CN105840525A

CN105840525A - Stator disc

Info

Publication number: CN105840525A
Application number: CN201610028099.5A
Authority: CN
Inventors: 马尔科·安东纳奇; 桑克·希尔布里希; 米丽娅姆·施米茨
Original assignee: Pfeiffer Vacuum GmbH
Current assignee: Pfeiffer Vacuum GmbH
Priority date: 2015-01-29
Filing date: 2016-01-14
Publication date: 2016-08-10
Anticipated expiration: 2036-01-14
Also published as: JP2016142268A; EP3051140B1; CN105840525B; JP6125059B2; EP3051140A1

Abstract

A stator disc for a vacuum pump, especially a turbomolecular pump comprises an inner ring, an outer ring and stator blades arranged between the inner and outer rings. The inner ring, the outer ring and the stator blades are respectively connected with the inner ring and the outer ring via splicing pieces. The stator disc is implemented as stator disc undergoing laminated processing, the stator disc is provided with the inclined stator blades and the outer ring which is circumferentially divided into a plurality of ring truncation sections separated from each other, and the number of the ring truncation sections is especially equivalent to the number of the stator blades. The invention further describe a method for manufacturing the stator disc.

Description

Stator disc

Technical field

The present invention relates to a kind of for vacuum pump, in particular for the stator disc of turbomolecular pump.The present invention is also Relate to a kind of method for manufacturing this stator disc and a kind of vacuum pump, especially turbomolecular pump.

Background technology

Vacuum pump, such as turbomolecular pump use in different technical fields, in order to provide for corresponding Vacuum needed for process.Turbomolecular pump includes having multiple stator disc stacked along rotor axis direction Stator and relative to stator by can in the way of rotor axis rotation supported rotor, this rotor includes Armature spindle and multiple that be arranged on armature spindle, the most stacked and be arranged between stator disc Rotor disk, wherein, stator disc and rotor disk are respectively provided with (pumpaktiv) structure of actively pumping.

Vacuum pump or the root diameter of turbomolecular pump the biggest, when gas abruptly enters, be applied to rotor Pressure on dish and stator disc is the biggest.Even in this case, do not allow to occur causing rotor With produce the bending contacted between stator.Therefore, the feelings of the stator disc processed at the lamination being made up of metallic plate Need under condition to select the biggest plate thickness, in order to the rigidity needed for acquisition.In the scope of the present invention In, the stator disc for " lamination process " particular it is understood that as being gone out by stamped metal sheets and not being The stator disc obtained by going out from metallic plate sawing.

Due to the biggest plate thickness, the most common measure for being fixed sub-disk, example If corresponding crimping is no longer feasible.If but stator disc is turned round when required stator vane tilts Bent, then after tilting, the most no longer to apply the common method for adjusting blade.

Owing to stress occurs in stator disc when tilting procedure, therefore still need to back to back adjustment operation.? The reason of stress occurred when stator vane tilts is: only elastic deformation is also when reversing for each stator vane And blade is therefore tilting after operation to try hard to revert back to its original shape.Thus, corresponding stator disc is interior Circle rotates as follows, i.e. out-of-flatness that stator disc occurs due to entirety and can not re-use.Even if again Extruding or the raising pressure when tilting operation are also not result in more preferable result.

Occur that the deformation of less desirable stator disc or stator disc out-of-flatness main cause are, by tilting operation to fixed Blades applies the internal stress caused due to torsion, and this internal stress is at stator vane via contact pin the most just The deformation causing these to enclose when being joined on inner ring and outer ring to property.

Summary of the invention

The task of the present invention is, is given a kind of for vacuum pump, in particular for the stator of turbomolecular pump Dish and a kind of method for manufacturing this stator disc, the problem using them to propose before solving.? This, is even if when the stator disc that the lamination that stator disc is fabricated to be made up of thicker metallic plate processes, stator disc The most at least substantially keep without internal stress.

According to the present invention for vacuum pump, the stator disc being particularly useful for turbomolecular pump includes inner ring, outer ring And arrange stator vane between which, this inner ring, this outer ring and these stator vanes are respectively via connecing Sheet is connected with inner ring and outer ring.Here, stator disc is embodied as the stator disc that lamination processes, this stator disc has Tilt stator vane and circumferentially direction be divided into the outer ring that multiple annulus being separated from each other blocks.Annulus cuts Disconnected quantity is especially equivalent to the quantity of stator vane, say, that each stator vane is provided with one Annulus blocks.But this is not necessarily.In principle, can also the most only each two stator to the division of outer ring Blade ground realizes.

