FR3129992B1 - Groupe de pompage, dispositif et procédé de pompage et de traitement - Google Patents
Groupe de pompage, dispositif et procédé de pompage et de traitement Download PDFInfo
- Publication number
- FR3129992B1 FR3129992B1 FR2113163A FR2113163A FR3129992B1 FR 3129992 B1 FR3129992 B1 FR 3129992B1 FR 2113163 A FR2113163 A FR 2113163A FR 2113163 A FR2113163 A FR 2113163A FR 3129992 B1 FR3129992 B1 FR 3129992B1
- Authority
- FR
- France
- Prior art keywords
- pumping
- treatment device
- pumping group
- vacuum pump
- group
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 238000005086 pumping Methods 0.000 title abstract 6
- 238000000034 method Methods 0.000 title abstract 2
- 239000007789 gas Substances 0.000 abstract 3
- 238000011144 upstream manufacturing Methods 0.000 abstract 2
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B49/00—Control, e.g. of pump delivery, or pump pressure of, or safety measures for, machines, pumps, or pumping installations, not otherwise provided for, or of interest apart from, groups F04B1/00 - F04B47/00
- F04B49/06—Control using electricity
- F04B49/065—Control using electricity and making use of computers
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/4412—Details relating to the exhausts, e.g. pumps, filters, scrubbers, particle traps
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B41/00—Pumping installations or systems specially adapted for elastic fluids
- F04B41/06—Combinations of two or more pumps
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C23/00—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids
- F04C23/001—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids of similar working principle
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C23/00—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids
- F04C23/005—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids of dissimilar working principle
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C25/00—Adaptations of pumps for special use of pumps for elastic fluids
- F04C25/02—Adaptations of pumps for special use of pumps for elastic fluids for producing high vacuum
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C28/00—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids
- F04C28/28—Safety arrangements; Monitoring
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
- F04C29/04—Heating; Cooling; Heat insulation
- F04C29/042—Heating; Cooling; Heat insulation by injecting a fluid
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B2203/00—Motor parameters
- F04B2203/02—Motor parameters of rotating electric motors
- F04B2203/0208—Power
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B2205/00—Fluid parameters
- F04B2205/09—Flow through the pump
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
- F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
- F04C18/12—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C2270/00—Control; Monitoring or safety arrangements
- F04C2270/20—Flow
- F04C2270/205—Controlled or regulated
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- General Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Computer Hardware Design (AREA)
- Applications Or Details Of Rotary Compressors (AREA)
Abstract
Groupe de pompage (2) destiné à être fluidiquement raccordé en aval d’une chambre de procédés (101) et en amont d’un dispositif de traitement des gaz (3) dans la direction d’écoulement des gaz pompés (F1), le groupe de pompage (2) comprenant une pompe à vide secondaire Roots (5) montée en série et en amont d’une pompe à vide primaire (4). Le groupe de pompage (2) comporte en outre une unité de contrôle (17) configurée pour commander un paramètre de sortie du groupe de pompage (2) et/ou du dispositif de traitement des gaz (3) en fonction d’un paramètre d’entrée, le paramètre d’entrée étant la puissance électrique consommée par le moteur (M2) de la pompe à vide secondaire Roots (5). Figure d’abrégé : Figure 1
