JPS63126616U - - Google Patents

Info

Publication number
JPS63126616U
JPS63126616U JP1987017707U JP1770787U JPS63126616U JP S63126616 U JPS63126616 U JP S63126616U JP 1987017707 U JP1987017707 U JP 1987017707U JP 1770787 U JP1770787 U JP 1770787U JP S63126616 U JPS63126616 U JP S63126616U
Authority
JP
Japan
Prior art keywords
rotor
rotating body
bearings
impellers
blades
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1987017707U
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1987017707U priority Critical patent/JPS63126616U/ja
Publication of JPS63126616U publication Critical patent/JPS63126616U/ja
Pending legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C32/00—Bearings not otherwise provided for
    • F16C32/04—Bearings not otherwise provided for using magnetic or electric supporting means
    • F16C32/0406—Magnetic bearings
    • F16C32/044—Active magnetic bearings
    • F16C32/0442—Active magnetic bearings with devices affected by abnormal, undesired or non-standard conditions such as shock-load, power outage, start-up or touchdown
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C19/00—Bearings with rolling contact, for exclusively rotary movement
    • F16C19/50—Other types of ball or roller bearings
    • F16C19/507—Other types of ball or roller bearings with rolling elements journaled in one of the moving parts, e.g. stationary rollers to support a rotating part
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C39/00—Relieving load on bearings
    • F16C39/02—Relieving load on bearings using mechanical means
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C19/00—Bearings with rolling contact, for exclusively rotary movement
    • F16C19/02—Bearings with rolling contact, for exclusively rotary movement with bearing balls essentially of the same size in one or more circular rows
    • F16C19/04—Bearings with rolling contact, for exclusively rotary movement with bearing balls essentially of the same size in one or more circular rows for radial load mainly
    • F16C19/06—Bearings with rolling contact, for exclusively rotary movement with bearing balls essentially of the same size in one or more circular rows for radial load mainly with a single row or balls

Description

【図面の簡単な説明】[Brief explanation of the drawing]

第１図は、本考案の一実施例のターボ分子ポン
プの断面図、第２図は、軸受部の拡大図、第３図
、第４図は、他の実施例を示す断面図である。 １……ケーシング、２ａ，２ｂ……ラジアル電
磁軸受、３……スラスト軸受、４……ロータ、７
……保護用ベアリング、８……テーパリング、９
……ミニチユアベアリング。 FIG. 1 is a sectional view of a turbomolecular pump according to an embodiment of the present invention, FIG. 2 is an enlarged view of a bearing portion, and FIGS. 3 and 4 are sectional views showing other embodiments. 1... Casing, 2a, 2b... Radial electromagnetic bearing, 3... Thrust bearing, 4... Rotor, 7
...Protective bearing, 8... Taper ring, 9
...Miniature bearing.

Claims (1)

【実用新案登録請求の範囲】[Scope of utility model registration request] ロータと羽根車あるいは翼を備え、前記回転体
を磁気的な径方向軸受と軸方向軸受で支承し、駆
動モータで前記ロータを高速回転させるようにし
た磁気浮上の回転体において、ロータと支持部と
の接触部をテーパにしたことを特徴とする電磁軸
受装置。 In a magnetically levitated rotating body that includes a rotor and impellers or blades, the rotating body is supported by magnetic radial bearings and axial bearings, and the rotor is rotated at high speed by a drive motor. An electromagnetic bearing device characterized by having a tapered contact portion.
JP1987017707U 1987-02-12 1987-02-12 Pending JPS63126616U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1987017707U JPS63126616U (en) 1987-02-12 1987-02-12

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1987017707U JPS63126616U (en) 1987-02-12 1987-02-12

Publications (1)

Publication Number Publication Date
JPS63126616U true JPS63126616U (en) 1988-08-18

Family

ID=30810705

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1987017707U Pending JPS63126616U (en) 1987-02-12 1987-02-12

Country Status (1)

Country Link
JP (1) JPS63126616U (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1997013985A1 (en) * 1995-10-11 1997-04-17 Seiko Seiki Kabushiki Kaisha Magnetic bearing device
JP2006508315A (en) * 2002-11-29 2006-03-09 ライボルト　ヴァークウム　ゲゼルシャフト　ミット　ベシュレンクテル　ハフツング Ball bearings and vacuum pumps equipped with this type of bearing

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1997013985A1 (en) * 1995-10-11 1997-04-17 Seiko Seiki Kabushiki Kaisha Magnetic bearing device
JP2006508315A (en) * 2002-11-29 2006-03-09 ライボルト　ヴァークウム　ゲゼルシャフト　ミット　ベシュレンクテル　ハフツング Ball bearings and vacuum pumps equipped with this type of bearing

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