JP2016114059A - Rotor device for vacuum pump, and method of manufacturing the same - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide an improved rotor device for a vacuum pump, especially for a turbo molecular pump, which can be manufactured by a simple method on a manufacturing technology, and has improved characteristics about a generated material load at a joint part.SOLUTION: A rotor device for a vacuum pump, especially for a turbo molecular pump, has a rotor shaft (15), and at least one rotor disc (66). The rotor disc has a center storage opening portion for storing the rotor shaft (15). At that time, the rotor disc (66) is provided on the rotor shaft (15), and a mechanical connection (154) is formed between the rotor disc (66) and the rotor shaft (15). The mechanical connection (154) is materialized by a thermal joint process.SELECTED DRAWING: Figure 1

Description

  The invention relates to a rotor device according to the superordinate concept of claim 1, a rotor device according to the superordinate concept of claim 7, a method for manufacturing a rotor device according to the superordinate concept of claim 14, and a superordinate concept of claim 15. The invention relates to a method for manufacturing a rotor device.

  Vacuum pumps, such as turbomolecular pumps, are used in different technical areas to achieve the vacuum required for each process. A turbo-molecular pump typically has one rotor shaft, a plurality of rotor disks connected to the rotor shaft, and a stator disk disposed between the rotor disks. The rotor disk and the stator disk then each have a plurality of blades. The vanes are also referred to as blades. The vanes form a pumping structure and perform the desired pumping action during high speed rotation of the rotor device relative to the stator device.

  From the prior art, it is known to manufacture a turbomolecular pump rotor device by machining from a monolith block or from a plurality of individual rotor disks. In that case, the production from one lump is extremely time consuming and complicated. The combination of rotor devices from multiple disks, on the other hand, takes less time and is less complicated to manufacture. In that case, the rotor disks are manufactured individually and subsequently combined with the shaft. Joining is performed by press fitting of the rotor disk onto the rotor shaft (German: Aufpressen), shrink fitting (or shrink fitting, German: Aufschlumpen), or scissor fitting (German: Aufklemen).

  From patent document 1 it is further known to combine the rotor shaft from a plurality of rotor elements. Each rotor element then has a circular, cylindrical extension. The extensions are each connected to a rotor disk. The rotor elements are connected to each other through the contraction process and also form the rotor shaft.

  In a rotor device having a rotor shaft having a press-fitted, shrink-fitted or pinched rotor disc, the rotor disc needs to be fixed to the rotor shaft with a high joining force. This is because it can only be ensured that the rotor disk does not come off the rotor shaft during operation. In particular, the bonding force is reduced on the basis of strong centrifugal forces at high rotational speeds of the rotor device which can occur in vacuum pumps, in particular in turbomolecular pumps. The bonding force may also decrease due to the influence of temperature. Moreover, the material load on the joint between the rotor disk and the rotor shaft is already very high in the stopped state. Furthermore, at increasing rotor speeds, the relative stress in the rotor disk is significant under the influence of centrifugal force.

International Publication No. 2010/052056 A1 Specification

  The object of the present invention is therefore an improved rotor arrangement for vacuum pumps, in particular for turbomolecular pumps, which can be manufactured in a simple manner in terms of manufacturing technology and with regard to the material loads generated thereby and improvements It is to provide what has the properties obtained with respect to the joint.

  This problem is solved by a rotor device having the features of claim 1 or a rotor device having the features of claim 7.

  The invention further aims to provide a method for the manufacture of an improved rotor arrangement for a vacuum pump.

  This problem is solved by a method for manufacturing a rotor device having the features of claim 14 or a method for manufacturing a rotor device having the features of claim 15.

  The rotor device according to the invention for a vacuum pump, in particular a turbomolecular pump, has a rotor shaft and at least one rotor disk. The rotor disk has a central receiving opening for receiving the rotor shaft. In this case, the rotor disk is provided on the rotor shaft, and a mechanical connection is formed between the rotor disk and the rotor shaft. At that time, the mechanical connection is realized by a thermal bonding process.

  Therefore, in the rotor device according to the invention, the rotor shaft is not press-fitted, shrink-fitted, or pinched on the rotor shaft, and is mechanically connected to the rotor shaft by a thermal joining process. This can result in no or only a slight material load between the rotor disk and the rotor shaft, which also improves the behavior of the rotor shaft, especially at high rotations (especially as occurs in turbomolecular pumps). Is possible. Due to the mechanical connection realized by the thermal joining process between the rotor disk and the rotor shaft, the rotor shaft and the rotor disk are combined together in an unreleasable manner for a long time. The rotor device according to the invention thus has at least basically the same characteristics as a monolithically manufactured rotor device, in particular with regard to internal stress behavior. In that case, in the rotor device according to the invention, the rotor disk can be manufactured individually, which means that the time cost and the manufacturing cost are low compared to the manufacturing of the monolithic rotor device.

  The thermal joining process can in particular be a welding process, preferably laser welding, electron beam welding, friction welding, friction stir welding, or a combination of these welding processes, or a soldering process.

