JPS6446495U - - Google Patents
Info
- Publication number
- JPS6446495U JPS6446495U JP14152387U JP14152387U JPS6446495U JP S6446495 U JPS6446495 U JP S6446495U JP 14152387 U JP14152387 U JP 14152387U JP 14152387 U JP14152387 U JP 14152387U JP S6446495 U JPS6446495 U JP S6446495U
- Authority
- JP
- Japan
- Prior art keywords
- flow path
- utility
- temperature
- scope
- vacuum pump
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000006835 compression Effects 0.000 description 2
- 238000007906 compression Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 1
- 239000000376 reactant Substances 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Description
第１図は、本考案の一実施例の断面図、第２図
は、反応ガスの蒸気圧曲線図である。
１……駆動軸、２……ケーシング、３……吸気
口、４……排気口、５……軸受、６……モータ、
７……遠心圧縮ポンプ、８……渦流圧縮ポンプ、
９……吸水口、１０……排水口、１１……容器、
１２……サーキユレータ、１３……ロータ。
FIG. 1 is a sectional view of an embodiment of the present invention, and FIG. 2 is a vapor pressure curve diagram of a reactant gas. 1... Drive shaft, 2... Casing, 3... Intake port, 4... Exhaust port, 5... Bearing, 6... Motor,
7...Centrifugal compression pump, 8...Vortex compression pump,
9... Water inlet, 10... Drain port, 11... Container,
12...Circulator, 13...Rotor.
Claims (1)
定できる手段をもつたことを特徴とする真空ポン
プ。 A vacuum pump characterized by having means for arbitrarily setting the temperature of a stator constituting an exhaust flow path.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14152387U JPS6446495U (en) | 1987-09-18 | 1987-09-18 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14152387U JPS6446495U (en) | 1987-09-18 | 1987-09-18 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6446495U true JPS6446495U (en) | 1989-03-22 |
Family
ID=31406659
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14152387U Pending JPS6446495U (en) | 1987-09-18 | 1987-09-18 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6446495U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH03145598A (en) * | 1989-10-31 | 1991-06-20 | Fujitsu Ltd | Turbo pump |
| EP0451708A2 (en) * | 1990-04-06 | 1991-10-16 | Hitachi, Ltd. | Vacuum pump |
-
1987
- 1987-09-18 JP JP14152387U patent/JPS6446495U/ja active Pending
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH03145598A (en) * | 1989-10-31 | 1991-06-20 | Fujitsu Ltd | Turbo pump |
| EP0451708A2 (en) * | 1990-04-06 | 1991-10-16 | Hitachi, Ltd. | Vacuum pump |
| EP0451708A3 (en) * | 1990-04-06 | 1992-01-08 | Hitachi, Ltd. | Vacuum pump |