JPH0171195U - - Google Patents
Info
- Publication number
- JPH0171195U JPH0171195U JP1987166613U JP16661387U JPH0171195U JP H0171195 U JPH0171195 U JP H0171195U JP 1987166613 U JP1987166613 U JP 1987166613U JP 16661387 U JP16661387 U JP 16661387U JP H0171195 U JPH0171195 U JP H0171195U
- Authority
- JP
- Japan
- Prior art keywords
- rotating shaft
- housing
- pump stage
- exhaust port
- intake port
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 150000001875 compounds Chemical class 0.000 claims description 3
- 230000006835 compression Effects 0.000 claims description 3
- 238000007906 compression Methods 0.000 claims description 3
Landscapes
- Non-Positive Displacement Air Blowers (AREA)
Description
第１図は本考案による複合型真空ポンプの一実
施例を示す縦断面図、第２図は遠心圧縮ポンプ段
の羽根車の平面図、第３図は従来の複合型真空ポ
ンプを示す縦断面図、第４図はねじ溝式ポンプ段
の静止円板の平面図である。
１…遠心圧縮ポンプ段、２…ネジポンプ段、３
…回転軸、１２…吸気口、１３…排気口、１４…
ケーシング。
Fig. 1 is a longitudinal cross-sectional view showing an embodiment of a compound vacuum pump according to the present invention, Fig. 2 is a plan view of an impeller of a centrifugal compression pump stage, and Fig. 3 is a longitudinal cross-section showing a conventional compound vacuum pump. FIG. 4 is a plan view of the stationary disk of the threaded groove type pump stage. 1...Centrifugal compression pump stage, 2...Screw pump stage, 3
...Rotating shaft, 12...Intake port, 13...Exhaust port, 14...
casing.
Claims (1)
可能に支持された回転軸に、遠心圧縮ポンプ段と
ネジポンプ段を上記吸気口から上記排気口までの
間の上記ハウジング内に上記の順に配置して、上
記回転軸により支持したことを特徴とする複合型
真空ポンプ。 A centrifugal compression pump stage and a screw pump stage are disposed in the above order in the housing between the intake port and the exhaust port on a rotating shaft rotatably supported within a housing having an intake port and an exhaust port. , a compound vacuum pump characterized in that it is supported by the rotating shaft.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987166613U JPH0171195U (en) | 1987-10-30 | 1987-10-30 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987166613U JPH0171195U (en) | 1987-10-30 | 1987-10-30 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0171195U true JPH0171195U (en) | 1989-05-12 |
Family
ID=31454154
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987166613U Pending JPH0171195U (en) | 1987-10-30 | 1987-10-30 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0171195U (en) |
-
1987
- 1987-10-30 JP JP1987166613U patent/JPH0171195U/ja active Pending
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JPH0171195U (en) | ||
| JPS63118392U (en) | ||
| JPH0174398U (en) | ||
| JPS63118393U (en) | ||
| JPH0176588U (en) | ||
| JPS62184190U (en) | ||
| JPS6456597U (en) | ||
| JPS63125198U (en) | ||
| JPS6184199U (en) | ||
| JPS5935690U (en) | vacuum pump vane | |
| JPS6298794U (en) | ||
| JPS62183089U (en) | ||
| JPS60167190U (en) | turbo pump | |
| JPS639485U (en) | ||
| JPS6036586U (en) | Oil-free rotary vane pump | |
| JPS6036585U (en) | vane pump | |
| JPS62133988U (en) | ||
| JPS6254292U (en) | ||
| JPS6444399U (en) | ||
| JPS63119881U (en) | ||
| JPS5985400U (en) | pump | |
| JPS5984291U (en) | compressor | |
| JPH046783U (en) | ||
| JPS5859987U (en) | vane pump | |
| JPS6066886U (en) | Vane type pump device |