WO2011061429A3 - Procede et dispositif de pompage a consommation d'energie reduite - Google Patents
Procede et dispositif de pompage a consommation d'energie reduite Download PDFInfo
- Publication number
- WO2011061429A3 WO2011061429A3 PCT/FR2010/052305 FR2010052305W WO2011061429A3 WO 2011061429 A3 WO2011061429 A3 WO 2011061429A3 FR 2010052305 W FR2010052305 W FR 2010052305W WO 2011061429 A3 WO2011061429 A3 WO 2011061429A3
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- vacuum pump
- rough vacuum
- dry rough
- outlet
- gases
- Prior art date
Links
- 238000005086 pumping Methods 0.000 title abstract 4
- 238000000034 method Methods 0.000 title abstract 2
- 239000007789 gas Substances 0.000 abstract 8
- 230000000630 rising effect Effects 0.000 abstract 2
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D19/00—Axial-flow pumps
- F04D19/02—Multi-stage pumps
- F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
- F04D19/046—Combinations of two or more different types of pumps
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C23/00—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids
- F04C23/005—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids of dissimilar working principle
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C25/00—Adaptations of pumps for special use of pumps for elastic fluids
- F04C25/02—Adaptations of pumps for special use of pumps for elastic fluids for producing high vacuum
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D15/00—Control, e.g. regulation, of pumps, pumping installations or systems
- F04D15/02—Stopping of pumps, or operating valves, on occurrence of unwanted conditions
- F04D15/0245—Stopping of pumps, or operating valves, on occurrence of unwanted conditions responsive to a condition of the pump
- F04D15/0254—Stopping of pumps, or operating valves, on occurrence of unwanted conditions responsive to a condition of the pump the condition being speed or load
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D15/00—Control, e.g. regulation, of pumps, pumping installations or systems
- F04D15/02—Stopping of pumps, or operating valves, on occurrence of unwanted conditions
- F04D15/0281—Stopping of pumps, or operating valves, on occurrence of unwanted conditions responsive to a condition not otherwise provided for
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D19/00—Axial-flow pumps
- F04D19/02—Multi-stage pumps
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D25/00—Pumping installations or systems
- F04D25/16—Combinations of two or more pumps ; Producing two or more separate gas flows
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D27/00—Control, e.g. regulation, of pumps, pumping installations or pumping systems specially adapted for elastic fluids
- F04D27/004—Control, e.g. regulation, of pumps, pumping installations or pumping systems specially adapted for elastic fluids by varying driving speed
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04F—PUMPING OF FLUID BY DIRECT CONTACT OF ANOTHER FLUID OR BY USING INERTIA OF FLUID TO BE PUMPED; SIPHONS
- F04F5/00—Jet pumps, i.e. devices in which flow is induced by pressure drop caused by velocity of another fluid flow
- F04F5/14—Jet pumps, i.e. devices in which flow is induced by pressure drop caused by velocity of another fluid flow the inducing fluid being elastic fluid
- F04F5/16—Jet pumps, i.e. devices in which flow is induced by pressure drop caused by velocity of another fluid flow the inducing fluid being elastic fluid displacing elastic fluids
- F04F5/20—Jet pumps, i.e. devices in which flow is induced by pressure drop caused by velocity of another fluid flow the inducing fluid being elastic fluid displacing elastic fluids for evacuating
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04F—PUMPING OF FLUID BY DIRECT CONTACT OF ANOTHER FLUID OR BY USING INERTIA OF FLUID TO BE PUMPED; SIPHONS
- F04F5/00—Jet pumps, i.e. devices in which flow is induced by pressure drop caused by velocity of another fluid flow
- F04F5/54—Installations characterised by use of jet pumps, e.g. combinations of two or more jet pumps of different type
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C2220/00—Application
- F04C2220/10—Vacuum
