EP2481077B1 - Mass spectrometer system - Google Patents
Mass spectrometer system Download PDFInfo
- Publication number
- EP2481077B1 EP2481077B1 EP10757464.2A EP10757464A EP2481077B1 EP 2481077 B1 EP2481077 B1 EP 2481077B1 EP 10757464 A EP10757464 A EP 10757464A EP 2481077 B1 EP2481077 B1 EP 2481077B1
- Authority
- EP
- European Patent Office
- Prior art keywords
- mass spectrometer
- pump
- stage
- pumping
- stages
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Links
- 238000005086 pumping Methods 0.000 claims description 68
- 238000011144 upstream manufacturing Methods 0.000 claims description 10
- 230000007246 mechanism Effects 0.000 claims description 6
- 239000012530 fluid Substances 0.000 claims description 4
- 238000004891 communication Methods 0.000 claims description 2
- 150000002500 ions Chemical class 0.000 description 4
- 230000003247 decreasing effect Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000003754 machining Methods 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 230000003071 parasitic effect Effects 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J49/00—Particle spectrometers or separator tubes
- H01J49/02—Details
- H01J49/24—Vacuum systems, e.g. maintaining desired pressures
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D19/00—Axial-flow pumps
- F04D19/02—Multi-stage pumps
- F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
- F04D19/042—Turbomolecular vacuum pumps
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D19/00—Axial-flow pumps
- F04D19/02—Multi-stage pumps
- F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
- F04D19/046—Combinations of two or more different types of pumps
Definitions
- the present invention relates to a mass spectrometer system.
- a prior art mass spectrometer system for evacuating the stages of a mass spectrometer using a so-called split flow multi-stage pump.
- a pump may comprise a pump envelope in which a plurality of pumping stages are supported for rotation about an axis for pumping fluid from a main pump inlet to a main pump outlet.
- the main pump inlet is connected for evacuating a high vacuum stage.
- An inter-stage inlet is provided between pumping stages and is connected for evacuating a lower vacuum stage of the mass spectrometer.
- a split flow pump is orientated 'vertically' with its axis orthogonal to the flow direction from one stage to the next stage of a mass spectrometer.
- the stages of a mass spectrometer comprise a respective plurality of vacuum chambers connected in series to allow flow from a low vacuum chamber to a high vacuum chamber.
- Each chamber comprises an instrument for processing a sample introduced to the mass spectrometer.
- the mass spectrometer system 100 may, for example, comprise stages 101, 102, 103 of a mass spectrometer 104 evacuated using a split flow multi-stage pump 106.
- the pump 106 comprises a pump envelope 108 in which a plurality of pumping stages 109, 110, 111 are supported for rotation about an axis 112 for pumping fluid from a main pump inlet 114 to a main pump outlet 116.
- the envelope 108 forms a pump casing which structurally supports the pumping components of the pumping stages 109, 110, 111.
- the stator components may be fixed to and supported by the casing whilst the rotor components are fixed to and supported by a drive 112 which is itself supported by bearings (not shown) fixed to and supported by the casing.
- the main pump inlet 114 is connected for evacuating a high vacuum stage 103.
- An inter-stage inlet 118 is provided between pumping stages and is connected for evacuating a lower vacuum stage 102.
- the low vacuum stage may, for example, be evacuated by a backing pump 120.
- the split flow pump 106 is mounted with its axis X of rotation substantially parallel to the flow direction Y in the mass spectrometer.
- Such an arrangement can be utilised to increase conductance at the inter-stage inlet and reduce the height of the pump and instrument profile.
- the inlet conductance between the chamber port 114 and the first pumping stage 109 must be relatively large. This is typically achieved by providing a relatively large space 122 in axial alignment with the pumping stage 109 and within the pumping envelope 108 (i.e. downstream of the main pump inlet 114 and upstream of the first pumping stage 109).
- a pressure drop is generated between the main inlet 114 and the pumping stage 109 due to the flow of molecules and associated conductance of the port (sometimes referred to as pipe losses).
- Increasing the size of space 122 and decreasing a duct length minimises parasitic pressure drop between the main pump inlet 114 and the pumping stage 109 thereby maximising the pumping speed and minimising the pressure at the chamber.
- the present invention also provides a mass spectrometer according to Claim 1.
