JPH031297U - - Google Patents

Info

Publication number
JPH031297U
JPH031297U JP6272989U JP6272989U JPH031297U JP H031297 U JPH031297 U JP H031297U JP 6272989 U JP6272989 U JP 6272989U JP 6272989 U JP6272989 U JP 6272989U JP H031297 U JPH031297 U JP H031297U
Authority
JP
Japan
Prior art keywords
blade
rotor
rotor blade
stator
notch
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP6272989U
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP6272989U priority Critical patent/JPH031297U/ja
Publication of JPH031297U publication Critical patent/JPH031297U/ja
Pending legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/08—Sealings
    • F04D29/16—Sealings between pressure and suction sides
    • F04D29/161—Sealings between pressure and suction sides especially adapted for elastic fluid pumps
    • F04D29/164—Sealings between pressure and suction sides especially adapted for elastic fluid pumps of an axial flow wheel

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)

Description

【図面の簡単な説明】[Brief explanation of the drawing]

第１図ないし第６図は本考案に係るターボ分子
ポンプの一実施例を示す図であり、第１図はこの
ポンプの全体断面図、第２図はロータ翼とステー
タ翼の断面図、第３図はステータ翼の平面図、第
４図はロータ翼の先端部の断面図、第５図はスペ
ーサの斜視図、第６図は第５図における矢視図
である。第７図ないし第９図は従来のターボ分子
ポンプを示す図であり、第７図はこのポンプの全
体断面図、第８図はロータ翼とステータ翼の断面
図、第９図はステータ翼の平面図、第１０図およ
び第１１図は他の従来のターボ分子ポンプを示す
図であり、第１０図はロータ翼およびステータ翼
の断面図、第１１図はステータ翼の平面図である
。 １……ケーシング、４……ロータ、５……ロー
タ翼、６……ステータ翼、１６，１８……翼部、
１８ｂ……円周溝（切欠部）、１９……スペーサ
、１９ｂ……補助ステータ翼。 1 to 6 are diagrams showing an embodiment of the turbomolecular pump according to the present invention. FIG. 1 is an overall sectional view of the pump, FIG. 2 is a sectional view of the rotor blade and stator blade, and FIG. 3 is a plan view of the stator blade, FIG. 4 is a sectional view of the tip of the rotor blade, FIG. 5 is a perspective view of the spacer, and FIG. 6 is a view taken in the direction of the arrow in FIG. Figures 7 to 9 are diagrams showing conventional turbo molecular pumps, with Figure 7 being an overall sectional view of this pump, Figure 8 being a sectional view of rotor blades and stator blades, and Figure 9 being a sectional view of stator blades. 10 and 11 are views showing other conventional turbomolecular pumps, FIG. 10 is a cross-sectional view of the rotor blades and stator blades, and FIG. 11 is a plan view of the stator blades. 1... Casing, 4... Rotor, 5... Rotor blade, 6... Stator blade, 16, 18... Wing part,
18b... Circumferential groove (notch), 19... Spacer, 19b... Auxiliary stator blade.

Claims (1)

【実用新案登録請求の範囲】[Scope of utility model registration request] 放射外方へ延設され、ロータの軸線方向に向つ
て多段に形成されたロータ翼と、このロータ翼に
対向し、放射内方へ延設されたステータ翼と、こ
のステータ翼を前記ロータ翼に交互に重なり合う
ように保持するスペーサとを備えたターボ分子ポ
ンプにおいて、前記ロータ翼の先端部に切欠部を
形成し、この切欠部に遊嵌されるとともに前記先
端部と重なり合う補助ステータ翼部を前記スペー
サに形成したことを特徴とするターボ分子ポンプ
。 A rotor blade that extends radially outward and is formed in multiple stages in the axial direction of the rotor; a stator blade that faces the rotor blade and extends radially inward; and the stator blade is connected to the rotor blade. In the turbo-molecular pump, a notch is formed at the tip of the rotor blade, and an auxiliary stator blade is fitted loosely into the notch and overlaps the tip. A turbo molecular pump characterized in that the spacer is formed.
JP6272989U 1989-05-30 1989-05-30 Pending JPH031297U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6272989U JPH031297U (en) 1989-05-30 1989-05-30

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6272989U JPH031297U (en) 1989-05-30 1989-05-30

Publications (1)

Publication Number Publication Date
JPH031297U true JPH031297U (en) 1991-01-09

Family

ID=31592144

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6272989U Pending JPH031297U (en) 1989-05-30 1989-05-30

Country Status (1)

Country Link
JP (1) JPH031297U (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS50132312U (en) * 1974-04-16 1975-10-30
JP2002526720A (en) * 1998-10-07 2002-08-20 ライボルト ヴァークウム ゲゼルシャフト ミット ベシュレンクテル ハフツング Friction vacuum pump with stator and rotor
JP2006348765A (en) * 2005-06-13 2006-12-28 Shimadzu Corp Turbo molecular pump
WO2007004542A1 (en) * 2005-07-01 2007-01-11 Boc Edwards Japan Limited Turbo molecular pump

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS50132312U (en) * 1974-04-16 1975-10-30
JP2002526720A (en) * 1998-10-07 2002-08-20 ライボルト ヴァークウム ゲゼルシャフト ミット ベシュレンクテル ハフツング Friction vacuum pump with stator and rotor
JP2006348765A (en) * 2005-06-13 2006-12-28 Shimadzu Corp Turbo molecular pump
JP4661378B2 (en) * 2005-06-13 2011-03-30 株式会社島津製作所 Turbo molecular pump
WO2007004542A1 (en) * 2005-07-01 2007-01-11 Boc Edwards Japan Limited Turbo molecular pump

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