JP5719370B2 - 質量分析システム - Google Patents
質量分析システム Download PDFInfo
- Publication number
- JP5719370B2 JP5719370B2 JP2012530336A JP2012530336A JP5719370B2 JP 5719370 B2 JP5719370 B2 JP 5719370B2 JP 2012530336 A JP2012530336 A JP 2012530336A JP 2012530336 A JP2012530336 A JP 2012530336A JP 5719370 B2 JP5719370 B2 JP 5719370B2
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- Prior art keywords
- pump
- stage
- mass spectrometer
- spectrometry system
- mass spectrometry
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- 238000004949 mass spectrometry Methods 0.000 title claims description 24
- 238000005086 pumping Methods 0.000 claims description 60
- 238000011144 upstream manufacturing Methods 0.000 claims description 10
- 239000012530 fluid Substances 0.000 claims description 6
- 238000004891 communication Methods 0.000 claims description 5
- 230000007246 mechanism Effects 0.000 claims description 4
- 238000004458 analytical method Methods 0.000 claims 1
- 230000007723 transport mechanism Effects 0.000 claims 1
- 150000002500 ions Chemical class 0.000 description 4
- 230000003287 optical effect Effects 0.000 description 2
- 230000003247 decreasing effect Effects 0.000 description 1
- 230000001419 dependent effect Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000003754 machining Methods 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 230000003071 parasitic effect Effects 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J49/00—Particle spectrometers or separator tubes
- H01J49/02—Details
- H01J49/24—Vacuum systems, e.g. maintaining desired pressures
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D19/00—Axial-flow pumps
- F04D19/02—Multi-stage pumps
- F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
- F04D19/042—Turbomolecular vacuum pumps
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D19/00—Axial-flow pumps
- F04D19/02—Multi-stage pumps
- F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
- F04D19/046—Combinations of two or more different types of pumps
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Non-Positive Displacement Air Blowers (AREA)
- Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
Description
Claims (11)
- 質量分析システムであって、
低真空質量分析計段から高真空質量分析計段までガス連通状態にある複数個の差動的ポンプ輸送式質量分析計段を含む質量分析計と、
前記質量分析計段を排気するよう構成された多段ポンプとを有し、前記ポンプは、ポンプエンベロープを有し、前記ポンプエンベロープ内では、前記質量分析計段内における流れ方向にほぼ平行な軸線回りに回転可能に支持された複数個のポンプ輸送段が流体を主ポンプ入口からポンプ出口にポンプ輸送するよう構成されており、
高真空質量分析計段の少なくとも一部は、前記ポンプエンベロープ内で前記主ポンプ入口のところに配置されている、質量分析システム。 - 質量分析計サンプルの特性を求める計器が少なくとも部分的に前記ポンプエンベロープ内で前記主ポンプ入口のところに配置されている、請求項1記載の質量分析システム。
- 計器又は質量分析計の機器の一部は、前記主ポンプ入口と第1のポンプ輸送段のポンプ輸送機構体との間に配置されている、請求項2記載の質量分析システム。
- 質量分析計イオン経路が前記ポンプエンベロープ内に部分的に配置されている、請求項1記載の質量分析システム。
- 前記計器は、前記ポンプの前記ポンプ輸送段と軸方向整列状態で配置されている、請求項2又は3記載の質量分析システム。
- 前記回転軸線は、全体としてほぼ水平である、請求項1〜5のうちいずれか一に記載の質量分析システム。
