ATE535715T1 - Vakuumpumpe - Google Patents

Vakuumpumpe

Info

Publication number
ATE535715T1
ATE535715T1 AT04768653T AT04768653T ATE535715T1 AT E535715 T1 ATE535715 T1 AT E535715T1 AT 04768653 T AT04768653 T AT 04768653T AT 04768653 T AT04768653 T AT 04768653T AT E535715 T1 ATE535715 T1 AT E535715T1
Authority
AT
Austria
Prior art keywords
pump
outlet
pumping section
fluid
pumping
Prior art date
Application number
AT04768653T
Other languages
English (en)
Inventor
Ian David Stones
Nigel Paul Schofield
Martin Nicholas Stuart
Original Assignee
Edwards Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=34424883&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=ATE535715(T1) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Priority claimed from GB0322888A external-priority patent/GB0322888D0/en
Application filed by Edwards Ltd filed Critical Edwards Ltd
Application granted granted Critical
Publication of ATE535715T1 publication Critical patent/ATE535715T1/de

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D17/00—Radial-flow pumps, e.g. centrifugal pumps; Helico-centrifugal pumps
    • F04D17/08—Centrifugal pumps
    • F04D17/16—Centrifugal pumps for displacing without appreciable compression
    • F04D17/168—Pumps specially adapted to produce a vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/044—Holweck-type pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/046—Combinations of two or more different types of pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D23/00—Other rotary non-positive-displacement pumps
    • F04D23/008—Regenerative pumps
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/02—Details
    • H01J49/24—Vacuum systems, e.g. maintaining desired pressures
AT04768653T 2003-09-30 2004-09-23 Vakuumpumpe ATE535715T1 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
GB0322888A GB0322888D0 (en) 2003-09-30 2003-09-30 Vacuum pump
GBGB0409139.3A GB0409139D0 (en) 2003-09-30 2004-04-23 Vacuum pump
PCT/GB2004/004110 WO2005033520A1 (en) 2003-09-30 2004-09-23 Vacuum pump

Publications (1)

Publication Number Publication Date
ATE535715T1 true ATE535715T1 (de) 2011-12-15

Family

ID=34424883

Family Applications (1)

Application Number Title Priority Date Filing Date
AT04768653T ATE535715T1 (de) 2003-09-30 2004-09-23 Vakuumpumpe

Country Status (8)

Country Link
US (4) US8851865B2 (de)
EP (4) EP1668254B1 (de)
JP (5) JP5546094B2 (de)
CN (3) CN1860301B (de)
AT (1) ATE535715T1 (de)
CA (4) CA2563234C (de)
GB (1) GB0409139D0 (de)
WO (2) WO2005033520A1 (de)