  In accordance with an aspect of the present invention, the inner wall of the rotor disk that borders the receiving opening surrounds the outer surface of the rotor shaft, and the mechanical connection is formed between the inner wall and the outer surface. Therefore, the inner surface of the rotor disk is mechanically connected to the outer surface of the rotor shaft that forms the outer periphery. This has the advantage that a mechanical connection can be made between the inner wall and the outer surface, in particular by a simple thermal joining process. This is because when the rotor disk is inserted into the rotor shaft, the inner wall portion and the outer surface face each other.

  Preferably, the mechanical connection is formed over the entire circumference of the rotor shaft between the outer surface and the inner wall portion. Therefore, when viewed in the circumferential direction of the rotor shaft, the mechanical connection is formed between the outer surface of the rotor shaft and the inner wall portion of the rotor disk over the entire circumference of the rotor shaft. As a result, the operating characteristics of the rotating rotor device can be improved. In particular, the imbalance caused by the mechanical connection between the rotor disk and the rotor shaft can be prevented or at least kept low.

  The mechanical connection between the inner wall portion and the outer surface can be formed over the entire axial length of the inner wall portion. As a result, a particularly rigid mechanical connection is achieved between the rotor shaft and the rotor disc, so that the rotor disc can be disengaged from the rotor shaft even at very high rotational speeds and at high centrifugal forces caused thereby. There is no.

  Preferably, the rotor disk is not press-fit, shrink-fitted or pinched to the rotor shaft (in addition to the mechanical connection between the rotor disk and the rotor shaft achieved by a thermal joining process). Material loading caused by press fit, shrink fit or pinch fit can thus be prevented.

  Preferably, the rotor shaft has at least one part. The outer diameter of the rotor shaft is larger than the outer diameter of the preceding region in the axial direction and smaller than the outer diameter of the subsequent region of the rotor shaft in the direction. In this case, at least one rotor disk is inserted into the part. The rotor shaft can thus be formed in the form of a stepped rotor shaft, which rotor region has regions or parts with different outer diameters when viewed in its longitudinal extension. In this case, at least one rotor disk, preferably just one rotor disk, is inserted into the part. When one or more rotor disks, for example two or three rotor disks, are inserted into the part, this is usually a relatively thin or flat rotor disk. A plurality of rotor disks can be connected to the rotor shaft during the joining process.

  Preferably, a region preceding in the axial direction directly follows the portion. This is also the case for subsequent areas. Therefore, the transition from the preceding region to the portion and from the portion to the subsequent region preferably changes suddenly.

  Preferably, the axial length of the rotor shaft portion corresponds at least essentially to the axial length of at least one rotor disk. Preferably, the axial length of the rotor shaft portion corresponds at least essentially to the axial length of the inserted rotor disk. Subsequent regions are followed by another portion of the rotor shaft as viewed in the axial direction. Its outer diameter is larger than the outer diameter of the subsequent area, and here too it is possible for at least one rotor disk to be inserted. In so doing, preferably the axial length of the subsequent area is selected such that a desired spacing occurs between the part and the rotor disk inserted into the other part.

  The present invention relates to a rotor device for a vacuum pump, in particular a turbomolecular pump, having two or more rotor disks. These rotor disks are aligned with respect to the axis of rotation and are provided continuously in the direction of the axis of rotation. At that time, a mechanical connection is formed between adjacent rotor disks. This mechanical connection is realized by a thermal bonding process directly between adjacent rotor disks.

  In the rotor device, adjacent rotor disks are mechanically connected directly to each other by a thermal joining process. This has the advantage that the side-by-side rotor disks can themselves form the rotor shaft.

  The thermal joining process is preferably a welding process, such as laser welding, electron beam welding, friction welding, friction stir welding, or a combination of these welding processes, or a soldering process.

  Since the rotor disks can be manufactured individually and subsequently combined together by mechanical connection by the thermal joining process of the rotor disks, the rotor device formed from this is basically a monolithic rotor device Have the same characteristics. The rotor device according to the invention can be manufactured at a lower cost compared to the monolithic rotor device.

  According to one embodiment of the present invention, each rotor disk has a disk-like body. This is provided with a rotor blade that rises radially outward with respect to the rotational axis. A mechanical connection is formed between the disk-like bodies of adjacent rotor disks. The disk-like bodies of adjacent rotor disks are thus directly connected to each other by a thermal bonding process. This allows a long-term connection between the rotor disks to be easily achieved. This reliably combines the rotor disks even at high rotations.

  Preferably, the rotor disk is such that the lower surface of the disk-like body of the rotor disk faces the upper surface of the disk-like body of the adjacent rotor disk, and the mechanical connection is between the lower surface of one rotor disk and the other rotor disk. It is provided continuously so as to be formed between the upper surfaces. Thereby, a direct mechanical connection between adjacent rotor disks can be achieved.

  Preferably, a center piece is formed on the lower surface of the disk-shaped body of each rotor disk and on the upper surface of the disk-shaped body of each rotor disk so as to be complementary to the accommodation opening. At that time, the center piece of the disk-shaped body of the rotor disk is inserted into the receiving opening of the disk-shaped body of the adjacent rotor disk, in particular, forming an insertion connection. Adjacent rotor disks can thus be easily stacked and combined. In particular, after insertion, the rotor disks can be mechanically connected to each other for a long time by a thermal joining process.

