JP4785400B2 - Vacuum pump rotor - Google Patents

Description

  The present invention relates to a rotor of a vacuum pump such as a threaded groove vacuum pump or a composite molecular pump having a turbo molecular pump part and a threaded groove vacuum pump part and evacuating mainly in a molecular flow region.

  A longitudinal sectional view of an example of a conventional complex molecular pump is shown in FIG.

  A is a turbo molecular pump unit, and B is a thread groove vacuum pump unit.

  The turbo molecular pump section A has a rotor blade stage D formed by projecting a large number of rotor blades D1 radially, in multiple stages above the rotor C. Incidentally, E is a stationary blade stage, and the turbo molecular pump section A is configured such that these moving blade stages D and stationary blade stages E are alternately arranged.

  The thread groove vacuum pump section B includes a cylindrical thread groove vacuum pump section rotor F provided at the lower portion of the rotor C and a cylindrical stator G having a thread groove on the inner side. There is a minute gap between the peripheral surface and the outer peripheral surface of the thread groove vacuum pump rotor F.

  The rotor C is engaged and fixed to a rotating shaft H through which the rotor C is inserted.

  In the operation of the complex molecular pump, the rotor C is rotated at a high speed, the air is sucked from the air inlet I, and the air is exhausted from the exhaust port J through the turbo molecular pump part A and the thread groove vacuum pump part B.

  However, the rotor C is generally made of an aluminum alloy or the like, and is manufactured by a complicated cutting process or the like.

However, as for the stationary blade stage of the turbo molecular pump unit, there is an example in which a stationary blade stage is formed by cutting and raising a thin disk (for example, see FIG. 4 of Patent Document 1).
JP 2004-76623 A

  Since the manufacture of a rotor by machining from the aluminum alloy or the like requires a high degree of machining technology, there is a problem that the manufacturing cost of the rotor increases.

  An object of the present invention is to provide a vacuum pump rotor that solves the above-described problems, enables high-speed automatic processing, and can reduce manufacturing costs.

  In order to achieve the above-mentioned object, the present invention is configured by laminating a plurality of blade plate elements formed by laminating a plurality of blade step element disks in which a large number of blade elements protrude radially, and a plurality of thin plate disks. Fixed to the bottom surface of the turbo molecular pump rotor formed by engaging and fixing the formed spacer ring to the rotor portion of the rod-shaped body formed in a reverse bowl shape or the side edge of the rod-shaped body A rotor portion made of a cylindrical body was fixed.

  Since the rotor of the vacuum pump according to the present invention is mainly a press molding process, it can be manufactured by high-speed automatic processing, and the manufacturing cost can be reduced.

  Examples of the best mode for carrying out the invention are shown below.

  Embodiment 1 of the present invention will be described with reference to the drawings.

  FIG. 1 is a longitudinal sectional view of a rotor 1 of a complex molecular pump according to the present invention.

  The upper part of the rotor 1 is a turbo molecular pump part rotor 1A, and the lower part of the rotor 1 is a thread groove vacuum pump part rotor 1B.

  The turbo molecular pump rotor 1A has a plurality of blade stages 2 and is integrally formed with a spacer ring 3 interposed between the blade stages.

  A front view of the rotor blade stage 2 is shown in FIG. That is, in FIG. 2, 2a is a shaft hole through which a rotating shaft (not shown) is inserted, and a large number of blades 2b are projected radially on the outer peripheral portion.

  3 is a view taken in the direction of the arrow X in FIG. 2 and shows that the moving blade 2b is formed to be inclined with respect to the axial direction of the moving blade stage 2. FIG.

  The moving blade stage 2 is formed by laminating a plurality of thin blade-shaped moving blade stage element disks 2c as shown in FIG.

  A large number of blade elements 2c1 project radially from the outer peripheral portion of the blade stage element disk 2c, and the blade 2b is formed by laminating a plurality of the blade elements 2c1.

