FR3098869B1 - Groupe de pompage - Google Patents
Groupe de pompage Download PDFInfo
- Publication number
- FR3098869B1 FR3098869B1 FR1908088A FR1908088A FR3098869B1 FR 3098869 B1 FR3098869 B1 FR 3098869B1 FR 1908088 A FR1908088 A FR 1908088A FR 1908088 A FR1908088 A FR 1908088A FR 3098869 B1 FR3098869 B1 FR 3098869B1
- Authority
- FR
- France
- Prior art keywords
- vacuum pump
- pumping
- primary vacuum
- flow
- roots
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 238000005086 pumping Methods 0.000 title abstract 5
- 239000007789 gas Substances 0.000 abstract 2
- 238000011144 upstream manufacturing Methods 0.000 abstract 1
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C25/00—Adaptations of pumps for special use of pumps for elastic fluids
- F04C25/02—Adaptations of pumps for special use of pumps for elastic fluids for producing high vacuum
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F01—MACHINES OR ENGINES IN GENERAL; ENGINE PLANTS IN GENERAL; STEAM ENGINES
- F01C—ROTARY-PISTON OR OSCILLATING-PISTON MACHINES OR ENGINES
- F01C21/00—Component parts, details or accessories not provided for in groups F01C1/00 - F01C20/00
- F01C21/10—Outer members for co-operation with rotary pistons; Casings
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
- F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
- F04C18/12—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
- F04C18/126—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with radially from the rotor body extending elements, not necessarily co-operating with corresponding recesses in the other rotor, e.g. lobes, Roots type
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C23/00—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids
- F04C23/001—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids of similar working principle
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C23/00—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids
- F04C23/02—Pumps characterised by combination with, or adaptation to, specific driving engines or motors
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C28/00—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids
- F04C28/08—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids characterised by varying the rotational speed
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C28/00—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids
- F04C28/24—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids characterised by using valves controlling pressure or flow rate, e.g. discharge valves or unloading valves
- F04C28/26—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids characterised by using valves controlling pressure or flow rate, e.g. discharge valves or unloading valves using bypass channels
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
- F04C29/0042—Driving elements, brakes, couplings, transmissions specially adapted for pumps
- F04C29/0085—Prime movers
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C2220/00—Application
- F04C2220/10—Vacuum
- F04C2220/12—Dry running
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C2240/00—Components
- F04C2240/10—Stators
- F04C2240/102—Stators with means for discharging condensate or liquid separated from the gas pumped
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C2240/00—Components
- F04C2240/20—Rotors
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C2240/00—Components
- F04C2240/40—Electric motor
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C2240/00—Components
- F04C2240/80—Other components
- F04C2240/803—Electric connectors or cables; Fittings therefor
