EP0751297A1 - Turbo molecular pump - Google Patents

Turbo molecular pump Download PDF

Info

Publication number
EP0751297A1
EP0751297A1 EP96401388A EP96401388A EP0751297A1 EP 0751297 A1 EP0751297 A1 EP 0751297A1 EP 96401388 A EP96401388 A EP 96401388A EP 96401388 A EP96401388 A EP 96401388A EP 0751297 A1 EP0751297 A1 EP 0751297A1
Authority
EP
European Patent Office
Prior art keywords
stator
rotor
external
fins
flange
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP96401388A
Other languages
German (de)
French (fr)
Other versions
EP0751297B1 (en
Inventor
Jean-Claude Broisin
Olivier Dauvillier
Denis Perrillat-Amede
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Alcatel Lucent SAS
Original Assignee
Alcatel CIT SA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Alcatel CIT SA filed Critical Alcatel CIT SA
Publication of EP0751297A1 publication Critical patent/EP0751297A1/en
Application granted granted Critical
Publication of EP0751297B1 publication Critical patent/EP0751297B1/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Images

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps

Definitions

  • the present invention relates to a turbomolecular pump.
  • the invention relates to a turbomolecular pump comprising a rotor and a stator, of the type comprising at least stages with alternating rotor and stator fins, and in which the rotor is in the shape of a bell and the stator comprising at least one external part. carrying the stator fins and an internal part penetrating into the bell-shaped rotor.
  • this assembly is placed in an external casing delimiting at one end a suction orifice and comprising a fixing flange for its connection to an enclosure to be emptied and the other end of which is fixed to said internal part of the stator against a flange peripheral of this internal part.
  • This casing moreover, ensures the maintenance of the external stator part carrying the fins, consisting of an alternating stack of finned discs and spacers.
  • this casing is not integral with this assembly, but on the contrary belongs to the chamber or enclosure to be emptied.
  • the entire pump without housing is threaded into this "housing" linked to the vacuum chamber, this housing playing all the functions of a housing linked to the pump.
  • the advantage is that the seal on the suction side is avoided, a seal which is necessary in the case where the pump has its own casing because it is necessary to seal between the pump flange, located at the end of the casing, suction side, and the mounting flange of this pump on the chamber to be emptied.
  • this seal if it is made of elastomer, has the drawback of degassing strongly and therefore of increasing the pressure of the residual gases and, if it is a metal seal, it has the drawback that the crushing force necessary to ensure the seal is important and therefore requires flanges of large dimensions.
  • the present invention therefore aims to provide a turbomolecular pump of the type defined above, insertable in a housing belonging to a chamber to be emptied, but on which one can also, of course, come and thread and fix an independent housing would- what to come to connect it to an enclosure to be emptied having no "integrated casing" but only, and conventionally, a standard connection flange.
  • the object of the invention is to propose, in this context, a suction diameter of the casing larger than what is currently known, with a first stage of the rotor fins having consequently a larger diameter also. Another object is to simplify the casing and the assembly.
  • the subject of the invention is therefore a turbomolecular pump comprising a rotor and a stator, of the type comprising at least stages with alternating rotor and stator fins, and in which the rotor is in the shape of a bell and the stator comprising at least one external part.
  • Figure 1 shows in axial section a turbumolecular pump according to the invention.
  • FIG. 1 shows the pump of the invention with its own, independent housing.
  • Figure 3 shows the pump of the invention introduced into a housing belonging to a pumping chamber.
  • a turbumolecular pump comprising a rotor 1 and a stator 2.
  • the rotor 1 comprises a plurality of finned stages 1A to 1G, it is bell-shaped and it carries a central shaft 3.
  • the stator 2 comprises an external part 2 'and an internal part 2 ".
  • the external part 2 ′ also comprises a plurality of finned stages 2A to 2F, which alternate with those of the rotor.
  • the internal part 2 "of the stator penetrates into the rotor and it has a portion which closes the pump on the discharge side and which has an external peripheral flange 4 forming a flange. This part is pierced with a discharge orifice 5.
  • the rotor 1 is supported in stator 2 by two bearings 6 and 7 and it is rotated by an electric motor comprising a stator 8 and a rotor 9.
  • the external part 2 'of the stator is formed by two half-stators 2'A and 2'B ( Figures 2 and 3) separated, and joining, by a diametral plane 10.
  • Each half-stator 2'A and 2'B is in one piece, the different stages of fins 2A to 2F and the half-cylinder carrying them constituting a single piece, the two half-rotors coming from elsewhere from a single cylinder cut in half in the diametrical plane 10.
  • the internal part 2 "of the stator 2 carries a circular groove 11 which axially positions each half-stator 2'A and 2'B.
  • each half-stator has at its end situated on the side opposite to the suction a bearing 12 of complementary section of the groove 11.
  • the two half-rotors 2'A and 2'B thus come together by "hanging" in the groove 11 by this bearing 12.
  • the whole is maintained by the introduction of the assembly into an adjusted cylinder serving housing and which can be either a real housing 13 as shown in FIG. 2, or a simple cylinder 14 belonging to a chamber 15 of any machine 16 as shown in FIG. 3.
  • the pump is fixed to the machine 16 by the flange 4 of the pump on the discharge side against a flat surface 19 of the end of the cylinder 14 perpendicular to the axis of the pump.
  • the casing 13 is also fixed to the flange 4 and it comprises, on the suction side, a flange 17 for its connection to an enclosure to be emptied.
  • a seal 18 is placed between the flange 4 and the casing 13, or the cylinder 14.
  • the first stage of fins 1A, suction side of the rotor 1 has an outside diameter which corresponds, to the operating clearance required for the rotation of the rotor, to that of the outside diameter of the outside part 2 ′ of the stator, or that of the cylinder 14, or of the casing 13, into which the pump is introduced.
  • the suction opening and the diameter of the first rotor stage 1A is of course greater than what it is in the prior art since in the art front, the housing is used for tightening and assembling the stator constituted by an alternating stack of winged discs and spacers, it follows that the housing, suction side, has a shoulder against which the end is supported upper stator where a necessary narrowing of the suction port and the diameter of the first stage of fins 1A of the rotor.
  • the assembly is also very simplified as well as the casing 13, or the cylinder 14, because it suffices a smooth hole of single diameter ending in a flat surface 19 perpendicular to the axis of the pump for fixing to the flange. 4.

