ATE544952T1 - Vakuumpumpe - Google Patents
VakuumpumpeInfo
- Publication number
- ATE544952T1 ATE544952T1 AT10175459T AT10175459T ATE544952T1 AT E544952 T1 ATE544952 T1 AT E544952T1 AT 10175459 T AT10175459 T AT 10175459T AT 10175459 T AT10175459 T AT 10175459T AT E544952 T1 ATE544952 T1 AT E544952T1
- Authority
- AT
- Austria
- Prior art keywords
- mass spectrometer
- cartridge
- housing
- chambers
- differentially
- Prior art date
Links
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D29/00—Details, component parts, or accessories
- F04D29/60—Mounting; Assembling; Disassembling
- F04D29/601—Mounting; Assembling; Disassembling specially adapted for elastic fluid pumps
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D19/00—Axial-flow pumps
- F04D19/02—Multi-stage pumps
- F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
- F04D19/042—Turbomolecular vacuum pumps
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M3/00—Investigating fluid-tightness of structures
- G01M3/02—Investigating fluid-tightness of structures by using fluid or vacuum
- G01M3/04—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point
- G01M3/20—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material
- G01M3/202—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material using mass spectrometer detection systems
- G01M3/205—Accessories or associated equipment; Pump constructions
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J49/00—Particle spectrometers or separator tubes
- H01J49/02—Details
- H01J49/24—Vacuum systems, e.g. maintaining desired pressures
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Non-Positive Displacement Air Blowers (AREA)
- Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
- Electrophonic Musical Instruments (AREA)
- Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
- Electron Tubes For Measurement (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
GBGB0414316.0A GB0414316D0 (en) | 2004-06-25 | 2004-06-25 | Vacuum pump |
Publications (1)
Publication Number | Publication Date |
---|---|
ATE544952T1 true ATE544952T1 (de) | 2012-02-15 |
Family
ID=32800225
Family Applications (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
AT10175459T ATE544952T1 (de) | 2004-06-25 | 2005-06-09 | Vakuumpumpe |
AT05748158T ATE507394T1 (de) | 2004-06-25 | 2005-06-09 | Vakuumpumpe |
Family Applications After (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
AT05748158T ATE507394T1 (de) | 2004-06-25 | 2005-06-09 | Vakuumpumpe |
Country Status (9)
Country | Link |
---|---|
US (2) | US7811065B2 (de) |
EP (2) | EP1759118B2 (de) |
JP (1) | JP2008504479A (de) |
CN (2) | CN101705945A (de) |
AT (2) | ATE544952T1 (de) |
CA (2) | CA2780091C (de) |
DE (1) | DE602005027695D1 (de) |
GB (1) | GB0414316D0 (de) |
WO (1) | WO2006000745A1 (de) |
Families Citing this family (22)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB0414316D0 (en) * | 2004-06-25 | 2004-07-28 | Boc Group Plc | Vacuum pump |
US20120027583A1 (en) * | 2006-05-04 | 2012-02-02 | Bernd Hofmann | Vacuum pump |
DE102006020710A1 (de) | 2006-05-04 | 2007-11-08 | Pfeiffer Vacuum Gmbh | Vakuumpumpe mit Gehäuse |
US8288719B1 (en) * | 2006-12-29 | 2012-10-16 | Griffin Analytical Technologies, Llc | Analytical instruments, assemblies, and methods |
DE102007010068B4 (de) * | 2007-02-28 | 2024-06-13 | Thermo Fisher Scientific (Bremen) Gmbh | Vakuumpumpe oder Vakuumapparatur mit Vakuumpumpe |
DE102007027354A1 (de) * | 2007-06-11 | 2008-12-18 | Oerlikon Leybold Vacuum Gmbh | Turbomolekularpumpe |
WO2009030048A1 (en) * | 2007-09-07 | 2009-03-12 | Ionics Mass Spectrometry Group, Inc. | Multi-pressure stage mass spectrometer and methods |
DE102007044945A1 (de) * | 2007-09-20 | 2009-04-09 | Pfeiffer Vacuum Gmbh | Vakuumpumpe |
JP5244730B2 (ja) * | 2009-07-31 | 2013-07-24 | 株式会社日立ハイテクノロジーズ | 低真空走査電子顕微鏡 |
GB2473839B (en) * | 2009-09-24 | 2016-06-01 | Edwards Ltd | Mass spectrometer |
GB2489975A (en) | 2011-04-14 | 2012-10-17 | Edwards Ltd | Vacuum pumping system |
US8481923B1 (en) * | 2012-06-29 | 2013-07-09 | Agilent Technologies, Inc. | Atmospheric pressure plasma mass spectrometer |
DE202013003855U1 (de) * | 2013-04-25 | 2014-07-28 | Oerlikon Leybold Vacuum Gmbh | Untersuchungseinrichtung sowie Multi-Inlet-Vakuumpumpe |
GB2516969B (en) | 2013-08-09 | 2017-04-19 | Edwards Ltd | Vacuum system securing devices |
