CN105840525B

CN105840525B - Stator disc

Info

Publication number: CN105840525B
Application number: CN201610028099.5A
Authority: CN
Inventors: 马尔科·安东纳奇; 桑克·希尔布里希; 米丽娅姆·施米茨
Original assignee: Pfeiffer Vacuum GmbH
Current assignee: Pfeiffer Vacuum GmbH
Priority date: 2015-01-29
Filing date: 2016-01-14
Publication date: 2019-06-21
Anticipated expiration: 2036-01-14
Also published as: JP2016142268A; CN105840525A; JP6125059B2; EP3051140B1; EP3051140A1

Abstract

For vacuum pump, the stator disc particularly for turbomolecular pump includes inner ring, outer ring and the stator vane being arranged between them, and the inner ring, the outer ring and these stator vanes are connect via contact pin with inner ring and outer ring respectively.Stator disc is embodied as the stator disc of lamination processing, which has inclined stator vane and be divided into the outer ring of multiple annulus truncations separated from each other along circumferential direction, and the quantity of annulus truncation is especially equivalent to the quantity of stator vane.Present invention also describes a kind of methods for manufacturing this stator disc.

Description

Stator disc

Technical field

The present invention relates to one kind to be used for vacuum pump, in particular for the stator disc of turbomolecular pump.The invention further relates to one Plant the method and a kind of vacuum pump, especially turbomolecular pump for manufacturing this stator disc.

Background technique

Vacuum pump, such as turbomolecular pump use in different technical fields, in order to provide corresponding process institute is used for The vacuum needed.Turbomolecular pump include have multiple stator discs stacked along rotor axis direction stator and relative to Stator rotor supported in a manner of it can turn around the rotation of sub- axis, the rotor include armature spindle and multiple are arranged on armature spindle , the in axial direction stacked and rotor disk that is arranged between stator disc, wherein stator disc and rotor disk are respectively provided with master (pumpaktiv) structure of dynamic pumping.

Vacuum pump or turbomolecular pump root diameter is bigger, when gas abruptly enters, is applied to rotor disk and determines Pressure in sub-disk is also bigger.Even if in this case, also not allowing to occur causing generating between rotor and stator to connect The bending of touching.Therefore, it needs to select corresponding very big metal in the case where the stator disc of the processing of the lamination made of metal plate Plate thickness, to obtain required rigidity.Within the scope of the invention, the stator disc for " lamination processing " particular it is understood that To be stamped out by metal plate and not especially being the stator disc obtained and going out from metal plate sawing.

Due to corresponding biggish plate thickness, the measure for being used to reinforce stator disc common so far, such as accordingly Crimping be no longer feasible.But if in required stator vane inclination, stator disc is distorted, in inclination The common method for adjusting blade just can be no longer applied afterwards.

Since stress appears in stator disc in tilting procedure, back to back adjustment process is still needed to.In stator leaf The reason of stress that piece occurs when tilting is: in torsion, only therefore flexible deformation and blade are tilting each stator vane Try hard to revert back to its original shape after process.The inner ring of corresponding stator disc rotates as follows as a result, that is, stator disc It cannot be reused due to the out-of-flatness integrally occurred.It will not cause squeezing or improving the pressure when tilting process again Better result.

There is undesirable stator disc deformation or stator disc out-of-flatness main cause is, by tilting process to stator vane Apply due to reverse caused by internal stress, the internal stress stator vane via contact pin simultaneously rigidly engage inner ring with The deformation for causing these to enclose when on outer ring.

Summary of the invention

Task of the invention lies in, provide it is a kind of for vacuum pump, in particular for turbomolecular pump stator disc and A method of for manufacturing this stator disc, proposed before using them to solve the problems, such as.Here, even if working as stator disc system When making the stator disc for the lamination processing being made of thicker metal plate, stator disc especially also at least substantially keeps no inside to answer Power.