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR2113163A FR3129992B1 (fr) | 2021-12-08 | 2021-12-08 | Groupe de pompage, dispositif et procédé de pompage et de traitement |
PCT/EP2022/083224 WO2023104539A1 (fr) | 2021-12-08 | 2022-11-25 | Dispositif et procédé de pompage et de traitement |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR2113163A FR3129992B1 (fr) | 2021-12-08 | 2021-12-08 | Groupe de pompage, dispositif et procédé de pompage et de traitement |
FR2113163 | 2021-12-08 |
Publications (2)
Publication Number | Publication Date |
---|---|
FR3129992A1 FR3129992A1 (fr) | 2023-06-09 |
FR3129992B1 true FR3129992B1 (fr) | 2023-12-01 |
Family
ID=80735765
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
FR2113163A Active FR3129992B1 (fr) | 2021-12-08 | 2021-12-08 | Groupe de pompage, dispositif et procédé de pompage et de traitement |
Country Status (2)
Country | Link |
---|---|
FR (1) | FR3129992B1 (fr) |
WO (1) | WO2023104539A1 (fr) |
Family Cites Families (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR3054005B1 (fr) * | 2016-07-13 | 2018-08-24 | Pfeiffer Vacuum | Procede de descente en pression dans un sas de chargement et de dechargement et groupe de pompage associe |
FR3076582B1 (fr) * | 2018-01-09 | 2020-01-24 | Pfeiffer Vacuum | Pompe a vide de type seche et procede de commande d'un moteur synchrone de pompe a vide |
CN113169094A (zh) * | 2018-09-28 | 2021-07-23 | 朗姆研究公司 | 避免沉积副产物积聚的真空泵保护 |
-
2021
- 2021-12-08 FR FR2113163A patent/FR3129992B1/fr active Active
-
2022
- 2022-11-25 WO PCT/EP2022/083224 patent/WO2023104539A1/fr unknown
Also Published As
Publication number | Publication date |
---|---|
WO2023104539A1 (fr) | 2023-06-15 |
FR3129992A1 (fr) | 2023-06-09 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
GB2474398A (en) | System and method of operating a gas turbine engine with an alternate working fluid | |
RU2013116450A (ru) | Способ и система управления вторичным потоком | |
MX2009002890A (es) | Maquina de lavado a presion con unidad de transferencia de calor para descarga de agua caliente. | |
RU2013147825A (ru) | Способ и устройство для управления, соответственно, регулирования транспортера текучей среды для транспортировки текучей среды внутри трубопровода для текучей среды | |
CN102536754B (zh) | 泵装置及泵系统 | |
CA2447279A1 (fr) | Dispositif de dosage de carburant a soupape de regulation compensee dans une turbomachine | |
UA103413C2 (en) | Gas-turbine engine | |
FR3129992B1 (fr) | Groupe de pompage, dispositif et procédé de pompage et de traitement | |
RU161865U1 (ru) | Маслосистема газотурбинной энергетической установки | |
EP3670916A3 (fr) | Pompe à vide avec passage d'atténuation du bruit | |
CN109611224A (zh) | 一种防止工程机械启动时产生故障的方法 | |
FR3062425B1 (fr) | Circuit d'alimentation en carburant de turbomachine | |
FR3112086B1 (fr) | Dispositif de traitement des gaz et ligne de vide | |
RU2544684C1 (ru) | Жидкостный ракетный двигатель | |
FR3098869B1 (fr) | Groupe de pompage | |
RU126375U1 (ru) | Устройство подачи компонентов топлива для жидкостного ракетного двигателя с глубоким дросселированием | |
RU2525775C1 (ru) | Турбонасосный агрегат жрд | |
RU124746U1 (ru) | Многоступенчатый центробежный насос | |
RU2108489C1 (ru) | Мобильная установка для откачки газа из отключенного участка магистрального газопровода (варианты) | |
RU2514466C1 (ru) | Жидкостный ракетный двигатель | |
RU171176U1 (ru) | Трубопроводная обвязка центробежного компрессора | |
PL431661A1 (pl) | Układ i sposób działania komory spalania z wieloma paliwami ciekłymi | |
GB1280695A (en) | Improvements in or relating to pumping systems for pumping crude oil | |
RU110409U1 (ru) | Автономная газотурбинная установка (варианты) | |
FR3087842B1 (fr) | Procede de regulation du debit d’air d’une vanne de recirculation des gaz a l’echappement utilisant un modele de rendement volumetrique anticipe |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
PLFP | Fee payment |
Year of fee payment: 2 |
|
PLSC | Publication of the preliminary search report |
Effective date: 20230609 |
|
PLFP | Fee payment |
Year of fee payment: 3 |