms
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
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- F04C2220/00—Application
- F04C2220/10—Vacuum
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
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- F04C28/00—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids
- F04C28/28—Safety arrangements; Monitoring
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Abstract
【選択図】図3
Description
Claims (14)
- 冗長真空ポンプシステム(300)であって、
プロセスチャンバー(301)に接続可能なガス吸引入口(302a)と、第1のポンプサブシステム(310)及び第2のポンプサブシステム(320)に接続されるガス放出出口(302b)とを有する主ルーツポンプ(302)を備え、
前記第1のポンプサブシステム(310)及び前記第2のポンプサブシステム(320)は、前記主ルーツポンプ(302)によって排気されるガスを並列して圧送するように配置され、
前記第1のポンプサブシステム(310)は、第1の副ルーツポンプ(311)と、第1の容積型ポンプ(312)と、前記主ルーツポンプ(302)の前記ガス放出出口(302b)と前記第1の副ルーツポンプ(311)のガス吸引入口(311a)との間に位置する第1の弁(313)とを備え、
前記第2のポンプサブシステム(320)は、第2の副ルーツポンプ(311)と、第2の容積型ポンプ(312)と、前記主ルーツポンプ(302)の前記ガス放出出口(302b)と前記第2の副ルーツポンプ(321)のガス吸引入口(321a)との間に位置する第2の弁(323)とを備え、
前記第1のポンプサブシステム(310)及び前記第2のポンプサブシステム(320)は、同じ流量で圧送するように構成され、
前記主ルーツポンプ(302)は、前記一次ポンプサブシステム(310)の圧送流量と前記二次ポンプサブシステム(320)の圧送流量とを足したものに等しい流量Fで圧送することが可能であるように構成されることを特徴とする、冗長真空ポンプシステム。 - 請求項1に記載の冗長真空ポンプシステム(300)であって、前記第1の容積型ポンプ(312)及び/又は前記第2の容積型ポンプ(322)は、ドライスクリューポンプである、冗長真空ポンプシステム。
- 請求項1に記載の冗長真空ポンプシステム(300)であって、前記第1の容積型ポンプ(312)及び/又は前記第2の容積型ポンプ(322)は、ドライクローポンプである、冗長真空ポンプシステム。
- 請求項1に記載の冗長真空ポンプシステム(300)であって、前記第1の容積型ポンプ(312)及び/又は前記第2の容積型ポンプ(322)は、スクロールポンプである、冗長真空ポンプシステム。
- 請求項1に記載の冗長真空ポンプシステム(300)であって、前記第1の容積型ポンプ(312)及び/又は前記第2の容積型ポンプ(322)は、ダイアフラムポンプである、冗長真空ポンプシステム。
- 前述の請求項のいずれか1項に記載の冗長真空ポンプシステム(300)であって、前記主ルーツポンプ(302)に並列して配置される第3の弁(304)を備えるバイパスダクト(303)を備える、冗長真空ポンプシステム。
- 前述の請求項のいずれか1項に記載の冗長真空ポンプシステム(300)であって、前記第1の容積型ポンプ(312)及び前記第2の容積型ポンプ(322)は、排気処理設備、有利にはスクラバーに接続される、冗長真空ポンプシステム。
- 前述の請求項のいずれか1項に記載の冗長真空ポンプシステム(300)であって、前記主ルーツポンプ(302)の前記圧送流量は、5000L/分~100000L/分、有利には10000L/分~70000L/分、好ましくは25000L/分~55000L/分である、冗長真空ポンプシステム。
- 前述の請求項のいずれか1項に記載の冗長真空ポンプシステム(300)であって、前記主ルーツポンプ(302)、前記第1の副ルーツポンプ(311)、前記第2の副ルーツポンプ(321)、前記第1の容積型ポンプ(312)、又は前記第2の容積型ポンプ(322)のうちのいずれかの故障を検出する故障検出手段を備える、冗長真空ポンプシステム。
- 請求項9に記載の冗長真空ポンプシステム(300)であって、前記故障検出手段は、故障が検出された場合に、前記第1の弁(313)、前記第2の弁(323)、及び/又は前記第3の弁(304)を作動させることを可能にするように構成される、冗長真空ポンプシステム。
- 前述の請求項のいずれか1項に記載の冗長真空ポンプシステム(300)による圧送方法であって、前記主ルーツポンプ(302)は、前記第1のポンプサブシステム(310)の前記流量と前記第2のポンプサブシステム(320)の前記流量との前記合計に等しい公称流量において常に駆動されることを特徴とする、圧送方法。
- 前記ポンプシステム(300)は、第3の弁(304)を備えるバイパスダクト(303)を備え、前記第3の弁(304)は、前記故障検出手段によって前記主ルーツポンプ(320)の故障が検出された場合、開放位置に切り替わる、請求項11に記載の圧送方法。
- 前記故障検出手段は、前記第1の副ルーツポンプ(311)又は前記第1の容積型ポンプ(312)の故障が検出された場合、前記第1の弁(313)を閉鎖する、請求項10又は11に記載の圧送方法。
- 前記故障検出手段は、前記第2の副ルーツポンプ(311)又は前記第2の容積型ポンプ(312)の故障が検出された場合、前記第2の弁(313)を閉鎖する、請求項10又は11に記載の圧送方法。