Abstract

The turbomolecular pump comprises a rotor (1) and a stator (2) with rotor stage fins (1A - 1G) alternated with stator fins (2A- 2F). The rotor is in the shape of a bell and the stator has an external part (2') which carries its fins and an internal part (2") penetrating into the rotor. The internal part encloses the pump delivery and comprises an external peripheral rim forming a flange (4). The stator external part carrying the stator fins is formed from two half stators (2'A,2'B) joined in a diametral plane. Each half stator is a monobloc and is positioned axially and hooked onto a span (12), located at the end opposite suction, in a circular groove (11) complementary to the stator internal part. The external diameter of the rotor first fin stage (1A), on the suction side, corresponds, with a small operating play, to the external diameter of the stator external part.

Description

La présente invention concerne une pompe turbomoléculaire.The present invention relates to a turbomolecular pump.

En particulier l'invention concerne une pompe turbomoléculaire comprenant un rotor et un stator, du type comportant au moins des étages à ailettes rotoriques et statoriques alternés, et dans laquelle, le rotor est en forme de cloche et le stator comprenant au moins une partie externe portant les ailettes statoriques et une partie interne pénétrant dans le rotor en forme de cloche.In particular, the invention relates to a turbomolecular pump comprising a rotor and a stator, of the type comprising at least stages with alternating rotor and stator fins, and in which the rotor is in the shape of a bell and the stator comprising at least one external part. carrying the stator fins and an internal part penetrating into the bell-shaped rotor.

Habituellement, cet ensemble est placé dans un carter externe délimitant à une extrémité un orifice d'aspiration et comportant une bride de fixation pour sa liaison à une enceinte à vider et dont l'autre extrémité est fixée à ladite partie interne du stator contre un rebord périphérique de cette partie interne. Ce carter, en outre, assure le maintien de la partie statorique externe portant les ailettes, constitué d'un empilement alternatif de disques ailetés et d'entretoises.Usually, this assembly is placed in an external casing delimiting at one end a suction orifice and comprising a fixing flange for its connection to an enclosure to be emptied and the other end of which is fixed to said internal part of the stator against a flange peripheral of this internal part. This casing, moreover, ensures the maintenance of the external stator part carrying the fins, consisting of an alternating stack of finned discs and spacers.