- a mass spectrometer system 10 which comprises a mass spectrometer 12 and a split flow multi-stage pump 14.
- the mass spectrometer 12 comprising a plurality of mass spectrometer stages 16, 18, 20 in flow communication from a low vacuum stage 16 to a high vacuum stage 20. Flow from one stage to the next stage occurs generally in a direction to the right (as shown in the drawing) which is typically horizontal.
- the stages 16, 18, 20 comprise respective vacuum chambers 22, 24, 26.
- the split flow multi-stage pump 14 comprises a pump envelope 28 in which a plurality of pumping stages 30, 32, 34 are supported for rotation about an axis X, generally parallel to the direction of flow in the mass-spectrometer, for pumping fluid from a main pump inlet 36 to a main pump outlet 38.
- An inter-stage inlet 40 is provided between pumping stages and is connected for evacuating a lower vacuum stages 16, 18.
- an inter-stage inlet is provided between pumping stages 32 and 34.
- An inter-stage inlet may also or alternatively be provided between pumping stages 30 and 32.
- the low vacuum stage 22 is as shown evacuated by a backing pump 42 which also backs the main pump outlet 38.
- the envelope 28 forms a pump casing which structurally supports the pumping components of the pumping stages 30, 32, 34.
- the stator components may be fixed to and supported by the casing whilst the rotor components are fixed to and supported by a drive 29 which is itself supported by bearings (not shown) fixed to and supported by the casing.
- the plurality of vacuum chambers 22, 24, 26 are differentially pumped by the vacuum pump 14 attached thereto and comprising two pump inlets 36, 40.
- the first pumping stage 34 exhausts to the second pumping stage 32 and the second pumping exhausts to the third pumping stage 30.
- the first pumping stage is connected through main pump inlet 36 to relatively high vacuum chamber 26 from which gas molecules can enter the pump through volume 44 from chamber 26 and pass through the first, second and third pumping stages towards the pump outlet 38.
- the second pumping stage is connected through inter-stage inlet 40 to a medium vacuum chamber 24 from which gas molecules can enter the pump through inter-stage inlet 40 and pass through the second and third pumping stages towards the pump outlet 38.
- the low vacuum chamber 22 may be evacuated by backing pump 42.
- pumping stage 30 comprises a molecular drag mechanism and pumping stages 32 and 34 comprise turbo molecular pumping mechanisms.
- a relatively large space 44 is provided in axial alignment with the pumping stage 34 and within the pumping envelope 28 (i.e. downstream of the main pump inlet 36 and upstream of the first pumping stage 34).
- Pumping stage 34 is the first or most upstream pumping stage.
- the space 44 allows the pumping stage 34 to work efficiently.
- the pressure in space 44 is lower than the pressure in chamber 26 immediately upstream of the main pump inlet because of the afore-mentioned conductance effects (pipe losses).
- there is a relatively large amount of redundant space in the pump which is simply required for porting the gas from the mass spectrometer into the vacuum pump.
- volume 122 serves no mechanical purpose and is therefore wasteful in terms of material costs, machining, instrument size and weight.
- the present invention incorporates volume 44 into the mass spectrometer forming a high vacuum chamber in the pump envelope which in use is at higher vacuum than a chamber directly upstream thereof. Accordingly, an additional mass spectrometer stage is provided in the arrangement at high vacuum without increased overall size of the system.
- instrumentation 50 of the mass spectrometer is located at least partially and preferably fully within the volume 44 of the pump and in axial alignment with the first pumping stage 34.
- the term "axial alignment" as used herein is shown illustratively in Figures 1 and 2 .
- the outer radial extent of the first pumping stage is shown by broken lines and coincides with an inner surface of the pump envelope 28 housing the pumping mechanism of the first pumping stage.
- the mass spectrometer instrumentation 50 which may include analysers or optics, is axially aligned with the first pumping stage 34 in Figure 1 as it is located within the radial extent of the first pumping stage as shown by the double headed arrow 'A'.
- the mass spectrometer instrumentation is axially aligned with the first the pumping stage. Further, the axis of rotation X of the pumping stages is horizontal. Accordingly, the sample gas flow direction, or ion path, through the mass spectrometer stages turns through approximately 90° or more so that the ion path is located partially within the pump envelope.