According to the present invention to be used for vacuum pump, the stator disc particularly for turbomolecular pump includes inner ring, outer ring and cloth Stator vane between them is set, the inner ring, the outer ring and these stator vanes connect via contact pin and inner ring and outer ring respectively It connects.Here, stator disc is embodied as the stator disc of lamination processing, which has inclined stator vane and draws along circumferential direction It is divided into the outer ring of multiple annulus truncations separated from each other.The quantity of annulus truncation is especially equivalent to the quantity of stator vane, also It is to say, each stator vane is provided with an annulus truncation.But this is not necessarily.It in principle, can also to the division of outer ring For example only to realize to every two stator vane.

Term " annulus truncation " can broadly and be generally interpreted as " section ", that is to say, that form the section of outer ring Need not be a part of annulus on stringent geometric meaning.

Due to construction according to the present invention, corresponding stator disc can also be manufactured now by thicker metal plate.Therefore, Even if stator disc is made for the stator disc of the lamination being made of thicker metal plate processing, which is also at least substantially kept Without internal stress.Since the outer ring preferably (but not forcibly) of stator disc is divided into the quantity that its quantity is equivalent to stator vane Annulus truncation separated from each other or section, therefore and then can eliminate and be introduced into blade as stator vane tilts again Stress.Stator vane can rotate back into their original-shape again respectively as a result,.Here, inner ring and inner blade Angle between angle and outer ring and outer blade seamed edge between seamed edge and be therefore that blade engage to inner ring and outside The torsion of contact pin on circle is at least substantially constantly maintained at desired value.The adjustment process for following tilting procedure closely can be limited to Twist blade.Here, twist blade and keep contactless.Therefore, especially also it is able to achieve the stator disc of thicker lamination processing.Cause This, in the case where the vacuum pump or turbomolecular pump with biggish root diameter, by using thicker and corresponding harder The stator disc of lamination processing can also be such that manufacturing cost minimizes.Since flexible deformation can immediately again after adjusting process Eliminate, thus be excluded that following situation, that is, such stress eliminated due to heat and in pump during operation and cause it is fixed The undesirable deformation of sub-disk.Cost savings have in addition been obtained due to only needing unique adjustment tool.

The thickness of stator disc or the sheet thicknesses of stator disc are preferably greater than 0.5mm and especially greater than 1.0mm.Thickness is excellent It is selected as about 1.5mm.But for the stator disc by relatively thin sheet metal manufacture in principle it is also contemplated that the present invention.In addition, root It also can have the thickness greater than 1.5mm according to stator disc of the invention.

Preferably, the annulus separated from each other truncation of outer ring is connect via at least one contact pin with stator vane respectively.

Also it is particularly advantageous that the annulus separated from each other truncation of outer ring is aligned in radial direction with stator vane respectively.

Preferably, the annulus continuous along circumferential direction truncation of outer ring is separated from each other by radial slot.

Although stator disc is divided into annulus truncation, using stator disc in the spacer ring heap of vacuum pump or turbomolecular pump Common bearing still ensured that outer ring to the face formula engagement of stator case and and then to be stator disc optimal to stator case Thermal bonding.

It is fixed on outer ring by corresponding stator disc via spacer ring, although outer ring is divided into annulus truncation, at least It is not also lost in terms of rigidity substantially.

Manufacture according to the present invention is used for vacuum pump, and the feature in particular for the method for the stator disc of turbomolecular pump exists In, by the stator disc that the matrix formed by metal plate is constituted be made for lamination processing stator disc, the lamination processing stator Disk includes inner ring, outer ring and the stator vane being arranged between them, and the inner ring, the outer ring and these stator vanes pass through respectively It is connect by contact pin with inner ring and outer ring, wherein the outer ring of stator disc is divided into multiple annulus separated from each other along circumferential direction and cuts Disconnected, quantity is especially equivalent to the quantity of stator vane, tilts stator vane and is and then adjusted to stator vane, Them are reverted back to so that the desired inclination angle to stator vane is adjusted and the annulus separated from each other of outer ring is truncated Initial position, in the initial position, these annulus truncation be at least substantially placed in common plane in parallel with each other again In.

