CN101052809B - 泵送装置 - Google Patents
泵送装置 Download PDFInfo
- Publication number
- CN101052809B CN101052809B CN2005800377609A CN200580037760A CN101052809B CN 101052809 B CN101052809 B CN 101052809B CN 2005800377609 A CN2005800377609 A CN 2005800377609A CN 200580037760 A CN200580037760 A CN 200580037760A CN 101052809 B CN101052809 B CN 101052809B
- Authority
- CN
- China
- Prior art keywords
- pumping
- inlet
- pump
- suction booster
- fluid
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 238000005086 pumping Methods 0.000 claims abstract description 335
- 239000012530 fluid Substances 0.000 claims abstract description 116
- 150000001875 compounds Chemical class 0.000 claims abstract description 9
- 238000009434 installation Methods 0.000 claims description 81
- 210000004055 fourth ventricle Anatomy 0.000 claims description 10
- 238000007599 discharging Methods 0.000 claims description 6
- 238000000034 method Methods 0.000 claims description 5
- BGOFCVIGEYGEOF-UJPOAAIJSA-N helicin Chemical compound O[C@@H]1[C@@H](O)[C@H](O)[C@@H](CO)O[C@H]1OC1=CC=CC=C1C=O BGOFCVIGEYGEOF-UJPOAAIJSA-N 0.000 claims description 4
- 238000006243 chemical reaction Methods 0.000 claims description 2
- 230000008929 regeneration Effects 0.000 description 17
- 238000011069 regeneration method Methods 0.000 description 17
- 239000007789 gas Substances 0.000 description 6
- 238000005265 energy consumption Methods 0.000 description 5
- 230000001172 regenerating effect Effects 0.000 description 5
- 230000006835 compression Effects 0.000 description 4
- 238000007906 compression Methods 0.000 description 4
- 238000004891 communication Methods 0.000 description 3
- 239000002131 composite material Substances 0.000 description 3
- 238000010276 construction Methods 0.000 description 3
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 2
- 229910052799 carbon Inorganic materials 0.000 description 2
- 125000004122 cyclic group Chemical group 0.000 description 2
- 239000000835 fiber Substances 0.000 description 2
- 239000000314 lubricant Substances 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 238000005192 partition Methods 0.000 description 2
- 230000006978 adaptation Effects 0.000 description 1
- 239000012159 carrier gas Substances 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000002349 favourable effect Effects 0.000 description 1
- 230000014509 gene expression Effects 0.000 description 1
- 230000008676 import Effects 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 239000008041 oiling agent Substances 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
Images
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D25/00—Pumping installations or systems
- F04D25/16—Combinations of two or more pumps ; Producing two or more separate gas flows
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D19/00—Axial-flow pumps
- F04D19/02—Multi-stage pumps
- F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
- F04D19/042—Turbomolecular vacuum pumps
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D19/00—Axial-flow pumps
- F04D19/02—Multi-stage pumps
- F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
- F04D19/044—Holweck-type pumps
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D19/00—Axial-flow pumps
- F04D19/02—Multi-stage pumps
- F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
- F04D19/046—Combinations of two or more different types of pumps
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J49/00—Particle spectrometers or separator tubes
- H01J49/02—Details
- H01J49/24—Vacuum systems, e.g. maintaining desired pressures
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Non-Positive Displacement Air Blowers (AREA)
- Jet Pumps And Other Pumps (AREA)
- Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
- Applications Or Details Of Rotary Compressors (AREA)
Abstract
Description
Claims (42)
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
GBGB0424198.0A GB0424198D0 (en) | 2004-11-01 | 2004-11-01 | Pumping arrangement |
GB0424198.0 | 2004-11-01 | ||
PCT/GB2005/004031 WO2006048602A2 (en) | 2004-11-01 | 2005-10-18 | Pumping arrangement |