Families Citing this family (40)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB0409139D0 (en) * 2003-09-30 2004-05-26 Boc Group Plc Vacuum pump
GB0322883D0 (en) * 2003-09-30 2003-10-29 Boc Group Plc Vacuum pump
US20120027583A1 (en) * 2006-05-04 2012-02-02 Bernd Hofmann Vacuum pump
DE102006020710A1 (de) * 2006-05-04 2007-11-08 Pfeiffer Vacuum Gmbh Vakuumpumpe mit Gehäuse
US8288719B1 (en) * 2006-12-29 2012-10-16 Griffin Analytical Technologies, Llc Analytical instruments, assemblies, and methods
DE102007010068A1 (de) * 2007-02-28 2008-09-04 Thermo Fisher Scientific (Bremen) Gmbh Vakuumpumpe oder Vakuumapparatur mit Vakuumpumpe
DE102007027352A1 (de) * 2007-06-11 2008-12-18 Oerlikon Leybold Vacuum Gmbh Massenspektrometer-Anordnung
CA2698361C (en) 2007-09-07 2018-01-23 Ionics Mass Spectrometry Group, Inc. Multi-pressure stage mass spectrometer and methods
CN101398406B (zh) * 2007-09-30 2012-03-07 孔令昌 便携式质谱计
DE102008009715A1 (de) * 2008-02-19 2009-08-20 Oerlikon Leybold Vacuum Gmbh Vakuumpump-System und Verwendung einer Mehrstufen-Vakuumpumpe
WO2009142905A1 (en) * 2008-05-20 2009-11-26 Sundew Technologies, Llc Deposition method and apparatus
JP5313260B2 (ja) 2008-10-10 2013-10-09 株式会社アルバック ドライポンプ
GB0901872D0 (en) * 2009-02-06 2009-03-11 Edwards Ltd Multiple inlet vacuum pumps
GB2472638B (en) * 2009-08-14 2014-03-19 Edwards Ltd Vacuum system
GB2474507B (en) 2009-10-19 2016-01-27 Edwards Ltd Vacuum pump
DE102010019940B4 (de) * 2010-05-08 2021-09-23 Pfeiffer Vacuum Gmbh Vakuumpumpstufe
DE102012003680A1 (de) 2012-02-23 2013-08-29 Pfeiffer Vacuum Gmbh Vakuumpumpe
WO2014125238A1 (en) * 2013-02-15 2014-08-21 Edwards Limited Vacuum pump
DE202013005458U1 (de) 2013-06-15 2014-09-16 Oerlikon Leybold Vacuum Gmbh Vakuumpumpe
DE102013214662A1 (de) * 2013-07-26 2015-01-29 Pfeiffer Vacuum Gmbh Vakuumpumpe
GB201314841D0 (en) * 2013-08-20 2013-10-02 Thermo Fisher Scient Bremen Multiple port vacuum pump system
DE102013109637A1 (de) * 2013-09-04 2015-03-05 Pfeiffer Vacuum Gmbh Vakuumpumpe sowie Anordnung mit einer Vakuumpumpe
DE102014101257A1 (de) 2014-02-03 2015-08-06 Pfeiffer Vacuum Gmbh Vakuumpumpe
EP3032106B1 (de) * 2014-12-08 2020-02-12 Pfeiffer Vacuum Gmbh Vakuumpumpe
GB2533153B (en) * 2014-12-12 2017-09-20 Thermo Fisher Scient (Bremen) Gmbh Vacuum system
DE102014226038A1 (de) * 2014-12-16 2016-06-16 Carl Zeiss Microscopy Gmbh Druckreduzierungseinrichtung, Vorrichtung zur massenspektrometrischen Analyse eines Gases und Reinigungsverfahren
US9368335B1 (en) * 2015-02-02 2016-06-14 Thermo Finnigan Llc Mass spectrometer
JP6488898B2 (ja) * 2015-06-09 2019-03-27 株式会社島津製作所 真空ポンプおよび質量分析装置
EP3112688B2 (de) * 2015-07-01 2022-05-11 Pfeiffer Vacuum GmbH Splitflow-vakuumpumpe sowie vakuum-system mit einer splitflow-vakuumpumpe
JP6578838B2 (ja) * 2015-09-15 2019-09-25 株式会社島津製作所 真空ポンプおよび質量分析装置
EP3327293B1 (de) * 2016-11-23 2019-11-06 Pfeiffer Vacuum Gmbh Vakuumpumpe mit mehreren einlässen
JP7108377B2 (ja) * 2017-02-08 2022-07-28 エドワーズ株式会社 真空ポンプ、真空ポンプに備わる回転部、およびアンバランス修正方法
GB201715151D0 (en) * 2017-09-20 2017-11-01 Edwards Ltd A drag pump and a set of vacuum pumps including a drag pump
KR101838660B1 (ko) * 2017-12-04 2018-03-14 (주)대명엔지니어링 진공 펌프
GB2569633A (en) * 2017-12-21 2019-06-26 Edwards Ltd A vacuum pumping arrangement and method of cleaning the vacuum pumping arrangement
DE202018000285U1 (de) * 2018-01-18 2019-04-23 Leybold Gmbh Vakuumpumpen-System
DE102018119747B3 (de) * 2018-08-14 2020-02-13 Bruker Daltonik Gmbh Turbomolekularpumpe für massenspektrometer
GB2584603B (en) * 2019-04-11 2021-10-13 Edwards Ltd Vacuum chamber module
EP3623634B1 (de) * 2019-08-13 2022-04-06 Pfeiffer Vacuum Gmbh Vakuumpumpe umfassend eine holweckpumpstufe und zwei seitenkanalpumpstufen
US11710950B2 (en) 2021-01-20 2023-07-25 Te Connectivity Solutions Gmbh Cutting blade and cutting depth control device

