DE59912629D1 - Gerät mit evakuierbarer Kammer - Google Patents
Gerät mit evakuierbarer KammerInfo
- Publication number
- DE59912629D1 DE59912629D1 DE59912629T DE59912629T DE59912629D1 DE 59912629 D1 DE59912629 D1 DE 59912629D1 DE 59912629 T DE59912629 T DE 59912629T DE 59912629 T DE59912629 T DE 59912629T DE 59912629 D1 DE59912629 D1 DE 59912629D1
- Authority
- DE
- Germany
- Prior art keywords
- evacuable chamber
- evacuable
- chamber
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D19/00—Axial-flow pumps
- F04D19/02—Multi-stage pumps
- F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D17/00—Radial-flow pumps, e.g. centrifugal pumps; Helico-centrifugal pumps
- F04D17/08—Centrifugal pumps
- F04D17/16—Centrifugal pumps for displacing without appreciable compression
- F04D17/168—Pumps specially adapted to produce a vacuum
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D29/00—Details, component parts, or accessories
- F04D29/60—Mounting; Assembling; Disassembling
- F04D29/601—Mounting; Assembling; Disassembling specially adapted for elastic fluid pumps
- F04D29/602—Mounting in cavities
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Non-Positive Displacement Air Blowers (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE59912629T DE59912629D1 (de) | 1998-05-26 | 1999-03-27 | Gerät mit evakuierbarer Kammer |
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE19823270 | 1998-05-26 | ||
DE19901340.3A DE19901340B4 (de) | 1998-05-26 | 1999-01-15 | Reibungsvakuumpumpe mit Chassis, Rotor und Gehäuse sowie Einrichtung, ausgerüstet mit einer Reibungsvakuumpumpe dieser Art |
DE59912629T DE59912629D1 (de) | 1998-05-26 | 1999-03-27 | Gerät mit evakuierbarer Kammer |
Publications (1)
Publication Number | Publication Date |
---|---|
DE59912629D1 true DE59912629D1 (de) | 2006-02-16 |
Family
ID=26046389
Family Applications (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE59912629T Expired - Lifetime DE59912629D1 (de) | 1998-05-26 | 1999-03-27 | Gerät mit evakuierbarer Kammer |
DE59912626T Expired - Lifetime DE59912626D1 (de) | 1998-05-26 | 1999-03-27 | Reibungsvakuumpumpe mit chassis, rotor und gehäuse sowie einrichtung, ausgerüstet mit einer reibungsvakuumpumpe dieser art |
Family Applications After (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE59912626T Expired - Lifetime DE59912626D1 (de) | 1998-05-26 | 1999-03-27 | Reibungsvakuumpumpe mit chassis, rotor und gehäuse sowie einrichtung, ausgerüstet mit einer reibungsvakuumpumpe dieser art |
Country Status (5)
Country | Link |
---|---|
US (1) | US6457954B1 (de) |
EP (1) | EP1090231B2 (de) |
JP (1) | JP4520636B2 (de) |
DE (2) | DE59912629D1 (de) |
WO (1) | WO1999061799A1 (de) |
Families Citing this family (22)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE10308420A1 (de) * | 2003-02-27 | 2004-09-09 | Leybold Vakuum Gmbh | Testgaslecksuchgerät |
ITTO20030421A1 (it) * | 2003-06-05 | 2004-12-06 | Varian Spa | Pompa da vuoto compatta |
GB0409139D0 (en) * | 2003-09-30 | 2004-05-26 | Boc Group Plc | Vacuum pump |
GB0322883D0 (en) * | 2003-09-30 | 2003-10-29 | Boc Group Plc | Vacuum pump |
GB0414316D0 (en) * | 2004-06-25 | 2004-07-28 | Boc Group Plc | Vacuum pump |
DE102006020710A1 (de) * | 2006-05-04 | 2007-11-08 | Pfeiffer Vacuum Gmbh | Vakuumpumpe mit Gehäuse |
US20070263477A1 (en) * | 2006-05-11 | 2007-11-15 | The Texas A&M University System | Method for mixing fluids in microfluidic channels |
DE102007010068A1 (de) | 2007-02-28 | 2008-09-04 | Thermo Fisher Scientific (Bremen) Gmbh | Vakuumpumpe oder Vakuumapparatur mit Vakuumpumpe |
JP5115622B2 (ja) * | 2008-03-31 | 2013-01-09 | 株式会社島津製作所 | ターボ分子ポンプ |
GB2462804B (en) * | 2008-08-04 | 2013-01-23 | Edwards Ltd | Vacuum pump |
DE202008011489U1 (de) | 2008-08-28 | 2010-01-07 | Oerlikon Leybold Vacuum Gmbh | Stator-Rotor-Anordnung für eine Vakuumpumpe sowie Vakuumpumpe |
DE102009013244A1 (de) | 2009-03-14 | 2010-09-16 | Pfeiffer Vacuum Gmbh | Anordnung mit Vakuumpumpe |
GB2473839B (en) * | 2009-09-24 | 2016-06-01 | Edwards Ltd | Mass spectrometer |