  In accordance with one aspect of the invention, the centerpiece has an outer diameter that is formed in the form of an interference fit with respect to the inner diameter of the receiving opening. Thereby, it can be achieved that the inserted rotor disks are already firmly connected to one another by means of a plug connection realized between the receiving opening and the center piece. This is also advantageous, for example, for the thermal joining of the rotor disks.

  Preferably, the accommodation opening and the center piece are provided on the upper surface or the lower surface of each disk-like body in the center with respect to the rotation axis. This makes it easy to achieve centering of the disks with respect to the rotation axis or rotation axis.

  The present invention also relates to a rotor device according to the invention, a stator device combined with the rotor device, and a vacuum pump having a drive unit for rotationally driving the rotor device.

  The vacuum pump is in particular a turbo-molecular pump or other type of vacuum pump, in which a rotor rotating at high speed, in particular a rotor rotating at a rotational speed of more than 10,000 revolutions / minute, is used. It is a pump.

  The invention also relates to a method for the production of a rotor device for a vacuum pump, in particular a turbomolecular pump. In this method, a rotor disk having a central receiving opening for receiving the rotor shaft is provided on the rotor shaft, and a mechanical connection is formed between the rotor disk and the rotor shaft. At that time, the mechanical connection is realized by a thermal joining process.

  Preferably, the inner wall portion that borders the receiving opening surrounds the outer surface of the rotor shaft inserted into the rotor shaft, and the mechanical connection between the inner wall portion of the rotor disk and the outer surface of the rotor shaft is provided. It is formed. The mechanical connection is preferably formed between the outer surface of the rotor shaft and the inner wall of the rotor disk, as viewed over the entire circumference of the rotor shaft. Preferably, the mechanical connection is made over the entire length of the inner wall between the inner wall of the rotor disk and the outer surface of the rotor shaft.

  The rotor disc is not particularly press-fit, shrink-fit or pinched on the rotor shaft.

  In accordance with one preferred embodiment of the present invention, the rotor shaft, the outer diameter of which is larger than the outer diameter of the region of the rotor shaft that precedes it in the axial direction, and the rotor shaft that follows in the axial direction. A rotor shaft having at least one part smaller than the outer diameter of the region to be covered is provided, and the rotor disk is inserted over the part, and a mechanical connection is established between the part and the rotor disk by a thermal joining process. Created.

  The invention also relates to a method for the manufacture of a rotor device for a vacuum pump, in particular a turbomolecular pump, having two or more rotor disks. These rotor disks are aligned with respect to the rotation axis and are provided continuously in the direction of the rotation axis. In doing so, a mechanical connection is formed between adjacent rotor disks, in which case the mechanical connection is realized by a thermal joining process directly between adjacent rotor disks.

  According to one embodiment of the present invention, a rotor disk having one disk-like body is provided. The disk-like body is provided with a plurality of rotor blades that stand up radially outward with respect to the rotation axis. A mechanical connection is then made directly between the disk-like bodies of adjacent rotor disks.

  In particular, the rotor disk is continuously provided so that the lower surface of the disk-shaped body of one rotor disk faces the upper surface of the disk-shaped body of the adjacent rotor disk. A mechanical connection is then formed between the lower surface of one rotor disk and the upper surface of the other adjacent rotor disk.

  Preferably, a receiving opening is formed on the lower surface of the disk-shaped body of each rotor disk, and a center piece formed complementary to the receiving opening is formed on the upper surface of the disk-shaped body of each rotor disk. In this case, the center piece of the disk-shaped body of the rotor disk is inserted into the receiving opening of the disk-shaped body of the adjacent rotor disk, in particular this is done while forming a plug connection between both rotor disks. Is called.

  The joining process used in the method according to the invention is in particular a welding process, in particular laser welding, electron beam welding, friction welding, friction stir welding or a combination of these welding processes, or a soldering process.

  The rotor disks can be manufactured individually, in particular individually, by a laser. This is in particular by laser removal and / or laser cutting.

  The invention also relates to a rotor device for vacuum pumps, in particular turbomolecular pumps. The rotor device has a rotor shaft and a rotor disk, and the rotor disk has a central receiving opening for receiving the rotor shaft. In this case, the rotor disk is provided on the rotor shaft, and a mechanical connection is formed between the rotor disk and the rotor shaft. At that time, the mechanical connection is realized by bonding. Depending on the formation of the mechanical connection, an adhesive can be used.

  The invention also relates to a rotor device for a vacuum pump, in particular a turbomolecular pump, having two or more rotor disks. The rotor disks are aligned with respect to the axis of rotation and are provided in succession in the direction of the axis of rotation. At that time, a mechanical connection is formed between adjacent rotor disks. In this case, the mechanical connection is realized by bonding directly between adjacent rotor disks.

  In the following, the invention will be described by way of example on the basis of advantageous embodiments with reference to the accompanying drawings.