- F04C2220/12—Dry running
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C2270/00—Control; Monitoring or safety arrangements
- F04C2270/02—Power
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Fluid Mechanics (AREA)
- Jet Pumps And Other Pumps (AREA)
- Applications Or Details Of Rotary Compressors (AREA)
- Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
- Control Of Positive-Displacement Pumps (AREA)
- Drying Of Solid Materials (AREA)
Abstract
Priority Applications (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201080052223.2A CN102713299B (zh) | 2009-11-18 | 2010-10-27 | 具有低功耗的泵送方法和设备 |
EP10790462.5A EP2501936B1 (fr) | 2009-11-18 | 2010-10-27 | Procede et dispositif de pompage a consommation d'energie reduite |
US13/505,337 US9175688B2 (en) | 2009-11-18 | 2010-10-27 | Vacuum pumping system having an ejector and check valve |
JP2012539382A JP5769722B2 (ja) | 2009-11-18 | 2010-10-27 | 低電力消費の排気方法及び装置 |
KR1020127012734A KR101778318B1 (ko) | 2009-11-18 | 2010-10-27 | 전력 소비가 적은 펌핑 방법과 장치 |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR0958138 | 2009-11-18 | ||
FR0958138A FR2952683B1 (fr) | 2009-11-18 | 2009-11-18 | Procede et dispositif de pompage a consommation d'energie reduite |
Publications (2)
Publication Number | Publication Date |
---|---|
WO2011061429A2 WO2011061429A2 (fr) | 2011-05-26 |
WO2011061429A3 true WO2011061429A3 (fr) | 2012-07-12 |
Family
ID=42342727
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/FR2010/052305 WO2011061429A2 (fr) | 2009-11-18 | 2010-10-27 | Procede et dispositif de pompage a consommation d'energie reduite |
Country Status (8)
Country | Link |
---|---|
US (1) | US9175688B2 (fr) |
EP (1) | EP2501936B1 (fr) |
JP (1) | JP5769722B2 (fr) |
KR (1) | KR101778318B1 (fr) |
CN (1) | CN102713299B (fr) |
FR (1) | FR2952683B1 (fr) |
TW (1) | TWI507604B (fr) |
WO (1) | WO2011061429A2 (fr) |
Families Citing this family (26)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2013120801A1 (fr) * | 2012-02-13 | 2013-08-22 | J. Schmalz Gmbh | Procédé de fonctionnement d'un générateur de dépression et dispositif générateur de dépression |
KR101995358B1 (ko) | 2012-06-28 | 2019-07-02 | 스털링 인더스트리 컨설트 게엠베하 | 챔버를 배기시키기 위한 방법 및 펌프 장치 |
FR2992927B1 (fr) * | 2012-07-03 | 2014-08-08 | Peugeot Citroen Automobiles Sa | Circuit de vide avec pompe a vide pour systeme d'assistance pneumatique au freinage dans un vehicule automobile couple avec un circuit de suralimentation |
KR102007839B1 (ko) * | 2012-07-12 | 2019-08-06 | 엘지전자 주식회사 | 진공 청소기 |
FR2993614B1 (fr) * | 2012-07-19 | 2018-06-15 | Pfeiffer Vacuum | Procede et dispositif de pompage d'une chambre de procedes |
DE102012220442A1 (de) * | 2012-11-09 | 2014-05-15 | Oerlikon Leybold Vacuum Gmbh | Vakuumpumpensystem zur Evakuierung einer Kammer sowie Verfahren zur Steuerung eines Vakuumpumpensystems |
FR3008145B1 (fr) | 2013-07-04 | 2015-08-07 | Pfeiffer Vacuum Sas | Pompe a vide primaire seche |
US20160230779A1 (en) * | 2013-09-23 | 2016-08-11 | Coval | Cartridge for a Pneumatic Circuit and Suction Gripper Device Comprising such a Cartridge |
FR3010928B1 (fr) * | 2013-09-23 | 2016-04-01 | Coval | Cartouche pour circuit pneumatique et dispositif de prehension a ventouse comportant une telle cartouche |
FR3022319B1 (fr) * | 2014-06-16 | 2016-11-18 | Coval | Cartouche pour circuit pneumatique et dispositif de prehension a ventouse comportant une telle cartouche |
ES2752762T3 (es) * | 2014-03-24 | 2020-04-06 | Ateliers Busch S A | Procedimiento de bombeo en un sistema de bombas de vacío y sistema de bombas de vacío |
KR101424959B1 (ko) * | 2014-04-08 | 2014-08-01 | 한국뉴매틱(주) | 진공펌프 |
AU2014392229B2 (en) * | 2014-05-01 | 2018-11-22 | Ateliers Busch Sa | Method of pumping in a pumping system and vacuum pump system |
PT3161318T (pt) | 2014-06-27 | 2020-03-06 | Ateliers Busch S A | Método de bombagem num sistema de bombas de vácuo e sistema de bombas de vácuo |
CN107002680A (zh) * | 2014-09-26 | 2017-08-01 | 阿特利耶博世股份有限公司 | 用于产生真空的泵送系统及利用此泵送系统的泵送方法 |
DE202014007963U1 (de) | 2014-10-01 | 2016-01-05 | Oerlikon Leybold Vacuum Gmbh | Vakuumpumpsystem |
JP6512674B2 (ja) * | 2014-10-02 | 2019-05-15 | アテリエ ビスク ソシエテ アノニムAtelier Busch SA | 真空を生成するための圧送システムおよびこの圧送システムによる圧送方法 |