By the inclination of stator vane, blade height can also especially be adjusted to corresponding desired value.

By revocation stator vane to the positive engagement of outer ring, answering for the stator vane of twisting can be eliminated after inclination Thus power obtains the desired flatness of stator disc.Each annulus truncation of outer ring can rotate back into the original of them again Shape.Here, angle between angle and outer ring and outer blade seamed edge between inner ring and inner blade seamed edge and It therefore is that the torsion of blade engagement to the contact pin in inner ring and outer ring is at least substantially constantly maintained at desired value.And then Adjustment process can be limited to twist blade, thus respectively obtain desired angle.It therefore, especially also can be by having for example Stator disc is made in the metal plate that the comparison of 1mm or 1.5mm is thick, thus, in vacuum pump or turbine with biggish root diameter In the case where molecular pump, manufacturing cost can also be made to minimize by using the stator disc that lamination is handled.Due in adjustment process Flexible deformations all later can be eliminated again immediately, therefore stator disc is finally unstressed.Thus be excluded that following situation, is answered Power is eliminated due to heat and in pump in operation and leads to the undesirable deformation of stator disc.Furthermore, it is only necessary to an adjustment work Tool, in addition this makes cost minimization.

With revocation stator vane to outer ring positive engagement and therewith occur eliminate twisting stator vane stress, Occurs the desired flatness of stator disc after adjusting process.It, will be corresponding using spacer ring is passed through although outer ring is divided Stator disc be fixed in common mode still obtained on the outer ring of the stator disc outer ring vacuum pump or turbomolecular pump Corresponding spacer ring heap in face formula engagement, thus especially also ensure optimal thermal bonding.

The outer ring of stator disc both can be divided into that before stator vane inclination or after stator vane inclination This separated annulus truncation.

Advantageously, maintain contact pin with stator vane tilt caused by torsion in the case where to stator vane carry out Adjustment.

According to preferred Practical Design scheme according to the method for the present invention, in order to be adjusted to stator vane, stator The seamed edge adjacent with inner ring of blade is fixed respectively by adjusting two outstanding pointed member of tool, and in stator vane The seamed edge adjacent with outer ring on two outstanding pointed member of adjustment tool is located respectively, via the member of these two point forms Part causes the required torsion of stator vane by axial pressure.

Here, in order to adjust the desired inclination angle of stator vane and in order to which the annulus separated from each other of outer ring is truncated Their initial position is reverted back to, stator vane, which preferably can be in adjustment, is easy to torsion.

Stator disc can especially be divided into multiple annulus separated from each other by punching press, cutting, laser, milling or dragsaw and cut It is disconnected.

Preferably, the outer ring of stator disc is divided into continuous circle along circumferential direction by constructing the radial direction portion of leaving a blank of gap-like Ring truncation.

By by spacer ring by corresponding stator disc to fix in the way of common, by the division to outer ring actually fixed The rigidity aspect of sub-disk bending resistance is not also lost significantly.However, stator disc is circumferentially in order to improve the stability of stator disc Direction continuous annulus truncation after being adjusted to stator vane for example by riveting, welding, with plastics come injection encapsulated Or similar mode is handled and/or is also connected to each other again.Here, section can also be connected to each other again, wherein however this Seed type recombines not necessarily.

Vacuum pump according to the present invention, especially turbomolecular pump include with multiple stacked along rotor axis direction Stator disc stator and relative to stator, supported rotor, the rotor include turning in a manner of it can rotate around axis stator Sub- axis and multiple it is arranged in rotor disk that is on armature spindle, in axial direction stacked and being arranged between stator disc, wherein Stator disc and rotor disk are respectively provided with the actively structure of pumping and stator disc is set as stator disc according to the present invention.

