ES2069713T3 - Conjunto mecanico de bombeo para vacio secundario e instalacion para la deteccion de fuga que utiliza un conjunto de este tipo. - Google Patents

Conjunto mecanico de bombeo para vacio secundario e instalacion para la deteccion de fuga que utiliza un conjunto de este tipo.

Info

Publication number
ES2069713T3
ES2069713T3 ES90401965T ES90401965T ES2069713T3 ES 2069713 T3 ES2069713 T3 ES 2069713T3 ES 90401965 T ES90401965 T ES 90401965T ES 90401965 T ES90401965 T ES 90401965T ES 2069713 T3 ES2069713 T3 ES 2069713T3
Authority
ES
Spain
Prior art keywords
pumping
order
level
mechanical
secondary vacuum
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
ES90401965T
Other languages
English (en)
Inventor
Gilles Baret
Denis Perrillat-Amede
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Alcatel CIT SA
Nokia Inc
Original Assignee
Alcatel CIT SA
Nokia Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=8205734&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=ES2069713(T3) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed by Alcatel CIT SA, Nokia Inc filed Critical Alcatel CIT SA
Application granted granted Critical
Publication of ES2069713T3 publication Critical patent/ES2069713T3/es
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M3/00—Investigating fluid-tightness of structures
    • G01M3/02—Investigating fluid-tightness of structures by using fluid or vacuum
    • G01M3/04—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point
    • G01M3/20—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material
    • G01M3/202—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material using mass spectrometer detection systems
    • G01M3/205—Accessories or associated equipment; Pump constructions
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/044—Holweck-type pumps
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M3/00—Investigating fluid-tightness of structures
    • G01M3/02—Investigating fluid-tightness of structures by using fluid or vacuum
    • G01M3/04—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point
    • G01M3/20—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material
    • G01M3/202—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material using mass spectrometer detection systems

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Examining Or Testing Airtightness (AREA)
  • Non-Positive Displacement Air Blowers (AREA)

Abstract

CONJUNTO MECANICO DE BOMBEO (20) PARA VACIO SEGUNDARIO QUE COMPRENDE DOS NIVELES DE BOMBEO, TENIENDO EL PRIMER NIVEL UNA ENTRADA DE ASPIRACION (9), TENIENDO EL SEGUNDO NIVEL UN ORIFICIO DE ASPIRACION (10), DESEMBOCANDO DICHA ENTRADA Y DICHO ORIFICIO EN EL EXTERIOR, TENIENDO LOS DOS NIVELES UNA SALIDA COMUN DE DESCARGA (4), CARACTERIZADO EN QUE LOS DOS NIVELES DE BOMBEO SON DEL TIPO HOLWECK DE TAMBOR, TENIENDO DICHO PRIMER NIVEL UN INDICE DE COMPRESION DEL ORDEN DE 50 PARA UN GAS TAL COMO EL HELIO, Y DEL ORDEN DE 30.000 PARA EL AIRE, SIENDO LA VELOCIDAD DE BOMBEO DE DICHO PRIMER NIVEL DEL ORDEN DE 4 L/S PARA EL AIRE Y DEL ORDEN DE 2,5 L/S PARA DICHO GAS , Y EN QUE DICHO SEGUNDO NIVEL TIENE UNA VELOCIDAD DE BOMBEO DEL ORDEN DE 3,5 L/S PARA EL AIRE Y DEL ORDEN DE 2 L/S PARA DICHO GAS, SIENDO LA VELOCIDAD NOMINAL DE ROTACION DE DICHO CONJUNTO MECANICO DE BOMBEO DEL ORDEN DE 27.000 T/MN.
ES90401965T 1990-07-06 1990-07-06 Conjunto mecanico de bombeo para vacio secundario e instalacion para la deteccion de fuga que utiliza un conjunto de este tipo. Expired - Lifetime ES2069713T3 (es)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
EP90401965A EP0464292B1 (fr) 1990-07-06 1990-07-06 Ensemble mécanique de pompage pour vide secondaire et installation de détection de fuite utilisant un tel ensemble

Publications (1)

Publication Number Publication Date
ES2069713T3 true ES2069713T3 (es) 1995-05-16

Family

ID=8205734

Family Applications (1)

Application Number Title Priority Date Filing Date
ES90401965T Expired - Lifetime ES2069713T3 (es) 1990-07-06 1990-07-06 Conjunto mecanico de bombeo para vacio secundario e instalacion para la deteccion de fuga que utiliza un conjunto de este tipo.

