JPS57169647A - He reverse diffusion type leakage detector using turbo molecular pump - Google Patents

He reverse diffusion type leakage detector using turbo molecular pump

Info

Publication number
JPS57169647A
JPS57169647A JP5437081A JP5437081A JPS57169647A JP S57169647 A JPS57169647 A JP S57169647A JP 5437081 A JP5437081 A JP 5437081A JP 5437081 A JP5437081 A JP 5437081A JP S57169647 A JPS57169647 A JP S57169647A
Authority
JP
Japan
Prior art keywords
helium
pump
turbo molecular
revolutions
molecular pump
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP5437081A
Other languages
Japanese (ja)
Inventor
Tadashi Nishijima
Yasuki Masubuchi
Masato Noriyuki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ulvac Inc
Original Assignee
Ulvac Inc
Nihon Shinku Gijutsu KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ulvac Inc, Nihon Shinku Gijutsu KK filed Critical Ulvac Inc
Priority to JP5437081A priority Critical patent/JPS57169647A/en
Publication of JPS57169647A publication Critical patent/JPS57169647A/en
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M3/00—Investigating fluid-tightness of structures
    • G01M3/02—Investigating fluid-tightness of structures by using fluid or vacuum
    • G01M3/04—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point
    • G01M3/20—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material
    • G01M3/202—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material using mass spectrometer detection systems

Abstract

PURPOSE:To eliminate the contamination caused oil vapor, etc., and to eliminate disadvantages owing to thermal decomposition, oxidation, etc. by using a turbo molecular pump in place of an oil diffusion pump. CONSTITUTION:A test sample 1 is evacuated by operating an evacuating system consisting of a throttling valve 2, a turbo molecular pump 5, a reverse diffusion valve 6, and an auxiliary pump 7, and while the sample 1 is swept with gaseous helium, the gaseous helium is detected with an analyzing pipe 3, whereby a leakage test is carried out. The sensitivity for detection of the helium changes with the change in the number of revolutions of the pump 5. When the number of revolutions lowers, the sensitivity for detection of the helium increases and at the same time the background increases as well. On the other hand, with respect to the stability of the helium output, when the number of revolutions of the pump 5 lowers, the output is unstable and this makes leakage measurement difficult. Hence, it is possible to obtain the sufficient sensitivity for detection of the helium by selecting the number of revolutions of the turbo molecular pump.
JP5437081A 1981-04-13 1981-04-13 He reverse diffusion type leakage detector using turbo molecular pump Pending JPS57169647A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5437081A JPS57169647A (en) 1981-04-13 1981-04-13 He reverse diffusion type leakage detector using turbo molecular pump

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5437081A JPS57169647A (en) 1981-04-13 1981-04-13 He reverse diffusion type leakage detector using turbo molecular pump

Publications (1)

Publication Number Publication Date
JPS57169647A true JPS57169647A (en) 1982-10-19

Family

ID=12968771

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5437081A Pending JPS57169647A (en) 1981-04-13 1981-04-13 He reverse diffusion type leakage detector using turbo molecular pump

Country Status (1)

Country Link
JP (1) JPS57169647A (en)

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0194836A2 (en) * 1985-03-13 1986-09-17 Martin Marietta Corporation Small component helium leak detector
JPH0327335U (en) * 1989-07-25 1991-03-19
FR2653558A1 (en) * 1989-10-23 1991-04-26 Cit Alcatel TRACER GAS LEAK DETECTION SYSTEM.
US5116196A (en) * 1990-07-06 1992-05-26 Alcatel Cit Mechanical pump assembly for pumping a secondary vacuum, and a leak detection installation using such an assembly
FR2681689A1 (en) * 1991-09-25 1993-03-26 Cit Alcatel GAS LEAK DETECTOR.
US6354141B1 (en) * 1998-12-10 2002-03-12 Alcatel Variable speed primary pumping in a tracer gas leak detector
CN100360917C (en) * 2002-08-09 2008-01-09 爱发科股份有限公司 Method for running counter-diffusion helium detector to save electric power

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0194836A2 (en) * 1985-03-13 1986-09-17 Martin Marietta Corporation Small component helium leak detector
JPH0327335U (en) * 1989-07-25 1991-03-19
FR2653558A1 (en) * 1989-10-23 1991-04-26 Cit Alcatel TRACER GAS LEAK DETECTION SYSTEM.
US5116196A (en) * 1990-07-06 1992-05-26 Alcatel Cit Mechanical pump assembly for pumping a secondary vacuum, and a leak detection installation using such an assembly
FR2681689A1 (en) * 1991-09-25 1993-03-26 Cit Alcatel GAS LEAK DETECTOR.
US6354141B1 (en) * 1998-12-10 2002-03-12 Alcatel Variable speed primary pumping in a tracer gas leak detector
CN100360917C (en) * 2002-08-09 2008-01-09 爱发科股份有限公司 Method for running counter-diffusion helium detector to save electric power

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