  Further, the spacer ring 3 is formed by laminating a plurality of thin plate disks 3a as shown in FIG. 5, and a turbo molecule formed by laminating a plurality of the blade stage element disks 2c and the thin plate disks 3a. The pump rotor 1A is formed as an integral rotor by bonding and fixing the thin plates.

  In addition, when the thin plate is made of a metal material such as a steel plate, the thin plate is bonded by welding, brazing, caulking, or an adhesive, or the uneven portions provided on the thin plates are engaged with each other. You may make it engage and fix.

  In FIG. 1, the thread groove vacuum pump rotor 1 </ b> B includes an outer first rotor 4 and an inner second rotor 5.

  The first rotor 4 includes a first plate-like body 4a made of a thin plate projecting downward from the lower portion of the turbo molecular pump rotor 1A, and a side edge of the first rod-like body 4a, that is, an outer peripheral portion. It consists of a fixed first cylindrical body 4b.

  The second rotor 5 includes a thin plate-like second hook-like body 5a projecting inwardly of the first hook-like body 4a below the turbo molecular pump portion 1A, and the second hook-like body. It consists of the 2nd cylindrical body 5b fixedly fixed to the side edge part, ie, the outer peripheral part of 5a, and the corner | angular part is formed in the curved parts 4ac and 5ac with roundness, respectively.

  That is, the first rotor 4 is fixed to the lower surface of the turbo molecular pump rotor 1A at the top surface, and the second rotor 5 is fixed to the lower surface of the top surface of the first rotor 4 at the top surface. .

  The first and second flanges 4a and 5a can be easily manufactured by deep drawing of a thin plate.

  The first cylindrical body 4b and the second cylindrical body 5b are both made of carbon fiber reinforced plastic and are arranged in a concentric double cylindrical structure.

  The cylindrical bodies 4b and 5b may be made of a metal such as a Ti alloy Al alloy instead of the carbon fiber reinforced plastic.

  Next, a method of using the rotor 1 of the composite molecular pump of this embodiment will be described.

  The rotor 1 is a turbo-molecular pump section rotor 1A having an upper multistage (six stages in FIG. 1) axial flow stage 2 and a thread groove vacuum pump section having a double rotor of a first rotor 4 and a second rotor 5 therebelow. It consists of a rotor 1B, and is fastened to a rotating shaft (not shown) inserted through a shaft hole 2a at the center of the rotor 1 so as to rotate at high speed.

  In addition, there is a stationary blade stage (not shown) between the adjacent blade stages 2 of the turbo molecular pump rotor 1A.

  Also, there are cylindrical stators 4c and 5c on the outer peripheral portions of the two cylindrical bodies 4b and 5b forming the thread groove vacuum pump rotor 1B, respectively, and the first rotor 4 and the second rotor 5 are these. The stator 4c or 5c is rotatably inserted.

  The stators 4c and 5c are integrally formed, and thread grooves 4cg or 5cg for thread groove vacuum pumps are respectively formed on the inner peripheral surface portions of the stators 4c and 5c.

  When the complex molecular pump equipped with the rotor 1 is operated, the exhaust gas is introduced from the upper part of the rotor 1 and is pumped by the turbo molecular pump rotor 1A and the stationary blade stage, and the thread groove vacuum pump rotor 1B. The first rotor 4 on the outside and the stator 4c are again pumped and sent downward, and then reversed at the reversing part Y and led to the upper part of the second rotor 5 on the inside, The second rotor 5 and the stator 5c on the outer periphery of the second rotor 5 are again pumped and sent downward.

  Thus, since the thread groove vacuum pump rotor 1B of the present invention is composed of the thin plate-like flanges 4a and 5a, it is easy to process and can be a lightweight rotor.

  A second embodiment of the present invention will be described with reference to FIG.