Stator disc can be especially made of the part of circular ring shape respectively, wherein they are preferably semicircular by two respectively Part forms.

Using solution according to the present invention, can also use without difficulty made of thicker metal plate now Stator disc, it is possible thereby to consider, the increase with the diameter of vacuum pump and especially turbomolecular pump stator disc exists The pressure being applied on stator disc is significantly improved in the case where same pressure, as a result, in pump lesser so far The case where compare, thicker material must be used in biggish pump.Due to using solution according to the present invention, it is different from Scheme so far is no longer needed using more expensive stator disc.More expensive stator disc passes through at lamination now The stator disc of reason substitutes, and thus significantly makes cost minimization.The stator disc of lamination processing has corresponding thickness, example now Thickness such as within the scope of 1.5mm, these stator discs can bear higher pressure in uncertain impact process.

By such as getting off manufacture, mode is the stator disc of lamination processing: punching press profile and and then making each first Blade lean.So far when there is the stator vane of coherent outer ring in inclination since the flexible deformation in blade occurs Itself very big stress and with making these blade-sections only flexible deformation, thus and then disk cannot reuse, and by according to this The incision outer ring of invention, which then provides, to be remedied.By according to the present invention cutting outer ring between each blade, it can eliminate and answer Power.Although each outer ring element or annulus section are on the skew erect first after tilting procedure, and then can be to it Be adjusted.By relevant adjustment process, then desired torsion can be obtained by bending slightly by plastic deformation Power, this for coherent outer ring so far in view of cannot achieve.With outer ring is cut, the stability of stator disc fills it It measures slightly impacted.However in the case where being fixed on rotor disk on outer ring in common mode by spacer ring, actually not It is improved the risk that bent stator disc.Nevertheless, in principle it is also envisioned that in order to further stablize stator disc Change, the annulus separated from each other first of outer ring, which is truncated after adjusting process, for example to be wrapped by riveting, welding, with plastics to be molded Envelope is again coupled to.

By the incision of the outer ring according to the present invention to stator disc, thicker metal plate can also be processed into stator Disk, because they are also that can adjust by cutting.This it is achieved that find bent it is as well as possible between suction capactity Compromise, more precisely, being in the case where biggish stator disk diameter.Therefore, in biggish vacuum pump or biggish whirlpool Also it can use the cost advantage of the stator disc of superimposed layer processing in wheel molecular pump.

Detailed description of the invention

Below with reference to the accompanying drawings the present invention is illustrated in conjunction with the embodiments.Wherein:

Fig. 1 shows the explanatory view of the illustrative embodiments of vacuum pump, and it is according to the present invention fixed to use wherein Sub-disk；

Fig. 2 shows the diagrammatic tops of the semi-circular portion of the illustrative embodiment of stator disc according to the present invention Figure, the embodiment are grouped as by two such semicircular parts；

Fig. 3 shows the explanatory view of the semicircular stator disc according to fig. 2 in the direction of the arrow A along Fig. 2.

