JPH01190990A - Vacuum pump - Google Patents

Abstract

PURPOSE:To enable even maintenance and inspection to be performed facilitating diassembly and assembly by forming a stator connecting two or more stator divided units to each other respectively in both side ends. CONSTITUTION:A turbo molecular pump part forms its stator 6 by a pair of stator divided units 6a, 6b integrally laminating half ring-shaped distance piece divided units 6c..., and drilling pin holes 6e, 6f respectively in both side end parts of these divided units 6a, 6b, both the units 6a, 6b are connected by a pin. A thread groove pump part forms its stator 4 by half cylindrical stator divided units 4a, 4b, and pin holes 4c, 4d are drilled in both end surfaces of these divided units 4a, 4b for connecting them.

Description

DETAILED DESCRIPTION OF THE INVENTION (1) Industrial Application Field The present invention relates to a vacuum pump suitable for compressing and evacuating gas to obtain a high vacuum.

(2) Prior Art In conventional vacuum pumps, in the case of turbomolecular pumps having rotor blades and stator blades, the rotor blades and stator blades are stacked alternately with a small gap between each other, so each Stator blades are constructed by providing ring-shaped distance pieces in multiple stages between the blades. In addition, in the case of a screw structure pump with a thread groove, rotation,
The stator, which is provided with a small gap from the rotor, is integrally formed in a cylindrical shape.

(3) Problems to be Solved by the Invention Therefore, when assembling a turbomolecular pump, the more stages there are, the more moving blades and static components there will be! and distance pieces must be prepared and laminated alternately as stator vanes, distance pieces, rotor blades, stator vanes, distance pieces, rotor blades, and so on.

Therefore, the number of parts increases, the cost increases, and more man-hours are required for assembly.

Also, in the case of a threaded groove vacuum pump, a type in which stators are stacked in multiple stages requires a large number of parts and requires assembly time.

Furthermore, in the case of compound vacuum pumps that have thread grooves, rotor blades, and stator blades, the gap between the stator and rotor is minimized.
If the inner diameter of the stator becomes smaller than the outer diameter of the rotor blades and the rotor blades are to be disassembled, the rotor blades must be removed from the rotating shaft.

Therefore, during disassembly, special jigs and tools are required, and disassembly and reassembly takes a lot of time.

SUMMARY OF THE INVENTION It is an object of the present invention to provide a vacuum pump that solves the above-mentioned problems, facilitates disassembly, assembly, and cleaning, and reduces costs by reducing the number of parts.

(4) Means for Solving the Problems In order to achieve the above object, the present invention is characterized in that the stator is formed by connecting a plurality of stator segments to each other at both ends thereof. do.

(5) Function The stator can be easily assembled or disassembled by connecting or separating the plurality of stator segments at both ends of each.

(6) Examples An embodiment of the present invention will be described based on the drawings.

FIG. 5 is a partially cutaway perspective view showing the configuration of a compound vacuum pump, in which (1) is a motor, and the rotating shaft (la) of the motor (1) is
) A rotor (2) having a threaded groove is fixed to the lower part of the rotor (2), and a moving blade (3) consisting of a large number of radial blades having an inclination angle is fixed to the upper part of the rotor (2). On the other hand, the rotor (2
) The cylindrical stator (
4) is fixed to the member (5). Also, the stator (4
) is a stator (6) of a turbo molecular unit, on which a stator blade (7) consisting of a radial blade having an inclination angle opposite to that of the rotor blade (3) is held and fixed. (5) is fixed concentrically.

The stator (6) of the turbo molecular unit is shown in Figs. 1 and 2.
As shown in the figure, it consists of a pair of stator segments (6a) and (6b) which are formed by laminating and integrating half-ring-shaped distance piece segments (6C)...(6C).
There are pin holes (6e) (6
f) are each drilled and the two are connected by a pin.

Therefore, the stator blades (
7), the divided bodies (6a) and (6b) can be attached from the left and right to the upper part of the rotor (4) having the rotor blades (3) and assembled. Therefore, it is no longer necessary to assemble distance pieces one by one as in the past.

Next, as shown in FIGS. 3 and 4, the stator (4) of the thread groove pump part is a semi-cylindrical stator segment (4a).
(4b), and these divided bodies (4a) (4b
) are provided with pin holes (4c) and (4d) in order to connect these divided bodies (4a) and (4b).

Therefore, when removing the stator (4), the rotating shaft (la
) can be removed from the left and right sides without removing the rotor blade (3).

In addition to the above-mentioned embodiment, the present invention integrates a stator blade (7) and a half-ring-shaped distance piece divided body (6C), and further integrates these distance piece divided bodies (6C) into an end layer to form a stator divided body. This eliminates the need to fit the stator vane in the pump assembly. Further, only the stator (6) of the turbo molecular pump section or only the stator (4) of the thread groove molecular pump section may be constituted by a stator split body divided into two parts, and if necessary, the stator may be divided into three or more parts. good.

(7) Effects of the Invention As described above, according to the present invention, the stator is formed so that it can be divided into a plurality of stator segments, which facilitates disassembly and assembly, enables easy maintenance and inspection, and reduces costs. It has an excellent effect of reducing

[Brief explanation of the drawing]

Fig. 1 is a partially cutaway plan view of the stator of the turbomolecular pump section of the present invention, Fig. 2 is a side view seen from the II-11 plane of Fig. 1, and Fig. 3 is a part of the stator of the threaded groove pump section. FIG. 4 is a cutaway plan view, FIG. 4 is a side view taken from the plane IV-rV of FIG. 3, and FIG. 5 is a partially cutaway perspective view of the compound vacuum pump. (4) (6)... Stator (6C)... Distance piece divided body (7)...
Stationary patent applicant Osaka Vacuum Equipment Manufacturing Co., Ltd. Figure 2
Figure 1 Figure 4 Figure 3 Engraving of the drawing (no change in content) Procedural amendment (method) % formula % 1. Indication of exclusive subject matter Patent Application No. 013581 of 1988? 1. Name of the invention Shin 7 - Vacuum pump 3. Relationship with the person making the amendment Patent applicant address: 3-6 Kitahama, Higashi-ku, Osaka, Osaka Name: Osaka Vacuum Equipment Manufacturing Co., Ltd. 4, Agent: 103 Address: Chuo, Tokyo No. 8, No. 5, 161 Kodenma-cho, Nihonbashi, Ward, April 26, 1986, 3, the date of the amendment order, drawings subject to amendment. 7. Contents of the amendment Figure 5 of the drawings attached at the beginning of the application. As shown in the attached sheet (no changes in content).

Claims (6)

[Claims] (1) A vacuum pump characterized in that the stator is formed by connecting a plurality of stator segments to each other at both ends thereof. (2) The vacuum pump according to claim 1, wherein the stator is a stator of a turbo-molecular pump. (3) The vacuum pump according to claim 2, wherein the stator segment is formed by integrally laminating ring-shaped distance piece segments. (4) The vacuum pump according to claim 3, characterized in that stator vanes are integrally molded on the distance piece. (5) The vacuum pump according to claim 1, wherein the stator is a stator of a thread groove pump. (6) The vacuum pump according to claim 1, wherein the stator is a stator of a composite molecular pump.