Sectional drawing of the vacuum pump which concerns on one embodiment of this invention Simplified sectional view of one variation of the rotor device according to the invention Simplified sectional view of another variation of the rotor device according to the invention

  The vacuum pump shown in FIG. 1 has a pump inlet 10 and a pump outlet 12 surrounded by an inlet flange 11, and a process gas pump stage for conveying a process gas extending to the pump inlet 10 to the pump outlet 12. The vacuum pump has a housing 64 and a rotor 16 disposed in the housing 64. The rotor 16 has a rotor shaft 15 that is rotatably supported about the rotation shaft 14.

  In this embodiment, the pump is formed as a turbo molecular pump. It has a plurality of turbomolecular pump stages that are serially connected to each other and have a pumping action. These pump stages have a plurality of radial rotor disks 66 fixed to the rotor shaft 15 and a plurality of stator disks 68 disposed between the rotor disks 66 and fixed in the housing 64. At that time, the rotor disk 66 and the adjacent stator disk 68 form a pump stage. The stator disks 68 are held at predetermined intervals in the axial direction by the spacer ring 70.

  In addition, the vacuum pump has four Holbeck pump stages which are arranged in a radial manner in German and are connected in series with one another. The rotor of the Holbeck pump stage has a rotor hub 72 formed integrally with the rotor shaft 15, and two holbeck rotor sleeves 74, 76 fixed to the rotor hub 72 and supported by the cylinder side surface. . Further, two holbeck stator sleeves 78 and 80 having a cylinder side shape are provided. They are likewise oriented coaxially with respect to the rotor shaft 14 and are nested in the radial direction. The third Holbeck stator sleeve is formed by the receiving portion 132 of the housing 64. The housing portion is used for housing and fixing the drive motor 20.

  The pumping surface of the Holbeck pump stage is formed by the sides of the cover, that is, the Holbeck rotor sleeves 74 and 76, the Holbeck stator sleeves 78 and 80, and the radially inner and outer surfaces of the receiving part 132. The radially inner surface of the outer holbeck stator sleeve 78 faces the radially outer surface of the outer holbeck rotor sleeve 74, forming a radial holbeck gap 82, and the first holbeck Form a pump stage. The radially inner surface of the outer Holbeck rotor sleeve 74 faces the radially outer surface of the inner Holbeck stator sleeve 80, forming a radial Holbeck gap 84, and this and the second Holbeck pump. Form a step. The radially inner surface of the inner Holbeck stator sleeve 80 faces the radially outer surface of the inner Holbeck rotor sleeve 76, forming a radial Holbeck gap 86, and the third Holbeck pump. Form a step. The radially inner surface of the inner Holbeck rotor sleeve 76 faces the radially outer surface of the receiving portion 132 while forming a radial Holbeck gap 87 and forms a fourth Holbeck pump stage with it. To do.

  The above-described pumping surfaces of the housing portion 132 and the Holbeck stator sleeves 78 and 80 have a plurality of Holbeck grooves that change in a spiral shape in the axial direction around the plurality of rotation axes. On the other hand, the opposed cover sides of the Holbeck rotor sleeves 74, 76 are smoothly formed and carry gas into the Holbeck groove during operation of the vacuum pump.

  A roller bearing 88 is provided in the area of the pump outlet 12 and a permanent magnet bearing 90 is provided in the area of the pump inlet 10 for the rotatable support of the rotor shaft 15.

  In the region of the roller support portion, a conical splash nut 92 is provided on the rotor shaft 15. This has an outer diameter that increases towards the rotor bearing 88. The splash nut 92 is in sliding contact with at least one scraper (German: Abstriefer) of the working medium accumulator. The working medium accumulator has a plurality of absorbent disks 94 stacked on top of each other. These disks contain a working medium (for example, a lubricating medium) for the roller bearing 88. During operation of the vacuum pump, the working medium is transferred from the working medium accumulator through the scraper to the rotating splash nut 92 due to the capillary effect, and the splash nut 92 grows along the splash nut 92 as a result of centrifugal force. In the direction of the outer diameter, it is conveyed towards the roller bearing 88, where it fulfills, for example, a lubricating function. The roller bearing 88 and the working medium accumulator are surrounded by a tank-shaped insert (German: Einsatz) 96 and a vacuum pump lid element 98.

  The permanent magnet bearing has a rotor-side bearing half 100 and a stator-side bearing half 102. Each of these has one ring stack. This ring laminated portion is composed of a plurality of rings 104 or 106 of permanent magnets laminated together in the axial direction. The magnet rings 104 and 106 face each other while forming a radial bearing gap 108. At this time, the rotor-side magnet ring 104 is arranged radially outward, and the stator-side magnet ring 106 is arranged radially inside. The magnetic field present in the bearing gap 108 causes a magnetic repulsion between the magnet rings 104 and 106. The repulsive force supports the rotor shaft 15 in the radial direction.

  The rotor-side magnet ring 104 is supported by the rotor-side carrier portion 110. This surrounds the magnet ring 104 radially outward. The stator-side magnet ring is carried by the stator-side carrier portion 112. It extends through the magnet ring 106 and is suspended on the radial strut 114 of the housing 64. Parallel to the axis of rotation 14, the rotor-side magnet ring 104 of the carrier part 110 protrudes in one direction by a lid element 116 connected to the carrier part 110 and in the other direction in the radial direction. It is fixed by the shoulder part. The stator-side magnet ring 106 is parallel to the rotation axis 14, and in one direction, a fixing ring 118 connected to the carrier portion 112, and a balance element 112 disposed between the fixing ring 118 and the magnet ring 106. And on the other side is fixed by a support ring 122 connected to the carrier part 112.

  Inside the magnet bearing, an emergency or safety bearing (German: Not-bzw. Fanglager) 16 is engaged with the stator and forms a radial stop for the rotor 16. This stopper prevents the structure on the rotor side from colliding with the structure on the stator side. The safety bearing 124 is formed as an unlubricated roller bearing. Then, a radial gap is formed with the rotor 16 and / or the stator. This realizes that the safety bearing 124 is not engaged during normal pump operation. The radial deflection (the safety bearing 124 is engaged during the deflection) is dimensioned sufficiently large so that the safety bearing 124 does not engage during normal operation of the vacuum pump. At the same time, it is sufficiently small to prevent the rotor side structure from colliding with the stator side structure in all situations.

  The vacuum pump has a drive motor 20 for rotating the rotor 16. The drive motor 20 has a motor stator 22. It has one core 38 and one or more coils 42, which are represented only briefly in FIG. These are fixed in the groove of the core 38 provided on the radially inner side surface of the core 38.

An anchor (German) of the drive motor 20 is formed by the rotor 16. The rotor shaft 15 extends through the motor stator 22. A permanent magnet device 128 is fixed radially outwardly to the portion of the rotor shaft 15 that extends through the motor stator 22. An intermediate chamber 24 is provided between the motor stator 22 and the portion of the rotor 16 that extends through the motor stator 22. This includes radial motor gaps. Through the motor gap, the motor stator 22 and the permanent magnet device 128 influence magnetically for transmission of driving torque.

  The permanent magnet device 128 is fixed to the rotor shaft 15 by a fixing sleeve 126 inserted through the rotor shaft 15 in the axial direction. The capsule 130 surrounds the permanent magnet device 128 at its radially outer surface and seals it against the intermediate chamber 134.

  The motor stator 22 is fixed within the housing 64 by a housing portion 132 fixed to the housing. This housing part surrounds the motor stator 22 radially outward and supports the motor stator 22 in the radial and axial directions. The accommodating portion 132 borders the motor chamber 18 together with the rotor hub 72, and the drive motor 20 is accommodated in the motor chamber.

  The motor chamber 18 has an inlet 28 arranged on the side of the intermediate chamber and connected to the fourth Holbeck pump stage located on the inner side to conduct gas, and the intermediate chamber 24 An outlet disposed on the opposite side and having an outlet 30 connected to the pump outlet 12 to conduct gas.

  The core 38 of the motor stator 22 has a void portion 34 in the region shown on the left side in FIG. 1 on the radially outer side surface, and this void portion is a region adjacent to this in the accommodating portion 132. Together with this, one channel 32 is formed. Through this channel, the process gas transferred into the motor chamber 18 can pass through the intermediate chamber 24 and be transferred from the inlet 28 to the outlet 30.

  On the gas path, process gas reaches from the pump inlet 10 to the pump outlet 12. This can be seen by the arrow 26 in FIG. The process gas is conveyed from the pump inlet 10 first through the turbomolecular pump stage and then sequentially through the Holbeck pump stage. The gas generated from the fourth Holbeck pump stage reaches the motor chamber 18 and is conveyed from the inlet of the motor chamber 18 through the channel 32 to the outlet 30 and the pump outlet 12 of the motor chamber 18.

  In the vacuum pump of FIG. 1, the rotor 16 forms a rotor device. This has a rotor shaft 15 and a rotor disk 66 provided on the rotor shaft 15. The rotor 16 here means the rotor device according to the invention. In this rotor apparatus, the mechanical connection between the rotor shaft 154 and each rotor disk 66 is realized by a thermal joining process. In particular, each rotor disk 66 can be welded to the rotor shaft 15. This is, for example, laser welding, electron beam welding, friction welding, friction stir welding, or a combination of these welding methods. As an alternative, the rotor disk 66 can be soldered to the rotor shaft 15 (German: Verloeten).

  FIG. 2 shows a variation of the rotor device according to the invention. The rotor device includes a rotor shaft 15 and a plurality of rotor disks 66 that are stepped. Each rotor disk 66 has a ring-shaped body 134. This ring-shaped body is provided with a central accommodation opening for accommodating the rotor shaft 15 and a rotor blade 135 arranged offset from each other as viewed in the circumferential direction on the outer periphery thereof.