Family Cites Families (45)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2409857B2 (de) 1974-03-01 1977-03-24 Leybold-Heraeus GmbH & Co KG, 5000Köln Turbomolekularvakuumpumpe mit zumindest teilweise glockenfoermig ausgebildetem rotor
DE2442614A1 (de) * 1974-09-04 1976-03-18 Siemens Ag Turbomolekularpumpe
JPS6172896A (ja) 1984-09-17 1986-04-14 Japan Atom Energy Res Inst 高速回転ポンプ
JPS62279282A (ja) * 1986-05-27 1987-12-04 Mitsubishi Electric Corp タ−ボ分子ポンプ
JPS6355396A (ja) * 1986-08-21 1988-03-09 Hitachi Ltd タ−ボ真空ポンプ
JPS6375386A (ja) 1986-09-18 1988-04-05 Mitsubishi Heavy Ind Ltd ハイブリツド真空ポンプ
JP2585420B2 (ja) * 1989-04-04 1997-02-26 株式会社日立製作所 ターボ真空ポンプ
US5020969A (en) * 1988-09-28 1991-06-04 Hitachi, Ltd. Turbo vacuum pump
JPH02108895A (ja) † 1988-10-17 1990-04-20 Hitachi Ltd ターボ真空ポンプ
JPH02136595A (ja) 1988-11-16 1990-05-25 Anelva Corp 真空ポンプ
ATE117410T1 (de) * 1990-07-06 1995-02-15 Cit Alcatel Zweite stufe für mechanische vakuumpumpeinheit und lecküberwachungssystem zur anwendung dieser einheit.
DE4228313A1 (de) * 1992-08-26 1994-03-03 Leybold Ag Gegenstrom-Lecksucher mit Hochvakuumpumpe
EP0603694A1 (de) 1992-12-24 1994-06-29 BALZERS-PFEIFFER GmbH Vakuumpumpsystem
US5733104A (en) * 1992-12-24 1998-03-31 Balzers-Pfeiffer Gmbh Vacuum pump system
JP2656199B2 (ja) * 1993-01-11 1997-09-24 アプライド マテリアルズ インコーポレイテッド 真空チャンバの開放方法及びｐｖｄ装置
DE4314418A1 (de) * 1993-05-03 1994-11-10 Leybold Ag Reibungsvakuumpumpe mit unterschiedlich gestalteten Pumpenabschnitten
CN1110376A (zh) * 1994-04-16 1995-10-18 储继国 拖动分子泵
DE19508566A1 (de) * 1995-03-10 1996-09-12 Balzers Pfeiffer Gmbh Molekularvakuumpumpe mit Kühlgaseinrichtung und Verfahren zu deren Betrieb
JP3095338B2 (ja) * 1995-06-19 2000-10-03 富士通株式会社 ターボ分子ポンプ
GB9725146D0 (en) * 1997-11-27 1998-01-28 Boc Group Plc Improvements in vacuum pumps
JPH11230036A (ja) * 1998-02-18 1999-08-24 Ebara Corp 真空排気システム
DE19821634A1 (de) * 1998-05-14 1999-11-18 Leybold Vakuum Gmbh Reibungsvakuumpumpe mit Stator und Rotor
GB9810872D0 (en) * 1998-05-20 1998-07-22 Boc Group Plc Improved vacuum pump
DE59912629D1 (de) * 1998-05-26 2006-02-16 Leybold Vakuum Gmbh Gerät mit evakuierbarer Kammer
US6193461B1 (en) * 1999-02-02 2001-02-27 Varian Inc. Dual inlet vacuum pumps
DE19915307A1 (de) * 1999-04-03 2000-10-05 Leybold Vakuum Gmbh Reibungsvakuumpumpe mit aus Welle und Rotor bestehender Rotoreinheit
DE19930952A1 (de) * 1999-07-05 2001-01-11 Pfeiffer Vacuum Gmbh Vakuumpumpe
GB9927493D0 (en) * 1999-11-19 2000-01-19 Boc Group Plc Improved vacuum pumps
DE10022062A1 (de) * 2000-05-06 2001-11-08 Leybold Vakuum Gmbh Maschine, vorzugsweise Vakuumpumpe, mit Magnetlagern
JP2001323892A (ja) * 2000-05-16 2001-11-22 Shimadzu Corp ターボ型真空機器
DE10032607B4 (de) * 2000-07-07 2004-08-12 Leo Elektronenmikroskopie Gmbh Teilchenstrahlgerät mit einer im Ultrahochvakuum zu betreibenden Teilchenquelle und kaskadenförmige Pumpanordnung für ein solches Teilchenstrahlgerät
US6793466B2 (en) * 2000-10-03 2004-09-21 Ebara Corporation Vacuum pump
JP2002138987A (ja) * 2000-10-31 2002-05-17 Seiko Instruments Inc 真空ポンプ
DE10055057A1 (de) * 2000-11-07 2002-05-08 Pfeiffer Vacuum Gmbh Leckdetektorpumpe
JP2002285987A (ja) * 2001-03-28 2002-10-03 Chiba Seimitsu:Kk 小型真空ポンプ
CN1399076A (zh) * 2001-07-27 2003-02-26 大晃机械工业株式会社 真空泵
GB0124731D0 (en) * 2001-10-15 2001-12-05 Boc Group Plc Vacuum pumps
JP3961273B2 (ja) * 2001-12-04 2007-08-22 Ｂｏｃエドワーズ株式会社 真空ポンプ
GB0229355D0 (en) * 2002-12-17 2003-01-22 Boc Group Plc Vacuum pumping arrangement
GB0229353D0 (en) * 2002-12-17 2003-01-22 Boc Group Plc Vacuum pumping system and method of operating a vacuum pumping arrangement
GB0229356D0 (en) * 2002-12-17 2003-01-22 Boc Group Plc Vacuum pumping arrangement
GB0229352D0 (en) * 2002-12-17 2003-01-22 Boc Group Plc Vacuum pumping arrangement and method of operating same
ITTO20030421A1 (it) * 2003-06-05 2004-12-06 Varian Spa Pompa da vuoto compatta
GB0409139D0 (en) 2003-09-30 2004-05-26 Boc Group Plc Vacuum pump
GB0411426D0 (en) * 2004-05-21 2004-06-23 Boc Group Plc Pumping arrangement