Term " annulus blocks " can broadly and at large be interpreted as " section ", say, that outside formation The section of circle needs not to be a part for annulus on strict geometric meaning.

Due to the structure according to the present invention, corresponding stator disc can also be manufactured by thicker metallic plate now. Therefore, even if stator disc is made for the stator disc of the lamination process being made up of thicker metallic plate, this stator disc The most at least substantially keep without internal stress.Owing to the outer ring preferably (but the most forcibly) of stator disc is divided into Its quantity is equivalent to the annulus being separated from each other of the quantity of stator vane and blocks or section, the most permissible Again eliminate the stress tilted and be incorporated in blade along with stator vane.Thus, stator vane can be distinguished Again rotate back into their original-shape.Here, angle between inner ring and inner blade seamed edge and Angle between outer ring and outer blade seamed edge and be therefore contact pin blade being joined on inner ring and outer ring Torsion be at least substantially constantly maintained at expected value.The adjustment operation following tilting procedure closely can be limited to Twist blade.Here, twist blade and keep contactless.Therefore, the most also can realize at thicker lamination The stator disc of reason.Therefore, in the case of the vacuum pump with bigger root diameter or turbomolecular pump, Manufacturing cost can also be made to minimize by the stator disc using thicker and the most harder lamination to process.Due to Can the most again eliminate adjusting elastic deformation after operation, thus be excluded that following situation, i.e. so Stress eliminate in pump due to heat at run duration and cause the less desirable deformation of stator disc.Due to Only need uniquely to adjust instrument and additionally obtained cost savings.

The thickness of stator disc or the sheet thicknesses of stator disc are preferably greater than 0.5mm and are especially greater than 1.0mm.Thickness is preferably from about 1.5mm.But, for the stator disc manufactured by relatively thin sheet metal in principle It is also contemplated that the present invention.Additionally, can also have the thickness more than 1.5mm according to the stator disc of the present invention.

Preferably, the annulus being separated from each other of outer ring blocks respectively via at least one contact pin with stator vane even Connect.

Also it is particularly advantageous that the annulus being separated from each other of outer ring blocks radially is aliging with stator vane respectively.

Preferably, the circumferentially direction continuous print annulus of outer ring is blocked and is separated from each other by radial slot.

Although stator disc is divided into annulus and blocks, but utilize stator disc vacuum pump or turbomolecular pump every Common supporting in ring heap has still ensured that outer ring to the facial joint of stator case and and then is that stator disc is to fixed The optimum thermal bonding of sub-housing.

It is fixed on outer ring via spacer ring by corresponding stator disc, although outer ring is divided into annulus and blocks, but It is at least substantially the most not lose in terms of rigidity.

Manufacture according to the present invention is used for vacuum pump, in particular for the method for the stator disc of turbomolecular pump Being characterised by, the stator disc being made up of the matrix formed by metallic plate is made for the stator disc that lamination processes, The stator disc that this lamination processes includes inner ring, outer ring and arranges stator vane between which, this inner ring, This outer ring and these stator vanes are connected with inner ring and outer ring via contact pin respectively, wherein, and the outer ring of stator disc Circumferentially direction is divided into multiple annulus being separated from each other and blocks, and its quantity is especially equivalent to the number of stator vane Amount, makes stator vane tilt and and then be adjusted stator vane, in order to the expectation to stator vane Inclination angle be adjusted and make the annulus being separated from each other of outer ring block the initial position reverting back to them, In this initial position, these annulus block and are placed in the most in parallel with each other in common plane.

By the inclination of stator vane, blade height especially can also be adjusted to corresponding desired value.

