CH674785A5 - Pumping unit for atomic or molecular beams - uses stacked hexagonal blocks with transverse walls between and molecular pumps set in transverse holes in block walls - Google Patents

Pumping unit for atomic or molecular beams - uses stacked hexagonal blocks with transverse walls between and molecular pumps set in transverse holes in block walls Download PDF

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Publication number
CH674785A5
CH674785A5 CH83888A CH83888A CH674785A5 CH 674785 A5 CH674785 A5 CH 674785A5 CH 83888 A CH83888 A CH 83888A CH 83888 A CH83888 A CH 83888A CH 674785 A5 CH674785 A5 CH 674785A5
Authority
CH
Switzerland
Prior art keywords
molecular
walls
transverse
atomic
pumping unit
Prior art date
Application number
CH83888A
Other languages
French (fr)
Inventor
Louis Dick
Original Assignee
Dino Systems Limited
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Dino Systems Limited filed Critical Dino Systems Limited
Priority to CH83888A priority Critical patent/CH674785A5/en
Publication of CH674785A5 publication Critical patent/CH674785A5/en

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Classifications

    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H3/00—Production or acceleration of neutral particle beams, e.g. molecular or atomic beams
    • H05H3/02—Molecular or atomic beam generation
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/60—Mounting; Assembling; Disassembling
    • F04D29/601—Mounting; Assembling; Disassembling specially adapted for elastic fluid pumps

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Particle Accelerators (AREA)

Abstract

The unit has an enclosure formed from a stack of hexagonal blocks (5) separated by transverse walls (6) pierced by a central hole (7). Turbo-molecular pumps (10) are lodged in lateral holes in each face of the blocks, forming differential pressure regions between transverse walls. The pumps draw from the external part of the beam while conserving its internal density. The pumps are fully integrated into the enclosure with their pumping face close to the beam axis, and have no intermediate conduit. ADVANTAGE - Improved efficiency and beam quality in molecular pump due to optimum lateral pressure gradient.

Description

       

  
 



  La présente invention a pour objet une installation de pompage pour faisceau atomique ou moléculaire comprenant une enceinte à vide traversée par ledit faisceau, équipée de moyens de pompage agissant transversalement par rapport à l'axe du faisceau de façon à pomper la partie extérieure de celui-ci. 



  La formation de faisceaux (jets) atomiques, moléculaires ou de groupes ou d'agrégats de molécules (clusters), du type sonique ou supersonique, s'effectue dans une enceinte à vide équipée d'un système de pompage puissant, pour que le faisceau parvienne, sur une distance minimum comptée à partir de son origine (buse de projection), dans une région de vide très poussé. 



  Dans la pratique, on utilise à cet effet un système de pompage dit "différentiel" obtenu en divisant l'enceinte traversée par le faisceau en plusieurs compartiments se succédant dans l'axe du faisceau et qui sont séparés les uns des autres par des parois présentant chacune une ouverture centrale (skimmer ou éplucheur) qui permet le passage du faisceau d'un compartiment au suivant. Cet agencement évite la diffusion du gaz injecté dans toute l'enceinte à vide tout en préservant une haute densité du faisceau dans la partie centrale de celui-ci. 



  La fig.1 du dessin illustre le principe d'une telle disposition, connue en soi: la buse de projection du faisceau, à la pression PO, est désignée par 1, le faisceau par 2, les parois munies d'une ouverture centrale par 3, leur ouverture par 4. On voit que dans les compartiments représentés en 



  
 



  The subject of the present invention is a pumping installation for an atomic or molecular beam comprising a vacuum enclosure traversed by said beam, equipped with pumping means acting transversely with respect to the axis of the beam so as to pump the external part of it. this.



  The formation of atomic, molecular beams or groups or aggregates of molecules (clusters), of the sonic or supersonic type, takes place in a vacuum chamber equipped with a powerful pumping system, so that the beam reaches, over a minimum distance counted from its origin (projection nozzle), in a region of very high vacuum.



  In practice, a so-called "differential" pumping system is obtained for this purpose, obtained by dividing the enclosure through which the beam passes into several successive compartments in the axis of the beam and which are separated from each other by walls having each a central opening (skimmer or peeler) which allows the passage of the beam from one compartment to the next. This arrangement avoids the diffusion of the gas injected throughout the vacuum enclosure while preserving a high density of the beam in the central part thereof.



  Fig.1 of the drawing illustrates the principle of such an arrangement, known per se: the beam projection nozzle, at pressure PO, is designated by 1, the beam by 2, the walls provided with a central opening by 3, their opening by 4. We see that in the compartments shown in
CH83888A 1988-03-07 1988-03-07 Pumping unit for atomic or molecular beams - uses stacked hexagonal blocks with transverse walls between and molecular pumps set in transverse holes in block walls CH674785A5 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CH83888A CH674785A5 (en) 1988-03-07 1988-03-07 Pumping unit for atomic or molecular beams - uses stacked hexagonal blocks with transverse walls between and molecular pumps set in transverse holes in block walls

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CH83888A CH674785A5 (en) 1988-03-07 1988-03-07 Pumping unit for atomic or molecular beams - uses stacked hexagonal blocks with transverse walls between and molecular pumps set in transverse holes in block walls

Publications (1)

Publication Number Publication Date
CH674785A5 true CH674785A5 (en) 1990-07-13

Family

ID=4196378

Family Applications (1)

Application Number Title Priority Date Filing Date
CH83888A CH674785A5 (en) 1988-03-07 1988-03-07 Pumping unit for atomic or molecular beams - uses stacked hexagonal blocks with transverse walls between and molecular pumps set in transverse holes in block walls

Country Status (1)

Country Link
CH (1) CH674785A5 (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0751297A1 (en) * 1995-06-30 1997-01-02 Alcatel Cit Turbo molecular pump
WO1999061799A1 (en) * 1998-05-26 1999-12-02 Leybold Vakuum Gmbh Frictional vacuum pump with chassis, rotor, housing and device fitted with such a frictional vacuum pump
EP1422423A1 (en) * 1998-05-26 2004-05-26 Leybold Vakuum GmbH Apparatus with evacuatable chamber

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0751297A1 (en) * 1995-06-30 1997-01-02 Alcatel Cit Turbo molecular pump
FR2736103A1 (en) * 1995-06-30 1997-01-03 Cit Alcatel TURBOMOLECULAR PUMP
WO1999061799A1 (en) * 1998-05-26 1999-12-02 Leybold Vakuum Gmbh Frictional vacuum pump with chassis, rotor, housing and device fitted with such a frictional vacuum pump
US6457954B1 (en) 1998-05-26 2002-10-01 Leybold Vakuum Gmbh Frictional vacuum pump with chassis, rotor, housing and device fitted with such a frictional vacuum pump
EP1422423A1 (en) * 1998-05-26 2004-05-26 Leybold Vakuum GmbH Apparatus with evacuatable chamber

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