  The ring-shaped body 134 of the rotor disk 66 has an inner wall portion 138 (located radially inside with respect to the rotation shaft 14 and bordering the accommodation opening). The inner wall portion faces the outer surface of the rotor shaft 15 in the rotor disk 66 inserted into the rotor shaft 15 (see FIG. 2). The mechanical connection between each rotor disk 66 and the rotor shaft 15 is achieved by the inner wall portion 138 of each rotor disk 66 being mechanically connected to the outer surface of the rotor shaft 15 by a thermal bonding process. It is done. In doing so, a mechanical connection is formed between the outer surface and the inner wall 138 over the entire circumference of the rotor shaft 15 and over the entire axial length of the inner wall 138 of each rotor disk 66. . At this time, the axial length relates to the longitudinal extension of the inner wall portion 138 with respect to the rotation shaft 14.

  Due to the thermal joining of the rotor disk 66 to the rotor shaft 15, the rotor disk 66 is fixedly connected to the rotor shaft 15 over a long period of time. At that time, the rotor disk 66 does not need to be additionally press-fitted, shrink-fitted, or pinched to the rotor shaft 15. Preferably, the inner diameter of the receiving opening of each rotor disk 66 and the outer diameter of each part of the rotor shaft 15 (in which each rotor disk 66 is inserted) are a fit (or intermediate fit, German). : Ueberggangspassing), or light press-fit (German: Presspassing).

  In the rotor device of FIG. 2, the rotor shaft 15 is formed as a stepped rotor shaft. The rotor shaft 15 has a first portion 140, a second portion 142, and a third portion 144. A first region 146 of the rotor shaft 15 is present in front of the first portion 140 when viewed in the direction of the rotation shaft 14. A third portion 148 of the rotor shaft 15 exists between the first portion 140 and the second portion 142. Between the second part 142 and the third part 144 there is a third region 150 of the rotor shaft 15 and in the axial direction behind the third part 144 is a fourth region of the rotor shaft 15. 152 exists. As shown in FIG. 2, in the rotor shaft 15, the stepped shape or the stepped shape is such that the outer diameter increases from part to part or from region to region in the axial direction. Achieved by:

  During the manufacture of the rotor device of FIG. 2, the central receiving opening of the third part 144 is matched to the outer diameter of the third part 144 (especially a fit or a light press fit). A rotor disk 66 having an inner diameter) is inserted. Subsequently, a mechanical connection 154 is formed between the inner wall portion 138 of the rotor disk 66 and the outer surface of the third portion 144 by a thermal bonding process.

  When the disc 66 is inserted onto the third portion 144, a ring-shaped wall portion 156 that moves in the radial direction (the wall portion is located outside the outer surface of the third portion 144 and the fourth portion 152. Which forms a transition between the sides) acts as a stopper for the rotor disk 66. At this time, the mechanical connection is formed by a thermal bonding process between the ring-shaped body 134 and the ring-shaped wall portion 156.

  After the rotor disk 66 is mechanically connected to the third part 144, the rotor disk 66 is inserted into the second part 142 in a corresponding manner. The receiving opening of the rotor disk has an inner diameter that is adapted to the outer diameter of the second part 142, in particular in the form of an interference fit or in the form of a light press fit. Here again, the mechanical connection 154 between the inner wall 138 of the rotor disk 66 and the outer surface of the second portion 142 is formed by a thermal bonding process. In addition, a mechanical connection can be formed between the ring-shaped wall 158 and the ring state 134 of the rotor disk 66 by a thermal bonding process. The ring-shaped wall 158 then transitions between the outer surface of the second portion 142 and the outer surface of the third region 150, as viewed in the radial direction, and the rotor disk 66 is moved to the second portion 142. Used when inserting as a stopper.

  As described above in a corresponding manner, the rotor disk 66 (whose opening is adapted to the outer diameter of the first part 140, in particular in the form of an interference fit or a light press fit) A mechanical connection is made between the outer surface of the first portion 140 and the inner wall portion 138 by being inserted over the portion 140 and by a thermal bonding process. In addition, a mechanical connection between the ring-shaped wall 160 and the rotor disk 66 can also be realized by a thermal joining process. The ring-shaped wall 60 then extends between the outer surface of the first part 140 and the outer surface of the second region 148 in the radial direction.

  The length in the axial direction of each portion 140, 142, 144 is matched to the length in the axial direction of each rotor disk 66 or the length in the axial direction of the inner wall portion 138 of each rotor disk 66. In addition, the axial length of the region 150 corresponds to a predetermined spacing between the rotor disks 66 inserted into the second and third portions 142, 144. Correspondingly, the axial length of the second region 148 is matched to the desired spacing between the rotor disks 66 inserted into the first and second portions 140, 142.

  In the rotor apparatus of FIG. 2, the mechanical connection 154 between the rotor shaft 15 and each rotor disk 66 is realized by a thermal joining process. As a result, the rotor disk 66 is held on the rotor shaft 15 for a long period of time. Based on the use of a thermal joining process for the realization of the mechanical connection 154, the rotor device basically has the same characteristics as a monolithically manufactured rotor device, and additionally, the rotor shaft 15 and the rotor disk 66 can be manufactured individually. In this case, the rotor disk 66 can be manufactured, for example, by laser ablation (German) and / or laser cutting.

