JPS63118394U - - Google Patents
Info
- Publication number
- JPS63118394U JPS63118394U JP864287U JP864287U JPS63118394U JP S63118394 U JPS63118394 U JP S63118394U JP 864287 U JP864287 U JP 864287U JP 864287 U JP864287 U JP 864287U JP S63118394 U JPS63118394 U JP S63118394U
- Authority
- JP
- Japan
- Prior art keywords
- housing
- attached
- wall surface
- compression pump
- exhaust port
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000006835 compression Effects 0.000 claims description 6
- 238000007906 compression Methods 0.000 claims description 6
- 239000002131 composite material Substances 0.000 claims 1
- 150000001875 compounds Chemical class 0.000 description 1
Landscapes
- Non-Positive Displacement Air Blowers (AREA)
Description
第１図は本考案に係わる複合ターボ型真空ポン
プの一実施例を示す縦断側面図、第２図は渦流圧
縮ポンプ段の横断平面図、第３図は同渦流圧縮ポ
ンプの羽根車を示す側面図、第４図は従来の多段
遠心型真空ポンプを示す縦断側面図である。
１ａ，１ｂ，１ｃ，１ｄ，１ｅ……多段の遠心
圧縮ポンプの羽根車、２……渦流圧縮ポンプの羽
根車、４……回転軸、８ｂ……気体旋回流路、１
４……吸気口、１５……排気口、１６……ハウジ
ング。
Fig. 1 is a longitudinal side view showing an embodiment of the compound turbo vacuum pump according to the present invention, Fig. 2 is a cross-sectional plan view of the vortex compression pump stage, and Fig. 3 is a side view showing the impeller of the vortex compression pump. 4 are longitudinal sectional side views showing a conventional multi-stage centrifugal vacuum pump. 1a, 1b, 1c, 1d, 1e... Impeller of multi-stage centrifugal compression pump, 2... Impeller of vortex compression pump, 4... Rotating shaft, 8b... Gas swirl flow path, 1
4...Intake port, 15...Exhaust port, 16...Housing.
Claims (1)
可能に支持された回転軸に取付けた羽根車と前記
ハウジングの内壁面に取付けた固定円板または静
翼とを有する多段の遠心圧縮ポンプ段と、前記ハ
ウジングの内壁面に取付けた気体旋回流路と、前
記回転軸に取付けた羽根車を有する少なくとも１
段の渦流圧縮ポンプ段とを前記吸気口から前記排
気口に至る間の前記ハウジング内に順次配設した
ことを特徴とする複合ターボ型真空ポンプ。 a multistage centrifugal compression pump stage having an impeller attached to a rotary shaft rotatably supported in a housing having an intake port and an exhaust port, and a stationary disk or stationary vane attached to an inner wall surface of the housing; At least one gas swirling flow path attached to the inner wall surface of the housing and an impeller attached to the rotating shaft.
1. A composite turbo vacuum pump, characterized in that a plurality of vortex compression pump stages are sequentially arranged within the housing between the intake port and the exhaust port.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP864287U JPS63118394U (en) | 1987-01-26 | 1987-01-26 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP864287U JPS63118394U (en) | 1987-01-26 | 1987-01-26 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63118394U true JPS63118394U (en) | 1988-07-30 |
Family
ID=30793209
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP864287U Pending JPS63118394U (en) | 1987-01-26 | 1987-01-26 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63118394U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0275796A (en) * | 1988-09-12 | 1990-03-15 | Osaka Shinku Kiki Seisakusho:Kk | Composite vacuum pump |
| EP2088325A3 (en) * | 2008-02-05 | 2012-08-29 | Ebara Corporation | Turbo vacuum pump |
-
1987
- 1987-01-26 JP JP864287U patent/JPS63118394U/ja active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0275796A (en) * | 1988-09-12 | 1990-03-15 | Osaka Shinku Kiki Seisakusho:Kk | Composite vacuum pump |
| EP2088325A3 (en) * | 2008-02-05 | 2012-08-29 | Ebara Corporation | Turbo vacuum pump |