- 前記ポンプエンベロープは、前記主ポンプ入口のところに高真空チャンバの一部を形成し、前記高真空チャンバは、使用の際、そのすぐ上流側に位置したチャンバよりも高い真空状態にある、請求項1〜6のうちいずれか一に記載の質量分析システム。
- 飛行時間型計器が前記ポンプエンベロープの前記主ポンプ入口とそのすぐ上流側に位置したチャンバとの間に延びている、請求項1〜7のうちいずれか一に記載の質量分析システム。
- 前記ポンプの少なくとも1つの段は、ターボ分子ポンプ輸送機構体から成る、請求項1〜8のうちいずれか一に記載の質量分析システム。
- 段間ポートが前記ポンプ輸送段相互間に配置されると共に質量分析計段に連結されている、請求項1〜9のうちいずれか一に記載の質量分析システム。
- 質量分析システムであって、低真空段から高真空段まで流れ連通状態にある複数個の質量分析計段を含む質量分析計と、前記質量分析計段を排気する分割流多段ポンプとを有し、前記ポンプは、ポンプエンベロープを有し、前記ポンプエンベロープ内では、複数個のポンプ輸送段が前記質量分析計段内における前記流れ方向にほぼ平行な軸線回りに回転可能に支持され、前記質量分析計段のうちの1つの少なくとも一部は、上流側ポンプ輸送段と軸方向整列状態で配置されている、質量分析システム。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
GB0916797.4 | 2009-09-24 | ||
GB0916797.4A GB2473839B (en) | 2009-09-24 | 2009-09-24 | Mass spectrometer |
PCT/GB2010/051528 WO2011036472A1 (en) | 2009-09-24 | 2010-09-13 | Mass spectrometer system |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2013506242A JP2013506242A (ja) | 2013-02-21 |
JP5719370B2 true JP5719370B2 (ja) | 2015-05-20 |
Family
ID=41327541
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2012530336A Active JP5719370B2 (ja) | 2009-09-24 | 2010-09-13 | 質量分析システム |
Country Status (7)
Country | Link |
---|---|
US (1) | US8716658B2 (ja) |
EP (1) | EP2481077B1 (ja) |
JP (1) | JP5719370B2 (ja) |
CA (1) | CA2771200C (ja) |
GB (1) | GB2473839B (ja) |
TW (1) | TW201126563A (ja) |
WO (1) | WO2011036472A1 (ja) |
Families Citing this family (15)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB0901872D0 (en) * | 2009-02-06 | 2009-03-11 | Edwards Ltd | Multiple inlet vacuum pumps |
US9368335B1 (en) * | 2015-02-02 | 2016-06-14 | Thermo Finnigan Llc | Mass spectrometer |
US20160260594A1 (en) * | 2015-03-02 | 2016-09-08 | Bayspec, Inc. | Sample Inlet and Vacuum System for Portable Mass Spectrometer |
US10141177B2 (en) | 2017-02-16 | 2018-11-27 | Bruker Daltonics, Inc. | Mass spectrometer using gastight radio frequency ion guide |
GB201808890D0 (en) | 2018-05-31 | 2018-07-18 | Micromass Ltd | Bench-top time of flight mass spectrometer |
GB201808949D0 (en) | 2018-05-31 | 2018-07-18 | Micromass Ltd | Bench-top time of flight mass spectrometer |
WO2019229463A1 (en) | 2018-05-31 | 2019-12-05 | Micromass Uk Limited | Mass spectrometer having fragmentation region |
GB201808892D0 (en) | 2018-05-31 | 2018-07-18 | Micromass Ltd | Mass spectrometer |
GB201808932D0 (en) | 2018-05-31 | 2018-07-18 | Micromass Ltd | Bench-top time of flight mass spectrometer |
GB201808894D0 (en) | 2018-05-31 | 2018-07-18 | Micromass Ltd | Mass spectrometer |
GB201808912D0 (en) * | 2018-05-31 | 2018-07-18 | Micromass Ltd | Bench-top time of flight mass spectrometer |
CN112154531B (zh) | 2018-05-31 | 2024-05-17 | 英国质谱公司 | 质谱仪 |
GB201808936D0 (en) | 2018-05-31 | 2018-07-18 | Micromass Ltd | Bench-top time of flight mass spectrometer |
EP3767110A1 (en) * | 2019-07-15 | 2021-01-20 | Pfeiffer Vacuum Gmbh | Vacuum system |
