EP0445855A1 - Verbesserte Turbomolekularpumpe - Google Patents

Verbesserte Turbomolekularpumpe Download PDF

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Publication number
EP0445855A1
EP0445855A1 EP91200302A EP91200302A EP0445855A1 EP 0445855 A1 EP0445855 A1 EP 0445855A1 EP 91200302 A EP91200302 A EP 91200302A EP 91200302 A EP91200302 A EP 91200302A EP 0445855 A1 EP0445855 A1 EP 0445855A1
Authority
EP
European Patent Office
Prior art keywords
rotor
pumping
turbomolecular pump
flow
stages
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP91200302A
Other languages
English (en)
French (fr)
Other versions
EP0445855B1 (de
Inventor
Fausto Casaro
Luigi Dolcino
Mars Hablanian
Giampaolo Levi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Varian SpA
Original Assignee
Varian SpA
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Filing date
Publication date
Application filed by Varian SpA filed Critical Varian SpA
Publication of EP0445855A1 publication Critical patent/EP0445855A1/de
Application granted granted Critical
Publication of EP0445855B1 publication Critical patent/EP0445855B1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D23/00—Other rotary non-positive-displacement pumps
    • F04D23/008—Regenerative pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D17/00—Radial-flow pumps, e.g. centrifugal pumps; Helico-centrifugal pumps
    • F04D17/08—Centrifugal pumps
    • F04D17/16—Centrifugal pumps for displacing without appreciable compression
    • F04D17/168—Pumps specially adapted to produce a vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps

Definitions

  • the present invention refers to an improved turbomolecular pump, especially to a turbomolecular pump of increased compression ratio, capable of extending the operating range towards higher pressures.
  • Conventional turbomolecular pumps usually have operating ranges from about 10-7 to 10-1 or 1 Pascal, i.e. they cannot exhaust directly to atmosphere. This means that they need to be teamed up to a forepump which produces the necessary fore vacuum and discharges the pumped gases at atmospheric pressure.
  • contamination of the turbomolecular pump with lubrication oil of the forepump may occur, which prevents pumping at the lower operating range. This may be avoided by maintenance at short intervals, which raises the costs of operation, in addition to a higher initial cost of the vacuum system.
  • the combination of a turbomolecular pump with a forepump is cumbersome, which is a disadvantage in most applications.
  • turbomolecular pumps have also been developed to reduce the necessity of these backing pumps.
  • U.S. Patent No. 4,732,529, U.S. Patent No. 4,826,393 and U.S.Patent No. 4,797,068 disclose turbomolecular pumps including a compression ratio raising section consisting of rotors formed with spiral grooves, or screw rotors, which guide gas from the high vacuum section to a simpler exhaustion system, e.g. to a membrane pump.
  • a simpler exhaustion system e.g. to a membrane pump.
  • this pump is a turbo vacuum roughing pump comprising radial flow pumping stages consisting of impellers rotating into channels with grooves which direct radially the flow of the pumped gases, and a peripheral flow pumping stage at the exhaust side, which raises the pressure so that the pump can discharge at atmospheric pressure.
  • this pump is only a roughing pump that can by no way replace a turbomolecular pump, the ultimate pressure of which is lower of several orders of magnitudes (10-7 Pascal) than the ultimate pressure of this roughing pump (10-2 Pascal).
  • a first object of the present invention is to provide a turbomolecular pump with a high compression ratio.
  • Another object of the present invention is to provide a turbomolecolar pump which is capable of discharging gases at atmospheric pressure, without being combined with forepumps.
  • a further object of the present invention is to provide a turbomolecular pump which is relatively not cumbersome in comparison with previous vacuum systems having similar operating range.
  • an improved turbomolecular pump comprises at the suction side a plurality of pumping stages consisting of alternately arranged rotors and stators provided with inclined blades, the rotor blades being inclined in the inverse direction to the stator blades, for pumping gases along an axial flow through said pumping stages, characterized in that it further comprises at least one pumping stage at the exhaust side, consisting of a rotor and a coplanar stator with a free annular channel defined in-between, along a part of their circumferences, said free annular channel being in communication with a suction port and a discharge port for pumping gases with a flow tangential to said rotor from said suction port to said discharge port.
  • a tangential flow pumping stage may be added in which the rotor consists of a disk provided with blades.
  • a turbomolecular pump comprises a certain number of axial flow pumping stages, each consisting of a rotor 1 or 1a, and of a stator 2 or 2a, contained in a cylindrical pump body 3, as known in the art.
  • the pumping stage consisting of rotor 1a and stator 2a is also shown in FIG. 2.
  • Each rotor consists of a disk 5 mounted on a rotatable shaft 6, and carrying at its periphery an array of radially protruding inclined blades 7, 7a, 7b.
  • Each stator consists of a similar disk with a central hole for the shaft 6 of the rotors.
  • Each stator is fixed to the pump body 3, and consists of a disk 8 provided with blades 9, 9a, 9b, which are inclined in a direction that is inverse to the direction of the rotor blades 7, 7a, 7b.
  • Gases coming from the suction side are pumped by the described stages along directions parallel to the axis of the cylindrical body 3, i.e. an axial flow of gases is produced through the alternate rotors and stators, as indicated by the arrow B of Fig. 1.
  • one or more pumping stages of different conception are added downstream the axial flow pumping stages.
  • FIG.1 two of such pumping stages are shown, indicated globally with the reference numerals 10 and 30.
  • pumping stage 10 comprises a rotor consisting of a plane disk 12 secured to shaft 6.
  • Rotor 12 is encompassed by a substantially coplanar stator having the shape of a ring 13 spaced apart from the rotor disk 12, so that a free annular channel 14 is defined between rotor and stator.
  • a baffle 15 closes channel 14 between a suction port 17 and a discharge port 18, provided in an upper closure plate 21 and in a lower closure plate 23, respectively.
  • Closure plates 21 and 23 are joined together by suitable means, e.g.
  • the baffle 15 may be a radial projection of the stator 13, as shown in FIGURES 2 and 3, or a separate element tightly secured to the stator ring 13.
  • Gases pumped by the axial flow pumping stages come to suction hole 17, as indicated by arrow D in FIGURES 1 and 2, and enter into channel 14.
  • the gas molecules strike the rotating disk 12 and keep a speed with a component tangential to the disk 12, as indicated by arrow E.
  • the molecules are transferred within free channel 14 from the suction port 17 to the discharge port 18 according to a tangential flow, and leave channel 14 through discharge port 18, as indicated by arrow F.
  • the flow of gases that is produced in the free channel 14 is referred to as "tangential flow” because it parallel to the direction of the velocity of the rotor, which is a tangent to the rotor.
  • This tangential flow pumping stage is effective in a molecular or transient flow pressure range, and permits to raise the outlet pressure from about 1 Pascal, that is the usual outlet pressure of conventional turbomolecular pumps, to 103 Pascal and even more.
  • pumping stages with plane rotor disks are no more effective. It has been found that a different rotor design, such as shown in detail in FIG. 4, can produce a further raise of the outlet pressure, up to the atmospheric pressure.
  • Pumping stage 30 is arranged in series, downstream pumping stage 10.
  • Shaft 6 extends axially in the casing, and carries a rotor disk 35 with peripheral vanes such as 37, 37a, 37b, lying on planes perpendicular to the plane of disk 35.
  • a coplanar stator ring 36 encompasses rotor 35 but is spaced apart from it, so that a free annular channel 38 is defined between the periphery of the vanes of the rotor and the stator.
  • a baffle 39 obstructs the free channel 38 between a suction port 40 made in upper plate 30 and a discharge port 41 made in lower plate 33.
  • gases discharged from port 18 of pumping stage 10 come to the suction port 40 of the pumping stage 30, as indicated by arrow G, and enter into channel 38 between rotor and stator.
  • gases molecules get kinetic energy by striking the rotor, a circular flow with a tangential speed component is produced in free channel 38, and gases are pumped from suction port 40 to discharge port 41.
  • the pressure is raised to about 105 Pascal, so that the pump can exhaust directly to the atmosphere through port 43 in the pump body 3, as indicated by arrow I in FIG. 1.
  • the peripheral velocity of the rotor of this turbomolecular pump is usually not less than 250 m/s, preferably from 350 to 400 m/s.
  • the angular velocity may be lower, provided that the peripheral velocity does not drop below about 250 m/s.