Country Status (5)

Country Link
US (1) US5116196A (es)
EP (1) EP0464292B1 (es)
AT (1) ATE117410T1 (es)
DE (1) DE69016198T2 (es)
ES (1) ES2069713T3 (es)

Families Citing this family (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2681688B1 (fr) * 1991-09-24 1993-11-19 Alcatel Cit Installation de detection de fuites de gaz utilisant la technique de reniflage.
DE4228149A1 (de) * 1992-08-25 1994-03-03 Leybold Ag Vakuum-Meßgerät für die integrale Dichtigkeitskontrolle mit leichten Gasen
DE4228313A1 (de) * 1992-08-26 1994-03-03 Leybold Ag Gegenstrom-Lecksucher mit Hochvakuumpumpe
US5733104A (en) * 1992-12-24 1998-03-31 Balzers-Pfeiffer Gmbh Vacuum pump system
US5526678A (en) * 1994-08-10 1996-06-18 Chicago Bridge & Iron Technical Services Company Time of flight measurement/rate of rise measurement method for remote leak detection in evacuated spaces
FR2728072B1 (fr) * 1994-12-07 1997-01-10 Cit Alcatel Detecteur de fuite
DE19632375A1 (de) * 1996-08-10 1998-02-19 Pfeiffer Vacuum Gmbh Gasreibungspumpe
FR2784184B1 (fr) 1998-10-01 2000-12-15 Cit Alcatel Detecteur de fuite compact
FR2787192B1 (fr) * 1998-12-10 2001-01-05 Cit Alcatel Vitesse variable sur le pompage primaire d'un detecteur de fuites par gaz traceur
DE19930952A1 (de) * 1999-07-05 2001-01-11 Pfeiffer Vacuum Gmbh Vakuumpumpe
JP3961273B2 (ja) 2001-12-04 2007-08-22 Ｂｏｃエドワーズ株式会社 真空ポンプ
GB0409139D0 (en) * 2003-09-30 2004-05-26 Boc Group Plc Vacuum pump
GB0322883D0 (en) * 2003-09-30 2003-10-29 Boc Group Plc Vacuum pump
WO2009142905A1 (en) * 2008-05-20 2009-11-26 Sundew Technologies, Llc Deposition method and apparatus
DE102009011082A1 (de) * 2009-02-28 2010-09-02 Oerlikon Leybold Vacuum Gmbh Multi-Inlet-Vakuumpumpe
JP5878876B2 (ja) * 2010-12-10 2016-03-08 エドワーズ株式会社 真空ポンプ
JP6287475B2 (ja) * 2014-03-28 2018-03-07 株式会社島津製作所 真空ポンプ
DE102014105582A1 (de) * 2014-04-17 2015-10-22 Pfeiffer Vacuum Gmbh Vakuumpumpe
CN106872119B (zh) * 2015-12-12 2018-10-26 中国科学院大连化学物理研究所 采集焚烧烟气中持续有机污染物装置密封性的自检方法
GB2601313A (en) * 2020-11-25 2022-06-01 Edwards Ltd Drag pumping mechanism for a turbomolecular pump

Family Cites Families (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR887499A (fr) * 1941-11-04 1943-11-15 Brown Pompe moléculaire
US2730297A (en) * 1950-04-12 1956-01-10 Hartford Nat Bank & Trust Co High-vacuum molecular pump
DE910204C (de) * 1950-04-12 1954-04-29 Philips Nv Hochvakuummolekularpumpe
DE1648648C3 (de) * 1967-04-12 1980-01-24 Arthur Pfeiffer-Hochvakuumtechnik Gmbh, 6330 Wetzlar Anordnung zur Lecksuche nach dem Massenspektrometer-Prinzip
US3616680A (en) * 1969-10-27 1971-11-02 Sargent Welch Scientific Co Leak detector
FR2475728A1 (fr) * 1980-02-11 1981-08-14 Cit Alcatel Detecteur de fuites a helium
JPS57169647A (en) * 1981-04-13 1982-10-19 Ulvac Corp He reverse diffusion type leakage detector using turbo molecular pump
DE3133781A1 (de) * 1981-08-26 1983-03-10 Leybold-Heraeus GmbH, 5000 Köln Fuer die durchfuehrung der gegenstrom-lecksuche geeignete turbomolekularpumpe
JPS5948630A (ja) * 1982-09-13 1984-03-19 Shimadzu Corp リ−クデテクタ
FR2604522B1 (fr) * 1986-09-26 1989-06-16 Cit Alcatel Installation de detection de fuite a gaz traceur et procede d'utilisation
DE3705912A1 (de) * 1987-02-24 1988-09-01 Alcatel Hochvakuumtechnik Gmbh Hochvakuumpumpe mit einem glockenfoermigen rotor
JPS6419198A (en) * 1987-07-15 1989-01-23 Hitachi Ltd Vacuum pump
DE3728154C2 (de) * 1987-08-24 1996-04-18 Balzers Pfeiffer Gmbh Mehrstufige Molekularpumpe
EP0344345B1 (de) * 1988-06-01 1991-09-18 Leybold Aktiengesellschaft Pumpsystem für ein Lecksuchgerät
DE3828588C1 (es) * 1988-08-23 1989-12-07 Alcatel Hochvakuumtechnik Gmbh, 6980 Wertheim, De

Also Published As

Publication number Publication date
EP0464292A1 (fr) 1992-01-08
DE69016198T2 (de) 1995-05-18
EP0464292B1 (fr) 1995-01-18
DE69016198D1 (de) 1995-03-02
US5116196A (en) 1992-05-26
ATE117410T1 (de) 1995-02-15

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