JP7327229B2 (ja) * | 2020-03-18 | 2023-08-16 | 株式会社島津製作所 | 保護ネット、ターボ分子ポンプおよび質量分析装置 |
Family Cites Families (15)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE59912626D1 (de) * | 1998-05-26 | 2006-02-16 | Leybold Vakuum Gmbh | Reibungsvakuumpumpe mit chassis, rotor und gehäuse sowie einrichtung, ausgerüstet mit einer reibungsvakuumpumpe dieser art |
JP2000311650A (ja) * | 1999-02-26 | 2000-11-07 | Hitachi Ltd | プラズマイオン源質量分析装置 |
ATE480005T1 (de) * | 1999-06-11 | 2010-09-15 | Applied Biosystems Llc | Maldi ionenquelle mit gasimpuls, vorrichtung und verfahren zur ermittlung des molekulargewichtes labilen moleküle |
AUPR465101A0 (en) * | 2001-04-27 | 2001-05-24 | Varian Australia Pty Ltd | "Mass spectrometer" |
GB0411426D0 (en) * | 2004-05-21 | 2004-06-23 | Boc Group Plc | Pumping arrangement |
GB0414316D0 (en) * | 2004-06-25 | 2004-07-28 | Boc Group Plc | Vacuum pump |
GB0424198D0 (en) * | 2004-11-01 | 2004-12-01 | Boc Group Plc | Pumping arrangement |
CA2632251C (en) * | 2005-12-22 | 2011-06-21 | Thermo Finnigan Llc | Apparatus and method for pumping in an ion optical device |
DE102006020710A1 (de) * | 2006-05-04 | 2007-11-08 | Pfeiffer Vacuum Gmbh | Vakuumpumpe mit Gehäuse |
JP5452839B2 (ja) * | 2006-10-05 | 2014-03-26 | アジレント・テクノロジーズ・インク | 分析装置 |
DE102007010068B4 (de) * | 2007-02-28 | 2024-06-13 | Thermo Fisher Scientific (Bremen) Gmbh | Vakuumpumpe oder Vakuumapparatur mit Vakuumpumpe |
DE102007027352A1 (de) * | 2007-06-11 | 2008-12-18 | Oerlikon Leybold Vacuum Gmbh | Massenspektrometer-Anordnung |
GB2455977A (en) * | 2007-12-21 | 2009-07-01 | Thermo Fisher Scient | Multi-reflectron time-of-flight mass spectrometer |
GB0901872D0 (en) * | 2009-02-06 | 2009-03-11 | Edwards Ltd | Multiple inlet vacuum pumps |
GB2474507B (en) * | 2009-10-19 | 2016-01-27 | Edwards Ltd | Vacuum pump |
-
2009
- 2009-09-24 GB GB0916797.4A patent/GB2473839B/en active Active
-
2010
- 2010-09-13 JP JP2012530336A patent/JP5719370B2/ja active Active
- 2010-09-13 EP EP10757464.2A patent/EP2481077B1/en active Active
- 2010-09-13 US US13/394,976 patent/US8716658B2/en active Active
- 2010-09-13 WO PCT/GB2010/051528 patent/WO2011036472A1/en active Application Filing
- 2010-09-13 CA CA2771200A patent/CA2771200C/en active Active
- 2010-09-15 TW TW099131279A patent/TW201126563A/zh unknown
Also Published As
Publication number | Publication date |
---|---|
US8716658B2 (en) | 2014-05-06 |
GB2473839B (en) | 2016-06-01 |
CA2771200C (en) | 2017-09-05 |
JP2013506242A (ja) | 2013-02-21 |
EP2481077A1 (en) | 2012-08-01 |
GB0916797D0 (en) | 2009-11-04 |
CA2771200A1 (en) | 2011-03-31 |
TW201126563A (en) | 2011-08-01 |
US20120168621A1 (en) | 2012-07-05 |
WO2011036472A1 (en) | 2011-03-31 |
GB2473839A (en) | 2011-03-30 |
EP2481077B1 (en) | 2019-04-03 |
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