JP5637919B2 - 複合真空ポンプ - Google Patents
複合真空ポンプ Download PDFInfo
- Publication number
- JP5637919B2 JP5637919B2 JP2011089466A JP2011089466A JP5637919B2 JP 5637919 B2 JP5637919 B2 JP 5637919B2 JP 2011089466 A JP2011089466 A JP 2011089466A JP 2011089466 A JP2011089466 A JP 2011089466A JP 5637919 B2 JP5637919 B2 JP 5637919B2
- Authority
- JP
- Japan
- Prior art keywords
- pump
- exhaust
- inlet
- exhaust mechanism
- rotor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
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Classifications
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D19/00—Axial-flow pumps
- F04D19/02—Multi-stage pumps
- F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
- F04D19/042—Turbomolecular vacuum pumps
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D17/00—Radial-flow pumps, e.g. centrifugal pumps; Helico-centrifugal pumps
- F04D17/08—Centrifugal pumps
- F04D17/16—Centrifugal pumps for displacing without appreciable compression
- F04D17/168—Pumps specially adapted to produce a vacuum
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D19/00—Axial-flow pumps
- F04D19/02—Multi-stage pumps
- F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
- F04D19/044—Holweck-type pumps
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D19/00—Axial-flow pumps
- F04D19/02—Multi-stage pumps
- F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
- F04D19/046—Combinations of two or more different types of pumps
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D23/00—Other rotary non-positive-displacement pumps
- F04D23/008—Regenerative pumps
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J49/00—Particle spectrometers or separator tubes
- H01J49/02—Details
- H01J49/24—Vacuum systems, e.g. maintaining desired pressures
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Non-Positive Displacement Air Blowers (AREA)
- Structures Of Non-Positive Displacement Pumps (AREA)
- Electrophonic Musical Instruments (AREA)
Description
しかしながら、ポンプを通過するガスの、再生排気機構112による圧縮のために、再生排気機構は、補助ライン138内の圧力よりも低い補助圧力を分子ドラッグ排気段110に送出するのに役立つ。これは、ポンプの電力消費を著しく減じ、且つポンプ性能を著しく改善することができる。
Claims (4)
- 複合多ポート真空ポンプ(110)であって、
駆動シャフト(104)が設けられている多構成要素本体(102)と、少なくとも3つの排気部分(106)、(108)、(110)と、を含み、
第1排気部分(106)は、ターボ分子段組(106)からなり、該ターボ分子段組は、ロータブレード(107a)及びステータブレード(107b)からなり、ロータブレード(107a)は駆動シャフト(104)に取り付けられ、
第2排気部分(108)は、第1排気部分の下流に配置され、且つロータブレード(109a)及びロータステータ(109b)からなるターボ分子段組(108)からなり、ロータブレード(109a)は駆動シャフト(104)に取り付けられ、
第3排気部分(110)は、第1及び第2排気部分の下流に配置され、且つホルウィック分子ドラッグ排気機構(112)及び再生排気機構(114)からなり、
前記ホルウィック分子ドラッグ排気機構は、回転シリンダ(116)及びそれに対応する環状ステータ(118a)、(118b)からなり、環状ステータは、該環状ステータに形成された螺旋チャンネルを有し、ホルウィック分子ドラッグ排気機構は、ロータ要素(120)に取り付けられた少なくとも2つの排気段を更に含み、ロータ要素(120)は、駆動シャフト(104)に配置された且つ駆動シャフト(104)と直交するディスク(120)の形態をなし、
再生排気機構(114)は、ホルウィック分子ドラッグ排気機構(112)のディスク(120)の片側に設けられた少なくとも2つの同心の環状列のロータ(122)の形態をなした複数のロータを含み、ロータ(122)の軸線方向位置は同じであり、
分子ドラッグ排気機構(112)のステータ(118b)は、再生排気機構(114)のステータを形成し、ステータ(118b)は、該ステータに形成され、ロータ(122)が回転する環状チャンネル(124a)、(124b)を有し、再生排気機構(114)のロータ(122)及び分子ドラッグ排気機構のステータ(118b)は分子ドラッグ排気機構(112)の回転シリンダ(116)によって取り囲まれ、再生排気機構(114)の下流にはポンプ出口(126)があり、
ポンプ(100)は少なくとも2つの第1入口(130)、第2入口(132)を含み、第1入口(130)は全ての排気部分の上流に配置され、第2入口(132)は、第1排気部分(106)と第2排気部分(108)の段間に配置され、使用中、第1入口(130)を通る流体は、第1排気部分(106)、第2排気部分(108)及び第3排気部分(110)を通り、ポンプ出口(126)を経てポンプ(100)から出て行き、第2入口(132)を通る流体は、ポンプ(100)に入り、第2排気部分(108)及び第3排気部分(110)を通り、ポンプ出口(126)を経てポンプ(100)から出て行く、複合多ポート真空ポンプ。 - ホルウィック分子ドラッグ排気機構(112)のシリンダ(116)は炭素繊維材料で形成される、請求項1に記載の複合多ポート真空ポンプ。
- 第2排気部分(108)と第3排気部分(110)の段間に配置された第3入口(134)を含み、分子ドラッグ排気機構(112)の段の全ては、前記第3入口(134)と流体連通しており、使用中、第3入口(134)を通る流体は、ポンプ(100)に入り、第3排気部分(110)だけを通り、ポンプ出口(126)を経てポンプ(100)から出て行く、請求項1に記載の複合多ポート真空ポンプ。
- 第3入口(134)は選択的に開閉されるように構成されている、請求項3に記載の複合多ポート真空ポンプ。
Applications Claiming Priority (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
GB0322888.9 | 2003-09-30 | ||
GB0322888A GB0322888D0 (en) | 2003-09-30 | 2003-09-30 | Vacuum pump |