- Mass spectrometer instruments 46, 48 are located in vacuum chambers 24, 26 and mass spectrometer instrument 50 is located in space 44 between the main pump inlet 36 and the first pumping stage 34.
- the arrangement makes effective use of the space and provides a higher level of pumping performance for the equipment at the reduced pressure directly in front of the blades of the first pumping stage. It is noted in this regard, that the pressure in vacuum chamber 26 is about 10 -6 mbar whereas the pressure in volume 44 is about 10 -7 mbar. The amount of improvement in performance is dependant upon the conductance of the pump and porting, however, it is typically in the order of 50%.
- instrument 50 is located wholly within the pumping envelope and in axial alignment with the first pumping stage 34, only part of the instrument 50 may be located within the pumping envelope and in axial alignment with the first pumping stage 34. Accordingly, at least part of one of the mass spectrometer stages is located within the pump envelope at the main pump inlet or in axial alignment with the pumping stage 34.
- the instruments 46, 48, 50 are shown schematically, and may include various means for determining characteristics of a sample passing through the system.
- Sample ions are guided through the mass spectrometer (optics) towards equipment for analysing the ions ( analysesr). Both types of equipment (Optics and Analysers) may be incorporated in the embodiments described herein.
- Mass spectrometer 60 is shown in Figure 2 in which like reference numerals are used for like features shown in Figure 1 .
- Mass spectrometer 60 comprises a time-of-flight (TOF) instrument 62 which extends from space 44 within the pump envelope 28 through the main pump inlet 36 to vacuum chamber 26 directly upstream of inlet 36. Accordingly, mass spectrometer stage 20 bridges chamber 26 and space 44 and therefore the instrument 62 (and stage 20) is partially in axial alignment with the first pumping stage and within the envelope 28.
- the TOF stage makes specific use of the pipe losses which occur between mass spectrometer chamber 26 and volume 44. As indicated above, the pressure in chamber 26 is about 10 -6 and the pressure in volume 44 is about 10 -7 . Accordingly, the arrangement provides a natural pressure gradient that the TOF instrument can utilise.
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- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Non-Positive Displacement Air Blowers (AREA)
- Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
Description
- The present invention relates to a mass spectrometer system.
- A prior art mass spectrometer system is known for evacuating the stages of a mass spectrometer using a so-called split flow multi-stage pump. Such a pump may comprise a pump envelope in which a plurality of pumping stages are supported for rotation about an axis for pumping fluid from a main pump inlet to a main pump outlet. The main pump inlet is connected for evacuating a high vacuum stage. An inter-stage inlet is provided between pumping stages and is connected for evacuating a lower vacuum stage of the mass spectrometer.
- Typically, a split flow pump is orientated 'vertically' with its axis orthogonal to the flow direction from one stage to the next stage of a mass spectrometer. In this regard, the stages of a mass spectrometer comprise a respective plurality of vacuum chambers connected in series to allow flow from a low vacuum chamber to a high vacuum chamber. Each chamber comprises an instrument for processing a sample introduced to the mass spectrometer.
- This arrangement, in which more than one mass spectrometer stage at different pressures are evacuated by the same pump, offers advantages in terms of production cost, system size, maintenance and cost of ownership. However, the interstage inlet suffers from relatively low conductance and also the pump occupies a relatively large amount of space.
