JPS63118392U - - Google Patents
Info
- Publication number
- JPS63118392U JPS63118392U JP925787U JP925787U JPS63118392U JP S63118392 U JPS63118392 U JP S63118392U JP 925787 U JP925787 U JP 925787U JP 925787 U JP925787 U JP 925787U JP S63118392 U JPS63118392 U JP S63118392U
- Authority
- JP
- Japan
- Prior art keywords
- rotary shaft
- housing
- vacuum pump
- rotatably supported
- screw
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000006835 compression Effects 0.000 claims description 2
- 238000007906 compression Methods 0.000 claims description 2
Landscapes
- Non-Positive Displacement Air Blowers (AREA)
Description
第１図は本考案に係わるねじ式真空ポンプの一
実施例を示す縦断側面図、第２図は従来のねじ式
真空ポンプを示す縦断側面図である。
１……圧縮式ポンプ、２……回転軸、３……ス
ラストデイスク、４，５，６……ガスベアリング
、１５……ハウジング。
FIG. 1 is a vertical side view showing an embodiment of a screw type vacuum pump according to the present invention, and FIG. 2 is a vertical side view showing a conventional screw type vacuum pump. 1... Compression pump, 2... Rotating shaft, 3... Thrust disk, 4, 5, 6... Gas bearing, 15... Housing.
Claims (1)
可能に支持された回転軸と、同回転軸に取付けら
れたねじ式圧縮ポンプとを具えたねじ式真空ポン
プにおいて、前記回転軸を前記ハウジング内に回
転可能に支持するガスベアリングを具えているこ
とを特徴としたねじ式真空ポンプ。 A screw type vacuum pump comprising a rotary shaft rotatably supported within a housing having an intake port and an exhaust port, and a screw type compression pump attached to the rotary shaft, the rotary shaft being mounted within the housing. A screw-type vacuum pump characterized by having a rotatably supported gas bearing.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP925787U JPS63118392U (en) | 1987-01-27 | 1987-01-27 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP925787U JPS63118392U (en) | 1987-01-27 | 1987-01-27 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63118392U true JPS63118392U (en) | 1988-07-30 |
Family
ID=30794403
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP925787U Pending JPS63118392U (en) | 1987-01-27 | 1987-01-27 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63118392U (en) |
-
1987
- 1987-01-27 JP JP925787U patent/JPS63118392U/ja active Pending