Cependant, une solution connue consiste en ce que ce carter n'est pas solidaire de cet ensemble, mais appartient au contraire à la chambre ou enceinte à vider. Dans ce cas, l'ensemble de la pompe sans carter est enfilé dans ce "carter" lié à la chambre à vide, ce carter jouant toutes les fonctions d'un carter lié à la pompe. L'avantage est que l'on évite le joint côté aspiration, joint qui est nécessaire dans le cas où la pompe possède son propre carter car il est nécessaire d'assurer l'étanchéité entre la bride de la pompe, située à l'extrémité du carter, côté aspiration, et la bride de fixation de cette pompe sur la chambre à vider. Or ce joint, s'il est en élastomère, a l'inconvénient de dégazer fortement et donc d'augmenter la pression des gaz résiduels et, s'il s'agit d'un joint métallique, il présente l'inconvénient que l'effort d'écrasement nécessaire pour assurer l'étanchéité est important et nécessite donc des brides de dimensions importantes.However, a known solution consists in that this casing is not integral with this assembly, but on the contrary belongs to the chamber or enclosure to be emptied. In this case, the entire pump without housing is threaded into this "housing" linked to the vacuum chamber, this housing playing all the functions of a housing linked to the pump. The advantage is that the seal on the suction side is avoided, a seal which is necessary in the case where the pump has its own casing because it is necessary to seal between the pump flange, located at the end of the casing, suction side, and the mounting flange of this pump on the chamber to be emptied. However, this seal, if it is made of elastomer, has the drawback of degassing strongly and therefore of increasing the pressure of the residual gases and, if it is a metal seal, it has the drawback that the crushing force necessary to ensure the seal is important and therefore requires flanges of large dimensions.

La présente invention a donc pour but de proposer une pompe turbomoléculaire du type définie ci-dessus, insérable dans un carter appartenant à une chambre à vider, mais sur laquelle on peut aussi, bien entendu, venir enfiler et fixer un carter indépendant ne serait-ce que pour venir la relier à une enceinte à vider ne possédant pas de "carter intégré" mais seulement, et classiquement, une bride standard de liaison. L'invention a pour but de proposer, dans ce cadre, un diamètre d'aspiration du carter plus grand que ce qui est actuellement connu, avec un premier étage des ailettes rotoriques ayant conséquement un diamètre plus grand également. Un autre but est de simplifier le carter et le montage.The present invention therefore aims to provide a turbomolecular pump of the type defined above, insertable in a housing belonging to a chamber to be emptied, but on which one can also, of course, come and thread and fix an independent housing would- what to come to connect it to an enclosure to be emptied having no "integrated casing" but only, and conventionally, a standard connection flange. The object of the invention is to propose, in this context, a suction diameter of the casing larger than what is currently known, with a first stage of the rotor fins having consequently a larger diameter also. Another object is to simplify the casing and the assembly.

L'invention a ainsi pour objet une pompe turbomoléculaire comprenant un rotor et un stator, du type comportant au moins des étages à ailettes rotoriques et statoriques alternés, et dans laquelle le rotor est en forme de cloche et le stator comprenant au moins une partie externe portant les ailettes statoriques et une partie interne pénétrant dans le rotor en forme de cloche, ladite partie interne fermant la pompe côté refoulement et comportant un rebord périphérique externe formant bride, caractérisée en ce que ladite partie externe du stator portant les ailettes statoriques est formée de deux demi-stators se joignant dans un plan diamétral, chaque demi-stator étant monobloc et étant positionné axialement en s'accrochant par une portée située à l'extrémité opposée à l'aspiration, dans une gorge complémentaire circulaire de ladite partie interne du stator, et en ce que le diamètre extérieur du premier étage aileté du rotor, côté aspiration, correspond, au jeu de fonctionnement près, au diamètre extérieur de la partie externe du stator.The subject of the invention is therefore a turbomolecular pump comprising a rotor and a stator, of the type comprising at least stages with alternating rotor and stator fins, and in which the rotor is in the shape of a bell and the stator comprising at least one external part. carrying the stator fins and an internal part penetrating into the bell-shaped rotor, said internal part closing the pump on the discharge side and comprising an external peripheral flange forming a flange, characterized in that said external part of the stator carrying the stator fins two half-stators joining in a diametral plane, each half-stator being in one piece and being positioned axially by being hooked by a bearing located at the end opposite to the suction, in a complementary circular groove of said internal part of the stator , and in that the outside diameter of the first finned stage of the rotor, on the suction side, corresponds to operating clearance, to the outside diameter of the external part of the stator.

