JPH0264793U - - Google Patents
Info
- Publication number
- JPH0264793U JPH0264793U JP14466888U JP14466888U JPH0264793U JP H0264793 U JPH0264793 U JP H0264793U JP 14466888 U JP14466888 U JP 14466888U JP 14466888 U JP14466888 U JP 14466888U JP H0264793 U JPH0264793 U JP H0264793U
- Authority
- JP
- Japan
- Prior art keywords
- vacuum pump
- flow path
- groove
- gas flow
- stationary member
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000006835 compression Effects 0.000 description 1
- 238000007906 compression Methods 0.000 description 1
- 238000005086 pumping Methods 0.000 description 1
Landscapes
- Non-Positive Displacement Air Blowers (AREA)
Description
第１図は本考案にかかる真空ポンプの一実施例
を示す断面図、第２図はロータの一部省略平面図
、第３図はロータの断面図、第４図はロータの回
転数に対する圧縮比を示すグラフ、第５図は吸入
圧と排気速度の関係を示すグラフ、第６図は従来
の真空ポンプの一例を示す断面図である。
２……吸気口、３……排気口、７……ステータ
（静止部材）、７０……気体流路、８ａ，８ｂ，
８ｃ……ロータ、８０……羽根、８４……溝。
Fig. 1 is a cross-sectional view showing an embodiment of the vacuum pump according to the present invention, Fig. 2 is a partially omitted plan view of the rotor, Fig. 3 is a cross-sectional view of the rotor, and Fig. 4 is the compression versus rotation speed of the rotor. FIG. 5 is a graph showing the relationship between suction pressure and pumping speed, and FIG. 6 is a sectional view showing an example of a conventional vacuum pump. 2... Intake port, 3... Exhaust port, 7... Stator (stationary member), 70... Gas flow path, 8a, 8b,
8c...rotor, 80...blade, 84...groove.
Claims (1)
に羽根８０を配設するロータ８ａ，８ｂ，８ｃを
設けた真空ポンプであつて、前記ロータ８ａの円
板面を静止部材７に近接配置して、これら円板面
と静止部材７との間に、吸気側から排気側に向け
て気体の圧縮を行う溝８４を形成すると共に、該
溝８４の排気側を前記気体流路７０に連通させた
ことを特徴とする真空ポンプ。 This vacuum pump is provided with rotors 8a, 8b, and 8c having blades 80 disposed in a gas flow path 70 between an intake port 2 and an exhaust port 3, and the disk surface of the rotor 8a is connected to a stationary member 7. A groove 84 for compressing gas from the intake side to the exhaust side is formed between these disk surfaces and the stationary member 7, and the exhaust side of the groove 84 is connected to the gas flow path. 70. A vacuum pump characterized in that it communicates with 70.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14466888U JPH0264793U (en) | 1988-11-04 | 1988-11-04 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14466888U JPH0264793U (en) | 1988-11-04 | 1988-11-04 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0264793U true JPH0264793U (en) | 1990-05-15 |
Family
ID=31412575
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14466888U Pending JPH0264793U (en) | 1988-11-04 | 1988-11-04 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0264793U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2015102076A (en) * | 2013-11-28 | 2015-06-04 | エドワーズ株式会社 | Component for vacuum pump, siegbahn type exhaust mechanism and complex type vacuum pump |
-
1988
- 1988-11-04 JP JP14466888U patent/JPH0264793U/ja active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2015102076A (en) * | 2013-11-28 | 2015-06-04 | エドワーズ株式会社 | Component for vacuum pump, siegbahn type exhaust mechanism and complex type vacuum pump |
| KR20160090289A (en) * | 2013-11-28 | 2016-07-29 | 에드워즈 가부시키가이샤 | Component for vacuum pump, siegbahn type exhaust mechanism, and compound vacuum pump |
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