JPS61157195U - - Google Patents
Info
- Publication number
- JPS61157195U JPS61157195U JP3991385U JP3991385U JPS61157195U JP S61157195 U JPS61157195 U JP S61157195U JP 3991385 U JP3991385 U JP 3991385U JP 3991385 U JP3991385 U JP 3991385U JP S61157195 U JPS61157195 U JP S61157195U
- Authority
- JP
- Japan
- Prior art keywords
- rotor blades
- port side
- molecular pump
- row
- outer diameter
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000007423 decrease Effects 0.000 claims 1
Landscapes
- Non-Positive Displacement Air Blowers (AREA)
Description
第１図は本考案に係わるターボ分子ポンプの一
実施例を示す縦断側面図、第２図は従来のターボ
分子ポンプを示す縦断側面図である。
２……吸気口、３……排気口、５′……動翼列
。
FIG. 1 is a longitudinal side view showing an embodiment of a turbo-molecular pump according to the present invention, and FIG. 2 is a longitudinal side view showing a conventional turbo-molecular pump. 2... Intake port, 3... Exhaust port, 5'... Moving blade row.
Claims (1)
向かい次第に小さくしたことを特徴とするターボ
分子ポンプ。 A turbo molecular pump characterized in that the outer diameter of the rotor blades gradually decreases from the intake port side to the exhaust port side of the row of rotor blades.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3991385U JPS61157195U (en) | 1985-03-22 | 1985-03-22 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3991385U JPS61157195U (en) | 1985-03-22 | 1985-03-22 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS61157195U true JPS61157195U (en) | 1986-09-29 |
Family
ID=30548306
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3991385U Pending JPS61157195U (en) | 1985-03-22 | 1985-03-22 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61157195U (en) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6028297B2 (en) * | 1979-08-08 | 1985-07-04 | 不動化学工業株式会社 | Method for producing phenolic resin foam |
-
1985
- 1985-03-22 JP JP3991385U patent/JPS61157195U/ja active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6028297B2 (en) * | 1979-08-08 | 1985-07-04 | 不動化学工業株式会社 | Method for producing phenolic resin foam |