CN201339608Y - Molecular pump with variable cross section rotor and stator blade - Google Patents
Molecular pump with variable cross section rotor and stator blade Download PDFInfo
- Publication number
- CN201339608Y CN201339608Y CNU2008202088727U CN200820208872U CN201339608Y CN 201339608 Y CN201339608 Y CN 201339608Y CN U2008202088727 U CNU2008202088727 U CN U2008202088727U CN 200820208872 U CN200820208872 U CN 200820208872U CN 201339608 Y CN201339608 Y CN 201339608Y
- Authority
- CN
- China
- Prior art keywords
- teeth
- rotor
- leaf
- molecular pump
- stator vane
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
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Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D19/00—Axial-flow pumps
- F04D19/02—Multi-stage pumps
- F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
- F04D19/042—Turbomolecular vacuum pumps
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D29/00—Details, component parts, or accessories
- F04D29/26—Rotors specially for elastic fluids
- F04D29/32—Rotors specially for elastic fluids for axial flow pumps
- F04D29/321—Rotors specially for elastic fluids for axial flow pumps for axial flow compressors
- F04D29/324—Blades
Abstract
The utility model relates to a molecular pump with variable cross section rotor and stator blades, comprising a molecular pump shell, a rotor shaft arranged in the center of the shell, a plurality of rotor blades fixedly arranged on the rotor shaft, and a plurality of stator blades arranged between the adjacent rotor blades; the stator blades are fixed on the inner wall of the shell by a clamping ring, the rotor blade comprises a central circular ring body and blade teeth which are uniformly distributed on the circumstantial wall of the circular ring body, and the section of the blade teeth is reduced from the root part to the end part, so as to forming an isosceles trapezoid; the stator blade comprises a central circular ring body and blade teeth which are uniformly distributed on the circumstantial wall of the circular ring body, and the section of the blade teeth is increased from the root part to the end part, so as to forming an isosceles trapezoid, and the clearances between the adjacent blade teeth of rotor blades as well as between the adjacent blade teeth of stator blades are uniform; the blade teeth of the rotor blades and the stator blades form a certain angle with the central circular ring bodies thereof, the rotor blades have high intensity, the stability is good when the rotor blades rotate at high speed, and the molecular pump has the advantages of simple structure, convenient processing and long service life, therefore, the molecular pump has good market prospect.
Description
Technical field:
The utility model relates to a kind of turbomolecular pump, a kind of specifically turbomolecular pump that variable cross section commentaries on classics, stator vane are housed.
Background technique:
Blade structure in the turbomolecular pump mainly contains two kinds, the blade of integral rotor and split type blade at present.The blade of two kinds of structures, the cross section of its each single blade all are identical, both have been uniformly shaped blade, and it is low that this uniformly shaped blade has intensity, and the life-span is short, the processing difficulties shortcoming.Because turbomolecular pump is in the rotor high-speed rotation of when work, inertia is big, so to the requirement of strength height of rotor blade, the rotor of turbomolecular pump is through long high speed rotating, blade is elongated under effects such as inertia, external force or is crooked, and distortion finally causes faults such as molecular pump fragment.Patent Office of the People's Republic of China's on December 26th, 2007, disclosed publication number was " turbine blade that is used for molecular pump " of " CN101092972A ", it comprises that overall profile is the circular turbine blade that is uniformly distributed with leaf-teeth along the circumference, described leaf-teeth are step type variable cross section leaf-teeth, described step type variable cross section leaf-teeth become certain tilt angle with described turbine blade, and the number of steps of described step type variable cross section leaf-teeth is more than or equal to 2 roads.Though it can have very high intensity when running up, because its leaf-teeth are the step type setting, the wind-force that produces during blade rotation is unbalanced, the stability in the time of can influencing the turbine blade rotation, thus produce bigger vibrations and noise.
The model utility content:
The purpose of this utility model is at the defective of above-mentioned prior art and deficiency, for people provide a kind of blade strength height, and good stability, and the simple turbomolecular pump of processing technology.
Technical solution adopted in the utility model is for achieving the above object: this molecular pump that variable cross section commentaries on classics, stator vane are housed comprises the molecular pump housing, is positioned at the rotor shaft at housing center, is fixedly mounted on polylith rotor blade on the rotor shaft, and the polylith stator vane between every adjacent two rotor blades, described stator vane is fixed in inner walls by snap ring, described rotor blade comprises center circle ring body and the leaf-teeth that are distributed in the cirque body perisporium, these leaf-teeth by root to the end its cross section gradually little, be isosceles trapezoid;
Described stator vane comprises center circle ring body and the leaf-teeth that are distributed in the cirque body perisporium, these leaf-teeth by root to the end its cross section gradually big, be isosceles trapezoid, the gap between adjacent rotor blades leaf-teeth and the stator vane leaf-teeth is even;
The leaf-teeth of described rotor blade and stator vane become certain angle of inclination with the cirque body at center separately.
Rotor blade of the present utility model makes phenomenons such as leaf-teeth are not easy to stretch, bending, fracture because the cross section of leaf-teeth is the isosceles trapezoid that root is big, the end is little, the ability to bear of the centrifugal force that produces in the time of therefore can improving rotor blade to high speed rotating.Because the gap between adjacent rotor blades leaf-teeth and the stator vane leaf-teeth is even, the power equilibrium that rotor blade is produced when rotating, thus can make the rotor blade slow-roll stabilization, the also corresponding minimizing of vibrations that produced and noise.The utility model also has advantage simple in structure, easy to process simultaneously, and good market prospects are arranged.
Description of drawings:
Fig. 1 is a structure cross-sectional schematic of the present utility model.
Fig. 2 is the structural representation of rotor blade.