Reference signs list

10 vacuum pumps

12 inlet flanges

14 pump intakes

16 shells

18 rotation axis

20 armature spindles

22 rotor disks

24 stator discs

26 spacer rings

28 extraction areas

30 arrows, gas path

32 rotor hubs

34 Halls tie up gram rotor sleeve

36 Halls tie up gram rotor sleeve

38 Halls tie up gram stator sleeve

40 Halls tie up gram stator sleeve

42 rolling bearings

44 permanent magnet bearings

The bearing half of 46 rotor-sides

48 determine the bearing half of word side

50 permanent-magnetic clamps

52 permanent-magnetic clamps

54 transverse bearing gaps

56 safety bearings or thrust bearing

The top nut of 58 circular cones

60 smokable disks

62 drive motors

64 pump discharges

66 inner rings

68 outer rings

70 stator vanes

Contact pin in 72

74 outer contact pin

The truncation of 76 annulus

78 radial slots, portion of radially leaving a blank

Seamed edge in 80

82 outer seamed edges

Specific embodiment

Vacuum pump 10 shown in Fig. 1 includes the pump intake 14 surrounded by inlet flange 12 and multiple pump stepped parts, it For by the gas transport at pump intake 14 into Fig. 1 unshowned pump discharge.Vacuum pump 10 includes having static shell 16 stator and the rotor being arranged in shell 16, the rotor have supported in a manner of it can rotate around rotation axis 18 Armature spindle 20.

Vacuum pump 10 be configured to turbomolecular pump and including it is multiple by rise pumping action in a manner of (pumpwirksam) each other The pump stage of the turbo-molecular of coupled in series, they have the rotor disk 22 of multiple turbo-moleculars connecting with armature spindle 20 and multiple It is in axial direction arranged in the stator disc 24 among rotor disk 22 and being fixed in shell 16, which passes through spacer ring 26 each other Maintain desired axial spacing.Rotor disk 22 and stator disc 24 are provided in extraction area 26 along the direction of arrow 30 direction Axial pumping action.

Vacuum pump 10 further includes three and radially alternately arranges and be coupled to one another in series in a manner of playing pumping action Hall tie up gram pump stage.The rotor side sections of Hall dimension gram pump stage include that the rotor hub 32 connecting with armature spindle 20 and two are tight Gu on rotor hub 32 and the Hall of the cylindrical sleeve shape that is carried by it dimension gram rotor sleeve 34,36, these Halls tie up gram rotor Sleeve is coaxially in 18 ground of rotor axis orientation and radially alternately nested.In addition, setting there are two cylindrical sleeve shape suddenly Er Weike stator sleeve 38,40, they are equally coaxially in 18 ground of rotation axis orientation and radially alternately nested.Suddenly The surface of the active pumping of Er Weike pump stage respectively by Hall tie up gram rotor sleeve 34,36 and Hall tie up gram stator sleeve 38, 40 respective radial outer peripheral surfaces opposite in the case where constructing the Hall dimension gram gap of close radial direction are formed.? This, the surface of one of actively pumping smoothly constructs respectively, and in the current situation, Hall ties up gram rotor sleeve 34 or 36 The surface of the opposite active pumping on the surface and Hall dimension gram stator sleeve 38,40 of opposite active pumping has such as Under structuring portion, pass through rotor in these slots with the slot that zigzag shape in axial direction extends around rotation axis 18 Rotation forces gas, and thus pump gas.

Promoted by the rolling bearing 42 in the region of pump discharge and the permanent magnet bearing 44 in the region of pump intake The bearing being able to rotate to armature spindle 20.

The bearing half 46 of permanent magnet bearing 44 including rotor-side and the bearing half 48 of stator side, they respectively include by The annular lamination that multiple permanent-magnetic clamps 50,52 in axial direction stackedly stacked each other form, wherein magnet ring 50,52 is being constituted It is opposite in the case where transverse bearing gap 54.

Among permanent magnet bearing 44, it is provided with safety bearing (Notlager) or thrust bearing 56, is configured to not moisten Sliding rolling bearing and in the normal operation of vacuum pump, by without dallying in a manner of touching, and it is relatively fixed in rotor first Work when sub exceedingly radial deflection, to form the radial backstop for rotor, which prevent the structural member of rotor-side with The collision of the structural member of stator side.

In the region of rolling bearing 42, the top nut 58 of cone is provided on armature spindle 20, with direction The overall diameter that rolling bearing 42 increases, the emptier sliding contact of the top nut and operation medium storage, the operation medium Memory includes multiple to run medium, such as the smokable disk 60 that lubricant soaks.In operation, operation medium passes through hair Spy transports the top nut 58 to rotation with from operation medium storage via emptier, and since centrifugal force is along top Nut 58 is transported to rolling bearing 42 along the direction that the overall diameter of top nut 58 becomes larger, and the operation medium for example plays there The function of lubrication.