  The arrangement of the three rotor disks 66 on the rotor shaft 15 of the rotor device of FIG. 2 is merely an example. Of course, it is also possible for the rotor shaft 15 to have a plurality or a small number of stages. As a result, more or less rotor disks can be provided on the rotor shaft.

  It is possible that more than one rotor disk is inserted on at least one part 140, 142, 144. For example, at least two or three thin rotor disks can be inserted on one part 140, 142, 144. The rotor disk can be fixed to the rotor shaft 15 by a joining process.

  FIG. 3 shows another variation of the rotor device according to the invention. In this variation, three rotor disks 66 are aligned with respect to the rotating shaft 14 and are provided continuously in the direction of the rotating shaft 14. Each mechanical connection 154 is directly realized between adjacent rotor disks 66 by a thermal bonding process. The joining process is again here also a welding process, such as laser welding, electron beam welding, friction welding, friction stir welding, or a combination of these welding processes, or a soldering process. In the rotor apparatus of FIG. 3, adjacent rotor disks 66 are thus directly welded or soldered together so that a direct mechanical weld connection or solder connection 154 results in the rotor apparatus of FIG. Are formed between adjacent rotor disks 66.

  Each rotor disk 66 has one disk-like body 162. A rotor blade 136 is provided on an outer surface located on the outer side in the radial direction so as to stand away from the rotation axis in the radial direction. At this time, the plurality of rotor blades 136 that are offset from each other when viewed in the circumferential direction are provided on the outer surface of each disk-like body 162.

  Each disk-like body 162 is solidly formed (massiv) in the represented variation. Alternatively, each disk-like body 162 can have a central through opening (especially a circular cross section). This is to achieve material savings and to reduce the weight of the rotor device.

  Each disk-like body 162 has an upper surface and a lower surface. At this time, the rotor disk 66 is continuously provided so that the lower surface of the disk-shaped body 162 of the rotor disk 66 faces the upper surface of the disk-shaped body 162 of the adjacent rotor disk 66. A mechanical connection 154 is formed between the upper and lower surfaces of adjacent rotor disks 66. That is, the lower surface of the rotor disk 66 is directly mechanically connected to the upper surface of the rotor disk 66 by thermal joint connection.

  For centering the rotating disk 14 of the rotor disk 66, an accommodation opening 164 is formed on the lower surface of the disk-like body 162, and a center piece (German: Aufsatz) 166 is formed on each upper surface. The center piece can also be seen as a convex part (German: Noppe). As shown in FIG. 3, the center piece 166 of the rotor disk 66 is inserted into the receiving opening 164 of the adjacent rotor disk 66.

  The outer diameter of the centerpiece 166 can be formed in the form of at least a slight interference fit (German) with respect to the inner diameter of the receiving opening 164. Thus, between the adjacent interleaved rotor disks 66, one shape-coupled connection 168 is formed in the radial direction with respect to the axis of rotation, this connection being based on at least a light interference fit. This also causes a force coupling between both rotor disks 66 in the axial direction.

  In addition, the housing opening 164 and the center piece 166 are provided at the center of the disk-shaped body 162 with respect to the ring-shaped roof 14 on the upper surface or the mask. Thus, when the plurality of rotor disks 66 are inserted together, centering is performed with respect to the rotating shaft 14 of the rotor device to be formed.

  The receiving opening 164 and correspondingly the centerpiece 166 preferably has a circular cross section. However, other cross sections are possible, for example a square cross section.

  As shown in FIG. 3, rotor disks 66 aligned with each other and mechanically connected to each other by a thermal bonding process can form a rotor shaft. The quantity of three rotor disks 66 shown in FIG. 3 is again represented here merely as an example.

DESCRIPTION OF SYMBOLS 10 Pump inlet 11 Inlet flange 12 Pump outlet 14 Rotating shaft 15 Rotor shaft 16 Rotor 18 Motor chamber 20 Drive motor 22 Motor stator 24 Intermediate chamber 26 Arrow, gas path 28 Inlet 30 Outlet 32 Channel 34 Space 38 Core 42 Coil 64 Housing 66 Rotor disc 68 Stator disc 70 Spacer ring 72 Rotor hub 74, 76 Holbeck rotor sleeve 78, 80 Holbeck stator sleeve 82, 84, 86, 87 Holbeck gap 88 Roller bearing 90 Permanent magnet bearing 92 Splash nut 94 Absorbency Disc 96 Tank-shaped insert 98 Cover element 100 Rotor side support half 102 Stator side support half 104, 106 Magnet ring 1 08 Bearing gaps 110 and 112 Carrier portion 114 Support column 116 Lid element 118 Fixing ring 120 Balance element 122 Support ring 124 Safety support 126 Fixing sleeve 128 Permanent magnet device 130 Capsule 132 Housing part 134 Ring-shaped body 136 Rotor blade 138 Inner side wall Part 140 First part 142 Second part 144 Third part 146 First area 148 Second area 150 Third area 152 Fourth area 154 Mechanical connection 156 Ring-shaped wall 158 Ring-shaped wall 158 Wall 160 Ring-shaped wall 162 Disc-shaped body 164 Housing opening 166 Center piece 168 Shape connection

