DE69104749D1 - Verbesserte Turbomolekularpumpe. - Google Patents

Verbesserte Turbomolekularpumpe.

Info

Publication number
DE69104749D1
DE69104749D1 DE69104749T DE69104749T DE69104749D1 DE 69104749 D1 DE69104749 D1 DE 69104749D1 DE 69104749 T DE69104749 T DE 69104749T DE 69104749 T DE69104749 T DE 69104749T DE 69104749 D1 DE69104749 D1 DE 69104749D1
Authority
DE
Germany
Prior art keywords
rotor
tangential flow
vanes
stages
channel
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69104749T
Other languages
English (en)
Other versions
DE69104749T2 (de
Inventor
Fausto Casaro
Luigi Dolcino
Mars Hablanian
Giampaolo Levi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Varian SpA
Original Assignee
Varian SpA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Varian SpA filed Critical Varian SpA
Application granted granted Critical
Publication of DE69104749D1 publication Critical patent/DE69104749D1/de
Publication of DE69104749T2 publication Critical patent/DE69104749T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D23/00—Other rotary non-positive-displacement pumps
    • F04D23/008—Regenerative pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D17/00—Radial-flow pumps, e.g. centrifugal pumps; Helico-centrifugal pumps
    • F04D17/08—Centrifugal pumps
    • F04D17/16—Centrifugal pumps for displacing without appreciable compression
    • F04D17/168—Pumps specially adapted to produce a vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
  • Structures Of Non-Positive Displacement Pumps (AREA)
DE69104749T 1990-03-09 1991-02-13 Verbesserte Turbomolekularpumpe. Expired - Lifetime DE69104749T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
IT67163A IT1241431B (it) 1990-03-09 1990-03-09 Pompa turbomolecolare perfezionata.

Publications (2)

Publication Number Publication Date
DE69104749D1 true DE69104749D1 (de) 1994-12-01
DE69104749T2 DE69104749T2 (de) 1995-03-30

Family

ID=11300124

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69104749T Expired - Lifetime DE69104749T2 (de) 1990-03-09 1991-02-13 Verbesserte Turbomolekularpumpe.

Country Status (7)

Country Link
EP (1) EP0445855B1 (de)
JP (1) JPH0826877B2 (de)
AT (1) ATE113343T1 (de)
DE (1) DE69104749T2 (de)
ES (1) ES2064873T3 (de)
HK (1) HK1000016A1 (de)
IT (1) IT1241431B (de)

Families Citing this family (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4314418A1 (de) * 1993-05-03 1994-11-10 Leybold Ag Reibungsvakuumpumpe mit unterschiedlich gestalteten Pumpenabschnitten
GB9318801D0 (en) * 1993-09-10 1993-10-27 Boc Group Plc Improved vacuum pumps
US5456575A (en) * 1994-05-16 1995-10-10 Varian Associates, Inc. Non-centric improved pumping stage for turbomolecular pumps
US5449270A (en) * 1994-06-24 1995-09-12 Varian Associates, Inc. Tangential flow pumping channel for turbomolecular pumps
IT1287016B1 (it) * 1996-07-18 1998-07-24 Varian Spa Pompa da vuoto.
IT1288738B1 (it) * 1996-10-08 1998-09-24 Varian Spa Unita' elettronica di comando per pompa da vuoto.
IT1288737B1 (it) * 1996-10-08 1998-09-24 Varian Spa Dispositivo di pompaggio da vuoto.
US5709528A (en) * 1996-12-19 1998-01-20 Varian Associates, Inc. Turbomolecular vacuum pumps with low susceptiblity to particulate buildup
IT1289811B1 (it) 1996-12-27 1998-10-16 Varian Spa Metodo ed apparato di diagnosi per pompa da vuoto.
IT1297347B1 (it) 1997-12-24 1999-09-01 Varian Spa Pompa da vuoto.
US6074165A (en) * 1998-03-10 2000-06-13 Varian, Inc. Vacuum pump with magnetic bearing system and back-up bearings
US6071092A (en) * 1998-03-10 2000-06-06 Varian, Inc. Vacuum pump with improved back-up bearing assembly
TW504548B (en) 1998-06-30 2002-10-01 Ebara Corp Turbo molecular pump
US6179573B1 (en) * 1999-03-24 2001-01-30 Varian, Inc. Vacuum pump with inverted motor
DE60101368T2 (de) * 2001-02-22 2004-10-14 Varian S.P.A., Leini Vakuumpumpe
US20070227357A1 (en) * 2006-03-31 2007-10-04 Mcdermott Wayne T Turbomolecular pump system for gas separation
US8247315B2 (en) * 2008-03-17 2012-08-21 Semiconductor Energy Laboratory Co., Ltd. Plasma processing apparatus and method for manufacturing semiconductor device
US8148839B2 (en) 2008-07-02 2012-04-03 Rosefsky Jonathan B Ribbon drive power generation and method of use
DE102013108482A1 (de) * 2013-08-06 2015-02-12 Pfeiffer Vacuum Gmbh Vakuumpumpstufe

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE239213C (de) *
FR1443239A (fr) * 1965-05-05 1966-06-24 Pompe à vide mécanique rotative
US3628894A (en) * 1970-09-15 1971-12-21 Bendix Corp High-vacuum mechanical pump
KR890004933B1 (ko) * 1985-07-31 1989-11-30 가부시기가이샤 히다찌세이사꾸쇼 터어보분자펌프
JPS62113887A (ja) * 1985-11-13 1987-05-25 Hitachi Ltd 真空ポンプ
JPH0610477B2 (ja) * 1987-05-13 1994-02-09 株式会社日立製作所 タ−ボ真空ポンプ
JP2536571B2 (ja) * 1987-12-25 1996-09-18 ダイキン工業株式会社 渦流形タ―ボ機械
JPH01247794A (ja) * 1988-03-29 1989-10-03 Daikin Ind Ltd 複合形真空ポンプ
DE3919529C2 (de) * 1988-07-13 1994-09-29 Osaka Vacuum Ltd Vakuumpumpe
JPH0249996A (ja) * 1988-08-11 1990-02-20 Daikin Ind Ltd 渦流形真空ポンプ

Also Published As

Publication number Publication date
DE69104749T2 (de) 1995-03-30
EP0445855A1 (de) 1991-09-11
JPH0826877B2 (ja) 1996-03-21
ES2064873T3 (es) 1995-02-01
JPH04224295A (ja) 1992-08-13
EP0445855B1 (de) 1994-10-26
IT9067163A1 (it) 1991-09-09
IT1241431B (it) 1994-01-17
IT9067163A0 (it) 1990-03-09
HK1000016A1 (en) 1997-10-03
ATE113343T1 (de) 1994-11-15

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition