JPH041694U - - Google Patents
Info
- Publication number
- JPH041694U JPH041694U JP4020390U JP4020390U JPH041694U JP H041694 U JPH041694 U JP H041694U JP 4020390 U JP4020390 U JP 4020390U JP 4020390 U JP4020390 U JP 4020390U JP H041694 U JPH041694 U JP H041694U
- Authority
- JP
- Japan
- Prior art keywords
- blade
- vacuum pump
- rotating body
- exhaust port
- intake port
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Non-Positive Displacement Air Blowers (AREA)
Description
第１図は本考案に係わる真空ポンプの第１実施
例を示す縦断側面図、第２図は遠心ポンプ段の羽
根車を示す平面図、第３図乃至第５図は同真空ポ
ンプの第２，３，４実施例を示す縦断側面図、第
６図は従来の真空ポンプを示す縦断側面図、第７
図はその平面図である。
３８または１……動翼、３……回転体、３９ま
たは１０……静翼、１４……ハウジング、１２…
…吸気口、１３……排気口。
FIG. 1 is a longitudinal side view showing a first embodiment of a vacuum pump according to the present invention, FIG. 2 is a plan view showing an impeller of a centrifugal pump stage, and FIGS. 3 to 5 are a second embodiment of the same vacuum pump. , 3 and 4. FIG. 6 is a vertical side view showing a conventional vacuum pump. FIG. 7 is a vertical side view showing the conventional vacuum pump.
The figure is a plan view thereof. 38 or 1...Rotating blade, 3...Rotating body, 39 or 10...Stator blade, 14...Housing, 12...
...Intake port, 13...Exhaust port.
Claims (1)
翼とを吸気口と排気口との間に多段に組み合わせ
て、翼列を形成し、この翼列により気体を上記吸
気口から上記排気口へ圧縮しながら排気する真空
ポンプにおいて、前記回転体と前記動翼と前記ハ
ウジングと前記静翼との少なくとも１つを線膨張
係数５×１０−６／℃以下の材料により構成した
ことを特徴とする真空ポンプ。 The rotor blades of a rotating body that rotates at high speed and stationary blades on the housing side are combined in multiple stages between an intake port and an exhaust port to form a blade row, and this blade row moves gas from the intake port to the exhaust port. A vacuum pump that performs evacuation while compressing, characterized in that at least one of the rotating body, the rotor blade, the housing, and the stationary blade is made of a material having a linear expansion coefficient of 5×10 −6 /°C or less. Vacuum pump.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4020390U JPH041694U (en) | 1990-04-17 | 1990-04-17 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4020390U JPH041694U (en) | 1990-04-17 | 1990-04-17 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH041694U true JPH041694U (en) | 1992-01-08 |
Family
ID=31549789
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4020390U Pending JPH041694U (en) | 1990-04-17 | 1990-04-17 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH041694U (en) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS54117919A (en) * | 1978-03-06 | 1979-09-13 | Osaka Shinku Kiki Seisakusho | Turboomolecular pump |
-
1990
- 1990-04-17 JP JP4020390U patent/JPH041694U/ja active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS54117919A (en) * | 1978-03-06 | 1979-09-13 | Osaka Shinku Kiki Seisakusho | Turboomolecular pump |