DE69016198T2 - Zweite Stufe für mechanische Vakuumpumpeinheit und Lecküberwachungssystem zur Anwendung dieser Einheit. - Google Patents
Zweite Stufe für mechanische Vakuumpumpeinheit und Lecküberwachungssystem zur Anwendung dieser Einheit.Info
- Publication number
- DE69016198T2 DE69016198T2 DE69016198T DE69016198T DE69016198T2 DE 69016198 T2 DE69016198 T2 DE 69016198T2 DE 69016198 T DE69016198 T DE 69016198T DE 69016198 T DE69016198 T DE 69016198T DE 69016198 T2 DE69016198 T2 DE 69016198T2
- Authority
- DE
- Germany
- Prior art keywords
- stage
- order
- unit
- pumping
- sec
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Revoked
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M3/00—Investigating fluid-tightness of structures
- G01M3/02—Investigating fluid-tightness of structures by using fluid or vacuum
- G01M3/04—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point
- G01M3/20—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material
- G01M3/202—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material using mass spectrometer detection systems
- G01M3/205—Accessories or associated equipment; Pump constructions
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D19/00—Axial-flow pumps
- F04D19/02—Multi-stage pumps
- F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
- F04D19/044—Holweck-type pumps
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M3/00—Investigating fluid-tightness of structures
- G01M3/02—Investigating fluid-tightness of structures by using fluid or vacuum
- G01M3/04—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point
- G01M3/20—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material
- G01M3/202—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material using mass spectrometer detection systems
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Examining Or Testing Airtightness (AREA)
- Non-Positive Displacement Air Blowers (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
EP90401965A EP0464292B1 (de) | 1990-07-06 | 1990-07-06 | Zweite Stufe für mechanische Vakuumpumpeinheit und Lecküberwachungssystem zur Anwendung dieser Einheit |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69016198D1 DE69016198D1 (de) | 1995-03-02 |
DE69016198T2 true DE69016198T2 (de) | 1995-05-18 |
Family
ID=8205734
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69016198T Revoked DE69016198T2 (de) | 1990-07-06 | 1990-07-06 | Zweite Stufe für mechanische Vakuumpumpeinheit und Lecküberwachungssystem zur Anwendung dieser Einheit. |
Country Status (5)
Country | Link |
---|---|
US (1) | US5116196A (de) |
EP (1) | EP0464292B1 (de) |
AT (1) | ATE117410T1 (de) |
DE (1) | DE69016198T2 (de) |
ES (1) | ES2069713T3 (de) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE19930952A1 (de) * | 1999-07-05 | 2001-01-11 | Pfeiffer Vacuum Gmbh | Vakuumpumpe |
Families Citing this family (19)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR2681688B1 (fr) * | 1991-09-24 | 1993-11-19 | Alcatel Cit | Installation de detection de fuites de gaz utilisant la technique de reniflage. |
DE4228149A1 (de) * | 1992-08-25 | 1994-03-03 | Leybold Ag | Vakuum-Meßgerät für die integrale Dichtigkeitskontrolle mit leichten Gasen |
DE4228313A1 (de) * | 1992-08-26 | 1994-03-03 | Leybold Ag | Gegenstrom-Lecksucher mit Hochvakuumpumpe |
US5733104A (en) * | 1992-12-24 | 1998-03-31 | Balzers-Pfeiffer Gmbh | Vacuum pump system |
US5526678A (en) * | 1994-08-10 | 1996-06-18 | Chicago Bridge & Iron Technical Services Company | Time of flight measurement/rate of rise measurement method for remote leak detection in evacuated spaces |
FR2728072B1 (fr) * | 1994-12-07 | 1997-01-10 | Cit Alcatel | Detecteur de fuite |
DE19632375A1 (de) * | 1996-08-10 | 1998-02-19 | Pfeiffer Vacuum Gmbh | Gasreibungspumpe |
FR2784184B1 (fr) | 1998-10-01 | 2000-12-15 | Cit Alcatel | Detecteur de fuite compact |
FR2787192B1 (fr) * | 1998-12-10 | 2001-01-05 | Cit Alcatel | Vitesse variable sur le pompage primaire d'un detecteur de fuites par gaz traceur |
JP3961273B2 (ja) | 2001-12-04 | 2007-08-22 | Bocエドワーズ株式会社 | 真空ポンプ |
GB0322883D0 (en) * | 2003-09-30 | 2003-10-29 | Boc Group Plc | Vacuum pump |
GB0409139D0 (en) * | 2003-09-30 | 2004-05-26 | Boc Group Plc | Vacuum pump |
US8673394B2 (en) * | 2008-05-20 | 2014-03-18 | Sundew Technologies Llc | Deposition method and apparatus |
DE102009011082A1 (de) * | 2009-02-28 | 2010-09-02 | Oerlikon Leybold Vacuum Gmbh | Multi-Inlet-Vakuumpumpe |
EP2650544B1 (de) * | 2010-12-10 | 2020-06-03 | Edwards Japan Limited | Vakuumpumpe |
JP6287475B2 (ja) * | 2014-03-28 | 2018-03-07 | 株式会社島津製作所 | 真空ポンプ |
DE102014105582A1 (de) * | 2014-04-17 | 2015-10-22 | Pfeiffer Vacuum Gmbh | Vakuumpumpe |
CN106872119B (zh) * | 2015-12-12 | 2018-10-26 | 中国科学院大连化学物理研究所 | 采集焚烧烟气中持续有机污染物装置密封性的自检方法 |
GB2601313A (en) * | 2020-11-25 | 2022-06-01 | Edwards Ltd | Drag pumping mechanism for a turbomolecular pump |
Family Cites Families (15)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR887499A (fr) * | 1941-11-04 | 1943-11-15 | Brown | Pompe moléculaire |
DE910204C (de) * | 1950-04-12 | 1954-04-29 | Philips Nv | Hochvakuummolekularpumpe |
US2730297A (en) * | 1950-04-12 | 1956-01-10 | Hartford Nat Bank & Trust Co | High-vacuum molecular pump |
DE1648648C3 (de) * | 1967-04-12 | 1980-01-24 | Arthur Pfeiffer-Hochvakuumtechnik Gmbh, 6330 Wetzlar | Anordnung zur Lecksuche nach dem Massenspektrometer-Prinzip |
US3616680A (en) * | 1969-10-27 | 1971-11-02 | Sargent Welch Scientific Co | Leak detector |
FR2475728A1 (fr) * | 1980-02-11 | 1981-08-14 | Cit Alcatel | Detecteur de fuites a helium |
JPS57169647A (en) * | 1981-04-13 | 1982-10-19 | Ulvac Corp | He reverse diffusion type leakage detector using turbo molecular pump |
DE3133781A1 (de) * | 1981-08-26 | 1983-03-10 | Leybold-Heraeus GmbH, 5000 Köln | Fuer die durchfuehrung der gegenstrom-lecksuche geeignete turbomolekularpumpe |
JPS5948630A (ja) * | 1982-09-13 | 1984-03-19 | Shimadzu Corp | リ−クデテクタ |
FR2604522B1 (fr) * | 1986-09-26 | 1989-06-16 | Cit Alcatel | Installation de detection de fuite a gaz traceur et procede d'utilisation |
DE3705912A1 (de) * | 1987-02-24 | 1988-09-01 | Alcatel Hochvakuumtechnik Gmbh | Hochvakuumpumpe mit einem glockenfoermigen rotor |
JPS6419198A (en) * | 1987-07-15 | 1989-01-23 | Hitachi Ltd | Vacuum pump |
