ATE246315T1 - Vakuumpumpe - Google Patents

Vakuumpumpe

Info

Publication number
ATE246315T1
ATE246315T1 AT00112483T AT00112483T ATE246315T1 AT E246315 T1 ATE246315 T1 AT E246315T1 AT 00112483 T AT00112483 T AT 00112483T AT 00112483 T AT00112483 T AT 00112483T AT E246315 T1 ATE246315 T1 AT E246315T1
Authority
AT
Austria
Prior art keywords
ejection
stage
pump
vacuum pump
vol
Prior art date
Application number
AT00112483T
Other languages
English (en)
Inventor
Armin Blecker
Wolfgang Eberl
Heinrich Lotz
Heinz Reichhart
Original Assignee
Pfeiffer Vacuum Gmbh
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Pfeiffer Vacuum Gmbh filed Critical Pfeiffer Vacuum Gmbh
Application granted granted Critical
Publication of ATE246315T1 publication Critical patent/ATE246315T1/de

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/046—Combinations of two or more different types of pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D17/00—Radial-flow pumps, e.g. centrifugal pumps; Helico-centrifugal pumps
    • F04D17/08—Centrifugal pumps
    • F04D17/16—Centrifugal pumps for displacing without appreciable compression
    • F04D17/168—Pumps specially adapted to produce a vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/044—Holweck-type pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D23/00—Other rotary non-positive-displacement pumps
    • F04D23/008—Regenerative pumps

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)
  • Structures Of Non-Positive Displacement Pumps (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
  • Electrophonic Musical Instruments (AREA)
AT00112483T 1999-07-05 2000-06-13 Vakuumpumpe ATE246315T1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19930952A DE19930952A1 (de) 1999-07-05 1999-07-05 Vakuumpumpe

Publications (1)

Publication Number Publication Date
ATE246315T1 true ATE246315T1 (de) 2003-08-15

Family

ID=7913691

Family Applications (1)

Application Number Title Priority Date Filing Date
AT00112483T ATE246315T1 (de) 1999-07-05 2000-06-13 Vakuumpumpe

Country Status (5)

Country Link
US (1) US6409477B1 (de)
EP (1) EP1067290B1 (de)
JP (1) JP4584420B2 (de)
AT (1) ATE246315T1 (de)
DE (2) DE19930952A1 (de)

Families Citing this family (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6419461B2 (en) * 1997-08-13 2002-07-16 Seiko Instruments Inc. Turbo molecular pump
DE10114585A1 (de) * 2001-03-24 2002-09-26 Pfeiffer Vacuum Gmbh Vakuumpumpe
DE10130426B4 (de) * 2001-06-23 2021-03-18 Pfeiffer Vacuum Gmbh Vakuumpumpsystem
KR20030000735A (ko) * 2001-06-26 2003-01-06 김덕겸 개선된 시일구조를 가지는 진공펌프 장치
JP2005042709A (ja) 2003-07-10 2005-02-17 Ebara Corp 真空ポンプ
GB0409139D0 (en) * 2003-09-30 2004-05-26 Boc Group Plc Vacuum pump
US7021888B2 (en) * 2003-12-16 2006-04-04 Universities Research Association, Inc. Ultra-high speed vacuum pump system with first stage turbofan and second stage turbomolecular pump
DE102008034948A1 (de) 2008-07-26 2010-01-28 Pfeiffer Vacuum Gmbh Vakuumpumpe
US8152442B2 (en) * 2008-12-24 2012-04-10 Agilent Technologies, Inc. Centripetal pumping stage and vacuum pump incorporating such pumping stage
DE102009021642B4 (de) 2009-05-16 2021-07-22 Pfeiffer Vacuum Gmbh Vakuumpumpe
DE102009021620B4 (de) 2009-05-16 2021-07-29 Pfeiffer Vacuum Gmbh Vakuumpumpe
DE102010019940B4 (de) 2010-05-08 2021-09-23 Pfeiffer Vacuum Gmbh Vakuumpumpstufe
KR101848515B1 (ko) * 2010-07-02 2018-04-12 에드워즈 가부시키가이샤 진공 펌프
DE102011112689B4 (de) 2011-09-05 2024-03-21 Pfeiffer Vacuum Gmbh Vakuumpumpe
DE102013114290A1 (de) * 2013-12-18 2015-06-18 Pfeiffer Vacuum Gmbh Vakuumpumpe
MX391398B (es) * 2015-06-12 2025-03-21 Tti Macao Commercial Offshore Ltd Ventilador axial.

Family Cites Families (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3536418A (en) * 1969-02-13 1970-10-27 Onezime P Breaux Cryogenic turbo-molecular vacuum pump
NL7010108A (de) * 1969-09-30 1971-04-01
BE757354A (fr) * 1969-10-27 1971-03-16 Sargent Welch Scientific Co Pompe turbomoleculaire a stators et rotors perfectionnes
US3969039A (en) * 1974-08-01 1976-07-13 American Optical Corporation Vacuum pump
JPS62261696A (ja) * 1986-05-08 1987-11-13 Mitsubishi Electric Corp タ−ボ分子ポンプ装置
DE3826710A1 (de) * 1987-08-07 1989-02-16 Japan Atomic Energy Res Inst Vakuumpumpe
JPH01277698A (ja) * 1988-04-30 1989-11-08 Nippon Ferrofluidics Kk 複合型真空ポンプ
EP0344345B1 (de) * 1988-06-01 1991-09-18 Leybold Aktiengesellschaft Pumpsystem für ein Lecksuchgerät
FR2656658B1 (fr) * 1989-12-28 1993-01-29 Cit Alcatel Pompe a vide turbomoleculaire mixte, a deux arbres de rotation et a refoulement a la pression atmospherique.
ES2069713T3 (es) * 1990-07-06 1995-05-16 Cit Alcatel Conjunto mecanico de bombeo para vacio secundario e instalacion para la deteccion de fuga que utiliza un conjunto de este tipo.
JPH05195957A (ja) * 1992-01-23 1993-08-06 Matsushita Electric Ind Co Ltd 真空ポンプ
US5733104A (en) * 1992-12-24 1998-03-31 Balzers-Pfeiffer Gmbh Vacuum pump system
GB9609281D0 (en) * 1996-05-03 1996-07-10 Boc Group Plc Improved vacuum pumps
DE19632375A1 (de) * 1996-08-10 1998-02-19 Pfeiffer Vacuum Gmbh Gasreibungspumpe
DE19634095A1 (de) * 1996-08-23 1998-02-26 Pfeiffer Vacuum Gmbh Eingangsstufe für eine zweiflutige Gasreibungspumpe
JP3550465B2 (ja) * 1996-08-30 2004-08-04 株式会社日立製作所 ターボ真空ポンプ及びその運転方法

Also Published As

Publication number Publication date
EP1067290B1 (de) 2003-07-30
JP4584420B2 (ja) 2010-11-24
US6409477B1 (en) 2002-06-25
EP1067290A2 (de) 2001-01-10
DE19930952A1 (de) 2001-01-11
DE50003075D1 (de) 2003-09-04
JP2001027195A (ja) 2001-01-30
EP1067290A3 (de) 2001-04-11

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Legal Events

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REN Ceased due to non-payment of the annual fee