ATE241762T1 - Vakuumpumpen - Google Patents

Vakuumpumpen

Info

Publication number
ATE241762T1
ATE241762T1 AT00307975T AT00307975T ATE241762T1 AT E241762 T1 ATE241762 T1 AT E241762T1 AT 00307975 T AT00307975 T AT 00307975T AT 00307975 T AT00307975 T AT 00307975T AT E241762 T1 ATE241762 T1 AT E241762T1
Authority
AT
Austria
Prior art keywords
pump
shaft
gas
stages
evacuating
Prior art date
Application number
AT00307975T
Other languages
English (en)
Inventor
David John Goodwin
Paul Milner
Original Assignee
Boc Group Plc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Boc Group Plc filed Critical Boc Group Plc
Application granted granted Critical
Publication of ATE241762T1 publication Critical patent/ATE241762T1/de

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/60—Mounting; Assembling; Disassembling
    • F04D29/601—Mounting; Assembling; Disassembling specially adapted for elastic fluid pumps
    • F04D29/602—Mounting in cavities
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
  • Reciprocating Pumps (AREA)
  • Rotary Pumps (AREA)
  • Jet Pumps And Other Pumps (AREA)
AT00307975T 1999-09-16 2000-09-14 Vakuumpumpen ATE241762T1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GBGB9921983.4A GB9921983D0 (en) 1999-09-16 1999-09-16 Improvements in vacuum pumps

Publications (1)

Publication Number Publication Date
ATE241762T1 true ATE241762T1 (de) 2003-06-15

Family

ID=10861086

Family Applications (1)

Application Number Title Priority Date Filing Date
AT00307975T ATE241762T1 (de) 1999-09-16 2000-09-14 Vakuumpumpen

Country Status (6)

Country Link
US (1) US6371735B1 (de)
EP (1) EP1085214B1 (de)
JP (1) JP5027352B2 (de)
AT (1) ATE241762T1 (de)
DE (1) DE60002966T2 (de)
GB (1) GB9921983D0 (de)

Families Citing this family (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB0124731D0 (en) 2001-10-15 2001-12-05 Boc Group Plc Vacuum pumps
GB0411426D0 (en) 2004-05-21 2004-06-23 Boc Group Plc Pumping arrangement
GB0414316D0 (en) * 2004-06-25 2004-07-28 Boc Group Plc Vacuum pump
DE102006020710A1 (de) * 2006-05-04 2007-11-08 Pfeiffer Vacuum Gmbh Vakuumpumpe mit Gehäuse
US20120027583A1 (en) * 2006-05-04 2012-02-02 Bernd Hofmann Vacuum pump
DE102007010068A1 (de) 2007-02-28 2008-09-04 Thermo Fisher Scientific (Bremen) Gmbh Vakuumpumpe oder Vakuumapparatur mit Vakuumpumpe
DE102007027354A1 (de) * 2007-06-11 2008-12-18 Oerlikon Leybold Vacuum Gmbh Turbomolekularpumpe
DE102007044945A1 (de) * 2007-09-20 2009-04-09 Pfeiffer Vacuum Gmbh Vakuumpumpe
DE102008024764A1 (de) * 2008-05-23 2009-11-26 Oerlikon Leybold Vacuum Gmbh Mehrstufige Vakuumpumpe
DE202009003880U1 (de) * 2009-03-19 2010-08-05 Oerlikon Leybold Vacuum Gmbh Multi-Inlet-Vakuumpumpe
DE202013003855U1 (de) * 2013-04-25 2014-07-28 Oerlikon Leybold Vacuum Gmbh Untersuchungseinrichtung sowie Multi-Inlet-Vakuumpumpe
DE102013114290A1 (de) 2013-12-18 2015-06-18 Pfeiffer Vacuum Gmbh Vakuumpumpe
GB2584603B (en) 2019-04-11 2021-10-13 Edwards Ltd Vacuum chamber module