FR2984972A1 (fr) * | 2011-12-26 | 2013-06-28 | Adixen Vacuum Products | Adaptateur pour pompes a vide et dispositif de pompage associe |
DE202012000611U1 (de) * | 2012-01-21 | 2013-04-23 | Oerlikon Leybold Vacuum Gmbh | Turbomolekularpumpe |
JP6208141B2 (ja) * | 2012-09-26 | 2017-10-04 | エドワーズ株式会社 | ロータ、及び、このロータを備えた真空ポンプ |
DE202013003855U1 (de) * | 2013-04-25 | 2014-07-28 | Oerlikon Leybold Vacuum Gmbh | Untersuchungseinrichtung sowie Multi-Inlet-Vakuumpumpe |
GB201314841D0 (en) | 2013-08-20 | 2013-10-02 | Thermo Fisher Scient Bremen | Multiple port vacuum pump system |
EP3460249B1 (de) * | 2015-07-01 | 2021-03-24 | Pfeiffer Vacuum GmbH | Splitflow-vakuumpumpe |
JP7196763B2 (ja) * | 2018-10-25 | 2022-12-27 | 株式会社島津製作所 | ターボ分子ポンプおよび質量分析装置 |
EP3564538B1 (de) * | 2019-02-20 | 2021-04-07 | Pfeiffer Vacuum Gmbh | Vakuumsystem und verfahren zur herstellung eines solchen |
GB2592043A (en) * | 2020-02-13 | 2021-08-18 | Edwards Ltd | Axial flow vacuum pump |
Family Cites Families (21)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE530462C (de) * | 1927-05-06 | 1931-07-29 | Karl Radlik | Wasserversorgungsanlage mit Zusatzpumpwerk |
DE695872C (de) * | 1928-02-14 | 1940-09-04 | Werner Germershausen Dr | Gluehkathodenroehre mit mehreren Anoden und in deren Naehe angeordneten, miteinander verbundenen leitfaehigen Schirmen |
US1942139A (en) | 1930-12-26 | 1934-01-02 | Central Scientific Co | Molecular vacuum pump |
US1975568A (en) * | 1932-03-18 | 1934-10-02 | Central Scientific Co | Molecular vacuum pump |
DE2229725B2 (de) | 1972-06-19 | 1975-05-07 | Leybold-Heraeus Gmbh & Co Kg, 5000 Koeln | Turbomolekularpumpe |
US4324532A (en) † | 1980-01-24 | 1982-04-13 | Trw Inc. | Cartridge pump |
DE3402549A1 (de) | 1984-01-26 | 1985-08-01 | Leybold-Heraeus GmbH, 5000 Köln | Molekularvakuumpumpe |
CH674785A5 (en) | 1988-03-07 | 1990-07-13 | Dino Systems Limited | Pumping unit for atomic or molecular beams - uses stacked hexagonal blocks with transverse walls between and molecular pumps set in transverse holes in block walls |
EP0408791B1 (de) * | 1989-07-20 | 1994-03-16 | Leybold Aktiengesellschaft | Reibungspumpe mit glockenförmigem Rotor |
JPH0466395U (de) * | 1990-10-22 | 1992-06-11 | ||
DE4216237A1 (de) * | 1992-05-16 | 1993-11-18 | Leybold Ag | Gasreibungsvakuumpumpe |
WO1994000694A1 (de) * | 1992-06-19 | 1994-01-06 | Leybold Aktiengesellschaft | Gasreibungsvakuumpumpe |
DE4331589C2 (de) | 1992-12-24 | 2003-06-26 | Pfeiffer Vacuum Gmbh | Vakuumpumpsystem |
EP0603694A1 (de) | 1992-12-24 | 1994-06-29 | BALZERS-PFEIFFER GmbH | Vakuumpumpsystem |
DE4314419A1 (de) * | 1993-05-03 | 1994-11-10 | Leybold Ag | Reibungsvakuumpumpe mit Lagerabstützung |
DE4314418A1 (de) * | 1993-05-03 | 1994-11-10 | Leybold Ag | Reibungsvakuumpumpe mit unterschiedlich gestalteten Pumpenabschnitten |
JPH0914184A (ja) * | 1995-06-28 | 1997-01-14 | Daikin Ind Ltd | ターボ分子ポンプ |
FR2736103B1 (fr) * | 1995-06-30 | 1997-08-08 | Cit Alcatel | Pompe turbomoleculaire |
US6019581A (en) * | 1995-08-08 | 2000-02-01 | Leybold Aktiengesellschaft | Friction vacuum pump with cooling arrangement |
DE29516599U1 (de) * | 1995-10-20 | 1995-12-07 | Leybold Ag | Reibungsvakuumpumpe mit Zwischeneinlaß |
JP3469055B2 (ja) * | 1997-08-20 | 2003-11-25 | 三菱重工業株式会社 | ターボ分子ポンプ |
-
1999
- 1999-03-27 EP EP99917896.5A patent/EP1090231B2/de not_active Expired - Lifetime
- 1999-03-27 JP JP2000551160A patent/JP4520636B2/ja not_active Expired - Lifetime
- 1999-03-27 DE DE59912629T patent/DE59912629D1/de not_active Expired - Lifetime
- 1999-03-27 WO PCT/EP1999/002122 patent/WO1999061799A1/de active IP Right Grant
- 1999-03-27 DE DE59912626T patent/DE59912626D1/de not_active Expired - Lifetime
- 1999-03-27 US US09/700,483 patent/US6457954B1/en not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
US6457954B1 (en) | 2002-10-01 |
JP4520636B2 (ja) | 2010-08-11 |
WO1999061799A1 (de) | 1999-12-02 |
EP1090231B2 (de) | 2015-07-08 |
JP2002516959A (ja) | 2002-06-11 |
EP1090231B1 (de) | 2005-10-05 |
DE59912626D1 (de) | 2006-02-16 |
EP1090231A1 (de) | 2001-04-11 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8363 | Opposition against the patent |