Vacuum pump includes for the drive motor 62 of rotating manner driving rotor, the mover of the drive motor to pass through rotor Axis 20 is formed.Control unit 64 controls drive motor 62.

The pump stage of turbomolecular pump provides the pump action along the direction of arrow 30 in extraction area 28.

Fig. 2 illustrates the exemplary embodiment party of the stator disc 24 according to the present invention for vacuum pump with schematical vertical view The semi-circular portion of formula, the embodiment are grouped as by two such semicircular parts.As described in connection with Fig.1, this The stator disc 24 of sample can for example use in vacuum pump 10 or turbomolecular pump.Again with showing in the direction of arrow A in Fig. 3 Meaning property view description semicircular stator disc portion according to fig. 2.

Stator disc 24 includes inner ring 66, outer ring 68 and the stator vane 70 being arranged between them, the inner ring, the outer ring And these stator vanes are connect via interior contact pin 72 and outer contact pin 74 with inner ring 66 or outer ring 68 respectively.

Here, the stator disc 24 being made of the matrix made of metal plate is embodied as having inclined 70 He of stator vane The stator disc of the lamination processing of outer ring 68, which is divided into the quantity that its quantity is equivalent to stator vane 70 along circumferential direction Annulus truncation 76 separated from each other.

As in conjunction with as can be seen Fig. 2, the annulus separated from each other truncation 76 of outer ring 68 is respectively via unique external Piece 74 is connected with corresponding stator vane 70.Here, the annulus separated from each other truncation 76 of outer ring 68 respectively it is radial to it is related Stator vane 70 be aligned.

In the current situation, continuous annulus truncation 76 is separated from each other by radial slot 78 along circumferential direction.

The annulus separated from each other truncation 76 of the outer ring 68 of manufactured stator disc 24 is positioned in parallel within common put down In face.

According to illustrative design scheme according to the method for the present invention, in order to manufacture corresponding stator disc 24, by passing through The stator disc 24 that the matrix that metal plate is formed is constituted is made for the stator disc of lamination processing, and the stator disc of lamination processing has interior Circle 66, outer ring 68 and the stator vane 70 being arranged between them, the inner ring, the outer ring and these stator vanes pass through respectively It is connect by interior contact pin 72 and outer contact pin 74 with inner ring 66 or outer ring 68.

The outer ring 68 of stator disc 24 is divided into its quantity along circumferential direction and is equivalent to the quantity of stator vane 70 to be divided each other The annulus truncation 76 opened.It tilts stator vane 70 and and then it is adjusted, so as to the expectation to stator vane 70 Inclination angle be adjusted and make the annulus separated from each other of outer ring 68 that 76 initial positions for reverting back to them be truncated, it is first at this In beginning position, the truncation of these annulus is at least substantially placed in common plane in parallel with each other again.

It is equivalent to here, the outer ring 68 of stator disc 24 can be divided into its quantity before or after stator vane 70 tilts The annulus separated from each other truncation 76 of the quantity of stator vane 70.

It realizes in the case where maintaining the torsion of contact pin 72,74 to work with the inclination of stator vane 70 to stator vane 70 adjustment.

For this purpose, in order to adjust stator vane 70, the seamed edge 80 adjacent with inner ring 66 of stator vane 70 respectively by adjusting Two outstanding pointed member of tool (not shown) is fixed, and on the seamed edge 82 adjacent with outer ring 68 of stator vane 70 Two outstanding pointed member of adjustment tool is located respectively, via them, the institute of stator vane 70 is caused by axial pressure The torsion needed.

