JPS6413295U - - Google Patents
Info
- Publication number
- JPS6413295U JPS6413295U JP10813687U JP10813687U JPS6413295U JP S6413295 U JPS6413295 U JP S6413295U JP 10813687 U JP10813687 U JP 10813687U JP 10813687 U JP10813687 U JP 10813687U JP S6413295 U JPS6413295 U JP S6413295U
- Authority
- JP
- Japan
- Prior art keywords
- case
- inner case
- outer case
- spindle shaft
- lower outer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000005339 levitation Methods 0.000 claims 1
- 230000002093 peripheral effect Effects 0.000 claims 1
- 238000007789 sealing Methods 0.000 claims 1
Landscapes
- Non-Positive Displacement Air Blowers (AREA)
Description
第１図はこの考案に係るターボ分子ポンプの縦
断面図、第２図は従来のターボ分子ポンプを示す
縦断面図である。
３１……内ケース、３２……下部外ケース、３
３……上部外ケース、３６……スピンドル軸、３
７……上部ラジアル磁気軸受、３８……下部ラジ
アル磁気軸受、３９……スラスト磁気軸受、４２
……モータ、４６……動翼、５１……導入孔、５
２……排気孔、５５……空間、５６……Ｏリング
、６０……静翼。
FIG. 1 is a longitudinal sectional view of a turbo-molecular pump according to this invention, and FIG. 2 is a longitudinal sectional view of a conventional turbo-molecular pump. 31...Inner case, 32...Lower outer case, 3
3... Upper outer case, 36... Spindle shaft, 3
7... Upper radial magnetic bearing, 38... Lower radial magnetic bearing, 39... Thrust magnetic bearing, 42
... Motor, 46 ... Moving blade, 51 ... Introduction hole, 5
2...Exhaust hole, 55...Space, 56...O ring, 60...Stator blade.
Claims (1)
回転が与えられるスピンドル軸に動翼を取付け、
静翼とこの静翼に対して回転する前記動翼とによ
つて高真空を発生させるようにしたターボ分子ポ
ンプにおいて、ポンプのケースが、内ケースと、
この内ケースに対して外嵌する下部外ケースと、
内ケースを覆うように下部外ケース上へ外嵌固定
する上部外ケースとからなり、内ケース内に、ス
ピンドル軸と、磁気軸受と、この磁気軸受の制御
用位置センサーと、非常用ドライベアリングとモ
ータを設け、内ケース上に突出するスピンドル軸
に動翼を取付け、上部外ケースの内周面に前記動
翼に対する静翼が固定され、下部外ケースは、電
力導入端子と非反応性ガスの導入孔と排気孔を備
え、電力導入部に接続されている空間と排気孔に
接続されている空間とを、内ケースとの嵌合面間
に組込んだシール部材で遮断したことを特徴とす
るターボ分子ポンプ。 The rotor blades are attached to a spindle shaft that is supported by magnetic levitation bearings and rotated by a motor.
In a turbomolecular pump that generates a high vacuum by a stator vane and the rotor blade that rotates with respect to the stator vane, the pump case includes an inner case,
a lower outer case that fits externally to the inner case;
It consists of an upper outer case that is fitted onto the lower outer case so as to cover the inner case, and inside the inner case there are a spindle shaft, a magnetic bearing, a position sensor for controlling the magnetic bearing, and an emergency dry bearing. A motor is provided, rotor blades are attached to the spindle shaft protruding above the inner case, stator blades for the rotor blades are fixed to the inner peripheral surface of the upper outer case, and the lower outer case is connected to the power introduction terminal and the non-reactive gas It is characterized by having an introduction hole and an exhaust hole, and the space connected to the power introduction part and the space connected to the exhaust hole are separated by a sealing member incorporated between the fitting surface with the inner case. turbo molecular pump.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10813687U JPS6413295U (en) | 1987-07-13 | 1987-07-13 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10813687U JPS6413295U (en) | 1987-07-13 | 1987-07-13 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6413295U true JPS6413295U (en) | 1989-01-24 |
Family
ID=31343184
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10813687U Pending JPS6413295U (en) | 1987-07-13 | 1987-07-13 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6413295U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2014080981A (en) * | 2009-08-28 | 2014-05-08 | Edwards Kk | Vacuum pump |
-
1987
- 1987-07-13 JP JP10813687U patent/JPS6413295U/ja active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2014080981A (en) * | 2009-08-28 | 2014-05-08 | Edwards Kk | Vacuum pump |
| EP2472120B1 (en) * | 2009-08-28 | 2022-11-30 | Edwards Japan Limited | Vacuum pump and member used for vacuum pump |
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