By cancelling the stator vane positive engagement to outer ring, the stator leaf of twisting can be eliminated after tilting The stress of sheet, thus obtains the desired flatness of stator disc.Each annulus of outer ring blocks and can again turn The dynamic original-shape returning to them.Here, angle between inner ring and inner blade seamed edge and outer ring with The outer angle between blade seamed edge and be therefore the torsion of contact pin blade being joined on inner ring and outer ring At least substantially it is constantly maintained at expected value.Back to back adjustment operation can be limited to twist blade, by This respectively obtains desired angle.Therefore, the most also can be thick by the comparison with such as 1mm or 1.5mm Metallic plate makes stator disc, thus, in the feelings of the vacuum pump or turbomolecular pump with bigger root diameter Under condition, manufacturing cost can also be made to minimize by the stator disc using lamination to process.Owing to adjusting operation The most all of elastic deformation can eliminate the most again, and therefore stator disc is the most unstressed.Thus be excluded that Following situation, stress is in operation and eliminates and cause the less desirable deformation of stator disc due to heat in pump. In addition, it is only necessary to an adjustment instrument, this additionally makes cost minimization.

Along with cancelling stator vane to the positive engagement of outer ring and the stator vane eliminating twisting that occurs therewith Stress, occurs the desired flatness of stator disc after adjusting operation.Although outer ring is divided, but sharp With by spacer ring by corresponding stator disc to be fixed on by the way of common and still obtained on the outer ring of this stator disc outside Enclose vacuum pump or facial joint in the corresponding spacer ring heap of turbomolecular pump, the most especially also ensure that Optimum thermal bonding.

The outer ring of stator disc both can also can divide before stator vane tilts after stator vane tilts The annulus being separated from each other is become to block.

Advantageously, to stator leaf in the case of maintaining the torsion caused along with stator vane inclination of contact pin Sheet is adjusted.

According to the preferred Practical Design scheme of the method according to the invention, in order to stator vane is adjusted, The seamed edge adjacent with inner ring of stator vane is fixed by two pointed member outstanding of adjustment instrument respectively, And there is two some champion outstanding of adjustment instrument location respectively on the seamed edge adjacent with outer ring of stator vane Part, via the element of these two point forms, causes the torsion needed for stator vane by axial pressure.

Here, in order to regulate the desired inclination angle of stator vane and in order to make the circle being separated from each other of outer ring Ring blocks the initial position reverting back to them, and stator vane preferably can be easy to torsion when adjusting.

Stator disc especially can be divided into multiple being separated from each other by punching press, cutting, laser, milling or dragsaw Annulus block.

Preferably, the outer ring of stator disc is divided into circumferentially direction company by constructing the radial direction portion of leaving a blank of gap-like Continuous annulus blocks.

Utilize and by spacer ring, corresponding stator disc is fixed by the way of common, by the division reality to outer ring On the most significantly lose in terms of the rigidity of stator disc bending resistance.But, in order to improve stablizing of stator disc Property, the circumferentially direction continuous print annulus of stator disc blocks and such as passes through after being adjusted stator vane Riveting, welding, by plastics come injection encapsulated or similar in the way of process and/or be the most again connected to each other.? This, section can also be connected to each other again, wherein, however such further in conjunction with not necessarily.

Include having according to the vacuum pump of the present invention, especially turbomolecular pump and multiple pile up along rotor axis direction The stator of stator disc together and relative to stator by can supported turning in the way of axis stator rotation Son, this rotor includes armature spindle and multiple that be arranged on armature spindle, the most stacked and layout Rotor disk between stator disc, wherein, stator disc and rotor disk be respectively provided with actively pumping structure and Stator disc is set to the stator disc according to the present invention.

Stator disc especially can be made up of the part of annular respectively, and wherein, they are the most respectively by two and half Circular part composition.

Utilize the solution according to the present invention, can also use without difficulty by thicker metallic plate now The stator disc made, thus it is contemplated that along with vacuum pump and the stator of especially turbomolecular pump The increase of the diameter of dish significantly improves the pressure being applied on stator disc in the case of same pressure, its result It is, compared with the situation in the least pump, bigger pump to use thicker material. Owing to using according to the solution of the present invention, be different from scheme up to now is to be no longer necessary to use ratio Stator disc costly.The stator disc that stator disc costly processes now by lamination substitutes, thus Make cost minimization significantly.The stator disc that lamination processes has corresponding thickness, such as now at 1.5mm In the range of thickness, these stator discs can bear higher pressure when uncertain impact process.