DE3728154C2 (de) * | 1987-08-24 | 1996-04-18 | Balzers Pfeiffer Gmbh | Mehrstufige Molekularpumpe |
DE3865012D1 (de) * | 1988-06-01 | 1991-10-24 | Leybold Ag | Pumpsystem fuer ein lecksuchgeraet. |
DE3828588C1 (de) * | 1988-08-23 | 1989-12-07 | Alcatel Hochvakuumtechnik Gmbh, 6980 Wertheim, De |
-
1990
- 1990-07-06 EP EP90401965A patent/EP0464292B1/de not_active Revoked
- 1990-07-06 ES ES90401965T patent/ES2069713T3/es not_active Expired - Lifetime
- 1990-07-06 AT AT90401965T patent/ATE117410T1/de not_active IP Right Cessation
- 1990-07-06 DE DE69016198T patent/DE69016198T2/de not_active Revoked
- 1990-07-10 US US07/550,403 patent/US5116196A/en not_active Expired - Fee Related
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE19930952A1 (de) * | 1999-07-05 | 2001-01-11 | Pfeiffer Vacuum Gmbh | Vakuumpumpe |
Also Published As
Publication number | Publication date |
---|---|
ES2069713T3 (es) | 1995-05-16 |
ATE117410T1 (de) | 1995-02-15 |
EP0464292A1 (de) | 1992-01-08 |
US5116196A (en) | 1992-05-26 |
EP0464292B1 (de) | 1995-01-18 |
DE69016198D1 (de) | 1995-03-02 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
ATE117410T1 (de) | Zweite stufe für mechanische vakuumpumpeinheit und lecküberwachungssystem zur anwendung dieser einheit. | |
SE9703616L (sv) | Gasmatningsanordning för andnings- och narkosapparater | |
ITMI910867A0 (it) | Sistema ausiliario di aria impiegante aria di ingresso da compressore di turbomotore dopo derivazione e condizionamento nel sistema ausiliario | |
PL291433A1 (en) | Apparatus for stabilizing characteristic curve field of radial compressors | |
EP0913571A3 (de) | Einlassvorrichtung für Brennkraftmaschine | |
CA2093692A1 (en) | Clean air fan filter module | |
MY114606A (en) | Condenser fan with condensate slinger | |
SE9004050D0 (sv) | Suspensionspump med inbyggd vakuumpump | |
IT1298428B1 (it) | Procedimento ed apparecchiatura per la sterilizzazione a vapore in particolare per usi odontoiatrici | |
DE69100968T2 (de) | Turbomaschinenstufe mit vermindertem Strömungsverlust. | |
FR2666410B1 (fr) | Detecteur de fuite haut flux a trois filtres moleculaires. | |
DE58901145D1 (de) | Mehrstufiges vakuumpumpenaggregat. | |
ATE241762T1 (de) | Vakuumpumpen | |
ATE122125T1 (de) | Zusatzluftzufuhrvorrichtung für eine motoreinheit. | |
DE59908691D1 (de) | Gasballasteinrichtung für eine mehrstufige Verdrängerpumpe | |
EP0878227A3 (de) | Vorrichtung sowie Element zur Flüssigkeitsabscheidung in Gasströmen | |
SE9402392L (sv) | Vakuumenhet och vakuumtoalettsystem innefattande en sådan enhet | |
DE3163065D1 (en) | Rotary machine, particularly radial-flow compressor | |
DE9116851U1 (de) | Vorrichtung zum Entfeuchten eines Trocknerraumes | |
ATE59886T1 (de) | Lueftungsvorrichtung. | |
JPH07189912A (ja) | 乾燥圧縮空気供給装置 | |
DE3868362D1 (de) | Turbokompressor mit luftgekuehltem lager. | |
IT1277255B1 (it) | Compressore in modalita' di costruzione ad ipotrocoide | |
JP2932588B2 (ja) | 排気装置 | |
DE3868253D1 (de) | Geblaese. |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
8363 | Opposition against the patent | ||
8331 | Complete revocation |