On va maintenant donner la description d'un exemple de mise en oeuvre de l'invention en se reportant au dessin annexé dans lequel :We will now give the description of an exemplary implementation of the invention with reference to the appended drawing in which:

La figure 1 montre en coupe axiale une pompe turbumoléculaire selon l'invention.Figure 1 shows in axial section a turbumolecular pump according to the invention.

La figure 2 montre la pompe de l'invention avec son carter propre, indépendant.Figure 2 shows the pump of the invention with its own, independent housing.

La figure 3 montre la pompe de l'invention introduite dans un carter appartenant à une chambre à pomper.Figure 3 shows the pump of the invention introduced into a housing belonging to a pumping chamber.

En se référant à la figure 1, on voit une pompe turbumoléculaire comprenant un rotor 1 et un stator 2.Referring to FIG. 1, a turbumolecular pump is seen comprising a rotor 1 and a stator 2.

Le rotor 1 comporte une pluralité d'étages ailetés 1A à 1G, il est en forme de cloche et il porte un arbre central 3. Le stator 2 comprend une partie externe 2' et une partie interne 2".
La partie externe 2' comporte également une pluralité d'étages ailetés 2A à 2F, qui alternent avec ceux du rotor. La partie interne 2" du stator pénètre dans le rotor et elle comporte une portion qui ferme la pompe côté refoulement et qui comporte un rebord périphérique externe 4 formant bride. Cette partie est percée d'un orifice de refoulement 5. Le rotor 1 est supporté dans le stator 2 par deux paliers 6 et 7 et il est entraîné en rotation par un moteur électrique comportant un stator 8 et un rotor 9. La partie externe 2' du stator est formée de deux demi-stators 2'A et 2'B (figures 2 et 3) séparés, et se joignant, par un plan diamétral 10. Chaque demi-stator 2'A et 2'B est monobloc, les différents étages d'ailettes 2A à 2F et le demi-cylindre les portant constituant une seule et même pièce, les deux demi-rotors provenant d'ailleurs d'un cylindre unique coupé en deux dans le plan diamétral 10.The rotor 1 comprises a plurality of finned stages 1A to 1G, it is bell-shaped and it carries a central shaft 3. The stator 2 comprises an external part 2 'and an internal part 2 ".
The external part 2 ′ also comprises a plurality of finned stages 2A to 2F, which alternate with those of the rotor. The internal part 2 "of the stator penetrates into the rotor and it has a portion which closes the pump on the discharge side and which has an external peripheral flange 4 forming a flange. This part is pierced with a discharge orifice 5. The rotor 1 is supported in stator 2 by two bearings 6 and 7 and it is rotated by an electric motor comprising a stator 8 and a rotor 9. The external part 2 'of the stator is formed by two half-stators 2'A and 2'B (Figures 2 and 3) separated, and joining, by a diametral plane 10. Each half-stator 2'A and 2'B is in one piece, the different stages of fins 2A to 2F and the half-cylinder carrying them constituting a single piece, the two half-rotors coming from elsewhere from a single cylinder cut in half in the diametrical plane 10.

La partie interne 2" du stator 2 porte une gorge circulaire 11 qui positionne axialement chaque demi-stator 2'A et 2'B. A cet effet, chaque demi-stator comporte à son extrémité située du côté opposé à l'aspiration une portée 12 de section complémentaire de la gorge 11.The internal part 2 "of the stator 2 carries a circular groove 11 which axially positions each half-stator 2'A and 2'B. For this purpose, each half-stator has at its end situated on the side opposite to the suction a bearing 12 of complementary section of the groove 11.

Les deux demi-rotors 2'A et 2'B viennent ainsi s'assembler en "s'accrochant" dans la gorge 11 par cette portée 12. Le tout est maintenu par l'introduction de l'ensemble dans un cylindre ajusté servant de carter et qui peut être, soit un véritable carter 13 comme le montre la figure 2, soit un simple cylindre 14 appartenant à une chambre 15 d'une machine quelconque 16 comme le montre la figure 3. Dans ce dernier cas, la pompe est fixée à la machine 16 par la bride 4 de la pompe côté refoulement contre une surface plane 19 de l'extrémité du cylindre 14 perpendiculaire à l'axe de la pompe.The two half-rotors 2'A and 2'B thus come together by "hanging" in the groove 11 by this bearing 12. The whole is maintained by the introduction of the assembly into an adjusted cylinder serving housing and which can be either a real housing 13 as shown in FIG. 2, or a simple cylinder 14 belonging to a chamber 15 of any machine 16 as shown in FIG. 3. In the latter case, the pump is fixed to the machine 16 by the flange 4 of the pump on the discharge side against a flat surface 19 of the end of the cylinder 14 perpendicular to the axis of the pump.

Dans le cas de la figure 2 , le carter 13 est également fixé à la bride 4 et il comporte, côté aspiration, une bride 17 pour sa liaison à une enceinte à vider. Un joint 18 est placé entre la bride 4 et le carter 13, ou le cylindre 14.In the case of FIG. 2, the casing 13 is also fixed to the flange 4 and it comprises, on the suction side, a flange 17 for its connection to an enclosure to be emptied. A seal 18 is placed between the flange 4 and the casing 13, or the cylinder 14.

Enfin, le premier étage d'ailettes 1A, côté aspiration du rotor 1, a un diamètre extérieur qui correspond, au jeu près de fonctionnement nécessaire pour la rotation du rotor, à celui du diamètre extérieur de la partie externe 2' du stator, ou de celui du cylindre 14, ou du carter 13, dans lequel la pompe est introduite.Finally, the first stage of fins 1A, suction side of the rotor 1, has an outside diameter which corresponds, to the operating clearance required for the rotation of the rotor, to that of the outside diameter of the outside part 2 ′ of the stator, or that of the cylinder 14, or of the casing 13, into which the pump is introduced.

Ainsi, grâce à l'invention, l'orifice d'aspiration et le diamètre du premier étage 1A rotorique, quasi identique, au jeu près, est bien entendu supérieur à ce qu'il est dans l'art antérieur puisque dans l'art antérieur, le carter sert au serrage et à l'assemblage du stator constitué par un empilement alternatif de disque à ailettes et d'entretoises, il s'ensuit que le carter, côté aspiration, comporte un épaulement contre lequel s'appuie l'extrémité supérieure du stator d'où un rétrécissement nécessaire de l'orifice d'aspiration et du diamètre du premier étage d'ailettes 1A du rotor. Le montage est en outre très simplifié ainsi que le carter 13, ou le cylindre 14, car il suffit d'un trou lisse de diamètre unique se terminant par une surface plane 19 perpendiculaire à l'axe de la pompe pour la fixation à la bride 4.Thus, thanks to the invention, the suction opening and the diameter of the first rotor stage 1A, almost identical, apart from the clearance, is of course greater than what it is in the prior art since in the art front, the housing is used for tightening and assembling the stator constituted by an alternating stack of winged discs and spacers, it follows that the housing, suction side, has a shoulder against which the end is supported upper stator where a necessary narrowing of the suction port and the diameter of the first stage of fins 1A of the rotor. The assembly is also very simplified as well as the casing 13, or the cylinder 14, because it suffices a smooth hole of single diameter ending in a flat surface 19 perpendicular to the axis of the pump for fixing to the flange. 4.

Claims (3)

