FR2952683B1 - Procede et dispositif de pompage a consommation d'energie reduite - Google Patents

Procede et dispositif de pompage a consommation d'energie reduite

Info

Publication number
FR2952683B1
FR2952683B1 FR0958138A FR0958138A FR2952683B1 FR 2952683 B1 FR2952683 B1 FR 2952683B1 FR 0958138 A FR0958138 A FR 0958138A FR 0958138 A FR0958138 A FR 0958138A FR 2952683 B1 FR2952683 B1 FR 2952683B1
Authority
FR
France
Prior art keywords
pumping
energy consumption
reduced energy
reduced
consumption
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
FR0958138A
Other languages
English (en)
Other versions
FR2952683A1 (fr
Inventor
Thierry Neel
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Pfeiffer Vacuum SAS
Original Assignee
Alcatel Lucent SAS
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority to FR0958138A priority Critical patent/FR2952683B1/fr
Application filed by Alcatel Lucent SAS filed Critical Alcatel Lucent SAS
Priority to PCT/FR2010/052305 priority patent/WO2011061429A2/fr
Priority to EP10790462.5A priority patent/EP2501936B1/fr
Priority to JP2012539382A priority patent/JP5769722B2/ja
Priority to KR1020127012734A priority patent/KR101778318B1/ko
Priority to CN201080052223.2A priority patent/CN102713299B/zh
Priority to US13/505,337 priority patent/US9175688B2/en
Priority to TW099137629A priority patent/TWI507604B/zh
Publication of FR2952683A1 publication Critical patent/FR2952683A1/fr
Application granted granted Critical
Publication of FR2952683B1 publication Critical patent/FR2952683B1/fr
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/046—Combinations of two or more different types of pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C23/00—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids
    • F04C23/005—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids of dissimilar working principle
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C25/00—Adaptations of pumps for special use of pumps for elastic fluids
    • F04C25/02—Adaptations of pumps for special use of pumps for elastic fluids for producing high vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D15/00—Control, e.g. regulation, of pumps, pumping installations or systems
    • F04D15/02—Stopping of pumps, or operating valves, on occurrence of unwanted conditions
    • F04D15/0245—Stopping of pumps, or operating valves, on occurrence of unwanted conditions responsive to a condition of the pump
    • F04D15/0254—Stopping of pumps, or operating valves, on occurrence of unwanted conditions responsive to a condition of the pump the condition being speed or load
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D15/00—Control, e.g. regulation, of pumps, pumping installations or systems
    • F04D15/02—Stopping of pumps, or operating valves, on occurrence of unwanted conditions
    • F04D15/0281—Stopping of pumps, or operating valves, on occurrence of unwanted conditions responsive to a condition not otherwise provided for
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D25/00—Pumping installations or systems
    • F04D25/16—Combinations of two or more pumps ; Producing two or more separate gas flows
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D27/00—Control, e.g. regulation, of pumps, pumping installations or pumping systems specially adapted for elastic fluids
    • F04D27/004—Control, e.g. regulation, of pumps, pumping installations or pumping systems specially adapted for elastic fluids by varying driving speed
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04F—PUMPING OF FLUID BY DIRECT CONTACT OF ANOTHER FLUID OR BY USING INERTIA OF FLUID TO BE PUMPED; SIPHONS
    • F04F5/00—Jet pumps, i.e. devices in which flow is induced by pressure drop caused by velocity of another fluid flow
    • F04F5/14—Jet pumps, i.e. devices in which flow is induced by pressure drop caused by velocity of another fluid flow the inducing fluid being elastic fluid
    • F04F5/16—Jet pumps, i.e. devices in which flow is induced by pressure drop caused by velocity of another fluid flow the inducing fluid being elastic fluid displacing elastic fluids
    • F04F5/20—Jet pumps, i.e. devices in which flow is induced by pressure drop caused by velocity of another fluid flow the inducing fluid being elastic fluid displacing elastic fluids for evacuating
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04F—PUMPING OF FLUID BY DIRECT CONTACT OF ANOTHER FLUID OR BY USING INERTIA OF FLUID TO BE PUMPED; SIPHONS
    • F04F5/00—Jet pumps, i.e. devices in which flow is induced by pressure drop caused by velocity of another fluid flow
    • F04F5/54—Installations characterised by use of jet pumps, e.g. combinations of two or more jet pumps of different type
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2220/00—Application
    • F04C2220/10—Vacuum
    • F04C2220/12—Dry running
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2270/00—Control; Monitoring or safety arrangements
    • F04C2270/02—Power
FR0958138A 2009-11-18 2009-11-18 Procede et dispositif de pompage a consommation d'energie reduite Expired - Fee Related FR2952683B1 (fr)

