JPS63132896U - - Google Patents
Info
- Publication number
- JPS63132896U JPS63132896U JP2426687U JP2426687U JPS63132896U JP S63132896 U JPS63132896 U JP S63132896U JP 2426687 U JP2426687 U JP 2426687U JP 2426687 U JP2426687 U JP 2426687U JP S63132896 U JPS63132896 U JP S63132896U
- Authority
- JP
- Japan
- Prior art keywords
- blade
- blades
- rotor blades
- stator blades
- turbo
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Non-Positive Displacement Air Blowers (AREA)
Description
第１図は本考案に係わるターボ分子ポンプの一
実施例を示す縦断側面図、第２図は従来のターボ
分子ポンプを示す縦断側面図である。
１……ケーシング、２……吸気口、３……排気
口、４……静翼、４ａ……静翼４の翼形成部、４
ｂ……静翼４の翼基端部、５……動翼、５ａ……
動翼５の翼形成部、５ｂ……惑翼５の翼基端部、
６，７……回転体。
FIG. 1 is a longitudinal side view showing an embodiment of a turbo-molecular pump according to the present invention, and FIG. 2 is a longitudinal side view showing a conventional turbo-molecular pump. DESCRIPTION OF SYMBOLS 1...Casing, 2...Intake port, 3...Exhaust port, 4...Stator blade, 4a...Blade forming part of stationary blade 4, 4
b...Blade base end of stationary blade 4, 5...Moving blade, 5a...
Blade forming part of the rotor blade 5, 5b...blade base end of the rotor blade 5,
6,7...Rotating body.
Claims (1)
に配設したターボ分子ポンプにおいて、前記各動
翼及び前記各静翼のうち、少なくとも一方の翼形
状部先端を相手側の翼基端部よりも半径方向に延
長したことを特徴とするターボ分子ポンプ。 In a turbo-molecular pump in which rotor blades on the rotating body side and stator blades on the casing side are arranged alternately, the tip of the blade-shaped part of at least one of the rotor blades and the stator blades is connected to the base end of the blade of the other side. A turbomolecular pump characterized by a radial extension.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2426687U JPS63132896U (en) | 1987-02-23 | 1987-02-23 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2426687U JPS63132896U (en) | 1987-02-23 | 1987-02-23 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63132896U true JPS63132896U (en) | 1988-08-30 |
Family
ID=30823340
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2426687U Pending JPS63132896U (en) | 1987-02-23 | 1987-02-23 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63132896U (en) |
-
1987
- 1987-02-23 JP JP2426687U patent/JPS63132896U/ja active Pending