Pompe turbomoléculaire comprenant un rotor (1) et un stator (2), du type comportant au moins des étages à ailettes rotoriques (1A à 1G) et statoriques (2A à 2F) alternés, et dans laquelle, le rotor (1) est en forme de cloche et le stator (2) comprenant au moins une partie externe (2') portant les ailettes statoriques (2A à 2F) et une partie interne (2") pénétrant dans le rotor (1) en forme de cloche, ladite partie interne fermant la pompe côté refoulement et comportant un rebord périphérique externe formant bride (4), caractérisée en ce que ladite partie externe (2') du stator portant des ailettes statoriques (2A à 2F) est formée de deux demi-stators (2'A, 2'B) se joignant dans un plan diamétral (10), chaque demi-stator étant monobloc et étant positionné axialement en s'accrochant par une portée (12) située à l'extrémité opposée à l'aspiration, dans une gorge (11) complémentaire circulaire de ladite partie interne (2") du stator, et en ce que le diamètre extérieur du premier étage aileté (1A) du rotor, côté aspiration, correspond, au jeu de fonctionnement près, au diamètre extérieur de la partie externe (2') du stator (2).Turbomolecular pump comprising a rotor (1) and a stator (2), of the type comprising at least stages with alternating rotor fins (1A to 1G) and stator (2A to 2F), and in which the rotor (1) is in bell shape and the stator (2) comprising at least one external part (2 ') carrying the stator fins (2A to 2F) and an internal part (2 ") penetrating into the rotor (1) in the form of a bell, said part internal closing the pump on the discharge side and comprising an external peripheral flange forming a flange (4), characterized in that said external part (2 ') of the stator carrying stator fins (2A to 2F) is formed by two half-stators (2' A, 2'B) joining in a diametral plane (10), each half-stator being in one piece and being positioned axially by being hooked by a bearing (12) situated at the end opposite to the suction, in a groove (11) circular complement of said internal part (2 ") of the stator, and in that the diameter e x outside of the first finned stage (1A) of the rotor, suction side, corresponds, apart from the operating clearance, to the outside diameter of the external part (2 ') of the stator (2). Pompe turbomoléculaire selon la revendication 1, caractérisée en ce qu'elle comporte un carter (13) venant s'enfiler en s'ajustant sur le diamètre extérieur de la partie externe (2') du stator (2) et se fixer sur ladite bride (4), ledit carter comportant, côté aspiration, une bride (17) de fixation.Turbomolecular pump according to claim 1, characterized in that it comprises a casing (13) which is threaded by adjusting on the external diameter of the external part (2 ') of the stator (2) and is fixed on said flange (4), said casing comprising, on the suction side, a fixing flange (17). Pompe turbomoléculaire selon la revendication 1, caractérisée en ce qu'elle est introduite dans un cylindre (14) de diamètre unique ajusté à celui, extérieur, de la partie externe (2') du stator (2) appartenant à une chambre (15) d'une machine quelconque (16), la surface externe dudit cylindre comportant une face plane (19) perpendiculaire à l'axe de la pompe pour sa fixation contre la bride (4).Turbomolecular pump according to claim 1, characterized in that it is introduced into a cylinder (14) of single diameter adjusted to that, external, of the external part (2 ') of the stator (2) belonging to a chamber (15) of any machine (16), the external surface of said cylinder comprising a flat face (19) perpendicular to the axis of the pump for its fixing against the flange (4).
EP96401388A 1995-06-30 1996-06-24 Turbo molecular pump Expired - Lifetime EP0751297B1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FR9507922 1995-06-30
FR9507922A FR2736103B1 (en) 1995-06-30 1995-06-30 TURBOMOLECULAR PUMP

Publications (2)

Publication Number Publication Date
EP0751297A1 true EP0751297A1 (en) 1997-01-02
EP0751297B1 EP0751297B1 (en) 2002-09-18

Family

ID=9480585

Family Applications (1)

Application Number Title Priority Date Filing Date
EP96401388A Expired - Lifetime EP0751297B1 (en) 1995-06-30 1996-06-24 Turbo molecular pump

Country Status (5)

Country Link
US (1) US5722819A (en)
EP (1) EP0751297B1 (en)
JP (1) JP3766138B2 (en)
DE (1) DE69623700T2 (en)
FR (1) FR2736103B1 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19956015A1 (en) * 1999-11-22 2001-05-23 Pfeiffer Vacuum Gmbh Turbomolecular pump

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6457954B1 (en) † 1998-05-26 2002-10-01 Leybold Vakuum Gmbh Frictional vacuum pump with chassis, rotor, housing and device fitted with such a frictional vacuum pump
DE19901340B4 (en) * 1998-05-26 2016-03-24 Leybold Vakuum Gmbh Friction vacuum pump with chassis, rotor and housing and device equipped with a friction vacuum pump of this type
JP3013083B2 (en) 1998-06-23 2000-02-28 セイコー精機株式会社 Turbo molecular pump
DE19951954A1 (en) * 1999-10-28 2001-05-03 Pfeiffer Vacuum Gmbh Turbomolecular pump
DE102006020710A1 (en) 2006-05-04 2007-11-08 Pfeiffer Vacuum Gmbh Vacuum pump with housing
DE102007027354A1 (en) * 2007-06-11 2008-12-18 Oerlikon Leybold Vacuum Gmbh Turbo molecular pump
GB2568066A (en) * 2017-11-02 2019-05-08 Edwards Ltd Stator blade unit for a turbomolecular pump