Publications (2)
Publication Number | Publication Date |
---|---|
CN101052809A CN101052809A (zh) | 2007-10-10 |
CN101052809B true CN101052809B (zh) | 2012-03-14 |
Family
ID=33515889
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN2005800377609A Expired - Fee Related CN101052809B (zh) | 2004-11-01 | 2005-10-18 | 泵送装置 |
Country Status (7)
Country | Link |
---|---|
US (2) | US8235678B2 (zh) |
EP (1) | EP1807627B1 (zh) |
JP (1) | JP5751737B2 (zh) |
CN (1) | CN101052809B (zh) |
CA (1) | CA2583264C (zh) |
GB (1) | GB0424198D0 (zh) |
WO (1) | WO2006048602A2 (zh) |
Families Citing this family (32)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB0322883D0 (en) * | 2003-09-30 | 2003-10-29 | Boc Group Plc | Vacuum pump |
GB0424198D0 (en) * | 2004-11-01 | 2004-12-01 | Boc Group Plc | Pumping arrangement |
CA2698361C (en) * | 2007-09-07 | 2018-01-23 | Ionics Mass Spectrometry Group, Inc. | Multi-pressure stage mass spectrometer and methods |
GB0901872D0 (en) * | 2009-02-06 | 2009-03-11 | Edwards Ltd | Multiple inlet vacuum pumps |
DE202009003880U1 (de) * | 2009-03-19 | 2010-08-05 | Oerlikon Leybold Vacuum Gmbh | Multi-Inlet-Vakuumpumpe |
DE102009035332A1 (de) * | 2009-07-30 | 2011-02-03 | Pfeiffer Vacuum Gmbh | Vakuumpumpe |
GB2472638B (en) * | 2009-08-14 | 2014-03-19 | Edwards Ltd | Vacuum system |
GB2472635A (en) * | 2009-08-14 | 2011-02-16 | Edwards Ltd | Seal-less tip scroll booster pump for spectrometer |
GB2473839B (en) * | 2009-09-24 | 2016-06-01 | Edwards Ltd | Mass spectrometer |
GB2474507B (en) * | 2009-10-19 | 2016-01-27 | Edwards Ltd | Vacuum pump |
GB201005459D0 (en) * | 2010-03-31 | 2010-05-19 | Edwards Ltd | Vacuum pumping system |
DE102010032346A1 (de) * | 2010-07-27 | 2012-02-02 | Oerlikon Leybold Vacuum Gmbh | Turbomolekularpumpe sowie Turbomolekularpumpen-System |
GB2487376A (en) | 2011-01-19 | 2012-07-25 | Edwards Ltd | Two material pump stator for corrosion resistance and thermal conductivity |
EP2620649B1 (en) | 2012-01-27 | 2019-03-13 | Edwards Limited | Gas transfer vacuum pump |
GB2498816A (en) | 2012-01-27 | 2013-07-31 | Edwards Ltd | Vacuum pump |
GB2499217A (en) | 2012-02-08 | 2013-08-14 | Edwards Ltd | Vacuum pump with recirculation valve |
DE102012003680A1 (de) * | 2012-02-23 | 2013-08-29 | Pfeiffer Vacuum Gmbh | Vakuumpumpe |
GB2508396B (en) * | 2012-11-30 | 2015-10-07 | Edwards Ltd | Improvements in and relating to vacuum conduits |
GB201314841D0 (en) | 2013-08-20 | 2013-10-02 | Thermo Fisher Scient Bremen | Multiple port vacuum pump system |
US9558924B2 (en) * | 2014-12-09 | 2017-01-31 | Morpho Detection, Llc | Systems for separating ions and neutrals and methods of operating the same |
US9368335B1 (en) * | 2015-02-02 | 2016-06-14 | Thermo Finnigan Llc | Mass spectrometer |
GB2538962B (en) * | 2015-06-01 | 2019-06-26 | Edwards Ltd | Vacuum pump |
EP3460249B1 (de) * | 2015-07-01 | 2021-03-24 | Pfeiffer Vacuum GmbH | Splitflow-vakuumpumpe |
EP3112688B2 (de) * | 2015-07-01 | 2022-05-11 | Pfeiffer Vacuum GmbH | Splitflow-vakuumpumpe sowie vakuum-system mit einer splitflow-vakuumpumpe |
US10443943B2 (en) * | 2016-03-29 | 2019-10-15 | Veeco Precision Surface Processing Llc | Apparatus and method to control properties of fluid discharge via refrigerative exhaust |
DE202018000285U1 (de) | 2018-01-18 | 2019-04-23 | Leybold Gmbh | Vakuumpumpen-System |
GB2575450B (en) * | 2018-07-09 | 2022-01-26 | Edwards Ltd | A variable inlet conductance vacuum pump, vacuum pump arrangement and method |
DE102018119747B3 (de) | 2018-08-14 | 2020-02-13 | Bruker Daltonik Gmbh | Turbomolekularpumpe für massenspektrometer |
GB2578138A (en) * | 2018-10-18 | 2020-04-22 | Edwards Ltd | Non-mechanical vacuum pumping system and analytical instrument |
GB2584603B (en) * | 2019-04-11 | 2021-10-13 | Edwards Ltd | Vacuum chamber module |
EP3767110B1 (en) * | 2019-07-15 | 2024-09-18 | Pfeiffer Vacuum Gmbh | Vacuum system |
US12044313B2 (en) * | 2021-02-12 | 2024-07-23 | Kla Corporation | Dual vacuum seal |
Family Cites Families (22)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB236066A (en) * | 1924-08-20 | 1925-07-02 | Taylor Brothers Sandiacre Ltd | Improvements in or relating to posts applicable for supporting tennis nets and the like |