- More recently, a mass spectrometer system shown in
Figure 3 has been provided. Themass spectrometer system 100 may, for example, comprisestages mass spectrometer 104 evacuated using a split flowmulti-stage pump 106. Thepump 106 comprises apump envelope 108 in which a plurality ofpumping stages axis 112 for pumping fluid from amain pump inlet 114 to amain pump outlet 116. - The
envelope 108 forms a pump casing which structurally supports the pumping components of thepumping stages drive 112 which is itself supported by bearings (not shown) fixed to and supported by the casing. - The
main pump inlet 114 is connected for evacuating ahigh vacuum stage 103. Aninter-stage inlet 118 is provided between pumping stages and is connected for evacuating alower vacuum stage 102. The low vacuum stage, may, for example, be evacuated by abacking pump 120. - In
system 100, thesplit flow pump 106 is mounted with its axis X of rotation substantially parallel to the flow direction Y in the mass spectrometer. Such an arrangement can be utilised to increase conductance at the inter-stage inlet and reduce the height of the pump and instrument profile. However, in order to provide high pumping speed at thechamber 103, the inlet conductance between thechamber port 114 and thefirst pumping stage 109 must be relatively large. This is typically achieved by providing a relativelylarge space 122 in axial alignment with thepumping stage 109 and within the pumping envelope 108 (i.e. downstream of themain pump inlet 114 and upstream of the first pumping stage 109). In use, a pressure drop is generated between themain inlet 114 and thepumping stage 109 due to the flow of molecules and associated conductance of the port (sometimes referred to as pipe losses). Increasing the size ofspace 122 and decreasing a duct length minimises parasitic pressure drop between themain pump inlet 114 and thepumping stage 109 thereby maximising the pumping speed and minimising the pressure at the chamber. - It is known from
DE102007027352 and fromDE102007010068 to provide a multistage split flow type vacuum pump to differentially pump mass spectrometer chambers. - The present invention also provides a mass spectrometer according to Claim 1.
- Other preferred and/or optional aspects of the invention are defined in the accompanying claims.
- In order that the present invention may be well understood, two embodiments thereof, which are given by way of example only, will now be described with reference to the accompanying drawings, in which:
-
Figure 1 shows a mass spectrometer system; -
Figure 2 shows another mass spectrometer system; and -
Figure 3 shows a prior art mass spectrometer system; - Referring to
Figure 1 , amass spectrometer system 10 is shown which comprises amass spectrometer 12 and a split flowmulti-stage pump 14. Themass spectrometer 12 comprising a plurality ofmass spectrometer stages low vacuum stage 16 to ahigh vacuum stage 20. Flow from one stage to the next stage occurs generally in a direction to the right (as shown in the drawing) which is typically horizontal. Thestages respective vacuum chambers - The split flow
multi-stage pump 14 comprises apump envelope 28 in which a plurality ofpumping stages main pump inlet 36 to amain pump outlet 38. Aninter-stage inlet 40 is provided between pumping stages and is connected for evacuating alower vacuum stages pumping stages pumping stages low vacuum stage 22 is as shown evacuated by abacking pump 42 which also backs themain pump outlet 38. - The
envelope 28 forms a pump casing which structurally supports the pumping components of thepumping stages drive 29 which is itself supported by bearings (not shown) fixed to and supported by the casing. - The plurality of
vacuum chambers vacuum pump 14 attached thereto and comprising twopump inlets first pumping stage 34 exhausts to thesecond pumping stage 32 and the second pumping exhausts to thethird pumping stage 30. The first pumping stage is connected throughmain pump inlet 36 to relativelyhigh vacuum chamber 26 from which gas molecules can enter the pump throughvolume 44 fromchamber 26 and pass through the first, second and third pumping stages towards thepump outlet 38. The second pumping stage is connected throughinter-stage inlet 40 to amedium vacuum chamber 24 from which gas molecules can enter the pump throughinter-stage inlet 40 and pass through the second and third pumping stages towards thepump outlet 38. Thelow vacuum chamber 22 may be evacuated bybacking pump 42. - In this embodiment,
pumping stage 30 comprises a molecular drag mechanism andpumping stages - In order to maintain conductance at the main pump inlet a relatively
large space 44 is provided in axial alignment with thepumping stage 34 and within the pumping envelope 28 (i.e. downstream of themain pump inlet 36 and upstream of the first pumping stage 34).Pumping stage 34 is the first or most upstream pumping stage. As indicated above with reference to the prior art, thespace 44 allows thepumping stage 34 to work efficiently. The pressure inspace 44 is lower than the pressure inchamber 26 immediately upstream of the main pump inlet because of the afore-mentioned conductance effects (pipe losses). In the prior art, there is a relatively large amount of redundant space in the pump which is simply required for porting the gas from the mass spectrometer into the vacuum pump. With the exception of providing reasonable conductance, thisvolume 122 serves no mechanical purpose and is therefore wasteful in terms of material costs, machining, instrument size and weight. Unlike the prior art, the present invention incorporatesvolume 44 into the mass spectrometer forming a high vacuum chamber in the pump envelope which in use is at higher vacuum than a chamber directly upstream thereof. Accordingly, an additional mass spectrometer stage is provided in the arrangement at high vacuum without increased overall size of the system. - As described in more detail below,