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2218615A1 (en) * 1972-04-18 1973-10-31 Leybold Heraeus Gmbh & Co Kg TURBOMOLECULAR PUMP WITH ROTOR AND STATOR
FR2224009A5 (en) * 1973-03-30 1974-10-25 Cit Alcatel
EP0129709A2 (en) * 1983-04-26 1985-01-02 Anelva Corporation Combinational molecular pump capable of readily being cleaned
CH674785A5 (en) * 1988-03-07 1990-07-13 Dino Systems Limited Pumping unit for atomic or molecular beams - uses stacked hexagonal blocks with transverse walls between and molecular pumps set in transverse holes in block walls
EP0603694A1 (en) * 1992-12-24 1994-06-29 BALZERS-PFEIFFER GmbH Vacuum system

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2611819B1 (en) * 1987-02-25 1989-05-05 Cit Alcatel VACUUM PUMP, ROTARY
JPH01190990A (en) * 1988-01-26 1989-08-01 Osaka Shinku Kiki Seisakusho:Kk Vacuum pump
US5501583A (en) * 1992-08-19 1996-03-26 Hitachi, Ltd. Turbo vacuum pump
JPH0783189A (en) * 1993-09-17 1995-03-28 Hitachi Ltd Turbo vacuum pump
JPH0886298A (en) * 1994-09-19 1996-04-02 Hitachi Ltd Dry turbo vacuum pump

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2218615A1 (en) * 1972-04-18 1973-10-31 Leybold Heraeus Gmbh & Co Kg TURBOMOLECULAR PUMP WITH ROTOR AND STATOR
FR2224009A5 (en) * 1973-03-30 1974-10-25 Cit Alcatel
EP0129709A2 (en) * 1983-04-26 1985-01-02 Anelva Corporation Combinational molecular pump capable of readily being cleaned
CH674785A5 (en) * 1988-03-07 1990-07-13 Dino Systems Limited Pumping unit for atomic or molecular beams - uses stacked hexagonal blocks with transverse walls between and molecular pumps set in transverse holes in block walls
EP0603694A1 (en) * 1992-12-24 1994-06-29 BALZERS-PFEIFFER GmbH Vacuum system

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19956015A1 (en) * 1999-11-22 2001-05-23 Pfeiffer Vacuum Gmbh Turbomolecular pump
EP1101944A2 (en) 1999-11-22 2001-05-23 Pfeiffer Vacuum GmbH Turbo molecular pump

Also Published As

Publication number Publication date
EP0751297B1 (en) 2002-09-18
FR2736103B1 (en) 1997-08-08
US5722819A (en) 1998-03-03
JPH0914185A (en) 1997-01-14
DE69623700T2 (en) 2003-07-31
JP3766138B2 (en) 2006-04-12
DE69623700D1 (en) 2002-10-24
FR2736103A1 (en) 1997-01-03

Similar Documents

Publication Publication Date Title
EP0728948A1 (en) Scroll vacuum pump
FR2745604A1 (en) FUEL TURBOCHARGER
FR2484545A1 (en) ELECTRIC FUEL PUMP FOR INJECTION SYSTEM OF INTERNAL COMBUSTION ENGINE WITH CONTROLLED IGNITION
FR2732725A1 (en) FUEL PUMP AND METHOD FOR MANUFACTURING THE SAME
FR2517757A1 (en)
EP0751297B1 (en) Turbo molecular pump
FR2735535A1 (en) TURBOMOLECULAR PUMP
EP0697524B1 (en) Turbomolecular vacuum pump
FR2608228A1 (en) Liquid pump, especially water pump, particularly for motor vehicles
EP0943807B1 (en) Turbomolecular pump
EP0242248A1 (en) Radial ventilator, especially for motor vehicle air conditioning
FR2670539A1 (en) MULTI-STAGE PUMP, PARTICULARLY FOR PUMPING A MULTIPHASIC FLUID.
FR3011291A1 (en) TURBOMACHINE WITH TORSIBLE COUPLING INTEGRATED WITH AT LEAST ONE SHAFT AND / OR LEAD
FR2772842A1 (en) Pump unit without own bearing
WO2005022088A1 (en) Universal actuator particularly for dashboards
FR2975447A1 (en) MODULAR ELECTRIC COMPRESSOR WITH ASSEMBLY DEVICE
FR2803638A3 (en) Bearing structure for rotor of motor, has coupling section formed at outside perimeter, in which longitudinal length of axis hole is larger than that of coupling section
FR2611818A1 (en) Molecular rotary vacuum pump of the Gaëde channel type
WO2010066988A2 (en) Dry vacuum pump, and associated assembly method
FR2778446A1 (en) INSTALLATION FOR MODIFYING THE FREE PASSAGE SECTION OF A CHANNEL-LIKE ELEMENT AND METHOD FOR THE PRODUCTION THEREOF
EP1134361B1 (en) Turbo machine having a device for suppression of vibrations
EP1473462B1 (en) Cartridge compressor unit
FR3079553A1 (en) ASSEMBLY FOR TURBOMACHINE
FR2589956A1 (en) FIXING A MOBILE WHEEL ON THE SHAFT OF A PUMP, IN PARTICULAR A FASTENING OF A MOBILE WHEEL WITH TWO INPUTS
FR2611834A1 (en) MOUNTING DEVICE WITH ROTATION OF A GEAR IN RELATION TO A BUILDING