The stator disc that lamination processes manufactures by the following, and its mode is: first punching press profile and and then Make each blade lean.When the stator vane with coherent outer ring up to now is in inclination due to blade In elastic deformation occur that self stress very big makes these blade-sections ground only elastic deformations, thus dish is immediately And can not re-use, remedy by then providing according to the incision outer ring of the present invention.By according to the present invention Between each blade, outer ring is cut, stress can be eliminated.Although each outer ring element or annulus section exist The most on the skew erect after tilting procedure, but and then they can be adjusted.By relevant Adjusting operation, can obtain desired torsion by plastic deformation by bending somewhat subsequently, this is so far Till in view of realizing for coherent outer ring.Along with cutting outer ring, the stability of stator disc fills it Measure the most impacted.But by spacer ring by rotor disk to be fixed on outer ring by the way of common in the case of, Actually do not improve the risk making stator disc bent.While it is true, in principle it is also envisioned that be Making stator disc stabilisation further, the annulus being first separated from each other of outer ring blocks example after adjusting operation As by riveting, welding, carried out injection encapsulated with plastics and be again coupled to.

Incision by the outer ring to stator disc according to the present invention, it is also possible to thicker metallic plate is processed into Stator disc, because they are also to adjust by cutting.This is it is achieved that find and bent and aspirate As well as possible trading off, more precisely, be in the case of bigger stator disc diameter between ability.Cause This, can also utilize the stator disc that superimposed layer processes in the turbomolecular pump of bigger vacuum pump or bigger Cost advantage.

Accompanying drawing explanation

Illustrate the present invention the most in conjunction with the embodiments.Wherein:

Fig. 1 illustrates the explanatory view of the illustrative embodiments of vacuum pump, can use according to this wherein Bright stator disc；

Fig. 2 illustrates the schematic of the semi-circular portion of the exemplary embodiment of the stator disc according to the present invention Top view, this embodiment is grouped into by two such semicircular parts；

Fig. 3 illustrates schematically regarding of the semicircular stator disc according to Fig. 2 in the direction of the arrow A along Fig. 2 Figure.

Reference numerals list

10 vacuum pumps

12 inlet flanges

14 pump intakes

16 housings

18 rotation axiss

20 armature spindles

22 rotor disks

24 stator discs

26 spacer rings

28 extraction area

30 arrows, gas path

32 rotor hubs

34 Hall dimension gram rotor sleeves

36 Hall dimension gram rotor sleeves

38 Hall dimension gram stator sleeves

40 Hall dimension gram stator sleeves

42 rolling bearings

44 permanent magnet bearings

The bearing half of 46 rotor-side

48 bearing half determining word side

50 permanent-magnetic clamps

52 permanent-magnetic clamps

54 journal bearing gaps

56 safety bearing or thrust bearing

The top nut of 58 circular cones

60 dishes that can aspirate

62 drive motor

64 pump discharges

66 inner rings

68 outer rings

70 stator vanes

Contact pin in 72

74 outer contact pin

76 annulus block

78 radial slots, portion of radially leaving a blank

Seamed edge in 80

82 outer seamed edges

Detailed description of the invention

Vacuum pump 10 shown in Fig. 1 includes the pump intake 14 that surrounded by inlet flange 12 and multiple pump rank Ladder portion, they are for the pump discharge not shown in the gas transmission at pump intake 14 to Fig. 1.Vacuum pump 10 Including having the stator of static housing 16 and being arranged in the rotor in housing 16, this rotor has with energy Around the armature spindle 20 that the mode of rotation axis 18 rotation is supported.

Vacuum pump 10 is configured to turbomolecular pump and includes multiple in the way of playing pumping action (pumpwirksam) the turbomolecular pump stage being coupled to one another in series, they have multiple and armature spindle 20 The turbomolecular rotor disk 22 that connects and multiple are in axial direction arranged in the middle of rotor disk 22 and are fixed on Stator disc 24 in housing 16, this stator disc maintains desired axial spacing each other by spacer ring 26.Turn Sub-disk 22 and stator disc 24 provide the axial pump of the direction sensing along arrow 30 in extraction area 26 and make With.