In order to which the desired inclination angle to stator vane 70 is adjusted and circle separated from each other in order to make outer ring 68 Ring truncation 76 reverts back to their initial position, and stator vane 70 can be in adjustment is easy to torsion.

Stator disc 24 especially can be divided into its quantity by punching press, cutting, laser or milling and be equivalent to stator vane 70 Quantity annulus separated from each other truncation 76.Here, the outer ring 68 of stator disc 24 is divided into continuous annulus along circumferential direction Truncation 76 can leave a blank portion or radial slot 78 by the radial direction of gap-like especially to realize.

But the intermediate space or discontinuities between the section of outer ring need not be gap-like.These intermediate spaces or interruption The extension extended radially through in portion is also not compulsory or is not at least compulsory.Intermediate space or the design scheme of through-Penetration portion and Shape is essentially arbitrary, and is selected with particularly depending on the thickness of used metal plate and the size of stator disc.

In the case where being fixed on stator disc 24 on outer ring 68 in common mode by spacer ring, actually in stator disc 24 rigidity aspect is without significantly losing and not being improved the risk that bent stator disc actually correspondingly.However, In order to improve the stability of stator disc 24 in principle it is also envisioned that the annulus continuous along circumferential direction of stator disc 24 is truncated 76 stator vane 70 adjustment after for example by riveting, welding, with plastics come injection encapsulated or similar mode come handle and/ Or it is also connected to each other again.Each technical characteristic of embodiment described above can be combined arbitrarily, for simplicity of description, not Combination all possible to each technical characteristic in above-described embodiment is all described, as long as however, these technical characteristics Contradiction is not present in combination, all should be considered as described in this specification.

The embodiments described above only express several embodiments of the present invention, and the description thereof is more specific and detailed, but simultaneously Limitations on the scope of the patent of the present invention therefore cannot be interpreted as.It should be pointed out that for those of ordinary skill in the art For, without departing from the inventive concept of the premise, various modifications and improvements can be made, these belong to guarantor of the invention Protect range.Therefore, the scope of protection of the patent of the invention shall be subject to the appended claims.

Claims

1. one kind is used for the stator disc (24) of vacuum pump (10), the stator disc includes inner ring (66), outer ring (68) and arrangement Stator vane (70) between them, the inner ring, the outer ring and the stator vane respectively via contact pin (72,74) with The inner ring (66) and the outer ring (68) connection, wherein the stator disc (24) is embodied as the stator disc of lamination processing, described Stator disc has inclined stator vane (70) and is divided into the outer of multiple annulus truncations (76) separated from each other along circumferential direction It encloses (68), the quantity of the annulus truncation (76) is equivalent to quantity or the outer ring (68) every two of the stator vane (70) Divide to a stator vane (70).

2. stator disc according to claim 1, which is characterized in that the vacuum pump (10) is turbomolecular pump.

3. stator disc according to claim 1, which is characterized in that the annulus separated from each other of the outer ring (68) is truncated (76) it is connect respectively via at least one contact pin (74) with stator vane (70).

4. stator disc as claimed in any of claims 1 to 3, which is characterized in that outer ring (68) are divided each other The annulus truncation (76) opened is aligned in radial direction with stator vane (70) respectively.

5. according to stator disc described in the claims 1, which is characterized in that the outer ring (68) it is continuous along circumferential direction Annulus truncation (76) is separated from each other by radial slot (78).

6. according to stator disc described in the claims 1, which is characterized in that the annulus separated from each other of the outer ring (68) is cut Disconnected (76) are positioned in parallel in common plane.