Legal Events

Date Code Title Description
PUAI Public reference made under article 153(3) epc to a published international application that has entered the european phase

Free format text: ORIGINAL CODE: 0009012

AK Designated contracting states

Kind code of ref document: A1

Designated state(s): CH DE GB IT LI

17P Request for examination filed

Effective date: 19970606

17Q First examination report despatched

Effective date: 20011227

GRAG Despatch of communication of intention to grant

Free format text: ORIGINAL CODE: EPIDOS AGRA

GRAG Despatch of communication of intention to grant

Free format text: ORIGINAL CODE: EPIDOS AGRA

GRAH Despatch of communication of intention to grant a patent

Free format text: ORIGINAL CODE: EPIDOS IGRA

GRAH Despatch of communication of intention to grant a patent

Free format text: ORIGINAL CODE: EPIDOS IGRA

GRAA (expected) grant

Free format text: ORIGINAL CODE: 0009210

RAP1 Party data changed (applicant data changed or rights of an application transferred)

Owner name: ALCATEL

AK Designated contracting states

Kind code of ref document: B1

Designated state(s): CH DE GB IT LI

REG Reference to a national code

Ref country code: GB

Ref legal event code: FG4D

Free format text: NOT ENGLISH

REG Reference to a national code

Ref country code: CH

Ref legal event code: EP

GBT Gb: translation of ep patent filed (gb section 77(6)(a)/1977)

Effective date: 20020918

REG Reference to a national code

Ref country code: CH

Ref legal event code: NV

Representative=s name: CABINET ROLAND NITHARDT CONSEILS EN PROPRIETE INDU

REF Corresponds to:

Ref document number: 69623700

Country of ref document: DE

Date of ref document: 20021024

PLBE No opposition filed within time limit

Free format text: ORIGINAL CODE: 0009261

STAA Information on the status of an ep patent application or granted ep patent

Free format text: STATUS: NO OPPOSITION FILED WITHIN TIME LIMIT

26N No opposition filed

Effective date: 20030619

PGFP Annual fee paid to national office [announced via postgrant information from national office to epo]

Ref country code: CH

Payment date: 20120626

Year of fee payment: 17

PGFP Annual fee paid to national office [announced via postgrant information from national office to epo]

Ref country code: GB

Payment date: 20120626

Year of fee payment: 17

PGFP Annual fee paid to national office [announced via postgrant information from national office to epo]

Ref country code: IT

Payment date: 20120620

Year of fee payment: 17

PGFP Annual fee paid to national office [announced via postgrant information from national office to epo]

Ref country code: DE

Payment date: 20120711

Year of fee payment: 17

REG Reference to a national code

Ref country code: CH

Ref legal event code: PL

GBPC Gb: european patent ceased through non-payment of renewal fee

Effective date: 20130624

REG Reference to a national code

Ref country code: DE

Ref legal event code: R119

Ref document number: 69623700

Country of ref document: DE

Effective date: 20140101

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: CH

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20130630

Ref country code: LI

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20130630

Ref country code: GB

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20130624

Ref country code: DE

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20140101

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: IT

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20130624