Vacuum pump 10 also includes that three are arranged the most alternately and are one another in series in the way of playing pumping action The Hall dimension gram pump stage coupled.The rotor side sections of Hall dimension gram pump stage includes the rotor being connected with armature spindle 20 The Hall dimension gram rotor set of wheel hub 32 and two cylindrical sleeve shapes being fastened on rotor hub 32 and be carried by Cylinder 34,36, these Halls dimension gram rotor sleeve coaxially in rotor axis 18 ground orientation and radially interlocks Ground is nested.Additionally, be provided with the Hall dimension gram stator sleeve 38,40 of two cylindrical sleeve shapes, they are same equally Axle orients in rotation axis 18 ground and the most nested.The active pumping of Hall dimension gram pump stage Surface respectively by Hall dimension gram rotor sleeve 34,36 and Hall dimension gram stator sleeve 38,40 respective The outer peripheral face of radial direction opposite in the case of constructing the dimension of Hall the most radially gram gap is formed. Here, one of them surface actively pumped the most smoothly constructs, in the current situation, Hall dimension gram turns The surface of the opposite active pumping of sub-sleeve 34 or 36 and the phase of Hall dimension gram stator sleeve 38,40 The surface of opposed active pumping has following structure portion, and it has zigzag shape around rotation axis 18 edge The groove that axial direction extends, in these grooves, by the rotation forces gas of rotor, and thus pumps gas Body.

By the rolling bearing 42 in the region of pump discharge and the permanent magnet bearing 44 in the region of pump intake Promote the supporting that can rotate to armature spindle 20.

Permanent magnet bearing 44 includes the bearing half 46 of rotor-side and the bearing half 48 of stator side, and they divide Do not include the annular lamination being made up of multiple permanent-magnetic clamps 50,52 stacked the most stackedly, its In, magnet ring 50,52 is opposite in the case of constituting journal bearing gap 54.

Among permanent magnet bearing 44, it is provided with safety bearing (Notlager) or thrust bearing 56, its structure Make for unlubricated rolling bearing and vacuum pump properly functioning in, by without dallying in the way of touching, and And first work when rotor relative stator exceedingly radial deflection, in order to form the radial direction for rotor and stop Gear, which prevent the collision of the structural member of rotor-side and the structural member of stator side.

In the region of rolling bearing 42, armature spindle 20 is provided with the top nut 58 of cone, its Having the overall diameter increased towards rolling bearing 42, this top nut is sliding with the emptier running medium storage Dynamic contact, this operation medium storage includes multiple with aspirating of running that medium, such as lubricant soak Dish 60.It is in operation, runs medium and transported via emptier from running medium storage by capillarity The top nut 58 rotated, and owing to centrifugal force is along top nut 58 along the overall diameter of top nut 58 Becoming big direction and be transported to rolling bearing 42, this operation medium such as plays the function of lubrication there.

Vacuum pump includes the driving motor 62 for driving rotor with rotating manner, and the mover of this driving motor leads to Cross armature spindle 20 to be formed.Control unit 64 is driven control and is driven motor 62.

The pump stage of turbomolecular pump provides the pump action in the direction along arrow 30 in extraction area 28.

Fig. 2 illustrates the exemplary of the stator disc 24 for vacuum pump according to the present invention with schematic top view The semi-circular portion of embodiment, this embodiment is grouped into by two such semicircular parts.As combined Fig. 1 Described in, such stator disc 24 such as can use in vacuum pump 10 or turbomolecular pump. The semicircular stator disc according to Fig. 2 is described the most again with explanatory view in the direction of arrow A Part.

Stator disc 24 includes inner ring 66, outer ring 68 and arranges stator vane 70 between which, and this is interior Circle, this outer ring and these stator vanes are respectively via interior contact pin 72 and outer contact pin 74 and inner ring 66 or outer ring 68 connect.

Here, the stator disc 24 being made up of the matrix made by metallic plate is embodied as having the stator leaf of inclination The stator disc that the lamination of sheet 70 and outer ring 68 processes, circumferentially direction, this outer ring is divided into its quantity and is equivalent to The annulus being separated from each other of the quantity of stator vane 70 blocks 76.

As appreciable in combined Fig. 2, the annulus being separated from each other of outer ring 68 blocks 76 respectively via only The outer contact pin 74 of one connects with corresponding stator vane 70.Here, the annulus being separated from each other of outer ring 68 cuts Disconnected 76 are radially aliging to relevant stator vane 70 respectively.

In the current situation, circumferentially continuous print annulus in direction is blocked 76 and is separated from each other by radial slot 78.

The annulus being separated from each other of the outer ring 68 of the stator disc 24 made blocks 76 and is positioned in parallel within altogether In same plane.

