CN100529414C - 泵送设备 - Google Patents
泵送设备 Download PDFInfo
- Publication number
- CN100529414C CN100529414C CNB200580016258XA CN200580016258A CN100529414C CN 100529414 C CN100529414 C CN 100529414C CN B200580016258X A CNB200580016258X A CN B200580016258XA CN 200580016258 A CN200580016258 A CN 200580016258A CN 100529414 C CN100529414 C CN 100529414C
- Authority
- CN
- China
- Prior art keywords
- pump
- inlet
- segment
- dual
- fluid
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Images
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D19/00—Axial-flow pumps
- F04D19/02—Multi-stage pumps
- F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D25/00—Pumping installations or systems
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J49/00—Particle spectrometers or separator tubes
- H01J49/02—Details
- H01J49/24—Vacuum systems, e.g. maintaining desired pressures
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Non-Positive Displacement Air Blowers (AREA)
- Eye Examination Apparatus (AREA)
- Massaging Devices (AREA)
- Measuring Fluid Pressure (AREA)
- Jet Pumps And Other Pumps (AREA)
Abstract
Description
Claims (32)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
GB0411426.0 | 2004-05-21 | ||
GBGB0411426.0A GB0411426D0 (en) | 2004-05-21 | 2004-05-21 | Pumping arrangement |
Publications (2)
Publication Number | Publication Date |
---|---|
CN1957182A CN1957182A (zh) | 2007-05-02 |
CN100529414C true CN100529414C (zh) | 2009-08-19 |
Family
ID=32607778
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CNB200580016258XA Expired - Fee Related CN100529414C (zh) | 2004-05-21 | 2005-05-06 | 泵送设备 |
Country Status (9)
Country | Link |
---|---|
US (1) | US7850434B2 (zh) |
EP (1) | EP1756429B1 (zh) |
JP (2) | JP5053842B2 (zh) |
CN (1) | CN100529414C (zh) |
AT (1) | ATE462081T1 (zh) |
CA (1) | CA2563248C (zh) |
DE (1) | DE602005020139D1 (zh) |
GB (1) | GB0411426D0 (zh) |
WO (1) | WO2005113986A1 (zh) |
Families Citing this family (31)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB0322883D0 (en) * | 2003-09-30 | 2003-10-29 | Boc Group Plc | Vacuum pump |
GB0322889D0 (en) * | 2003-09-30 | 2003-10-29 | Boc Group Plc | Vacuum pump |
GB0409139D0 (en) * | 2003-09-30 | 2004-05-26 | Boc Group Plc | Vacuum pump |
JP5452839B2 (ja) * | 2006-10-05 | 2014-03-26 | アジレント・テクノロジーズ・インク | 分析装置 |
DE102007010068B4 (de) * | 2007-02-28 | 2024-06-13 | Thermo Fisher Scientific (Bremen) Gmbh | Vakuumpumpe oder Vakuumapparatur mit Vakuumpumpe |
GB0724837D0 (en) * | 2007-12-20 | 2008-01-30 | Edwards Ltd | vacuum pump |
DE102008009715A1 (de) * | 2008-02-19 | 2009-08-20 | Oerlikon Leybold Vacuum Gmbh | Vakuumpump-System und Verwendung einer Mehrstufen-Vakuumpumpe |
GB0901872D0 (en) * | 2009-02-06 | 2009-03-11 | Edwards Ltd | Multiple inlet vacuum pumps |
GB2472638B (en) * | 2009-08-14 | 2014-03-19 | Edwards Ltd | Vacuum system |
GB2473839B (en) * | 2009-09-24 | 2016-06-01 | Edwards Ltd | Mass spectrometer |