Also Published As

Publication number Publication date
EP1668254A2 (de) 2006-06-14
CA2563306C (en) 2011-11-15
EP2378129B1 (de) 2020-02-05
JP5546094B2 (ja) 2014-07-09
EP1668254B1 (de) 2019-09-04
CN102062109B (zh) 2012-11-28
EP1668255B2 (de) 2016-01-13
EP1668255A1 (de) 2006-06-14
US7866940B2 (en) 2011-01-11
JP5637919B2 (ja) 2014-12-10
GB0409139D0 (en) 2004-05-26
US20140369807A1 (en) 2014-12-18
JP2007507656A (ja) 2007-03-29
EP2378129A3 (de) 2017-05-31
CA2747136A1 (en) 2005-05-06
CA2563306A1 (en) 2005-05-06
EP1668255B1 (de) 2011-11-30
US8672607B2 (en) 2014-03-18
CA2563234A1 (en) 2005-04-14
WO2005040615A3 (en) 2005-06-16
EP2375080B1 (de) 2020-06-03
US9249805B2 (en) 2016-02-02
EP2375080A2 (de) 2011-10-12
WO2005033520A1 (en) 2005-04-14
EP2378129A2 (de) 2011-10-19
EP2375080A3 (de) 2017-05-24
JP2011137475A (ja) 2011-07-14
US20070116555A1 (en) 2007-05-24
CA2747137A1 (en) 2005-05-06
CN102062109A (zh) 2011-05-18
CA2563234C (en) 2011-11-15
CA2747137C (en) 2014-05-13
JP2014001743A (ja) 2014-01-09
JP2007507657A (ja) 2007-03-29
US8851865B2 (en) 2014-10-07
JP5809218B2 (ja) 2015-11-10
CN1860301A (zh) 2006-11-08
CN101124409B (zh) 2012-11-07
WO2005040615A2 (en) 2005-05-06
US20080138219A1 (en) 2008-06-12
JP2014001744A (ja) 2014-01-09
US20110200423A1 (en) 2011-08-18
JP4843493B2 (ja) 2011-12-21
CN1860301B (zh) 2012-10-10
CA2747136C (en) 2012-04-10
CN101124409A (zh) 2008-02-13

Similar Documents

Publication Publication Date Title
ATE535715T1 (de) Vakuumpumpe
ATE462081T1 (de) Pumpanordnung
WO2006048602A3 (en) Pumping arrangement
AU2019268166A1 (en) Pumping cassette
ATE285523T1 (de) Vakuumpumpen
JP2008518154A5 (de)
ATE544952T1 (de) Vakuumpumpe
ATE297768T1 (de) Herzkammerunterstützungssystem mit zweitem laufrad
WO2008044064A3 (en) Vacuum pump
ATE369496T1 (de) Vakuumpumpe
ATE425367T1 (de) Lauf- und leiträder für verdichter und ventilatoren
EP1277965A3 (de) Kreiselpumpe
DE602006020550D1 (de) Vakuumpumpe
CA2563241A1 (en) Vacuum pump
ATE373173T1 (de) Doppel- oder mehrfachpumpe
NO20054680L (no) Ringformet vaeskepumpe
DE29501872U1 (de) Seitenkanal-Auslaßform
ATE347437T1 (de) Pumpen-drucktauscher-system für die umkehrosmose
ATE468490T1 (de) Seitenkanalpumpe und stator dafür
SE0303238D0 (sv) Manöverventil
RU2005129211A (ru) Способ увеличения эффективности работы многоступенчатых насосов (компрессоров), перекачивающих сжимаемые среды (жидкости, газы)