instrumentation 50 of the mass spectrometer is located at least partially and preferably fully within thevolume 44 of the pump and in axial alignment with thefirst pumping stage 34. The term "axial alignment" as used herein is shown illustratively inFigures 1 and2 . In this regard, the outer radial extent of the first pumping stage is shown by broken lines and coincides with an inner surface of thepump envelope 28 housing the pumping mechanism of the first pumping stage. Themass spectrometer instrumentation 50, which may include analysers or optics, is axially aligned with thefirst pumping stage 34 inFigure 1 as it is located within the radial extent of the first pumping stage as shown by the double headed arrow 'A'. - As shown in
Figures 1 and2 , the mass spectrometer instrumentation is axially aligned with the first the pumping stage. Further, the axis of rotation X of the pumping stages is horizontal. Accordingly, the sample gas flow direction, or ion path, through the mass spectrometer stages turns through approximately 90° or more so that the ion path is located partially within the pump envelope. -
Mass spectrometer instruments vacuum chambers mass spectrometer instrument 50 is located inspace 44 between themain pump inlet 36 and thefirst pumping stage 34. - The arrangement makes effective use of the space and provides a higher level of pumping performance for the equipment at the reduced pressure directly in front of the blades of the first pumping stage. It is noted in this regard, that the pressure in
vacuum chamber 26 is about 10-6 mbar whereas the pressure involume 44 is about 10-7 mbar. The amount of improvement in performance is dependant upon the conductance of the pump and porting, however, it is typically in the order of 50%. - Although, as shown in
Figure 1 ,instrument 50 is located wholly within the pumping envelope and in axial alignment with thefirst pumping stage 34, only part of theinstrument 50 may be located within the pumping envelope and in axial alignment with thefirst pumping stage 34. Accordingly, at least part of one of the mass spectrometer stages is located within the pump envelope at the main pump inlet or in axial alignment with the pumpingstage 34. - The
instruments - A
mass spectrometer 60 is shown inFigure 2 in which like reference numerals are used for like features shown inFigure 1 .Mass spectrometer 60 comprises a time-of-flight (TOF)instrument 62 which extends fromspace 44 within thepump envelope 28 through themain pump inlet 36 to vacuumchamber 26 directly upstream ofinlet 36. Accordingly,mass spectrometer stage 20bridges chamber 26 andspace 44 and therefore the instrument 62 (and stage 20) is partially in axial alignment with the first pumping stage and within theenvelope 28. The TOF stage makes specific use of the pipe losses which occur betweenmass spectrometer chamber 26 andvolume 44. As indicated above, the pressure inchamber 26 is about 10-6 and the pressure involume 44 is about 10-7. Accordingly, the arrangement provides a natural pressure gradient that the TOF instrument can utilise.
Claims (4)
- A mass spectrometer system (10; 60) comprising: a mass spectrometer (12) comprising a plurality of differentially pumped mass spectrometer stages (16, 18, 20), said stages (16, 18, 20) comprising respective vacuum chambers (22, 24, 26), in gas communication from a low vacuum mass spectrometer (16) stage to a high vacuum mass spectrometer stage (20); and a multi-stage vacuum pump (14) configured to evacuate said mass spectrometer stages (16, 18, 20); the pump comprising:a pump envelope (28) attached to said plurality of vacuum chambers (22, 24, 26), in which a plurality of pumping stages (30, 32, 34), supported for rotation about an axis (X) generally parallel to the direction of flow in the mass spectrometer stages, are configured for pumping fluid from a main pump inlet (36) to a pump outlet (38); a first, pumping stage (34) being connected through the main pump inlet (36) to the high vacuum stage (20) from which, in use, gas molecules can enter the pump (14) from chamber (26) and pass through said pumping stages towards the pump outlet (38);wherein at least one stage (32, 34) of the pump (14), comprises a turbomolecular pumping mechanism; an interstage port (40) located between pumping stages (30, 32, 34) connected to a mass spectrometer stage (16, 18); and wherein an instrument (50; 62) for determining a characteristic of a mass spectrometer sample is at least partially located within the pump envelope (28) downstream of the main pump inlet (36) and upstream of the pumping mechanism of said first pumping stage (34), said instrument in axial alignment with the pumping stages (30, 32, 34), and wherein the pump envelope (28) downstream of the main pump inlet (36) and upstream of the pumping mechanism of said first pumping stage (34) forms part of a high vacuum chamber (44) which, in use, is at higher vacuum than a mass spectrometer chamber (26) attached directly upstream thereof.