GB2474507B (en) * | 2009-10-19 | 2016-01-27 | Edwards Ltd | Vacuum pump |
GB201005459D0 (en) * | 2010-03-31 | 2010-05-19 | Edwards Ltd | Vacuum pumping system |
DE102010033373A1 (de) * | 2010-08-04 | 2012-02-09 | Inficon Gmbh | Lecksuchgerät |
EP2732299A4 (en) | 2011-07-15 | 2015-03-25 | Orbotech Ltd | ELECTRICAL TESTING OF ELECTRONIC DEVICES BY MEANS OF ELECTRON BEAM-INDUCED PLASMA STONES |
DE102012105951A1 (de) * | 2012-03-30 | 2013-10-02 | Pfeiffer Vacuum Gmbh | Pumpensystem zur Evakuierung von Gas aus einer Mehrzahl von Kammern sowie Verfahren zur Steuerung des Pumpensystems |
RU2529431C1 (ru) * | 2013-07-23 | 2014-09-27 | Андрей Владиславович Курочкин | Компрессорная установка |
GB201314841D0 (en) * | 2013-08-20 | 2013-10-02 | Thermo Fisher Scient Bremen | Multiple port vacuum pump system |
WO2016044642A1 (en) * | 2014-09-17 | 2016-03-24 | Orbotech Ltd. | APPLICATION OF eBIP TO INSPECTION, TEST, DEBUG AND SURFACE MODIFICATIONS |
GB2533153B (en) * | 2014-12-12 | 2017-09-20 | Thermo Fisher Scient (Bremen) Gmbh | Vacuum system |
EP3085963B1 (de) * | 2015-04-20 | 2019-09-04 | Pfeiffer Vacuum Gmbh | Vakuumpumpe |
RU2586554C1 (ru) * | 2015-05-05 | 2016-06-10 | Андрей Владиславович Курочкин | Способ подготовки топливного газа |
GB2538962B (en) * | 2015-06-01 | 2019-06-26 | Edwards Ltd | Vacuum pump |
JP6488898B2 (ja) * | 2015-06-09 | 2019-03-27 | 株式会社島津製作所 | 真空ポンプおよび質量分析装置 |
RU2662016C2 (ru) * | 2016-10-27 | 2018-07-23 | Рафаиль Минигулович Минигулов | Способ резервирования мощности привода компрессорного цеха и система для его осуществления |
JP7108377B2 (ja) * | 2017-02-08 | 2022-07-28 | エドワーズ株式会社 | 真空ポンプ、真空ポンプに備わる回転部、およびアンバランス修正方法 |
GB2561899B (en) * | 2017-04-28 | 2020-11-04 | Edwards Ltd | Vacuum pumping system |
GB2572958C (en) | 2018-04-16 | 2021-06-23 | Edwards Ltd | A multi-stage vacuum pump and a method of differentially pumping multiple vacuum chambers |
GB2578138A (en) * | 2018-10-18 | 2020-04-22 | Edwards Ltd | Non-mechanical vacuum pumping system and analytical instrument |
GB2584603B (en) * | 2019-04-11 | 2021-10-13 | Edwards Ltd | Vacuum chamber module |
EP3767110B1 (en) * | 2019-07-15 | 2024-09-18 | Pfeiffer Vacuum Gmbh | Vacuum system |
EP4379769A1 (en) | 2021-07-30 | 2024-06-05 | Shimadzu Corporation | Mass spectrometer |
Family Cites Families (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3616680A (en) * | 1969-10-27 | 1971-11-02 | Sargent Welch Scientific Co | Leak detector |
DE3865012D1 (de) * | 1988-06-01 | 1991-10-24 | Leybold Ag | Pumpsystem fuer ein lecksuchgeraet. |
US5733104A (en) * | 1992-12-24 | 1998-03-31 | Balzers-Pfeiffer Gmbh | Vacuum pump system |
US5565679A (en) | 1993-05-11 | 1996-10-15 | Mds Health Group Limited | Method and apparatus for plasma mass analysis with reduced space charge effects |
JP3947762B2 (ja) | 1997-11-26 | 2007-07-25 | アジレント・テクノロジーズ・インク | 誘導結合プラズマ質量分析装置、及び、その排気制御方法 |
GB9725146D0 (en) * | 1997-11-27 | 1998-01-28 | Boc Group Plc | Improvements in vacuum pumps |