Priority Applications (8)

Application Number Priority Date Filing Date Title
FR0958138A FR2952683B1 (fr) 2009-11-18 2009-11-18 Procede et dispositif de pompage a consommation d'energie reduite
EP10790462.5A EP2501936B1 (fr) 2009-11-18 2010-10-27 Procede et dispositif de pompage a consommation d'energie reduite
JP2012539382A JP5769722B2 (ja) 2009-11-18 2010-10-27 低電力消費の排気方法及び装置
KR1020127012734A KR101778318B1 (ko) 2009-11-18 2010-10-27 전력 소비가 적은 펌핑 방법과 장치
PCT/FR2010/052305 WO2011061429A2 (fr) 2009-11-18 2010-10-27 Procede et dispositif de pompage a consommation d'energie reduite
CN201080052223.2A CN102713299B (zh) 2009-11-18 2010-10-27 具有低功耗的泵送方法和设备
US13/505,337 US9175688B2 (en) 2009-11-18 2010-10-27 Vacuum pumping system having an ejector and check valve
TW099137629A TWI507604B (zh) 2009-11-18 2010-11-02 具有低功率消耗之抽取方法及設備

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR0958138A FR2952683B1 (fr) 2009-11-18 2009-11-18 Procede et dispositif de pompage a consommation d'energie reduite

Publications (2)

Publication Number Publication Date
FR2952683A1 FR2952683A1 (fr) 2011-05-20
FR2952683B1 true FR2952683B1 (fr) 2011-11-04

Family

ID=42342727

Family Applications (1)

Application Number Title Priority Date Filing Date
FR0958138A Expired - Fee Related FR2952683B1 (fr) 2009-11-18 2009-11-18 Procede et dispositif de pompage a consommation d'energie reduite

Country Status (8)

Country Link
US (1) US9175688B2 (fr)
EP (1) EP2501936B1 (fr)
JP (1) JP5769722B2 (fr)
KR (1) KR101778318B1 (fr)
CN (1) CN102713299B (fr)
FR (1) FR2952683B1 (fr)
TW (1) TWI507604B (fr)
WO (1) WO2011061429A2 (fr)