Claims (15)

A rotor device for a vacuum pump, in particular a turbomolecular pump, comprising a rotor shaft (15) and at least one rotor disk (66), the caller disk being used for accommodating the rotor shaft (15) With a central receiving opening, in which a rotor disk (66) is provided on the rotor shaft (15) and mechanically connected between the rotor disk (66) and the rotor shaft (15) ( 154) is formed,
Rotor device characterized in that the mechanical connection (154) is realized by a thermal joining process. The inner wall (138) of the rotor disk (66), which surrounds the receiving opening, surrounds the outer surface of the rotor shaft (15), and the mechanical connection (154) is the inner wall (138). The rotor device according to claim 1, wherein the rotor device is formed between the outer surface of the rotor shaft and the rotor shaft. The mechanical connection (154) is formed around the entire circumference between the outer surface of the rotor shaft (15) and the inner surface (138) of the rotor disk (66), and / or
The rotor device according to claim 2, characterized in that the mechanical connection (154) is formed over the entire axial length of the inner wall (138). The rotor device according to any one of claims 1 to 3, wherein the rotor disk (66) is not press-fitted, shrink-fitted, or scissor-fitted to the rotor shaft (15). The rotor shaft (15) has an outer diameter larger than the outer diameter of the region (146, 148, 150) of the rotor shaft (15) preceding in the axial direction and the rotor shaft (15 following in the axial direction). ) Having at least one portion (140, 142, 144) smaller than the region (148, 150, 152) and at least one rotor disk (66) plugged into the portion (140, 142, 144) The rotor device according to any one of claims 1 to 4, wherein the rotor device is provided. 6. The axial length of the portion (140, 142, 144) corresponds at least essentially to the axial length of at least one rotor disk (66). The rotor device according to claim 1. Rotor device for a vacuum pump, in particular a turbomolecular pump, having two or more rotor disks (66), which are aligned with respect to the axis of rotation (14) and in the direction of the axis of rotation (14) In a rotor arrangement in which a mechanical connection (154) is formed between adjacent rotor disks (66),
A rotor arrangement characterized in that the mechanical connection (154) is realized directly by a thermal joining process between adjacent rotor disks (66). Each rotor disk (66) has a disk-shaped body (162), and the disk-shaped body is provided with a plurality of rotor blades (136) that rises radially outward with respect to the rotating shaft (14). The rotor device according to claim 7, characterized in that the mechanical connection is formed directly between the disc-like body (162) and the adjacent rotor disc (66). The rotor disk (66) is mechanically connected with the lower surface of the disk-shaped body (162) of one rotor disk (66) facing the upper surface of the disk-shaped body (162) of the adjacent rotor disk (66). The rotor according to claim 8, wherein the rotor is continuously provided so as to be directly formed between the lower surface of one rotor disk (66) and the upper surface of the other rotor disk (66). apparatus. An accommodation opening (164) is formed on the lower surface of the disk-like body (162) of each rotor disk (66), and the accommodation opening (164) is formed on the upper surface of the disk-like body of each rotor disk (66). A center piece (166) formed in a complementary manner is formed. At this time, the center piece (166) of the disk-like body (162) of one rotor disk (66) is connected to the adjacent rotor disk (66). 10. The rotor device according to claim 8, wherein the rotor device is inserted into the accommodation opening (164) of the disk-shaped body (162). The center piece (166) has an outer diameter formed in the form of an interference fit to the inner diameter of the receiving opening (164) and / or
In each rotor disk (66), the accommodation opening (164) and the center piece (166) are provided on the upper surface or the lower surface of the disk-shaped body (162) at the center of the rotating shaft. The rotor device according to 10. The joining process is a welding process, in particular laser welding, electron beam welding, friction welding, friction stir welding, or a combination of these welding processes, or a soldering process. The rotor device according to claim 1. 13. At least one rotor device (16) according to any one of claims 1 to 12, a stator device (68) cooperating with the rotor device (16), and a rotor device (16) comprising a stator device (68). ) Vacuum pump having a drive device for rotational driving. A rotor device for a vacuum pump, in particular a turbomolecular pump, in particular a method for manufacturing a rotor device according to any one of claims 1 to 6, comprising a central receiving opening for receiving the rotor shaft (15) In a method in which a rotor disk (66) having a portion is provided on a rotor shaft (15) and a mechanical connection (154) is formed between the rotor disk (66) and the rotor shaft (15),
A method wherein the mechanical connection (154) is realized by a thermal bonding process. Method for the manufacture of a rotor device for a vacuum pump, in particular a turbomolecular pump, in particular a rotor device having two or more rotor disks (66) according to any one of claims 7 to 12, comprising: The rotor disks are aligned with respect to the axis of rotation (14) and are provided one after the other in the direction of the axis of rotation (14), with a mechanical connection (154) between adjacent rotor disks (66). In the method formed,
A method characterized in that the mechanical connection (154) is realized directly by a thermal bonding process between adjacent rotor disks (66).

Images