Family Cites Families (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3969039A (en) * 1974-08-01 1976-07-13 American Optical Corporation Vacuum pump
DE3133781A1 (de) * 1981-08-26 1983-03-10 Leybold-Heraeus GmbH, 5000 Köln Fuer die durchfuehrung der gegenstrom-lecksuche geeignete turbomolekularpumpe
JPS62193197A (ja) * 1986-02-19 1987-08-25 株式会社東芝 スル−ホ−ルプリント配線板の製造方法
JPS63227991A (ja) * 1987-03-13 1988-09-22 Mitsubishi Electric Corp タ−ボ分子ポンプ
DE3891263T1 (de) * 1988-02-26 1990-03-15 Nikolaj Michailovic Novikov Turbomolekular-vakuumpumpe
JPH0214495A (ja) * 1988-06-30 1990-01-18 Fujitsu Ltd リード・オンリ・メモリ
US5238362A (en) * 1990-03-09 1993-08-24 Varian Associates, Inc. Turbomolecular pump
EP0603694A1 (de) * 1992-12-24 1994-06-29 BALZERS-PFEIFFER GmbH Vakuumpumpsystem
US5733104A (en) * 1992-12-24 1998-03-31 Balzers-Pfeiffer Gmbh Vacuum pump system
GB9318801D0 (en) * 1993-09-10 1993-10-27 Boc Group Plc Improved vacuum pumps
IT1281025B1 (it) * 1995-11-10 1998-02-11 Varian Spa Pompa turbomolecolare.
IT1288737B1 (it) * 1996-10-08 1998-09-24 Varian Spa Dispositivo di pompaggio da vuoto.
GB9719634D0 (en) * 1997-09-15 1997-11-19 Boc Group Plc Improvements in vacuum pumps
GB9725146D0 (en) * 1997-11-27 1998-01-28 Boc Group Plc Improvements in vacuum pumps
DE19821634A1 (de) * 1998-05-14 1999-11-18 Leybold Vakuum Gmbh Reibungsvakuumpumpe mit Stator und Rotor
DE19831123A1 (de) * 1998-07-11 2000-01-13 Pfeiffer Vacuum Gmbh Gasballasteinrichtung für mehrstufige Verdrängerpumpen
US6179573B1 (en) * 1999-03-24 2001-01-30 Varian, Inc. Vacuum pump with inverted motor

Also Published As

Publication number Publication date
GB9921983D0 (en) 1999-11-17
US6371735B1 (en) 2002-04-16
DE60002966T2 (de) 2004-02-26
JP5027352B2 (ja) 2012-09-19
EP1085214B1 (de) 2003-05-28
EP1085214A2 (de) 2001-03-21
DE60002966D1 (de) 2003-07-03
JP2001107889A (ja) 2001-04-17
EP1085214A3 (de) 2002-04-03

Similar Documents

Publication Publication Date Title
ATE241762T1 (de) Vakuumpumpen
EP1759118B1 (de) Vakuumpumpe
CA2747136A1 (en) Vacuum pump
DE60202340D1 (de) Vakuumpumpen
WO2000009886A3 (en) Fluid pump
NO20001513L (no) Forbedringer angÕende ladede partikkelstrÕler
ATE369495T1 (de) Vakuumpumpen
ATE369496T1 (de) Vakuumpumpe
JP2001027195A (ja) 真空ポンプ
MY112078A (en) Impeller annular seal.
DE69100968T2 (de) Turbomaschinenstufe mit vermindertem Strömungsverlust.
EP1081387A3 (de) Vakuumpumpe
RU1770612C (ru) Турбомолекул рный вакуумный насос
JP2990841B2 (ja) クライオポンプの構造
SU1550222A1 (ru) Турбомолекул рный вакуумный насос

Legal Events

Date Code Title Description
RER Ceased as to paragraph 5 lit. 3 law introducing patent treaties