Families Citing this family (25)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101989211B1 (ko) * 2012-02-13 2019-06-13 제이. 슈말츠 게엠베하 진공 발생기 작동 방법 및 진공 발생 장치
KR101995358B1 (ko) * 2012-06-28 2019-07-02 스털링 인더스트리 컨설트 게엠베하 챔버를 배기시키기 위한 방법 및 펌프 장치
FR2992927B1 (fr) * 2012-07-03 2014-08-08 Peugeot Citroen Automobiles Sa Circuit de vide avec pompe a vide pour systeme d'assistance pneumatique au freinage dans un vehicule automobile couple avec un circuit de suralimentation
KR102007839B1 (ko) * 2012-07-12 2019-08-06 엘지전자 주식회사 진공 청소기
FR2993614B1 (fr) * 2012-07-19 2018-06-15 Pfeiffer Vacuum Procede et dispositif de pompage d'une chambre de procedes
DE102012220442A1 (de) * 2012-11-09 2014-05-15 Oerlikon Leybold Vacuum Gmbh Vakuumpumpensystem zur Evakuierung einer Kammer sowie Verfahren zur Steuerung eines Vakuumpumpensystems
FR3008145B1 (fr) 2013-07-04 2015-08-07 Pfeiffer Vacuum Sas Pompe a vide primaire seche
FR3022319B1 (fr) * 2014-06-16 2016-11-18 Coval Cartouche pour circuit pneumatique et dispositif de prehension a ventouse comportant une telle cartouche
ES2687953T3 (es) * 2013-09-23 2018-10-30 Coval Cartucho para circuito neumático y dispositivo de prensión de ventosa que comprende un cartucho de este tipo
FR3010928B1 (fr) * 2013-09-23 2016-04-01 Coval Cartouche pour circuit pneumatique et dispositif de prehension a ventouse comportant une telle cartouche
CA2943315C (fr) * 2014-03-24 2021-09-21 Ateliers Busch Sa Methode de pompage dans un systeme de pompes a vide et systeme de pompes a vide
KR101424959B1 (ko) * 2014-04-08 2014-08-01 한국뉴매틱(주) 진공펌프
DK3137771T3 (da) * 2014-05-01 2020-06-08 Ateliers Busch S A Fremgangsmåde til pumpning i et pumpesystem og et system af vakuumpumper
CA2953455C (fr) 2014-06-27 2022-03-29 Ateliers Busch Sa Methode de pompage dans un systeme de pompes a vide et systeme de pompes a vide
KR20210102478A (ko) * 2014-09-26 2021-08-19 아뜰리에 부쉬 에스.아. 진공-발생 펌핑 시스템 및 이 펌핑 시스템을 사용한 펌핑 방법
DE202014007963U1 (de) * 2014-10-01 2016-01-05 Oerlikon Leybold Vacuum Gmbh Vakuumpumpsystem
RU2674297C2 (ru) * 2014-10-02 2018-12-06 Ателье Буш Са Система откачки для создания вакуума и способ откачки при помощи этой системы откачки
US9982666B2 (en) 2015-05-29 2018-05-29 Agilient Technologies, Inc. Vacuum pump system including scroll pump and secondary pumping mechanism
EP3153708B1 (fr) 2015-10-06 2019-07-17 Pfeiffer Vacuum Gmbh Pompe a spirales et procede destine au fonctionnement d'une pompe a spirales
FR3054005B1 (fr) * 2016-07-13 2018-08-24 Pfeiffer Vacuum Procede de descente en pression dans un sas de chargement et de dechargement et groupe de pompage associe
CN106762641A (zh) * 2016-11-28 2017-05-31 陈琼 一种真空联合机组
DE202016007609U1 (de) 2016-12-15 2018-03-26 Leybold Gmbh Vakuumpumpsystem
US11123687B2 (en) 2018-03-19 2021-09-21 Hamilton Sundstrand Corporation Vacuum assisted air separation module operation
FR3098869B1 (fr) * 2019-07-17 2021-07-16 Pfeiffer Vacuum Groupe de pompage
AU2019477299A1 (en) * 2019-12-04 2022-06-16 Ateliers Busch Sa Redundant pumping system and pumping method by means of this pumping system

Family Cites Families (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3064878A (en) * 1958-01-03 1962-11-20 Nash Engineering Co Method and apparatus for high performance evacuation system
US3239131A (en) * 1963-03-18 1966-03-08 Nash Engineering Co High vacuum ejector pump with automatic cut-in valve
FR1600217A (fr) * 1968-03-15 1970-07-20
US4699570A (en) 1986-03-07 1987-10-13 Itt Industries, Inc Vacuum pump system
JPS6385292A (ja) * 1986-09-29 1988-04-15 Hitachi Ltd 真空ポンプ
FR2640697B1 (fr) * 1988-12-16 1993-01-08 Cit Alcatel Ensemble de pompage pour l'obtention de vides eleves
DE10033212C1 (de) * 2000-07-07 2002-01-24 Festo Ag & Co Vakuumerzeugervorrichtung
DE60101368T2 (de) * 2001-02-22 2004-10-14 Varian S.P.A., Leini Vakuumpumpe
FR2822200B1 (fr) 2001-03-19 2003-09-26 Cit Alcatel Systeme de pompage pour gaz a faible conductivite thermique
WO2003023229A1 (fr) * 2001-09-06 2003-03-20 Ulvac, Inc. Systeme de pompe a vide et procede de fonctionnement d'un systeme de pompe a vide
US6589023B2 (en) * 2001-10-09 2003-07-08 Applied Materials, Inc. Device and method for reducing vacuum pump energy consumption
JP4365059B2 (ja) 2001-10-31 2009-11-18 株式会社アルバック 真空排気装置の運転方法
JP2004263635A (ja) * 2003-03-03 2004-09-24 Tadahiro Omi 真空装置および真空ポンプ
GB0326613D0 (en) 2003-11-14 2003-12-17 Boc Group Plc Vacuum pump
JP2006037868A (ja) * 2004-07-28 2006-02-09 Hitachi Ltd 負圧供給装置