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Fluid Mechanics (AREA)
- Applications Or Details Of Rotary Compressors (AREA)
Abstract
Groupe de pompage (1) comportant une pompe à vide primaire (2) et une pompe à vide Roots (3) raccordée en série et en amont de la pompe à vide primaire (2) dans le sens d’écoulement (G) des gaz pompés, caractérisé en ce que :- la pompe à vide Roots (3) comporte trois étages de pompage (B1-B3) dans lesquels des rotors (10) sont configurés pour être entrainés simultanément en rotation par un moteur (M2) de la pompe à vide Roots (3), et - le rapport du débit engendré par le premier étage de pompage (T1) de la pompe à vide primaire (2) dans le sens d’écoulement (G) des gaz pompés sur le débit engendré par le dernier étage de pompage (T3) de la pompe à vide primaire (2) est inférieur ou égal à quatre. Figure pour l’abrégé : Fig. 1
Priority Applications (8)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR1908088A FR3098869B1 (fr) | 2019-07-17 | 2019-07-17 | Groupe de pompage |
TW109116541A TW202120792A (zh) | 2019-07-17 | 2020-05-19 | 泵單元 |
KR1020227000082A KR20220035090A (ko) | 2019-07-17 | 2020-06-24 | 펌프 유닛 |
JP2022502125A JP2022541763A (ja) | 2019-07-17 | 2020-06-24 | ポンプユニット |
US17/626,634 US11815096B2 (en) | 2019-07-17 | 2020-06-24 | Pump unit |
CN202080050947.7A CN114144572A (zh) | 2019-07-17 | 2020-06-24 | 泵送单元 |
DE112020003410.0T DE112020003410T5 (de) | 2019-07-17 | 2020-06-24 | Pumpenaggregat |
PCT/EP2020/067619 WO2021008834A1 (fr) | 2019-07-17 | 2020-06-24 | Groupe de pompage |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR1908088A FR3098869B1 (fr) | 2019-07-17 | 2019-07-17 | Groupe de pompage |
FR1908088 | 2019-07-17 |
Publications (2)
Publication Number | Publication Date |
---|---|
FR3098869A1 FR3098869A1 (fr) | 2021-01-22 |
FR3098869B1 true FR3098869B1 (fr) | 2021-07-16 |
Family
ID=67875766
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
FR1908088A Active FR3098869B1 (fr) | 2019-07-17 | 2019-07-17 | Groupe de pompage |
Country Status (8)
Country | Link |
---|---|
US (1) | US11815096B2 (fr) |
JP (1) | JP2022541763A (fr) |
KR (1) | KR20220035090A (fr) |
CN (1) | CN114144572A (fr) |
DE (1) | DE112020003410T5 (fr) |
FR (1) | FR3098869B1 (fr) |
TW (1) | TW202120792A (fr) |
WO (1) | WO2021008834A1 (fr) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR3098869B1 (fr) * | 2019-07-17 | 2021-07-16 | Pfeiffer Vacuum | Groupe de pompage |
Family Cites Families (19)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3922110A (en) * | 1974-01-28 | 1975-11-25 | Henry Huse | Multi-stage vacuum pump |
FR2813104B1 (fr) * | 2000-08-21 | 2002-11-29 | Cit Alcatel | Joint etancheite pour pompe a vide |
FR2822200B1 (fr) * | 2001-03-19 | 2003-09-26 | Cit Alcatel | Systeme de pompage pour gaz a faible conductivite thermique |
WO2003023229A1 (fr) * | 2001-09-06 | 2003-03-20 | Ulvac, Inc. | Systeme de pompe a vide et procede de fonctionnement d'un systeme de pompe a vide |
JP2003343469A (ja) * | 2002-03-20 | 2003-12-03 | Toyota Industries Corp | 真空ポンプ |
JP2004324644A (ja) * | 2003-04-10 | 2004-11-18 | Ebara Corp | ドライ真空ポンプ及びその起動方法 |
JP4218756B2 (ja) * | 2003-10-17 | 2009-02-04 | 株式会社荏原製作所 | 真空排気装置 |
US8662869B2 (en) * | 2007-11-14 | 2014-03-04 | Ulvac, Inc. | Multi-stage dry pump |
FR2952683B1 (fr) * | 2009-11-18 | 2011-11-04 | Alcatel Lucent | Procede et dispositif de pompage a consommation d'energie reduite |
GB0922564D0 (en) * | 2009-12-24 | 2010-02-10 | Edwards Ltd | Pump |
TWI518245B (zh) * | 2010-04-19 | 2016-01-21 | 荏原製作所股份有限公司 | 乾真空泵裝置、排氣單元,以及消音器 |
