JPS62184190U - - Google Patents
Info
- Publication number
- JPS62184190U JPS62184190U JP7256486U JP7256486U JPS62184190U JP S62184190 U JPS62184190 U JP S62184190U JP 7256486 U JP7256486 U JP 7256486U JP 7256486 U JP7256486 U JP 7256486U JP S62184190 U JPS62184190 U JP S62184190U
- Authority
- JP
- Japan
- Prior art keywords
- disks
- turbo
- rotating body
- molecular pump
- blades
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000919 ceramic Substances 0.000 claims 1
Landscapes
- Non-Positive Displacement Air Blowers (AREA)
Description
第１図は本考案に係わるターボ分子ポンプの一
実施例を示す縦断側面図、第２図は従来のターボ
分子ポンプを示す縦断側面図である。
１１……回転体、１１ａ……駆動軸、１１ｂ１
，１１ｃ１，１１ｄ１……デイスク、１１ｂ２，
１１ｃ２，１１ｄ２……翼。
FIG. 1 is a longitudinal side view showing an embodiment of a turbo-molecular pump according to the present invention, and FIG. 2 is a longitudinal side view showing a conventional turbo-molecular pump. 11... Rotating body, 11a... Drive shaft, 11b 1
, 11c 1 , 11d 1 ... disk, 11b 2 ,
11c 2 , 11d 2 ... wings.
Claims (1)
転可能に支持したターボ分子ポンプにおいて、複
数個のデイスクと同各デイスクのそれぞれに設け
た複数枚の翼とを有し、同各デイスク及び同各翼
をセラミツクスにより形成するとともに、同各デ
イスクを多段に接合して前記回転体を構成したこ
とを特徴とするターボ分子ポンプ。 A turbo-molecular pump in which a rotating body having multi-stage blades is rotatably supported by a bearing has a plurality of disks and a plurality of blades provided on each of the disks. 1. A turbo-molecular pump characterized in that the rotating body is formed of ceramics and is formed by joining the same disks in multiple stages.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7256486U JPS62184190U (en) | 1986-05-16 | 1986-05-16 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7256486U JPS62184190U (en) | 1986-05-16 | 1986-05-16 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62184190U true JPS62184190U (en) | 1987-11-21 |
Family
ID=30916122
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7256486U Pending JPS62184190U (en) | 1986-05-16 | 1986-05-16 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62184190U (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2012508340A (en) * | 2008-11-07 | 2012-04-05 | オーリコン レイボルド バキューム ゲーエムベーハー | Vacuum pump rotor |
| JP5541464B2 (en) * | 2009-02-18 | 2014-07-09 | 株式会社島津製作所 | Turbo molecular pump |
| CN105697395A (en) * | 2014-12-15 | 2016-06-22 | 普发真空有限公司 | Rotor assembly for a vacuum pump and method for producing the same |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6172896A (en) * | 1984-09-17 | 1986-04-14 | Japan Atom Energy Res Inst | High speed rotary pump |
-
1986
- 1986-05-16 JP JP7256486U patent/JPS62184190U/ja active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6172896A (en) * | 1984-09-17 | 1986-04-14 | Japan Atom Energy Res Inst | High speed rotary pump |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2012508340A (en) * | 2008-11-07 | 2012-04-05 | オーリコン レイボルド バキューム ゲーエムベーハー | Vacuum pump rotor |
| JP5541464B2 (en) * | 2009-02-18 | 2014-07-09 | 株式会社島津製作所 | Turbo molecular pump |
| CN105697395A (en) * | 2014-12-15 | 2016-06-22 | 普发真空有限公司 | Rotor assembly for a vacuum pump and method for producing the same |
| JP2016114059A (en) * | 2014-12-15 | 2016-06-23 | プファイファー・ヴァキューム・ゲーエムベーハー | Rotor device for vacuum pump, and method of manufacturing the same |