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
  • Structures Of Non-Positive Displacement Pumps (AREA)
EP91200302A 1990-03-09 1991-02-13 Verbesserte Turbomolekularpumpe Expired - Lifetime EP0445855B1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
IT67163A IT1241431B (it) 1990-03-09 1990-03-09 Pompa turbomolecolare perfezionata.
IT6716390 1990-03-09

Publications (2)

Publication Number Publication Date
EP0445855A1 true EP0445855A1 (de) 1991-09-11
EP0445855B1 EP0445855B1 (de) 1994-10-26

Family

ID=11300124

Family Applications (1)

Application Number Title Priority Date Filing Date
EP91200302A Expired - Lifetime EP0445855B1 (de) 1990-03-09 1991-02-13 Verbesserte Turbomolekularpumpe

Country Status (7)

Country Link
EP (1) EP0445855B1 (de)
JP (1) JPH0826877B2 (de)
AT (1) ATE113343T1 (de)
DE (1) DE69104749T2 (de)
ES (1) ES2064873T3 (de)
HK (1) HK1000016A1 (de)
IT (1) IT1241431B (de)

Cited By (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1994025760A1 (de) * 1993-05-03 1994-11-10 Leybold Aktiengesellschaft Reibungsvakuumpumpe mit unterschiedlich gestalteten pumpenabschnitten
EP0643227A1 (de) * 1993-09-10 1995-03-15 The BOC Group plc Vakuumpumpen
EP0691476A1 (de) * 1994-06-24 1996-01-10 Varian Associates, Inc. Tangentialströmungs-Pumpkanal für Turbomolekularpumpen
EP0692636A1 (de) * 1994-05-16 1996-01-17 Varian Associates, Inc. Konvergierende Pumpstufe für Turbomolekularpumpe
EP0819856A1 (de) * 1996-07-18 1998-01-21 VARIAN S.p.A. Vakuumpumpe
WO1998027342A1 (en) * 1996-12-19 1998-06-25 Varian Associates, Inc. Turbomolecular vacuum pumps with low susceptibility to particulate buildup
EP0836008A3 (de) * 1996-10-08 1998-07-01 VARIAN S.p.A. Vakuumpumpgerät
EP0851127A2 (de) 1996-12-27 1998-07-01 VARIAN S.p.A. Diagnoseverfahren und -Gerät für Vakuumpumpen
EP0836009A3 (de) * 1996-10-08 1998-08-12 VARIAN S.p.A. Elektronische Steuereinrichtung für eine Vakuumpumpe
EP0931939A2 (de) 1997-12-24 1999-07-28 VARIAN S.p.A. Vakuumpumpe
WO1999046509A1 (en) * 1998-03-10 1999-09-16 Varian, Inc. Vacuum pump with back-up bearing assembly
WO1999046510A1 (en) * 1998-03-10 1999-09-16 Varian, Inc. Vacuum pump with magnetic bearing system and back-up bearings
EP1039138A3 (de) * 1999-03-24 2001-11-07 Varian, Inc. Vakuumpumpe mit Aussenläufermotor
EP1234982A1 (de) * 2001-02-22 2002-08-28 VARIAN S.p.A. Vakuumpumpe

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TW504548B (en) 1998-06-30 2002-10-01 Ebara Corp Turbo molecular pump
US20070227357A1 (en) * 2006-03-31 2007-10-04 Mcdermott Wayne T Turbomolecular pump system for gas separation
US8247315B2 (en) * 2008-03-17 2012-08-21 Semiconductor Energy Laboratory Co., Ltd. Plasma processing apparatus and method for manufacturing semiconductor device
US8148839B2 (en) 2008-07-02 2012-04-03 Rosefsky Jonathan B Ribbon drive power generation and method of use
DE102013108482A1 (de) * 2013-08-06 2015-02-12 Pfeiffer Vacuum Gmbh Vakuumpumpstufe

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE239213C (de) *
FR1443239A (fr) * 1965-05-05 1966-06-24 Pompe à vide mécanique rotative
US3628894A (en) * 1970-09-15 1971-12-21 Bendix Corp High-vacuum mechanical pump
EP0226039A1 (de) * 1985-11-13 1987-06-24 Hitachi, Ltd. Vakuumpumpe
US4735550A (en) * 1985-07-31 1988-04-05 Hitachi, Ltd. Turbo molecular pump
DE3919529A1 (de) * 1988-07-13 1990-01-18 Osaka Vacuum Ltd Vakuumpumpe