GB0409139.3 | 2004-04-23 | ||
GBGB0409139.3A GB0409139D0 (en) | 2003-09-30 | 2004-04-23 | Vacuum pump |
Related Parent Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2006530557A Division JP4843493B2 (ja) | 2003-09-30 | 2004-09-23 | 真空ポンプ |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2011137475A JP2011137475A (ja) | 2011-07-14 |
JP5637919B2 true JP5637919B2 (ja) | 2014-12-10 |
Family
ID=34424883
Family Applications (5)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2006530557A Expired - Fee Related JP4843493B2 (ja) | 2003-09-30 | 2004-09-23 | 真空ポンプ |
JP2006530555A Expired - Fee Related JP5546094B2 (ja) | 2003-09-30 | 2004-09-23 | 真空ポンプ |
JP2011089466A Expired - Fee Related JP5637919B2 (ja) | 2003-09-30 | 2011-04-13 | 複合真空ポンプ |
JP2013213093A Expired - Fee Related JP5809218B2 (ja) | 2003-09-30 | 2013-10-10 | 真空ポンプ |
JP2013213092A Pending JP2014001743A (ja) | 2003-09-30 | 2013-10-10 | 真空ポンプ |
Family Applications Before (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2006530557A Expired - Fee Related JP4843493B2 (ja) | 2003-09-30 | 2004-09-23 | 真空ポンプ |
JP2006530555A Expired - Fee Related JP5546094B2 (ja) | 2003-09-30 | 2004-09-23 | 真空ポンプ |
Family Applications After (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2013213093A Expired - Fee Related JP5809218B2 (ja) | 2003-09-30 | 2013-10-10 | 真空ポンプ |
JP2013213092A Pending JP2014001743A (ja) | 2003-09-30 | 2013-10-10 | 真空ポンプ |
Country Status (8)
Country | Link |
---|---|
US (4) | US7866940B2 (ja) |
EP (4) | EP2375080B1 (ja) |
JP (5) | JP4843493B2 (ja) |
CN (3) | CN101124409B (ja) |
AT (1) | ATE535715T1 (ja) |
CA (4) | CA2563306C (ja) |
GB (1) | GB0409139D0 (ja) |
WO (2) | WO2005033520A1 (ja) |
Families Citing this family (40)
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GB0322883D0 (en) * | 2003-09-30 | 2003-10-29 | Boc Group Plc | Vacuum pump |
GB0409139D0 (en) | 2003-09-30 | 2004-05-26 | Boc Group Plc | Vacuum pump |
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US8288719B1 (en) * | 2006-12-29 | 2012-10-16 | Griffin Analytical Technologies, Llc | Analytical instruments, assemblies, and methods |
DE102007010068B4 (de) * | 2007-02-28 | 2024-06-13 | Thermo Fisher Scientific (Bremen) Gmbh | Vakuumpumpe oder Vakuumapparatur mit Vakuumpumpe |
DE102007027352A1 (de) * | 2007-06-11 | 2008-12-18 | Oerlikon Leybold Vacuum Gmbh | Massenspektrometer-Anordnung |
US9343280B2 (en) | 2007-09-07 | 2016-05-17 | Perkinelmer Health Sciences Canada, Inc. | Multi-pressure stage mass spectrometer and methods |
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US8673394B2 (en) * | 2008-05-20 | 2014-03-18 | Sundew Technologies Llc | Deposition method and apparatus |
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GB0901872D0 (en) | 2009-02-06 | 2009-03-11 | Edwards Ltd | Multiple inlet vacuum pumps |
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-
2004
- 2004-04-23 GB GBGB0409139.3A patent/GB0409139D0/en not_active Ceased
- 2004-09-23 CA CA2563306A patent/CA2563306C/en not_active Expired - Fee Related
- 2004-09-23 CN CN2004800268965A patent/CN101124409B/zh active Active
- 2004-09-23 US US10/574,027 patent/US7866940B2/en active Active
- 2004-09-23 EP EP11169892.4A patent/EP2375080B1/en active Active
- 2004-09-23 EP EP11169894.0A patent/EP2378129B1/en active Active
- 2004-09-23 CA CA2747137A patent/CA2747137C/en not_active Expired - Fee Related
- 2004-09-23 WO PCT/GB2004/004110 patent/WO2005033520A1/en active Application Filing
- 2004-09-23 AT AT04768653T patent/ATE535715T1/de active
- 2004-09-23 CA CA2747136A patent/CA2747136C/en not_active Expired - Fee Related
- 2004-09-23 WO PCT/GB2004/004046 patent/WO2005040615A2/en active Application Filing
- 2004-09-23 EP EP04768653.0A patent/EP1668255B2/en not_active Not-in-force
- 2004-09-23 CN CN2011100487470A patent/CN102062109B/zh active Active
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