Also Published As

Publication number Publication date
KR20120101000A (ko) 2012-09-12
KR101778318B1 (ko) 2017-09-13
FR2952683A1 (fr) 2011-05-20
TW201139850A (en) 2011-11-16
US9175688B2 (en) 2015-11-03
EP2501936B1 (fr) 2016-07-27
WO2011061429A3 (fr) 2012-07-12
WO2011061429A2 (fr) 2011-05-26
JP5769722B2 (ja) 2015-08-26
CN102713299B (zh) 2016-04-27
EP2501936A2 (fr) 2012-09-26
JP2013511644A (ja) 2013-04-04
US20120219443A1 (en) 2012-08-30
TWI507604B (zh) 2015-11-11
CN102713299A (zh) 2012-10-03

Similar Documents

Publication Publication Date Title
FR2952683B1 (fr) Procede et dispositif de pompage a consommation d'energie reduite
FR2945363B1 (fr) Procede et dispositif de codage d'un document structure
FR2944598B1 (fr) Procede et dispositif de pesage
FR2965197B1 (fr) Procede et dispositif de positionnement d'un premier tube vis-a-vis d'un deuxieme tube
FR2913935B1 (fr) Procede et dispositif de freinage aerodynamique a accumulation d'energie
FR2967470B1 (fr) Installation et procede d'exploitation d'energie eolienne
FR2937208B1 (fr) Procede et dispositif de tele-visionnage
FR2954670B1 (fr) Procede et dispositif pour reduire la consommation d'energie d'un centre comportant des equipements energivores.
FR2944128B1 (fr) Systeme et procede a l'appontage d'un aeronef
FR2948401B1 (fr) Systeme de securite avec fonction d'economie d'energie et procede associe
FR2947083B1 (fr) Dispositif et procede d'aide a l'atterrissage
FR2942792B1 (fr) Procede d'obtention de boues imputrescibles et d'energie et installation correspondante
FR2914759B1 (fr) Procede et dispositif de codage d'un document hierarchise
FR2979464B3 (fr) Dispositif d'affichage et procede de conversion de mode de dispositif d'affichage
FR2996780B1 (fr) Procede et dispositif de production d'energie
FR2956340B1 (fr) Procede et dispositif de demontage d'une bague fermement ajustee dans un alesage
FR2952466B1 (fr) Procede d'adaptation de parametres d'affichage d'un dispositif d'affichage, notamment embarque dans un aeronef
FR2968041B1 (fr) Dispositif et procede d'alimentation
FR2961312B1 (fr) Dispositif et procede de comptage d'energie electrique.
FR2938458B1 (fr) Dispositif et procede de thermonebulisation d'un liquide
FR2972085B1 (fr) Dispositif de conversion d'energie et procede de repartition associe
FR2968855B1 (fr) Procede et dispositif de surveillance d'un dispositif equipe d'un microprocesseur
FR2977966B1 (fr) Procede d'identification d'extincteur et dispositif d'identification d'extincteur
FR2965109B1 (fr) Generateur electrochimique et procede de realisation d'un tel generateur
FR2982992B1 (fr) Dispositif destine a de l'imagerie neutronique en milieu immerge et procede d'imagerie utilisant ledit dispositif

Legal Events

Date Code Title Description
TP Transmission of property

Owner name: ADIXEN VACUUM PRODUCTS, FR

Effective date: 20120210

PLFP Fee payment

Year of fee payment: 7

CD Change of name or company name

Owner name: PFEIFFER VACUUM, FR

Effective date: 20160120

PLFP Fee payment

Year of fee payment: 8

ST Notification of lapse

Effective date: 20180731