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0610477B2 (ja) * 1987-05-13 1994-02-09 株式会社日立製作所 タ−ボ真空ポンプ
JP2536571B2 (ja) * 1987-12-25 1996-09-18 ダイキン工業株式会社 渦流形タ―ボ機械
JPH01247794A (ja) * 1988-03-29 1989-10-03 Daikin Ind Ltd 複合形真空ポンプ
JPH0249996A (ja) * 1988-08-11 1990-02-20 Daikin Ind Ltd 渦流形真空ポンプ

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE239213C (de) *
FR1443239A (fr) * 1965-05-05 1966-06-24 Pompe à vide mécanique rotative
US3628894A (en) * 1970-09-15 1971-12-21 Bendix Corp High-vacuum mechanical pump
US4735550A (en) * 1985-07-31 1988-04-05 Hitachi, Ltd. Turbo molecular pump
EP0226039A1 (de) * 1985-11-13 1987-06-24 Hitachi, Ltd. Vakuumpumpe
DE3919529A1 (de) * 1988-07-13 1990-01-18 Osaka Vacuum Ltd Vakuumpumpe

Cited By (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1994025760A1 (de) * 1993-05-03 1994-11-10 Leybold Aktiengesellschaft Reibungsvakuumpumpe mit unterschiedlich gestalteten pumpenabschnitten
EP0874159A3 (de) * 1993-05-03 1998-11-18 Leybold Vakuum GmbH Reibungsvakuumpumpe mit einer Gaedepumpenstufe
EP0643227A1 (de) * 1993-09-10 1995-03-15 The BOC Group plc Vakuumpumpen
EP0692636A1 (de) * 1994-05-16 1996-01-17 Varian Associates, Inc. Konvergierende Pumpstufe für Turbomolekularpumpe
EP0691476A1 (de) * 1994-06-24 1996-01-10 Varian Associates, Inc. Tangentialströmungs-Pumpkanal für Turbomolekularpumpen
EP0819856A1 (de) * 1996-07-18 1998-01-21 VARIAN S.p.A. Vakuumpumpe
EP0836009A3 (de) * 1996-10-08 1998-08-12 VARIAN S.p.A. Elektronische Steuereinrichtung für eine Vakuumpumpe
EP0836008A3 (de) * 1996-10-08 1998-07-01 VARIAN S.p.A. Vakuumpumpgerät
WO1998027342A1 (en) * 1996-12-19 1998-06-25 Varian Associates, Inc. Turbomolecular vacuum pumps with low susceptibility to particulate buildup
EP0851127A2 (de) 1996-12-27 1998-07-01 VARIAN S.p.A. Diagnoseverfahren und -Gerät für Vakuumpumpen
EP0851127A3 (de) * 1996-12-27 1999-06-16 VARIAN S.p.A. Diagnoseverfahren und -Gerät für Vakuumpumpen
EP0931939A2 (de) 1997-12-24 1999-07-28 VARIAN S.p.A. Vakuumpumpe
EP0931939A3 (de) * 1997-12-24 2000-08-30 VARIAN S.p.A. Vakuumpumpe
WO1999046509A1 (en) * 1998-03-10 1999-09-16 Varian, Inc. Vacuum pump with back-up bearing assembly
WO1999046510A1 (en) * 1998-03-10 1999-09-16 Varian, Inc. Vacuum pump with magnetic bearing system and back-up bearings
EP1039138A3 (de) * 1999-03-24 2001-11-07 Varian, Inc. Vakuumpumpe mit Aussenläufermotor
EP1234982A1 (de) * 2001-02-22 2002-08-28 VARIAN S.p.A. Vakuumpumpe

Also Published As

Publication number Publication date
DE69104749T2 (de) 1995-03-30
JPH0826877B2 (ja) 1996-03-21
ES2064873T3 (es) 1995-02-01
JPH04224295A (ja) 1992-08-13
EP0445855B1 (de) 1994-10-26
IT9067163A1 (it) 1991-09-09
IT1241431B (it) 1994-01-17
DE69104749D1 (de) 1994-12-01
IT9067163A0 (it) 1990-03-09
HK1000016A1 (en) 1997-10-03
ATE113343T1 (de) 1994-11-15

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