US2936107A (en) * | 1956-06-14 | 1960-05-10 | Nat Res Corp | High vacuum device |
US4472962A (en) * | 1981-08-03 | 1984-09-25 | Balzers Aktiengesellschaft | Low pressure leak detector |
DE3616319C1 (de) * | 1986-05-15 | 1987-07-02 | Cit Alcatel Gmbh | Heliumlecksuchanlage |
US4850806A (en) | 1988-05-24 | 1989-07-25 | The Boc Group, Inc. | Controlled by-pass for a booster pump |
FR2681688B1 (fr) * | 1991-09-24 | 1993-11-19 | Alcatel Cit | Installation de detection de fuites de gaz utilisant la technique de reniflage. |
DE4228313A1 (de) * | 1992-08-26 | 1994-03-03 | Leybold Ag | Gegenstrom-Lecksucher mit Hochvakuumpumpe |
US5733104A (en) * | 1992-12-24 | 1998-03-31 | Balzers-Pfeiffer Gmbh | Vacuum pump system |
EP0603694A1 (de) | 1992-12-24 | 1994-06-29 | BALZERS-PFEIFFER GmbH | Vakuumpumpsystem |
JPH06249187A (ja) * | 1993-02-23 | 1994-09-06 | Sony Corp | 真空ポンプおよびその駆動方法 |
JP2655315B2 (ja) * | 1994-06-29 | 1997-09-17 | 日本真空技術株式会社 | 複合分子ポンプを使用した漏洩探知装置 |
FR2728072B1 (fr) * | 1994-12-07 | 1997-01-10 | Cit Alcatel | Detecteur de fuite |
JP3767052B2 (ja) * | 1996-11-30 | 2006-04-19 | アイシン精機株式会社 | 多段式真空ポンプ |
US5944049A (en) * | 1997-07-15 | 1999-08-31 | Applied Materials, Inc. | Apparatus and method for regulating a pressure in a chamber |
JP3929185B2 (ja) * | 1998-05-20 | 2007-06-13 | 株式会社荏原製作所 | 真空排気装置及び方法 |
GB9810872D0 (en) * | 1998-05-20 | 1998-07-22 | Boc Group Plc | Improved vacuum pump |
GB2360066A (en) * | 2000-03-06 | 2001-09-12 | Boc Group Plc | Vacuum pump |
DE10032607B4 (de) * | 2000-07-07 | 2004-08-12 | Leo Elektronenmikroskopie Gmbh | Teilchenstrahlgerät mit einer im Ultrahochvakuum zu betreibenden Teilchenquelle und kaskadenförmige Pumpanordnung für ein solches Teilchenstrahlgerät |
DE10055057A1 (de) * | 2000-11-07 | 2002-05-08 | Pfeiffer Vacuum Gmbh | Leckdetektorpumpe |
GB0124731D0 (en) | 2001-10-15 | 2001-12-05 | Boc Group Plc | Vacuum pumps |
JP2004324644A (ja) * | 2003-04-10 | 2004-11-18 | Ebara Corp | ドライ真空ポンプ及びその起動方法 |
GB0424198D0 (en) * | 2004-11-01 | 2004-12-01 | Boc Group Plc | Pumping arrangement |
-
2004
- 2004-11-01 GB GBGB0424198.0A patent/GB0424198D0/en not_active Ceased
-
2005
- 2005-10-18 CA CA2583264A patent/CA2583264C/en not_active Expired - Fee Related
- 2005-10-18 EP EP05794691.5A patent/EP1807627B1/en active Active
- 2005-10-18 CN CN2005800377609A patent/CN101052809B/zh not_active Expired - Fee Related
- 2005-10-18 JP JP2007538491A patent/JP5751737B2/ja not_active Expired - Fee Related
- 2005-10-18 US US11/666,721 patent/US8235678B2/en not_active Expired - Fee Related
- 2005-10-18 WO PCT/GB2005/004031 patent/WO2006048602A2/en active Application Filing
-
2012
- 2012-07-06 US US13/543,610 patent/US8764413B2/en not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
US20080193303A1 (en) | 2008-08-14 |
JP5751737B2 (ja) | 2015-07-22 |
US8235678B2 (en) | 2012-08-07 |
CN101052809A (zh) | 2007-10-10 |
CA2583264A1 (en) | 2006-05-11 |
GB0424198D0 (en) | 2004-12-01 |
EP1807627B1 (en) | 2014-09-03 |
CA2583264C (en) | 2013-01-22 |
JP2008518154A (ja) | 2008-05-29 |
WO2006048602A2 (en) | 2006-05-11 |
US8764413B2 (en) | 2014-07-01 |
US20130177453A1 (en) | 2013-07-11 |
EP1807627A2 (en) | 2007-07-18 |
WO2006048602A3 (en) | 2006-08-24 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
C06 | Publication | ||
PB01 | Publication | ||
C10 | Entry into substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
ASS | Succession or assignment of patent right |
Owner name: EDWARDS CO., LTD. Free format text: FORMER OWNER: THE BOC GROUP PLC Effective date: 20071214 |
|
C41 | Transfer of patent application or patent right or utility model | ||
TA01 | Transfer of patent application right |
Effective date of registration: 20071214 Address after: West Sussex Applicant after: Boc Group PLC Address before: England, British Surrey Applicant before: The Boc Group PlC |
|
C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
CF01 | Termination of patent right due to non-payment of annual fee | ||
CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20120314 Termination date: 20191018 |