7. the method for stator disc (24) of a kind of manufacture for vacuum pump, in the method, by the base formed by metal plate The stator disc (24) that body is constituted is made for the stator disc of lamination processing, and the stator disc of lamination processing includes inner ring (66), outer Circle (68) and the stator vane (70) being arranged between them, the inner ring, the outer ring and the stator vane pass through respectively It is connect by contact pin (72,74) with the inner ring (66) and the outer ring (68), wherein outer ring (68) edge of the stator disc (24) Circumferential direction is divided into multiple annulus truncations (76) separated from each other, tilts the stator vane (70) and and then to institute It states stator vane (70) to be adjusted, so that the desired inclination angle to the stator vane (70) is adjusted and makes described The annulus separated from each other truncation (76) of outer ring (68) reverts back to their initial position, in the initial position, the circle Ring truncation is substantially placed in common plane in parallel with each other again, and it is described fixed that the quantity of the annulus truncation (76) is equivalent to Divide to stator vane (70) described in the quantity or the outer ring (68) every two of blades (70).

8. the method according to the description of claim 7 is characterized in that the vacuum pump (10) is turbomolecular pump.

9. the method according to the description of claim 7 is characterized in that the outer ring (68) of the stator disc (24) is in the stator leaf The annulus truncation (76) separated from each other is divided into before piece (70) inclination.

10. the method according to the description of claim 7 is characterized in that the outer ring (68) of the stator disc (24) is in the stator The annulus truncation (76) separated from each other is divided into after blade (70) inclination.

11. method according to any one of claims 7 to 10, which is characterized in that maintaining the contact pin (72,74) The stator vane (70) is adjusted in the case where with torsion caused by the stator vane (70) inclination.

12. method according to any one of claims 7 to 10, which is characterized in that in order to the stator vane (70) It is adjusted, the seamed edge (80) adjacent with the inner ring (66) of the stator vane (70) is respectively by adjusting the element of tool To fix, and the tune is located respectively on the seamed edge (82) adjacent with the outer ring (68) of the stator vane (70) The element of whole tool causes the required torsion of the stator vane (70) by axial pressure via them.

13. the method according to the description of claim 7 is characterized in that the stator vane (70) with the inner ring (66) phase Adjacent seamed edge (80) fixes respectively by adjusting two pointed members of tool, and in the stator vane (70) and institute State two pointed members that the adjustment tool is located on the adjacent seamed edge (82) in outer ring (68) respectively.

14. according to the method for claim 12, which is characterized in that for the desired inclination to the stator vane (70) Angle is adjusted and in order to make the annulus separated from each other of the outer ring (68) that the initial position that (76) revert back to them be truncated, The stator vane (70) is easy to reverse in adjustment.

15. the method according to the description of claim 7 is characterized in that the stator disc (24) is drawn by punching press, cutting or milling It is divided into the annulus truncation (76) separated from each other.

16. the method according to the description of claim 7 is characterized in that the stator disc (24) by laser be divided into it is described that (76) are truncated in this separated annulus.

17. the method according to the description of claim 7 is characterized in that the outer ring (68) of the stator disc (24) is by constructing The radial direction of gap-like portion (78) of leaving a blank is divided into continuous annulus truncation (76) along circumferential direction.

18. the method according to the description of claim 7 is characterized in that the circle continuous along circumferential direction of the stator disc (24) Ring truncation (76) is after being adjusted the stator vane (70) by riveting, welding or with plastics come the side of injection encapsulated Formula is stabilized and/or is connected to each other again.

19. a kind of vacuum pump (10), it includes multiple stators stacked along rotor axis (18) direction that the vacuum pump, which has, The stator of disk (24) and the rotor supported in a manner of it can be rotated around the rotor axis (18) relative to the stator, institute Rotor is stated to include armature spindle (20) and multiple are arranged on the armature spindle (20), in axial direction stacked and are arranged in Rotor disk (22) between the stator disc (24), wherein the stator disc (24) and the rotor disk (22) are respectively provided with master The structure of dynamic pumping, and the stator disc (24) is according to claim 1 to any one of 4 to implement and/or by according to power Benefit require any one of 7 to 10 described in method manufacture.

20. vacuum pump (10) according to claim 19, which is characterized in that the vacuum pump (10) is turbomolecular pump.