  FIG. 6 is a longitudinal sectional view of the rotor 10 of the composite molecular pump according to the present embodiment, and a thread groove vacuum pump portion rotor 1C is projected from the lower portion of the upper turbo molecular pump portion rotor 1A.

  In FIG. 6, 6, 7 and 8 are a first rotor, a second rotor and a third rotor, respectively, and 6a, 7a and 8a are a first rod-like body, a second rod-like body and a third rod-like body, respectively. Also, 6b, 7b and 8b are a first cylindrical body, a second cylindrical body and a third cylindrical body, respectively.

  Here, in order to match the displacement with the first cylindrical body 6b during operation and temperature rise, the first bowl-shaped body 6a has a structure having a folded portion 6c on the top surface of the side edge portion. .

  Further, the second bowl-like body 7a is engaged and fixed to the second cylindrical body 7b at the inner peripheral portion thereof.

  Further, the third bowl-shaped body 8 a itself becomes a third cylindrical body 8 b to form the third rotor 8.

  The first rotor 6 is rotatably inserted in a first stator 6d having a thread groove for a thread groove vacuum pump on the inner peripheral surface portion, and the inner periphery of the second rotor 7 is connected to the outer periphery. A second stator 7c having a thread groove in the surface portion is inserted, and further, an inner peripheral portion of the third rotor 8 is inserted through a third stator 8c having a thread groove in the outer peripheral surface portion, so that a triple structure is formed. A thread groove vacuum pump part is formed.

  As described above, since the rotor of the composite molecular pump of the present invention is mostly formed by pressing a thin plate, it can be manufactured by high-speed automatic processing, and the thread groove vacuum pump rotor can be easily multiplexed. The structure can be obtained and the weight of the rotor can be reduced.

  In the present embodiment, the screw groove vacuum pump portion having a triple structure is provided. However, this may have a triple structure or a multiple structure, or a single structure.

  The upper turbo molecular pump part may be a conventional aluminum alloy rotor, and the lower part thereof may be combined with the thread groove vacuum pump part of the present invention.

  Furthermore, only the thread groove vacuum pump part of the present invention may be used alone.

  The present invention is mainly used for a rotor of a vacuum pump such as a complex molecular pump that performs evacuation in a molecular flow region.

It is a longitudinal cross-sectional view of the rotor of the composite molecular pump of Example 1 of this invention. It is a front view of a part of said rotor and a rotor blade stage. FIG. 3 is an X arrow view in FIG. 2. It is a top view of the moving blade stage element disk which comprises the said moving blade stage. It is a top view of the thin disc which comprises a part of said rotor and a spacer ring. It is a longitudinal cross-sectional view of the rotor of the composite molecular pump of Example 2 of this invention. It is a longitudinal cross-sectional view of an example of the conventional complex molecular pump.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1,10 Composite molecular pump rotor 1A Turbo molecular pump part rotor 1B, 1C Thread groove vacuum pump part rotor 4a, 5a, 6a, 7a, 8a Rod-like body 4b, 5b, 6b, 7b, 8b Cylindrical body 6c Folding part

Claims (4)

A rotor blade stage formed by laminating a plurality of rotor blade stage element disks in which a large number of blade elements protrude radially and a spacer ring formed by laminating a plurality of thin disk disks are fixedly fixed. On the lower surface of the formed turbomolecular pump rotor, a rotor part made of a cylindrical body fixed to a side edge part of the bowl-shaped body or a bowl-shaped body in which a plate body is formed in a reverse bowl shape is fixed. Vacuum pump rotor.   The rotor of a vacuum pump according to claim 1, wherein the plurality of rotor portions having different diameters are arranged in concentric inner and outer structures and fixed to each other on the top surface. The rotor of the vacuum pump according to claim 2, wherein a folded portion is formed on a top surface of a side edge of the outer rotor portion . The rotor of the vacuum pump according to any one of claims 1 to 3 wherein the cylindrical body is made of carbon fiber reinforced plastic.

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