DE102013222167B4 (de) | 2013-10-31 | 2024-07-11 | Pfeiffer Vacuum Gmbh | Vakuumpumpe |
DE102013114290A1 (de) | 2013-12-18 | 2015-06-18 | Pfeiffer Vacuum Gmbh | Vakuumpumpe |
GB2538962B (en) * | 2015-06-01 | 2019-06-26 | Edwards Ltd | Vacuum pump |
CN106340437B (zh) * | 2015-07-09 | 2019-03-22 | 株式会社岛津制作所 | 质谱仪及其应用的减少离子损失和后级真空负载的方法 |
DE102018119747B3 (de) | 2018-08-14 | 2020-02-13 | Bruker Daltonik Gmbh | Turbomolekularpumpe für massenspektrometer |
JP7196763B2 (ja) * | 2018-10-25 | 2022-12-27 | 株式会社島津製作所 | ターボ分子ポンプおよび質量分析装置 |
GB2601515B (en) * | 2020-12-02 | 2022-12-28 | Agilent Technologies Inc | Vacuum pump with elastic spacer |
GB2624388A (en) * | 2022-11-15 | 2024-05-22 | Edwards Ltd | Vacuum chamber and vacuum system |
Family Cites Families (15)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5162650A (en) * | 1991-01-25 | 1992-11-10 | Finnigan Corporation | Method and apparatus for multi-stage particle separation with gas addition for a mass spectrometer |
US5733104A (en) * | 1992-12-24 | 1998-03-31 | Balzers-Pfeiffer Gmbh | Vacuum pump system |
EP0603694A1 (de) | 1992-12-24 | 1994-06-29 | BALZERS-PFEIFFER GmbH | Vakuumpumpsystem |
DE4326265A1 (de) * | 1993-08-05 | 1995-02-09 | Leybold Ag | Testgasdetektor, vorzugsweise für Lecksuchgeräte, sowie Verfahren zum Betrieb eines Testgasdetektors dieser Art |
DE19508566A1 (de) * | 1995-03-10 | 1996-09-12 | Balzers Pfeiffer Gmbh | Molekularvakuumpumpe mit Kühlgaseinrichtung und Verfahren zu deren Betrieb |
GB9725146D0 (en) | 1997-11-27 | 1998-01-28 | Boc Group Plc | Improvements in vacuum pumps |
DE19821634A1 (de) * | 1998-05-14 | 1999-11-18 | Leybold Vakuum Gmbh | Reibungsvakuumpumpe mit Stator und Rotor |
US6457954B1 (en) * | 1998-05-26 | 2002-10-01 | Leybold Vakuum Gmbh | Frictional vacuum pump with chassis, rotor, housing and device fitted with such a frictional vacuum pump |
DE19901340B4 (de) | 1998-05-26 | 2016-03-24 | Leybold Vakuum Gmbh | Reibungsvakuumpumpe mit Chassis, Rotor und Gehäuse sowie Einrichtung, ausgerüstet mit einer Reibungsvakuumpumpe dieser Art |
GB9921983D0 (en) | 1999-09-16 | 1999-11-17 | Boc Group Plc | Improvements in vacuum pumps |
DE10008691B4 (de) * | 2000-02-24 | 2017-10-26 | Pfeiffer Vacuum Gmbh | Gasreibungspumpe |
GB2360066A (en) | 2000-03-06 | 2001-09-12 | Boc Group Plc | Vacuum pump |
DE10055057A1 (de) * | 2000-11-07 | 2002-05-08 | Pfeiffer Vacuum Gmbh | Leckdetektorpumpe |
GB0124731D0 (en) * | 2001-10-15 | 2001-12-05 | Boc Group Plc | Vacuum pumps |
GB0414316D0 (en) * | 2004-06-25 | 2004-07-28 | Boc Group Plc | Vacuum pump |
-
2004
- 2004-06-25 GB GBGB0414316.0A patent/GB0414316D0/en not_active Ceased
-
2005
- 2005-06-09 CN CN200910208870A patent/CN101705945A/zh active Pending
- 2005-06-09 EP EP05748158.2A patent/EP1759118B2/de active Active
- 2005-06-09 CA CA2780091A patent/CA2780091C/en not_active Expired - Fee Related
- 2005-06-09 WO PCT/GB2005/002249 patent/WO2006000745A1/en not_active Application Discontinuation
- 2005-06-09 AT AT10175459T patent/ATE544952T1/de active
- 2005-06-09 CA CA2565325A patent/CA2565325C/en not_active Expired - Fee Related
- 2005-06-09 EP EP10175459A patent/EP2273128B1/de not_active Not-in-force
- 2005-06-09 AT AT05748158T patent/ATE507394T1/de not_active IP Right Cessation
- 2005-06-09 CN CN200580021217XA patent/CN1973135B/zh not_active Expired - Fee Related
- 2005-06-09 US US11/630,729 patent/US7811065B2/en active Active
- 2005-06-09 DE DE602005027695T patent/DE602005027695D1/de active Active
- 2005-06-09 JP JP2007517437A patent/JP2008504479A/ja active Pending
-
2010
- 2010-09-09 US US12/878,592 patent/US8757987B2/en active Active
Also Published As
Publication number | Publication date |
---|---|
CA2565325C (en) | 2013-05-28 |
ATE507394T1 (de) | 2011-05-15 |
US20080166219A1 (en) | 2008-07-10 |
CA2780091A1 (en) | 2006-01-05 |
EP2273128A1 (de) | 2011-01-12 |
EP1759118B2 (de) | 2016-10-05 |
CA2565325A1 (en) | 2006-01-05 |
US8757987B2 (en) | 2014-06-24 |
EP1759118A1 (de) | 2007-03-07 |
CN101705945A (zh) | 2010-05-12 |
CN1973135B (zh) | 2010-05-05 |
EP2273128B1 (de) | 2012-02-08 |
CA2780091C (en) | 2013-07-30 |
CN1973135A (zh) | 2007-05-30 |
GB0414316D0 (en) | 2004-07-28 |
US20110142686A1 (en) | 2011-06-16 |
EP1759118B1 (de) | 2011-04-27 |
WO2006000745A1 (en) | 2006-01-05 |
DE602005027695D1 (de) | 2011-06-09 |
JP2008504479A (ja) | 2008-02-14 |
US7811065B2 (en) | 2010-10-12 |
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