DE202014005481U1 (de) * | 2014-07-04 | 2014-07-18 | Oerlikon Leybold Vacuum Gmbh | Vakuumpumpvorrichtung mit mindestens einem Pumpenmodul |
GB2528450A (en) * | 2014-07-21 | 2016-01-27 | Edwards Ltd | Vacuum pump |
WO2017031807A1 (fr) * | 2015-08-27 | 2017-03-02 | 上海伊莱茨真空技术有限公司 | Pompe à vide non coaxiale à multiples chambres d'entraînement |
FR3054005B1 (fr) * | 2016-07-13 | 2018-08-24 | Pfeiffer Vacuum | Procede de descente en pression dans un sas de chargement et de dechargement et groupe de pompage associe |
FR3065040B1 (fr) * | 2017-04-07 | 2019-06-21 | Pfeiffer Vacuum | Groupe de pompage et utilisation |
CN108194353B (zh) * | 2018-02-02 | 2019-12-13 | 中山市天元真空设备技术有限公司 | 一种成对转子转轴独立的直排大气的多级罗茨干式真空泵 |
FR3078748B1 (fr) * | 2018-03-07 | 2020-03-27 | Pfeiffer Vacuum | Pompe a vide de type seche |
FR3098869B1 (fr) * | 2019-07-17 | 2021-07-16 | Pfeiffer Vacuum | Groupe de pompage |
-
2019
- 2019-07-17 FR FR1908088A patent/FR3098869B1/fr active Active
-
2020
- 2020-05-19 TW TW109116541A patent/TW202120792A/zh unknown
- 2020-06-24 CN CN202080050947.7A patent/CN114144572A/zh active Pending
- 2020-06-24 JP JP2022502125A patent/JP2022541763A/ja active Pending
- 2020-06-24 US US17/626,634 patent/US11815096B2/en active Active
- 2020-06-24 KR KR1020227000082A patent/KR20220035090A/ko unknown
- 2020-06-24 WO PCT/EP2020/067619 patent/WO2021008834A1/fr active Application Filing
- 2020-06-24 DE DE112020003410.0T patent/DE112020003410T5/de active Pending
Also Published As
Publication number | Publication date |
---|---|
DE112020003410T5 (de) | 2022-04-07 |
FR3098869A1 (fr) | 2021-01-22 |
WO2021008834A1 (fr) | 2021-01-21 |
KR20220035090A (ko) | 2022-03-21 |
CN114144572A (zh) | 2022-03-04 |
US11815096B2 (en) | 2023-11-14 |
JP2022541763A (ja) | 2022-09-27 |
TW202120792A (zh) | 2021-06-01 |
US20220299030A1 (en) | 2022-09-22 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
FR3098869B1 (fr) | Groupe de pompage | |
DE69104749D1 (de) | Verbesserte Turbomolekularpumpe. | |
US9845803B2 (en) | Screw pump | |
JP2011236907A (ja) | ターボ機関用ラビリンスシール | |
JP2001027195A (ja) | 真空ポンプ | |
CN110770444B (zh) | 多级旋转活塞泵 | |
JP2017520715A (ja) | 真空ポンプシステム | |
FR3094762B1 (fr) | Pompe à vide de type sèche et installation de pompage | |
RU2384745C1 (ru) | Двухсекционный центробежный компрессор | |
FR3112173B3 (fr) | Pompe à vide sèche et procédé de fabrication d’un rotor | |
MX2018003671A (es) | Metodo para enfriar un compresor o bomba de vacio aplicando dicho metodo. | |
JP6430718B2 (ja) | 真空ポンプ装置 | |
RU2631846C1 (ru) | Радиальный лопаточный диффузор центробежного компрессора | |
Hablanian | Engineering aspects of turbomolecular pump design | |
FR3117176B1 (fr) | Pompe à vide | |
FR3112176B1 (fr) | Pompe à vide primaire et Installation | |
FR3129992B1 (fr) | Groupe de pompage, dispositif et procédé de pompage et de traitement | |
RU2543917C1 (ru) | Двухпоточный турбомолекулярный вакуумный насос с гибридными проточными частями | |
FR3058481A1 (fr) | Compresseur axial comportant des rotors juxtaposes tournant dans des directions inverses | |
RU169121U1 (ru) | Многопоточный молекулярно-вязкостный вакуумный насос | |
RU2332586C1 (ru) | Роторно-вихревая машина | |
JP2587506B2 (ja) | 真空ポンプ | |
WO2022186075A8 (fr) | Pompe à vide | |
RU2243418C2 (ru) | Осевой многоступенчатый компрессор газотурбинного двигателя | |
SU1550222A1 (ru) | Турбомолекул рный вакуумный насос |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
PLFP | Fee payment |
Year of fee payment: 2 |
|
PLSC | Publication of the preliminary search report |
Effective date: 20210122 |
|
PLFP | Fee payment |
Year of fee payment: 3 |
|
PLFP | Fee payment |
Year of fee payment: 4 |
|
PLFP | Fee payment |
Year of fee payment: 5 |