- A mass spectrometer system as claimed in claim 1, wherein a spectrometer ion path is located partially within the pump envelope (28).
- A mass spectrometer system as claimed in any one of the preceding claims, wherein the axis of rotation (X) is generally horizontal.
- A mass spectrometer system as claimed in any one of the preceding claims, wherein a time-of-flight instrument (62) extends between the pump envelope (28) at the main inlet (36) and a chamber (26) directly upstream thereof.
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
GB0916797.4A GB2473839B (en) | 2009-09-24 | 2009-09-24 | Mass spectrometer |
PCT/GB2010/051528 WO2011036472A1 (en) | 2009-09-24 | 2010-09-13 | Mass spectrometer system |
Publications (2)
Publication Number | Publication Date |
---|---|
EP2481077A1 EP2481077A1 (en) | 2012-08-01 |
EP2481077B1 true EP2481077B1 (en) | 2019-04-03 |
Family
ID=41327541
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
EP10757464.2A Active EP2481077B1 (en) | 2009-09-24 | 2010-09-13 | Mass spectrometer system |
Country Status (7)
Country | Link |
---|---|
US (1) | US8716658B2 (en) |
EP (1) | EP2481077B1 (en) |
JP (1) | JP5719370B2 (en) |
CA (1) | CA2771200C (en) |
GB (1) | GB2473839B (en) |
TW (1) | TW201126563A (en) |
WO (1) | WO2011036472A1 (en) |
Families Citing this family (16)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB0901872D0 (en) * | 2009-02-06 | 2009-03-11 | Edwards Ltd | Multiple inlet vacuum pumps |
US9368335B1 (en) * | 2015-02-02 | 2016-06-14 | Thermo Finnigan Llc | Mass spectrometer |
US20160260594A1 (en) * | 2015-03-02 | 2016-09-08 | Bayspec, Inc. | Sample Inlet and Vacuum System for Portable Mass Spectrometer |
US10141177B2 (en) | 2017-02-16 | 2018-11-27 | Bruker Daltonics, Inc. | Mass spectrometer using gastight radio frequency ion guide |
US11373849B2 (en) | 2018-05-31 | 2022-06-28 | Micromass Uk Limited | Mass spectrometer having fragmentation region |
GB201808894D0 (en) | 2018-05-31 | 2018-07-18 | Micromass Ltd | Mass spectrometer |
US11367607B2 (en) | 2018-05-31 | 2022-06-21 | Micromass Uk Limited | Mass spectrometer |
GB201808893D0 (en) | 2018-05-31 | 2018-07-18 | Micromass Ltd | Bench-top time of flight mass spectrometer |
GB201808932D0 (en) | 2018-05-31 | 2018-07-18 | Micromass Ltd | Bench-top time of flight mass spectrometer |
GB201808890D0 (en) | 2018-05-31 | 2018-07-18 | Micromass Ltd | Bench-top time of flight mass spectrometer |
GB201808936D0 (en) | 2018-05-31 | 2018-07-18 | Micromass Ltd | Bench-top time of flight mass spectrometer |
GB201808912D0 (en) | 2018-05-31 | 2018-07-18 | Micromass Ltd | Bench-top time of flight mass spectrometer |
GB201808892D0 (en) | 2018-05-31 | 2018-07-18 | Micromass Ltd | Mass spectrometer |
GB201808949D0 (en) | 2018-05-31 | 2018-07-18 | Micromass Ltd | Bench-top time of flight mass spectrometer |
EP4407654A2 (en) * | 2019-07-15 | 2024-07-31 | Pfeiffer Vacuum GmbH | Vacuum system |
JP7327229B2 (en) * | 2020-03-18 | 2023-08-16 | 株式会社島津製作所 | Protective nets, turbomolecular pumps and mass spectrometers |
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US6586730B1 (en) * | 1999-02-26 | 2003-07-01 | Hitachi, Ltd. | Plasma ion source mass spectrometer |