According to the exemplary design of the method according to the invention, in order to manufacture corresponding stator disc 24, The stator disc 24 being made up of the matrix formed by metallic plate is made for the stator disc that lamination processes, at this lamination The stator disc of reason has inner ring 66, outer ring 68 and arranges stator vane 70 between which, this inner ring, This outer ring and these stator vanes are respectively via interior contact pin 72 and outer contact pin 74 and inner ring 66 or outer ring 68 Connect.

The circumferentially direction, outer ring 68 of stator disc 24 is divided into its quantity and is equivalent to the quantity of stator vane 70 The annulus being separated from each other blocks 76.Stator vane 70 is made to tilt and and then it is adjusted, in order to right The desired inclination angle of stator vane 70 is adjusted and makes the annulus being separated from each other of outer ring 68 block 76 Reverting back to their initial position, in this initial position, these annulus block the most each other It is placed in abreast in common plane.

Here, the outer ring 68 of stator disc 24 can be divided into its number before or after stator vane 70 tilts The annulus being separated from each other of the quantity that amount is equivalent to stator vane 70 blocks 76.

Maintain contact pin 72,74 tilt, along with stator vane 70, the torsion that works in the case of realize right The adjustment of stator vane 70.

To this end, in order to adjust stator vane 70, the seamed edge 80 adjacent with inner ring 66 of stator vane 70 is respectively By adjust instrument (not shown) two pointed member outstanding fix, and stator vane 70 with On the seamed edge 82 that outer ring 68 is adjacent, there is two pointed member outstanding of adjustment instrument location respectively, via them, The torsion needed for stator vane 70 is caused by axial pressure.

In order to the desired inclination angle of stator vane 70 being adjusted and in order to make dividing each other of outer ring 68 The annulus opened blocks 76 initial positions reverting back to them, and stator vane 70 can be easy to when adjusting turn round Turn.

Stator disc 24 especially can be divided into its quantity by punching press, cutting, laser or milling and be equivalent to stator The annulus being separated from each other of the quantity of blade 70 blocks 76.Here, the outer ring 68 of stator disc 24 is divided into edge Circumferential direction continuous print annulus blocks 76 especially can be real by leave a blank portion or radial slot 78 of the radial direction of gap-like Existing.

But, intermediate space or discontinuities between the section of outer ring need not to be gap-like.These intermediate spaces Or the extension extended radially through of discontinuities is not compulsory or is not the most compulsory.Intermediate space or pass through Design and the shape of wearing portion are essentially arbitrarily, and particularly depend on the thickness of used metallic plate The size ground of degree and stator disc selects.

By spacer ring by stator disc 24 to be fixed on outer ring 68 by the way of common in the case of, actually The most significantly lose in terms of the rigidity of stator disc 24 and the most actually do not have raising and make stator disc The risk that bent.But, in order to improve the stability of stator disc 24 in principle it is also envisioned that stator disc The circumferentially direction continuous print annulus of 24 blocks 76 after stator vane 70 adjusts such as by riveting, weldering Connect, by plastics come injection encapsulated or similar in the way of process and/or be the most again connected to each other.The above is real The each technical characteristic executing example can combine arbitrarily, for making description succinct, not in above-described embodiment The all possible combination of each technical characteristic is all described, but, as long as the combination of these technical characteristics is not There is contradiction, be all considered to be the scope that this specification is recorded.

Embodiment described above only have expressed the several embodiments of the present invention, and it describes more concrete and detailed, But therefore can not be interpreted as the restriction to the scope of the claims of the present invention.It should be pointed out that, for this area Those of ordinary skill for, without departing from the inventive concept of the premise, it is also possible to make some deformation and Improving, these broadly fall into protection scope of the present invention.Therefore, the protection domain of patent of the present invention should be with appended Claim is as the criterion.

Claims

1. one kind is used for vacuum pump (10), is particularly useful for the stator disc (24) of turbomolecular pump, described stator Dish includes inner ring (66), outer ring (68) and arranges stator vane (70) between which, described interior Circle, described outer ring and described stator vane are respectively via contact pin (72,74) and described inner ring (66) and institute Stating outer ring (68) to connect, wherein, described stator disc (24) is embodied as the stator disc that lamination processes, described Stator disc have inclination stator vane (70) and circumferentially direction be divided into multiple annulus being separated from each other and cut The outer ring (68) of disconnected (76), the quantity that described annulus blocks especially is equivalent to described stator vane (70) Quantity.