US9982666B2 (en) | 2015-05-29 | 2018-05-29 | Agilient Technologies, Inc. | Vacuum pump system including scroll pump and secondary pumping mechanism |
EP3153708B1 (fr) | 2015-10-06 | 2019-07-17 | Pfeiffer Vacuum Gmbh | Pompe a spirales et procede destine au fonctionnement d'une pompe a spirales |
FR3054005B1 (fr) * | 2016-07-13 | 2018-08-24 | Pfeiffer Vacuum | Procede de descente en pression dans un sas de chargement et de dechargement et groupe de pompage associe |
CN106762641A (zh) * | 2016-11-28 | 2017-05-31 | 陈琼 | 一种真空联合机组 |
DE202016007609U1 (de) | 2016-12-15 | 2018-03-26 | Leybold Gmbh | Vakuumpumpsystem |
US11123687B2 (en) | 2018-03-19 | 2021-09-21 | Hamilton Sundstrand Corporation | Vacuum assisted air separation module operation |
FR3098869B1 (fr) * | 2019-07-17 | 2021-07-16 | Pfeiffer Vacuum | Groupe de pompage |
KR20220107211A (ko) * | 2019-12-04 | 2022-08-02 | 아뜰리에 부쉬 에스.아. | 중복 펌핑 시스템과 이 펌핑 시스템에 의한 펌핑 방법 |
US11982406B1 (en) | 2021-02-08 | 2024-05-14 | United Launch Alliance, L.L.C. | Method and apparatus for controlling temperature and pressure inside a propellant tank |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3239131A (en) * | 1963-03-18 | 1966-03-08 | Nash Engineering Co | High vacuum ejector pump with automatic cut-in valve |
JPS6385292A (ja) * | 1986-09-29 | 1988-04-15 | Hitachi Ltd | 真空ポンプ |
EP1234982A1 (fr) * | 2001-02-22 | 2002-08-28 | VARIAN S.p.A. | Pompe à vide |
EP1609990A1 (fr) * | 2003-03-03 | 2005-12-28 | OHMI, Tadahiro | Dispositif sous vide et pompe sous vide |
Family Cites Families (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3064878A (en) * | 1958-01-03 | 1962-11-20 | Nash Engineering Co | Method and apparatus for high performance evacuation system |
FR1600217A (fr) * | 1968-03-15 | 1970-07-20 | ||
US4699570A (en) * | 1986-03-07 | 1987-10-13 | Itt Industries, Inc | Vacuum pump system |
FR2640697B1 (fr) * | 1988-12-16 | 1993-01-08 | Cit Alcatel | Ensemble de pompage pour l'obtention de vides eleves |
DE10033212C1 (de) * | 2000-07-07 | 2002-01-24 | Festo Ag & Co | Vakuumerzeugervorrichtung |
FR2822200B1 (fr) * | 2001-03-19 | 2003-09-26 | Cit Alcatel | Systeme de pompage pour gaz a faible conductivite thermique |
KR100876318B1 (ko) * | 2001-09-06 | 2008-12-31 | 가부시키가이샤 아루박 | 진공배기장치 및 진공배기장치의 운전방법 |
US6589023B2 (en) * | 2001-10-09 | 2003-07-08 | Applied Materials, Inc. | Device and method for reducing vacuum pump energy consumption |
JP4365059B2 (ja) * | 2001-10-31 | 2009-11-18 | 株式会社アルバック | 真空排気装置の運転方法 |
GB0326613D0 (en) | 2003-11-14 | 2003-12-17 | Boc Group Plc | Vacuum pump |
JP2006037868A (ja) * | 2004-07-28 | 2006-02-09 | Hitachi Ltd | 負圧供給装置 |
-
2009
- 2009-11-18 FR FR0958138A patent/FR2952683B1/fr not_active Expired - Fee Related
-
2010
- 2010-10-27 US US13/505,337 patent/US9175688B2/en active Active
- 2010-10-27 WO PCT/FR2010/052305 patent/WO2011061429A2/fr active Application Filing
- 2010-10-27 KR KR1020127012734A patent/KR101778318B1/ko active IP Right Grant
- 2010-10-27 JP JP2012539382A patent/JP5769722B2/ja active Active
- 2010-10-27 EP EP10790462.5A patent/EP2501936B1/fr active Active
- 2010-10-27 CN CN201080052223.2A patent/CN102713299B/zh active Active
- 2010-11-02 TW TW099137629A patent/TWI507604B/zh active
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3239131A (en) * | 1963-03-18 | 1966-03-08 | Nash Engineering Co | High vacuum ejector pump with automatic cut-in valve |
JPS6385292A (ja) * | 1986-09-29 | 1988-04-15 | Hitachi Ltd | 真空ポンプ |
EP1234982A1 (fr) * | 2001-02-22 | 2002-08-28 | VARIAN S.p.A. | Pompe à vide |
EP1609990A1 (fr) * | 2003-03-03 | 2005-12-28 | OHMI, Tadahiro | Dispositif sous vide et pompe sous vide |
Also Published As
Publication number | Publication date |
---|---|
JP5769722B2 (ja) | 2015-08-26 |
JP2013511644A (ja) | 2013-04-04 |
TWI507604B (zh) | 2015-11-11 |
EP2501936A2 (fr) | 2012-09-26 |
KR101778318B1 (ko) | 2017-09-13 |
KR20120101000A (ko) | 2012-09-12 |
US20120219443A1 (en) | 2012-08-30 |
FR2952683A1 (fr) | 2011-05-20 |
TW201139850A (en) | 2011-11-16 |
EP2501936B1 (fr) | 2016-07-27 |
US9175688B2 (en) | 2015-11-03 |
WO2011061429A2 (fr) | 2011-05-26 |
CN102713299A (zh) | 2012-10-03 |
FR2952683B1 (fr) | 2011-11-04 |
CN102713299B (zh) | 2016-04-27 |
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