JPS63162990U - - Google Patents
Info
- Publication number
- JPS63162990U JPS63162990U JP5482187U JP5482187U JPS63162990U JP S63162990 U JPS63162990 U JP S63162990U JP 5482187 U JP5482187 U JP 5482187U JP 5482187 U JP5482187 U JP 5482187U JP S63162990 U JPS63162990 U JP S63162990U
- Authority
- JP
- Japan
- Prior art keywords
- view
- stator vane
- vane stage
- bearing
- sectional
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010586 diagram Methods 0.000 description 2
Landscapes
- Non-Positive Displacement Air Blowers (AREA)
Description
第１図は、本考案の一実施例に用いられる静翼
段の斜視図、第２図は上記静翼段の部分拡大図、
第３図は上記実施例の断面図、第４図は上記実施
例に用いられる静翼の断面図である。
１……リング状平板、２……円弧状静翼、３…
…動翼、４……ロータ、５……中心軸、６……ベ
アリング、７……ベアリング、８……モータ、９
……ケーシング、Ａ１……吸入分子の移動方向、
Ａ２……排気分子の移動方向。
FIG. 1 is a perspective view of a stator vane stage used in an embodiment of the present invention, FIG. 2 is a partially enlarged view of the stator vane stage,
FIG. 3 is a sectional view of the above embodiment, and FIG. 4 is a sectional view of a stationary blade used in the above embodiment. 1...Ring-shaped flat plate, 2...Circular stationary blade, 3...
... Moving blade, 4 ... Rotor, 5 ... Central shaft, 6 ... Bearing, 7 ... Bearing, 8 ... Motor, 9
...Casing, A1 ...Movement direction of inhaled molecules,
A2 ...Direction of movement of exhaust molecules.
補正 昭６２．７．３ 図面の簡単な説明を次のように補正する。Correction 1986.7.3 The brief description of the drawing has been amended as follows.
【図面の簡単な説明】
第１図は、本考案の一実施例に用いられる静翼
段の斜視図、第２図は上記静翼段の部分拡大図、
第３図は上記実施例の断面図、第４図は上記実施
例に用いられる静翼の断面図、第５図はターボ分
子ポンプの説明図であつて、第５図Ａはターボ分
子ポンプ全体の説明図、第５図Ｂは動翼と静翼の
部分の説明図である。
１……リング状平板、２……円弧状静翼、３…
…動翼、４……ロータ、５……中心軸、６……ベ
アリング、７……ベアリング、８……モータ、９
……ケーシング、Ａ１……吸入分子の移動方向、
Ａ２……排気分子の移動方向。[BRIEF DESCRIPTION OF THE DRAWINGS] FIG. 1 is a perspective view of a stator vane stage used in an embodiment of the present invention, FIG. 2 is a partially enlarged view of the stator vane stage,
FIG. 3 is a sectional view of the above embodiment, FIG. 4 is a sectional view of the stationary blade used in the above embodiment, FIG. 5 is an explanatory diagram of the turbo molecular pump, and FIG. 5 A is the entire turbo molecular pump. FIG. 5B is an explanatory diagram of the rotor blades and stator blades. 1...Ring-shaped flat plate, 2...Circular stationary blade, 3...
... Moving blade, 4 ... Rotor, 5 ... Central shaft, 6 ... Bearing, 7 ... Bearing, 8 ... Motor, 9
...Casing, A1 ...Movement direction of inhaled molecules,
A2 ...Direction of movement of exhaust molecules.
Claims (1)
とも一部に用いたことを特徴とするターボ分子ポ
ンプ。 A turbo-molecular pump characterized in that a stator vane stage composed of arc-shaped blades is used at least in part.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5482187U JPS63162990U (en) | 1987-04-13 | 1987-04-13 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5482187U JPS63162990U (en) | 1987-04-13 | 1987-04-13 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63162990U true JPS63162990U (en) | 1988-10-25 |
Family
ID=30882167
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5482187U Pending JPS63162990U (en) | 1987-04-13 | 1987-04-13 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63162990U (en) |
-
1987
- 1987-04-13 JP JP5482187U patent/JPS63162990U/ja active Pending