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PCT/EP2019/083664 WO2021110257A1 (en) | 2019-12-04 | 2019-12-04 | Redundant pumping system and pumping method by means of this pumping system |
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US (1) | US20230003208A1 (ja) |
EP (1) | EP4069976A1 (ja) |
JP (1) | JP2023511645A (ja) |
KR (1) | KR20220107211A (ja) |
CN (1) | CN115210468A (ja) |
AU (1) | AU2019477299A1 (ja) |
BR (1) | BR112022008743A2 (ja) |
CA (1) | CA3157078A1 (ja) |
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Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH1193878A (ja) * | 1997-09-22 | 1999-04-06 | Aisin Seiki Co Ltd | 多段式真空ポンプ |
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JP2008144766A (ja) * | 2008-02-04 | 2008-06-26 | Tadahiro Omi | 真空装置 |
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- 2019-12-04 AU AU2019477299A patent/AU2019477299A1/en active Pending
- 2019-12-04 CA CA3157078A patent/CA3157078A1/en active Pending
- 2019-12-04 JP JP2022530882A patent/JP2023511645A/ja active Pending
- 2019-12-04 KR KR1020227020500A patent/KR20220107211A/ko not_active Application Discontinuation
- 2019-12-04 WO PCT/EP2019/083664 patent/WO2021110257A1/en unknown
- 2019-12-04 CN CN201980102781.6A patent/CN115210468A/zh active Pending
- 2019-12-04 US US17/781,515 patent/US20230003208A1/en active Pending
- 2019-12-04 BR BR112022008743A patent/BR112022008743A2/pt active Search and Examination
- 2019-12-04 EP EP19816291.9A patent/EP4069976A1/en active Pending
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2020
- 2020-10-20 TW TW109136282A patent/TW202126904A/zh unknown
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JPH1193878A (ja) * | 1997-09-22 | 1999-04-06 | Aisin Seiki Co Ltd | 多段式真空ポンプ |
JP2003129957A (ja) * | 2001-10-26 | 2003-05-08 | Ulvac Japan Ltd | 真空排気方法および真空排気装置 |
JP2010540824A (ja) * | 2007-09-26 | 2010-12-24 | アルカテル−ルーセント | 2つのヘリカルロータを備える真空ポンプ |
JP2008144766A (ja) * | 2008-02-04 | 2008-06-26 | Tadahiro Omi | 真空装置 |
JP2015227618A (ja) * | 2014-05-30 | 2015-12-17 | 株式会社荏原製作所 | 真空排気システム |
JP2019152214A (ja) * | 2019-06-24 | 2019-09-12 | 株式会社荏原製作所 | 真空排気システム |
Also Published As
Publication number | Publication date |
---|---|
BR112022008743A2 (pt) | 2022-07-26 |
US20230003208A1 (en) | 2023-01-05 |
KR20220107211A (ko) | 2022-08-02 |
AU2019477299A1 (en) | 2022-06-16 |
WO2021110257A1 (en) | 2021-06-10 |
EP4069976A1 (en) | 2022-10-12 |
CN115210468A (zh) | 2022-10-18 |
TW202126904A (zh) | 2021-07-16 |
CA3157078A1 (en) | 2021-06-10 |
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