US20030155496A1 (en) * | 2001-04-27 | 2003-08-21 | Iouri Kalinitchenko | Mass spectrometer including a quadrupole mass analyser arrangement |
US20070258836A1 (en) * | 2006-05-04 | 2007-11-08 | Pfeiffer Vacuum Gmbh | Vacuum pump |
US20080063541A1 (en) * | 2004-05-21 | 2008-03-13 | Stones Ian D | Pumping Arrangement |
Family Cites Families (11)
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WO1999061799A1 (en) * | 1998-05-26 | 1999-12-02 | Leybold Vakuum Gmbh | Frictional vacuum pump with chassis, rotor, housing and device fitted with such a frictional vacuum pump |
ATE480005T1 (en) * | 1999-06-11 | 2010-09-15 | Applied Biosystems Llc | MALDI ION SOURCE WITH GAS PULSE, DEVICE AND METHOD FOR DETERMINING THE MOLECULAR WEIGHT OF LABILITY MOLECULES |
GB0414316D0 (en) * | 2004-06-25 | 2004-07-28 | Boc Group Plc | Vacuum pump |
GB0424198D0 (en) * | 2004-11-01 | 2004-12-01 | Boc Group Plc | Pumping arrangement |
WO2007078573A2 (en) | 2005-12-22 | 2007-07-12 | Thermo Finnigan Llc | Apparatus and method for pumping in an ion optical device |
JP5452839B2 (en) * | 2006-10-05 | 2014-03-26 | アジレント・テクノロジーズ・インク | Analysis equipment |
DE102007010068B4 (en) * | 2007-02-28 | 2024-06-13 | Thermo Fisher Scientific (Bremen) Gmbh | Vacuum pump or vacuum apparatus with vacuum pump |
DE102007027352A1 (en) * | 2007-06-11 | 2008-12-18 | Oerlikon Leybold Vacuum Gmbh | Mass Spectrometer arrangement |
GB2455977A (en) | 2007-12-21 | 2009-07-01 | Thermo Fisher Scient | Multi-reflectron time-of-flight mass spectrometer |
GB0901872D0 (en) * | 2009-02-06 | 2009-03-11 | Edwards Ltd | Multiple inlet vacuum pumps |
GB2474507B (en) * | 2009-10-19 | 2016-01-27 | Edwards Ltd | Vacuum pump |
-
2009
- 2009-09-24 GB GB0916797.4A patent/GB2473839B/en active Active
-
2010
- 2010-09-13 CA CA2771200A patent/CA2771200C/en active Active
- 2010-09-13 EP EP10757464.2A patent/EP2481077B1/en active Active
- 2010-09-13 US US13/394,976 patent/US8716658B2/en active Active
- 2010-09-13 JP JP2012530336A patent/JP5719370B2/en active Active
- 2010-09-13 WO PCT/GB2010/051528 patent/WO2011036472A1/en active Application Filing
- 2010-09-15 TW TW099131279A patent/TW201126563A/en unknown
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6586730B1 (en) * | 1999-02-26 | 2003-07-01 | Hitachi, Ltd. | Plasma ion source mass spectrometer |
US20030155496A1 (en) * | 2001-04-27 | 2003-08-21 | Iouri Kalinitchenko | Mass spectrometer including a quadrupole mass analyser arrangement |
US20080063541A1 (en) * | 2004-05-21 | 2008-03-13 | Stones Ian D | Pumping Arrangement |
US20070258836A1 (en) * | 2006-05-04 | 2007-11-08 | Pfeiffer Vacuum Gmbh | Vacuum pump |
Also Published As
Publication number | Publication date |
---|---|
GB2473839B (en) | 2016-06-01 |
GB2473839A (en) | 2011-03-30 |
TW201126563A (en) | 2011-08-01 |
GB0916797D0 (en) | 2009-11-04 |
US20120168621A1 (en) | 2012-07-05 |
EP2481077A1 (en) | 2012-08-01 |
JP5719370B2 (en) | 2015-05-20 |
CA2771200A1 (en) | 2011-03-31 |
US8716658B2 (en) | 2014-05-06 |
CA2771200C (en) | 2017-09-05 |
WO2011036472A1 (en) | 2011-03-31 |
JP2013506242A (en) | 2013-02-21 |
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