JPH11185695A (ja) | 1997-12-25 | 1999-07-09 | Yokogawa Analytical Systems Inc | 誘導結合プラズマ質量分析装置 |
TW482871B (en) | 1999-03-05 | 2002-04-11 | Tadahiro Ohmi | Vacuum device |
GB9921983D0 (en) | 1999-09-16 | 1999-11-17 | Boc Group Plc | Improvements in vacuum pumps |
JP2001351568A (ja) * | 2000-06-06 | 2001-12-21 | Anelva Corp | イオン付着質量分析の方法および装置 |
DE10032607B4 (de) | 2000-07-07 | 2004-08-12 | Leo Elektronenmikroskopie Gmbh | Teilchenstrahlgerät mit einer im Ultrahochvakuum zu betreibenden Teilchenquelle und kaskadenförmige Pumpanordnung für ein solches Teilchenstrahlgerät |
JP2003016990A (ja) | 2001-06-28 | 2003-01-17 | Seiko Instruments Inc | 誘導結合プラズマ質量分析装置 |
DE10302764A1 (de) * | 2003-01-24 | 2004-07-29 | Pfeiffer Vacuum Gmbh | Vakuumpumpsystem |
-
2004
- 2004-05-21 GB GBGB0411426.0A patent/GB0411426D0/en not_active Ceased
-
2005
- 2005-05-06 US US11/596,915 patent/US7850434B2/en not_active Expired - Fee Related
- 2005-05-06 EP EP05740541A patent/EP1756429B1/en not_active Ceased
- 2005-05-06 AT AT05740541T patent/ATE462081T1/de not_active IP Right Cessation
- 2005-05-06 JP JP2007517393A patent/JP5053842B2/ja not_active Expired - Fee Related
- 2005-05-06 CA CA2563248A patent/CA2563248C/en not_active Expired - Fee Related
- 2005-05-06 DE DE602005020139T patent/DE602005020139D1/de active Active
- 2005-05-06 CN CNB200580016258XA patent/CN100529414C/zh not_active Expired - Fee Related
- 2005-05-06 WO PCT/GB2005/001701 patent/WO2005113986A1/en not_active Application Discontinuation
-
2011
- 2011-02-23 JP JP2011037279A patent/JP5378432B2/ja not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
JP2007538197A (ja) | 2007-12-27 |
JP5053842B2 (ja) | 2012-10-24 |
EP1756429A1 (en) | 2007-02-28 |
GB0411426D0 (en) | 2004-06-23 |
CA2563248C (en) | 2011-07-05 |
US20080063541A1 (en) | 2008-03-13 |
ATE462081T1 (de) | 2010-04-15 |
DE602005020139D1 (de) | 2010-05-06 |
EP1756429B1 (en) | 2010-03-24 |
JP2011106466A (ja) | 2011-06-02 |
WO2005113986A1 (en) | 2005-12-01 |
US7850434B2 (en) | 2010-12-14 |
JP5378432B2 (ja) | 2013-12-25 |
CN1957182A (zh) | 2007-05-02 |
CA2563248A1 (en) | 2005-12-01 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
C06 | Publication | ||
PB01 | Publication | ||
C10 | Entry into substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
ASS | Succession or assignment of patent right |
Owner name: EDWARDS CO., LTD. Free format text: FORMER OWNER: THE BOC GROUP PLC Effective date: 20071214 |
|
C41 | Transfer of patent application or patent right or utility model | ||
TA01 | Transfer of patent application right |
Effective date of registration: 20071214 Address after: West Sussex Applicant after: Boc Group PLC Address before: England, British Surrey Applicant before: The Boc Group PlC |
|
C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20090819 Termination date: 20190506 |
|
CF01 | Termination of patent right due to non-payment of annual fee |