Fig. 3 is the structural representation of stator vane.
Embodiment:
As Fig. 1, Fig. 2, shown in Figure 3, the utility model is equipped with the molecular pump of variable cross section commentaries on classics, stator vane, it comprises molecular pump housing 4, is positioned at the rotor shaft 5 at housing 4 centers, is fixedly mounted on polylith rotor blade on the rotor shaft 5, and the polylith stator vane between every adjacent two rotor blades.Described rotor blade comprises center circle ring body 6 and is distributed in leaf-teeth 1 around the cirque body 6, and the efficient of molecular pump can be improved in 6 one-tenth certain angles of inclination of every leaf-teeth 1 and cirque body.Center hole and rotor shaft 5 drive fits of described rotor blade by cirque body 6, the big thickness with leaf-teeth 1 of described cirque body 6 thickness makes the polylith rotor blade during installation arranged side by side, have certain interval between adjacent two rotor blades on roller axle 5.The leaf-teeth 1 of described rotor blade by root to the end its cross section gradually little, be isosceles trapezoid, make phenomenons such as leaf-teeth 1 are not easy to stretch, bending, fracture, the ability to bear of the centrifugal force that produces in the time of therefore can improving rotor blade to high speed rotating.Described stator vane comprises center circle ring body 7 and is distributed in cirque body 7 leaf-teeth 2 all around that described cirque body 7 movable sets are outside the circle body 6 of rotor blade.The end of described every stator vane leaf-teeth 2 embeds and is fixed in the housing snap ring 8, thereby stator vane is fixed in the housing 4.The leaf-teeth 2 of described stator vane by root to the end its cross section gradually big, be isosceles trapezoid, and make every leaf-teeth 2 also become certain angle of inclination with cirque body 7, make the gap 3 between adjacent rotor blades leaf-teeth 1 and the stator vane leaf-teeth 2 even like this, thereby the power equilibrium that rotor blade 6 is produced when rotating, guarantee the rotor blade slow-roll stabilization, the also corresponding minimizing of vibrations that produced and noise.
When mounted, will be sleeved on the rotor shaft 5 of molecular pump behind polylith rotor blade and the polylith stator vane space, make the cirque body 6 of every rotor blade fixing with rotor shaft 5 respectively, snap ring 8 is set in the end of every stator vane leaf-teeth 2.And then rotor shaft 5, rotor blade 6, stator vane 7 and the snap ring 8 of mounted molecular pump be installed in the molecular pump housing 4, and snap ring 8 is compressed, make stator vane be fixed on molecular pump housing 4 inwalls.
Claims (3)
1, a kind of molecular pump that variable cross section commentaries on classics, stator vane are housed, it comprises molecular pump housing (4), is positioned at the rotor shaft (5) at housing (4) center, is fixedly mounted on upward polylith rotor blade of rotor shaft (5), and the polylith stator vane between every adjacent two rotor blades, described stator vane is fixed in housing (4) inwall by snap ring, it is characterized in that the leaf-teeth (1) that described rotor blade comprises center circle ring body (6) and is distributed in cirque body (6) perisporium, these leaf-teeth (1) by root to the end its cross section gradually little, be isosceles trapezoid.
2, the molecular pump that variable cross section commentaries on classics, stator vane are housed according to claim 1, it is characterized in that the leaf-teeth (2) that described stator vane comprises center circle ring body (7) and is distributed in cirque body (7) perisporium, these leaf-teeth (2) by root to the end its cross section gradually big, be isosceles trapezoid, the gap (3) between adjacent rotor blades leaf-teeth (1) and the stator vane leaf-teeth (2) is even.
3, according to claim 1 and 2ly be equipped with that variable cross section changes, the molecular pump of stator vane, it is characterized in that the leaf-teeth (1,2) of described rotor blade and stator vane become certain angle of inclination with the cirque body at center (6,7) separately.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNU2008202088727U CN201339608Y (en) | 2008-12-31 | 2008-12-31 | Molecular pump with variable cross section rotor and stator blade |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNU2008202088727U CN201339608Y (en) | 2008-12-31 | 2008-12-31 | Molecular pump with variable cross section rotor and stator blade |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN201339608Y true CN201339608Y (en) | 2009-11-04 |
Family
ID=41235155
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNU2008202088727U Expired - Fee Related CN201339608Y (en) | 2008-12-31 | 2008-12-31 | Molecular pump with variable cross section rotor and stator blade |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN201339608Y (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104047871A (en) * | 2013-03-13 | 2014-09-17 | 株式会社岛津制作所 | Vacuum pump |
| CN104895808A (en) * | 2014-03-04 | 2015-09-09 | 上海复谣真空科技有限公司 | Compound molecular pump |
| CN105840525A (en) * | 2015-01-29 | 2016-08-10 | 普发真空有限公司 | Stator disc |
-
2008
- 2008-12-31 CN CNU2008202088727U patent/CN201339608Y/en not_active Expired - Fee Related
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104047871A (en) * | 2013-03-13 | 2014-09-17 | 株式会社岛津制作所 | Vacuum pump |
| CN104895808A (en) * | 2014-03-04 | 2015-09-09 | 上海复谣真空科技有限公司 | Compound molecular pump |
| CN104895808B (en) * | 2014-03-04 | 2017-06-06 | 上海复谣真空科技有限公司 | Composite molecular pump |
| CN105840525A (en) * | 2015-01-29 | 2016-08-10 | 普发真空有限公司 | Stator disc |
| CN105840525B (en) * | 2015-01-29 | 2019-06-21 | 普发真空有限公司 | Stator disc |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C17 | Cessation of patent right | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20091104 Termination date: 20121231 |