Stator disc the most according to claim 1, it is characterised in that dividing each other of described outer ring (68) The annulus opened blocks (76) and is connected with stator vane (70) via at least one contact pin (74) respectively.

Stator disc the most according to claim 1 and 2, it is characterised in that of described outer ring (68) This separate annulus blocks (76) and is radially aliging with stator vane (70) respectively.

4. according to the stator disc according to any one of the claims, it is characterised in that described outer ring (68) Circumferentially direction continuous print annulus block (76) and be separated from each other by radial slot (78).

5. according to the stator disc according to any one of the claims, it is characterised in that described outer ring (68) The annulus being separated from each other block (76) and be positioned in parallel within common plane.

6. manufacture for a vacuum pump, in particular for the method for the stator disc (24) of turbomolecular pump, In the process, the stator disc (24) being made up of the matrix formed by metallic plate is made for lamination and processes Stator disc, described lamination process stator disc include inner ring (66), outer ring (68) and be arranged in them Between stator vane (70), described inner ring, described outer ring and described stator vane respectively via contact pin (72, 74) it is connected with described inner ring (66) and described outer ring (68), wherein, outside described stator disc (24) Circle (68) circumferentially direction is divided into multiple annulus being separated from each other and blocks (76), the number that described annulus blocks Amount is especially equivalent to the quantity of described stator vane (70), makes described stator vane (70) tilt and tight Then described stator vane (70) is adjusted, in order to desired the inclining to described stator vane (70) Oblique angle is adjusted and makes the annulus being separated from each other of described outer ring (68) block (76) reverting back to them Initial position, in described initial position, described annulus blocks to be put the most in parallel with each other In common plane.

Method the most according to claim 6, it is characterised in that the outer ring (68) of described stator disc (24) The annulus being separated from each other described in being divided into before described stator vane (70) tilts blocks (76).

Method the most according to claim 6, it is characterised in that the outer ring (68) of described stator disc (24) The annulus being separated from each other described in being divided into after described stator vane (70) tilts blocks (76).

9. according to the method according to any one of claim 6 to 8, it is characterised in that connect described in maintaining To described fixed in the case of the torsion caused along with described stator vane (70) inclination of sheet (72,74) Blades (70) is adjusted.

10. according to the method according to any one of claim 6 to 8, it is characterised in that in order to described fixed Blades (70) is adjusted, the seamed edge adjacent with described inner ring (66) of described stator vane (70) (80) fixed by two pointed member outstanding of adjustment instrument respectively, and in described stator vane (70) The seamed edge (82) adjacent with described outer ring (68) on respectively location have described adjustment instrument outstanding two Pointed member, via them, causes the required torsion of described stator vane (70) by axial pressure.

11. methods according to claim 10, it is characterised in that in order to described stator vane (70) Desired inclination angle be adjusted and in order to make the annulus being separated from each other of described outer ring (68) block (76) Reverting back to their initial position, described stator vane (70) is easy to torsion when adjusting.

12. according to the method according to any one of claim 6 to 11, it is characterised in that described stator disc (24) by punching press, cutting, laser or milling be divided into described in the annulus that is separated from each other block (76).

13. according to the method according to any one of claim 6 to 12, it is characterised in that described stator disc (24) by the radial direction constructing gap-like portion (78) of leaving a blank, outer ring (68) is divided into circumferentially that direction is even Continuous annulus blocks (76).

14. according to the method according to any one of claim 6 to 13, it is characterised in that described stator disc (24) circumferentially direction continuous print annulus blocks (76) and is being adjusted described stator vane (70) Afterwards by riveting, welding, come with plastics injection encapsulated or similar by the way of carry out stabilisation and/or the most each other Connect.

15. 1 kinds of vacuum pumps (10), especially turbomolecular pump, described vacuum pump has and includes that multiple edge turns The stator of the stator disc (24) that sub-axis (18) direction is stacked and relative to described stator with can be around The rotor that mode that described rotor axis (18) rotates is supported, described rotor include armature spindle (20) and Multiple that be arranged on described armature spindle (20), the most stacked and be arranged in described stator disc (24) rotor disk (22) between, wherein, described stator disc (24) and described rotor disk (22) are respectively There is the structure of actively pumping, and described stator disc (24) comes according to any one of claim 1 to 5 Implement and/or by manufacturing according to the method according to any one of claim 6 to 13.